CN110360960B - Perpendicularity measuring method and device - Google Patents
Perpendicularity measuring method and device Download PDFInfo
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- CN110360960B CN110360960B CN201910707139.2A CN201910707139A CN110360960B CN 110360960 B CN110360960 B CN 110360960B CN 201910707139 A CN201910707139 A CN 201910707139A CN 110360960 B CN110360960 B CN 110360960B
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- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
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Abstract
The embodiment of the invention discloses a perpendicularity measuring method and device. The perpendicularity measuring method comprises the following steps: providing an optical autocollimator and a plane mirror; placing a plane reflector on an objective table, reflecting the collimated light beam by the plane reflector to form a light spot, and recording the initial imaging position of the light spot; the base and the mirror frame are in threaded connection and are placed on an objective table, and the plane mirror is placed on the mirror frame; rotating the mirror frame at least three times, and recording the measurement imaging position of the light spot after each rotation; acquiring a virtual imaging position reflected by the surface of the base according to the measurement imaging position; and respectively calculating the perpendicularity between the respective thread axes of the base and the mirror frame and the bearing surface according to the initial imaging position, the measured imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle. The invention can simultaneously measure and calculate the verticality of the base, the thread axis of the spectacle frame and the bearing surface, improves the measuring and calculating efficiency of the verticality and ensures the calculation precision of the verticality.
Description
Technical Field
The embodiment of the invention relates to the technical field of optical instrument detection, in particular to a perpendicularity measuring method and device.
Background
At present in the camera field, the camera lens is generally connected with the camera through the base to realize that camera lens image plane and camera image sensor coincide. Specifically, the camera lens comprises picture frame and the lens of installing in the picture frame, corresponds respectively on picture frame and the base and is provided with external screw thread and internal thread, and the picture frame passes through the screw thread and is fixed with the base spiro union to be provided with respectively on base and the picture frame relatively and hold the face, support each other when the spiro union and hold. Obviously, whether the axis of the screw thread is perpendicular to the bearing surface determines whether the final imaging surface of the lens in the lens frame is parallel to or even coincident with the plane of the image sensor in the camera.
Along with the improvement of the imaging quality of the lens and the increase of the aperture, the focal depth of the lens is smaller and smaller, the perpendicularity requirements of the base and the thread axis of the picture frame and the bearing surface are higher and higher, and the requirement on the processing precision is higher and higher. Therefore, in the process of production management and control of products, it is very important to accurately measure the perpendicularity of the thread axes and the bearing surfaces of the base and the mirror frame. In the existing measuring method, a high-precision jig is generally needed to ensure the precision, and few measuring methods capable of removing the error of the jig are available. Moreover, the current perpendicularity measurement can only measure the perpendicularity of the thread axis and the bearing surface of the base, and the perpendicularity measurement of the thread axis and the bearing surface of the mirror frame is neglected.
Disclosure of Invention
The invention provides a perpendicularity measuring method and device, which are used for simultaneously realizing accurate measurement of perpendicularity of thread axes and bearing surfaces in a base and a mirror frame.
In a first aspect, an embodiment of the present invention provides a perpendicularity measurement method for measuring perpendicularity between a thread axis and a bearing surface in a base and a mirror frame, where the perpendicularity measurement method includes:
providing an optical autocollimator and a plane reflector, wherein the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, the objective light pipe part emits collimated light beams, and a scale reticle is arranged in the micrometer eyepiece part;
placing the plane reflector on the objective table, reflecting the collimated light beam emitted by the objective light pipe part into the micrometer eyepiece part through the plane reflector, focusing the collimated light beam on the scale reticle to form a light spot, and recording the initial imaging position of the light spot on the scale reticle;
the base to be tested and the mirror frame to be tested are in threaded connection and are placed on the objective table, the base is located between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame;
keeping the relative position of the base and the object stage fixed and the base and the mirror frame in a screwed connection, rotating the mirror frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation;
according to the measurement imaging position after each rotation, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle; calculating the perpendicularity between the thread axis of the base and the bearing surface according to the initial imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle; calculating the perpendicularity between the thread axis of the mirror frame and the bearing surface according to the measurement imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle
Optionally, before the base to be measured and the mirror frame to be measured are screwed and placed on the objective table, the base is located between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame, the method further includes:
and adjusting the levelness of the objective table until the initial imaging position of the light spot on the scale reticle is coincided with the original point of the scale reticle.
Optionally, the keeping the relative position of the base and the stage fixed and the base and the mirror frame screwed, and rotating the mirror frame at least three times, and recording the measured imaging position of the light spot on the scale reticle after each rotation, includes:
keeping the relative position of the base and the objective table fixed and the base and the mirror frame in a screwed connection, rotating the mirror frame four times at an angle of 90 degrees in sequence, and recording the measurement imaging position of the light spot on the scale reticle after each rotation.
