CN110280534A - A kind of cleaning systems of mask plate and the clean method of mask plate - Google Patents
A kind of cleaning systems of mask plate and the clean method of mask plate Download PDFInfo
- Publication number
- CN110280534A CN110280534A CN201910567870.XA CN201910567870A CN110280534A CN 110280534 A CN110280534 A CN 110280534A CN 201910567870 A CN201910567870 A CN 201910567870A CN 110280534 A CN110280534 A CN 110280534A
- Authority
- CN
- China
- Prior art keywords
- mask plate
- cleaning
- assembly
- residue
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid; Regenerating cleaning liquids
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B7/00—Cleaning by methods not provided for in a single other subclass or a single group in this subclass
- B08B7/02—Cleaning by methods not provided for in a single other subclass or a single group in this subclass by distortion, beating, or vibration of the surface to be cleaned
- B08B7/026—Using sound waves
- B08B7/028—Using ultrasounds
Abstract
The present invention provides a kind of cleaning systems of mask plate and the clean method of mask plate, and the cleaning systems of the mask plate include fuel assembly and cleaning assembly；Wherein, fuel assembly is used to apply electric current to mask plate, so that the attachment on mask plate burns to form residue, fuel assembly includes power supply and electrode holder, and electrode holder is electrically connected with the power supply, for fixing mask plate；Cleaning assembly is for cleaning the residue on mask plate.The clean method of mask plate provided by the invention, electric current is applied to mask plate by power supply, during applying electric current to mask plate, the temperature of mask plate can be increased, to make the fiber attachment on mask plate reach burning point and burn to form residue, convenient for effectively completely removing fiber attachment.
Description
Technical field
The present invention relates to the cleaning sides of the cleaning systems and mask plate of field of display technology more particularly to a kind of mask plate
Method.
Background technique
When manufacturing organic light emitting display, it is usually logical using mask plate that the pattern of the light-emitting components such as R, G, B, which is formed,
Cross vacuum vapour deposition realization.Mask plate is usually made of iron-nickel alloy etc., and by the sheet metal structure of tens of μm of left and right thicknesses
At.On mask plate, as mask pattern, formed by multiple small pixel openings with small spacing interval.When vapor deposition, pass through
So that evaporation material is gasified or even is distilled from evaporation source, is allowed to be attached on substrate through mask plate, forms rule on a surface of a substrate
The pattern of fixed thin-film luminous element.
During before being deposited using mask plate or after vapor deposition, mask plate in the handling process, usually has fibre
Dimension attachment is attached on mask plate under electrostatic force, or even is attached in the small pixel openings of mask plate, to steaming
The precision of depositing process impacts, and existing cleaning process can not effectively completely remove the above fiber attachment.
Summary of the invention
In view of this, the embodiment of the present invention provides a kind of cleaning systems of mask plate and the clean method of mask plate, with solution
The technical issues of fiber attachment being certainly attached on mask plate in mask plate handling process can not be completely removed effectively.
The embodiment of the invention provides a kind of cleaning systems of mask plate, comprising: fuel assembly, the fuel assembly are used for
Electric current is applied to the mask plate, so that the attachment on the mask plate burns to form residue, the fuel assembly includes
Power supply and electrode holder, the electrode holder and the power supply are electrically connected, for fixing the mask plate；Cleaning assembly, institute
Cleaning assembly is stated for cleaning to the residue on the mask plate.
Preferably, the cleaning assembly includes cleaning solution and oscillation device, and the oscillation device immerses in the cleaning solution,
The oscillation device is used to apply vibration force to the mask plate, and the residue on the mask plate is made to fall off.
Preferably, be provided with liquid outlet and liquid inlet on the cleaning assembly, the cleaning assembly further include circulating pump and
Filter device, the circulating pump and the filter device are connected with each other, and are set between the liquid outlet and the liquid inlet,
Wherein, the filter device is connect with the liquid outlet, and the circulating pump is connect with the liquid inlet.
Preferably, the oscillation device is ultrasonator.
Preferably, exhaust apparatus is additionally provided on the fuel assembly.
Preferably, the cleaning systems further include transfer assembly, and the transfer assembly will be for that will have the residue
The mask plate is sent to the cleaning assembly by the fuel assembly.
