CN110320756A - Motion control device, motion control method, reticle stage system and litho machine - Google Patents

Motion control device, motion control method, reticle stage system and litho machine Download PDF

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Publication number
CN110320756A
CN110320756A CN201810277645.8A CN201810277645A CN110320756A CN 110320756 A CN110320756 A CN 110320756A CN 201810277645 A CN201810277645 A CN 201810277645A CN 110320756 A CN110320756 A CN 110320756A
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China
Prior art keywords
motion
motion module
module
control
acceleration
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CN201810277645.8A
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CN110320756B (en
Inventor
卢彧文
陈超
廖飞红
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Shanghai Micro Electronics Equipment Co Ltd
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Shanghai Micro Electronics Equipment Co Ltd
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Priority to CN201810277645.8A priority Critical patent/CN110320756B/en
Priority to PCT/CN2019/080184 priority patent/WO2019184992A1/en
Priority to TW108111289A priority patent/TWI704426B/en
Publication of CN110320756A publication Critical patent/CN110320756A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/20—Exposure; Apparatus therefor
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70758—Drive means, e.g. actuators, motors for long- or short-stroke modules or fine or coarse driving
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70691—Handling of masks or workpieces
    • G03F7/70775—Position control, e.g. interferometers or encoders for determining the stage position
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D3/00—Control of position or direction
    • G05D3/12—Control of position or direction using feedback

Abstract

The present invention provides a kind of motion control device, motion control method, reticle stage system and litho machine, for controlling the first motion module and the second motion module synchronizing moving, and the position of first motion module and second motion module and motion profile signal is made to meet preset requirement, wherein, first motion module and second motion module are separately positioned on the first installation frame and the second installation frame, including first position feedback unit, first path acceleration feed forward element, first frame feed forward of acceleration unit, first add operation module, second position feedback unit, second path acceleration feed forward element, second frame feed forward of acceleration unit, second add operation module.The present invention can improve the kinematic accuracy of the first motion module and the second motion module, can reduce first motion module and second motion module due to move it is asynchronous caused by interfere with each other, and then improve motion control device control precision.

Description

Motion control device, motion control method, reticle stage system and litho machine
Technical field
The present invention relates to technical field of lithography, in particular to a kind of motion control device, motion control method, mask platform system System and litho machine.
Background technique
The production equipment of large-scale semiconductive integrated circuit requires the vibration interference of many important components as small as possible, so that Important component is in quiet environment, as litho machine requires the vibration interference of workpiece table system and reticle stage system will be as far as possible It is small.The mask platform of litho machine generally comprises micropositioner and coarse motion platform, and micropositioner completes the Precision trimming of mask, and coarse motion platform is completed The big stroke scan exposure of mask moves.
With the rapid development of FPD industry, substrate size is being continuously increased, via original G1 (substrate size 300*400) G10 (substrate size 2850*3150) till now, the demand of exposure field size also increase with it.In IC The single-lens litho machine of field application has been difficult to meet the needs of current exposure field constantly increases, and proposes one kind in the industry thus Splice the litho machine of camera lens to solve the problems, such as that visual field constantly increases.For splicing the big visual field litho machine of camera lens, the mask of use Version size also increases with it, for example G6 or more is using the mask of 850*1200mm and 850*1400mm or even larger sized Mask.Therefore, the frame structure and quality for supporting mask plate also increase with it, and support the frame structure and quality of mask plate Increase will necessarily bring reticle stage system vibration increase, the frame structure and quality of litho machine can also increase at the same time Greatly, the vibration for also resulting in litho machine increases, therefore the requirement to the vibration control of reticle stage system and litho machine also accordingly mentions Height influences the precision of reticle stage system and the precision of litho machine to avoid vibration.In addition, with IC and plate display industry Continuous development, the requirement of reticle stage system and litho machine vibration control is also being continuously improved.
Therefore, it is badly in need of improving reticle stage system and litho machine, to reduce vibration to reticle stage system and litho machine Precision influence.
Summary of the invention
The purpose of the present invention is to provide a kind of motion control device, motion control method, reticle stage system and litho machine, To improve the problem of vibrating the precision for influencing reticle stage system and litho machine.
In order to solve the above technical problems, the present invention provides a kind of motion control device, for control the first motion module and Second motion module synchronizing moving, and believe the position of first motion module and second motion module and motion profile Number meet preset requirement, wherein first motion module and second motion module are separately positioned on the first installation frame On the second installation frame, the motion control device includes: first position feedback unit, makes first movement for carrying out The position of module and the motion profile signal meet the feedback control of preset requirement；First path acceleration feed forward element is used In the feedforward control of the delay for the position control for compensating first motion module；First frame feed forward of acceleration unit, For compensating the feedforward control of the disturbance of the vibration of first installation frame to the position control of first motion module System；First add operation module, for be superimposed the first position feedback unit, the first path acceleration feed forward element and The information of the first frame feed forward of acceleration unit output, and export the letter for controlling the first motion module movement Number；Second position feedback unit, position and the motion profile signal for carrying out making second motion module meet pre- If it is required that feedback control；Second path acceleration feed forward element, the position for compensating second motion module are controlled The feedforward control of the delay of system；Second frame feed forward of acceleration unit, for compensating the vibration of second installation frame To the feedforward control of the disturbance of the position control of the described second thick motion module；And the second add operation module, for being superimposed The second position feedback unit, the second path acceleration feed forward element and the second frame feed forward of acceleration unit are defeated Information out, and export the signal for controlling the second motion module movement.
Optionally, the first position feedback unit includes the first subtraction module and the first feedback controller, described First subtraction module subtracts operation for doing the location information of motion profile signal and first motion module, and exports First deviation information, first feedback controller is for handling first deviation information and exporting the first activation bit；Institute The first path acceleration feed forward element is stated for handling the motion profile acceleration signal of first motion module and exporting the One amendment activation bit；The first frame feed forward of acceleration unit is used to handle the acceleration information of first installation frame And export the second amendment activation bit；The first add operation module is used to drive first activation bit, the first amendment Dynamic information and the second amendment activation bit do and add operation, and export the signal for controlling the first motion module movement；Described Two position feedback units include the second subtraction module and the second feedback controller, and the second subtraction module is used for will Motion profile signal and the location information of second motion module do and subtract operation, and export the second deviation information, and described second Feedback controller is for handling second deviation information and exporting the second activation bit；The second path acceleration feedforward is single Member is for handling the motion profile acceleration signal of second motion module and exporting third amendment activation bit；Described second Frame feed forward of acceleration unit is used to handle the acceleration information of second installation frame and exports the 4th amendment activation bit； The second add operation module is used for second activation bit, third amendment activation bit and the 4th amendment activation bit It does and adds operation, and export the signal for controlling the second motion module movement.
