CN110320756B - Motion control device, motion control method, mask stage system and lithography machine - Google Patents

Motion control device, motion control method, mask stage system and lithography machine Download PDF

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Publication number
CN110320756B
CN110320756B CN201810277645.8A CN201810277645A CN110320756B CN 110320756 B CN110320756 B CN 110320756B CN 201810277645 A CN201810277645 A CN 201810277645A CN 110320756 B CN110320756 B CN 110320756B
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motion
module
coarse
control
information
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CN110320756A (en
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卢彧文
陈超
廖飞红
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Priority to CN201810277645.8A priority Critical patent/CN110320756B/en
Priority to PCT/CN2019/080184 priority patent/WO2019184992A1/en
Priority to TW108111289A priority patent/TWI704426B/en
Publication of CN110320756A publication Critical patent/CN110320756A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Abstract

The invention provides a motion control device, a motion control method, a mask stage system and a photoetching machine, which are used for controlling a first motion module and a second motion module to synchronously move and enabling the positions and motion track signals of the first motion module and the second motion module to meet preset requirements, wherein the first motion module and the second motion module are respectively arranged on a first installation frame and a second installation frame and comprise a first position feedback unit, a first track acceleration feedforward unit, a first frame acceleration feedforward unit, a first addition operation module, a second position feedback unit, a second track acceleration feedforward unit, a second frame acceleration feedforward unit and a second addition operation module. The invention can improve the motion precision of the first motion module and the second motion module, and can reduce the mutual interference of the first motion module and the second motion module caused by asynchronous motion, thereby improving the control precision of the motion control device.

Description

Motion control device, motion control method, mask stage system and lithography machine
Technical Field
The present invention relates to the field of lithography technologies, and in particular, to a motion control apparatus, a motion control method, a mask stage system, and a lithography machine.
Background
Large scale semiconductor integrated circuit manufacturing facilities require that vibration disturbances of many critical components be as small as possible to keep the critical components in a quiet environment, such as a lithography machine that requires vibration disturbances of a workpiece stage system and a mask stage system to be as small as possible. The mask stage of the lithography machine generally comprises a micro-motion stage and a coarse-motion stage, wherein the micro-motion stage completes the precise fine adjustment of the mask plate, and the coarse-motion stage completes the large-stroke scanning exposure movement of the mask plate.
With the rapid development of the flat panel display industry, the size of the substrate is increasing, which has been changed from the original G1 (substrate size 300 × 400) to the present G10 (substrate size 2850 × 3150), and the requirement for the size of the exposure field is also increasing. The single lens photoetching machine applied in the IC field is difficult to meet the requirement of increasing the exposure field of view at present, and a photoetching machine for splicing lenses is provided in the industry to solve the problem of increasing the field of view. For a split-lens large field-of-view lithography machine, the size of the reticle used increases, such as 850 x 1200mm and 850 x 1400mm reticles above G6, and even larger reticles. Therefore, the frame structure and the mass for supporting the mask plate are increased, the increase of the frame structure and the mass for supporting the mask plate inevitably brings the increase of the vibration of the mask table system, and meanwhile, the frame structure and the mass of the photoetching machine are also increased, and the vibration of the photoetching machine is also increased, so that the requirements on the vibration control of the mask table system and the photoetching machine are correspondingly improved, and the influence of the vibration on the precision of the mask table system and the precision of the photoetching machine is avoided. In addition, as the IC and flat panel display industries continue to develop, the requirements for mask stage systems and lithography machine vibration control are also increasing.
Therefore, there is an urgent need for improvements in mask stage systems and lithography machines to reduce the impact of vibrations on the accuracy of the mask stage systems and lithography machines.
Disclosure of Invention
The invention aims to provide a motion control device, a motion control method, a mask table system and a photoetching machine, so as to solve the problem that vibration affects the precision of the mask table system and the photoetching machine.
In order to solve the above technical problem, the present invention provides a motion control device for controlling a first motion module and a second motion module to move synchronously, and enabling positions and motion trajectory signals of the first motion module and the second motion module to meet preset requirements, wherein the first motion module and the second motion module are respectively disposed on a first mounting frame and a second mounting frame, the motion control device includes: the first position feedback unit is used for performing feedback control for enabling the position of the first motion module and the motion track signal to meet preset requirements; a first trajectory acceleration feedforward unit for performing feedforward control that compensates for a delay of position control of the first motion module; a first frame acceleration feedforward unit for performing feedforward control that compensates for a disturbance of vibration of the first mounting frame to position control of the first motion module; the first addition operation module is used for superposing the information output by the first position feedback unit, the first track acceleration feedforward unit and the first frame acceleration feedforward unit and outputting a signal for controlling the motion of the first motion module; the second position feedback unit is used for performing feedback control for enabling the position of the second motion module and the motion track signal to meet preset requirements; a second trajectory acceleration feedforward unit for performing a feedforward control that compensates for a delay of the position control of the second motion module; a second frame acceleration feedforward unit for performing feedforward control that compensates for a disturbance of vibration of the second mounting frame to position control of the second coarse motion module; and the second addition operation module is used for superposing the information output by the second position feedback unit, the second track acceleration feedforward unit and the second frame acceleration feedforward unit and outputting a signal for controlling the motion of the second motion module.
Optionally, the first position feedback unit includes a first subtraction module and a first feedback controller, the first subtraction module is configured to perform subtraction on the motion trajectory signal and the position information of the first motion module, and output first deviation information, and the first feedback controller is configured to process the first deviation information and output first driving information; the first track acceleration feedforward unit is used for processing a motion track acceleration signal of the first motion module and outputting first correction driving information; the first frame acceleration feedforward unit is used for processing acceleration information of the first mounting frame and outputting second correction driving information; the first addition operation module is used for performing addition operation on the first driving information, the first correction driving information and the second correction driving information and outputting a signal for controlling the first motion module to move; the second position feedback unit comprises a second subtraction module and a second feedback controller, the second subtraction module is used for performing subtraction on the motion track signal and the position information of the second motion module and outputting second deviation information, and the second feedback controller is used for processing the second deviation information and outputting second driving information; the second track acceleration feedforward unit is used for processing the motion track acceleration signal of the second motion module and outputting third correction driving information; the second frame acceleration feedforward unit is used for processing acceleration information of the second mounting frame and outputting fourth correction driving information; and the second addition operation module is used for performing addition operation on the second driving information, the third correction driving information and the fourth correction driving information and outputting a signal for controlling the second motion module to move.
Optionally, a shock absorber is disposed on each of the first mounting frame and the second mounting frame, the first motion module is disposed on the shock absorber, and the second motion module is disposed on the shock absorber.
