TW202001432A - Movement control apparatus, movement control method, mask table system, and mask aligner - Google Patents

Abstract

Provided are a movement control apparatus, a movement control method, a mask table system, and a mask aligner, used for controlling synchronous movement of a first movement module and a second movement module. The first movement module and the second movement module are respectively provided on a first mounting frame and a second mounting frame; the movement control apparatus comprises a first position feedback unit, a first trajectory acceleration feedforward unit, a first frame acceleration feedforward unit, a first additive operation module, a second position feedback unit, a second trajectory acceleration feedforward unit, a second frame acceleration feedforward unit, and a second additive operation module. The movement control apparatus can improve the movement precision of the first movement module and the second movement module, reduce mutual interference caused by movement dyssynchrony of the first movement module and the second movement module, and further improve the control precision of the movement control apparatus.

Description

Motion control device, motion control method, mask table system and photoetching machine

The invention relates to the technical field of photoetching, in particular to a motion control device, a motion control method, a mask stage system and a photoetching machine.

Large-scale semiconductor integrated circuit production equipment requires that the vibration interference of many important components is as small as possible to keep important components in a quiet environment. For example, the photoetching machine requires the vibration interference of the workpiece table system and the mask table system to be as small as possible. The mask stage of the photoetching machine generally includes a fine movement stage and a coarse movement stage. The fine movement stage completes the precise fine adjustment of the mask plate, and the coarse movement stage completes the large-stroke scanning exposure movement of the mask plate.

With the rapid development of the flat panel display industry, the size of the substrate is continuously increasing, and has grown from the original G1 (substrate size 300*400) to the current G10 (substrate size 2850*3150), the demand for the size of the exposure field of view also increases Big. The single-lens photoetching machine applied in the IC field has been difficult to meet the increasing demand for the current exposure field of view. Therefore, the industry proposes a photoetching machine that stitches lenses to solve the problem of increasing field of view. For the large-field photoetching machine of the stitching lens, the size of the mask plate used is also increased. For example, the G6 and above use 850*1200mm and 850*1400mm mask plates, and even larger size mask plates. Therefore, the frame structure and quality supporting the mask plate are also increased, and the increase in the frame structure and quality supporting the mask plate will inevitably increase the vibration of the mask table system, while the photoetching machine The frame structure and quality will also increase, and the vibration of the photoetching machine will also increase. Therefore, the requirements for the vibration control of the mask table system and the photoetching machine are also increased accordingly to avoid the vibration from affecting the accuracy of the mask table system. And the accuracy of the photoetching machine. In addition, with the continuous development of the IC and flat panel display industry, the requirements for the vibration control of the mask table system and the photoetching machine are also constantly increasing.

Therefore, there is an urgent need to improve the mask table system and photoetching machine to reduce the impact of vibration on the accuracy of the mask table system and photoetching machine.

The object of the present invention is to provide a motion control device, a motion control method, a mask stage system and a photoetching machine, in order to improve the problem of vibration affecting the accuracy of the mask stage system and the photoetching machine.

In order to solve the above technical problems, the present invention provides a motion control device for controlling the first motion module and the second motion module to move synchronously. The first motion module and the second motion module are respectively installed in the first installation On the frame and the second mounting frame, the motion control device includes: a first position feedback unit for performing feedback control to make the position of the first motion module and a motion track signal meet preset requirements; before the first track acceleration The feed unit is used to perform feedforward control that compensates for the position control delay of the first motion module; the first frame acceleration feedforward unit is used to perform compensation for the position of the first motion module by vibration of the first mounting frame Disturbance-feedforward control is controlled; a first addition operation module is used to superimpose information output by the first position feedback unit, the first trajectory acceleration feedforward unit and the first frame acceleration feedforward unit, and output for A signal for controlling the movement of the first motion module; a second position feedback unit for performing feedback control that makes the position of the second motion module and the motion track signal meet preset requirements; a second track acceleration feedforward unit, A feedforward control for compensating the position control delay of the second motion module; a second frame acceleration feedforward unit for compensating the vibration of the second mounting frame for the position control of the second coarse motion module Disturbance feedforward control; and a second addition module for superimposing the information output by the second position feedback unit, the second trajectory acceleration feedforward unit and the second frame acceleration feedforward unit, and output for control The movement signal of the second movement module.

Optionally, the first position feedback unit includes a first subtraction operation module and a first feedback controller. The first subtraction operation module is used to subtract the motion track signal and the position information of the first motion module Calculate and output the first deviation information, the first feedback controller is used to process the first deviation information and output the first driving information; the first trajectory acceleration feedforward unit is used to process the trajectory acceleration of the first motion module Signal and output first modified driving information; the first frame acceleration feedforward unit is used to process the acceleration information of the first mounting frame and output second modified driving information; the first addition module is used to drive the first drive The information, the first modified driving information and the second modified driving information are added, and output a signal to control the movement of the first motion module; the second position feedback unit includes a second subtraction operation module and a second feedback controller, The second subtraction operation module is used to subtract the motion trajectory signal and the position information of the second motion module, and output second deviation information, and the second feedback controller is used to process the second deviation information and output Second driving information; the second trajectory acceleration feedforward unit is used to process the trajectory acceleration signal of the second motion module and output third modified driving information; the second frame acceleration feedforward unit is used to process the second installation The acceleration information of the frame and output the fourth modified driving information; the second addition operation module is used to add the second driving information, the third modified driving information and the fourth modified driving information, and output to control the second motion Signal of module movement.

Optionally, the first motion module is connected to the first mounting frame through a first shock absorber disposed on the first mounting frame, and the second motion module is disposed on the second mounting frame The second shock absorber is connected to the second mounting frame.

The present invention also provides a motion control method of the above motion control device. The motion control method includes: performing feedback control such that the position of the first motion module and the motion trajectory signal meet preset requirements; and performing compensation for the first motion Delayed feedforward control of the position control of the module; performing feedforward control that compensates for the vibration of the first mounting frame that disturbs the position control of the first motion module; superimposing the position of the first motion module and the motion The feedback control whose trajectory signal satisfies the preset requirements, the feedforward control that compensates for the position control delay of the first motion module, and the feedforward control that compensates for the vibration of the first mounting frame that disturbs the position control of the first motion module Separately output information and output signals for controlling the movement of the first motion module; execute feedback control to make the position of the second motion module and the motion trajectory signal meet preset requirements; execute compensation for the second motion module Delayed feedforward control of the position control of the group; performing feedforward control that compensates for the vibration of the second mounting frame to disturb the position control of the second motion module; superimposing the position of the second motion module and the motion trajectory The feedback control whose signals meet the preset requirements, the feed-forward control that compensates for the position control delay of the second motion module, and the feed-forward control that compensates for the vibration of the second mounting frame that disturbs the position control of the second motion module, respectively Output information and output signals for controlling the movement of the second motion module.