Optionally, taking the horizontal rightward direction of the scale reticle as the X direction, taking the vertical upward direction of the scale reticle as the Y direction, and recording the measurement imaging positions of the light spots on the scale reticle after four rotations as (X) respectively1，Y1)、(X2，Y2)、(X3，Y3) And (X)4，Y4)；
According to the measurement imaging position after each rotation, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle; calculating the perpendicularity between the thread axis of the base and the bearing surface according to the initial imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle; according to the measurement imaging position, the virtual imaging position, and the conversion relation between the unit distance on the scale reticle and the plane inclination angle, the perpendicularity between the thread axis of the mirror frame and the bearing surface is calculated, and the method comprises the following steps:
according to the formula:
calculating the perpendicularity between the thread axis of the base and the bearing surface;
according to the formula:
calculating the perpendicularity between the thread axis of the mirror frame and the bearing surface;
and D is the length corresponding to the unit scale on the scale reticle, and T is the conversion coefficient of the unit length on the scale reticle and the corresponding plane inclination angle.
Optionally, the flat mirror includes a reflective surface and a transmissive surface opposite to each other, and the placing the flat mirror on the stage includes:
placing the plane mirror on the objective table, wherein the reflecting surface is in contact with the objective table, and the collimated light beam emitted by the objective light pipe part is incident to the reflecting surface through the transmitting surface and is reflected into the micrometer eyepiece part through the reflecting surface;
placing the flat mirror on the frame, comprising: the flat mirror is placed on the frame with the reflective surface in contact with the frame.
In a second aspect, an embodiment of the present invention further provides a perpendicularity measuring apparatus for measuring perpendicularity between a threaded axis and a bearing surface in a base and a mirror frame, where the perpendicularity measuring apparatus includes:
the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, wherein the objective light pipe part emits collimated light beams, and an imaging reticle is arranged in the micrometer eyepiece part;
and the plane reflector is used for being respectively placed on the objective table and the base and the mirror frame in threaded connection, reflecting the collimated light beams to the micrometer eyepiece part and focusing on the imaging reticle to form light spots.
Optionally, the plane mirror comprises a reflective surface and a transmissive surface opposite.
Optionally, the flatness of the plane mirror is less than or equal to 0.0002 mm.
Optionally, the parallelism of the plane mirror is less than or equal to 0.002 mm.
Optionally, the spectacle frame is provided with a bolt connection structure and a cylindrical structure deviating from the bolt connection structure, the cylindrical structure comprises a bottom bearing surface, and the outer diameter and the inner diameter of the bottom bearing surface are b and c respectively; the outer diameter of the plane reflector is a, and the outer diameter of the plane reflector satisfies the following conditions: c < a < b.
The perpendicularity measuring method and device provided by the embodiment of the invention utilize an optical autocollimator and a plane reflector, firstly, the plane reflector is placed on an objective table of the optical autocollimator, light spots are formed on a scale reticle of the optical autocollimator, and an initial imaging position is recorded; then the base and the mirror frame are in screw joint and are placed on the objective table, wherein the base is positioned between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame; then, on the basis of ensuring that the relative positions of the base and the objective table are fixed and the base and the picture frame are in threaded connection, rotating the picture frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation; and finally, according to the measurement imaging position, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle, and respectively calculating the perpendicularity of the threaded axis and the bearing surface of the base and the mirror frame according to the initial imaging position, the virtual imaging position, the measurement imaging position and the conversion relation between the unit distance and the plane inclination angle on the scale reticle. According to the perpendicularity measuring method provided by the embodiment of the invention, the perpendicularity of the base, the thread axis of the spectacle frame and the bearing surface can be measured and calculated simultaneously, the measuring time of the perpendicularity is reduced, and the measuring and calculating efficiency of the perpendicularity is improved; meanwhile, the calculation accuracy of the verticality can be guaranteed, the measurement by a high-accuracy tool is avoided, and the measurement cost is reduced to a certain extent.
Drawings
FIG. 1 is a flow chart of a method for measuring verticality according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a verticality measuring apparatus according to an embodiment of the present invention;
FIG. 3 is a schematic diagram of the working principle of the optical autocollimator;
FIG. 4 is a schematic view of another configuration of the squareness measuring device shown in FIG. 2;
FIG. 5 is a schematic view of another alternative construction of the squareness measurement apparatus shown in FIG. 2;
FIG. 6 is a schematic diagram of the optical path principle of the perpendicularity measuring method provided by the embodiment of the invention;
FIG. 7 is a schematic structural diagram of an optical autocollimator according to an embodiment of the present invention;
fig. 8 is a schematic structural view of a spectacle frame according to an embodiment of the present invention;
FIG. 9 is a flow chart of another perpendicularity measurement method provided by an embodiment of the invention;
FIG. 10 is a flow chart of another perpendicularity measuring method provided by an embodiment of the invention.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples. It is to be understood that the specific embodiments described herein are merely illustrative of the invention and are not limiting of the invention. It should be further noted that, for the convenience of description, only some of the structures related to the present invention are shown in the drawings, not all of the structures.