The present invention further provides a motion control method of the motion control apparatus, where the motion control apparatus is configured to control a first motion module and a second motion module to move synchronously, and enable positions and motion trajectory signals of the first motion module and the second motion module to meet preset requirements, where the first motion module and the second motion module are respectively disposed on a first mounting frame and a second mounting frame, and the motion control method includes: performing feedback control to enable the position of the first motion module and the motion track signal to meet preset requirements; performing a feed-forward control that compensates for a delay in position control of the first motion module; performing feed-forward control that compensates for disturbances of the vibration of the first mounting frame to the position control of the first motion module; superimposing information on feedback control that makes the position of the first motion module and the motion trajectory signal meet a preset requirement, feedforward control that compensates for a delay in position control of the first motion module, and feedforward control output that compensates for a disturbance of vibration of the first mounting frame to position control of the first motion module, and outputting a signal for controlling motion of the first motion module; performing feedback control to enable the position of the second motion module and the motion track signal to meet preset requirements; performing a feed-forward control that compensates for a delay of the position control of the second motion module; performing feed-forward control that compensates for disturbances of the vibration of the second mounting frame to the position control of the second coarse motion module; and superposing feedback control for enabling the position of the second motion module and the motion trail signal to meet preset requirements, compensating information output by the feedforward control for delaying the position control of the second motion module and compensating the feedforward control for the disturbance of the vibration of the second mounting frame on the position control of the second motion module, and outputting a signal for controlling the motion of the second motion module.
Optionally, performing feedback control so that the position of the first motion module and the motion trajectory signal meet a preset requirement includes: subtracting the motion track signal and the position information of the first motion module, outputting first deviation information, processing the first deviation information and outputting first driving information; performing feed-forward control that compensates for the delay in position control of the first motion module includes: subtracting the motion track signal and the position information of the first motion module, outputting first deviation information, processing the first deviation information and outputting first driving information; performing feed-forward control that compensates for a disturbance of vibration of the first mounting frame to the position control of the first motion module includes processing acceleration information of the first mounting frame and outputting second modified drive information; superimposing feedback control that makes the position of the first motion module and the motion trajectory signal satisfy a preset requirement, outputting information of feedforward control output that compensates for a delay of the position control of the first motion module and feedforward control output that compensates for a disturbance of vibration of the first mounting frame to the position control of the first motion module, and outputting a signal for controlling motion of the first motion module includes: adding the first driving information, the first correction driving information and the second correction driving information, and outputting a signal for controlling the first motion module to move; performing feedback control such that the position of the second motion module and the motion trajectory signal satisfy a preset requirement includes: subtracting the motion track signal and the position information of the second motion module, outputting second deviation information, processing the second deviation information and outputting second driving information; performing feed-forward control that compensates for the delay of the position control of the second motion module includes: processing the motion track acceleration signal of the second motion module and outputting third correction driving information; performing feed-forward control that compensates for disturbances of the vibration of the second mounting frame to the position control of the second coarse motion module includes: processing acceleration information of the second mounting frame and outputting fourth correction driving information; superimposing feedback control that makes the position of the second motion module and the motion trajectory signal satisfy a preset requirement, outputting information of feedforward control output that compensates for a delay of the position control of the second motion module and feedforward control output that compensates for a disturbance of the vibration of the second mounting frame to the position control of the second motion module, and outputting a signal for controlling the motion of the second motion module includes: and performing addition operation on the second driving information, the third correction driving information and the fourth correction driving information, and outputting a signal for controlling the second motion module to move.
Optionally, a shock absorber is disposed on the first mounting frame, a shock absorber is disposed on the second mounting frame, a first motion module is disposed on the shock absorber on the first mounting frame, and a second motion module is disposed on the shock absorber on the second mounting frame.
The invention also provides a mask stage system which comprises the motion control device.
Optionally, the mask stage system includes a mask stage, a first detection module, a second detection module, a first acceleration sensor and a second acceleration sensor, the first motion module and the second motion module are configured to drive the mask stage to move, the first detection module is configured to detect position information of the mask stage near the first motion module and use the position information as position information of the first motion module, the second detection module is configured to detect position information of the mask stage near the second motion module and use the position information as position information of the second motion module, the first acceleration sensor is disposed on the first mounting frame, the first acceleration sensor is configured to detect acceleration information of the first mounting frame and transmit the acceleration information of the first mounting frame to a motion control device, and the second acceleration sensor is disposed on the second mounting frame, the second acceleration sensor is used for detecting acceleration information of the second mounting frame and transmitting the acceleration information of the second mounting frame to the motion control device.
Optionally, the application range of the shock absorber is 10-50 Hz.
The invention also provides a photoetching machine which comprises the mask table system.
The motion control device, the motion control method, the mask stage system and the photoetching machine provided by the invention have the following beneficial effects:
the motion control device adopts the first position feedback unit to enable the position of the first motion module and the motion track signal to meet preset requirements, adopts the first track acceleration feedforward unit to compensate the delay of the position control of the first motion module, adopts the first frame acceleration feedforward unit to compensate the disturbance of the vibration of the first installation frame on the position control of the first motion platform, adopts the first addition operation module to superpose the information output by the first position feedback unit, the first track acceleration feedforward unit and the first frame acceleration feedforward unit, and outputs a signal for controlling the motion of the first motion module, so that the motion control device can reduce the disturbance of the vibration of the first installation frame on the motion of the first motion module while carrying out feedback control and position feedforward compensation on the motion of the first motion module, thereby, the movement precision of the first movement module can be further improved.
The motion control device controls the motion of the second motion module through a second position feedback unit, a second track acceleration feedforward unit, a second frame acceleration feedforward unit and a second addition operation module, and similarly, the motion control device can reduce the interference of the vibration of the second mounting frame on the motion of the second motion module while performing feedback control and position feedforward compensation on the motion of the second motion module, thereby further improving the motion precision of the second motion module.
Meanwhile, the motion precision of the first motion module and the motion precision of the second motion module can be improved, and the first motion module and the second motion module are controlled to move by adopting the same motion track signal, the motion track acceleration signal of the first motion module and the motion track acceleration signal of the second motion module, so that the motion control device can control the first motion module and the second motion module to move synchronously, and the motion precision of the first motion module and the second motion module is improved, thereby further reducing the mutual interference of the first motion module and the second motion module caused by asynchronous motion, further improving the overall motion precision of the first motion module and the second motion module, and improving the control precision of the motion control device.
