CN110338815A - Flexible apparatus and its manufacturing method for the detection of deep layer blood oxygen - Google Patents
Flexible apparatus and its manufacturing method for the detection of deep layer blood oxygen Download PDFInfo
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- A61B5/145—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
- A61B5/1455—Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using optical sensors, e.g. spectral photometrical oximeters
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Abstract
This disclosure relates to a kind of flexible apparatus and its manufacturing method for the detection of deep layer blood oxygen.The device includes light source assembly, photoelectric detection component and flexible substrates, and light source assembly includes vertical cavity surface emitting laser VCSEL, for emitting the light wave of different central wavelengths or different spectral to detected object；Photoelectric detection component receive light wave reflection after optical signal and carry out photoelectric conversion, can be obtained after subsequent progresss signal processing blood oxygen detect signal；Flexible substrates are fabricated from a flexible material, and are used for packaged light source component and photoelectric detection component.In accordance with an embodiment of the present disclosure, it can be realized the blood oxygen detection for relatively going deep into position, various components are encapsulated by flexible substrates simultaneously, it allows the device to occur largely to extend and deform, convenient for fitting to skin surface, it realizes the detection to deeper arteries (such as arteria carotis and femoral artery) blood oxygen saturation, wearing can also be facilitated, realize the real-time detection of high reliability.
Description
Technical field
This disclosure relates to technical field of electronic devices more particularly to it is a kind of for deep layer blood oxygen detection flexible apparatus and its
Manufacturing method can be used for the detection of deep layer blood oxygen.
Background technique
Blood oxygen saturation (SpO2) refer to the oxyhemoglobin capacity (HbO combined in blood by oxygen2) account for all it is combinable
Hemoglobin content (Hb) percentage, be reflect blood of human body oxygen content important parameter, be measure blood of human body carry
The physiological parameter of oxygen ability has important reference value in clinical medicine detection and medical monitoring arts.And functional oxygen is satisfied
With degree (such as arterial oxygen saturation SaO2) it is HbO2Concentration and HbO2The ratio between with Hb concentration, it is different from shared by oxyhemoglobin
Percentage.Many clinical diseases will cause the shortage of oxygen supply, this will directly affect the eubolism of cell, serious to go back
The life of people can be threatened, so the real-time detection of arterial blood oxygen concentration is extremely important in clinic rescue.
It is more concentrated currently, the device for detecting blood oxygen saturation is mainly limited to the distribution of the capillaries such as distal limb
Position, cannot achieve prolonged dynamic detection, (such as femoral artery, neck are dynamic for the arteries at the positions such as heart, brain
Arteries and veins) blood oxygen detection it is even more fewer and fewer, and the blood oxygen for clinically detecting those positions remains finger cot type or artery remaining
" Blind Test " of pin type progress blood oxygen.
Summary of the invention
In view of this, the present disclosure proposes a kind of flexible apparatus and manufacturing method for the detection of deep layer blood oxygen.
According to the one side of the disclosure, a kind of flexible apparatus for the detection of deep layer blood oxygen is provided, comprising:
Light source assembly emits light wave to detected object；
Photoelectric detection component receives optical signal of the light wave after detected object reflection, and believes the light
Number carry out photoelectric conversion, obtain blood oxygen detect signal；
Flexible substrates are fabricated from a flexible material, for encapsulating the light source assembly and the photoelectric detection component；
Wherein, the light source assembly includes multiple vertical cavity surface emitting lasers (VCSEL), the multiple VCSEL transmitting
The light wave of different central wavelengths or different spectral.
In one possible implementation, the flexible substrates include bottom flexible substrate and top layer flexible substrates, institute
Stating has multiple pedestals and the interconnecting piece between the multiple pedestal, the light source assembly and described in bottom flexible substrate
Photoelectric detection component is separately positioned on multiple pedestals,
Wherein, the top layer flexible substrates cover multiple pedestals, the interconnecting piece, the light source assembly and photoelectricity inspection
Survey component.
In one possible implementation, the pedestal and the interconnecting piece include the first insulating layer, conductive layer and the
Two insulating layers, wherein the part second insulating layer of the pedestal is photo-etched the partial electroconductive layer divided by the exposure pedestal, institute
State light source assembly and the photoelectric detection component fit to respectively the pedestal conductive layer expose portion.
In one possible implementation, the interconnecting piece is multistage fractal structure.
In one possible implementation, described device further include:
Processing component is connected respectively to the light source assembly and the photoelectric detection component via the conductive layer, described
Processing component is used to carry out signal processing to blood oxygen detection signal, obtains treated detection data.
In one possible implementation, the conductive layer includes the first metal layer and second metal layer, and described first
Metal layer is layers of chrome, and the second metal layer is layer gold.