Present invention implementation additionally provides a kind of clean method of mask plate, includes the following steps:
The mask plate is placed in cleaning systems, the cleaning systems include fuel assembly and cleaning assembly, the combustion
Burning component includes power supply and electrode holder, and the electrode holder and the power supply are electrically connected, for fixing the mask plate；
Use the fixed mask plate of the electrode holder；
The power supply is connected, electric current is applied to the mask plate by the power supply, so that the attachment on the mask plate
Object burns to form residue；
The power supply is closed, and the mask plate is turned into the transmission cleaning assembly and is cleaned.
Preferably, the cleaning assembly includes cleaning solution and oscillation device, and the oscillation device immerses in the cleaning solution；
It is further comprising the steps of after the mask plate is sent to the cleaning assembly: the vibration by adjusting the oscillation device
Intensity and frequency make the residue on the mask plate fall off to mask plate application vibration force.
Preferably, be provided with liquid outlet and liquid inlet on the cleaning assembly, the cleaning assembly further include circulating pump and
Filter device, the circulating pump and the filter device are connected with each other and are set between the liquid outlet and the liquid inlet,
Wherein, the filter device is connect with the liquid outlet, and the circulating pump is connect with the liquid inlet；By adjusting the vibration
The oscillation intensity and frequency for swinging device make the residue on the mask plate fall off to mask plate application vibration force
Afterwards, further comprising the steps of: to make the cleaning solution going out by the cleaning assembly using the circulating pump and the filter device
The outflow of liquid mouth, and the cleaning assembly is flowed by the circulating pump and the liquid inlet using passing through after filter device filtering.
Preferably, further include the steps that being dried to using the mask plate after cleaning assembly cleaning.
A kind of cleaning systems of mask plate provided in an embodiment of the present invention and the clean method of mask plate, by power supply to covering
Film version applies electric current, so that the fiber attachment on mask plate burns to form residue, it is attached convenient for effectively completely removing fiber
Object.Further, the gas that the exhaust apparatus at the top of fuel assembly can be generated with the burning of venting fiber attachment, avoids gas
In particle fuel assembly internal environment is impacted；Further, pass through the oscillation device pair in cleaning assembly
Mask plate applies vibration force, and the residue on mask plate can be made more easily broken and fallen off, further reach and effectively go completely
Except the purpose of fiber attachment.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, required use in being described below to embodiment
Attached drawing be briefly described, it should be apparent that, drawings in the following description are some embodiments of the invention, for ability
For the those of ordinary skill of domain, without creative efforts, it can also be obtained according to these attached drawings other attached
Figure.
Fig. 1 is the fuel assembly schematic diagram of the cleaning systems of mask plate provided in an embodiment of the present invention；
Fig. 2 is the cleaning assembly schematic diagram of the cleaning systems of mask plate provided in an embodiment of the present invention；
Fig. 3 is the clean method of mask plate provided in an embodiment of the present invention.
Description of symbols:
1, fuel assembly；2, cleaning assembly；3, mask plate；4, cover board；5, exhaust apparatus；6, electrode holder；7, power supply；8,
Seal；9, oscillation device；10, circulating pump；11, cleaning solution；12, filter device；13, liquid outlet；14, liquid inlet.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.Based on the embodiments of the present invention, those of ordinary skill in the art
Every other embodiment obtained without creative efforts, shall fall within the protection scope of the present invention.
Embodiment one
It is as shown in Figure 1 the fuel assembly schematic diagram of cleaning systems provided in an embodiment of the present invention；It is illustrated in figure 2 this hair
The cleaning assembly schematic diagram for the cleaning systems that bright embodiment provides.
