CN110335843B - Dust removal type chip sorting equipment with voltage stabilizing function - Google Patents
Dust removal type chip sorting equipment with voltage stabilizing function Download PDFInfo
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- CN110335843B CN110335843B CN201910302931.XA CN201910302931A CN110335843B CN 110335843 B CN110335843 B CN 110335843B CN 201910302931 A CN201910302931 A CN 201910302931A CN 110335843 B CN110335843 B CN 110335843B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D46/00—Filters or filtering processes specially modified for separating dispersed particles from gases or vapours
- B01D46/10—Particle separators, e.g. dust precipitators, using filter plates, sheets or pads having plane surfaces
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B5/00—Cleaning by methods involving the use of air flow or gas flow
- B08B5/04—Cleaning by suction, with or without auxiliary action
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6838—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping with gripping and holding devices using a vacuum; Bernoulli devices
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Abstract
The invention relates to a dust removal type chip sorting device with a pressure stabilizing function, which comprises a vacuum pump, a suction pipe, a suction nozzle, a pressure regulating mechanism and a dust removing mechanism, wherein the pressure regulating mechanism comprises a cover plate, a driving assembly, a pressure stabilizing pipe, two first transmission rods, two support sleeves, two springs and two connecting blocks, the dust removing mechanism comprises a baffle plate, a collecting box, a filter screen, a second gas pipe, a first gas pipe and a solenoid valve, in the dust removal type chip sorting device with the pressure stabilizing function, the suction force in the suction pipe can be controlled through the pressure regulating mechanism, the probability of chip damage caused by overlarge suction force is reduced, the practicability of the sorting device is improved, compared with the existing pressure regulating mechanism, the pressure regulating mechanism can adjust the size of the maximum suction force in the suction pipe through adjusting the length of the springs, the practicability of the sorting device is further improved, the dust on the chip can be sucked through the dust removal mechanism, so that the quality of the produced chip is improved.
Description
Technical Field
The invention relates to the field of chip sorting equipment, in particular to dust removal type chip sorting equipment with a voltage stabilizing function.
Background
In order to prevent the semiconductor chips cut at the time of cutting from being scattered, the chips are bonded with a holding tape having adhesiveness on the back surface, and the chips are cut from the front surface side by a chip cutting device or the like, and at this time, the holding tape bonded to the back surface is cut into a few pieces but is not cut, and is in a state of holding the respective semiconductor chips.
When the chip sorting equipment in the prior art is used, if the air pressure for sucking the chip is too large, the chip is damaged, so that the air pressure needs to be accurately adjusted, moreover, dust can be possibly adsorbed on the chip between the chip sorting, and the quality of the chip can be influenced if the dust is not timely removed.
Disclosure of Invention
The technical problem to be solved by the invention is as follows: in order to overcome the defects of the prior art, the dust removal type chip sorting equipment with the voltage stabilizing function is provided.
The technical scheme adopted by the invention for solving the technical problems is as follows: a dust removal type chip sorting device with a pressure stabilizing function comprises a vacuum pump, a suction pipe, a suction nozzle, a pressure regulating mechanism and a dust removing mechanism, wherein the suction nozzle and the vacuum pump are respectively connected with two ends of the suction pipe;
the pressure regulating mechanism comprises a cover plate, a driving assembly, a pressure stabilizing tube, two first transmission rods, two support sleeves, two springs and two connecting blocks, the pressure stabilizing tube is arranged on one side of the straw, the axis of the pressure stabilizing tube is perpendicular to and intersected with the axis of the straw, the axis of the support sleeve is parallel to the axis of the pressure stabilizing tube, the support sleeve is arranged on one side of the pressure stabilizing tube, the first transmission rod and the support sleeve are coaxially arranged, the first transmission rod penetrates through the support sleeve, the first transmission rod is in sliding connection with the support sleeve, the cover plate is arranged inside the straw, the cover plate covers the pressure stabilizing tube, connecting holes are formed in two ends of the cover plate, the first transmission rod penetrates through the cover plate, the cover plate is in sliding connection with the first transmission rod, the driving assembly is arranged on one side of the straw, and the driving assembly is connected with one end of the first transmission rod, the connecting block is fixedly connected with the other end of the first transmission rod, the spring is sleeved on the first transmission rod, the connecting block is fixedly connected with the cover plate through the spring, and the spring is in a compressed state;
the dust removal mechanism comprises a baffle, a collecting box, a filter screen, a second gas pipe, a first gas pipe and an electromagnetic valve, the collecting box is arranged on one side of the straw, the filter screen is arranged inside the collecting box, the baffle is arranged inside the straw, the electromagnetic valve is arranged on the baffle, two ends of the collecting box are connected with the straw through the first gas pipe and the second gas pipe respectively, and joints of the first gas pipe and the second gas pipe with the straw are located on two sides of the baffle respectively.