According to another aspect of the present disclosure, a kind of manufacturer of flexible apparatus that can be used for the detection of deep layer blood oxygen is provided
Method, comprising:
Sacrificial layer, the first insulating layer and conductive layer are sequentially generated on a silicon substrate；
Processing is performed etching to first insulating layer and the conductive layer according to the first figure, first after forming etching
Insulating layer and conductive layer；
Second insulating layer is formed on first insulating layer and the conductive layer；
Photoetching treatment is carried out to the second insulating layer according to second graph, the second insulating layer after obtaining photoetching；
First insulating layer, the conductive layer and the second insulating layer are transferred to bottom flexible substrate, form base
Seat and the interconnecting piece between multiple pedestals；
Light source assembly and photoelectric detection component are fitted to the expose portion of the conductive layer of the pedestal respectively；
The pedestal, the interconnecting piece, the light source assembly and the Photoelectric Detection group are encapsulated by top layer flexible substrates
Part forms the flexible apparatus.
In one possible implementation, the light source assembly includes multiple VCSEL, and the multiple VCSEL transmitting is not
With the light wave of central wavelength or different spectral.
In one possible implementation, the interconnecting piece is multistage fractal structure.
In one possible implementation, the method also includes: the conductive layer of the interconnecting piece is connected to processing
Component, so that the processing component is separately connected the light source assembly and the photoelectric detection component, institute via the conductive layer
Processing component is stated for carrying out signal processing to blood oxygen detection signal, obtains treated detection data.
Flexible apparatus and its manufacturing method according to an embodiment of the present disclosure for the detection of deep layer blood oxygen, passes through VCSEL
It can be realized the blood oxygen detection for relatively going deep into position of detected object, while encapsulating each component by flexible substrates, so that this is soft
Property device can extend and deform, and convenient for fitting to the skin surface of detected object, realize the real-time detection of high reliability.
According to below with reference to the accompanying drawings to detailed description of illustrative embodiments, the other feature and aspect of the disclosure will become
It is clear.
Detailed description of the invention
Comprising in the description and constituting the attached drawing of part of specification and specification together illustrates the disclosure
Exemplary embodiment, feature and aspect, and for explaining the principles of this disclosure.
Fig. 1 is a kind of block diagram of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment.
Fig. 2 is a kind of exploded pictorial of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
Figure.
Fig. 3 a and Fig. 3 b are a kind of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
The schematic diagram of interconnecting piece.
Fig. 4 is a kind of cross-sectional view of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment.
Fig. 5 is a kind of manufacturing method of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
Flow chart.
Fig. 6 a- Fig. 6 i is a kind of system of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
Make the schematic diagram of process.
Specific embodiment
Various exemplary embodiments, feature and the aspect of the disclosure are described in detail below with reference to attached drawing.It is identical in attached drawing
Appended drawing reference indicate element functionally identical or similar.Although the various aspects of embodiment are shown in the attached drawings, remove
It non-specifically points out, it is not necessary to attached drawing drawn to scale.
Dedicated word " exemplary " means " being used as example, embodiment or illustrative " herein.Here as " exemplary "
Illustrated any embodiment should not necessarily be construed as preferred or advantageous over other embodiments.
In addition, giving numerous details in specific embodiment below to better illustrate the disclosure.
It will be appreciated by those skilled in the art that without certain details, the disclosure equally be can be implemented.In some instances, for
Method, means, element and circuit well known to those skilled in the art are not described in detail, in order to highlight the purport of the disclosure.
Fig. 1 is a kind of block diagram of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment.Such as
Shown in Fig. 1, include: according to the flexible apparatus of the embodiment of the present disclosure
Light source assembly 11 emits light wave to detected object；
Photoelectric detection component 12 receives optical signal of the light wave after detected object reflection, and to the light
Signal carries out photoelectric conversion, obtains blood oxygen and detects signal；
Flexible substrates 13, are fabricated from a flexible material, for encapsulating the light source assembly and the photoelectric detection component,
Wherein, the light source assembly includes multiple vertical cavity surface emitting lasers (Vertical Cavity Surface
Emitting Laser, VCSEL), the multiple VCSEL emits the light wave of different central wavelengths or different spectral.
In accordance with an embodiment of the present disclosure, light wave can be emitted by the light source assembly including multiple VCSEL, and passes through photoelectricity
Detection components obtain blood oxygen according to the optical signal after reflection and detect signal, to realize high-precision deep layer blood oxygen detection；Meanwhile
By flexible substrates packaged light source component and photoelectric detection component, enable the flexible apparatus occur largely to extend and
Deformation is realized convenient for fitting to the skin surface of detected object to deeper arteries (such as arteria carotis and femoral artery) blood
The detection of oxygen saturation can also facilitate wearing, realize the real-time detection of high reliability.
For example, it can be realized based on reflective blood oxygen testing principle according to the flexible apparatus of the embodiment of the present disclosure.
