CN113865626B - Flexible temperature and humidity integrated sensor and manufacturing method thereof - Google Patents
Flexible temperature and humidity integrated sensor and manufacturing method thereof Download PDFInfo
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 44
- 239000004205 dimethyl polysiloxane Substances 0.000 claims abstract description 78
- 235000013870 dimethyl polysiloxane Nutrition 0.000 claims abstract description 78
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 claims abstract description 78
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 claims abstract description 78
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 claims abstract description 78
- 239000000758 substrate Substances 0.000 claims abstract description 45
- 238000004806 packaging method and process Methods 0.000 claims abstract description 16
- 239000002086 nanomaterial Substances 0.000 claims description 29
- 239000000243 solution Substances 0.000 claims description 15
- 239000000654 additive Substances 0.000 claims description 10
- 230000000996 additive effect Effects 0.000 claims description 10
- 238000000034 method Methods 0.000 claims description 10
- 239000011259 mixed solution Substances 0.000 claims description 10
- 238000004140 cleaning Methods 0.000 claims description 6
- 239000011521 glass Substances 0.000 claims description 6
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 230000010259 detection of temperature stimulus Effects 0.000 claims description 2
- 238000002360 preparation method Methods 0.000 abstract description 6
- 229910001385 heavy metal Inorganic materials 0.000 abstract description 3
- 238000011084 recovery Methods 0.000 abstract description 2
- 239000010410 layer Substances 0.000 description 29
- 230000004044 response Effects 0.000 description 15
- 239000000463 material Substances 0.000 description 10
- 238000012544 monitoring process Methods 0.000 description 8
- 230000008859 change Effects 0.000 description 7
- 241000196324 Embryophyta Species 0.000 description 6
- 230000008901 benefit Effects 0.000 description 5
- 238000012545 processing Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 239000008204 material by function Substances 0.000 description 4
- 239000002861 polymer material Substances 0.000 description 4
- 238000013461 design Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 2
- 238000012271 agricultural production Methods 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 238000011088 calibration curve Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000005538 encapsulation Methods 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000002064 nanoplatelet Substances 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 239000004332 silver Substances 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 241000270295 Serpentes Species 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000001351 cycling effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 230000004720 fertilization Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 230000029553 photosynthesis Effects 0.000 description 1
- 238000010672 photosynthesis Methods 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000007639 printing Methods 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 230000026041 response to humidity Effects 0.000 description 1
- 230000006903 response to temperature Effects 0.000 description 1
- 230000005068 transpiration Effects 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
- G01D5/12—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means
- G01D5/14—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage
- G01D5/16—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable using electric or magnetic means influencing the magnitude of a current or voltage by varying resistance
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/02—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor for making articles of definite length, i.e. discrete articles
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- B—PERFORMING OPERATIONS; TRANSPORTING
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- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/38—Heating or cooling
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
- B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
- B29C39/00—Shaping by casting, i.e. introducing the moulding material into a mould or between confining surfaces without significant moulding pressure; Apparatus therefor
- B29C39/22—Component parts, details or accessories; Auxiliary operations
- B29C39/42—Casting under special conditions, e.g. vacuum
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
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Abstract
The invention discloses a flexible temperature and humidity integrated sensor and a manufacturing method thereof. A resistive temperature sensor and a resistive humidity sensor are arranged on the PDMS flexible substrate, wherein the resistive temperature sensor is covered with a PDMS packaging layer; the resistance type humidity sensor is characterized in that a first part of MXene solution with higher mass concentration is covered and fixed on a PDMS flexible substrate according to an interdigital electrode pattern shape to form a lower layer, and then a second part of MXene solution with lower mass concentration is covered and fixed on the lower layer according to a pattern shape capable of completely covering the lower layer to form an upper layer. The invention has simple preparation process, controllable cost, no problems of heavy metal pollution recovery and the like, has excellent flexibility, and can be tightly attached to the surface of a measured object.