Optionally, damper, first fortune are provided on first installation frame and second installation frame Dynamic model block is arranged on the damper, and second motion module is arranged on the damper.
The invention of this hair also provides a kind of motion control method of above-mentioned motion control device, and the motion control device is used for The first motion module and the second motion module synchronizing moving are controlled, and makes first motion module and second motion module Position and motion profile signal meet preset requirement, wherein first motion module and second motion module difference It is arranged on the first installation frame and the second installation frame, the motion control method includes: to carry out making the first movement mould The position of block and the motion profile signal meet the feedback control of preset requirement；It compensates to first motion module The feedforward control of the delay of position control；Compensate position of the vibration to first motion module of first installation frame Set the feedforward control of the disturbance of control；It is default that superposition meets the position of first motion module and the motion profile signal It is required that feedback control, compensate the feedforward control and compensation described the of the delay to the position control of first motion module The information that the vibration of one installation frame exports the feedforward control of the disturbance of the position control of first motion module, and export For controlling the signal of the first motion module movement；Carry out the position for making second motion module and the motion profile Signal meets the feedback control of preset requirement；Compensate the feedforward control of the delay of the position control of second motion module System；Compensate the feedforward control of the disturbance of the vibration of second installation frame to the position control of the described second thick motion module System；Superposition makes the position of second motion module and the motion profile signal meet the feedback control of preset requirement, compensates The vibration pair of feedforward control and compensation second installation frame to the delay of the position control of second motion module The information of the feedforward control output of the disturbance of the position control of second motion module, and export for controlling second fortune The signal of dynamic block motion.
Optionally, it carries out that the position of first motion module is made to meet the anti-of preset requirement with the motion profile signal Feedback control includes: to do the location information of motion profile signal and first motion module to subtract operation and export the first deviation letter Breath handles first deviation information and exports the first activation bit；Compensate the position control to first motion module The feedforward control of the delay of system include: the location information of motion profile signal and first motion module is done to subtract operation, and Export the first deviation information, and processing first deviation information and the first activation bit of output；Compensate described first The vibration of installation frame includes handling first peace to the feedforward control of the disturbance of the position control of first motion module Frame up frame acceleration information and export second amendment activation bit；Superposition makes the position of first motion module and the fortune Dynamic trajectory signal meets the feedback control of preset requirement, compensates the feedforward of the delay to the position control of first motion module Control and compensate the feedforward control of the disturbance of the vibration of first installation frame to the position control of first motion module The signal made the information of output, and export for controlling first motion module movement include: by first activation bit, First amendment activation bit and the second amendment activation bit do and add operation, and export the letter for controlling the first motion module movement Number；The feedback control for carrying out that the position of second motion module is made to meet preset requirement with the motion profile signal includes: The location information of motion profile signal and second motion module is done and subtracts operation, and exports the second deviation information, handles institute It states the second deviation information and exports the second activation bit；Before the delay for compensating the position control of second motion module Feedback control includes: to handle the motion profile acceleration signal of second motion module and export third amendment activation bit；Into Feedforward control packet of the vibration of row compensation second installation frame to the disturbance of the position control of the described second thick motion module Include: the acceleration information of processing second installation frame simultaneously exports the 4th amendment activation bit；Superposition makes second movement The position of module and the motion profile signal meet the feedback control of preset requirement, compensate the position to second motion module It sets the feedforward control of the delay of control and compensates position of the vibration to second motion module of second installation frame The information of the feedforward control output of the disturbance of control, and the signal exported for controlling the second motion module movement includes: By second activation bit, third amendment activation bit and the 4th amendment activation bit is done plus operation, and exports described in control The signal of second motion module movement.
Optionally, damper is set on first installation frame, damper is set on second installation frame, The first motion module is set on the damper on first installation frame, on the damper on second installation frame Second motion module is set.
The present invention also provides a kind of reticle stage systems, including above-mentioned motion control device.
Optionally, the reticle stage system includes mask platform, first detection module, the second detection module, the first acceleration Sensor and the second acceleration transducer, first motion module and second motion module are for driving the mask platform Movement, the first detection module is for detecting location information and conduct of the mask platform at first motion module The location information of first motion module, second detection module is for detecting the mask platform close to second motion module The location information at place and location information as the second motion module, the first acceleration transducer setting is in first peace It frames up on frame, first acceleration transducer is used to detect the acceleration information of first installation frame, and by described the The acceleration information of one installation frame passes to motion control device, and the second acceleration transducer setting is in second peace It frames up on frame, second acceleration transducer is used to detect the acceleration information of second installation frame, and by described the The acceleration information of two installation frames passes to motion control device.
Optionally, the use scope of the damper is 10~50Hz.
The present invention also provides a kind of litho machines, including above-mentioned reticle stage system.
A kind of motion control device, motion control method, reticle stage system and litho machine provided by the invention have following The utility model has the advantages that
Motion control device makes the position of first motion module and the fortune by using first position feedback unit Dynamic trajectory signal meets preset requirement, and the position of first motion module is compensated using the first path acceleration feed forward element The delay of control is set, and uses the vibration of the first installation frame described in the first frame feed forward of acceleration unit compensation to institute State the disturbance of the position control of the first sports platform, and using the first add operation module be superimposed the first position feedback unit, The information of the first path acceleration feed forward element and the first frame feed forward of acceleration unit output, and export for controlling The signal of the first motion module movement is made, therefore, the motion control device is in the movement to first motion module While carrying out feedback control and carry out position feed-forward compensation, the vibration of first installation frame can be also reduced to described the The interference of the movement of one motion module, to can further improve the kinematic accuracy of first motion module.
The motion control device passes through second position feedback unit, the second path acceleration feed forward element, the second frame Feed forward of acceleration unit and the second add operation module control the movement of the second motion module, and similarly the motion control device exists While carrying out feedback control to the movement of second motion module and carry out position feed-forward compensation, described the can be also reduced Interference of the vibration of two installation frames to the movement of second motion module, so as to further improve the second movement mould The kinematic accuracy of block.
Simultaneously as the kinematic accuracy of first motion module and second motion module can improve, and adopt With identical motion profile signal, the motion profile of the motion profile acceleration signal of the first motion module and the second motion module Acceleration signal controls first motion module and second motion module movement, therefore the motion control device is controllable It makes first motion module and second motion module moves synchronously, and first motion module and second movement The kinematic accuracy of module improves, therefore can be further reduced first motion module and second motion module due to movement It is interfered with each other caused by asynchronous, and then improves the movement essence of first motion module and the second motion module entirety Degree, can improve the control precision of the motion control device.