Non-invasive blood oxygen detection based on photoelectric characteristic can be utilized using lambert Bill (Beer-Lambert) law as theoretical basis
Their Determination by Spectrophotometry principle is realized.Alternately shine for example, can control the different light source of two beam wavelength, the light wave of generation into
After entering detection position tissue (such as finger etc.), a part is absorbed by hemoglobin et al. substance in vivo, and a part is transmitted, dissipates
It penetrates and reflects.Wherein, the total light intensity of light wave is equal to the summation of detection site tissue resorption, transmission, scattering and the light intensity of reflection.
Photodetector detects the light intensity magnitude of the light wave reflected after the absorption of hemoglobin et al. substance in vivo, is held
Product wave (Photoplethysmograph, PPG) signal.By the way that volume wave signal is analyzed and calculated, blood oxygen can be obtained
The physiological characteristics parameter such as intensity value.
In one possible implementation, light source assembly 11 may include emitting light wave to detected object (not shown)
Multiple luminous components.Wherein, detected object can be personnel (such as patient), animal etc., and luminous component may be, for example,
VCSEL.Since VCSEL has the characteristics that collimation is good, penetration depth is deep, light source assembly 11 can to the heart of patient, brain and
The arteries (such as arteria carotis) at the positions such as neck emits light wave, so as to obtain the physiological characteristic parameter at these positions.
In one possible implementation, multiple VCSEL of light source assembly 11 emit different central wavelengths or different frequencies
The light wave of spectrum.For example, the light wave (feux rouges) that the first VCSEL emission center wavelength in multiple VCSEL is 680nm, the 2nd VCSEL
Emission center wavelength is the light wave (infrared light) of 850nm.Hemoglobin and reduced hemoglobin are for different central wavelengths or not
It is different with the absorptivity of the light wave of frequency spectrum, so that the light intensity for the light wave being reflected back is also different.In this way, it is more readily able to
The noise in signal is filtered out, detection accuracy is improved.
It should be understood that the disclosure to the VCSEL quantity in light source assembly without limitation, as long as can guarantee at least two
A VCSEL emits the light wave of different central wavelengths or different spectral, and the light wave that is emitted of VCSEL have certain light intensity and
Certain range can be covered.The disclosure to the arrangement of multiple VCSEL of light source assembly also without limitation, art technology
Personnel can set according to the actual situation.
In one possible implementation, photoelectric detection component 12 can be used for receiving light wave and reflect through detected object
Optical signal afterwards, and photoelectric conversion is carried out to optical signal, it exports electric signal (volume wave signal).When using reflective detection,
Photoelectric detection component 12 and light source assembly 11 can be placed in the same plane (such as in flexible substrates 13).Wherein, photoelectricity
Detection components 12 may include one or more detection parts (such as Si-based photodetectors), the response section point of each detection part
Not Fu Gai light source assembly 11 the light emitted wave of multiple VCSEL central wavelength or frequency spectrum in the light emitted wave of multiple VCSEL
In range.For example, the response section of each detection part only covers the central wavelength of the light emitted wave of VCSEL or at one
In the spectral range of the light emitted wave of VCSEL；Or the response section of a detection part covers the light wave of multiple VCSEL transmittings
Central wavelength or multiple VCSEL transmitting light wave spectral range in.
In one possible implementation, a VCSEL is only covered in the response section of each detection part to be emitted
The central wavelength of light wave or in the case where in the spectral range of a light emitted wave of VCSEL, multiple VCSEL can be sent out simultaneously
Light realizes the synchronous detection of optical signal.The center of the light wave of multiple VCSEL transmittings is covered in the response section of a detection part
Wavelength or in the case where in the spectral range of the light wave of multiple VCSEL transmitting, can control the different VCSEL of wavelength by certain week
Phase alternately shines.Wherein, light period can be small as far as possible, such as light period can be 1ms.Light period is smaller, then multiple
Optical signal (volume wave signal) is more similar to detect simultaneously, and the detection signal acquired out is more conducive to the signal processing in later period.This
The quantity and specific detection mode of the open detection part to photoelectric detection component 12 are not construed as limiting.
In one possible implementation, flexible substrates 13 can be made of extendable flexible material, so as to paste
The detection position skin surface of detected object is closed, guarantees to realize common eigenvector with skin.To improve flexible apparatus use
Convenience.
Fig. 2 is a kind of exploded pictorial of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
Figure.As shown in Fig. 2, flexible substrates 13 include bottom flexible substrate 131 and top layer flexible substrates 132.The bottom flexible substrate
There is multiple pedestals 10 and the interconnecting piece 14 between the multiple pedestal, the light source assembly 11 and the photoelectricity on 131
Detection components 12 are separately positioned on multiple pedestals 10.Wherein, top layer flexible substrates 132 cover multiple pedestals 10, interconnecting piece 14,
Light source assembly 11 and photoelectric detection component 12.