During before being deposited using mask plate 3 or after vapor deposition, mask plate 3 in the handling process, is usually had
Fiber attachment is attached on mask plate 3 under the action of electrostatic force, and the fiber attachment being attached on mask plate 3 is difficult completely
Removal.The main component of fiber attachment is polyester fiber (terylene), and the burning point of polyester fiber is 550 DEG C or so, the present embodiment
Apply certain electric current to mask plate 3 by power supply 7, and the temperature of mask plate can be increased with the increase of electric current, work as exposure mask
When the temperature of version is increased to the ignition temperature of polyester fiber, the fiber attachment being attached on mask plate 3 can reach burning point and fire
It burns, will form the carbide of black after burning, for the carbide relative fiber of the black, the electrostatic force phase between mask plate
To smaller, therefore the adhesive force on mask plate is relatively small, therefore is easier to remove.Certainly, the ingredient of fiber attachment can
It can further include other fibers, be not specifically limited herein, as long as the temperature of mask plate is enough after by applying electric current to mask plate
Reach the burning point of fiber attachment and fiber attachment is made to burn.In addition, the temperature of mask plate is excessively high and right in order to prevent
Mask plate is damaged or is impacted to the precision of mask plate, and the electric current being applied on mask plate should not be too large, and is typically chosen
The voltage of power supply is 5V-15V, electric current 300A-500A, and the size of the specific value and mask plate of the supply voltage and electric current is big
It is small related to shape, suitable voltage and current can be chosen according to the actual situation.
Fig. 1-Fig. 2 is please referred to, the present embodiment provides a kind of cleaning systems of mask plate, including fuel assembly 1 and cleaning group
Part 2, wherein fuel assembly 1 is used to apply electric current to mask plate 3, so that the attachment on mask plate 3 burns to form residue,
Fuel assembly 1 includes power supply 7 and electrode holder 6, and electrode holder 6 and power supply 7 are electrically connected, for fixing mask plate 3；Cleaning group
Part 2 is for cleaning the residue on mask plate 3.
Fig. 1 is please referred to, a kind of fuel assembly of the cleaning systems of mask plate provided in an embodiment of the present invention is using electrode
When the fixed mask plate 3 of fixture 6, the quantity of electrode holder can be a pair, or two pairs, three pairs, four pairs or multipair, can be with
Electrode holder 6 is fixed on to any lateral location of mask plate 3, it can also be in the fixed electricity of each lateral location of mask plate 3
Pole fixture 6.A pair of electrodes fixture 6 is respectively set in four sides of mask plate 3, can by adjust electrode voltage size,
There is change different zones current strength with stressing, so as to pass through power supply 7 according to actual needs to the different positions of mask plate 3
It sets and applies different electric currents, so that the fiber attachment on mask plate 3 at different location burns to form residue, convenient for effectively
Completely remove fiber attachment.
In the present embodiment, seal 8 is equipped in fuel assembly 1, seal 8 is used to fix electrode holder 6, while can
To prevent electrode holder 6 to be electrically connected with fuel assembly 1, to guarantee normally to be electrically connected between power supply 7 and electrode holder 3
It connects.
Please continue to refer to Fig. 1, at the top of fuel assembly 1 be equipped with cover board 4, using cover board 4 to fuel assembly internal environment into
Row isolation can prevent external particle from entering fuel assembly, while being conducive to fuel assembly internal temperature and stablizing, and further promote
Into the burning of fiber attachment.In the present embodiment, exhaust apparatus 5 is provided on cover board 4, fiber attachment is in combustion
Gas can be generated, by the way that exhaust apparatus 5 is arranged on the cover board at the top of fuel assembly, the gas that can in time generate burning is arranged
Out, prevent the particle in gas from impacting to fuel assembly internal environment.Certainly, the setting position of exhaust apparatus 5 is not
It is only limited on cover board 4, in the settable exhaust apparatus 5 of any part of fuel assembly 1, as long as can guarantee can will burn
The gas of generation is discharged, and is not limited thereto.
Referring to figure 2., the cleaning assembly of the cleaning systems of a kind of mask plate provided in an embodiment of the present invention, the cleaning assembly
2 include cleaning solution 11 and oscillation device 9, and oscillation device 9 immerses in cleaning solution 11, and oscillation device 9, which is used to apply mask plate 3, to shake
Power makes the residue on mask plate 3 fall off.Vibration force is applied to mask plate 3 by the oscillation device 9 in cleaning assembly 2, it can
So that the residue on mask plate 3 is broken, and broken residue is easier to fall off, therefore can further reach effectively completely
Remove the purpose of fiber attachment.