Preferably, in order to achieve automatic control of the sorting device, a processor is provided at one side of the pipette, and the processor is electrically connected with the solenoid valve.
As preferred, in order to provide power for first transfer line, drive assembly includes motor, lead screw, drive block and second transfer line, the motor is fixed in one side of straw, the lead screw is parallel with first transfer line, the motor is connected with the lead screw transmission, the drive block cover is established on the lead screw, lead screw and drive block threaded connection, the drive block is through the one end fixed connection of keeping away from the connecting block of second transfer line and first transfer line.
Preferably, in order to improve the accuracy of controlling the moving distance of the first driving lever, the motor is a servo motor.
Preferably, the screw is coated with grease in order to improve the smoothness of the movement of the driving block.
Preferably, in order to detect the pressure between the cover plate and the support sleeve, a pressure sensor is arranged between the cover plate and the support sleeve, and the pressure sensor is electrically connected with the processor.
Preferably, in order to improve the connection stability of the screw rod and the driving block, a limit block is arranged at one end of the screw rod, which is far away from the motor.
Preferably, in order to improve the sealing performance of the support sleeve, a sealing ring is arranged at one end of the support sleeve, and the support sleeve is connected with the first transmission rod in a sealing mode through the sealing ring.
Preferably, in order to reduce the probability of dust entering the interior of the suction pipe, a dust screen is arranged inside the pressure stabilizing pipe.
Preferably, in order to improve the sealing performance of the cover plate, a sealing gasket is arranged on one side of the cover plate close to the pressure stabilizing tube, and the cover plate is connected with the pressure stabilizing tube in a sealing mode through the sealing gasket.
The dust removal type chip sorting equipment with the voltage stabilizing function has the advantages that the pressure regulating mechanism can control the suction force inside the suction pipe, the probability of chip damage caused by overlarge suction force is reduced, the practicability of the sorting equipment is improved, compared with the existing pressure regulating mechanism, the pressure regulating mechanism can adjust the maximum suction force inside the suction pipe through adjusting the length of the spring, the practicability of the sorting equipment is further improved, dust on the chip can be sucked and removed through the dust removing mechanism, the quality of the produced chip is improved, compared with the existing dust removing mechanism, the dust removing mechanism is simple in structure, the number of fault points of the mechanism is reduced, and the probability of the mechanism breaking down is reduced.
Drawings
The invention is further illustrated with reference to the following figures and examples.
FIG. 1 is a schematic structural diagram of a dust removal type chip sorting device with a voltage stabilizing function according to the present invention;
FIG. 2 is a schematic diagram of the internal structure of the dust removal type chip sorting apparatus having a voltage stabilization function according to the present invention;
FIG. 3 is a schematic structural diagram of a dust removing mechanism of the dust removing type chip sorting device with the voltage stabilizing function;
FIG. 4 is a schematic structural diagram of a pressure regulating mechanism of the dust removal type chip sorting equipment with the pressure stabilizing function;
in the figure: 1. the vacuum pump comprises a vacuum pump, 2, a first gas pipe, 3, a collecting box, 4, a suction nozzle, 5, a suction pipe, 6, a filter screen, 7, an electromagnetic valve, 8, a baffle, 9, a second gas pipe, 10, a supporting sleeve, 11, a first transmission rod, 12, a second transmission rod, 13, a driving block, 14, a screw rod, 15, a motor, 16, a pressure stabilizing pipe, 17, a connecting block, 18, a pressure sensor, 19, a sealing gasket, 20, a cover plate and 21, and a spring.
Detailed Description
The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic views illustrating only the basic structure of the present invention in a schematic manner, and thus show only the constitution related to the present invention.