Fig. 1 is a flowchart of a perpendicularity measuring method according to an embodiment of the present invention, fig. 2 is a schematic structural diagram of a perpendicularity measuring apparatus according to an embodiment of the present invention, and referring to fig. 1 and fig. 2, the perpendicularity measuring method is used for measuring the perpendicularity between a threaded axis and a bearing surface in a base and a mirror frame, and specifically includes:
s110, providing an optical autocollimator 30 and a plane reflector 40, wherein the optical autocollimator 30 comprises a stage 31, an objective light pipe part 32 and a micrometer eyepiece part 33, the objective light pipe part 32 emits a collimated light beam, and a scale reticle 331 is arranged in the micrometer eyepiece part 33.
The working principle of the optical autocollimator 30 is to use the objective light pipe part 32 to emit a collimated light beam, the collimated light beam forms a reflected light beam on the reflecting surface, and the position of a light spot of the reflected light beam on the scale division plate 331 in the micrometer eyepiece part 33 is detected to determine the levelness of the reflecting surface. Specifically, fig. 3 is a schematic diagram of the working principle of the optical autocollimator, and referring to fig. 2 and fig. 3, the reflected light beam is focused on the scale reticle 331 through the micrometer eyepiece part 33 to form a light spot, and if the light spot coincides with the origin of the scale reticle 331, it indicates that the reflection surface is horizontal; if the light spot is offset from the origin of the reticle 331, it indicates that the reflecting surface has a planar tilt angle. And half of the light ray reflection angle omega of the reflected light beam and the collimated light beam is the plane inclination angle mu of the reflection surface. Therefore, based on the known height difference between the reflection surface and the scale reticle 331, the conversion relationship T between the unit distance on the scale reticle 331 and the plane inclination angle μ can be determined, and by measuring the distance d between the light spot and the origin of the scale reticle 331, the plane inclination angle μ ═ T × d of the reflection surface can be obtained. The plane mirror 40 is used to add a reflecting surface to the base and the mirror frame, and the plane mirror 40 is used to reflect the straight light beams aligned with the base and the mirror frame, and the plane inclination angle of the plane mirror 40 is the plane inclination angle of the base and the mirror frame.
S120, the plane reflector 40 is placed on the objective table 31, the collimated light beam emitted by the objective light pipe part 32 is reflected to the micrometer eyepiece part 33 through the plane reflector 40, and is focused on the scale reticle 331 to form a light spot, and the initial imaging position of the light spot on the scale reticle 331 is recorded.
In a practical optical autocollimator, the stage 31 may not be leveled and therefore there is a certain plane tilt. This step is therefore essentially used to measure the planar tilt of the stage 31. Fig. 4 is another schematic structural view of the perpendicularity measuring apparatus shown in fig. 2, and referring to fig. 4, when the plane mirror 40 is placed on the stage 31, that is, the plane where the plane mirror 40 is located coincides with the surface of the stage 31, that is, the plane inclination angle of the plane where the plane mirror 40 is located, that is, the plane inclination angle of the stage 31 is determined by the spot position.
S130, the base to be tested and the mirror frame to be tested are in threaded connection and are placed on the objective table 31, the base is located between the objective table 31 and the mirror frame, and the plane mirror 40 is placed on the mirror frame.
Fig. 5 is a schematic view showing still another structure of the verticality measuring apparatus shown in fig. 2, and referring to fig. 5, when the plane mirror 40 is placed on the base 10 and the frame 20 which are screwed, i.e., the plane of the plane mirror 40 coincides with the surface of the frame 20. At this time, the plane inclination angle of the plane on which the plane mirror 40 is located, which is determined by the spot position, is the plane inclination angle of the surface of the lens frame 20. It should be noted that the plane inclination of the surface of the frame 20 at this time is the sum of the plane inclination of the stage 31 and the plane inclination when the base 10 and the frame 20 are screwed together and placed on a horizontal plane.
S140, keeping the relative position of the base 10 and the object stage 31 fixed and the base 10 and the lens frame 20 screwed, rotating the lens frame 20 at least three times, and recording the measurement imaging position of the light spot on the scale reticle 331 after each rotation.