Drawings
FIG. 1 is a front view of a mask table system;
FIG. 2 is a left side view of a mask table system;
FIG. 3 is a control block diagram of a mask stage system;
FIG. 4 is a front view of a mask stage system in accordance with a first embodiment of the present invention;
FIG. 5 is a left side view of a mask stage system in accordance with one embodiment of the present invention;
FIG. 6 is a control block diagram of a motion control apparatus for use in a mask stage system according to a first embodiment of the present invention;
FIG. 7 is a front view of a mask stage system in a second embodiment of the present invention;
FIG. 8 is a schematic illustration of ground based excitation data for the mask stage system shown in FIGS. 1-2;
FIG. 9 is a graph of a response at a point of interest of a mask stage in the mask stage system shown in FIGS. 1-2;
FIG. 10 is a response curve at a mask stage focus point in a mask stage system in accordance with a second embodiment of the present invention.
Reference numbers for the mask stage systems in fig. 1-3 illustrate:
100-a first coarse motion module; 101-coarse motion guide rails; 102-coarse movement stage;
200-a second coarse motion module; 201-coarse movement guide rail; 202-coarse moving stage;
300-a micromotion module;
401 — a first mounting frame; 402-a second mounting frame; 403-foundation;
500-a mask table;
601-a first feedforward controller; 602-a first feedback controller; 603-a second feedforward controller; 604-a second feedback controller; 605-a first arithmetic unit; 606-a second arithmetic unit; 607-a third arithmetic unit; 608-a fourth arithmetic unit; 609-a fifth arithmetic unit; 610-a sixth arithmetic unit; 611-a seventh arithmetic unit; 612-eighth arithmetic unit; 613-first current loop; 614-second current loop;
701-a first detection module; 702-a second detection module.
Reference numbers for the mask stage systems in fig. 4-7, 10 illustrate:
810-a first coarse motion module; 811-coarse movement guide; 812-coarse movement stage;
820-a second coarse motion module; 821-coarse motion guide rail; 822-coarse movement stage;
831-first mounting frame, 832-second mounting frame; 834-foundation
840-a mask stage;
851-a first detection module; 852-a second detection module;
861-a first acceleration sensor; 862-second acceleration sensor;
871-a first subtraction module; 872-first feedback controller; 873-a first trajectory acceleration feedforward unit; 874-first addition operation module; 875-a first frame acceleration feedforward unit; 876-first current loop;
881-second subtraction module; 882-a second feedback controller; 883-a second trajectory acceleration feedforward unit; 884-a second addition operation module; 885-a second frame acceleration feedforward unit; 886-second current loop;
890-shock absorber;
a1 — first curve; a 2-second curve.
Detailed Description
As described in the background, the accuracy of existing mask table systems is susceptible to vibrations, based on which the applicant has conducted a detailed analysis of the structure and control of existing mask table systems.
Fig. 1 is a front view of a mask stage system, and fig. 2 is a left side view of a mask stage system, which includes a first coarse movement module 100, a second coarse movement module 200, a fine movement module 300, a mask stage mounting frame, a mask stage 500, a motion control device, and a position detection device, referring to fig. 1 and 2. The first coarse motion module 100, the second coarse motion module 200, the fine motion module 300, the mask stage mounting frame, the mask stage 500, the motion control means, and the position detection means form a closed-loop control system for controlling the position of the mask stage 500.
As shown in fig. 1, the mask table mounting frame comprises a first mounting frame 401 and a second mounting frame 402. The first mounting frame 401 and the second mounting frame 402 are respectively disposed on the foundation 403.
The first coarse movement module 100 and the second coarse movement module 200 are disposed on the first mounting frame 401 and the second mounting frame 402, respectively. The micromotion module 300 is disposed on the first coarse motion module 100 and the second coarse motion module 200. The mask stage 500 is disposed on the micromotion module 300. The first coarse motion module 100 and the second coarse motion module 200 are used for driving the fine motion module 300 and the mask stage 500 disposed on the fine motion module 300 to move. The micromotion module 300 is used for driving the mask stage 500 to move.
The first coarse movement module 100 and the second coarse movement module 200 each comprise a coarse movement rail 101, 201 arranged on the mask stage mounting frame, a coarse movement stage 102, 202 moving along the coarse movement rail 101, 201, and a drive for driving the coarse movement stage 102, 202 to move along the coarse movement rail 101, 201. The micromotion module 300 includes micromotion guide rails respectively provided on the two coarse motion stages 102, and a mask stage 500 moving along the two micromotion guide rails.
Referring to fig. 2, the first coarse motion module 100, the second coarse motion module 200, and the fine motion module 300 drive the mask stage 500 to move along the Y-axis. For convenience of description, the coarse movement stage 102 of the first coarse movement module 100 is referred to as a first coarse movement stage 102, the driver of the first coarse movement module 100 is referred to as a first driver, the coarse movement stage 102 of the second coarse movement module 200 is referred to as a second coarse movement stage 102, and the driver of the second coarse movement module 200 is referred to as a second driver.
The position detection device is configured to detect displacement information of the first coarse motion module 100 and the second coarse motion module 200 and feed back the displacement information to the motion control device. Specifically, the position detecting apparatus includes a first detecting module 701 and a second detecting module 702, where the first detecting module 701 is configured to detect first position information of the first coarse mobile station 102, and the second detecting module 702 is configured to detect second position information of the second coarse mobile station 102.
Fig. 3 is a control block diagram of a mask stage system, and referring to fig. 3, the motion control apparatus includes a first feedforward controller 601, a first feedback controller 602, a second feedforward controller 603, a second feedback controller 604, a first arithmetic unit 605, a second arithmetic unit 606, a third arithmetic unit 607, a fourth arithmetic unit 608, a fifth arithmetic unit 609, a sixth arithmetic unit 610, a seventh arithmetic unit 611, an eighth arithmetic unit 612, a first current loop 613, and a second current loop 614. The motion control device controls the first coarse motion stage 102 and the second coarse motion stage 102 to move according to a control command issued by a superior control system. Specifically, the information sent by the superior control system to the motion control device mainly includes a motion trajectory signal, a relative rotation angle signal of the first coarse motion module 100 and the second coarse motion module 200, an acceleration signal of the motion trajectory of the first coarse motion module 100, and a motion trajectory acceleration signal of the second coarse motion module 200.
The first operation unit 605 is configured to perform a cross operation on the first position information and the second position information, halve a subtraction result of the first position information and the second position information, and output first position processing information.
The second operation unit 606 is configured to perform a cross operation on the first position information and the second position information, halve a subtraction result of the first position information and the second position information, and output second position processing information.
The third operation unit 607 is configured to perform subtraction on the motion trajectory signal and the first position processing information, and output first deviation information.