In the present embodiment, liquid outlet 13 and liquid inlet 14 are provided on cleaning assembly 2, which further includes circulation
Pump 10 and filter device 12, circulating pump 10 and filter device 12 are connected with each other, and are set between liquid outlet 13 and liquid inlet 14,
Wherein, filter device 12 is connect with liquid outlet 13, and circulating pump 10 is connect with liquid inlet 14.Filter device 12 and circulating pump 10 connect
Connect, and be set between the liquid outlet 13 of cleaning assembly 2 and circulating pump 10, for from the cleaning solution 11 that liquid outlet 13 is discharged into
Row filtering, circulating pump 10 will be pumped into cleaning assembly 2 again through liquid inlet 14 using the filtered cleaning solution 11 of filter device 12
In.Circulating pump 10 and filter device 12 are provided commonly for flowing out cleaning solution 11 by the liquid outlet 13 of cleaning assembly 2, and by cleaning group
The liquid inlet 14 of part 2 back flows back into cleaning assembly 2, and the circulating pump 10 and filter device 12 in the present embodiment can guarantee cleaning solution
In residue in time by filtering be discharged, prevent from causing secondary pollution to the mask plate after cleaning, further improve cleaning effect,
Cleaning solution 11 can be saved simultaneously, pollution caused by the discharge of cleaning solution 11 can also be reduced.
In the present embodiment, oscillation device 9 can be ultrasonator, and ultrasonator can be arranged in mask plate 3
Any lateral location, it is of course also possible to each lateral location in mask plate 3 is respectively provided with ultrasonator, it is different by adjusting
The oscillation intensity of ultrasonator can have and carry out oscillation disengaging to the residue on mask plate 3 with stressing.Ultrasonator can
Vibrational energy is provided to mask plate 3, by changing the oscillation intensity of ultrasonator and the disengaging of the adjustable residue of frequency
Speed, it should be noted that the intrinsic frequency for needing to avoid mask plate 3 when adjusting frequency prevents resonance and causes exposure mask
Version 3 is damaged.
In the present embodiment, in order to reach better vibration washing effect, while the destruction to mask plate is vibrated in order to prevent
Effect, the vibration frequency of oscillation device 9 is selected as 60kHz-170kHz, it is preferable that vibration frequency can be set to 80kHZ,
120kHZ；The oscillation intensity of oscillation device 9 also can not be excessive, and the size of oscillation intensity is by the power decision needed for vibrating, generally
It is 300W-400W by power setting, it is preferable that can be 350W by power setting.
In the present embodiment, cleaning solution can be water, be also possible to organic solvent, such as alcohol organic solvent, including methanol,
Ethyl alcohol, ethylene glycol etc..
In the present embodiment, mask plate 3 can be metal mask version, more specifically, can be fine metal mask version
(FMM)。
In the present embodiment, cleaning systems further include transfer assembly (attached to be not shown in the figure), and transfer assembly will be for that will have combustion
The mask plate 3 of residue after burning is sent to cleaning assembly 2 by fuel assembly 1.Transfer assembly can be for set on 1 He of fuel assembly
The direct transmission device of cleaning assembly 2, such as transmission crawler belt, are also possible to robot device, are not specifically limited herein, as long as
Mask plate can be transmitted.
In one embodiment, fuel assembly 1 and cleaning assembly 2 can be located in two different chambers, and mask plate 3 utilizes
Fuel assembly 1 is powered in a chamber to burn to fiber attachment, then such as transmits crawler belt by transmission device
Or the mask plate 3 with the residue after burning is sent in another chamber with cleaning assembly 2 and carries out into one by manipulator
Step cleaning；In another embodiment, fuel assembly 1 and cleaning assembly 2 can also be located in the same chamber, and have in chamber
To burn to fiber attachment, then storage device, first mask plate 3 are powered in the chamber using fuel assembly 1
The mask plate 3 with the residue after burning is gripped using transfer assembly such as manipulator, while utilizing the receipts in chamber
Device of receiving stores power supply, the electrode holder etc. of fuel assembly 1, and after the completion of storage, which can be used as cleaning assembly 2
Wash chamber, further to be cleaned to the mask plate 3 of residue after burning.
In the present embodiment, electric current is applied to mask plate 3 by power supply 7, the shape so that the fiber attachment on mask plate 3 burns
At residue, convenient for effectively completely removing fiber attachment.Further, the exhaust apparatus 5 being arranged on fuel assembly 1 can be with
The gas that the burning of fiber attachment generates is discharged, the particle in gas is avoided to impact 1 internal environment of fuel assembly；
Further, vibration force is applied to mask plate 3 by the oscillation device 9 in cleaning assembly 2, can made residual on mask plate 3
It stays object more easily broken and falls off, further achieve the purpose that effectively to completely remove fiber attachment.