Description
Technical Field
The invention relates to a sensor structure and a method, in particular to a flexible temperature and humidity integrated sensor and a manufacturing method thereof.
Background
The integrated temperature and humidity sensor is a sensor device for simultaneously measuring temperature and humidity, and can accurately measure the temperature and humidity of the environment through the temperature and humidity sensitive characteristics of functional materials. In the specific application, the integrated temperature and humidity sensor has the characteristics of small volume, stable performance, convenience in integration and the like, and can be applied to environmental temperature and humidity monitoring in the agricultural and industrial fields. In addition, compared with the traditional rigidizer, the flexible sensor has wider application scene, can be tightly attached to the surface of a measured object, can more accurately reflect the space-time distribution condition of temperature and humidity conditions, and greatly expands the application range of the integrated temperature and humidity sensor.
The complex and expensive manufacturing processes required for conventional sensing arrays can limit their potential for application. While additive manufacturing has the advantage that the cost of device fabrication can be reduced by large-scale processing. The traditional metal conductive nano material is the conductive nano material most commonly used in additive manufacturing due to the good conductivity and mechanical property. However, the disadvantages are very prominent, and the price of the silver nano conductive nanomaterial is often higher although the silver nano conductive nanomaterial has excellent conductive performance. In contrast, while conductive nanomaterials of copper and aluminum have some price advantage, they are susceptible to oxidation in air to form nonconductive oxides. In addition, the method comprises the following steps. These metallic conductive nanomaterials often require extremely high curing temperatures (typically greater than 150 ℃) which can limit the choice of flexible substrate materials and often require significant energy consumption in their production and are prone to adverse heavy metal contamination to the environment.
In addition, in order to manufacture the integrated temperature and humidity sensor, various functional materials are often required, which further complicates the processing process and increases the production cost.
Disclosure of Invention
In order to solve the problems, the invention designs a novel flexible temperature and humidity integrated sensor based on a two-dimensional nanomaterial MXene and a flexible PDMS polymer, solves the problems of non-integrated manufacturing, simplified manufacturing process, reduced material cost and the like of the conventional temperature and humidity sensor, and utilizes the novel two-dimensional nanomaterial MXene high-conductivity additive-free nanomaterial for manufacturing the novel flexible temperature and humidity integrated sensor. The temperature and humidity sensor manufactured based on the MXene nano material and the PDMS polymer material has excellent flexibility and can be closely attached to the surface of a measured object.
The flexible temperature and humidity integrated sensor has simpler preparation process and is easy for mass production, and the production cost of the temperature and humidity integrated sensor is further reduced. The device has compact structural design, improves the convenience of monitoring the temperature and humidity of the complex environment, greatly reduces the manufacturing cost of the device, and is beneficial to the measurement and monitoring of the temperature and humidity of the environment of users in different places and areas.
The technical scheme adopted by the invention is as follows:
1. a flexible temperature and humidity integrated sensor:
the temperature sensor comprises a resistance type temperature sensor, a resistance type humidity sensor, a PDMS packaging layer and a PDMS flexible substrate, wherein the resistance type temperature sensor and the resistance type humidity sensor are arranged on the PDMS flexible substrate, and the PDMS packaging layer is covered on the resistance type temperature sensor.
The resistance type temperature sensor and the resistance type humidity sensor are made of MXene conductive nano materials.
And the PDMS packaging layer and the PDMS flexible substrate are both made of PDMS.
The resistance type humidity sensor is provided with an interdigital electrode structure and is positioned in the middle of the PDMS flexible substrate.
The resistive temperature sensor is arranged on the PDMS flexible substrate around the resistive humidity sensor along an S shape.
2. The manufacturing method of the flexible temperature and humidity integrated sensor comprises the following steps:
firstly, manufacturing a PDMS flexible substrate, then forming a resistance type temperature sensor and a resistance type humidity sensor on the PDMS flexible substrate by adopting an MXene conductive nano material in an additive manufacturing mode, and then manufacturing and forming a PDMS packaging layer on the resistance type temperature sensor.