Detailed description of the invention
Fig. 1 is a kind of main view of reticle stage system；
Fig. 2 is a kind of left view of reticle stage system；
Fig. 3 is a kind of control block diagram of reticle stage system；
Fig. 4 is the main view of the reticle stage system in the embodiment of the present invention one；
Fig. 5 is the left view of the reticle stage system in the embodiment of the present invention one；
Fig. 6 is the control block diagram for the motion control device being applied in reticle stage system in the embodiment of the present invention one；
Fig. 7 is the main view of the reticle stage system in the embodiment of the present invention two；
Fig. 8 is the ground excited data schematic diagram of reticle stage system shown in Fig. 1-2；
Fig. 9 is that the response at the mask platform focus in reticle stage system shown in Fig. 1-2 is bent；
Figure 10 is the response curve at the mask platform focus in the reticle stage system in the embodiment of the present invention two.
The description of symbols of reticle stage system in Fig. 1-Fig. 3:
100- the first coarse motion module；101- coarse motion guide rail；102- coarse motion platform；
200- the second coarse motion module；201- coarse motion guide rail；202- coarse motion platform；
300- fine motion module；
The first installation frame of 401-；The second installation frame of 402-；403- ground；
500- mask platform；
The first feedforward controller of 601-；The first feedback controller of 602-；The second feedforward controller of 603-；604- second is fed back Controller；The first arithmetic element of 605-；The second arithmetic element of 606-；607- third arithmetic element；The 4th arithmetic element of 608-； The 5th arithmetic element of 609-；The 6th arithmetic element of 610-；The 7th arithmetic element of 611-；The 8th arithmetic element of 612-；613- first Electric current loop；The second electric current loop of 614-；
701- first detection module；The second detection module of 702-.
The description of symbols of reticle stage system in Fig. 4-Fig. 7, Figure 10:
810- the first coarse motion module；811- coarse motion guide rail；812- coarse motion platform；
820- the second coarse motion module；821- coarse motion guide rail；822- coarse motion platform；
The first installation frame of 831-, the second installation frame of 832-；834- ground
840- mask platform；
851- first detection module；The second detection module of 852-；
The first acceleration transducer of 861-；The second acceleration transducer of 862-；
871- the first subtraction module；The first feedback controller of 872-；873- the first path acceleration feed forward element； 874- the first add operation module；875- the first frame feed forward of acceleration unit；The first electric current loop of 876-；
881- the second subtraction module；The second feedback controller of 882-；883- the second path acceleration feed forward element； 884- the second add operation module；885- the second frame feed forward of acceleration unit；The second electric current loop of 886-；
890- damper；
The first curve of A1-；The second curve of A2-.
Specific embodiment
As stated in the background art, the precision of existing reticle stage system is easy to be affected by vibrations, and is based on this applicant Structure and control mode to existing reticle stage system have carried out detailed analysis.
Fig. 1 is a kind of main view of reticle stage system, and Fig. 2 is a kind of left view of reticle stage system, with reference to Fig. 1 and Fig. 2, The reticle stage system include the first coarse motion module 100, the second coarse motion module 200, fine motion module 300, mask platform installation frame, Mask platform 500, motion control device and position detecting device.The first coarse motion module 100, the second coarse motion module 200, fine motion Module 300, mask platform installation frame, mask platform 500, motion control device and position detecting device form one and cover to described The closed-loop control system that the position of die station 500 is controlled.
As shown in Figure 1, the mask platform installation frame includes the first installation frame 401 and the second installation frame 402.It is described First installation frame 401 and the second installation frame 402 are separately positioned on ground 403.
The first coarse motion module 100 and the second coarse motion module 200 are separately positioned on first installation frame 401 On the second installation frame 402.The fine motion module 300 is arranged in the first coarse motion module 100 and the second coarse motion mould On block 200.The mask platform 500 is arranged in the fine motion module 300.The first coarse motion module 100 and described second is slightly Dynamic model block 200 is for driving the fine motion module 300 and the mask platform 500 being arranged in fine motion module 300 to move.It is described micro- Dynamic model block 300 is for driving the mask platform 500 to move.
The first coarse motion module 100 and the second coarse motion module 200 include being arranged on the mask platform installation frame Coarse motion guide rail 101,201, it is described along the mobile coarse motion platform 102,202 of the coarse motion guide rail 101,201 and for driving The driver mobile along the coarse motion guide rail 101,201 of coarse motion platform 102,202.The fine motion module 300 includes being respectively set Fine motion guide rail on two coarse motion platforms 102, and the mask platform 500 moved along two fine motion guide rails.
With reference to Fig. 2, the first coarse motion module 100, the second coarse motion module 200 and fine motion module 300 drive the mask Platform 500 is moved along Y-axis.Below for sake of convenience, the coarse motion platform 102 of the first coarse motion module 100 is referred to as the first coarse motion platform 102, the driver of the first coarse motion module 100 is referred to as the first driver, the coarse motion platform 102 of the second coarse motion module 200 is claimed Be the second coarse motion platform 102, the driver of the second coarse motion module 200 is referred to as the second driver.
The position detecting device is used to detect the position of the first coarse motion module 100 and the second coarse motion module 200 It moves information and institute's displacement information is fed back into motion control device.Specifically, the position detecting device includes the first detection Module 701 and the second detection module 702, the first detection module 701 are used to detect the first position letter of the first coarse motion platform 102 Breath, second detection module 702 are used to detect the second location information of the second coarse motion platform 102.
Fig. 3 is a kind of control block diagram of reticle stage system, and with reference to Fig. 3, the motion control device includes the first feedforward control Device 601 processed, the first feedback controller 602, the second feedforward controller 603, the second feedback controller 604, the first arithmetic element 605, the second arithmetic element 606, third arithmetic element 607, the 4th arithmetic element 608, the 5th arithmetic element 609, the 6th operation Unit 610, the 7th arithmetic element 611, the 8th arithmetic element 612, the first electric current loop 613 and the second electric current loop 614.The movement Control device controls the first coarse motion platform 102 according to the control instruction that higher level's control system issues and the second coarse motion platform 102 is mobile.Tool Body, the information that higher level's control system is sent to motion control device mainly includes motion profile signal, the first coarse motion module 100 It is thick with the relative rotation signal of the second coarse motion module 200, the acceleration signal of 100 motion profile of the first coarse motion module and second The motion profile acceleration signal of dynamic model block 200.
First arithmetic element 605 is used to first location information and second location information doing crossing operation, and by the One location information and the operation result that subtracts of second location information halve, and export first position processing information.