Fig. 3 a and Fig. 3 b are a kind of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
The schematic diagram of interconnecting piece.As shown in Figure 3a, the pedestal of the different VCSEL of two central wavelengths of 481 corresponding light source component of pedestal,
The pedestal of two detection parts of the corresponding photoelectric detection component 12 of pedestal 482.As shown in Figure 3b, label 481 ' can be used for exposing
Light source assembly on pedestal, label 482 ' can be used for exposing the photoelectric detection component on pedestal.
As shown in Fig. 2, interconnecting piece 14 can by pedestal light source assembly 11 and the photoelectric detection component 12 be connected to
External circuit (such as processor, power supply etc.) for light source assembly 11 and the power supply of the photoelectric detection component 12 and realizes signal
Transmission.
In one possible implementation, interconnecting piece 14 is multistage fractal structure, for example including two fraction shapes, three fractions
Shape etc..As shown in Fig. 2, Fig. 3 a and Fig. 3 b, interconnecting piece is second level fractal structure, the first level structure (flower structure) of outside by
Power is first stretched when stretching, and the second level structure (S-shaped structure) bears to stretch when further stress stretches, to greatly increase
Draw ratio.It should be appreciated that those skilled in the art can be according to the actual needs of flexible electronic device ductility to interconnecting piece
Shape be configured, the disclosure to this with no restriction.In this way, can be improved the flexible apparatus ductility and
Tensility.
Fig. 4 is a kind of cross-sectional view of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment.
As shown in figure 4, in one possible implementation, said base and interconnecting piece can use the structure similar to sandwich,
Specifically, may include the first insulating layer 141, conductive layer 142 and 143 and second insulating layer 144, bottom flexible substrate 131
In 141 lower section of the first insulating layer, bearing base and interconnecting piece；Top layer flexible substrates 132 are located at 144 top of second insulating layer, cover
Various components on lid pedestal, interconnecting piece and pedestal.Bottom flexible substrate 131 and the common encapsulation base of top layer flexible substrates 132
And interconnecting piece.Wherein, the part second insulating layer 144 of pedestal is photo-etched the partial electroconductive layer divided by exposure pedestal, the light
Source component 11 and the photoelectric detection component 12 fit to the expose portion of the conductive layer of the pedestal respectively.The light source assembly
11 may include two VCSEL, and the photoelectric detection component 12 may include two photodetectors.The second insulating layer
144 can be used the photosensitive PI of positive glue-type, can carry out route protection to interconnecting piece under the premise of guaranteeing whole ductility, moreover it is possible to
Enhance the reliability of the flexible apparatus.
As shown in figure 4, in one possible implementation, conductive layer includes the first metal layer 142 and second metal layer
143.The first metal layer 142 can be used for enhancing the caking ability of second metal layer Yu the first insulating layer 141, and second metal layer 143 can
For conduction, reduce the loss in signals transmission.Wherein, the first metal layer may be, for example, layers of chrome, and second metal layer can example
For example layer gold.Can the type according to actual needs to the first metal layer and second metal layer select, the disclosure is to each gold
Belong to the concrete type of layer with no restriction.
In one possible implementation, the flexible apparatus can also include processing component (not shown), institute
It states processing component and is connected respectively to light source assembly and photoelectric detection component via conductive layer, for carrying out letter to blood oxygen detection signal
Number processing, obtains treated detection data.Processing component, which can detect signal to the blood oxygen from photoelectric detection component 12, (to be held
Product wave signal) processing such as signal analysis is carried out, obtain the detection datas such as the blood oxygen saturation of detected object.Processing component can also
With according to the detection mode of photoelectric detection component 12, the multiple VCSEL for controlling light source assembly are alternately shone or are pressed by some cycles
Some cycles shine simultaneously, and the optical signal reflected so as to photoelectric detection component acquisition simultaneously carries out photoelectric conversion.
In one possible implementation, processing component may include processor, memory module and wireless transmission mould
Block etc..Processor can be any processing that can be carried out data processing such as single-chip microcontroller, microprocessor, field programmable logic device
Component, memory module can be the storage unit of the energy storing data such as RAM, FIFO.Hardware configuration of the disclosure to processing component
With no restriction.
In one possible implementation, processing component can be provided separately with flexible blood oxygen transducer device, namely
It is arranged in the external circuit that interconnecting piece 14 is connected；Also it is desirably integrated into inside flexible blood oxygen transducer device, namely same
Setting is on the base.The disclosure to the set-up mode of processing component with no restriction.
According to the flexible apparatus for the detection of deep layer blood oxygen of the embodiment of the present disclosure, can be collected by VCSEL tested
The blood oxygen detection signal for relatively going deep into position (such as arteria carotis or femoral artery) for surveying object, realizes the blood oxygen detection at these positions,
It has very important significance to clinic；Meanwhile each light source assembly and photoelectric detection component are carried by flexible substrates, and adopt
Each light source assembly and photoelectric detection component are connected with the interconnecting piece of multistage fractal structure, so that for the soft of deep layer blood oxygen detection
Property device can occur largely to extend and deform, convenient for fitting to the skin surface of detected object, realize to relatively deep
The detection of layer arteries (such as arteria carotis and femoral artery) blood oxygen saturation, can also facilitate wearing, realize the real-time of high reliability
Detection.