Embodiment two
3 are please referred to, present invention implementation additionally provides a kind of clean method of mask plate, includes the following steps:
Mask plate 3 is placed in cleaning systems by S1, and cleaning systems include fuel assembly 1 and cleaning assembly 2, fuel assembly 1
Including power supply 7 and electrode holder 6, electrode holder 6 and power supply 7 are electrically connected, for fixing mask plate 3；
S2 uses the fixed mask plate 3 of electrode holder 6；
S3 powers on 7, applies electric current to mask plate 3 by power supply 7, so that the attachment on mask plate 3 burns to be formed
Residue；
S4 closes power supply 7, and mask plate 3 is sent to cleaning assembly 2 and is cleaned.
In the present embodiment, in mask plate 3 fixed using electrode holder 6, the quantity of electrode holder can be a pair, can also
Think two pairs, three pairs, four pairs or multipair, electrode holder 6 can be fixed on to any lateral location of mask plate 3, it can also be
The fixed electrode holder 6 of every a side of mask plate 3.A pair of electrodes fixture 6 is respectively set in four sides of mask plate 3, it can
To have change different zones current strength with stressing, so as to according to actual needs by the size for adjusting electrode voltage
Apply different electric currents by different location of the power supply 7 to mask plate 3, so that the fiber on mask plate 3 at different location adheres to
Object burns to form residue, convenient for effectively completely removing fiber attachment.
In the present embodiment, certain electric current is applied to mask plate 3 by power supply 7, and the temperature of mask plate can be with electric current
Increase and increase, when the temperature of mask plate is increased to the ignition temperature of polyester fiber, the fiber being attached on mask plate 3 is attached
Object can reach burning point and burn, will form the carbide of black after burning, for the carbide relative fiber of the black, covering
Adhesive force in film version is relatively small, therefore is easier to remove.The main component of fiber attachment is polyester fiber (terylene), is gathered
The burning point of ester fiber is 550 DEG C or so, and certainly, the ingredient of fiber attachment may further include other fibers, is not made herein specific
It limits, as long as the temperature of mask plate sufficiently achieves the burning point of fiber attachment and makes fiber after by applying electric current to mask plate
Attachment burning.In addition, the temperature of mask plate is excessively high and damage to mask plate or to the essence of mask plate in order to prevent
Degree impacts, and the electric current being applied on mask plate should not be too large, and the voltage for being typically chosen power supply is 5V-15V, and electric current is
The specific value of 300A-500A, the supply voltage and electric current is related to the size of mask plate and shape, can be according to reality
Situation chooses suitable voltage and current.
In the present embodiment, after closing power supply 7, mask plate 3 is transferred to cleaning assembly 2 using transfer assembly.Transfer assembly
It can be also possible to robot device for set on fuel assembly 1 and the direct transmission device of cleaning assembly 2, such as transmission crawler belt,
It is not specifically limited herein, as long as can be transmitted to mask plate.
In the present embodiment, cleaning assembly 2 includes cleaning solution 11 and oscillation device 9, and oscillation device 9 immerses in cleaning solution 11；
It is further comprising the steps of after mask plate 3 is sent to cleaning assembly 2: oscillation intensity and frequency by adjusting oscillation device 9
Apply vibration force to mask plate 3, the residue on mask plate 3 is made to fall off.Oscillation device 9 is used to apply vibration force to mask plate 3,
The residue on mask plate 3 is set to fall off.Vibration force is applied to mask plate 3 by the oscillation device 9 in cleaning assembly 2, can be made
Residue on mask plate 3 is broken, and broken residue is easier to fall off, therefore can further reach and effectively completely remove
The purpose of fiber attachment.
In the present embodiment, oscillation device 9 can be ultrasonator, and ultrasonator can be arranged in mask plate 3
Any lateral location, it is of course also possible to each lateral location in mask plate 3 is respectively provided with ultrasonator, it is different by adjusting
The oscillation intensity of ultrasonator can have and carry out oscillation disengaging to the residue on mask plate 3 with stressing.Ultrasonator can
Vibrational energy is provided to mask plate 3, by changing the oscillation intensity of ultrasonator and the disengaging of the adjustable residue of frequency
Speed, it should be noted that the intrinsic frequency for needing to avoid mask plate 3 when adjusting frequency prevents resonance and causes exposure mask
Version 3 is damaged.
