CN114442335B - Level correction system - Google Patents
Level correction system Download PDFInfo
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- CN114442335B CN114442335B CN202011226157.8A CN202011226157A CN114442335B CN 114442335 B CN114442335 B CN 114442335B CN 202011226157 A CN202011226157 A CN 202011226157A CN 114442335 B CN114442335 B CN 114442335B
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- laser
- light spot
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- reflecting
- controller
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- 238000012937 correction Methods 0.000 title claims abstract description 40
- 238000000034 method Methods 0.000 description 10
- 238000010586 diagram Methods 0.000 description 7
- 238000012360 testing method Methods 0.000 description 7
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000009966 trimming Methods 0.000 description 2
- 230000000007 visual effect Effects 0.000 description 2
- 239000003086 colorant Substances 0.000 description 1
- 230000005622 photoelectricity Effects 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 238000012800 visualization Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/04—Optical benches therefor
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0207—Details of measuring devices
- G01M11/0214—Details of devices holding the object to be tested
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/32—Fiducial marks and measuring scales within the optical system
- G02B27/34—Fiducial marks and measuring scales within the optical system illuminated
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/08—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for attachment of work holders
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25H—WORKSHOP EQUIPMENT, e.g. FOR MARKING-OUT WORK; STORAGE MEANS FOR WORKSHOPS
- B25H1/00—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby
- B25H1/14—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top
- B25H1/18—Work benches; Portable stands or supports for positioning portable tools or work to be operated on thereby with provision for adjusting the bench top in inclination
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M11/00—Testing of optical apparatus; Testing structures by optical methods not otherwise provided for
- G01M11/02—Testing optical properties
- G01M11/0228—Testing optical properties by measuring refractive power
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
- G01B11/27—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes
- G01B11/272—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes for testing the alignment of axes using photoelectric detection means
Abstract
The utility model provides a horizontal correction system, which comprises a platform, a first adjusting device, chuck device, a first reflecting device, a second adjusting device, the plummer, a second reflecting device, laser emitter, laser receiver and controller, laser emitter launches incident laser, a first reflecting device and second reflecting device all are used for reflecting incident laser and form reflected laser, laser receiver is used for receiving reflected laser, the controller is used for determining chuck device or plummer's height, judge simultaneously that the reflection facula central point is skew for incident facula central point, if offset, then adjust a adjusting device or second adjusting device and then make reflection facula central point and incident facula central point coincidence, thereby realize the leveling of chuck device or plummer.
Description
Technical Field
The invention relates to the technical field of photoelectricity, in particular to a horizontal correction system.
Background
The lens test machine is used for testing and assembling the lens and mainly comprises an AA chuck and a bearing table, wherein when the lens is assembled and tested, the lens is clamped on the AA chuck, a camera for collecting reflected light is placed on the bearing table, in order to improve the yield of the assembled lens, the AA chuck and the bearing table are required to be calibrated in advance in terms of levelness and height, the planes of the bearing table and the AA chuck are guaranteed to be parallel, and the heights of the AA chuck and the bearing table meet the requirements.
The correction method of the AA chuck and the bearing table which are commonly adopted at present is complex in correction flow, low in efficiency and low in correction accuracy.
Disclosure of Invention
In view of this, there is a need to provide an efficient multi-plane level correction system.
The present invention provides a level correction system comprising: the laser device comprises a platform, a first adjusting device arranged on the platform, a chuck device arranged on the first adjusting device, a first reflecting device detachably arranged on the chuck device, a second adjusting device arranged on the platform, a bearing table arranged on the second adjusting device, a second reflecting device detachably arranged on the bearing table, a laser transmitting device, a laser receiver and a controller, wherein the laser transmitting device and the laser receiver are in signal connection with the controller.
The laser emitting device is used for emitting incident laser.
The first reflecting device and the second reflecting device are used for reflecting the incident laser to form reflected laser.
The laser receiver is configured to receive the reflected laser light.