Optionally, executing the feedback control to make the position of the first motion module and the motion trajectory signal meet the preset requirements includes: subtracting the motion trajectory signal and the position information of the first motion module and outputting the first Deviation information, processing the first deviation information and outputting the first driving information; executing feedforward control to compensate the position control delay of the first motion module includes: processing the motion trajectory acceleration signal of the first motion module and outputting the first Correcting the drive information; performing feedforward control that compensates for the vibration of the first mounting frame to disturb the position control of the first motion module includes: processing the acceleration information of the first mounting frame and outputting the second modified drive information; superimposing The feedback control of the position of the first motion module and the motion trajectory signal satisfying the preset requirements, the feed-forward control to compensate the position control delay of the first motion module, and the vibration of the first mounting frame to the first motion The position control of the module generates disturbance feed-forward control output information, and outputs signals for controlling the movement of the first motion module include: the first drive information, the first modified drive information and the second modified drive information Doing an addition operation and outputting a signal that controls the movement of the first motion module; performing feedback control to make the position of the second motion module and the motion trajectory signal meet preset requirements includes: the motion trajectory signal and the second The position information of the motion module is subtracted, and the second deviation information is output, the second deviation information is processed and the second drive information is output; executing the feedforward control that compensates for the delay of the position control of the second motion module includes: processing The motion trajectory acceleration signal of the second motion module outputs third corrected driving information; executing feedforward control that compensates for the vibration of the second mounting frame to disturb the position control of the second coarse motion module includes: processing the first Second, the acceleration information of the mounting frame and output the fourth modified driving information; superimposing the feedback control that makes the position of the second motion module and the motion track signal meet the preset requirements, and compensates for the position control delay of the second motion module The feedback control and the feedforward control that compensates for the vibration of the second mounting frame to disturb the position control of the second motion module, respectively, and outputs information to output the signal for controlling the motion of the second motion module includes: The second driving information, the third modified driving information, and the fourth modified driving information perform addition operations, and output signals that control the movement of the second motion module.

The invention also provides a mask table system, which includes a first mounting frame, a second mounting frame, a first motion module disposed on the first mounting frame, and a second motion module disposed on the second mounting frame And the aforementioned motion control device.

Optionally, the mask stage system further includes a mask stage, a first detection module, a second detection module, a first acceleration sensor and a second acceleration sensor; the first motion module and the first Two motion modules are used to drive the movement of the mask stage; the first detection module is used to detect the position information of the mask stage near the first movement module and serve as the position information of the first movement module. Two detection modules are used to detect the position information of the mask stage near the second motion module and serve as the position information of the second motion module; the first acceleration sensor is disposed on the first mounting frame, the The first acceleration sensor is used to detect acceleration information of the first mounting frame and transmit the acceleration information of the first mounting frame to the motion control device, the second acceleration sensor is disposed on the second mounting frame, the The second acceleration sensor is used to detect acceleration information of the second mounting frame, and transmit the acceleration information of the second mounting frame to the motion control device.

Optionally, the first motion module is connected to the first mounting frame through a first shock absorber disposed on the first mounting frame, and the second motion module is disposed on the second mounting frame The second shock absorber is connected to the second mounting frame.

Optionally, the shock absorption range of the first shock absorber and the second shock absorber is 10-50 Hz.

The invention also provides a photo-etching machine, including the above-mentioned mask table system.

The invention provides a motion control device, a motion control method, a mask table system and a photoetching machine, which have the following beneficial effects:

The motion control device uses the first position feedback unit to make the position of the first motion module and the motion track signal meet the preset requirements, and uses the first track acceleration feedforward unit to compensate the position control of the first motion module Delay, and adopting the first frame acceleration feedforward unit to compensate the disturbance of the position control of the first motion table caused by the vibration of the first mounting frame, and superimposing the first position feedback unit, the first A trajectory acceleration feedforward unit and the information output by the first frame acceleration feedforward unit, and output signals for controlling the movement of the first motion module, therefore, the motion control device is in motion of the first motion module While performing feedback control and position feedforward compensation, it can also reduce the interference of the vibration of the first mounting frame on the movement of the first motion module, thereby further improving the motion accuracy of the first motion module.

The motion control device controls the motion of the second motion module through the second position feedback unit, the second trajectory acceleration feedforward unit, the second frame acceleration feedforward unit, and the second addition operation module. Similarly, the motion control device While the motion of the second motion module performs feedback control and position feedforward compensation, it can also reduce the interference of the vibration of the second mounting frame on the motion of the second motion module, thereby further improving the second motion Movement accuracy of the module.

At the same time, since the movement accuracy of the first movement module and the second movement module can be improved, and the same movement track signal, the movement track acceleration signal of the first movement module and the movement of the second movement module are used The trajectory acceleration signal controls the movement of the first motion module and the second motion module, so the motion control device can control the first motion module and the second motion module to move synchronously, and the first motion module and The motion accuracy of the second motion module is improved, so the mutual interference caused by the asynchronous motion of the first motion module and the second motion module can be further reduced, thereby improving the first motion module and the second motion The overall motion accuracy of the module can improve the control accuracy of the motion control device.