The fourth operation unit 608 is configured to perform subtraction on the relative rotation angle signal of the first coarse movement module 100 and the second coarse movement module 200 and the second position processing information, and output second deviation information.
The first feedback controller 602 is configured to process the first deviation information and output first driving information.
The second feedback controller 604 is configured to process the second deviation information and output second driving information.
The first feedforward controller 601 is configured to process the motion trajectory acceleration signal of the first coarse motion module 100 and output first modified driving information.
The second feedforward controller 603 is configured to process the motion trajectory acceleration signal of the second coarse motion module 200 and output second modified driving information.
The fifth arithmetic unit 609 is configured to add the first driving information and the first modified driving information, and output a first motion control signal.
The sixth operation unit 610 is configured to add the second driving information and the second modified driving information, and output a second motion control signal.
The seventh operation unit 611 is configured to perform a cross operation on the first motion control signal and the second motion control signal, and output a first cross driving signal.
The eighth operation unit 612 is configured to perform a cross operation on the first motion control signal and the second motion control signal, and output a second cross driving signal.
The first cross driving signal is processed by the first current loop 613 and then output to the first driver, and the first driver controls the first coarse motion stage 102 to move. The second cross driving signal is processed by the second current loop 614 and then output to the second driver, and the second driver controls the second coarse motion stage 102 to move.
Referring to fig. 3, one of the mask stage systems shown in fig. 1 and 2 employs a double cross synchronous control strategy. In the mask stage system, a first coarse motion stage 102 is used as a driving shaft, a second coarse motion stage 102 moves along with the first coarse motion stage 102, and the second coarse motion stage 102 is used as a follow-up shaft. The mask stage system performs deviation control on the first coarse motion module 100 and the second coarse motion module 200 respectively through the first position information and the second position information after the crossing processing, and realizes position crossing control of the first coarse motion stage 102 and the second coarse motion stage 102. The first coarse motion module 100 and the second coarse motion module 200 are compensated by the first motion control signal and the second motion control signal after the cross processing, so that the forces of the first coarse motion stage 102 and the second coarse motion stage 102 are relatively uniform, and the cross control of the forces of the first coarse motion stage 102 and the second coarse motion stage 102 is realized. The smaller the relative rotation angle signals of the first coarse motion stage 102 and the second coarse motion stage 102, the higher the synchronization control precision, so that the relative rotation angle signals of the first coarse motion module 100 and the second coarse motion module 200 can be set to zero, i.e. it is desirable that the first coarse motion module 100 and the second coarse motion module 200 are completely synchronized.
After the research of the applicant, the precision influencing the mask stage system is mainly low-frequency vibration. According to the source of the low-frequency vibration, the first is the low-frequency vibration indirectly transmitted from the foundation 403; second is the interference between the first coarse motion module 100 and the second coarse motion module 200 of the mask stage system described above.
Specifically, during the operation of the lithography machine, there may be vibration of the foundation 403 and high motion acceleration and motion speed of the part system such as the workpiece stage and the mask stage 500, and the reaction force and the overturning moment generated by the moving part during the motion will cause the core part of the lithography machine to vibrate. The first coarse motion module 100 and the second coarse motion module 200 in the mask stage 500 are connected to the foundation 403 by a mask stage mounting frame, through which various disturbances in the lithography machine will be directly transferred to the mask stage 500.
The mutual interference between the first coarse motion module 100 and the second coarse motion module 200 is mainly reflected in:
1) after the motion control device receives the motion track signal and controls the first coarse motion module 100 to move, the motion control device needs to calculate a deviation between the position of the second coarse motion module 200 and the position of the first coarse motion module 100, and uses the deviation as a control input of the second coarse motion module 200, the control input of the second coarse motion module 200 always lags behind the motion track signal, and a time delay exists between the first coarse motion module 100 and the second coarse motion module 200, so that the motions of the first coarse motion module 100 and the second coarse motion module 200 are interfered with each other.
2) The detection result shows that the second coarse motion module 200 cannot timely follow the first coarse motion module 100 to move, and the synchronization error between the first coarse motion module 100 and the second coarse motion module 200 is large, so that mutual interference exists between the first coarse motion module 100 and the second coarse motion module 200.
3) The first position information and the second position information of the first coarse movement module 100 and the second coarse movement module 200 are transmitted to the control loop of the other party in a crossed mode, direct disturbance is generated, and a synchronization error is large, so that mutual interference exists between the first coarse movement module 100 and the second coarse movement module 200.
Based on the analysis, the applicant provides a motion control device, a motion control method, a mask stage system and a lithography machine, wherein a first coarse motion module and a second coarse motion module of the mask stage system respectively use displacement errors of the first coarse motion module and the mask stage as control objects, so that the synchronization performance of the first coarse motion module and the second coarse motion module is ensured, and direct crosstalk between the first coarse motion module and the second coarse motion module in the existing cross synchronization strategy is avoided.
The motion control apparatus, the motion control method, the mask stage system and the photolithography machine according to the embodiments of the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. Advantages and features of the present invention will become apparent from the following description and from the claims. It is to be noted that the drawings are in a very simplified form and are not to precise scale, which is merely for the purpose of facilitating and distinctly claiming the embodiments of the present invention.
Example one
The embodiment provides a mask stage system, which is applied to a motion control device and a photoetching machine in the mask stage system.
Referring to fig. 4 and 5, fig. 4 is a front view of a mask stage system in a first embodiment of the present invention, and fig. 5 is a left side view of the mask stage system in the first embodiment of the present invention, the mask stage system including a first coarse movement module 810, a second coarse movement module 820, a mask stage mounting frame, a mask stage 840, a motion control device, a position detection device, a first acceleration sensor, and a second acceleration sensor.
The mask stage mounting frame includes a first mounting frame 831 and a second mounting frame 832. The first and second mounting frames 831 and 832 are respectively disposed on a ground 834.
The first coarse movement module 810 and the second coarse movement module 820 are disposed on the first mounting frame 831 and the second mounting frame 832, respectively. The first coarse motion module 810 and the second coarse motion module 820 are used for driving the mask stage 840 to move. The first coarse movement module 810 and the second coarse movement module 820 each include a coarse movement guide 811, 821 provided on the mask stage mounting frame, a coarse movement stage 812, 822 moving along the coarse movement guide 811, 821, and a driver for driving the coarse movement stage 812, 822 to move along the coarse movement guide 811, 821. Referring to fig. 5, the first coarse motion block 810 and the second coarse motion block 820 move along the Y-axis. For convenience of description, the coarse movement stage 812 of the first coarse movement module 810 is referred to as a first coarse movement stage, the driver of the first coarse movement module 810 is referred to as a first driver, the coarse movement stage 822 of the second coarse movement module 820 is referred to as a second coarse movement stage, and the driver of the second coarse movement module 820 is referred to as a second driver.