Since the base 10 and the lens frame 20 are screwed to each other, when the lens frame 20 is rotated based on the screwing, the surface of the lens frame 20 is inclined and changed, and thus the spot reflected on the surface of the lens frame 20 draws a circle (approximate circle) on the scale reticle 331. It will be appreciated that the process of rotating the frame 20 is essentially a process of rotating the threaded axis of the frame 20 along the threaded axis of the base 10, wherein the threaded axis of the frame 20 is at an angle to the threaded axis of the base 10.
S150, acquiring a virtual imaging position where the collimated light beam is reflected on the scale reticle 331 by the surface of the base 10 according to the measurement imaging position after each rotation; calculating the perpendicularity between the thread axis of the base 10 and the bearing surface according to the initial imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle 331 and the plane inclination angle; and calculating the perpendicularity between the thread axis of the mirror frame 20 and the bearing surface according to the measurement imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale dividing plate 331 and the plane inclination angle.
Fig. 6 is a schematic diagram of the optical path principle of the perpendicularity measuring method provided by the embodiment of the invention, referring to fig. 5 and 6, the center of an approximate circle formed by the rotating mirror frame 20 is substantially the virtual imaging position where the surface of the base 10 reflects the collimated light beam on the scale reticle 331, so that the plane inclination angle α of the surface of the base 10 can be determined according to the virtual imaging position, and then the plane inclination angle of the surface when the base 10 is placed on the horizontal plane, that is, the perpendicularity of the thread axis and the bearing surface can be known. The fact that the light spot has a certain distance from the circle center of the approximate circle in the rotation process is caused by the fact that the surface of the lens frame 20 is not parallel to the surface of the base 10, namely, an included angle exists between the thread axis of the lens frame 20 and the thread axis of the base 10, and the plane inclination angle beta of the surface of the lens frame 20 relative to the surface of the base 10 can be obtained by calculating the average distance between the light spot and the circle center and the conversion relation between the unit distance on the scale reticle and the plane inclination angle, namely the plane inclination angle of the surface when the lens frame 20 is placed on the horizontal plane can be obtained, so that the verticality between the thread axis and the bearing surface in.
It should be noted here that when the lens frame is rotated at least three times, at least three spot positions can be obtained, and the approximate circle and the center of the circle formed by the spot can be determined through the at least three spot positions. The at least three rotations may be performed with the same rotation angle or may be different. Furthermore, the more the number of rotations, the more the position of the light spot is obtained, and therefore the more accurate the centre of the approximate circle formed by the light spot is, and therefore the more accurate the calculation of the perpendicularity of the threaded axes and the bearing surfaces of the base 10 and the frame 20 is obtained.
The perpendicularity measuring method provided by the embodiment of the invention utilizes an optical autocollimator and a plane reflector, firstly, the plane reflector is placed on an objective table of the optical autocollimator, light spots are formed on a scale reticle of the optical autocollimator, and an initial imaging position is recorded; then the base and the mirror frame are in screw joint and are placed on the objective table, wherein the base is positioned between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame; then, on the basis of ensuring that the relative positions of the base and the objective table are fixed and the base and the picture frame are in threaded connection, rotating the picture frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation; and finally, according to the measurement imaging position, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle, and respectively calculating the perpendicularity of the threaded axis and the bearing surface of the base and the mirror frame according to the initial imaging position, the virtual imaging position, the measurement imaging position and the conversion relation between the unit distance and the plane inclination angle on the scale reticle. According to the perpendicularity measuring method provided by the embodiment of the invention, the perpendicularity of the base, the thread axis of the spectacle frame and the bearing surface can be measured and calculated simultaneously, the measuring time of the perpendicularity is reduced, and the measuring and calculating efficiency of the perpendicularity is improved; meanwhile, the calculation accuracy of the verticality can be guaranteed, the measurement by a high-accuracy tool is avoided, and the measurement cost is reduced to a certain extent.
Specifically, the embodiment of the invention provides an optical autocollimator. Fig. 7 is a schematic structural diagram of an optical autocollimator according to an embodiment of the present invention, and referring to fig. 7, generally in the optical autocollimator, an objective light pipe component includes a light source 321, a cross-shaped index reticle 322 and an objective lens 323, the cross-shaped index reticle 322 is located on an object focal plane of the objective lens 323, light emitted from the light source 321 forms a collimated light beam through the cross-shaped index reticle 322 and the objective lens 323, the collimated light beam is cross-shaped, and a light spot is a cross-shaped light spot. A scale reticle 331 is provided in the micrometer eyepiece part. The cross-shaped light spot is formed by the cross-shaped indication reticle 322, so that the position of the light spot on the scale reticle 331 can be read in an auxiliary manner, and the reading accuracy is ensured.