100‧‧‧First coarse motion module

101‧‧‧Coarse moving guide

102‧‧‧Coarse motion table

200‧‧‧ Second coarse motion module

201‧‧‧Coarse moving guide

202‧‧‧Coarse motion table

300‧‧‧Micro Motion Module

401‧‧‧First installation frame

402‧‧‧Second mounting frame

403‧‧‧ Foundation

500‧‧‧Mask

601‧‧‧First feedforward controller

602‧‧‧ First feedback controller

603‧‧‧ Second feedforward controller

604‧‧‧Second feedback controller

605‧‧‧ First arithmetic unit

606‧‧‧ Second arithmetic unit

607‧‧‧The third arithmetic unit

608‧‧‧The fourth arithmetic unit

609‧‧‧ fifth arithmetic unit

610‧‧‧Sixth arithmetic unit

611‧‧‧ seventh arithmetic unit

612‧‧‧The eighth arithmetic unit

613‧‧‧First current loop

614‧‧‧second current loop

701‧‧‧ First detection module

702‧‧‧ Second detection module

810‧‧‧First coarse motion module

811‧‧‧Coarse moving guide

812‧‧‧Coarse motion table

820‧‧‧ Second coarse motion module

821‧‧‧Coarse moving guide

822‧‧‧Coarse motion table

831‧‧‧First installation frame

832‧‧‧Second mounting frame

834‧‧‧ Foundation

840‧‧‧Mask

851‧‧‧The first detection module

852‧‧‧Second inspection module

861‧‧‧First acceleration sensor

862‧‧‧Second acceleration sensor

871‧‧‧ First subtraction arithmetic module

872‧‧‧First feedback controller

873‧‧‧The first track acceleration feedforward unit

874‧‧‧The first addition module

875‧‧‧ First frame acceleration feedforward unit

876‧‧‧First Current Loop

881‧‧‧ Second subtraction arithmetic module

882‧‧‧Second feedback controller

883‧‧‧The second track acceleration feedforward unit

884‧‧‧The second addition module

885‧‧‧The second frame acceleration feedforward unit

886‧‧‧second current loop

890‧‧‧Shock absorber

A1‧‧‧ First curve

A2‧‧‧Second curve

Figure 1 is a front view of a mask table system; Figure 2 is a left side view of a mask table system; Figure 3 is a control block diagram of a mask table system; Figure 4 is a mask table in Embodiment 1 of the present invention Front view of the system; FIG. 5 is a left side view of the mask table system in Embodiment 1 of the present invention; FIG. 6 is a control block diagram of the motion control device applied in the mask table system in Embodiment 1 of the present invention; FIG. 7 Is a front view of the mask stage system in Embodiment 2 of the present invention; FIG. 8 is a schematic diagram of the ground excitation data of the mask stage system shown in FIGS. 1 and 2; FIG. 9 is the mask shown in FIGS. 1 and 2 The response curve at the attention point of the mask stage in the stage system; FIG. 10 is the response curve at the attention point of the mask stage in the mask stage system in Embodiment 2 of the present invention.

As described in the background art, the accuracy of the existing mask table system is easily affected by vibration. Based on this, the inventors conducted a detailed analysis of the structure and control method of the existing mask table system.

1 is a front view of a mask table system, and FIG. 2 is a left side view of a mask table system. Referring to FIGS. 1 and 2, the mask table system includes a first coarse motion module 100 and a second coarse motion module Group 200, micro-motion module 300, mask table mounting frame, mask table 500, motion control device and position detection device. The first coarse motion module 100, the second coarse motion module 200, the micro motion module 300, the mask table mounting frame, the motion control device, and the position detection device form a closed-loop control that controls the position of the mask table 500 system.

As shown in FIG. 1, the mask table mounting frame includes a first mounting frame 401 and a second mounting frame 402. The first mounting frame 401 and the second mounting frame 402 are respectively disposed on the foundation 403.

The first coarse motion module 100 and the second coarse motion module 200 are respectively disposed on the first mounting frame 401 and the second mounting frame 402. The micro motion module 300 is disposed on the first coarse motion module 100 and the second coarse motion module 200. The mask stage 500 is disposed on the micro-motion module 300. The first coarse motion module 100 and the second coarse motion module 200 are used to drive the fine motion module 300 and the mask table 500 provided on the fine motion module 300 to move. The micro-motion module 300 is used to drive the mask table 500 to move.

Each of the first coarse motion module 100 and the second coarse motion module 200 includes coarse motion guide rails 101 and 201 provided on the mask table mounting frame, and the coarse motion table 102 moving along the coarse motion guide rails 101 and 201 , 202, and a driver for driving the coarse motion tables 102, 202 to move along the coarse motion guide rails 101, 201. The micro-motion module 300 includes micro-motion rails respectively disposed on the two coarse motion tables 102 and 202. The mask table 500 can move along the two micro-motion guides.

Referring to FIG. 2, the first coarse motion module 100, the second coarse motion module 200, and the fine motion module 300 drive the mask stage 500 to move in the Y-axis direction (that is, move in a horizontal direction). For convenience of description, the coarse motion table 102 of the first coarse motion module 100 is referred to as the first coarse motion table 102, the driver of the first coarse motion module 100 is referred to as the first driver, and the second coarse motion module 100 The coarse motion table 102 of the module 200 is called the second coarse motion table 102, and the driver of the second coarse motion module 200 is called the second driver.

The position detection device is used to detect the displacement information of the first coarse motion module 100 and the second coarse motion module 200 and feed back the displacement information to the motion control device. Specifically, the position detection device includes a first detection module 701 and a second detection module 702 (refer to FIG. 3 accordingly). The first detection module 701 is used to detect the first position information of the first coarse motion table 102 The second detection module 702 is used to detect the second position information of the second coarse motion table 102.

3 is a control block diagram of a mask stage system. Referring to FIG. 3, the motion control device includes a first feedforward controller 601, a first feedback controller 602, a second feedforward controller 603, and a second feedback controller 604, first arithmetic unit 605, second arithmetic unit 606, third arithmetic unit 607, fourth arithmetic unit 608, fifth arithmetic unit 609, sixth arithmetic unit 610, seventh arithmetic unit 611, eighth arithmetic unit 612, The first current loop 613 and the second current loop 614. The motion control device controls the movement of the first coarse motion table 102 and the second coarse motion table 102 according to the control command issued by the superior control system. Specifically, the information sent by the upper-level control system to the motion control device mainly includes a motion trajectory signal, a relative rotation angle signal of the first coarse motion module 100 and the second coarse motion module 200, and an acceleration of the motion trace of the first coarse motion module 100 Signal and the acceleration signal of the movement track of the second coarse motion module 200.

The first calculation unit 605 is used to perform cross calculation on the first position information and the second position information, halve the calculation result of the first position information and the second position information, and output the first position processing information.

The second operation unit 606 is used to perform cross calculation on the first position information and the second position information, halve the calculation result of the first position information and the second position information, and output the second position processing information.

The third operation unit 607 is used to perform subtraction operation on the motion track signal and the first position processing information and output the first deviation information.

The fourth computing unit 608 is used to subtract the relative rotation angle signal and the second position processing information of the first coarse motion module 100 and the second coarse motion module 200 and output second deviation information.

The first feedback controller 602 is used to process the first deviation information and output first driving information.

The second feedback controller 604 is used to process the second deviation information and output second driving information.

The first feedforward controller 601 is used to process the acceleration signal of the movement track of the first coarse motion module 100 and output the first modified driving information.