In the present embodiment, in order to reach better vibration washing effect, while the destruction to mask plate is vibrated in order to prevent
Effect, the vibration frequency of oscillation device 9 is selected as 60kHz-170kHz, it is preferable that vibration frequency can be set to 80kHZ,
120kHZ；The oscillation intensity of oscillation device 9 also can not be excessive, and the size of oscillation intensity is by the power decision needed for vibrating, generally
It is 300W-400W by power setting, it is preferable that can be 350W by power setting.
In the present embodiment, liquid outlet 13 and liquid inlet 14 are provided on cleaning assembly 2, which further includes circulation
Pump 10 and filter device 12, circulating pump 10 and filter device 12 are connected with each other and are set between liquid outlet 13 and liquid inlet 14,
Wherein, filter device 12 is connect with liquid outlet 13, and circulating pump 10 is connect with liquid inlet 14；In the vibration by adjusting oscillation device 9
Fatigue resistance and frequency are further comprising the steps of after so that the residue on mask plate 3 is fallen off: to utilize to the application vibration force of mask plate 3
After circulating pump 10 and filter device 12 flow out cleaning solution 11 by the liquid outlet of cleaning assembly 2, and utilization filter device 12 filters
Cleaning assembly 2 is flowed into via circulating pump 10 and liquid inlet 14.Circulating pump 10 and filter device 12 in the present embodiment can guarantee
Residue in cleaning solution is discharged by filtering in time, prevents from causing secondary pollution to the mask plate after cleaning, further improves clear
Effect is washed, while cleaning solution 11 can be saved, pollution caused by the discharge of cleaning solution 11 can also be reduced.
In the present embodiment, further include the steps that the mask plate 3 after cleaning using cleaning assembly 2 is dried.This implementation
In example, drying mode can choose to be dried using air knife, specifically, blows dry gas such as to mask plate surface by air knife
Any possible gas such as nitrogen, air is achieved the purpose that dry with accelerating the circulation of mask plate superficial air.Certainly, drying side
Formula also can choose heat drying, it is preferable that it can choose vacuum and heating drying, it, can be with by the way of vacuum and heating drying
Mask plate after guaranteeing cleaning is in nonpollution environment, is further ensured that the cleaning effect of mask plate.
In the present embodiment, electric current is applied to mask plate 3 by power supply 7, the shape so that the fiber attachment on mask plate 3 burns
At residue, convenient for effectively completely removing fiber attachment.Further, the exhaust apparatus 5 at 1 top of fuel assembly can be arranged
The gas that the burning of fiber attachment generates out, avoids the particle in gas from impacting 1 internal environment of fuel assembly；More
Further, vibration force is applied to mask plate 3 by the oscillation device 9 in cleaning assembly 2, the residual on mask plate 3 can be made
Object is more easily broken and falls off, and further achievees the purpose that effectively to completely remove fiber attachment.
The present invention can realize in other specific forms, without departing from its spirit and essential characteristics.Therefore, current reality
Apply example be all counted as being exemplary rather than in all respects it is limited, the scope of the present invention by appended claims rather than on
Description definition is stated, also, falls into the meaning of claim and whole changes in the range of equivalent to all be included in this
Among the range of invention.Also, the different technologies feature occurred in different embodiments can be beneficial to obtain into the first combination
Effect.Those skilled in the art will be understood that and realize disclosed on the basis of studying attached drawing, specification and claims
Embodiment other variation embodiments.
Claims (10)
1. a kind of cleaning systems of mask plate characterized by comprising
Fuel assembly, the fuel assembly is used to apply electric current to the mask plate, so that the attachment on the mask plate fires
Burning forms residue, and the fuel assembly includes power supply and electrode holder, and the electrode holder and the power supply are electrically connected, use
In the fixation mask plate；
Cleaning assembly, the cleaning assembly is for cleaning the residue on the mask plate.