The manufacturing process of the flexible apparatus detected for deep layer blood oxygen is illustrated below.
Fig. 5 shows the process of the manufacturing method of the flexible apparatus for the detection of deep layer blood oxygen according to one embodiment of the disclosure
Figure.As shown in figure 5, the manufacturing method includes step S11 to step S17:
In step s 11, sacrificial layer, the first insulating layer and conductive layer are sequentially generated on a silicon substrate；
In step s 12, processing is performed etching to first insulating layer and the conductive layer according to the first figure, is formed
The first insulating layer and conductive layer after etching；
In step s 13, second insulating layer is formed on first insulating layer and the conductive layer；
In step S14, photoetching treatment is carried out to the second insulating layer according to second graph, second after obtaining photoetching
Insulating layer；
In step S15, first insulating layer, the conductive layer and the second insulating layer are transferred to bottom flexible
Substrate forms pedestal and the interconnecting piece between multiple pedestals；
In step s 16, light source assembly and photoelectric detection component are fitted to the exposure of the conductive layer of the pedestal respectively
Part；
In step S17, the pedestal, the interconnecting piece, the light source assembly and institute are encapsulated by top layer flexible substrates
Photoelectric detection component is stated, the flexible apparatus is formed.
By caused by above step system be used for deep layer blood oxygen detection flexible apparatus have height ductility and can
Draftability can guarantee and realize common eigenvector with skin, facilitates wearing.
Fig. 6 a- Fig. 6 i is a kind of system of flexible apparatus for the detection of deep layer blood oxygen shown according to an exemplary embodiment
Make the schematic diagram of process.
In one possible implementation, sacrificial layer, PI insulating layer can be sequentially generated on a silicon substrate in step s 11
And conductive layer.
It as shown in Figure 6 a, can be first by silicon substrate cleavage to suitable size, then in the burnishing surface spin coating of silicon substrate 100
Expendable material (such as polymethyl methacrylate (Polymethyl methacrylate, abbreviation PMMA)) forms expendable material
Film, and expendable material film is solidified by the way of heating, form sacrificial layer 101.For example, can control when spin coating even
For glue machine first with 600 revolutions per seconds of speed spin coating PMMA, spin-coating time is 6 seconds, then with 3000 revolutions per seconds of speed spin coating PMMA, rotation
Applying the time is 30 seconds.It is solidified later, such as successively the temperature condition decentralization at 110 DEG C is set 5 minutes, at 150 DEG C
The decentralization of temperature condition is set 5 minutes, is set 10 minutes in 180 DEG C of temperature condition decentralizations, is obtained cured PMMA film.Then by sample
Product stand at least one hour naturally, to reduce the stress in PMMA film.After processing, sacrifice as shown in Figure 6 a can be obtained
Layer 101.
It should be appreciated that can by way of selection to expendable material, spin-on sacrificial material, solidify expendable material film
The time of mode and standing is configured, so that the sacrificial layer formed can satisfy the demand of subsequent technique, the disclosure pair
This is with no restriction.
As shown in Figure 6 b, after forming sacrificial layer 101, can on sacrificial layer 101 aggressiveness polyamide before spin-on polyimide
Sour (abbreviation PAA), and the first insulating layer 141 is formed by the way of being heating and curing.For example, PAA can be coated in sacrificial layer 101,
It can control sol evenning machine first with 800 revolutions per seconds of speed spin coating PAA when spin coating, spin-coating time is 6 seconds, then with 5000 revolutions per seconds of speed
Spin coating PAA is spent, spin-coating time is 40 seconds.PAA film after spin coating can be solidified by the way of heating, such as successively existed
80 DEG C of temperature condition decentralization is set 20 minutes, is set 30 minutes in 120 DEG C of temperature condition decentralizations, under the conditions of 150 DEG C of temperature
It places 30 minutes, is set 30 minutes in 180 DEG C of temperature condition decentralizations, set 10 minutes in 200 DEG C of temperature condition decentralizations, 220
DEG C temperature condition decentralization set 20 minutes, 250 DEG C temperature conditions decentralization set 20 minutes, obtain cured PI film.Then
Sample is stood naturally to room temperature, to reduce the stress in PI film.After processing, the first insulation as shown in Figure 6 b can be obtained
Layer 141.
It should be appreciated that those skilled in the art can according to actual needs the material type to the first insulating layer, processing
The revolving speed of equipment and time and cured mode are configured, the disclosure to this with no restriction.