The controller is used for determining the height of the chuck device or the bearing table, judging whether the center point of a reflection light spot formed by the reflection laser is offset relative to the center point of an incident light spot formed by the incident laser, and adjusting the first adjusting device or the second adjusting device to further adjust the levelness of the chuck device or the bearing table if the center point of the reflection light spot deviates from the center point of the incident light spot, so that the center point of the reflection light spot coincides with the center point of the incident light spot.
In this embodiment of the present application, the controller is further configured to control the first adjusting device or the second adjusting device to adjust levelness of the chuck device or the carrying platform.
In this embodiment, the plummer is located the top of chuck device, the plummer includes a through-hole, the second reflecting device set up in through-hole department, the first reflecting device set up in the below of through-hole.
In this embodiment, the incident laser includes a first incident laser and a second incident laser, where the first incident laser is used to penetrate through the second reflecting device, and is incident to the first reflecting device and reflected by the first reflecting device, and the second incident laser is used to be incident to the second reflecting device and reflected by the second reflecting device.
In this embodiment, first adjusting device includes first actuating mechanism and fine setting post, chuck device set up in the top of fine setting post, first actuating mechanism with controller electric connection, first actuating mechanism is used for the control of controller is driven fine setting post reciprocates, and then adjusts chuck device's levelness.
In this embodiment, the number of the second adjusting devices is at least three, and at least three second adjusting devices are disposed at the bottom of the bearing table.
In this embodiment, second adjusting device includes second actuating mechanism and lift post, the plummer set up in the top of lift post, second actuating mechanism with controller electric connection, second actuating mechanism is used for the control of controller is down drive the lift post reciprocates, and then adjusts the levelness of plummer.
In this embodiment, the incident light spot and the reflected light spot are both cross-shaped.
In an embodiment of the present application, the system further includes a display device, and the display device is in signal connection with the controller.
In this embodiment, the first adjusting device and the second adjusting device are adjusting nuts.
Compared with the prior art, the horizontal correction system provided by the invention can quickly and accurately perform automatic visual leveling actions on a plurality of planes such as the chuck device and the bearing table on the lens test machine table, has high leveling precision which can reach 0.01 degrees, has high speed, and effectively improves the correction efficiency and the correction precision; the correction system is light, convenient to move and use and wide in application range; and the correction data is automatically uploaded to the client, so that follow-up tracking and checking are facilitated.
Drawings
Fig. 1 is a schematic structural diagram of a level correction system according to an embodiment of the present invention.
Fig. 2 is a schematic structural diagram of a chuck device in a horizontal calibration system according to an embodiment of the present invention.
Fig. 3 is a diagram of a laser path when leveling a chuck device of a leveling system according to an embodiment of the present invention.
Fig. 4 is a diagram showing a spot calibration process according to a display device when the levelness of the chuck device of the leveling system is calibrated according to an embodiment of the present invention.
Fig. 5 is a laser light path diagram of a leveling system for leveling a stage according to an embodiment of the present invention.
Fig. 6 is a diagram showing a flare correction process performed by the display device when the levelness of the stage of the leveling system is corrected according to an embodiment of the present invention.
Fig. 7 is a diagram showing a spot calibration process performed by the display device when the chuck device and the carrying table of the leveling system perform leveling calibration simultaneously according to an embodiment of the present invention.
Description of the main reference signs
The invention will be further described in the following detailed description in conjunction with the above-described figures.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When a component is considered to be "connected" to another component, it can be directly connected to the other component or intervening components may also be present. When an element is referred to as being "disposed on" another element, it can be directly on the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
The system embodiments described below are merely illustrative, and the division of the modules or circuits is merely a logical function division, and other manners of division may be implemented in practice. Furthermore, it is evident that the word "comprising" does not exclude other elements or steps, and that the singular does not exclude a plurality. Multiple units or means recited in the system claims may also be implemented by means of software or hardware by means of one and the same unit or means. The terms first, second, etc. are used to denote a name, but not any particular order.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Referring to fig. 1, a horizontal correction system 100 according to an embodiment of the present invention is specifically used for correcting a lens test machine, where the system 100 includes: platform 1, locate first adjusting device 2 on the platform 1, locate chuck device 3 on the first adjusting device 2, locate first reflecting device 4 on the chuck device 3, locate second adjusting device 5 on the platform 1, locate plummer 6 on the second adjusting device 5, detachably locates second reflecting device 7 on plummer 6, locate laser emitter 8, laser receiver 9 and the controller 11 of plummer 6 top. The controller 11 is electrically connected to the first adjusting device 2, the second adjusting device 5, the laser emitting device 8 and the laser receiver 9, respectively.