The position detection means is configured to detect displacement information of the mask stage 840 and feed back the displacement information to the motion control means. Specifically, the position detection device includes a first detection module and a second detection module, the first detection module is configured to detect position information of the mask stage 840 near the first coarse movement stage, the second detection module is configured to detect position information of the mask stage 840 near the second coarse movement stage, the position information detected by the first detection module is first position information, and the position information detected by the second detection module is second position information. The first detection module and the second detection module in this embodiment may be interferometers.
A first acceleration sensor and a second acceleration sensor. The first acceleration sensor is disposed on the first mounting frame 831, and the second acceleration sensor is disposed on the second mounting frame 832. The first acceleration sensor is configured to detect acceleration information of the first mounting frame 831, and transmit the acceleration information of the first mounting frame 831 to the first motion control unit. The second acceleration sensor is configured to detect acceleration information of the second mounting frame 832 and transmit the acceleration information of the second mounting frame 832 to the second motion control unit.
Fig. 6 is a control block diagram of a motion control apparatus applied to a mask stage system according to a first embodiment of the present invention, wherein the motion control apparatus includes a first motion control unit and a second motion control unit for independently controlling the first coarse motion module 810 and the second coarse motion module 820. The motion control device controls the first coarse movement stage and the second coarse movement stage to move according to a control command issued by a superior control system, the first position information and the second position information detected by the position detection device, and the acceleration information of the first mounting frame 831 and the acceleration information of the second mounting frame 832. Specifically, the information sent by the upper control system to the motion control device mainly includes a motion trajectory signal, a motion trajectory acceleration signal of the first coarse motion module 810, and a motion trajectory acceleration signal of the second coarse motion module 820. And the motion track signal is simultaneously sent to the first motion control unit and the second motion control unit. The motion trajectory acceleration signal of the first coarse motion module 810 is sent to the first motion control unit, and the motion trajectory acceleration signal of the second coarse motion module 820 is sent to the second motion control unit, where the motion trajectory acceleration signal of the first coarse motion module 810 is the same as the motion trajectory acceleration signal of the second coarse motion module 820. The first position information is sent to a first motion control unit. The second position information is sent to a second motion control unit. The acceleration information of the first mounting frame 831 is transmitted to a first motion control unit, and the acceleration information of the second mounting frame 832 is transmitted to a second motion control unit.
Referring to fig. 6, the first motion control unit includes a first position feedback unit, a first trajectory acceleration feedforward unit 873, a first summation module 874, and a first frame acceleration feedforward unit 875.
The first position feedback unit is configured to perform feedback control such that the position of the first coarse motion stage of the first coarse motion module 810 and the motion trajectory signal meet a preset requirement. For example, the position of the first coarse movement stage is matched as far as possible to the motion trajectory signal. Specifically, the first position feedback unit includes a first subtraction module 871 and a first feedback controller 872. The first subtraction module 871 is configured to perform subtraction on the first position information and the motion trajectory signal, and output first deviation information. The first feedback controller 872 is configured to process the first deviation information and output first driving information. The first feedback controller 872 is preferably a PID control module.
The first trajectory acceleration feedforward unit 873 is configured to perform feedforward control for compensating for a delay in position control of the first coarse motion stage. Specifically, the first trajectory acceleration feedforward unit 873 is configured to process the motion trajectory acceleration signal of the first coarse motion module 810 and output first correction driving information.
The first frame acceleration feedforward unit 875 is configured to perform feedforward control for compensating for disturbance of the vibration of the first mounting frame 831 to the position control of the first coarse movement stage. Specifically, the first frame acceleration feedforward unit 875 is configured to process acceleration information of the first mounting frame 831 and output second correction driving information.
The first addition operation module 874 is configured to add information output by the first position feedback unit, the first trajectory acceleration feedforward unit 873, and the first frame acceleration feedforward unit 875, and output a first motion control signal for controlling the motion of the first coarse motion module 810. Specifically, the first addition module 874 is configured to add the first driving information, the first correction driving information, and the second correction driving information, and output a first motion control signal. The first motion control signal is used to control the first coarse motion module 810 to move.
The second motion control unit includes a second position feedback unit, a second trajectory acceleration feedforward unit 883, a second addition module 884, and a second frame acceleration feedforward unit 885.
The second position feedback unit is configured to perform feedback control so that the position of the second coarse motion stage of the second coarse motion module 820 and the motion trajectory signal meet a preset requirement. For example, the position of the second coarse movement stage is matched as far as possible to the motion trajectory signal. Specifically, the second position feedback unit includes a second subtraction module 881 and a second feedback controller 882. The second subtraction module 881 is configured to perform subtraction on the second position information and the motion trajectory signal, and output second deviation information. The second feedback controller 882 is configured to process the second deviation information and output second driving information. The second feedback controller 882 is preferably a PID control module.
The second trajectory acceleration feedforward unit 883 is configured to perform feedforward control to compensate for a delay of the second position feedback unit in controlling the position of the second coarse motion stage 812, 822. Specifically, the second trajectory acceleration feedforward unit 883 is configured to process the motion trajectory acceleration signal of the third coarse motion module and output third correction driving information.
The second frame acceleration feedforward unit 885 is used to perform feedforward control that compensates for the disturbance of the vibration of the second mounting frame 832 to the position control of the second coarse motion stage. Specifically, the second frame acceleration feedforward unit 885 is configured to process acceleration information of the second mounting frame 832 and output fourth correction driving information.
The second addition operation module 884 is configured to add information output by the second position feedback unit, the second trajectory acceleration feedforward unit 883, and the second frame acceleration feedforward unit 885, and output a second motion control signal for controlling the motion of the second coarse motion module 820. Specifically, the second addition module 884 is configured to add the second driving information, the third correction driving information, and the fourth correction driving information, and output a second motion control signal. The second motion control signal is used to control the second coarse motion module 820 to move.
The first motion control unit preferably includes a first current loop 876, and the first current loop 876 is configured to process first driving information and control the first coarse motion module 810 to move by using the processed first driving information.
The second motion control unit preferably includes a second current loop 886, and the second current loop 886 is configured to process the first driving information and control the second coarse motion module 820 to move using the processed second driving information.