In one possible implementation, conductive layer includes the first metal layer 142 and second metal layer 143, and described
One metal layer is layers of chrome, and the second metal layer is layer gold.As fig. 6 c, can be sequentially generated on the first insulating layer 141
One metal layer 142 and second metal layer 143.For example, electron beam evaporation plating, vacuum evaporation, sputter coating, arc plasma can be used
The modes such as body plating, ion plating equipment molecular beam epitaxy generate the first metal layer 142 and second metal layer 143.Wherein, the first metal
Layer 142 can be chromium or titanium, can also be other metal materials with caking property, thickness can be 5nm~20nm (such as
10nm)；Second metal layer 143 includes any one of gold, silver and copper, can also be other conductive metal materials,
Thickness can be 50nm~300nm (such as 150nm).Wherein, the first metal layer 142 is mainly used for enhancing second metal layer and the
The caking ability of one insulating layer, second metal layer are mainly used for conduction, reduce the loss in signals transmission.
It in one possible implementation, can be in step s 12 according to the first figure to first insulating layer and institute
It states conductive layer and performs etching processing, the first insulating layer and conductive layer after forming etching.
After forming second metal layer 143, sol evenning machine spin coating photoresist in second metal layer 143 can be used, form light
Photoresist layer.It then, can be according to pedestal and the preset shape (the first figure) of interconnecting piece, using first set mask plate as exposure mask, to light
Photoresist layer is exposed and develops, and exposes the metal layer except the first figure.Then, dry etching or wet etching can be used
Equal lithographic techniques perform etching processing to the first metal layer and second metal layer, obtain the conductive layer for meeting the first figure.Finally
Extra photoresist is removed using acetone, with dehydrated alcohol and deionized water clean the surface.As shown in fig 6d, default shape can be obtained
The conductive layer of shape (such as multistage fractal structure).
As shown in fig 6e, the first insulating layer 141 can be etched to using reactive ion etching method (RIE), obtains preset shape
First insulating layer 141 of (such as multistage fractal structure).After etched, stretchable first insulating layer 141 can be obtained and led
Electric layer (including the first metal layer 142 and second metal layer 143).
It in one possible implementation, can the shape on first insulating layer and the conductive layer in step s 13
At second insulating layer.It can be on the first insulating layer 141 and conductive layer after etching, with the photosensitive PI (example of the positive glue-type of sol evenning machine spin coating
It such as, is ZKPI510).It can control sol evenning machine first with speed spin coating 6 seconds of 700 revolutions per seconds when spin coating, then with 3000 revolutions per seconds of speed
Spin coating 30 seconds, front baking processing in 200 seconds is carried out at 130 DEG C later.As shown in Figure 6 f it may act as positivity light in this way, can be obtained
The second insulating layer of photoresist.
In one possible implementation, the second insulating layer can be carried out according to second graph in step S14
Photoetching treatment, the second insulating layer after obtaining photoetching.According to the preset shape (second graph) of the expose portion of pedestal, with second
Set mask plate is exposure mask, carries out photoetching (exposure, development and etching) to second insulating layer, obtain meeting second graph second is exhausted
Edge layer, as shown in figure 6g.
In one possible implementation, the second insulating layer after photoetching can be solidified, such as successively at 80 DEG C
At a temperature of place 120 minutes, placed 60 minutes at 150 DEG C, 180 DEG C at a temperature of place 60 minutes, in 205 DEG C of temperature
Degree is lower to be placed 120 minutes.It is obtained after the completion of solidification with insulating capacity and flexible extendable second insulating layer 144, then nature
It is cooled to room temperature, to reduce the stress in the second layer insulating 144.
It in one possible implementation, can be in step S15 by first insulating layer, the conductive layer and described
Second insulating layer is transferred to bottom flexible substrate, forms pedestal and the interconnecting piece between the multiple pedestal.For example, can adopt
Sacrificial layer 101 (PMMA) is removed with acetone soln, so that the first insulating layer 141, conductive layer 142 and 143 and second insulating layer 144
It is separated with silicon substrate 100；Then it is soft the first insulating layer 141, conductive layer 142 and 143 and second insulating layer 144 to be transferred to bottom
Property substrate 131 (such as being made of flexible material PDMS or 3M dressing).After transferring, structure as shown in figure 6h can be formed,
Form pedestal and the interconnecting piece between multiple pedestals.
In one possible implementation, the interconnecting piece is multistage fractal structure.In this way, it can be improved
The ductility of the flexible apparatus.
In one possible implementation, light source assembly and photoelectric detection component can be bonded respectively in step s 16
To the expose portion of the conductive layer of the pedestal.As shown in Fig. 6 i, is pasted using conductive silver glue or reflow soldering process welds
Function component 10.The multiple groups VCSEL (every group includes feux rouges and infrared light VCSEL) of function component 10 including light source assembly and
The multiple groups component of photoelectric detection component (every group includes two Si-based photodetectors).