Second arithmetic element 606 is used to first location information and second location information doing crossing operation, and by the One location information and the operation result that subtracts of second location information halve, and export second position processing information.
The third arithmetic element 607 is used to doing and subtracting operation simultaneously the motion profile signal and first position processing information Export the first deviation information.
4th arithmetic element 608 is used to turn the first coarse motion module 100 and the opposite of the second coarse motion module 200 Angle signal and second position processing information are done and subtract operation and export the second deviation information.
First feedback controller 602 is for handling first deviation information and exporting the first activation bit.
Second feedback controller 604 is for handling second deviation information and exporting the second activation bit.
First feedforward controller 601 is for handling the 100 motion profile acceleration signal of the first coarse motion module simultaneously Output the first amendment activation bit.
Second feedforward controller 603 is for handling the 200 motion profile acceleration signal of the second coarse motion module simultaneously Output the second amendment activation bit.
5th arithmetic element 609 is used for first activation bit and the first amendment activation bit is done plus operation, And export the first motion control signal.
6th arithmetic element 610 is used for second activation bit and the second amendment activation bit is done plus operation, And export the second motion control signal.
7th arithmetic element 611 is for doing and intersecting first motion control signal and the second motion control signal Operation, and export the first cross-drive signal.
8th arithmetic element 612 is for doing and intersecting first motion control signal and the second motion control signal Operation, and export the second cross-drive signal.
Output is to the first driver after the processing of the first electric current loop 613 for the first cross-drive signal, and described first The first coarse motion of driver control platform 102 is mobile.The second cross-drive signal is exported after the processing of the second electric current loop 614 and is given Second driver, the second coarse motion of the second driver control platform 102 are mobile.
With reference to Fig. 3, Fig. 1 and a kind of reticle stage system shown in Fig. 2 are using dual crossing Strategy For Synchronization Control.It is described to cover It with the first coarse motion platform 102 is driving shaft in die station system, the second coarse motion platform 102 follows the first coarse motion platform 102 to move, the second coarse motion Platform 102 is servo axis.The reticle stage system passes through the difference of first location information and second location information after cross processing Deviation control is carried out to the first coarse motion module 100 and the second coarse motion module 200, realizes the first coarse motion platform 102 and the second coarse motion The position cross-over control of platform 102.By the first motion control signal after cross processing and the second motion control signal respectively to One coarse motion module 100 and the second coarse motion module 200 carry out implementation compensation, so that the first coarse motion platform 102 and the second coarse motion platform 102 go out Power is relatively uniform, realizes the cross-over control of the power of the first coarse motion platform 102 and the second coarse motion platform 102.Wherein, the first coarse motion platform 102 and second coarse motion platform 102 the smaller synchronous control accuracy of relative rotation signal it is higher, therefore can be by the first coarse motion mould Block 100 and the relative rotation signal of the second coarse motion module 200 are zero, that is, it is expected the first coarse motion module 100 and the second coarse motion module 200 is fully synchronized.
It is found after applicant's research, the precision for influencing aforementioned mask platform system is mainly low-frequency vibration.According to low-frequency vibration Source, a low-frequency vibration to come for 403 indirect transfer of ground；Two be the first coarse motion module 100 of aforementioned mask platform system And second the interfering with each other between coarse motion module 200.
Specifically, can have the vibration of ground 403 and 500 equal part of work stage and mask platform in the operational process of litho machine System acceleration of motion with higher and movement velocity, the reaction force that moving component generates during the motion, Yi Jiqing Covering torque will cause litho machine core to vibrate.The first coarse motion module 100 and the second coarse motion module 200 in mask platform 500 It is connect by mask platform installation frame with ground 403, the various disturbances in litho machine will directly be passed by mask platform installation frame Pass mask platform 500.
Interfering with each other between the first coarse motion module 100 and the second coarse motion module 200 is mainly reflected in:
1) after, motion control device receives motion profile signal and controls the movement of the first coarse motion module 100, motion control dress Set the deviation of the position of the position for needing to calculate the second coarse motion module 200 and the first coarse motion module 100, and using the deviation as The control of second coarse motion module 200 inputs, and the control input of the second coarse motion module 200 always lags behind motion profile signal, the There is delay between one coarse motion module 100 and the second coarse motion module 200, so as to cause the first coarse motion module 100 and the second coarse motion Movement between module 200 interferes with each other.
2), testing result shows that the second coarse motion module 200 can not follow the first coarse motion module 100 to move in time, and first is thick Dynamic model block 100 and 200 synchronous error of the second coarse motion module are larger, thus the first coarse motion module 100 and the second coarse motion module 200 it Between exist interfere with each other.
3), the first location information and second location information of the first coarse motion module 100 and the second coarse motion module 200 pass through friendship The mode of fork is transmitted in the control loop of other side, produces direct disturbance, causes synchronous error larger, therefore the first coarse motion Exist between module 100 and the second coarse motion module 200 and interferes with each other.
Applicant proposed a kind of motion control device, motion control method, reticle stage system and light based on above-mentioned analysis Quarter machine, the first coarse motion module and the second coarse motion module of the reticle stage system be with the displacement error of itself and mask platform respectively Control object guarantees the net synchronization capability between this three, and evades the first coarse motion module and second in existing intersection synchronization policy Direct crosstalk between coarse motion module.
The embodiment of the present invention is proposed below in conjunction with the drawings and specific embodiments motion control device, motion control side Method, reticle stage system and litho machine are described in further detail.According to following explanation and claims, advantages of the present invention and Feature will become apparent from.It should be noted that attached drawing is all made of very simplified form and using non-accurate ratio, only to side Just, the purpose of the embodiment of the present invention is lucidly aided in illustrating.
Embodiment one
The present embodiment provides a kind of reticle stage systems, applied to the motion control device and litho machine in reticle stage system.
It is the main view of the reticle stage system in the embodiment of the present invention one with reference to Fig. 4 and Fig. 5, Fig. 4, Fig. 5 is of the invention real The left view of the reticle stage system in example one is applied, the reticle stage system includes the first coarse motion module 810, the second coarse motion module 820, mask platform installation frame, mask platform 840, motion control device, position detecting device, the first acceleration transducer and second Acceleration transducer.
The mask platform installation frame includes the first installation frame 831 and the second installation frame 832.First installing frame Frame 831 and the second installation frame 832 are separately positioned on ground 834.