It should be noted that, in the perpendicularity measuring method, the plane mirror can be regarded as a strict reflection plane, and the actually applied plane mirror itself has a certain thickness, and two planes of the plane mirror easily have a slight included angle, i.e. the two planes are not parallel. In view of this, in the perpendicularity measuring method provided by the present invention, optionally, as shown in fig. 2, 4 and 5, the plane mirror 40 includes a reflecting surface and a transmitting surface which are opposite to each other, and specifically, when the plane mirror 40 is placed on the stage 31, the plane mirror 40 may be placed on the stage 31 with the reflecting surface in contact with the stage 31. At this time, the collimated light beam emitted from the objective light tunnel part 32 is incident on the reflection surface via the transmission surface, and is reflected into the micrometer eyepiece part 33 via the reflection surface. Similarly, when the flat mirror 40 is placed on the frame 20, the flat mirror 40 may be placed on the frame 20 with the reflecting surface in contact with the frame 20. The collimated light beam emitted from the objective light pipe section 32 is incident on the reflection surface through the transmission surface, and is reflected into the micrometer eyepiece section 33 through the reflection surface.
The reflecting surface of the plane mirror 40 can be formed by plating a reflecting film, such as aluminum or silver, on a glass substrate. In this case, since the upper surface of the plane mirror 40 is a transmission surface and the lower surface, i.e., the reflection surface, is in direct contact with the stage 31 or the frame 20, the reflection surface coincides with the surface of the stage 31 or the frame 20, and the spot position formed by the reflected beam is determined by the plane inclination angle of the surface of the stage 31 or the frame 20. When the plane mirror is placed on the objective table or the mirror frame, and the lower surface is a reflecting surface, the method can prevent the plane inclination angle of the plane mirror from being introduced into the measurement and calculation process of the plane inclination angle of the objective table or the mirror frame, and avoids errors caused by the working precision problem of the plane mirror.
Further, in the verticality measuring apparatus shown in fig. 2, the plane mirror 40 may be set to have a flatness of 0.0002mm or less. The flatness refers to the distance between an actual surface and an ideal plane, or the relative height difference of a plurality of points on the actual surface measured, and represents the flatness of the plane. By selecting the plane reflector with the flatness less than or equal to 0.0002mm, the uniformity of the reflecting plane can be ensured, so that the influence of defects caused by the problem of working precision on the light spot position is avoided, and the precision of measuring and calculating the perpendicularity of the thread axis and the bearing surface of the base and the lens frame according to the light spot position is further ensured.
Similarly, in the verticality measuring apparatus shown in fig. 2, the plane mirror 40 may be arranged to have a parallelism of 0.002mm or less. The parallelism is the maximum allowable error value of the parallelism of the two surfaces of the plane mirror, and is used for representing the parallelism degree of the two surfaces of the plane mirror. Obviously, by selecting the plane mirror with the parallelism of less than or equal to 0.002mm, the plane inclination angles of the upper surface and the lower surface of the plane mirror can be ensured to be more similar, even when the plane mirror is placed on an objective table or a mirror frame, and the upper surface is a reflecting surface, the plane inclination angle of the upper surface can be ensured to be approximate to the plane inclination angle of the surface of the objective table or the mirror frame, thereby reducing errors caused by low working precision of the plane mirror.
In addition, fig. 8 is a schematic structural diagram of a lens frame according to an embodiment of the present invention, and referring to fig. 5 and 8, the lens frame 20 is not only provided with a screw structure 211 to form a screw with a thread provided on the base 10, but also needs to install a lens or a lens group in the lens frame 20, that is, a side of the lens frame 20 away from the screw structure 211 is a cylindrical structure 221. The cylindrical structure 221 includes a bottom abutment surface 222 for engaging a lens or lens array in the frame 20. It should be considered here that the bottom bearing surface 222 of the cylindrical structure 221 determines the imaging surface of the lens, i.e. the bearing surface 222 should be used in the calculation of the perpendicularity between the threaded axis of the lens frame 20 and the bearing surface. In order to measure the perpendicularity between the bottom bearing surface 222 and the thread axis, the plane mirror 40 needs to be placed on the bottom bearing surface 222, so when selecting the plane mirror, the outer diameter a of the plane mirror 40 needs to be set to satisfy: c < a < b, where b and c are the outside and inside diameters, respectively, of the bottom bearing surface 222. At this time, the plane mirror is directly placed in the cylindrical structure 221 of the mirror frame 20 and is in contact with the bottom contact surface 222, so that the plane of the plane mirror 40, that is, the plane of the bottom contact surface 222, can be measured by calculating the spot position.
Further, in order to facilitate calculation, the embodiment of the invention also provides a verticality measuring method. Fig. 9 is a flowchart of another perpendicularity measuring method according to an embodiment of the present invention, and referring to fig. 2 and 9, the perpendicularity measuring method includes:
s210, providing an optical autocollimator and a plane reflector, wherein the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, collimated light beams are emitted from the objective light pipe part, and a scale reticle is arranged in the micrometer eyepiece part.