The second feedforward controller 603 is used to process the acceleration signal of the movement track of the second coarse motion module 200 and output second modified driving information.

The fifth arithmetic unit 609 is used to add the first driving information and the first modified driving information, and output a first motion control signal.

The sixth arithmetic unit 610 is used to add the second driving information and the second modified driving information, and output a second motion control signal.

The seventh arithmetic unit 611 is used to perform a cross operation on the first motion control signal and the second motion control signal, and output a first cross drive signal.

The eighth arithmetic unit 612 is used to perform a cross operation on the first motion control signal and the second motion control signal, and output a second cross drive signal.

The first cross drive signal is processed by the first current loop 613 and output to the first driver, and the first driver controls the first coarse motion stage 102 to move. The second cross drive signal is processed by the second current loop 614 and output to the second driver, which controls the movement of the second coarse motion stage 102.

Referring to FIG. 3, a mask stage system shown in FIGS. 1 and 2 adopts a double cross synchronization control strategy. In the mask table system, the first coarse motion table 102 is used as the driving axis, the second coarse motion table 102 follows the first coarse motion table 102, and the second coarse motion table 102 is the following axis. The mask stage system performs deviation control on the first coarse motion module 100 and the second coarse motion module 200 through cross-processed first position information and second position information, respectively, to realize the first coarse motion table 102 and The position of the second coarse motion table 102 is cross-controlled. After the cross processing, the first motion control signal and the second motion control signal compensate the first coarse motion module 100 and the second coarse motion module 200, respectively, so that the first coarse motion table 102 and the second coarse motion table 102 The output is relatively uniform, and the cross control of the forces of the first coarse motion table 102 and the second coarse motion table 102 is achieved. Among them, the smaller the relative rotation angle signal of the first coarse motion table 102 and the second coarse motion table 102, the higher the synchronization control accuracy, that is, the first coarse motion table 102 and the second coarse motion table 102 can reach the corresponding positions at the same time, so The relative rotation angle signals of the first coarse motion module 100 and the second coarse motion module 200 can be made zero, that is, the first coarse motion module 100 and the second coarse motion module 200 are expected to be completely synchronized.

After the applicant's research, it was found that the accuracy of the above-mentioned mask stage system is mainly low-frequency vibration. According to the source of low-frequency vibration, one is the low-frequency vibration transmitted indirectly by the foundation 403; the second is the mutual interference between the first coarse motion module 100 and the second coarse motion module 200 of the above-mentioned mask stage system.

Specifically, during the operation of the photoetching machine, there will be vibration of the foundation 403 and the subsystems such as the workpiece table and the mask table 500 have high motion acceleration and motion speed, the reaction force generated by the motion component during the motion, and The tilting moment will cause the core part of the photoetching machine to vibrate. The first coarse motion module 100 and the second coarse motion module 200 in the mask table 500 are connected to the foundation 403 through the mask table mounting frame, and various disturbances in the photoetching machine will be directly transmitted through the mask table mounting frame Give the mask 500.

The mutual interference between the first coarse motion module 100 and the second coarse motion module 200 is mainly reflected in:

1) After the motion control device receives the motion trajectory signal and controls the movement of the first coarse motion module 100, the motion control device needs to calculate the deviation between the position of the second coarse motion module 200 and the position of the first coarse motion module 100, and Use this deviation as the control input of the second coarse motion module 200. The control input of the second coarse motion module 200 always lags behind the motion track signal. Between the first coarse motion module 100 and the second coarse motion module 200 There is a time delay, which causes the motion between the first coarse motion module 100 and the second coarse motion module 200 to interfere with each other.

2) The test result indicates that the second coarse motion module 200 cannot follow the movement of the first coarse motion module 100 in time, and the synchronization error between the first coarse motion module 100 and the second coarse motion module 200 is large, so the first coarse motion module 200 There is mutual interference between the module 100 and the second coarse motion module 200.

3). The first position information and the second position information of the first coarse movement module 100 and the second coarse movement module 200 are transmitted to the other party's control loop in a cross-over manner, causing a direct disturbance, resulting in a synchronization error. Is large, so there is mutual interference between the first coarse motion module 100 and the second coarse motion module 200.

Based on the above analysis, the inventor proposes a motion control device, a motion control method, a mask stage system, and a photoetching machine. The first coarse motion module and the second coarse motion module of the mask stage system are based on their own The displacement error is to control the object, to ensure the synchronization performance between the three, and to avoid the direct crosstalk between the first coarse motion module and the second coarse motion module in the existing cross synchronization strategy.

The motion control device, motion control method, mask table system, and photoetching machine provided in the embodiments of the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. The advantages and features of the present invention will be clearer from the following description and the appended claims. It should be noted that the drawings are in a very simplified form and all use inaccurate proportions, which are only used to conveniently and clearly assist the purpose of explaining the embodiments of the present invention.

[Example 1]

This embodiment provides a mask table system, which is applied to a motion control device and a photoetching machine in the mask table system.

Referring to FIGS. 4 and 5, FIG. 4 is a front view of the mask stage system in Embodiment 1 of the present invention, and FIG. 5 is a left side view of the mask stage system in Embodiment 1 of the present invention. A coarse motion module 810, a second coarse motion module 820, a mask table mounting frame, a mask table 840, a motion control device, a position detection device, a first acceleration sensor, and a second acceleration sensor.

The mask mount frame includes a first mount frame 831 and a second mount frame 832. The first mounting frame 831 and the second mounting frame 832 are respectively disposed on the foundation 834.

The first coarse motion module 810 and the second coarse motion module 820 are respectively disposed on the first mounting frame 831 and the second mounting frame 832. The first coarse motion module 810 and the second coarse motion module 820 are used to drive the mask table 840 to move. The first coarse motion module 810 and the second coarse motion module 820 both include coarse motion guide rails 811 and 821 provided on the shielding table mounting frame, and the coarse motion guide rail 812 moving along the coarse motion guide rails 811 and 821 , 822, and a driver for driving the coarse motion tables 812, 822 to move along the coarse motion guide rails 811, 821. Referring to FIG. 5, the first coarse motion module 810 and the second coarse motion module 820 move along the Y-axis direction (that is, move along a horizontal direction). For convenience of description, the coarse motion table 812 of the first coarse motion module 810 is referred to as a first coarse motion table, the driver of the first coarse motion module 810 is referred to as a first drive, and the second coarse motion module The coarse motion table 822 of the group 820 is called a second coarse motion table, and the driver of the second coarse motion module 820 is called a second driver.