As shown in fig. 1, a dust removal type chip sorting device with a pressure stabilizing function comprises a vacuum pump 1, a suction pipe 5, a suction nozzle 4, a pressure regulating mechanism and a dust removing mechanism, wherein the suction nozzle 4 and the vacuum pump 1 are respectively connected with two ends of the suction pipe 5;
the suction force in the suction pipe 5 can be controlled through the pressure regulating mechanism, the probability of chip damage caused by overlarge suction force is reduced, the practicability of the sorting equipment is improved, and moreover, dust on the chip can be sucked and removed through the dust removing mechanism, so that the quality of the produced chip is improved;
as shown in fig. 4, the pressure regulating mechanism includes a cover plate 20, a driving assembly, a pressure stabilizing tube 16, two first transmission rods 11, two support sleeves 10, two springs 21 and two connecting blocks 17, the pressure stabilizing tube 16 is arranged at one side of the suction pipe 5, the axis of the pressure stabilizing tube 16 is perpendicular to and intersects with the axis of the suction pipe 5, the axis of the support sleeve 10 is parallel to the axis of the pressure stabilizing tube 16, the support sleeve 10 is arranged at one side of the pressure stabilizing tube 16, the first transmission rods 11 and the support sleeve 10 are coaxially arranged, the first transmission rods 11 pass through the support sleeves 10, the first transmission rods 11 and the support sleeves 10 are slidably connected, the cover plate 20 is arranged inside the suction pipe 5, the cover plate 20 covers the pressure stabilizing tube 16, both ends of the cover plate 20 are provided with connecting holes, the first transmission rods 11 pass through the cover plate 20, and the cover plate 20 and the first transmission rods 11 are slidably connected, the driving assembly is arranged on one side of the suction pipe 5, the driving assembly is connected with one end of the first transmission rod 11, the connecting block 17 is fixedly connected with the other end of the first transmission rod 11, the spring 21 is sleeved on the first transmission rod 11, the connecting block 17 is fixedly connected with the cover plate 20 through the spring 21, and the spring 21 is in a compressed state;
an operator controls sorting equipment, power is provided through a driving assembly, a first transmission rod 11 is driven to move along a support sleeve 10, then the first transmission rod 11 drives a connecting block 17 to drive, the length of a spring 21 can be controlled through the connecting block 17, a cover plate 20 covers a pressure stabilizing tube 16 under the action of the pushing force of the spring 21, the pushing force of the spring 21 on the cover plate 20 is proportional to the length of the spring 21, the pressure of the cover plate 20 can be controlled through controlling the length of the spring 21, when the suction force in the suction tube 5 is greater than the pushing force of the spring 21 on the cover plate 20, the cover plate 20 is opened, external air enters the suction tube 5 through the pressure stabilizing tube 16, the adjustment of the suction force in the suction tube 5 is realized, and the probability of chip damage is reduced;
as shown in fig. 2-3, the dust removing mechanism includes a baffle 8, a collecting box 3, a filter screen 6, a second gas pipe 9, a first gas pipe 2 and an electromagnetic valve 7, the collecting box 3 is disposed at one side of the suction pipe 5, the filter screen 6 is disposed inside the collecting box 3, the baffle 8 is disposed inside the suction pipe 5, the electromagnetic valve 7 is disposed on the baffle 8, two ends of the collecting box 3 are connected with the suction pipe 5 through the first gas pipe 2 and the second gas pipe 9, respectively, and joints of the first gas pipe 2 and the second gas pipe 9 with the suction pipe 5 are located at two sides of the baffle 8, respectively;
in fact, a distance sensor is arranged on the suction nozzle 4, the distance between the suction nozzle 4 and the chip can be detected through the distance sensor, then the distance sensor sends a signal to a processor, the processor controls the electromagnetic valve 7 to operate, in the process that the suction nozzle 4 is close to the chip, the electromagnetic valve 7 is closed, the suction pipe 5 is closed through the baffle 8, under the action of the vacuum pump 1, the air flow on one side, away from the vacuum pump 1, of the baffle 8 enters the inside of the collecting box 3 through the second air pipe 9, then the dust in the air is purified through the filter screen 6, the purified air enters one side, close to the vacuum pump 1, of the baffle 8 through the first air pipe 2, the dust on the chip can be sucked and removed, the quality of the chip is improved, after the suction nozzle 4 is abutted against the chip, the electromagnetic valve 7 is opened, and the air flow passes through the electromagnetic valve 7, the chip is sucked up by the suction force generated by the suction pipe 5.