In this embodiment, the mask stage system operates as follows:
first, the upper control system transmits a motion trace signal, a motion trace acceleration signal of the first coarse motion module 810, and a motion trace acceleration signal of the second coarse motion module 820 to the motion control device, the position detection device transmits first position information and second position information to the motion control device, and the first acceleration sensor 861 and the second acceleration sensor 862 transmit acceleration information of the first mounting frame 831 and the second mounting frame 832 to the motion control device.
Secondly, a first subtraction module 871 in a first position feedback unit in the motion control device performs subtraction on the first position information and the motion track signal, and outputs first deviation information, and then the first feedback controller 872 processes the first deviation information and outputs first driving information; the second subtraction module 881 in the second position feedback unit in the motion control apparatus subtracts the second position information and the motion trail signal and outputs second deviation information, and then the second deviation information is processed by the second feedback controller 882 and second driving information is output.
Meanwhile, a first track acceleration feedforward unit 873 in the motion control device processes the motion track acceleration signal of the first coarse motion module 810 and outputs first correction driving information; a second trajectory acceleration feedforward unit 883 in the motion control device processes the motion trajectory acceleration signal of the second coarse motion module 820 and outputs third modified drive information.
Meanwhile, the first frame acceleration feedforward unit 875 in the motion control apparatus processes the acceleration information of the first mounting frame 831 and outputs second modified drive information; the second frame acceleration feed-forward unit 885 in the motion control device processes the acceleration information of the second mounting frame 832 and outputs fourth modified drive information.
Then, the first addition module 874 adds the first driving information, the first correction driving information, and the second correction driving information, and outputs a first motion control signal; the second addition module 884 adds the second driving information, the third modified driving information and the fourth modified driving information, and outputs a second motion control signal.
Then, the first coarse motion module 810 is controlled to move by a first motion control signal, and the second coarse motion module 820 is controlled to move by a second motion control signal.
In this embodiment, the motion control apparatus of the mask stage system controls the first coarse motion module 810 to move through the first motion control unit, and uses the first position feedback unit to enable the position of the first coarse motion stage of the first coarse motion module 810 and the motion trajectory signal to meet the preset requirement, uses the first trajectory acceleration feedforward unit 873 to compensate the delay of the first position feedback unit on the position control of the first coarse motion stage, and uses the first frame acceleration feedforward unit 875 to compensate the disturbance of the vibration of the first mounting frame 831 on the position control of the first coarse motion stage, and uses the first addition module 874 to add the information output by the first position feedback unit, the first trajectory acceleration feedforward unit 873, and the first frame acceleration feedforward unit 875, and output a signal for controlling the motion of the first motion module, therefore, the motion control device of the mask stage system can reduce the interference of the vibration of the first mounting frame 831 with the motion of the first coarse motion module 810 while performing feedback control and position feedforward compensation on the motion of the first coarse motion module 810, so that the motion accuracy of the first coarse motion module 810 can be further improved; the motion control device of the mask stage system controls the second coarse motion module 820 to move through the second motion control unit, and uses the second position feedback unit to make the position of the second coarse motion stage of the second coarse motion module 820 and the motion trajectory signal satisfy the preset requirement, uses the second trajectory acceleration feedforward unit 883 to compensate the delay of the second position feedback unit to the position control of the second coarse motion stage, and uses the second frame acceleration feedforward unit 885 to compensate the disturbance of the vibration of the second mounting frame 832 to the position control of the second coarse motion stage, and uses the second addition module 884 to superimpose the information output by the second position feedback unit, the second trajectory acceleration feedforward unit 883 and the second frame acceleration feedforward unit 885, and outputs a signal for controlling the motion of the second motion module, therefore, the motion control device of the mask stage system can reduce the interference of the vibration of the second mounting frame 832 to the motion of the second coarse motion module 820 while performing feedback control and position feedforward compensation on the motion of the second coarse motion module 820, so that the motion accuracy of the second coarse motion module 820 can be further improved; since the motion accuracy of the first coarse motion module 810 and the second coarse motion module 820 can be improved, the first motion control unit and the second motion control unit both use the same motion track signal, the motion track acceleration signal of the first coarse motion module 810 is the same as the motion track acceleration signal of the second coarse motion module 820, and the first position information and the second position information are position information at different positions on the mask stage 840, that is, the first motion control unit and the second motion control unit have the same motion control command and motion track acceleration feedforward compensation information, and close position feedback information, the motion control device can control the first coarse motion module 810 and the second coarse motion module 820 to move synchronously, because the motion accuracy of the first coarse motion module 810 and the second coarse motion module 820 is improved, therefore, the mutual interference of the first coarse movement module 810 and the second coarse movement module 820 caused by asynchronous movement can be further reduced, and the movement precision of the whole first coarse movement module 810 and the second coarse movement module 820 can be improved, i.e. the control precision of the movement control device can be improved, and the movement precision of the mask stage system can be improved.
Compared with a double-crossing synchronization control strategy of a motion control device of a mask stage system, the motion control device of the mask stage system in this embodiment can avoid the problems of mutual interference of control information and large synchronization error due to asynchronous control command input of the first coarse motion module 810 and the second coarse motion module 820 by adopting the first motion control unit and the second motion control unit to respectively control the first coarse motion module 810 and the second coarse motion module 820, and effectively compensate the interference of vibration of the first mounting frame 831 and the second mounting frame 832 on the motion of the first coarse motion module 810 and the second coarse motion module 820 by arranging the first frame acceleration feedforward unit 875 and the second frame acceleration feedforward unit 885, so that the control precision of the motion control device can be improved, and the motion precision of the mask stage system can be improved.
The embodiment also provides a lithography machine, which comprises the mask stage system in the embodiment.
Example two
The present embodiments provide a mask stage system. Referring to fig. 7, fig. 7 is a front view of a mask stage system according to a second embodiment of the present invention, which is different from the first embodiment in that the mask stage system according to the present embodiment may further include a damper 890. In this embodiment, the coarse movement module is not directly disposed on the mask stage mounting frame, but the damper 890 is disposed on the mask stage mounting frame, and the coarse movement module is disposed on the damper 890. The vibration transmitted from the ground 834 passes through the mask stage mounting frame, passes through the damper 890, and is transmitted to the first coarse movement module 810 and the second coarse movement module 820. Vibration transmitted by the lithography machine to the mask table 840 can be effectively reduced by providing a damper 890 between the mask table mounting frame and the first coarse motion module 810 and the second coarse motion module 820.