The first coarse motion module 810 and the second coarse motion module 820 are separately positioned on first installation frame 831 On the second installation frame 832.The first coarse motion module 810 and the second coarse motion module 820 are for driving the mask Platform 840 moves.The first coarse motion module 810 and the second coarse motion module 820 include being arranged in the mask platform installation frame On coarse motion guide rail 811,821, along the mobile coarse motion platform 812 of the coarse motion guide rail 811,821,822, and for driving State the driver mobile along the coarse motion guide rail 811,821 of coarse motion platform 812,822.With reference to Fig. 5, the first coarse motion module 810 and second coarse motion module 820 moved along Y-axis.Below for sake of convenience, the coarse motion platform 812 of the first coarse motion module 810 is claimed Be the first coarse motion platform, the driver of the first coarse motion module 810 is referred to as the first driver, by the second coarse motion module 820 Coarse motion platform 822 is referred to as the second coarse motion platform, and the driver of the second coarse motion module 820 is referred to as the second driver.
The position detecting device is used to detect the displacement information of the mask platform 840 and feeds back to institute's displacement information Motion control device.Specifically, the position detecting device includes first detection module and the second detection module, first inspection It surveys module and is used for detecting location information of the mask platform 840 at the first coarse motion platform, second detection module In detecting the mask platform 840 close to the location information of the second coarse motion platform, the position of the first detection module detection is believed Breath is first location information, and the location information of the second detection module detection is second location information.Described in the present embodiment First detection module and the second detection module can be interferometer.
First acceleration transducer and the second acceleration transducer.First acceleration transducer is arranged described first On installation frame 831, second acceleration transducer is arranged on second installation frame 832.First acceleration Sensor is used to detect the acceleration information of first installation frame 831, and by the acceleration information of the first installation frame 831 Pass to the first motion control unit.Second acceleration transducer is used to detect the acceleration of second installation frame 832 Information is spent, and the acceleration information of the second installation frame 832 is passed into the second motion control unit.
Fig. 6 is the control block diagram for the motion control device being applied in reticle stage system in the embodiment of the present invention one, described Motion control device includes first be independently controlled to the first coarse motion module 810 and the second coarse motion module 820 Motion control unit and the second motion control unit.The motion control device refers to according to the control that higher level's control system issues It enables, the first location information and second location information of position detecting device detection and first installation frame 831 The acceleration information of acceleration information and second installation frame 832 controls the first coarse motion platform and the second coarse motion platform is mobile.Tool Body, the information that higher level's control system is sent to motion control device mainly includes motion profile signal, the first coarse motion module 810 Motion profile acceleration signal and the second coarse motion module 820 motion profile acceleration signal.The motion profile signal It is sent to first motion control unit and second motion control unit simultaneously.The fortune of the first coarse motion module 810 Dynamic rail mark acceleration signal is sent to first motion control unit, and the motion profile of the second coarse motion module 820 accelerates Degree signal is sent to second motion control unit, wherein the motion profile acceleration signal of the first coarse motion module 810 It is identical with the motion profile acceleration signal of the second coarse motion module 820.The first location information is sent to the first movement Control unit.The second location information is sent to the second motion control unit.The acceleration of first installation frame 831 is believed Breath is sent to the first motion control unit, and the acceleration information of second installation frame 832 is sent to the second motion control list Member.
With reference to Fig. 6, first motion control unit includes first position feedback unit, the first path acceleration feedforward list First 873, first add operation module 874 and the first frame feed forward of acceleration unit 875.
The first position feedback unit be used for make the first coarse motion module 810 the first coarse motion platform position with The motion profile signal meets the feedback control of preset requirement.Such as make the position of the first coarse motion platform and the fortune as far as possible Dynamic trajectory signal is consistent.Specifically, the first position feedback unit includes the first subtraction module 871 and the first feedback Controller 872.The first subtraction module 871 subtracts operation for doing first location information and motion profile signal, and Export the first deviation information.First feedback controller 872 is for handling first deviation information and exporting the first driving Information.First feedback controller 872 is preferably pid control module.
The first path acceleration feed forward element 873 is used to compensate prolonging for the position control of the first coarse motion platform Slow feedforward control.Specifically, the first path acceleration feed forward element 873 is for handling the first coarse motion module 810 Motion profile acceleration signal and export first amendment activation bit.
The first frame feed forward of acceleration unit 875 is used to compensate the vibration pair of first installation frame 831 The feedforward control of the disturbance of the position control of the first coarse motion platform.Specifically, the first frame feed forward of acceleration unit 875 For handling the acceleration information of first installation frame 831 and exporting the second amendment activation bit.
The first add operation module 874 is for being superimposed the first position feedback unit, first track acceleration The information of feed forward element 873 and the first frame feed forward of acceleration unit 875 output is spent, and is exported for controlling described first The first motion control signal that coarse motion module 810 moves.Specifically, the first add operation module 874 is used for described the One activation bit, the first amendment activation bit and the second amendment activation bit do and add operation, and export the first motion control signal. First motion control signal is moved for controlling the first coarse motion module 810.
Second motion control unit includes second position feedback unit, the second path acceleration feed forward element 883, Two add operation modules 884 and the second frame feed forward of acceleration unit 885.
The second position feedback unit be used for make the second coarse motion module 820 the second coarse motion platform position with The motion profile signal meets the feedback control of preset requirement.Such as make the position of the second coarse motion platform and the fortune as far as possible Dynamic trajectory signal is consistent.Specifically, the second position feedback unit includes the second subtraction module 881 and the second feedback Controller 882.The second subtraction module 881 subtracts operation for doing second location information and motion profile signal, and Export the second deviation information.Second feedback controller 882 is for handling second deviation information and exporting the second driving Information.Second feedback controller 882 is preferably pid control module.
The second path acceleration feed forward element 883 is for compensating the second position feedback unit to described the The feedforward control of the delay of the position control of two coarse motion platforms 812,822.Specifically, the second path acceleration feed forward element 883 for handling the motion profile acceleration signal of the third coarse motion module and exporting third amendment activation bit.
The second frame feed forward of acceleration unit 885 is used to compensate the vibration pair of second installation frame 832 The feedforward control of the disturbance of the position control of the second coarse motion platform.Specifically, the second frame feed forward of acceleration unit 885 For handling the acceleration information of second installation frame 832 and exporting the 4th amendment activation bit.
The second add operation module 884 is for being superimposed the second position feedback unit, second track acceleration The information of feed forward element 883 and the second frame feed forward of acceleration unit 885 output is spent, and is exported for controlling described second The second motion control signal that coarse motion module 820 moves.Specifically, the second add operation module 884 is used for described the Two activation bits, third amendment activation bit and the 4th amendment activation bit do and add operation, and export the second motion control signal. Second motion control signal is moved for controlling the second coarse motion module 820.
First motion control unit preferably includes the first electric current loop 876, and first electric current loop 876 is for handling the One activation bit, and the first activation bit controls the movement of the first coarse motion module 810 using treated.