The PDMS flexible substrate is manufactured by the following steps: pouring the PDMS mixed solution on a glass sheet, and then putting the glass sheet into a vacuum dryer to suck bubbles in the PDMS mixed solution under negative pressure; taking out, and then putting into a constant temperature oven for heating and curing; and finally, placing the substrate into an ultraviolet ozone cleaning machine for cleaning to obtain a smooth PDMS flexible substrate.
The PDMS packaging layer is obtained by pouring PDMS mixed solution on a resistance type temperature sensor prepared from an MXene conductive nano material, standing and then adding and curing.
The resistance type temperature sensor is manufactured by covering and fixing an MXene solution on a PDMS flexible substrate according to a required pattern shape.
The resistive humidity sensor is characterized in that a first part of MXene solution with higher mass concentration is covered and fixed on a PDMS flexible substrate according to an interdigital electrode pattern shape to form a lower layer, and then a second part of MXene solution with lower mass concentration is covered and fixed on the lower layer according to a pattern shape capable of completely covering the lower layer to form an upper layer.
The mass concentration of the first part of MXene solution is 65mg/mL, and the mass concentration of the second part of MXene solution is 0.5mg/mL.
The flexible temperature and humidity integrated sensor is applied to detection of temperature/humidity on agricultural plant leaves.
Therefore, the temperature and humidity integrated sensor is prepared directly on the PDMS flexible substrate by adopting an additive manufacturing technology. The manufactured flexible temperature and humidity integrated sensor can reflect the temperature and humidity environment in the environment in real time by measuring the change of the resistance value.
The prepared MXene non-additive conductive nano material is used for manufacturing the flexible temperature and humidity integrated sensor on the PDMS flexible substrate in an additive manufacturing mode. After the temperature sensor is further encapsulated by PDMS, the preparation of the flexible temperature and humidity integrated sensor can be completed, and no additional metal nano material or other sensing functional materials are needed in the whole process. The flexible temperature and humidity integrated sensor prepared on the PDMS flexible substrate can be tightly attached to the surface of an special object, and the temperature and humidity conditions in the environment are reflected in real time.
Thus, the sensor is made of only two materials, has a simple structure and sensitive response, and is suitable for mass and large-scale manufacturing.
The sensor provided by the invention can be used for carrying out temperature and humidity detection on leaves of agricultural plants, and the effect advantage of sensitive temperature and humidity monitoring on microenvironment of agricultural crops is realized.
According to the invention, the novel two-dimensional material MXene conductive nano material is prepared, and the high-performance integrated flexible temperature and humidity sensor is prepared by printing on the PDMS flexible substrate in an additive manufacturing mode, so that the temperature and humidity sensing requirements in various scenes can be met. Temperature and humidity integrated sensors produced by using PDMS materials as a substrate and a packaging layer and MXene materials as a conductive layer and a humidity response layer have great commercial production and application potential. The research of the integrated flexible temperature and humidity sensor based on the MXene nano material and the PDMS polymer material opens up a new way for the integrated manufacture and development of the temperature and humidity sensor, and has great application potential.
Compared with the prior art, the invention has the advantages that,
the invention is insensitive to humidity change, simple in material selection, simple in preparation process, controllable in cost, free from high-temperature post-treatment and other functional material modification in the manufacturing process and free from the problem of heavy metal pollution recovery;
the flexible temperature and humidity integrated sensor has excellent temperature and humidity sensing characteristics and excellent flexibility, can be closely attached to the surface of a measured object to carry out real-time temperature and humidity monitoring, and can promote the development of the flexible temperature and humidity integrated sensor to the mass and intensive production direction.
Drawings
FIG. 1 is a block diagram of a flexible temperature and humidity integrated sensor of the present invention;
in the figure, an MXene temperature sensor 1, an MXene humidity sensor 2, a PDMS packaging layering layer 3 and a PDMS flexible substrate 4.