S220, placing a plane reflector on an objective table, reflecting collimated light beams emitted by an objective light pipe part into a micrometer eyepiece part through the plane reflector, focusing the collimated light beams on a scale reticle to form light spots, and recording the initial imaging positions of the light spots on the scale reticle;
and S230, adjusting the levelness of the objective table until the initial imaging position of the light spot on the scale reticle coincides with the origin of the scale reticle.
The initial imaging position of the light spot on the scale reticle is coincided with the original point by adjusting the levelness of the objective table, so that the leveling of the objective table is realized, the surface of the objective table is a horizontal plane at the moment, and the plane inclination angle of the objective table is 0.
S240, screwing a base to be tested and a mirror frame to be tested on an objective table, wherein the base is positioned between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame;
s250, keeping the relative position of the base and the objective table fixed, connecting the base and the mirror frame in a threaded manner, rotating the mirror frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation;
s260, acquiring a virtual imaging position of the surface of the base, which reflects the collimated light beam on the scale reticle, according to the measurement imaging position after each rotation; calculating the perpendicularity of the thread axis of the base and the bearing surface according to the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle; and calculating the perpendicularity of the thread axis of the mirror frame and the bearing surface according to the measurement imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle.
Because the initial imaging position coincides with the original point, the plane inclination angle of the objective table does not need to be considered when the perpendicularity of the thread axis of the base and the bearing surface is calculated, and the virtual imaging position can be directly converted into the plane inclination angle of the surface of the base, namely the perpendicularity of the thread axis of the base and the bearing surface.
Further, in the manner that the perpendicularity between the screw axis and the bearing surface of the base and the mirror frame is calculated by at least three rotations and the measured imaging position of the light spot on the scale reticle after each rotation in steps S140 and S150 (or S250 and S260), the process of calculating the virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle at the measured imaging position of the light spot after each rotation requires the position of the center of a circle where at least three light spots are located to be determined, which is complicated. Therefore, the embodiment of the invention also provides a verticality measuring method. Fig. 10 is a flowchart of another perpendicularity measuring method provided by an embodiment of the present invention, and referring to fig. 2 and 10, the perpendicularity measuring method includes:
s310, providing an optical autocollimator and a plane reflector, wherein the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, collimated light beams are emitted from the objective light pipe part, and a scale reticle is arranged in the micrometer eyepiece part.
S320, placing a plane reflector on an objective table, reflecting collimated light beams emitted by an objective light pipe part into a micrometer eyepiece part through the plane reflector, focusing the collimated light beams on a scale reticle to form light spots, and recording the initial imaging positions of the light spots on the scale reticle;
s330, adjusting the levelness of the objective table until the initial imaging position of the light spot on the scale reticle coincides with the original point of the scale reticle.
S340, connecting the base to be tested with the mirror frame to be tested in a threaded manner, placing the base on an objective table, placing the base between the objective table and the mirror frame, and placing the plane mirror on the mirror frame;
s350, keeping the relative position of the base and the objective table fixed, connecting the base and the mirror frame in a threaded mode, rotating the mirror frame four times at an angle of 90 degrees in sequence, and recording the measuring and imaging position of the light spot on the scale reticle after each rotation. Wherein, the horizontal right direction of the scale reticle is taken as the X direction, the vertical upward direction of the scale reticle is taken as the Y direction, and the measurement imaging positions of the facula on the scale reticle after the recording of the four rotations are respectively (X)1，Y1)、(X2，Y2)、(X3，Y3) And (X)4，Y4)。
Wherein, because the picture frame rotates four times in turn at 90 degrees, the four measuring imaging positions are opposite to each other in pairs on an approximate circle, and the circle center position of the approximate circle is the position of the circle center
And the average value of the distances between the four measured imaging positions and the center of the circle is
S360, according to a formula:
calculating the perpendicularity alpha between the thread axis of the base and the bearing surface;
according to the formula:
calculating the verticality beta between the thread axis of the mirror frame and the bearing surface;
wherein D is the length corresponding to the unit scale on the scale reticle, and T is the conversion coefficient between the unit length on the scale reticle and the corresponding plane inclination angle.
An embodiment of the present invention further provides a perpendicularity measuring apparatus, which is used for measuring perpendicularity between the axis of the screw thread in the base and the mirror frame and the bearing surface, and with reference to fig. 2, the measuring apparatus includes: the optical autocollimator 30, the optical autocollimator 30 includes the objective table 31, objective light pipe part 31 and micrometering eyepiece part 32, the objective light pipe part 31 emits the collimated light beam, the micrometering eyepiece part 32 is provided with the graduation dividing plate 331; and a plane mirror 40, which is used for being respectively placed on the objective table 31 and a base and a mirror frame (not shown in the figure) which are screwed, reflecting the collimated light beam to the micrometer eye lens part 32 and focusing the collimated light beam on the scale reticle 331 to form a light spot.