When the lens testing machine is in actual use, the lens is clamped on the AA chuck, a camera for collecting reflected light is placed on the bearing table, and in order to improve the yield of the assembled lens, levelness and height calibration of the AA chuck and the bearing table are required to be carried out in advance.
The laser emitting device 8 is used for emitting incident laser light.
The first reflecting device 4 and the second reflecting device 7 are used for reflecting the incident laser light to form reflected laser light.
The laser receiver 9 is configured to receive the reflected laser light.
The controller 11 is configured to determine the height of the chuck device 3 or the carrying table 6, and determine whether a center point of a reflected light spot formed by the reflected laser is offset with respect to a center point of an incident light spot formed by the incident laser, and if the center point of the reflected light spot deviates from the center point of the incident light spot, adjust the first adjusting device 2 or the second adjusting device 5, and further adjust the levelness of the chuck device 3 or the carrying table 6, so that the center point of the reflected light spot coincides with the center point of the incident light spot.
Referring to fig. 1, the chuck device 3 is located directly below the carrying table 6, the carrying table 6 has a through hole 12 corresponding to the chuck device 3, and the chuck device 3 can be observed from top to bottom through the through hole 12. The second reflecting device 7 is disposed at the through hole 12, and the first reflecting device 4 is disposed directly under the second reflecting device 7.
Referring to fig. 2, the chuck device 3 includes a chuck base 31, a chuck arm 32 disposed on the chuck base 31, and a chuck 33 disposed at an end of the chuck arm 32 away from the chuck base 31, and the first adjusting device 2 is disposed at the bottom of the chuck base 31 and is used for adjusting the height of the chuck base 31 and further adjusting the levelness of the chuck 33.
Referring to fig. 1, the first adjusting device 2 includes a first driving mechanism (not shown) and a trimming post (not shown), the first driving mechanism is electrically connected to the controller 11, and the first driving mechanism drives the trimming post to move up and down under the control of the controller 11, so as to fine-adjust the heights of the two ends of the chuck base 31, and finally achieve the purpose of adjusting the levelness of the chuck 33.
In this embodiment, the number of the first adjusting devices 2 is three, two of the first adjusting devices 2 are respectively disposed at two ends of the chuck base 31, and are used for adjusting the levelness of the chuck device 3, and the heights of the two ends of the chuck base 31 are adjusted by moving the first adjusting devices 2 up and down, so as to adjust the levelness of the chuck 33, so that the chuck 33 is kept horizontal. The other first adjusting device 2 is disposed on the top of the chuck base 31 for adjusting the height of the chuck device 3, so that the distance between the chuck device 3 and the carrying table 6 is adjusted to a desired height.
In another embodiment, the first adjusting device 2 may be an adjusting nut, and the adjustment of the levelness and the height of the chuck device 3 is achieved by manually adjusting the adjusting nut.
Referring to fig. 1, the carrying table 6 is of a substantially rectangular structure, a circular through hole 12 is provided in the middle of the carrying table 6, the second adjusting device 5 is disposed at the bottom of the carrying table 6, the second adjusting device 5 includes a second driving mechanism (not shown) and a lifting column (not shown), the carrying table 6 is disposed at the top end of the lifting column, the second driving mechanism is electrically connected with the controller 11, and the second driving mechanism is used for driving the lifting column to lift up and down under the control of the controller 11, so as to adjust the heights of different portions of the carrying table 6, thereby keeping the whole carrying table 6 horizontal.
Specifically, in this embodiment, at least three second adjusting devices 5 are provided, and three second adjusting devices 5 are disposed at the bottoms of the three corners of the carrying platform 6. Three points form a plane, and the carrying platform 6 can be adjusted to be horizontal by controlling the second adjusting device 5 at three different positions.