Preferably, in order to realize the automatic control of the sorting device, a processor is arranged on one side of the suction pipe 5 and is electrically connected with the electromagnetic valve 7;
the processor can control each device in the sorting equipment to automatically operate, and then the automatic control of the sorting equipment is realized.
As shown in fig. 4, the driving assembly includes a motor 15, a screw rod 14, a driving block 13 and a second transmission rod 12, the motor 15 is fixed at one side of the suction pipe 5, the screw rod 14 is parallel to the first transmission rod 11, the motor 15 is in transmission connection with the screw rod 14, the driving block 13 is sleeved on the screw rod 14, the screw rod 14 is in threaded connection with the driving block 13, and the driving block 13 is fixedly connected with one end of the first transmission rod 11, which is far away from the connection block 17, through the second transmission rod 12;
the motor 15 is controlled by the processor, then the screw rod 14 is driven to rotate by the motor 15, then the driving block 13 is driven to move by the screw rod 14, and then the first driving rod 11 is driven to move by the driving block 13 under the driving action of the second driving rod 12.
Preferably, the motor 15 is a servo motor in order to improve the accuracy of controlling the moving distance of the first driving lever 11.
Preferably, in order to improve the smoothness of the movement of the driving block 13, the screw 14 is coated with grease;
the friction between the driving block 13 and the lead screw 14 is reduced by the grease, and the smoothness of the movement of the driving block 13 is improved.
Preferably, in order to detect the pressure between the cover plate 20 and the support sleeve 10, a pressure sensor 18 is arranged between the cover plate 20 and the support sleeve 10, and the pressure sensor 18 is electrically connected with the processor;
the pressure between the cover plate 20 and the support sleeve 10 can be detected by means of the pressure sensor 18, after which the pressure sensor 18 sends a signal to the processor, by means of which the motor 15 is controlled, and by means of which the length of the spring 21 is adjusted by means of the motor 15.
Preferably, in order to improve the stability of the connection between the screw rod 14 and the driving block 13, a limiting block is arranged at one end of the screw rod 14, which is far away from the motor 15;
the probability that the driving block 13 is separated from the screw rod 14 is reduced through the limiting block, and the connection stability of the screw rod 14 and the driving block 13 is improved.
Preferably, in order to improve the sealing performance of the support sleeve 10, a sealing ring is arranged at one end of the support sleeve 10, and the support sleeve 10 is connected with the first transmission rod 11 in a sealing manner through the sealing ring;
the gap between the support sleeve 10 and the first transmission rod 11 is reduced by the sealing ring, so that the probability that outside air enters the inside of the suction pipe 5 from the gap between the support sleeve 10 and the first transmission rod 11 is reduced, and the sealing performance of the support sleeve 10 is improved.
Preferably, in order to reduce the possibility of dust entering the inside of the suction pipe 5, a dust screen is arranged inside the pressure stabilizing pipe 16;
the possibility of dust entering the interior of the suction tube 5 from the surge tube 16 is reduced by the dust screen.
Preferably, in order to improve the sealing performance of the cover plate 20, a sealing gasket 19 is arranged on one side of the cover plate 20 close to the pressure maintaining tube 16, and the cover plate 20 is connected with the pressure maintaining tube 16 in a sealing mode through the sealing gasket 19.
The length of the spring 21 is controlled by the power provided by the driving component, the thrust of the spring 21 to the cover plate 20 is proportional to the length of the spring 21, the pressure of the cover plate 20 can be controlled by controlling the length of the spring 21, when the suction force in the suction pipe 5 is greater than the thrust of the spring 21 to the cover plate 20, the cover plate 20 is opened, external air enters the suction pipe 5 through the pressure stabilizing pipe 16, the adjustment of the suction force in the suction pipe 5 is realized, the probability of damage of a chip is reduced, in the process that the suction nozzle 4 is close to the chip, the electromagnetic valve 7 is closed, the suction pipe 5 is closed through the baffle plate 8, under the action of the vacuum pump 1, the air flow on one side of the baffle plate 8 far away from the vacuum pump 1 enters the inside of the collecting box 3 through the second air pipe 9, then dust in the air is purified through the filter screen 6, and then the purified air enters one side of the baffle plate 8 close to the vacuum pump 1 through, the dust on the chip can be sucked, and the quality of the chip is improved.