2. the cleaning systems of mask plate according to claim 1, which is characterized in that the cleaning assembly include cleaning solution and
Oscillation device, the oscillation device immerse in the cleaning solution, and the oscillation device is used to apply vibration force to the mask plate,
The residue on the mask plate is set to fall off.
3. the cleaning systems of mask plate according to claim 2, which is characterized in that be provided with out liquid on the cleaning assembly
Mouth and liquid inlet, the cleaning assembly further include circulating pump and filter device, and the circulating pump is mutually interconnected with the filter device
It connects, and is set between the liquid outlet and the liquid inlet, wherein the filter device is connect with the liquid outlet, described
Circulating pump is connect with the liquid inlet.
4. the cleaning systems of mask plate according to claim 2 or 3, which is characterized in that the oscillation device is ultrasound vibration
Swing device.
5. the cleaning systems of mask plate according to claim 1, which is characterized in that be additionally provided with exhaust on the fuel assembly
Device.
6. the cleaning systems of mask plate according to claim 1, which is characterized in that the cleaning systems further include transmission group
Part, the transfer assembly are used to the mask plate with the residue being sent to the cleaning group by the fuel assembly
Part.
7. a kind of clean method of mask plate, which comprises the steps of:
The mask plate is placed in cleaning systems, the cleaning systems include fuel assembly and cleaning assembly, the burning group
Part includes power supply and electrode holder, and the electrode holder and the power supply are electrically connected, for fixing the mask plate；
Use the fixed mask plate of the electrode holder；
The power supply is connected, electric current is applied to the mask plate by the power supply, so that the attachment on the mask plate fires
Burning forms residue；
The power supply is closed, and the mask plate is sent to the cleaning assembly and is cleaned.
8. the clean method of mask plate according to claim 7, which is characterized in that the cleaning assembly include cleaning solution and
Oscillation device, the oscillation device immerse in the cleaning solution；After the mask plate is sent to the cleaning assembly, also wrap
Include following steps: oscillation intensity and frequency by adjusting the oscillation device make described to mask plate application vibration force
The residue on mask plate falls off.
9. the clean method of mask plate according to claim 8, which is characterized in that be provided with out liquid on the cleaning assembly
Mouth and liquid inlet, the cleaning assembly further include circulating pump and filter device, and the circulating pump is mutually interconnected with the filter device
It connects and is set between the liquid outlet and the liquid inlet, wherein the filter device is connect with the liquid outlet, described to follow
Ring pump is connect with the liquid inlet；Apply in the oscillation intensity and frequency by the adjusting oscillation device to the mask plate and shakes
Power, it is further comprising the steps of after so that the residue on the mask plate is fallen off: to utilize the circulating pump and the filtering
Device flows out the cleaning solution by the liquid outlet of the cleaning assembly, and is followed using passing through after filter device filtering by described
Ring pump and the liquid inlet flow into the cleaning assembly.
10. the clean method of mask plate according to claim 9, which is characterized in that further include to the utilization cleaning group
The step of mask plate after part cleaning is dried.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910567870.XA CN110280534A (en) | 2019-06-27 | 2019-06-27 | A kind of cleaning systems of mask plate and the clean method of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910567870.XA CN110280534A (en) | 2019-06-27 | 2019-06-27 | A kind of cleaning systems of mask plate and the clean method of mask plate |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN110280534A true CN110280534A (en) | 2019-09-27 |
Family
ID=68019262
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910567870.XA Pending CN110280534A (en) | 2019-06-27 | 2019-06-27 | A kind of cleaning systems of mask plate and the clean method of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110280534A (en) |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920007423B1 (en) * | 1990-03-17 | 1992-08-31 | 삼성전관 주식회사 | Excluding method of dust of shadow mask |