The position detection device is used to detect the position information of the mask stage 840 and feed back the position information to the motion control device. Specifically, the position detection device includes a first detection module and a second detection module, the first detection module is used to detect the position information of the mask table 840 near the first coarse motion table, the second detection The module is used to detect the position information of the mask table 840 near the second coarse motion table, the position information detected by the first detection module is the first position information, and the position information detected by the second detection module is the second Location information. In this embodiment, the first detection module and the second detection module may be interferometers.

The first acceleration sensor is disposed on the first mounting frame 831, and the second acceleration sensor is disposed on the second mounting frame 832. The first acceleration sensor is used to detect the acceleration information of the first mounting frame 831 and transmit the acceleration information of the first mounting frame 831 to the first motion control unit. The second acceleration sensor is used to detect the acceleration information of the second mounting frame 832 and transmit the acceleration information of the second mounting frame 832 to the second motion control unit.

6 is a control block diagram of a motion control device applied to a mask stage system according to Embodiment 1 of the present invention. The motion control device includes independent of the first coarse motion module 810 and the second coarse motion module 820 Controlled first motion control unit and second motion control unit. The motion control device is based on control commands issued by a superior control system, the first position information and the second position information detected by the position detection device, and the acceleration information of the first mounting frame 831 and the acceleration information of the second mounting frame 832 Control the movement of the first coarse motion table and the second coarse motion table. Specifically, the information sent by the superior control system to the motion control device mainly includes a motion trajectory signal (the motion trajectory signal may include time and position signals), a motion trajectory acceleration signal of the first coarse motion module 810, and a second coarse motion module 820 motion track acceleration signal. The motion track signal is sent to the first motion control unit and the second motion control unit at the same time. The motion trajectory acceleration signal of the first coarse motion module 810 is sent to the first motion control unit, and the motion trajectory acceleration signal of the second coarse motion module 820 is sent to the second motion control unit, wherein the first coarse motion module The trajectory acceleration signal of the motion module 810 is the same as the trajectory acceleration signal of the second coarse motion module 820. The first position information is sent to the first motion control unit. The second position information is sent to the second motion control unit. The acceleration information of the first mounting frame 831 is sent to the first motion control unit, and the acceleration information of the second mounting frame 832 is sent to the second motion control unit.

6, the first motion control unit includes a first position feedback unit, a first trajectory acceleration feedforward unit 873, a first addition module 874, and a first frame acceleration feedforward unit 875.

The first position feedback unit is used to perform feedback control so that the position of the first coarse motion stage of the first coarse motion module 810 and the motion track signal satisfy preset requirements. For example, as far as possible, the position of the first coarse motion table coincides with the motion track signal. Specifically, the first position feedback unit includes a first subtraction module 871 and a first feedback controller 872. The first subtraction operation module 871 is used to perform subtraction operation on the first position information and the motion track signal, and output the first deviation information. The first feedback controller 872 is used to process the first deviation information and output first driving information. The first feedback controller 872 is preferably a PID control module.

The first trajectory acceleration feedforward unit 873 is used to perform a feedforward control that compensates for the delay of the position control of the first coarse motion table. Specifically, the first trajectory acceleration feedforward unit 873 is used to process the trajectory acceleration signal of the first coarse motion module 810 and output the first modified driving information.

The first frame acceleration feed-forward unit 875 is used to perform feed-forward control that compensates for the disturbance of the position control of the first coarse motion table caused by the vibration of the first mounting frame 831. Specifically, the first frame acceleration feedforward unit 875 is used to process the acceleration information of the first mounting frame 831 and output second modified driving information.

The first addition module 874 is used to superimpose the information output by the first position feedback unit, the first trajectory acceleration feedforward unit 873 and the first frame acceleration feedforward unit 875, and output to control the first coarse The first motion control signal for the motion module 810 to move. Specifically, the first addition operation module 874 is used to add the first drive information, the first modified drive information, and the second modified drive information, and output a first motion control signal. The first motion control signal is used to control the movement of the first coarse motion module 810.

The second motion control unit includes a second position feedback unit, a second trajectory acceleration feedforward unit 883, a second addition module 884, and a second frame acceleration feedforward unit 885.

The second position feedback unit is used to perform feedback control so that the position of the second coarse motion table of the second coarse motion module 820 and the motion track signal satisfy preset requirements. For example, as far as possible, the position of the second coarse motion table coincides with the motion trajectory signal. Specifically, the second position feedback unit includes a second subtraction operation module 881 and a second feedback controller 882. The second subtraction operation module 881 is used to perform subtraction operation on the second position information and the motion track signal, and output the second deviation information. The second feedback controller 882 is used to process the second deviation information and output second driving information. The second feedback controller 882 is preferably a PID control module.

The second trajectory acceleration feedforward unit 883 is used to perform a feedforward control that compensates for the delay of the position control of the second coarse motion stage 812, 822 by the second position feedback unit. Specifically, the second trajectory acceleration feedforward unit 883 is used to process the trajectory acceleration signal of the second coarse motion module and output third modified driving information.

The second frame acceleration feedforward unit 885 is used to perform feedforward control for compensating for the disturbance of the position control of the second coarse motion table caused by the vibration of the second mounting frame 832. Specifically, the second frame acceleration feedforward unit 885 is used to process the acceleration information of the second mounting frame 832 and output fourth modified driving information.

The second addition module 884 is used to superimpose the information output by the second position feedback unit, the second trajectory acceleration feedforward unit 883 and the second frame acceleration feedforward unit 885, and outputs information for controlling the second coarse The second motion control signal for the motion module 820 to move. Specifically, the second addition operation module 884 is used to add the second driving information, the third modified driving information, and the fourth modified driving information, and output a second motion control signal. The second motion control signal is used to control the motion of the second coarse motion module 820.

The first motion control unit preferably includes a first current loop 876. The first current loop 876 is used to process the first driving information, and uses the processed first driving information to control the movement of the first coarse motion module 810.

The second motion control unit preferably includes a second current loop 886, which is used to process the first driving information, and uses the processed second driving information to control the movement of the second coarse motion module 820.

In this embodiment, the working process of the mask stage system is as follows:

First, the higher-level control system sends the motion trajectory signal, the motion trajectory acceleration signal of the first coarse motion module 810, and the motion trajectory acceleration signal of the second coarse motion module 820 to the motion control device, and the position detection device sends the first position information and the first Two position information to the motion control device, the first acceleration sensor 861 and the second acceleration sensor 862 send the acceleration information of the first mounting frame 831 and the second mounting frame 832 to the motion control device.

