CN110371952B - Flexible resistance type humidity sensor and preparation method thereof - Google Patents
Flexible resistance type humidity sensor and preparation method thereof Download PDFInfo
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- CN110371952B CN110371952B CN201910596948.0A CN201910596948A CN110371952B CN 110371952 B CN110371952 B CN 110371952B CN 201910596948 A CN201910596948 A CN 201910596948A CN 110371952 B CN110371952 B CN 110371952B
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Abstract
The invention discloses a flexible resistance type humidity sensor and a preparation method thereof. The preparation method comprises the following steps: on the surface of a flexible substrate, utilizing 2-5W of CO2Laser etching the graphene conductive pattern by a laser; both ends of the formed graphene pattern were connected to an external resistance measurement circuit. The humidity sensor is ultra-light and thin, and has a simple structure; the pattern design has a large development space, and different performance performances can be given by designing different patterns; the printing technology can be adopted for preparation, and the large-scale production and preparation are easy to realize; has higher precision and flexibility.
Description
Technical Field
The invention relates to a sensor and a manufacturing method thereof, in particular to a flexible resistance type humidity sensor and a manufacturing method thereof.
Background
Humidity sensors for detecting humidity have wide applications, such as military, meteorological, agricultural, industrial control, medical equipment, etc., since humidity has an important influence on actual activities in various situations. The humidity sensitive element of the humidity sensor can be mainly divided into a resistance type and a capacitance type, the traditional humidity sensor mainly adopts ceramics, organic polymers, semiconductor materials and the like, the problems of mechanical brittleness, rigidity, insufficient sensitivity and the like exist, and the use scene is limited.
In recent years, with the rapid development of new flexible sensors and new nanomaterials, flexible humidity sensors and humidity sensors based on nanomaterials appear in succession, the flexible sensors have the advantage of high flexibility, the nanomaterial humidity sensors have the advantage of ultrahigh sensitivity, and how to realize the flexible humidity sensors based on nanomaterials is one of the research hotspots of the humidity sensors in recent years.
Most of the existing flexible nano material humidity sensor devices adopt a micro electro mechanical system or a transistor process, the finished product process is fine, and high precision and flexibility can be achieved.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the invention aims to provide the flexible resistance-type humidity sensor with high sensitivity, and the invention also aims to provide the preparation method of the flexible resistance-type humidity sensor with low difficulty and low cost.
The technical scheme is as follows: the invention relates to a flexible resistance type humidity sensor which comprises a flexible substrate, a graphene pattern layer and an external measuring circuit, wherein the graphene pattern layer is arranged on the flexible substrate, the graphene pattern layer is connected with the external measuring circuit, and patterns of the graphene pattern layer are communicated. The graphene pattern can be designed according to needs, and has high flexibility, so that the variation range, the precision and the like of the resistance of the graphene pattern can be adjusted.
The flexible substrate is a flexible film with the same moisture absorption linear expansion property as polyimide, and the flexible film is polyimide or sodium polyacrylate.
The graphene pattern layer is prepared by directly carbonizing the flexible substrate by laser etching. Or the graphene pattern layer is prepared by covering the graphene oxide layer on the surface of the flexible film and then reducing the graphene oxide layer through laser etching, the flexible substrate is not required to be stably and effectively reduced into graphene under laser, the flexible substrate is not required to be directly treated, and the substrate is prevented from being damaged by the laser. The graphene oxide layer is formed by dripping graphene oxide dispersion liquid on the surface of the flexible film and drying. Meanwhile, after the graphene is prepared, the residual graphene oxide needs to be cleaned by deionized water, so that interference on subsequent measurement is prevented.
The external measuring circuit comprises a resistance measuring device and a relative humidity display device. The resistance of the graphene pattern layer decreases as the pattern stripe width increases.