Second motion control unit preferably includes the second electric current loop 886, and second electric current loop 886 is for handling the One activation bit, and the second activation bit controls the movement of the second coarse motion module 820 using treated.
In the present embodiment, the course of work of the reticle stage system is as follows:
Firstly, higher level's control system sends the motion profile acceleration signal of motion profile signal, the first coarse motion module 810 And second coarse motion module 820 motion profile acceleration signal to motion control device, position detecting device sends first Confidence breath and second location information are to motion control device, the first acceleration transducer 861 and the second acceleration transducer 862 hair Send the acceleration information of the first installation frame 831 and the second installation frame 832 to motion control device.
Secondly, the first subtraction module 871 in first position feedback unit in motion control device is by first Confidence breath and motion profile signal do and subtract operation, and export the first deviation information, are handled later by the first feedback controller 872 First deviation information simultaneously exports the first activation bit；Second in the feedback unit of the second position in motion control device subtracts Method computing module 881, which does second location information and motion profile signal, subtracts operation, and exports the second deviation information, passes through later Second feedback controller 882 handles second deviation information and exports the second activation bit.
Meanwhile the first path acceleration feed forward element 873 in motion control device handles the first coarse motion module 810 Motion profile acceleration signal and export first amendment activation bit；The second path acceleration feedforward in motion control device Unit 883 handles the motion profile acceleration signal of the second coarse motion module 820 and exports third amendment activation bit.
Meanwhile the first frame feed forward of acceleration unit 875 in motion control device handles adding for the first installation frame 831 Velocity information simultaneously exports the second amendment activation bit；The second frame feed forward of acceleration unit 885 processing in motion control device The acceleration information of second installation frame 832 simultaneously exports the 4th amendment activation bit.
Later, the first add operation module 874 corrects first activation bit, the first amendment activation bit and second Activation bit is done plus operation, and exports the first motion control signal；Second add operation module 884 believes second driving Breath, third amendment activation bit and the 4th amendment activation bit do and add operation, and export the second motion control signal.
Then, the first coarse motion module 810 is controlled by the first motion control signal to move, pass through the second motion control Signal controls the second coarse motion module 820 and moves.
In the present embodiment, the motion control device of the reticle stage system passes through first motion control unit control the The movement of one coarse motion module 810, and use first position feedback unit makes the position of the first coarse motion platform of the first coarse motion module 810 It sets and meets preset requirement with the motion profile signal, compensate described using the first path acceleration feed forward element 873 Delay of the one position feedback unit to the position control of the first coarse motion platform, and use the first frame feed forward of acceleration Unit 875 compensates the disturbance of the vibration of first installation frame 831 to the position control of the first coarse motion platform, and using the One add operation module 874 is superimposed the first position feedback unit, the first path acceleration feed forward element 873 and described The information of first frame feed forward of acceleration unit 875 output, and the signal for controlling the first motion module movement is exported, Therefore, the motion control device of the reticle stage system to the first coarse motion module 810 movement carry out feedback control with And while carrying out position feed-forward compensation, the vibration of first installation frame 831 can be also reduced to the first coarse motion module The interference of 810 movement, so as to further improve the kinematic accuracy of the first coarse motion module 810；The reticle stage system Motion control device by second motion control unit control the second coarse motion module 820 movement, and use the second position Feedback unit makes the position of the second coarse motion platform of the second coarse motion module 820 meet default want with the motion profile signal It asks, the second position feedback unit is compensated to the second coarse motion platform using the second path acceleration feed forward element 883 Position control delay, and second installation frame 832 is compensated using the second frame feed forward of acceleration unit 885 Disturbance of the vibration to the position control of the second coarse motion platform, and be superimposed described second using the second add operation module 884 Position feedback unit, the second path acceleration feed forward element 883 and the second frame feed forward of acceleration unit 885 output Information, and export the signal for controlling second motion module movement, therefore, the motion control of the reticle stage system Device may be used also while the movement to the second coarse motion module 820 carries out feedback control and carries out position feed-forward compensation The interference of the movement of the vibration of second installation frame 832 to the second coarse motion module 820 is reduced, so as to further change It is apt to the kinematic accuracy of the second coarse motion module 820；Due to the first coarse motion module 810 and the second coarse motion module 820 Kinematic accuracy can improve, and first motion control unit and second motion control unit are all made of identical fortune Dynamic trajectory signal, the movement of the motion profile acceleration signal of the first coarse motion module 810 and the second coarse motion module 820 Path acceleration signal is identical, and the first location information and the second location information are the difference in the mask platform 840 Location information at position, i.e., described first motion control unit and second motion control unit have identical motion control Instruction and motion profile feed forward of acceleration compensated information, the position feedback information being close, therefore the motion control device can It controls the first coarse motion module 810 and the second coarse motion module 820 moves synchronously, due to the first coarse motion module 810 Improve with the kinematic accuracy of the second coarse motion module 820, therefore the first coarse motion module 810 and described can be further reduced Second coarse motion module 820 due to move it is asynchronous caused by interfere with each other, and then improve the first coarse motion module 810 and described The whole kinematic accuracy of second coarse motion module 820, can improve the control precision of the motion control device, and can be improved and cover The kinematic accuracy of die station system.
Compared to a kind of dual crossing Strategy For Synchronization Control of the motion control device of reticle stage system, covering in the present embodiment The motion control device of die station system controls first by using the first motion control unit and the second motion control unit respectively Coarse motion module 810 and the second coarse motion module 820, can avoid the first coarse motion module 810 and 820 control instruction of the second coarse motion module is defeated Enter the problem asynchronous, control information interferes with each other and synchronous error is larger, and passes through the first frame feed forward of acceleration of setting Unit 875 and the second frame feed forward of acceleration unit 885, effective compensation first installation frame 831 and second peace The frame 832 that frames up vibrates the interference of the movement to the first coarse motion module 810 and the second coarse motion module 820, so as to change It is apt to the control precision of the motion control device, and the kinematic accuracy of reticle stage system can be improved.
The present embodiment also provides a kind of litho machine, and the litho machine includes the reticle stage system in above-described embodiment.
Embodiment two
The present embodiment provides a kind of reticle stage systems.With reference to the reticle stage system that Fig. 7, Fig. 7 are in the embodiment of the present invention two Main view, the difference between this embodiment and the first embodiment lies in, in the present embodiment, the reticle stage system may also include damper 890.In the present embodiment, the coarse motion module is not set up directly on the mask platform installation frame, but the damper 890 are arranged on the mask platform installation frame, and the coarse motion module is arranged on the damper 890.It is transmitted from ground 834 Vibration by by damper 890, then passing to the first coarse motion module 810 and the second coarse motion after mask platform installation frame Module 820.By the way that damper is arranged between mask platform installation frame and the first coarse motion module 810 and the second coarse motion module 820 890 can effectively reduce the vibration that litho machine passes to mask platform 840.