In another embodiment, the second adjusting device 5 may be an adjusting nut, and the adjustment of the levelness and the height of the carrying platform 6 is achieved by manually adjusting the adjusting nut.
Referring to fig. 1, the laser emitting device 8 is disposed directly above the second reflecting device 7, and the incident laser emitted by the laser emitting device 8 can be incident on the first reflecting device 4 or the second reflecting device 7 and reflected by the first reflecting device 4 or the second reflecting device 7 to form the reflected laser.
Referring to fig. 4 in combination, in this embodiment, the system 100 further includes laser processing software, the laser emitting device 8 may transmit the emitted incident laser to the laser processing software for processing, the laser processing software may process the incident laser into an incident light spot, and the controller 11 may obtain the incident light spot, where the incident light spot is a cross-shaped light spot.
In this embodiment, the laser emitting device 8 is a vertical cavity surface emitting laser, and can measure the horizontal height of the first reflecting device 4 or the second reflecting device 7 at the same time.
Referring to fig. 1, the laser receiver 9 receives the reflected laser light, and transmits the reflected laser light to the laser processing software, the laser processing software may process the reflected laser light into a reflected light spot, and the controller 11 may obtain the reflected light spot, where the reflected light spot is also a cross-shaped light spot.
In this embodiment, the incident light spot and the reflected light spot are different colors, specifically, the incident light spot is red, and the reflected light spot is blue, so that human eyes can observe and distinguish the incident light spot and the reflected light spot conveniently.
After the controller 11 obtains the incident light spot and the reflected light spot, on one hand, the height of the chuck device 3 or the bearing table 6 is determined, and on the other hand, whether the reflected light spot is offset compared with the incident light spot is judged. If the reflected light spot is offset, the first adjusting device 2 or the second adjusting device 5 is adjusted to enable the reflected light spot to move and coincide with the incident light spot, and when the reflected light spot coincides with the incident light spot, the chuck device 3 or the bearing table 6 is leveled. If the reflected spot and the incident spot are coincident, no leveling of the chuck device 3 and the carrier table 6 is required.
In this embodiment, the adjustment of the first adjusting device 2 and the second adjusting device 5 may be controlled by the controller 11 to achieve automatic adjustment, or may be manually adjusted.
In this embodiment, the system 100 further includes a display device 10, where the display device 10 is in signal connection with the controller 11, so as to display the incident light spot and the reflected light spot, so as to realize the visualization of correction, and facilitate timely understanding of the correction process.
In this embodiment, the system 100 further communicates with the client, and after each correction, the controller 11 uploads the number of the corrected lens test platform, the correction process data and the corresponding picture to the client for subsequent viewing.
Referring to fig. 3 to 7, the incident laser light includes a first incident laser light a1 and a second incident laser light b1, the first incident laser light a1 is used for being incident to the first reflecting device 4 through the second reflecting device 7 and being reflected by the first reflecting device 4 to form a first reflected laser light a2, and the second incident laser light b1 is used for being incident to the second reflecting device 7 and being reflected by the second reflecting device 7 to form a second reflected laser light b2. The above correction process may be performed in the following two cases depending on whether the first incident laser light a1 and the second incident laser light b1 are emitted simultaneously or not.
Referring to fig. 3 to 6, when the laser emitting device 8 emits the first incident laser light a1 and the second incident laser light b1, respectively, the chuck device 3 and the carrier table 6 are calibrated respectively. The method comprises the following specific steps:
in step S1, the laser emitting device 8 emits the first incident laser a1, the first incident laser a1 enters the first reflecting device 4, and the laser emitting device 8 transmits the first incident laser a1 to the laser processing software, and converts the first incident laser a1 into the first incident light spot a3 through the laser processing software, and the controller 11 obtains the first incident light spot a3 and displays the first incident light spot a3 on the display device 10.
In step S2, the first reflection device 4 reflects the first incident laser light a1, and the formed first reflected laser light a2 enters the laser receiver 9.
In step S3, the laser receiver 9 acquires the first reflected laser light a2, the first reflected laser light a2 is converted into a first reflected light spot a4 by the laser software, and the controller 11 acquires the first reflected light spot a4.