FIG. 2 is a graph of temperature response of a flexible resistive temperature sensor of the present invention;
FIG. 3 is a graph of the response of a flexible resistive temperature sensor of the present invention to hot air.
Fig. 4 is a graph showing humidity response of the flexible resistive humidity sensor according to the present invention.
Fig. 5 is a graph of the repetitive humidity response of the flexible resistive humidity sensor of the present invention.
FIG. 6 is a physical view of a flexible temperature and humidity integrated sensor attached blade in the invention.
Detailed Description
In order that the above-recited objects, features and advantages of the present invention will become more readily apparent, a more particular description of the invention briefly described above will be rendered by reference to specific embodiments thereof which are illustrated in the appended drawings. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. However, the embodiments of the present invention are not limited to the cases described herein, but can be designed and modified according to the specific application scenario, and implemented and improved in other ways similar to those described herein, so that the present invention is not limited to the specific examples disclosed below.
The structure of the flexible temperature and humidity integrated sensor prepared from the MXene nano material is shown in fig. 1, the flexible temperature and humidity integrated sensor comprises a resistance type temperature sensor 1, a resistance type humidity sensor 2, a PDMS packaging layer 3 and a PDMS flexible substrate 4, wherein the resistance type temperature sensor 1 and the resistance type humidity sensor 2 are arranged on the PDMS flexible substrate 4, and the resistance type temperature sensor 1 is covered with the PDMS packaging layer 3. There is no contact between the resistive temperature sensor 1 and the resistive humidity sensor 2.
The invention relates to a flexible temperature and humidity integrated sensor based on a PDMS polymer material and an MXene high-conductivity nano material. The resistance type temperature sensor 1 and the resistance type humidity sensor 2 are both made of MXene conductive nano materials and are made of MXene conductive nano materials only.
The PDMS encapsulation layer 3 and the PDMS flexible substrate 4 are both made of PDMS and are made of PDMS material only.
The resistive humidity sensor 2 has an interdigital electrode structure and is located in the middle of the PDMS flexible substrate 4. The resistive temperature sensor 1 is arranged along an S-shape on the PDMS flexible substrate 4 around the resistive humidity sensor 2 to extend its length for improved sensitivity.
The preparation method comprises the following steps:
firstly, a PDMS flexible substrate 4 is manufactured, then a resistance type temperature sensor 1 and a resistance type humidity sensor 2 are formed on the PDMS flexible substrate 4 by adopting an MXene conductive nano material in an additive manufacturing mode, and then a PDMS packaging layer 3 is formed on the resistance type temperature sensor 1.
The PDMS flexible substrate 4 is manufactured in the following way: pouring a PDMS mixed solution with the mass ratio of 10:1 on a glass sheet, and then placing the glass sheet into a vacuum dryer to suck bubbles in the PDMS mixed solution under negative pressure for 2 hours; taking out, and then placing the mixture into a constant temperature oven at 60 ℃ for heating and curing for 2 hours; and finally, placing the substrate into an ultraviolet ozone cleaning machine for cleaning for 10 minutes to obtain the flat PDMS flexible substrate 4.
The PDMS packaging layer 3 is obtained by pouring a PDMS mixed solution with the mass ratio of 10:1 on a resistance type temperature sensor 1 prepared from an MXene conductive nano material, standing for 20min, and adding and curing at 50 ℃ for 1 h.
The resistive temperature sensor 1 is manufactured by overlaying and fixing an MXene solution on a PDMS flexible substrate 4 according to a required pattern shape.
The resistance humidity sensor 2 is formed by covering and fixing a first part of MXene solution with higher mass concentration on a PDMS flexible substrate 4 according to an interdigital electrode pattern shape to form a lower layer, and then covering and fixing a second part of MXene solution with lower mass concentration on the lower layer according to a pattern shape capable of completely covering the lower layer to form an upper layer. The thickness of the upper layer is smaller than that of the lower layer.
The mass concentration of the first part of MXene solution is 65mg/mL, and the mass concentration of the second part of MXene solution is 0.5mg/mL.