The PSD that applicant has carried out a kind of reticle stage system shown in Fig. 1-2 under ground 834 motivates is emulated, with reference to figure 8, Fig. 8 be the ground excited data schematic diagram of reticle stage system shown in Fig. 1-2, is found after applicant's research, a kind of mask Platform system is due to the influence of the rigidity of structure, and for mask platform 840 there are the multistage low frequency mode between 15~35Hz, 15~35Hz is low Frequency vibration can be such that the dynamic performance of mask platform 840 reduces, and influence the positional stability of mask platform 840.It is taken in mask platform 840 One focus, response results are as shown in figure 9, Fig. 9 is the sound at mask platform focus in reticle stage system shown in Fig. 1-2 Ying Qu can be obtained from response curve, and focus dynamic respond value is mainly by 10~20Hz frequency (Frequency), 30Hz or so frequency Rate and 66Hz or so frequency influence, maximum displacement response value (Cum die) is about 3.6um.
To eliminate influence of the low-frequency vibration to mask platform 840, applicant prepares 890 parameter of damper, damping ratio by 18Hz 0.2, about 3.48 tons of reticle stage system gross mass, the calculation formula of rigidity and damping is as follows:
K=(2 π f)2M
C=2 ξ (2 π fn)M
Wherein, K is rigidity, and M is quality, and C is damping, and ξ is ratio of damping, f and fnThe respectively frequency of damper, then damping 890 global stiffness of device is 44448.75N/mm, and total damping is 157.2N/ (mm/s).
Add the response for paying close attention to position after damper 890 as shown in Figure 10, Figure 10 is the mask in the embodiment of the present invention two The response curve at 840 focus of mask platform in platform system, the response curve after damper is added at focus are the first curve A1, the response curve after not adding damper at focus are the second curve A2, comparison the first curve A1 and the second curve A2 it is found that After adding damper 890, the vibration of 30Hz or so has been completely eliminated, and the vibration of 10~20Hz or so also partially removes, and overall sound 1/3 or less when having been reduced to not add damper 890 should be worth.
In the present embodiment, the use scope of the damper is preferably 10~50Hz.
In the present embodiment, the acceleration transducer is preferably provided at first installation frame 831 and second peace Frame 832 frame up at the damper, so that first acceleration transducer 861 and second acceleration transducer 862 vibrations detected pass to described first closer to first installation frame 831 and second installation frame 832 The vibration of coarse motion module 810 and the second coarse motion module 820, to improve 875 He of the first frame feed forward of acceleration unit Movement of the second frame feed forward of acceleration unit 885 to the first coarse motion module 810 and the second coarse motion module 820 Compensation, and then improve the control precision of the motion control device of 840 control system of mask platform, while improving mask platform system The kinematic accuracy of system.
Embodiment three
The present embodiment provides the motion control sides of the motion control device in the reticle stage system in a kind of above-described embodiment Method.The motion control device sends motion profile signal, the motion profile of the first coarse motion module 810 accelerates before work The motion profile acceleration signal of signal and the second coarse motion module 820 is spent to motion control device, sends first location information With second location information to motion control device, the acceleration information of the first installation frame 831 and the second installation frame 832 is sent To motion control device.
The motion control method includes the following steps:
The first location information and motion profile signal are converted to the first drive by step S10, first position feedback unit Dynamic information；The second location information and motion profile signal are converted to the second activation bit by second position feedback unit；The One path acceleration feed forward element 873 handles the motion profile acceleration signal of the first coarse motion module 810 and exports first Correct activation bit；Second path acceleration feed forward element 883 handles the motion profile acceleration of the second coarse motion module 820 Signal simultaneously exports third amendment activation bit；First frame feed forward of acceleration unit 875 handles the acceleration of the first installation frame 831 It spends information and exports the second amendment activation bit；Second frame feed forward of acceleration unit 885 handles adding for the second installation frame 832 Velocity information simultaneously exports the 4th amendment activation bit.
Wherein, first position feedback unit is converted to the first location information and motion profile signal in step S10 The second location information and motion profile signal are converted to the second drive by the first activation bit and second position feedback unit Dynamic information specifically includes:
Firstly, the first subtraction module 871, which does first location information and motion profile signal, subtracts operation, and export the One deviation information, the second subtraction module 881, which does second location information and motion profile signal, subtracts operation, and exports second Deviation information.
Secondly, the first feedback controller 872 handles first deviation information and exports the first activation bit, the second feedback Controller 882 handles second deviation information and exports the second activation bit.
First activation bit, first are corrected activation bit and second by step S20, the first add operation module 874 Amendment activation bit is done plus operation, and exports the first motion control signal；Second add operation module 884 drives described second Information, third amendment activation bit and the 4th amendment activation bit do and add operation, and export the second motion control signal.
Step S30 controls the first coarse motion module 810 by the first motion control signal and moves, and passes through the second movement It controls signal and controls the movement of the second coarse motion module 820.
Foregoing description is only the description to present pre-ferred embodiments, not to any restriction of the scope of the invention, this hair Any change, the modification that the those of ordinary skill in bright field does according to the disclosure above content, belong to the protection of claims Range.

Claims (10)

1. a kind of motion control device, for controlling the first motion module and the second motion module synchronizing moving, and make described the The position of one motion module and second motion module and motion profile signal meet preset requirement, wherein first fortune Dynamic model block and second motion module are separately positioned on the first installation frame and the second installation frame, which is characterized in that institute Stating motion control device includes:
First position feedback unit, position and the motion profile signal for carrying out making first motion module meet pre- If it is required that feedback control；
First path acceleration feed forward element, the feedforward of the delay of the position control for compensating first motion module Control；
First frame feed forward of acceleration unit, for compensating the vibration of first installation frame to the first movement mould The feedforward control of the disturbance of the position control of block；
First add operation module, for being superimposed the first position feedback unit, the first path acceleration feed forward element The information exported with the first frame feed forward of acceleration unit, and export the letter for controlling the first motion module movement Number；
Second position feedback unit, position and the motion profile signal for carrying out making second motion module meet pre- If it is required that feedback control；
Second path acceleration feed forward element, the feedforward of the delay of the position control for compensating second motion module Control；
Second frame feed forward of acceleration unit, for compensating the vibration of second installation frame to the described second thick movement The feedforward control of the disturbance of the position control of module；And
Second add operation module, for being superimposed the second position feedback unit, the second path acceleration feed forward element The information exported with the second frame feed forward of acceleration unit, and export the letter for controlling the second motion module movement Number.