In step S4, after the controller 11 obtains the first incident light spot a3 and the first reflected light spot a4, it is determined whether the first reflected light spot a4 is offset with respect to the first incident light spot a 3.
In step S5, if the first reflected light spot a4 is offset with respect to the first incident light spot a3, the first adjusting device 2 is adjusted to move the cross-shaped first reflected light spot a4 to overlap the cross-shaped first incident light spot a3, and finally the chuck device 3 is leveled.
In step S6, the laser emitting device 8 emits the second incident laser beam b1, the second incident laser beam b1 enters the second reflecting device 7, and the laser emitting device 8 transmits the second incident laser beam b1 to the laser processing software, the laser processing software converts the second incident laser beam b1 into the second incident light spot b3, and the controller 11 acquires the second incident light spot b3 and displays the second incident light spot on the display device 10.
In step S7, the second reflection device 7 reflects the second incident laser light b1, and the formed second reflected laser light b2 enters the laser receiver 9.
In step S8, the laser receiver 9 acquires the second reflected laser beam b2, and transmits the second reflected laser beam b2 to the laser processing software, and the laser processing software converts the second reflected laser beam b2 into the second reflected light spot b4, and the controller 11 acquires the second reflected light spot b4.
In step S9, the controller 11 acquires the second incident light spot b3 and the second reflected light spot b4, and determines whether the second reflected light spot b4 is offset with respect to the second incident light spot b 3.
In step S10, if the second reflected light spot b4 is offset with respect to the second incident light spot b3, the second adjusting device 5 is adjusted to move the cross-shaped second reflected light spot b4 to overlap the cross-shaped second incident light spot b3, and finally the bearing table 6 is leveled.
Wherein the leveling of the chuck device 3 by steps S1 to S5 and the leveling of the carrying platform 6 by steps S6 to S10 are not in sequence.
In this embodiment, when the chuck device 3 needs to be calibrated, the first reflecting device 4 is placed on the chuck device 3, and removed after calibration is completed. When the correction is required to be performed on the carrying table 6, the second reflecting device 7 is placed on the carrying table 6, and is taken down after the correction is completed, and at this time, the first reflecting device 4 and the second reflecting device 7 are two reflecting mirrors. In addition, the first reflecting means 4 and the second reflecting means 7 may be the same reflecting mirror.
Referring to fig. 7, referring to fig. 1 in combination, when the laser emitting device 8 emits the first incident laser light a1 and the second incident laser light b1 simultaneously, the chuck device 3 and the carrier 6 perform calibration simultaneously. That is, the leveling of the chuck device 3 in steps S1 to S5 and the leveling of the bearing table 6 in steps S6 to S10 are performed simultaneously, and leveling correction is performed simultaneously, so that the correction efficiency is higher. At this time, the first incident laser light a1 and the second incident laser light b1 are two different laser light, the first reflection device 4 may reflect the first incident laser light a1 while transmitting the second incident laser light b1, and the second reflection device 7 may be capable of reflecting the second incident laser light b1.
The level correction system 100 provided in the embodiment of the invention can be also suitable for other instruments needing to adjust absolute level, and can also be matched with a calculator system for measuring the heights of the chuck device and the bearing table, etc.
Compared with the prior art, the horizontal correction system provided by the invention can quickly and accurately perform automatic visual leveling actions on a plurality of planes such as the chuck device and the bearing table on the lens test machine table, has high leveling precision which can reach 0.01 degrees, has high speed, and effectively improves the correction efficiency and the correction precision; the correction system is light, convenient to move and use and wide in application range; and the correction data is automatically uploaded to the client, so that follow-up tracking and checking are facilitated.
In addition, various other corresponding changes and modifications can be made by those skilled in the art according to the technical idea of the present invention, and all such changes and modifications are intended to fall within the scope of the claims of the present invention.