The resistive temperature and humidity sensor is thus integrally fabricated on a flexible PDMS substrate, enabling the entire device to simultaneously monitor changes in temperature and humidity in the environment.
In the manufacturing process of the temperature and humidity sensor, firstly, MXene nano materials are subjected to a preset program through a three-dimensional mechanical arm, and a temperature and humidity sensor conductive circuit in a required interdigital electrode shape is additionally manufactured on a PDMS flexible base to serve as a lower layer. And then, further carrying out MXene thin layer modification on the prepared MXene interdigital electrode as an upper layer to serve as a humidity sensitive response layer, and independently packaging the MXene temperature sensor by using a PDMS mixed solution, thus completing the preparation of the whole temperature and humidity integrated sensor. The whole temperature and humidity sensor does not need additional other functional materials, and the used manufacturing process is simple, thereby being beneficial to reducing the cost and realizing batch manufacturing.
The manufactured flexible temperature and humidity integrated sensor has excellent flexibility, can be closely attached to the surface of a measured object (such as a plant leaf or human skin), and can know temperature and humidity information of the surrounding environment in real time through the change of the resistance value of the monitor. The mode of additive manufacturing also allows for rapid adjustment of the shape of the temperature and humidity sensor according to application requirements, and further structural design and optimization to meet specific scene requirements for sensor shape and size. In addition, the temperature and humidity sensor can be prepared by only using the MXene conductive nano material and the PDMS polymer material, the material utilization rate is high, the processing flow can be greatly simplified, the processing time is shortened, and the processing cost is reduced, so that the temperature and humidity sensor is convenient for commercialization popularization and use.
FIG. 2 is a calibration curve for an MXene temperature sensor reflecting its sensitivity response to temperature changes. For an MXene temperature sensor, the bending axis of the snake can increase the length of a sensing path in a limited space, and the sensitivity of the temperature sensor is improved. When the temperature rises, the entire sensing element will tend to expand due to the large coefficient of thermal expansion of the PDMS substrate, resulting in a decrease in the conductivity of the MXene conductive path, thereby producing an increased resistance signal. Thus, the MXene temperature sensor shows a positive response trend to an increase in temperature. While the presence of the surface PDMS encapsulation layer can prevent moisture interference with it.
The response curve of the MXene temperature sensor shown in fig. 3 to hot air reflects the sensitivity response characteristic to air temperature change, and can rapidly respond to the change of the ambient temperature. And has good stability and repeatability. The hot air used in the experiment was simulated by an electric heated air blower.
FIG. 4 is a calibration curve for an MXene humidity sensor reflecting its sensitivity response to humidity changes. For an MXene humidity sensor, the use of interdigitated electrodes helps to improve the response of the sensor to humidity. The sensing principle of the whole humidity sensor is based on the characteristics of the MXene two-dimensional nanomaterial. The MXene nanoplatelets respond to the presence of humidity, and an increase in humidity increases the interlayer spacing between the MXene nanoplatelets, thereby decreasing the conductivity of the MXene humidity sensitive film. Thus, there is a positive response to an increase in humidity for the entire MXene humidity sensor.
FIG. 5 shows the cycling response curve of an MXene humidity sensor at 20% to 80% relative humidity, reflecting its sensitive humidity response characteristics and excellent repeatable response characteristics.
The testing process and the testing condition of the specific embodiment of the invention are as follows:
the flexible temperature and humidity integrated sensor prepared by the invention can be connected with a large-scale resistance meter through a wire or directly connected with miniaturized wireless resistance reading equipment so as to monitor the temperature and humidity microenvironment of the surface of a measured object. In the present invention, the microenvironment monitoring of crop surfaces is particularly shown, particularly for agricultural production.