Compared with the prior art, in this dust type chip sorting equipment with steady voltage function, through pressure regulating mechanism, can control the inside suction of straw 5, the probability that leads to the chip to damage because suction is too big has been reduced, sorting equipment's practicality has been improved, compare with current pressure regulating mechanism, this pressure regulating mechanism passes through regulating spring 21's length, can adjust the size of the inside biggest suction of straw 5, then further improve sorting equipment's practicality, moreover, can inhale the dust on the chip through dust removal mechanism, the quality of production chip has then been improved, compare with current dust removal mechanism, this dust removal mechanism simple structure, the quantity of this mechanism's fault point has been reduced, the probability that this mechanism broke down has been reduced.
In light of the foregoing description of the preferred embodiment of the present invention, many modifications and variations will be apparent to those skilled in the art without departing from the spirit and scope of the invention. The technical scope of the present invention is not limited to the content of the specification, and must be determined according to the scope of the claims.
Claims (10)
1. A dust removal type chip sorting device with a pressure stabilizing function comprises a vacuum pump (1), a suction pipe (5) and a suction nozzle (4), wherein the suction nozzle (4) and the vacuum pump (1) are respectively connected with two ends of the suction pipe (5), and the dust removal type chip sorting device is characterized by further comprising a pressure regulating mechanism and a dust removal mechanism, wherein the pressure regulating mechanism and the dust removal mechanism are respectively arranged on two sides of the suction pipe (5);
the pressure regulating mechanism comprises a cover plate (20), a driving assembly, a pressure stabilizing tube (16), two first transmission rods (11), two support sleeves (10), two springs (21) and two connecting blocks (17), the pressure stabilizing tube (16) is arranged on one side of the suction tube (5), the axis of the pressure stabilizing tube (16) is perpendicular to and intersected with the axis of the suction tube (5), the axis of the support sleeve (10) is parallel to the axis of the pressure stabilizing tube (16), the support sleeve (10) is arranged on one side of the pressure stabilizing tube (16), the first transmission rods (11) and the support sleeves (10) are coaxially arranged, the first transmission rods (11) penetrate through the support sleeves (10), the first transmission rods (11) are connected with the support sleeves (10) in a sliding mode, the cover plate (20) is arranged inside the suction tube (5), and the cover plate (20) covers the pressure stabilizing tube (16), the two ends of the cover plate (20) are provided with connecting holes, the first transmission rod (11) penetrates through the cover plate (20), the cover plate (20) is connected with the first transmission rod (11) in a sliding mode, the driving assembly is arranged on one side of the suction pipe (5), the driving assembly is connected with one end of the first transmission rod (11), the connecting block (17) is fixedly connected with the other end of the first transmission rod (11), the spring (21) is sleeved on the first transmission rod (11), the connecting block (17) is fixedly connected with the cover plate (20) through the spring (21), and the spring (21) is in a compression state;
the dust removal mechanism comprises a baffle (8), a collection box (3), a filter screen (6), a first gas pipe (2), a second gas pipe (9) and an electromagnetic valve (7), the collection box (3) is arranged on one side of the suction pipe (5), the filter screen (6) is arranged inside the collection box (3), the baffle (8) is arranged inside the suction pipe (5), the electromagnetic valve (7) is arranged on the baffle (8), two ends of the collection box (3) are respectively connected with the suction pipe (5) through the first gas pipe (2) and the second gas pipe (9), and the joints of the first gas pipe (2) and the second gas pipe (9) and the suction pipe (5) are respectively positioned on two sides of the baffle (8);
the length of the spring (21) is controlled by providing power through the driving component, the thrust of the spring (21) to the cover plate (20) is proportional to the length of the spring (21), the pressure of the cover plate (20) can be controlled by controlling the length of the spring (21), when the suction force in the suction pipe (5) is greater than the thrust of the spring (21) to the cover plate (20), the cover plate (20) is opened, external air enters the suction pipe (5) through the pressure stabilizing pipe (16), the adjustment of the suction force in the suction pipe (5) is realized, the probability of damage to a chip is reduced, in the process that the suction nozzle (4) is close to the chip, the electromagnetic valve (7) is closed, the suction pipe (5) is closed through the baffle plate (8), and under the action of the vacuum pump (1), the air flow on one side of the baffle plate (8) far away from the vacuum pump (1) enters the collection box (3) through the second air pipe (9), then, purifying dust in the air through a filter screen (6), and enabling the purified air to enter one side, close to the vacuum pump (1), of the baffle (8) through the first air conveying pipe (2) to suck the dust on the chip;
through pressure regulating mechanism, control the inside suction of straw (5), reduce because the too big probability that leads to the chip to damage of suction, pressure regulating mechanism passes through the length of adjusting spring (21), adjusts the size of the inside biggest suction of straw (5), inhales the dust on the chip through dust removal mechanism.