In one possible implementation, the light source assembly may include multiple VCSEL, the multiple VCSEL hair
Penetrate the light wave of different central wavelengths or different spectral.For example, the first VCSEL emission center wavelength in multiple VCSEL is 680nm
Light wave (feux rouges), the 2nd VCSEL emission center wavelength be 850nm light wave (infrared light).Hemoglobin and reduced blood red eggs
The absorptivity of the white light wave for different central wavelengths or different spectral is different, so that the light intensity for the light wave being reflected back is also different.
In this way, it is readily able to filter out the noise in signal, improves detection accuracy.
In one possible implementation, the pedestal, described can be encapsulated by top layer flexible substrates in step S17
Interconnecting piece, the light source assembly and the photoelectric detection component, form the flexible apparatus.As shown in figure 4, soft using top layer
Property substrate 132 (such as being made of flexible material PDMS or 3M dressing), encapsulation base, interconnecting piece, light source assembly and Photoelectric Detection
Component, to form final flexible apparatus.
In one possible implementation, flexible substrates (bottom flexible substrate 131 and top layer flexible substrates 132) can be by
Flexible material is made.Flexible material can be dimethyl silicone polymer (polydimethylsiloxane, abbreviation PDMS), rubber
Glue, hydrogel (Hydrogel), polyimides (Polyimide, abbreviation PI), polyethylene terephthalate
(polyethylene.glycol terephthalate, abbreviation PET) etc. has polymer material flexible.Art technology
Personnel can according to actual needs select flexible material, the disclosure to this with no restriction.
In one possible implementation, the flexible apparatus for the detection of deep layer blood oxygen can also include processing group
Part (not shown) obtains treated detection data for carrying out signal processing to blood oxygen detection signal.
In one possible implementation, the method also includes: the conductive layer of the interconnecting piece is connected to processing
Component, so that the processing component is separately connected the light source assembly and the photoelectric detection component via the conductive layer.
That is, the conductive layer for connecting light source assembly and photoelectric detection component is connected with processing component respectively, so that processing
Component can receive blood oxygen detection signal (volume wave signal) that photoelectric detection component detects, to carry out signal analysis etc.
Processing, obtains the detection datas such as the blood oxygen saturation of detected object；Meanwhile also enabling processing component according to Photoelectric Detection
The detection mode of component controls multiple VCSEL of light source assembly and alternately shines by some cycles or luminous simultaneously by some cycles,
So that photoelectric detection component acquires the optical signal of reflection and carries out photoelectric conversion.
According to the manufacturing method of the flexible apparatus for the detection of deep layer blood oxygen of the embodiment of the present disclosure, VCSEL can be passed through
The blood oxygen detection signal for relatively going deep into position (such as arteria carotis or femoral artery) for collecting detected object, realizes these positions
Blood oxygen detection, has very important significance to clinic；Meanwhile each photoelectric subassembly is encapsulated by flexible substrates, and using curved
Bent interconnecting piece connects each photoelectric subassembly, and flexible apparatus caused by system is enabled to occur largely to extend and deform,
Convenient for fitting to the skin surface of detected object, realizes and deeper arteries (such as arteria carotis and femoral artery) blood oxygen is saturated
The detection of degree can also facilitate wearing, realize the real-time detection of high reliability.
It should be noted that although describing the flexible apparatus for the detection of deep layer blood oxygen using above-described embodiment as example
Manufacturing method it is as above, it is understood by one of ordinary skill in the art that the disclosure answer it is without being limited thereto.In fact, user completely can root
Each step is flexibly set according to personal preference and/or practical application scene, as long as meeting the technical solution of the disclosure.
In accordance with an embodiment of the present disclosure, the provided flexible apparatus for the detection of deep layer blood oxygen is with collimation is good, wears
The feature of saturating depth depth can not only carry out the measurement of blood oxygen saturation to the superficial face of detected object (such as humans and animals),
Can also big blood vessel (such as femoral artery, the arteria carotis blood vessel close with brain apart from heart) to higher depth to carry out non-invasive blood oxygen full
It is measured with degree, and then judges the blood oxygen saturation at tested position.And due to the effect of flexible substrates, it ensure that blood oxygen detection dress
Setting can be realized with skin common eigenvector, the validity and accuracy for facilitating detected object to dress, and then capable of ensuring to measure.
During the flexible apparatus that production is detected for deep layer blood oxygen, the photosensitive PI of positive glue-type is used to detect to for deep layer blood oxygen
Flexible apparatus carried out route protection, enhance reliability under the premise of guaranteeing whole ductility, and function will be placed
The position of energy component reserves, and can be convenient subsequent stickup or Reflow Soldering function component.
The presently disclosed embodiments is described above, above description is exemplary, and non-exclusive, and
It is not limited to disclosed each embodiment.Without departing from the scope and spirit of illustrated each embodiment, for this skill
Many modifications and changes are obvious for the those of ordinary skill in art field.The selection of term used herein, purport
In the principle, practical application or improvement to the technology in market for best explaining each embodiment, or make the art
Other those of ordinary skill can understand each embodiment disclosed herein.