The verticality measuring device provided by the embodiment of the invention utilizes an optical autocollimator and a plane reflector, and forms light spots on a scale reticle of the optical autocollimator by placing the plane reflector on an objective table of the optical autocollimator and records an initial imaging position; then the base and the mirror frame are in screw joint and are placed on the objective table, wherein the base is positioned between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame; then, on the basis of ensuring that the relative positions of the base and the objective table are fixed and the base and the picture frame are in threaded connection, rotating the picture frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation; and finally, according to the measurement imaging position, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle, and respectively calculating the perpendicularity of the threaded axis and the bearing surface of the base and the mirror frame according to the initial imaging position, the virtual imaging position, the measurement imaging position and the conversion relation between the unit distance and the plane inclination angle on the scale reticle. The perpendicularity measuring device provided by the embodiment of the invention can measure and calculate the perpendicularity of the base, the thread axis of the spectacle frame and the bearing surface at the same time, reduce the measuring time of the perpendicularity and improve the measuring and calculating efficiency of the perpendicularity; meanwhile, the calculation accuracy of the verticality can be guaranteed, the measurement by a high-accuracy tool is avoided, and the measurement cost is reduced to a certain extent.
Specifically, referring to fig. 7, the objective light pipe part includes a light source 321, a cross-shaped index reticle 322 and an objective lens 323, the cross-shaped index reticle 322 is located on the object focal plane of the objective lens 323, light emitted from the light source 321 forms a collimated light beam through the cross-shaped index reticle 322 and the objective lens 323, the collimated light beam is cross-shaped, and the light spot is a cross-shaped light spot. A scale reticle 331 is provided in the micrometer eyepiece part. The cross-shaped light spot is formed by the cross-shaped indication reticle 322, so that the position of the light spot on the scale reticle 331 can be read in an auxiliary manner, and the reading accuracy is ensured.
Optionally, the planar mirror comprises opposing reflective and transmissive surfaces. And, further, the flatness of the plane mirror may be set to be less than or equal to 0.0002 mm. Or the parallelism of the plane mirror is set to be less than or equal to 0.002 mm.
Further alternatively, with reference to fig. 8, the frame is provided with a threaded structure 211 and a cylindrical structure 221 facing away from the threaded structure 211, the cylindrical structure 221 comprising a bottom bearing surface 222, the outer and inner diameters of the bottom bearing surface 222 being b and c, respectively; the outer diameter of the plane reflector 40 is a, the outer diameter of the plane reflector 40 satisfies that c is more than a and less than b.
It is to be noted that the foregoing is only illustrative of the preferred embodiments of the present invention and the technical principles employed. It will be understood by those skilled in the art that the present invention is not limited to the particular embodiments described herein, but is capable of various obvious modifications, rearrangements, combinations and substitutions as will now become apparent to those skilled in the art without departing from the scope of the invention. Therefore, although the present invention has been described in greater detail by the above embodiments, the present invention is not limited to the above embodiments, and may include other equivalent embodiments without departing from the spirit of the present invention, and the scope of the present invention is determined by the scope of the appended claims.
Claims (10)
1. A perpendicularity measuring method, which is used for measuring perpendicularity between a thread axis and a bearing surface in a base and a mirror frame, and comprises the following steps:
providing an optical autocollimator and a plane reflector, wherein the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, the objective light pipe part emits collimated light beams, and a scale reticle is arranged in the micrometer eyepiece part;
placing the plane reflector on the objective table, reflecting the collimated light beam emitted by the objective light pipe part into the micrometer eyepiece part through the plane reflector, focusing the collimated light beam on the scale reticle to form a light spot, and recording the initial imaging position of the light spot on the scale reticle;
the base to be tested and the mirror frame to be tested are in threaded connection and are placed on the objective table, the base is located between the objective table and the mirror frame, and the plane mirror is placed on the mirror frame;
keeping the relative position of the base and the object stage fixed and the base and the mirror frame in a screwed connection, rotating the mirror frame at least three times, and recording the measurement imaging position of the light spot on the scale reticle after each rotation;
according to the measurement imaging position after each rotation, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle; calculating the perpendicularity between the thread axis of the base and the bearing surface according to the initial imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle; and calculating the perpendicularity between the thread axis of the mirror frame and the bearing surface according to the measurement imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle.
2. The perpendicularity measuring method according to claim 1, wherein before the mounting the base to be measured and the mirror frame to be measured are screwed and placed on the stage, the base is positioned between the stage and the mirror frame, and the plane mirror is placed on the mirror frame, the method further comprises:
and adjusting the levelness of the objective table until the initial imaging position of the light spot on the scale reticle is coincided with the original point of the scale reticle.