2. The dust removal type chip sorting apparatus with a voltage stabilization function according to claim 1, wherein a processor is provided at one side of the suction pipe (5), and the processor is electrically connected with the solenoid valve (7).
3. The dust removal type chip sorting device with the voltage stabilizing function according to claim 1, wherein the driving assembly comprises a motor (15), a screw rod (14), a driving block (13) and a second transmission rod (12), the motor (15) is fixed on one side of the suction pipe (5), the screw rod (14) is parallel to the first transmission rod (11), the motor (15) is in transmission connection with the screw rod (14), the driving block (13) is sleeved on the screw rod (14), the screw rod (14) is in threaded connection with the driving block (13), and the driving block (13) is fixedly connected with one end, far away from the connecting block (17), of the first transmission rod (11) through the second transmission rod (12).
4. The dust removal type chip sorting apparatus having a voltage stabilization function according to claim 3, wherein the motor (15) is a servo motor.
5. The dust removal type chip sorting apparatus having a voltage stabilization function according to claim 3, wherein the screw (14) is coated with grease.
6. The dust-removal type chip sorting apparatus with a voltage stabilization function according to claim 1, wherein a pressure sensor (18) is provided between the cover plate (20) and the support sleeve (10), and the pressure sensor (18) is electrically connected with the processor.
7. The dust removal type chip sorting device with the voltage stabilizing function according to claim 3, wherein a limiting block is arranged at one end of the screw rod (14) far away from the motor (15).
8. The dust removal type chip sorting apparatus with a voltage stabilizing function according to claim 1, wherein a sealing ring is provided at one end of the support sleeve (10), and the support sleeve (10) is hermetically connected with the first transmission rod (11) through the sealing ring.
9. The dust removal type chip sorting apparatus with a voltage stabilization function according to claim 1, wherein a dust screen is provided inside the stabilivolt (16).
10. The dust removal type chip sorting device with the pressure stabilizing function according to claim 1, wherein a sealing gasket (19) is arranged on one side of the cover plate (20) close to the pressure stabilizing tube (16), and the cover plate (20) is connected with the pressure stabilizing tube (16) in a sealing mode through the sealing gasket (19).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910302931.XA CN110335843B (en) | 2019-04-16 | 2019-04-16 | Dust removal type chip sorting equipment with voltage stabilizing function |
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| CN201910302931.XA CN110335843B (en) | 2019-04-16 | 2019-04-16 | Dust removal type chip sorting equipment with voltage stabilizing function |
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| CN110335843B true CN110335843B (en) | 2021-06-18 |
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| CN111162034B (en) | 2020-04-03 | 2020-09-25 | Tcl华星光电技术有限公司 | Micro light-emitting diode transfer device, transfer method and display device |
| CN113131999A (en) * | 2021-04-16 | 2021-07-16 | 汤龙泉 | Optical communication module testing method |
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| CN110335843A (en) | 2019-10-15 |
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Effective date of registration: 20210531 Address after: 250200 west of Ming Bu Road, Zhangqiu, Ji'nan, Shandong. Applicant after: JINAN KESHENG ELECTRONIC Co.,Ltd. Applicant after: SHANDONG KEXIN ELECTRONICS Co.,Ltd. Applicant after: Li Chong Applicant after: Lv Ming Applicant after: Guo Cheng Address before: 510000 66-6N room No. 200, Fangcun Avenue East Road, Liwan District, Guangzhou, Guangdong (for office use only). Applicant before: GUANGZHOU XIANZHI TECHNOLOGY Co.,Ltd. |
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