Claims (9)
1. A level correction system, comprising: the laser device comprises a platform, a first adjusting device arranged on the platform, a chuck device arranged on the first adjusting device, a first reflecting device detachably arranged on the chuck device, a second adjusting device arranged on the platform, a bearing table arranged on the second adjusting device, a second reflecting device detachably arranged on the bearing table, a laser transmitting device, a laser receiver and a controller, wherein the laser transmitting device and the laser receiver are in signal connection with the controller,
the laser emitting device is used for emitting incident laser;
the first reflecting device and the second reflecting device are used for reflecting the incident laser to form reflected laser;
the laser receiver is used for receiving the reflected laser light;
the incident laser light includes a first incident laser light and a second incident laser light, the reflected laser light includes a first reflected laser light and a second reflected laser light, the first incident laser light is used for being incident to the first reflecting device through the second reflecting device and being reflected by the first reflecting device to form the first reflected laser light, the second incident laser light is used for being incident to the second reflecting device and being reflected by the second reflecting device to form the second reflected laser light,
the controller is used for determining the height of the chuck device or the bearing table, and meanwhile, the controller is also used for judging whether the center point of a first reflection light spot formed by the first reflection laser is offset relative to the center point of a first incidence light spot formed by the first incidence laser, if the center point of the first reflection light spot deviates from the center point of the first incidence light spot, the first adjusting device is adjusted to adjust the levelness of the chuck device, so that the center point of the first reflection light spot coincides with the center point of the first incidence light spot; the controller is further configured to determine whether a center point of a second reflection light spot formed by the second reflection laser is offset with respect to a center point of a second incidence light spot formed by the second incidence laser, and if the center point of the second reflection light spot deviates from the center point of the second incidence light spot, adjust the second adjusting device to further adjust the levelness of the bearing platform, so that the center point of the second reflection light spot coincides with the center point of the second incidence light spot.
2. The level correction system as set forth in claim 1, wherein said carrier is positioned above said chuck means, said carrier including a through hole, said second reflecting means being disposed at said through hole, said first reflecting means being disposed below said through hole.
3. The level correction system of claim 2, wherein the incident laser light includes a first incident laser light for incidence to and reflection by the first reflecting means through the second reflecting means and a second incident laser light for incidence to and reflection by the second reflecting means.
4. The level correction system of claim 1, wherein the first adjustment device comprises a first driving mechanism and a fine adjustment column, the chuck device is disposed at a top end of the fine adjustment column, the first driving mechanism is electrically connected to the controller, and the first driving mechanism is used for driving the fine adjustment column to move up and down under the control of the controller, so as to adjust the levelness of the chuck device.
5. The level correction system of claim 1, wherein said second adjustment means is at least three, and wherein at least three of said second adjustment means are disposed at the bottom of said carrying floor.
6. The leveling system of claim 5, wherein the second adjusting device comprises a second driving mechanism and a lifting column, the bearing platform is arranged at the top end of the lifting column, the second driving mechanism is electrically connected with the controller, and the second driving mechanism is used for driving the lifting column to move up and down under the control of the controller so as to adjust the levelness of the bearing platform.
7. The level correction system as set forth in claim 1 wherein said incident light spot and said reflected light spot are each in the shape of a cross.
8. The level correction system of claim 1, further comprising a display device in signal communication with the controller.
9. The level correction system of claim 1, wherein said first adjustment means and said second adjustment means are each an adjustment nut.
Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011226157.8A CN114442335B (en) | 2020-11-05 | 2020-11-05 | Level correction system |
| US17/118,954 US11397128B2 (en) | 2020-11-05 | 2020-12-11 | Level correction system |
| TW109147149A TWI759052B (en) | 2020-11-05 | 2020-12-31 | Level correction system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011226157.8A CN114442335B (en) | 2020-11-05 | 2020-11-05 | Level correction system |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114442335A CN114442335A (en) | 2022-05-06 |
| CN114442335B true CN114442335B (en) | 2024-01-30 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011226157.8A Active CN114442335B (en) | 2020-11-05 | 2020-11-05 | Level correction system |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US11397128B2 (en) |
| CN (1) | CN114442335B (en) |
| TW (1) | TWI759052B (en) |
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|---|---|---|---|---|
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| US11397128B2 (en) | 2022-07-26 |
| CN114442335A (en) | 2022-05-06 |
| US20220136928A1 (en) | 2022-05-05 |
| TW202219594A (en) | 2022-05-16 |
| TWI759052B (en) | 2022-03-21 |
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