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(a) on the surface of a flexible substrate, CO with the use power of 2-5W is utilized2Laser etching the graphene conductive pattern by a laser;
(b) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
The working principle is as follows: because flexible base itself possesses the moisture absorption linear expansion nature, consequently along with the linear change of humidity, the size of flexible base will follow linear change to make the graphite alkene pattern take place linear stretching change, caused the resistance of graphite alkene pattern to take place the regularity and change, this change relation curve that just can obtain humidity and graphite alkene pattern resistance and humidity. Based on this curve, just can realize the humidity that laser preparation graphite alkene flexible resistance formula humidity transducer detected the function.
Has the advantages that: compared with the prior art, the invention has the following remarkable characteristics: the humidity sensor is ultra-light and thin, and has a simple structure; the pattern design has a large development space, and different performance performances can be given by designing different patterns; the printing preparation can be adopted, and the large-scale production is easy to realize; has higher precision and flexibility.
Drawings
FIG. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural diagram of a graphene pattern layer 2 according to the present invention.
FIG. 3 is a piezoresistive property test curve of a sensor manufactured in example 4 of the present invention.
In the specific implementation mode, as shown in fig. 1-2, the patterns are formed by a graphene pattern layer 2 which is communicated with a flexible substrate 3, and two ends of the graphene pattern layer 2 are connected with an external measuring circuit 1 for measuring resistance and are connected to a relative humidity display module. External measuring circuit 1 can measure resistance and output signal sends and gives relative humidity display module, and relative humidity display module can turn into relative humidity and show with data. The external measuring circuit 1 comprises a resistance measuring device and a relative humidity display device. The resistance of the graphene pattern layer 2 decreases as the pattern stripe width increases. In the actual measurement process, the flexible film with the moisture absorption linear expansion property shows different expansion conditions according to different humidity, so that the resistance of the graphene pattern shows different values, and corresponding relative humidity can be obtained and displayed according to the values. The flexible substrate 3 is a flexible film having the same moisture-absorbing linear expansion property as polyimide.
In the following examples, CO2The maximum power of the laser is 50W.
Example 1
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) on the surface of the polyimide flexible film, using CO with the power of 4W2Laser etching the graphene conductive pattern by a laser;
(2) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Example 2
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) on the surface of the sodium polyacrylate flexible film, using CO with the power of 5W2Laser etching the graphene conductive pattern by a laser;
(2) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Example 3
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) on the surface of the polyimide flexible film, using CO with the power of 4W2Laser etching the graphene conductive pattern by a laser;
(2) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Example 4
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) dripping graphene oxide dispersion liquid on the surface of the polyimide flexible film, drying, and using CO with the power of 2W2Laser etching the graphene conductive pattern by a laser;
(2) placing the flexible substrate in deionized water for soaking, and cleaning residual graphene oxide to prevent interference on subsequent measurement;
(3) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Under the preparation method, the graphene pattern is controlled as shown in fig. 2, the sensor is subjected to tensile test, and the widths of straight line segments of the pattern are controlled to be 2mm, 4mm and 8mm, which respectively correspond to three different resistance response characteristic curves, as shown in fig. 3. As can be seen from the graph, the resistance of the pattern decreases as the width of the line segment increases, with the same pattern.
Example 5
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) dripping graphene oxide dispersion liquid on the surface of the sodium polyacrylate flexible film, drying, and using CO with the power of 3W2Laser etching the graphene conductive pattern by a laser;
(2) placing the flexible substrate in deionized water for soaking, and cleaning residual graphene oxide to prevent interference on subsequent measurement;
(3) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Example 6
The preparation method of the flexible resistance-type humidity sensor comprises the following steps:
(1) dripping graphene oxide dispersion liquid on the surface of the polyimide flexible film, drying, and using CO with the power of 2W2Laser etching the graphene conductive pattern by a laser;
(2) placing the flexible substrate in deionized water for soaking, and cleaning residual graphene oxide to prevent interference on subsequent measurement;
(3) both ends of the formed graphene pattern were connected to an external resistance measurement circuit.