Claims (10)
1. a kind of flexible apparatus for the detection of deep layer blood oxygen, which is characterized in that described device includes:
Light source assembly emits light wave to detected object；
Photoelectric detection component, receive the light wave through the detected object reflection after optical signal, and to the optical signal into
Row photoelectric conversion obtains blood oxygen and detects signal；
Flexible substrates are fabricated from a flexible material, for encapsulating the light source assembly and the photoelectric detection component；
Wherein, the light source assembly includes multiple vertical cavity surface emitting laser VCSEL, in the multiple VCSEL transmitting difference
The light wave of cardiac wave length or different spectral.
2. the apparatus according to claim 1, which is characterized in that the flexible substrates include that bottom flexible substrate and top layer are soft
Property substrate, there is in the bottom flexible substrate multiple pedestals and the interconnecting piece between the multiple pedestal, the light source
Component and the photoelectric detection component are separately positioned on multiple pedestals,
Wherein, the top layer flexible substrates cover multiple pedestals, the interconnecting piece, the light source assembly and the Photoelectric Detection group
Part.
3. the apparatus of claim 2, which is characterized in that the pedestal and the interconnecting piece include the first insulating layer,
Conductive layer and second insulating layer, wherein the part second insulating layer of the pedestal is photo-etched the portion divided by the exposure pedestal
Divide conductive layer, the light source assembly and the photoelectric detection component fit to the expose portion of the conductive layer of the pedestal respectively.
4. device according to claim 2 or 3, which is characterized in that the interconnecting piece is multistage fractal structure.
5. device according to claim 3, which is characterized in that described device further include:
Processing component is connected respectively to the light source assembly and the photoelectric detection component, the processing via the conductive layer
Component is used to carry out signal processing to blood oxygen detection signal, obtains treated detection data.
6. device according to claim 3, which is characterized in that the conductive layer includes the first metal layer and the second metal
Layer, the first metal layer are layers of chrome, and the second metal layer is layer gold.
7. a kind of manufacturing method of the flexible apparatus for the detection of deep layer blood oxygen characterized by comprising
Sacrificial layer, the first insulating layer and conductive layer are sequentially generated on a silicon substrate；
Processing is performed etching to first insulating layer and the conductive layer according to the first figure, the first insulation after forming etching
Layer and conductive layer；
Second insulating layer is formed on first insulating layer and the conductive layer；
Photoetching treatment is carried out to the second insulating layer according to second graph, the second insulating layer after obtaining photoetching；
First insulating layer, the conductive layer and the second insulating layer are transferred to bottom flexible substrate, formed pedestal with
And the interconnecting piece between multiple pedestals；
Light source assembly and photoelectric detection component are fitted to the expose portion of the conductive layer of the pedestal respectively；
The pedestal, the interconnecting piece, the light source assembly and the photoelectric detection component, shape are encapsulated by top layer flexible substrates
At the flexible apparatus.
8. the method according to the description of claim 7 is characterized in that the light source assembly includes multiple vertical cavity surface-emitting lasers
Device VCSEL, the multiple VCSEL emit the light wave of different central wavelengths or different spectral.
9. the method according to the description of claim 7 is characterized in that the interconnecting piece is multistage fractal structure.
10. the method according to the description of claim 7 is characterized in that the method also includes:
The conductive layer of the interconnecting piece is connected to processing component, so that the processing component is separately connected via the conductive layer
The light source assembly and the photoelectric detection component, the processing component are used to carry out at signal blood oxygen detection signal
Reason obtains treated detection data.
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| US10825952B2 (en) | 2017-01-16 | 2020-11-03 | Apple Inc. | Combining light-emitting elements of differing divergence on the same substrate |
| US11322910B2 (en) | 2019-02-21 | 2022-05-03 | Apple Inc. | Indium-phosphide VCSEL with dielectric DBR |
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| CN111053644A (en) * | 2019-12-31 | 2020-04-24 | 清华大学 | Eyelid retractor and method of making the same |
| CN112842365A (en) * | 2021-02-25 | 2021-05-28 | 清华大学 | Detection device and manufacturing method thereof |
| TWI781618B (en) * | 2021-05-13 | 2022-10-21 | 深腦科技有限公司 | 3d printing neural probe and manufacturing method thereof |
| CN113288419A (en) * | 2021-05-28 | 2021-08-24 | 常州纵慧芯光半导体科技有限公司 | Laser device and appearance that moults |
| CN114533054A (en) * | 2022-02-22 | 2022-05-27 | 杭州电子科技大学 | Flexible fNIRS detection device and preparation method thereof |
| CN114711728A (en) * | 2022-06-10 | 2022-07-08 | 天津大学 | Flexible near-infrared imaging device with variable monitoring area and depth and preparation method thereof |
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