Secondly, the first subtraction operation module 871 in the first position feedback unit in the motion control device subtracts the first position information and the motion trajectory signal, and outputs the first deviation information, and then uses the first feedback controller 872 Process the first deviation information and output the first driving information; the second subtraction operation module 881 in the second position feedback unit in the motion control device subtracts the second position information and the motion trajectory signal, and outputs the second deviation Information, and then the second feedback controller 882 processes the second deviation information and outputs second driving information.

At the same time, the first trajectory acceleration feedforward unit 873 in the motion control device processes the trajectory acceleration signal of the first coarse motion module 810 and outputs the first modified driving information; the second trajectory acceleration feedforward unit 883 in the motion control device Process the acceleration signal of the motion track of the second coarse motion module 820 and output third modified driving information.

At the same time, the first frame acceleration feedforward unit 875 in the motion control device processes the acceleration information of the first mounting frame 831 and outputs second corrected driving information; the second frame acceleration feedforward unit 885 in the motion control device processes the second mounting frame 832 acceleration information and output the fourth modified driving information.

After that, the first addition operation module 874 adds the first drive information, the first modified drive information, and the second modified drive information, and outputs a first motion control signal; the second addition operation module 884 adds the second The driving information, the third modified driving information and the fourth modified driving information are added, and a second motion control signal is output.

Then, the first coarse motion module 810 is controlled by the first motion control signal, and the second coarse motion module 820 is controlled by the second motion control signal.

In this embodiment, the motion control device of the mask stage system controls the movement of the first coarse motion module 810 through the first motion control unit, and uses the first position feedback unit to make the first coarse motion module 810 the first The position of a coarse motion table and the motion trajectory signal meet the preset requirements, the first trajectory acceleration feedforward unit 873 is used to compensate the delay of the position control of the first coarse motion table by the first position feedback unit, and the first A frame acceleration feedforward unit 875 compensates for the disturbance of the position control of the first coarse motion table by the vibration of the first mounting frame 831, and uses a first addition module 874 to superimpose the first position feedback unit and the first trajectory The acceleration feedforward unit 873 and the first frame acceleration feedforward unit 875 output information and output signals for controlling the movement of the first motion module. Therefore, the motion control device of the mask stage system While performing motion feedback control and position feedforward compensation on the motion of the coarse motion module 810, it can also reduce the interference of the vibration of the first mounting frame 831 on the motion of the first coarse motion module 810, which can further improve the The motion accuracy of a coarse motion module 810; the motion control device of the mask stage system controls the motion of the second coarse motion module 820 through the second motion control unit, and uses the second position feedback unit to make the second coarse motion The position of the second coarse motion stage of the module 820 and the motion trajectory signal meet the preset requirements, and the second trajectory acceleration feedforward unit 883 is used to compensate the delay of the position control of the second coarse motion stage by the second position feedback unit And the second frame acceleration feedforward unit 885 is used to compensate the disturbance of the position control of the second coarse motion table caused by the vibration of the second mounting frame 832, and the second position feedback unit is superimposed using a second addition module 884 , The information output by the second trajectory acceleration feedforward unit 883 and the second frame acceleration feedforward unit 885, and outputs signals for controlling the movement of the second motion module, therefore, the motion control device of the mask stage system While performing feedback control on the motion of the second coarse motion module 820 and performing position feedforward compensation, the interference of the vibration of the second mounting frame 832 on the motion of the second coarse motion module 820 can also be reduced, thereby The motion accuracy of the second coarse motion module 820 can be further improved; since the motion precision of the first coarse motion module 810 and the second coarse motion module 820 can be improved, and the first motion control unit and the first Both motion control units use the same motion track signal, the motion track acceleration signal of the first coarse motion module 810 and the motion track acceleration signal of the second coarse motion module 820 are the same, the first position information and the second The position information is the position information at different positions on the mask table 840, that is, the first motion control unit and the second motion control unit have the same motion control instruction and motion track acceleration feedforward compensation information, the close positions Feedback information, so the motion control device can control the first coarse motion module 810 and the second coarse motion module 820 to move synchronously, because the first coarse motion module 8 10 and the motion accuracy of the second coarse motion module 820 are improved, so the mutual interference caused by the asynchronous motion of the first coarse motion module 810 and the second coarse motion module 820 can be further reduced, thereby improving the first The overall motion accuracy of the coarse motion module 810 and the second coarse motion module 820 can improve the control accuracy of the motion control device and the motion accuracy of the mask table system.

Compared with a double cross synchronization control strategy for a motion control device of a mask table system, the motion control device of the mask table system in this embodiment controls the first and second motion control units by using the first motion control unit and the second motion control unit, respectively. A coarse motion module 810 and a second coarse motion module 820 can avoid the problem that the control command input of the first coarse motion module 810 and the second coarse motion module 820 is not synchronized, the control information interferes with each other, and the synchronization error is relatively large. And by setting the first frame acceleration feedforward unit 875 and the second frame acceleration feedforward unit 885, the vibration of the first mounting frame 831 and the second mounting frame 832 is effectively compensated for the first coarse motion module 810 and the first The interference of the motion of the two coarse motion modules 820 can improve the control accuracy of the motion control device and the motion accuracy of the mask table system.

This embodiment also provides a photoetching machine, which includes the mask stage system in the above embodiment.

[Example 2]

This embodiment provides a mask table system. Referring to FIG. 7, FIG. 7 is a front view of a mask stage system in Embodiment 2 of the present invention. The difference between this embodiment and Embodiment 1 is that in this embodiment, the mask stage system may further include a shock absorber 890 . In this embodiment, the coarse motion module is not directly installed on the mask platform mounting frame, but the shock absorber 890 is disposed on the mask platform mounting frame, and the coarse motion module is disposed on the shock absorber On the device 890. The vibration transmitted from the foundation 834 passes through the shield table mounting frame, passes through the shock absorber 890, and then is transmitted to the first coarse motion module 810 and the second coarse motion module 820. By providing a shock absorber 890 between the mask frame mounting frame and the first coarse motion module 810 and the second coarse motion module 820, the vibration transmitted by the photoetching machine to the mask table 840 can be effectively reduced.