3. The perpendicularity measuring method according to claim 2, wherein the keeping of the relative positions of the base and the stage fixed and the threaded coupling of the base and the mirror frame and the rotating of the mirror frame at least three times to record the measured imaging position of the light spot on the scale reticle after each rotation comprises:
keeping the relative position of the base and the objective table fixed and the base and the mirror frame in a screwed connection, rotating the mirror frame four times at an angle of 90 degrees in sequence, and recording the measurement imaging position of the light spot on the scale reticle after each rotation.
4. The perpendicularity measuring method according to claim 3, wherein a direction to the right horizontally of the scale reticle is an X direction, and the scale reticle is a vertical directionThe upward direction is the Y direction, and the measurement imaging positions of the light spots on the scale reticle after recording four times of rotation are respectively (X)1，Y1)、(X2，Y2)、(X3，Y3) And (X)4，Y4)；
According to the measurement imaging position after each rotation, acquiring a virtual imaging position where the surface of the base reflects the collimated light beam on the scale reticle; calculating the perpendicularity between the thread axis of the base and the bearing surface according to the initial imaging position, the virtual imaging position and the conversion relation between the unit distance on the scale reticle and the plane inclination angle; according to the measurement imaging position, the virtual imaging position, and the conversion relation between the unit distance on the scale reticle and the plane inclination angle, the perpendicularity between the thread axis of the mirror frame and the bearing surface is calculated, and the method comprises the following steps:
according to the formula:
calculating the perpendicularity between the thread axis of the base and the bearing surface;
according to the formula:
calculating the perpendicularity between the thread axis of the mirror frame and the bearing surface;
and D is the length corresponding to the unit scale on the scale reticle, and T is the conversion coefficient of the unit length on the scale reticle and the corresponding plane inclination angle.
5. The perpendicularity measurement method of claim 1, wherein the planar mirror includes a reflective surface and a transmissive surface that are opposed, and placing the planar mirror on the stage includes:
placing the plane mirror on the objective table, wherein the reflecting surface is in contact with the objective table, and the collimated light beam emitted by the objective light pipe part is incident to the reflecting surface through the transmitting surface and is reflected into the micrometer eyepiece part through the reflecting surface;
placing the flat mirror on the frame, comprising: the flat mirror is placed on the frame with the reflective surface in contact with the frame.
6. Perpendicularity measuring apparatus for measuring perpendicularity of a threaded axis and a bearing surface in a base and a mirror frame according to the perpendicularity measuring method as claimed in any one of claims 1 to 5, comprising:
the optical autocollimator comprises an objective table, an objective light pipe part and a micrometer eyepiece part, wherein the objective light pipe part emits collimated light beams, and an imaging reticle is arranged in the micrometer eyepiece part;
and the plane reflector is used for being respectively placed on the objective table and the base and the mirror frame in threaded connection, reflecting the collimated light beams to the micrometer eyepiece part and focusing on the imaging reticle to form light spots.
7. The perpendicularity measuring apparatus of claim 6, wherein the planar mirror includes opposing reflective and transmissive surfaces.
8. The perpendicularity measuring device of claim 6, wherein a flatness of the planar mirror is less than or equal to 0.0002 mm.
9. The perpendicularity measuring device of claim 6, wherein a parallelism of the plane mirror is less than or equal to 0.002 mm.
10. Perpendicularity measuring device according to claim 6, characterized in that the mirror frame is provided with a threaded connection and a cylindrical structure facing away from the threaded connection, the cylindrical structure including a bottom bearing surface, the outer and inner diameters of the bottom bearing surface being b and c, respectively;
the outer diameter of the plane reflector is a, and the outer diameter of the plane reflector satisfies the following conditions: c < a < b.
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| CN111998776B (en) * | 2020-08-27 | 2022-02-22 | 中国科学院长春光学精密机械与物理研究所 | Two-dimensional platform orthogonality detection device and detection method thereof |
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| JP3695532B2 (en) * | 2002-02-25 | 2005-09-14 | 船井電機株式会社 | Shaft tilt angle measuring apparatus and measuring method |
| CN1304880C (en) * | 2005-08-09 | 2007-03-14 | 哈尔滨工业大学 | Long distance bidimension photoelectric self collimating device for drift amount target feedback control and its method |
| CN102607472B (en) * | 2012-03-06 | 2014-03-12 | 中国科学院西安光学精密机械研究所 | Measuring device and measuring method of wide-range flatness |
| CN103542790B (en) * | 2013-10-17 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | The system and method that off axis reflector mirror is accurately measured can be realized from axle amount |
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| CN205156878U (en) * | 2015-11-20 | 2016-04-13 | 合肥芯碁微电子装备有限公司 | A device for detecting exposure system optical axis straightness that hangs down |
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