Claims (4)
1. A flexible resistive humidity sensor, comprising: the device comprises a flexible substrate (3), a graphene pattern layer (2) and an external measuring circuit (1), wherein the graphene pattern layer (2) is arranged on the surface of the flexible substrate (3), the graphene pattern layer (2) is connected with the external measuring circuit (1), and the patterns of the graphene pattern layer (2) are communicated; the flexible substrate (3) is a flexible film which has the same moisture absorption linear expansion property with polyimide, and the flexible film is polyimide or sodium polyacrylate; the external measurement circuit (1) comprises a resistance measurement device and a relative humidity display device, and the resistance of the graphene pattern layer (2) is reduced along with the increase of the width of the pattern stripe; the graphene pattern layer (2) is prepared by directly carbonizing the flexible substrate (3) through laser etching, or is prepared by covering a graphene oxide layer on the surface of a flexible film and then reducing graphene oxide through laser etching.
2. A flexible resistive humidity sensor according to claim 1, wherein: the graphene oxide layer is formed by dripping graphene oxide dispersion liquid on the surface of the flexible substrate (3) and drying.
3. The method of claim 1, comprising the steps of:
(a) forming a graphene conductive pattern on the surface of the flexible substrate (3) by utilizing laser etching;
(b) and connecting two ends of the formed graphene conductive pattern with an external resistance measuring circuit.
4. The method of claim 3, wherein the method further comprises: the using power of the laser in the step (a) is 2-5W.
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| CN110723725B (en) * | 2019-11-04 | 2021-08-10 | 中国科学院福建物质结构研究所 | Low-power laser reduction graphene film and preparation method thereof |
| CN110723726B (en) * | 2019-11-04 | 2021-08-10 | 中国科学院福建物质结构研究所 | Laser reduction graphene film and preparation method thereof |
| CN110823420B (en) * | 2019-11-07 | 2021-09-07 | 东南大学 | Preparation method of flexible piezoresistive tension sensor by laser and tension sensor prepared by preparation method |
| CN112545454A (en) * | 2020-11-03 | 2021-03-26 | 深圳市刷新智能电子有限公司 | Sweat detection sensing device and sweat amount detection method |
| CN112662104B (en) * | 2020-12-10 | 2022-04-15 | 中电保力（北京）科技有限公司 | Composite test material based on graphene oxide and preparation method and application thereof |
| CN113135563A (en) * | 2021-05-25 | 2021-07-20 | 北京航空航天大学 | Graphene paper capable of continuously regulating and controlling water wettability and application thereof |
| CN115266832B (en) * | 2022-07-08 | 2024-05-10 | 浙江农林大学 | Preparation method of graphene oxide flexible leaf surface humidity sensor |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569078A (en) * | 2015-01-29 | 2015-04-29 | 重庆墨希科技有限公司 | Flexible graphene nano wall resistance-type humidity sensor and preparation method thereof |
| RU2682259C1 (en) * | 2018-06-01 | 2019-03-18 | Федеральное государственное автономное образовательное учреждение высшего образования "Северо-Восточный федеральный университет имени М.К.Аммосова" | Method of making thin-film humidity sensor |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104569078A (en) * | 2015-01-29 | 2015-04-29 | 重庆墨希科技有限公司 | Flexible graphene nano wall resistance-type humidity sensor and preparation method thereof |
| RU2682259C1 (en) * | 2018-06-01 | 2019-03-18 | Федеральное государственное автономное образовательное учреждение высшего образования "Северо-Восточный федеральный университет имени М.К.Аммосова" | Method of making thin-film humidity sensor |
Non-Patent Citations (3)
| Title |
|---|
| Design, fabrication and characterization of capacitive humidity sensors based on emerging flexible technologies;Francisco J. Romero et al.;《Sensors and Actuators B: Chemical》;20190215(第287期);摘要部分以及第2.1-2.3节 * |
| Investigation of the Properties of Flexible Humidity Sensor Based on Reduced Graphene Oxide by Laser Irradiation;A.A. Semenova et al.;《2D Systems of the Strong Correlated Electrons: From Fundamental Research to Practical Applications》;20181231;摘要部分以及第020017-1页倒数第6-13行 * |
| Two-beam-laser interference mediated reduction, patterning and nanostructuring of graphene oxide for the production of a flexible humidity sensing device;Li Guo et al.;《Carbon》;20111211(第50期);摘要部分以及第2节 * |
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