2. motion control device as described in claim 1, which is characterized in that
The first position feedback unit includes the first subtraction module and the first feedback controller, first subtraction Module subtracts operation for doing the location information of motion profile signal and first motion module, and exports the first deviation letter Breath, first feedback controller is for handling first deviation information and exporting the first activation bit；
The first path acceleration feed forward element is used to handle the motion profile acceleration signal of first motion module simultaneously Output the first amendment activation bit；
The first frame feed forward of acceleration unit is used to handle the acceleration information of first installation frame and exports second Correct activation bit；
The first add operation module is used to drive first activation bit, the first amendment activation bit and the second amendment Information is done plus operation, and exports the signal for controlling the first motion module movement；
The second position feedback unit includes the second subtraction module and the second feedback controller, second subtraction Module subtracts operation for doing the location information of motion profile signal and second motion module, and exports the second deviation letter Breath, second feedback controller is for handling second deviation information and exporting the second activation bit；
The second path acceleration feed forward element is used to handle the motion profile acceleration signal of second motion module simultaneously It exports third and corrects activation bit；
The second frame feed forward of acceleration unit is used to handle the acceleration information of second installation frame and exports the 4th Correct activation bit；
The second add operation module is used to drive second activation bit, third amendment activation bit and the 4th amendment Information is done plus operation, and exports the signal for controlling the second motion module movement.
3. motion control device as described in claim 1, which is characterized in that first installation frame and second installation Damper is provided on frame, first motion module is arranged on the damper, the second motion module setting On the damper.
4. a kind of motion control method of motion control device as described in any one of claims 1 to 3, which is characterized in that institute State motion control device for control the first motion module and the second motion module synchronizing moving, and make first motion module Meet preset requirement with the position of second motion module and motion profile signal, wherein first motion module and institute It states the second motion module to be separately positioned on the first installation frame and the second installation frame, the motion control method includes:
It carries out that the position of first motion module and the motion profile signal is made to meet the feedback control of preset requirement；
Compensate the feedforward control of the delay of the position control to first motion module；
Compensate the feedforward control of the disturbance of the vibration of first installation frame to the position control of first motion module System；
Superposition makes the position of first motion module and the motion profile signal meet the feedback control of preset requirement, compensates The vibration pair of feedforward control and compensation first installation frame to the delay of the position control of first motion module The information of the feedforward control output of the disturbance of the position control of first motion module, and export for controlling first fortune The signal of dynamic block motion；
It carries out that the position of second motion module and the motion profile signal is made to meet the feedback control of preset requirement；
Compensate the feedforward control of the delay of the position control of second motion module；
Compensate the feedforward of the disturbance of the vibration of second installation frame to the position control of the described second thick motion module Control；
Superposition makes the position of second motion module and the motion profile signal meet the feedback control of preset requirement, compensates The vibration pair of feedforward control and compensation second installation frame to the delay of the position control of second motion module The information of the feedforward control output of the disturbance of the position control of second motion module, and export for controlling second fortune The signal of dynamic block motion.
5. motion control method as claimed in claim 4, which is characterized in that
The feedback control for carrying out that the position of first motion module is made to meet preset requirement with the motion profile signal includes: The location information of motion profile signal and first motion module is done and subtracts operation and the first deviation information of output, described in processing First deviation information simultaneously exports the first activation bit；
Compensate the delay of the position control to first motion module feedforward control include: by motion profile signal and The location information of first motion module, which is done, subtracts operation, and exports the first deviation information, and processing the first deviation letter It ceases and exports the first activation bit；
Compensate the feedforward control of the disturbance of the vibration of first installation frame to the position control of first motion module System includes handling the acceleration information of first installation frame and exporting the second amendment activation bit；
Superposition makes the position of first motion module and the motion profile signal meet the feedback control of preset requirement, compensates The vibration pair of feedforward control and compensation first installation frame to the delay of the position control of first motion module The information of the feedforward control output of the disturbance of the position control of first motion module, and export for controlling first fortune The signal of dynamic block motion includes: to do first activation bit, the first amendment activation bit and the second amendment activation bit Add operation, and exports the signal for controlling the first motion module movement；
The feedback control for carrying out that the position of second motion module is made to meet preset requirement with the motion profile signal includes: The location information of motion profile signal and second motion module is done and subtracts operation, and exports the second deviation information, handles institute It states the second deviation information and exports the second activation bit；
The feedforward control for compensating the delay of the position control of second motion module includes: processing the second movement mould The motion profile acceleration signal of block simultaneously exports third amendment activation bit；
Compensate the feedforward of the disturbance of the vibration of second installation frame to the position control of the described second thick motion module Control includes: to handle the acceleration information of second installation frame and export the 4th amendment activation bit；
Superposition makes the position of second motion module and the motion profile signal meet the feedback control of preset requirement, compensates The vibration pair of feedforward control and compensation second installation frame to the delay of the position control of second motion module The information of the feedforward control output of the disturbance of the position control of second motion module, and export for controlling second fortune The signal of dynamic block motion includes: to do second activation bit, third amendment activation bit and the 4th amendment activation bit Add operation, and exports the signal for controlling the second motion module movement.
6. motion control method as claimed in claim 4, which is characterized in that damping is arranged on first installation frame Damper is arranged on second installation frame in device, and the first movement is arranged on the damper on first installation frame The second motion module is arranged on the damper on second installation frame in module.
7. a kind of reticle stage system, which is characterized in that including motion control device as described in any one of claims 1 to 3.
8. reticle stage system as claimed in claim 7, which is characterized in that the reticle stage system includes mask platform, the first inspection Survey module, the second detection module, the first acceleration transducer and the second acceleration transducer, first motion module and described Second motion module is for driving the mask platform to move, and the first detection module is for detecting the mask platform close to described Location information at first motion module and the location information as the first motion module, second detection module is for detecting Location information of the mask platform at second motion module and the location information as the second motion module, described One acceleration transducer is arranged on first installation frame, and first acceleration transducer is for detecting first peace Frame up the acceleration information of frame, and the acceleration information of first installation frame is passed to motion control device, and described Two acceleration transducers are arranged on second installation frame, and second acceleration transducer is for detecting second peace Frame up the acceleration information of frame, and the acceleration information of second installation frame is passed to motion control device.
9. reticle stage system as claimed in claim 7, which is characterized in that the use scope of the damper is 10~50Hz.
10. a kind of litho machine, which is characterized in that including reticle stage system as claimed in any one of claims 7-9.
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