Fig. 6 is a physical diagram of a flexible temperature and humidity integrated sensor attached to a blade for temperature and humidity monitoring in the invention. The integrated sensor is tightly attached to the surface of the plant leaf and is connected with the self-made small wireless resistance meter, so that the change of the temperature and humidity microenvironment of the plant surface can be reflected in real time by monitoring the change of the resistance value of the sensor, the photosynthesis and transpiration of the plant can be indirectly reflected, and a necessary reference basis is provided for the next step of agricultural production such as temperature control, watering, fertilization and the like in the greenhouse.
The above disclosed preferred embodiments of the present invention are merely intended to help illustrate the present invention. The preferred embodiments are not exhaustive or to limit the invention to the precise forms disclosed. Obviously, many modifications and variations are possible in light of the above teaching. The embodiments were chosen and described in order to best explain the principles of the invention and its practical application, to thereby enable others skilled in the art to best understand and utilize the invention. The patent is limited only by the claims and the full scope and equivalents thereof.
Claims (11)
1. A manufacturing method of a flexible temperature and humidity integrated sensor is characterized by comprising the following steps of: firstly, manufacturing a PDMS flexible substrate (4), then forming a resistance type temperature sensor (1) and a resistance type humidity sensor (2) on the PDMS flexible substrate (4) by adopting an MXene conductive nano material in an additive manufacturing mode, and then manufacturing a PDMS packaging layer (3) on the resistance type temperature sensor (1);
the PDMS packaging layer (3) is obtained by pouring PDMS mixed solution on a resistance type temperature sensor (1) prepared from MXene conductive nano material, standing and then adding and curing.
2. The method for manufacturing the flexible temperature and humidity integrated sensor according to claim 1, wherein:
the PDMS flexible substrate (4) is manufactured by the following steps: pouring the PDMS mixed solution on a glass sheet, and then putting the glass sheet into a vacuum dryer to suck bubbles in the PDMS mixed solution under negative pressure; taking out, and then putting into a constant temperature oven for heating and curing; finally, putting the substrate into an ultraviolet ozone cleaning machine for cleaning to obtain a smooth PDMS flexible substrate (4).
3. The method for manufacturing the flexible temperature and humidity integrated sensor according to claim 1, wherein:
the resistance type temperature sensor (1) is manufactured by covering and fixing an MXene solution on a PDMS flexible substrate (4) according to a required pattern shape.
4. The method for manufacturing the flexible temperature and humidity integrated sensor according to claim 1, wherein:
the resistance type humidity sensor (2) is characterized in that a first part of MXene solution with higher mass concentration is covered and fixed on a PDMS flexible substrate (4) according to an interdigital electrode pattern shape to form a lower layer, and then a second part of MXene solution with lower mass concentration is covered and fixed on the lower layer according to a pattern shape capable of completely covering the lower layer on the lower layer to form an upper layer.
5. The method for manufacturing the flexible temperature and humidity integrated sensor according to claim 4, wherein:
the first portion of the MXene solution had a mass concentration of 65mg/mL and the second portion of the MXene solution had a mass concentration of 0.5mg/mL.
6. The utility model provides a flexible humiture integrated sensor which characterized in that: manufactured by the manufacturing method according to any one of claims 1 to 5.
7. The flexible temperature and humidity integrated sensor of claim 6, wherein:
the resistance type temperature sensor (1) and the resistance type humidity sensor (2) are made of MXene conductive nano materials.
8. The flexible temperature and humidity integrated sensor of claim 6, wherein:
and the PDMS packaging layer (3) and the PDMS flexible substrate (4) are both made of PDMS.
9. The flexible temperature and humidity integrated sensor of claim 6, wherein:
the resistance type humidity sensor (2) is provided with an interdigital electrode structure and is positioned in the middle of the PDMS flexible substrate (4).
10. The flexible temperature and humidity integrated sensor of claim 6, wherein:
the resistive temperature sensor (1) is arranged on the PDMS flexible substrate (4) around the resistive humidity sensor (2) along an S shape.
11. Application to the flexible temperature and humidity integrated sensor according to any one of claims 6-10, characterized in that: the method is applied to detection of temperature/humidity on the leaves of agricultural plants.
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