The applicant carries out PSD simulation under ground 834 excitation on the mask stage system shown in fig. 1-2, referring to fig. 8, fig. 8 is a schematic ground excitation data diagram of the mask stage system shown in fig. 1-2, and after research by the applicant, the applicant finds that, due to the influence of structural rigidity, a mask stage 840 has a multi-order low-frequency mode between 15 Hz and 35Hz, and low-frequency vibration between 15 Hz and 35Hz causes the dynamic performance of the mask stage 840 to be reduced, and affects the position stability of the mask stage 840. The mask stage 840 takes a focus point, the response result is shown in fig. 9, fig. 9 is a response curve of the mask stage focus point in the mask stage system shown in fig. 1-2, the focus point displacement response value is mainly affected by Frequency (Frequency) of 10-20 Hz, Frequency around 30Hz, and Frequency around 66Hz, and the maximum displacement response value (cumdie) is about 3.6 um.
To eliminate the effect of low frequency vibrations on reticle stage 840, applicants formulated snubber 890 parameters at 18Hz with a damping ratio of 0.2, a reticle stage system total mass of about 3.48 tons, and the calculation of stiffness and damping is as follows:
K＝(2πf)2M
C＝2ξ(2πfn)M
where K is stiffness, M is mass, C is damping, ξ is damping rate, f and fnRespectively, the frequency of the shock absorbers, the total stiffness of shock absorber 890 is 44448.75N/mm and the total damping is 157.2N/(mm/s).
Fig. 10 shows response values of a focus position after the damper 890 is added, where fig. 10 is a response curve of the mask stage 840 at a focus point in the mask stage system according to the second embodiment of the present invention, the response curve after the damper is added at the focus point is a first curve a1, and the response curve after the damper is not added at the focus point is a second curve a2, and comparing the first curve a1 with the second curve a2 shows that after the damper 890 is added, vibration of about 30Hz is completely eliminated, vibration of about 10 to 20Hz is partially eliminated, and the overall response value is reduced to 1/3 or less when the damper 890 is not added.
In the embodiment, the application range of the shock absorber is preferably 10-50 Hz.
In this embodiment, the acceleration sensors are preferably disposed at the positions of the first mounting frame 831 and the second mounting frame 832 close to the shock absorbers, so that the vibrations detected by the first acceleration sensor 861 and the second acceleration sensor 862 are closer to the vibrations transmitted to the first coarse movement module 810 and the second coarse movement module 820 by the first mounting frame 831 and the second mounting frame 832, so as to improve the compensation of the first frame acceleration feedforward unit 875 and the second frame acceleration feedforward unit 885 for the movements of the first coarse movement module 810 and the second coarse movement module 820, thereby improving the control accuracy of the motion control device of the mask stage 840 control system and simultaneously improving the motion accuracy of the mask stage system.
EXAMPLE III
The present embodiment provides a motion control method of the motion control device in the mask stage system in the above-described embodiments. Before the motion control device works, the motion control device sends a motion track signal, a motion track acceleration signal of the first coarse motion module 810 and a motion track acceleration signal of the second coarse motion module 820 to the motion control device, sends first position information and second position information to the motion control device, and sends acceleration information of the first mounting frame 831 and the second mounting frame 832 to the motion control device.
The motion control method comprises the following steps:
step S10, the first position feedback unit converts the first position information and the motion trajectory signal into first driving information; the second position feedback unit converts the second position information and the motion track signal into second driving information; the first trajectory acceleration feedforward unit 873 processes the motion trajectory acceleration signal of the first coarse motion module 810 and outputs first correction driving information; a second trajectory acceleration feedforward unit 883 processes the motion trajectory acceleration signal of the second coarse motion module 820 and outputs third correction driving information; the first frame acceleration feedforward unit 875 processes the acceleration information of the first mounting frame 831 and outputs second correction drive information; the second frame acceleration feed-forward unit 885 processes the acceleration information of the second mounting frame 832 and outputs fourth modified drive information.
In step S10, the converting, by the first position feedback unit, the first position information and the motion trajectory signal into the first driving information and the converting, by the second position feedback unit, the second position information and the motion trajectory signal into the second driving information specifically include:
first, the first subtraction module 871 performs subtraction on the first position information and the motion trajectory signal and outputs first deviation information, and the second subtraction module 881 performs subtraction on the second position information and the motion trajectory signal and outputs second deviation information.
Next, the first feedback controller 872 processes the first deviation information and outputs first driving information, and the second feedback controller 882 processes the second deviation information and outputs second driving information.
In step S20, the first addition module 874 performs addition operation on the first driving information, the first correction driving information, and the second correction driving information, and outputs a first motion control signal; the second addition module 884 adds the second driving information, the third modified driving information and the fourth modified driving information, and outputs a second motion control signal.
In step S30, the first coarse motion module 810 is controlled by a first motion control signal, and the second coarse motion module 820 is controlled by a second motion control signal.
The above description is only for the purpose of describing the preferred embodiments of the present invention, and is not intended to limit the scope of the present invention, and any variations and modifications made by those skilled in the art based on the above disclosure are within the scope of the appended claims.

Claims (9)

1. A motion control device for controlling a first coarse motion module and a second coarse motion module to move synchronously, and enabling the position and motion track signal of the first coarse motion module and the second coarse motion module to meet preset requirements, wherein the first coarse motion module and the second coarse motion module are respectively arranged on a first installation frame and a second installation frame, the motion control device comprises:
the first position feedback unit is used for performing feedback control for enabling the position of the first coarse movement module and the motion track signal to meet preset requirements;
a first trajectory acceleration feedforward unit configured to perform feedforward control for compensating for a delay of position control of the first coarse movement module;
a first frame acceleration feedforward unit for performing feedforward control that compensates for a disturbance of vibration of the first mounting frame to position control of the first coarse movement module;
the first addition operation module is used for superposing the information output by the first position feedback unit, the first track acceleration feedforward unit and the first frame acceleration feedforward unit and outputting a signal for controlling the motion of the first coarse motion module;
the second position feedback unit is used for performing feedback control for enabling the position of the second coarse movement module and the motion track signal to meet preset requirements;
a second trajectory acceleration feedforward unit configured to perform feedforward control for compensating for a delay of position control of the second coarse movement module;
a second frame acceleration feedforward unit for performing feedforward control that compensates for a disturbance of vibration of the second mounting frame to position control of the second coarse movement module; and
the second addition operation module is used for superposing the information output by the second position feedback unit, the second track acceleration feedforward unit and the second frame acceleration feedforward unit and outputting a signal for controlling the motion of the second coarse motion module;
the first position feedback unit comprises a first subtraction module and a first feedback controller, the first subtraction module is used for performing subtraction on a motion track signal and position information of the first coarse movement module and outputting first deviation information, and the first feedback controller is used for processing the first deviation information and outputting first driving information;
the first track acceleration feedforward unit is used for processing a motion track acceleration signal of the first coarse motion module and outputting first correction driving information;
the first frame acceleration feedforward unit is used for processing acceleration information of the first mounting frame and outputting second correction driving information;
the first addition operation module is used for performing addition operation on the first driving information, the first correction driving information and the second correction driving information and outputting a signal for controlling the first coarse movement module to move;
the second position feedback unit comprises a second subtraction module and a second feedback controller, the second subtraction module is used for performing subtraction on the motion track signal and the position information of the second coarse movement module and outputting second deviation information, and the second feedback controller is used for processing the second deviation information and outputting second driving information;
the second track acceleration feedforward unit is used for processing the motion track acceleration signal of the second coarse motion module and outputting third correction driving information;
the second frame acceleration feedforward unit is used for processing acceleration information of the second mounting frame and outputting fourth correction driving information;
and the second addition operation module is used for performing addition operation on the second driving information, the third correction driving information and the fourth correction driving information and outputting a signal for controlling the second coarse movement module to move.
