TW200617364A - A real time straightness error measuring method for a moving stage - Google Patents
A real time straightness error measuring method for a moving stageInfo
- Publication number
- TW200617364A TW200617364A TW093136212A TW93136212A TW200617364A TW 200617364 A TW200617364 A TW 200617364A TW 093136212 A TW093136212 A TW 093136212A TW 93136212 A TW93136212 A TW 93136212A TW 200617364 A TW200617364 A TW 200617364A
- Authority
- TW
- Taiwan
- Prior art keywords
- real time
- moving stage
- measuring method
- spot position
- reflection lens
- Prior art date
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a real time straightness error measuring method for a moving stage, which employs a fixed laser source, a light spot position sensor, and a corner reflection lens to be integrated as a real time measuring means. The measuring method is to fix the corner reflection lens at a suitable position on a moving stage; then, the laser source would emit a laser beam toward the corner reflection lens, which is incident into the corner reflection lens; after reflection, the laser beam would be incident in parallel onto the spot position sensor; and then, the spot position sensor would detect the variation of spot position for the reflected light, so as to real time measure the horizontal and straightness errors for the moving stage, and the error feedback is employed for precise positioning control.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093136212A TW200617364A (en) | 2004-11-24 | 2004-11-24 | A real time straightness error measuring method for a moving stage |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW093136212A TW200617364A (en) | 2004-11-24 | 2004-11-24 | A real time straightness error measuring method for a moving stage |
Publications (1)
Publication Number | Publication Date |
---|---|
TW200617364A true TW200617364A (en) | 2006-06-01 |
Family
ID=57808136
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW093136212A TW200617364A (en) | 2004-11-24 | 2004-11-24 | A real time straightness error measuring method for a moving stage |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW200617364A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI398877B (en) * | 2009-04-08 | 2013-06-11 | Univ Nat Formosa | Straightness error measurement device |
CN111272394A (en) * | 2020-02-25 | 2020-06-12 | Oppo广东移动通信有限公司 | Test method and test system |
CN114147540A (en) * | 2021-12-10 | 2022-03-08 | 三明学院 | Calibration device for error of numerical control machine tool rotating table |
TWI759052B (en) * | 2020-11-05 | 2022-03-21 | 新煒科技有限公司 | Level correction system |
-
2004
- 2004-11-24 TW TW093136212A patent/TW200617364A/en unknown
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI398877B (en) * | 2009-04-08 | 2013-06-11 | Univ Nat Formosa | Straightness error measurement device |
CN111272394A (en) * | 2020-02-25 | 2020-06-12 | Oppo广东移动通信有限公司 | Test method and test system |
CN111272394B (en) * | 2020-02-25 | 2022-05-20 | Oppo广东移动通信有限公司 | Test method and test system |
TWI759052B (en) * | 2020-11-05 | 2022-03-21 | 新煒科技有限公司 | Level correction system |
CN114147540A (en) * | 2021-12-10 | 2022-03-08 | 三明学院 | Calibration device for error of numerical control machine tool rotating table |
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