| US5258164A (en) * | 1991-04-05 | 1993-11-02 | Minnesota Mining And Manufacturing Company | Electrically regenerable diesel particulate trap |
| JPH1089050A (en) * | 1996-09-11 | 1998-04-07 | Nhk Spring Co Ltd | Filter device for exhaust gas |
| JPH11304207A (en) * | 1998-04-24 | 1999-11-05 | Sanyo Electric Co Ltd | Ventilation port body |
| JPH11348243A (en) * | 1998-06-11 | 1999-12-21 | Tietech Co Ltd | Metal mask plate cleaning device |
| CN201836923U (en) * | 2010-10-08 | 2011-05-18 | 陈培沦 | Manual/automatic cigarette lighter |
| KR101286125B1 (en) * | 2011-09-29 | 2013-07-15 | 박일환 | Automatic cleaning apparatus for mask |
| CN103469318A (en) * | 2013-09-03 | 2013-12-25 | 盐城市华普轻纺机械有限公司 | Calcination cleaning method of spinneret plate |
| CN105537194A (en) * | 2016-01-04 | 2016-05-04 | 京东方科技集团股份有限公司 | Washing device and washing method for mask and evaporation equipment |
-
2019
- 2019-06-27 CN CN201910567870.XA patent/CN110280534A/en active Pending
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR920007423B1 (en) * | 1990-03-17 | 1992-08-31 | 삼성전관 주식회사 | Excluding method of dust of shadow mask |
| US5258164A (en) * | 1991-04-05 | 1993-11-02 | Minnesota Mining And Manufacturing Company | Electrically regenerable diesel particulate trap |
| JPH1089050A (en) * | 1996-09-11 | 1998-04-07 | Nhk Spring Co Ltd | Filter device for exhaust gas |
| JPH11304207A (en) * | 1998-04-24 | 1999-11-05 | Sanyo Electric Co Ltd | Ventilation port body |
| JPH11348243A (en) * | 1998-06-11 | 1999-12-21 | Tietech Co Ltd | Metal mask plate cleaning device |
| CN201836923U (en) * | 2010-10-08 | 2011-05-18 | 陈培沦 | Manual/automatic cigarette lighter |
| KR101286125B1 (en) * | 2011-09-29 | 2013-07-15 | 박일환 | Automatic cleaning apparatus for mask |
| CN103469318A (en) * | 2013-09-03 | 2013-12-25 | 盐城市华普轻纺机械有限公司 | Calcination cleaning method of spinneret plate |
| CN105537194A (en) * | 2016-01-04 | 2016-05-04 | 京东方科技集团股份有限公司 | Washing device and washing method for mask and evaporation equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US7927066B2 (en) | Reflecting device, communicating pipe, exhausting pump, exhaust system, method for cleaning the system, storage medium storing program for implementing the method, substrate processing apparatus, and particle capturing component | |
| TWI352383B (en) | Apparatus and methods for treating substrates | |
| TWI226289B (en) | Liquid material discharging method, liquid material discharging apparatus, and electronic device manufactured thereby | |
| US8677929B2 (en) | Method and apparatus for masking solar cell substrates for deposition | |
| JP2015023048A (en) | Substrate processing device and substrate processing method | |
| CN101034662A (en) | Substrate processing system | |
| CN110280534A (en) | A kind of cleaning systems of mask plate and the clean method of mask plate | |
| JP5891085B2 (en) | Substrate processing apparatus and substrate processing method | |
| US20170192366A1 (en) | Device and method for cleaning mask plate and vapor deposition apparatus | |
| JP4975838B2 (en) | Mask cleaning method, mask cleaning apparatus and pellicle | |
| CN106164776A (en) | For cleaning the device of object | |
| JP5197118B2 (en) | Cleaning device | |
| TW200831204A (en) | Ultrasonic cleaning apparatus by using resonance | |
| KR100961469B1 (en) | Apparatus and method of cleaning substrate | |
| CN214950261U (en) | Graphite boat drying device | |
| CN108051954B (en) | Membrane plate cleaning device | |
| CN1279580C (en) | Substrate treating device and method thereof | |
| JP2012156561A (en) | Substrate processing method, and substrate processing apparatus | |
| JP2017167434A (en) | Cleaning method, cleaning device, and manufacturing method of camera module | |
| KR101648792B1 (en) | cleaning method of air flow sensor | |
| CN109830492B (en) | COB camera module and packaging method thereof | |
| KR101990583B1 (en) | Ultrasonic dry cleaning module and cleaning method using gas for large substrate | |
| JP2012197468A (en) | Vapor deposition device and vapor deposition method | |
| JP4992506B2 (en) | Fan filter unit | |
| JP2006058628A (en) | Electrodeposition mechanism of resist film, and method for producing quartz resonator using the same |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| RJ01 | Rejection of invention patent application after publication | ||
| RJ01 | Rejection of invention patent application after publication |
Application publication date: 20190927 |