TW200617364A - A real time straightness error measuring method for a moving stage - Google Patents

A real time straightness error measuring method for a moving stage

Info

Publication number
TW200617364A
TW200617364A TW093136212A TW93136212A TW200617364A TW 200617364 A TW200617364 A TW 200617364A TW 093136212 A TW093136212 A TW 093136212A TW 93136212 A TW93136212 A TW 93136212A TW 200617364 A TW200617364 A TW 200617364A
Authority
TW
Taiwan
Prior art keywords
real time
moving stage
measuring method
spot position
reflection lens
Prior art date
Application number
TW093136212A
Other languages
Chinese (zh)
Inventor
Jian-Hung Liou
Wen-Yu Jiue
Hao-Wei Li
Original Assignee
Jian-Hung Liou
Wen-Yu Jiue
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jian-Hung Liou, Wen-Yu Jiue filed Critical Jian-Hung Liou
Priority to TW093136212A priority Critical patent/TW200617364A/en
Publication of TW200617364A publication Critical patent/TW200617364A/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The present invention provides a real time straightness error measuring method for a moving stage, which employs a fixed laser source, a light spot position sensor, and a corner reflection lens to be integrated as a real time measuring means. The measuring method is to fix the corner reflection lens at a suitable position on a moving stage; then, the laser source would emit a laser beam toward the corner reflection lens, which is incident into the corner reflection lens; after reflection, the laser beam would be incident in parallel onto the spot position sensor; and then, the spot position sensor would detect the variation of spot position for the reflected light, so as to real time measure the horizontal and straightness errors for the moving stage, and the error feedback is employed for precise positioning control.
TW093136212A 2004-11-24 2004-11-24 A real time straightness error measuring method for a moving stage TW200617364A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW093136212A TW200617364A (en) 2004-11-24 2004-11-24 A real time straightness error measuring method for a moving stage

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW093136212A TW200617364A (en) 2004-11-24 2004-11-24 A real time straightness error measuring method for a moving stage

Publications (1)

Publication Number Publication Date
TW200617364A true TW200617364A (en) 2006-06-01

Family

ID=57808136

Family Applications (1)

Application Number Title Priority Date Filing Date
TW093136212A TW200617364A (en) 2004-11-24 2004-11-24 A real time straightness error measuring method for a moving stage

Country Status (1)

Country Link
TW (1) TW200617364A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398877B (en) * 2009-04-08 2013-06-11 Univ Nat Formosa Straightness error measurement device
CN111272394A (en) * 2020-02-25 2020-06-12 Oppo广东移动通信有限公司 Test method and test system
CN114147540A (en) * 2021-12-10 2022-03-08 三明学院 Calibration device for error of numerical control machine tool rotating table
TWI759052B (en) * 2020-11-05 2022-03-21 新煒科技有限公司 Level correction system

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI398877B (en) * 2009-04-08 2013-06-11 Univ Nat Formosa Straightness error measurement device
CN111272394A (en) * 2020-02-25 2020-06-12 Oppo广东移动通信有限公司 Test method and test system
CN111272394B (en) * 2020-02-25 2022-05-20 Oppo广东移动通信有限公司 Test method and test system
TWI759052B (en) * 2020-11-05 2022-03-21 新煒科技有限公司 Level correction system
CN114147540A (en) * 2021-12-10 2022-03-08 三明学院 Calibration device for error of numerical control machine tool rotating table

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