2. The motion control apparatus of claim 1, wherein the first mounting frame and the second mounting frame each have a damper disposed thereon, the first coarse motion module being disposed on the damper on the first mounting frame, and the second coarse motion module being disposed on the damper on the second mounting frame.
3. A motion control method of a motion control device according to claim 1 or 2, wherein the motion control device is configured to control a first coarse motion module and a second coarse motion module to move synchronously, and make the position and motion trajectory signals of the first coarse motion module and the second coarse motion module meet preset requirements, wherein the first coarse motion module and the second coarse motion module are respectively disposed on a first mounting frame and a second mounting frame, and the motion control method comprises:
performing feedback control to enable the position of the first coarse movement module and the motion track signal to meet preset requirements;
performing a feed-forward control that compensates for a delay in position control of the first coarse motion module;
performing feed-forward control that compensates for disturbances of the vibration of the first mounting frame to the position control of the first coarse motion module;
superimposing feedback control that makes the position of the first coarse motion module and the motion trajectory signal meet a preset requirement, feedforward control that compensates for a delay in the position control of the first coarse motion module, and feedforward control output information that compensates for a disturbance of vibration of the first mounting frame in the position control of the first coarse motion module, and outputting a signal for controlling the motion of the first coarse motion module;
performing feedback control to enable the position of the second coarse movement module and the motion track signal to meet preset requirements;
performing a feed-forward control that compensates for a delay of the position control of the second coarse motion module;
performing feed-forward control that compensates for disturbances of the vibration of the second mounting frame to the position control of the second coarse motion module;
and superposing feedback control for enabling the position of the second coarse movement module and the motion track signal to meet preset requirements, compensating information output by the feedforward control for delaying the position control of the second coarse movement module and compensating the feedforward control for the disturbance of the vibration of the second mounting frame on the position control of the second coarse movement module, and outputting a signal for controlling the motion of the second coarse movement module.
4. The motion control method according to claim 3,
the feedback control for enabling the position of the first coarse movement module and the motion track signal to meet the preset requirement comprises the following steps: subtracting the motion track signal and the position information of the first coarse movement module, outputting first deviation information, processing the first deviation information and outputting first driving information;
performing feed-forward control that compensates for the delay in position control of the first coarse motion module includes: subtracting the motion track signal and the position information of the first coarse motion module, outputting first deviation information, processing the first deviation information and outputting first driving information;
performing feed-forward control that compensates for a disturbance of vibration of the first mounting frame to the position control of the first coarse motion module includes processing acceleration information of the first mounting frame and outputting second corrective drive information;
superimposing feedback control that makes the position of the first coarse motion module and the motion trajectory signal satisfy a preset requirement, information output by feedforward control that compensates for a delay in position control of the first coarse motion module and feedforward control that compensates for a disturbance of vibration of the first mounting frame in position control of the first coarse motion module, and outputting a signal for controlling motion of the first coarse motion module includes: adding the first driving information, the first correction driving information and the second correction driving information, and outputting a signal for controlling the first coarse motion module to move;
the feedback control for enabling the position of the second coarse movement module and the motion track signal to meet the preset requirement comprises the following steps: subtracting the motion track signal and the position information of the second coarse motion module, outputting second deviation information, processing the second deviation information and outputting second driving information;
performing feed-forward control that compensates for the delay of the position control of the second coarse motion module includes: processing the motion track acceleration signal of the second coarse motion module and outputting third correction driving information;
performing feed-forward control that compensates for disturbances of the vibration of the second mounting frame to the position control of the second coarse motion module comprises: processing acceleration information of the second mounting frame and outputting fourth correction driving information;
superimposing feedback control that makes the position of the second coarse motion module and the motion trajectory signal satisfy a preset requirement, information output by feedforward control that compensates for a delay in the position control of the second coarse motion module and feedforward control that compensates for a disturbance of vibration of the second mounting frame in the position control of the second coarse motion module, and outputting a signal for controlling the motion of the second coarse motion module includes: and performing addition operation on the second driving information, the third correction driving information and the fourth correction driving information, and outputting a signal for controlling the second coarse motion module to move.
5. The motion control method of claim 3, wherein a damper is provided on the first mounting frame, a damper is provided on the second mounting frame, a first coarse motion module is provided on the damper on the first mounting frame, and a second coarse motion module is provided on the damper on the second mounting frame.
6. A mask stage system comprising the motion control apparatus according to claim 1 or 2.
7. The mask stage system according to claim 6, wherein the mask stage system comprises a mask stage, a first detection module, a second detection module, a first acceleration sensor and a second acceleration sensor, the first coarse movement module and the second coarse movement module are used for driving the mask stage to move, the first detection module is used for detecting position information of the mask stage close to the first coarse movement module and being used as position information of the first coarse movement module, the second detection module is used for detecting position information of the mask stage close to the second coarse movement module and being used as position information of the second coarse movement module, the first acceleration sensor is disposed on the first mounting frame, the first acceleration sensor is used for detecting acceleration information of the first mounting frame and transmitting the acceleration information of the first mounting frame to the motion control device, the second acceleration sensor is arranged on the second mounting frame and used for detecting acceleration information of the second mounting frame and transmitting the acceleration information of the second mounting frame to the motion control device.
8. The mask stage system of claim 6, wherein a damper is disposed on each of the first mounting frame and the second mounting frame, the first coarse movement module is disposed on the damper on the first mounting frame, the second coarse movement module is disposed on the damper on the second mounting frame, and the damper is used in a range of 10 to 50 Hz.
9. A lithography machine comprising a mask table system according to any one of claims 6 to 8.
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