The inventor performed a PSD simulation of the mask stage system shown in FIGS. 1 and 2 under the ground 834 excitation. Referring to FIG. 8, FIG. 8 is a schematic diagram of the ground excitation data of the mask stage system shown in FIGS. 1 and 2. After researching by the inventors, it was found that due to the influence of structural rigidity, a mask table system has a multi-order low-frequency mode between 15 and 35 Hz. Low-frequency vibrations of 15 to 35 Hz will cause the dynamics of the mask table 840 The performance is reduced, which affects the position stability of the mask stage 840. Take a point of interest at the mask station 840, and the response result is shown in FIG. 9, which is the response curve at the point of interest of the mask station in the mask station system shown in FIGS. 1 and 2. From the response curve, Obviously, the displacement response value of the focus point is mainly affected by the frequency of 10-20Hz (Frequency), the frequency of about 30Hz and the frequency of about 66Hz. The maximum displacement response value (Cum die) is about 3.6um.

In order to eliminate the impact of low-frequency vibration on the mask table 840, the applicant prepared the shock absorber 890 parameters at 18 Hz, the damping ratio was 0.2, and the total mass of the mask table system was about 3.48 tons. The calculation formulas for stiffness and damping are as follows: K = ( 2 πf ) ² MC = 2 ξ (2 πf _n ) M

Among them, K is the stiffness, M is the quality, C is the damping, ξ is the damping rate, f and fn are the frequency of the shock absorber, then the total stiffness of the shock absorber 890 is 44448.75N/mm, the total damping is 157.2N/ (mm/s).

The response value of the position of interest after adding the shock absorber 890 is shown in FIG. 10. FIG. 10 is the response curve at the point of interest of the mask table 840 in the mask table system in the second embodiment of the present invention. The response curve after the amplifier is the first curve A1, and the response curve without the shock absorber at the point of interest is the second curve A2. Comparing the first curve A1 and the second curve A2, it can be seen that after the shock absorber 890 is added, the vibration around 30 Hz has been Completely eliminated, the vibration around 10~20Hz is also partially eliminated, and the overall response value has been reduced to less than 1/3 when no shock absorber 890 is added.

In this embodiment, the use range of the shock absorber is preferably 10 to 50 Hz.

In this embodiment, the acceleration sensor is preferably disposed near the first mounting frame 831 and the second mounting frame 832 near the shock absorber, so that the first acceleration sensor 861 and the second acceleration sensor The vibration detected by the detector 862 is closer to the vibration transmitted by the first mounting frame 831 and the second mounting frame 832 to the first coarse motion module 810 and the second coarse motion module 820 to improve the first The frame acceleration feedforward unit 875 and the second frame acceleration feedforward unit 885 compensate the motion of the first coarse motion module 810 and the second coarse motion module 820, thereby improving the motion of the mask table 840 control system The control accuracy of the control device, while improving the motion accuracy of the mask table system.

[Embodiment 3]

This embodiment provides a motion control method of the motion control device in the mask stage system in the above embodiment. Before the motion control device works, it sends a motion trajectory signal, a motion trajectory acceleration signal of the first coarse motion module 810 and a motion trajectory acceleration signal of the second coarse motion module 820 to the motion control device, and sends the first position information And the second position information to the motion control device, sending acceleration information of the first mounting frame 831 and the second mounting frame 832 to the motion control device.

The motion control method includes the following steps:

In step S10, the first position feedback unit converts the first position information and motion track signal into first drive information; the second position feedback unit converts the second position information and motion track signal into second drive information; first track The acceleration feedforward unit 873 processes the motion trajectory acceleration signal of the first coarse motion module 810 and outputs first corrected driving information; the second trajectory acceleration feedforward unit 883 processes the motion trajectory acceleration signal of the second coarse motion module 820 and Output the third modified driving information; the first frame acceleration feedforward unit 875 processes the acceleration information of the first mounting frame 831 and outputs the second modified driving information; the second frame acceleration feedforward unit 885 processes the acceleration information of the second mounting frame 832 and Output fourth correction drive information.

Wherein, in step S10, the first position feedback unit converts the first position information and motion track signal into first drive information and the second position feedback unit converts the second position information and motion track signal into second drive information. :

First, the first subtraction operation module 871 subtracts the first position information and the movement track signal and outputs the first deviation information, and the second subtraction operation module 881 performs the subtraction operation on the second position information and the movement track signal, and Output second deviation information.

Next, the first feedback controller 872 processes the first deviation information and outputs first drive information, and the second feedback controller 882 processes the second deviation information and outputs second drive information.

In step S20, the first addition operation module 874 adds the first drive information, the first modified drive information, and the second modified drive information, and outputs a first motion control signal; the second addition operation module 884 adds the first The second driving information, the third modified driving information and the fourth modified driving information are added, and a second motion control signal is output.

In step S30, the first coarse motion module 810 is controlled by a first motion control signal, and the second coarse motion module 820 is controlled by a second motion control signal.

The above description is only a description of the preferred embodiments of the present invention, and does not limit the scope of the present invention. Any changes or modifications made by those of ordinary skill in the art based on the above disclosure shall fall within the protection scope of the claims.

810‧‧‧First coarse motion module

820‧‧‧ Second coarse motion module

840‧‧‧Mask

851‧‧‧The first detection module

852‧‧‧Second inspection module

861‧‧‧First acceleration sensor

862‧‧‧Second acceleration sensor

871‧‧‧ First subtraction arithmetic module

872‧‧‧First feedback controller

873‧‧‧The first track acceleration feedforward unit

874‧‧‧The first addition module

875‧‧‧ First frame acceleration feedforward unit

876‧‧‧First Current Loop

881‧‧‧ Second subtraction arithmetic module

882‧‧‧Second feedback controller

883‧‧‧The second track acceleration feedforward unit

884‧‧‧The second addition module

885‧‧‧The second frame acceleration feedforward unit

886‧‧‧second current loop

Claims (10)

A motion control device is used to control a first motion module and a second motion module to move synchronously. The first motion module and the second motion module are respectively disposed on a first mounting frame and a second mounting On the frame, the motion control device includes: a first position feedback unit for performing feedback control to make the position of the first motion module and a motion track signal meet preset requirements; a first track acceleration feedforward unit, A feedforward control for compensating the position control delay of the first motion module; a first frame acceleration feedforward unit for compensating the vibration of the first mounting frame for the position control of the first motion module Disturbance feedforward control; a first addition module for superimposing information output by the first position feedback unit, the first trajectory acceleration feedforward unit and the first frame acceleration feedforward unit, and output for control A signal of the movement of the first motion module; a second position feedback unit for performing feedback control so that the position of the second motion module and the motion track signal meet preset requirements; a second track acceleration feedforward unit , Used to perform feedforward control that compensates for the position control delay of the second motion module; a second frame acceleration feedforward unit, used to perform compensation for the position of the second coarse motion module by vibration of the second mounting frame Disturbance-feedforward control is controlled; and a second addition module is used to superimpose the information output by the second position feedback unit, the second trajectory acceleration feedforward unit and the second frame acceleration feedforward unit, and output A signal used to control the movement of the second motion module. The motion control device according to claim 1, wherein the first position feedback unit includes a first subtraction operation module and a first feedback controller, and the first subtraction operation module is used to apply the motion trajectory signal and the first The position information of a motion module is subtracted and outputs a first deviation information. The first feedback controller is used to process the first deviation information and output a first drive information; the first trajectory acceleration feedforward unit is used to Process a motion trajectory acceleration signal of the first motion module and output a first modified driving information; the first frame acceleration feedforward unit is used to process an acceleration information of the first mounting frame and output a second modified driving information The first addition operation module is used to add the first drive information, the first correction drive information and the second correction drive information, and output a signal to control the movement of the first motion module; the second The position feedback unit includes a second subtraction operation module and a second feedback controller. The second subtraction operation module is used to perform subtraction operation on the motion track signal and the position information of the second motion module, and output a Second deviation information, the second feedback controller is used to process the second deviation information and output a second driving information; the second trajectory acceleration feedforward unit is used to process a trajectory acceleration signal of the second motion module and Output a third modified driving information; the second frame acceleration feedforward unit is used to process an acceleration information of the second mounting frame and output a fourth modified driving information; the second addition module is used to convert the second The driving information, the third modified driving information and the fourth modified driving information are added, and a signal to control the movement of the second motion module is output. The motion control device according to claim 1, wherein the first motion module is connected to the first mounting frame by a first shock absorber provided on the first mounting frame, and the second motion module is A second shock absorber provided on the second mounting frame is connected to the second mounting frame. A motion control method for a motion control device according to any one of claims 1 to 3, the motion control method includes: performing feedback control such that the position of the first motion module and the motion trajectory signal meet preset requirements; and performing compensation Delayed feedforward control of the position control of the first motion module; performing feedforward control that compensates for the vibration of the first mounting frame to disturb the position control of the first motion module; superposition The position and the motion track signal satisfy the preset requirements of the feedback control, the feedforward control that compensates the position control delay of the first motion module, and the compensation of the vibration of the first mounting frame disturb the position control of the first motion module The feed-forward control outputs information separately, and outputs signals for controlling the movement of the first motion module; executes feedback control to make the position of the second motion module and the motion trajectory signal meet preset requirements; Delayed feedforward control of the position control of the second motion module; performing feedforward control that compensates for the vibration of the second mounting frame to disturb the position control of the second motion module; superimposing the position of the second motion module Feedback control that meets the preset requirements with the motion trajectory signal, feedforward control that compensates for the position control delay of the second motion module, and compensation for vibration of the second mounting frame that disturb the position control of the second motion module The feedforward control separately outputs information and outputs signals for controlling the movement of the second motion module. The motion control method according to claim 4, wherein performing feedback control to make the position of the first motion module and the motion trajectory signal meet preset requirements includes: the motion trajectory signal and the position information of the first motion module Performing subtraction and outputting the first deviation information, processing the first deviation information and outputting the first driving information; performing feedforward control to compensate for the position control delay of the first motion module includes: processing the first motion module The motion trajectory acceleration signal and output the first modified driving information; performing feed-forward control that compensates for the vibration of the first mounting frame to disturb the position control of the first motion module includes: processing the first mounting frame Acceleration information and output the second modified driving information; superposition feedback control to make the position of the first motion module and the motion track signal meet the preset requirements, feedforward control to compensate the position control delay of the first motion module, and Compensating the vibration of the first mounting frame to the information output by the feedforward control that disturbs the position control of the first motion module, and outputting a signal for controlling the motion of the first motion module includes: driving the first drive module Information, the first modified driving information and the second modified driving information are added, and output a signal to control the movement of the first motion module; the execution makes the position of the second motion module and the motion trajectory signal satisfy the preset The required feedback control includes: subtracting the motion trajectory signal and the position information of the second motion module, and outputting the second deviation information, processing the second deviation information and outputting the second driving information; performing compensation for the The delayed feedforward control of the position control of the second motion module includes: processing the motion trajectory acceleration signal of the second motion module and outputting the third modified driving information; executing compensation for the vibration of the second mounting frame The feedforward control that generates disturbances by the position control of the two coarse motion modules includes: processing the acceleration information of the second mounting frame and outputting the fourth modified driving information; superimposing the position of the second motion module and the motion trajectory signal The feedback control that meets the preset requirements, the feed-forward control that compensates for the position control delay of the second motion module, and the feed-forward control that compensates for the vibration of the second mounting frame that disturbs the position control of the second motion module are output separately And output signals for controlling the movement of the second motion module include: adding the second driving information, the third modified driving information and the fourth modified driving information, and outputting and controlling the second motion Signal of module movement. A mask table system includes a first mounting frame, a second mounting frame, a first motion module disposed on the first mounting frame, and a second motion module disposed on the second mounting frame And the motion control device according to any one of claims 1 to 3. The mask stage system of claim 6, wherein the mask stage system further includes a mask stage, a first detection module, a second detection module, a first acceleration sensor, and a second acceleration Sensors; the first motion module and the second motion module are used to drive the mask table; the first detection module is used to detect the position information of the mask table near the first motion module As the position information of a first motion module, the second detection module is used to detect the position information of the mask table near the second motion module and used as the position information of the second motion module; An acceleration sensor is disposed on the first mounting frame, the first acceleration sensor is used to detect acceleration information of the first mounting frame, and transmit the acceleration information of the first mounting frame to the motion control device, the The second acceleration sensor is disposed on the second mounting frame. The second acceleration sensor is used to detect acceleration information of the second mounting frame and transmit the acceleration information of the second mounting frame to the motion control device. The mask table system of claim 6, wherein the first motion module is connected to the first mounting frame through a first shock absorber provided on the first mounting frame, and the second motion module is A second shock absorber provided on the second mounting frame is connected to the second mounting frame. The mask table system according to claim 8, wherein the shock absorption range of the first shock absorber and the second shock absorber are both 10 to 50 Hz. A photo-etching machine comprising the mask stage system of any one of claims 6 to 9.

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