CN108051954B - Membrane plate cleaning device - Google Patents
Membrane plate cleaning device Download PDFInfo
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- CN108051954B CN108051954B CN201810002297.3A CN201810002297A CN108051954B CN 108051954 B CN108051954 B CN 108051954B CN 201810002297 A CN201810002297 A CN 201810002297A CN 108051954 B CN108051954 B CN 108051954B
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- 239000012528 membrane Substances 0.000 title claims abstract description 105
- 238000004140 cleaning Methods 0.000 title claims abstract description 42
- 239000000843 powder Substances 0.000 claims abstract description 54
- 238000001179 sorption measurement Methods 0.000 claims abstract description 23
- 230000001678 irradiating effect Effects 0.000 claims abstract description 6
- 238000001514 detection method Methods 0.000 claims description 14
- 239000007788 liquid Substances 0.000 claims description 8
- 238000007639 printing Methods 0.000 claims description 8
- 238000002789 length control Methods 0.000 claims description 7
- 239000000126 substance Substances 0.000 description 5
- 238000000034 method Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 2
- 238000005265 energy consumption Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000004973 liquid crystal related substance Substances 0.000 description 1
- 239000011159 matrix material Substances 0.000 description 1
- 238000003909 pattern recognition Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 238000005728 strengthening Methods 0.000 description 1
- 230000003313 weakening effect Effects 0.000 description 1
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1303—Apparatus specially adapted to the manufacture of LCDs
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/133—Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
- G02F1/1333—Constructional arrangements; Manufacturing methods
- G02F1/1337—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers
- G02F1/13378—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation
- G02F1/133788—Surface-induced orientation of the liquid crystal molecules, e.g. by alignment layers by treatment of the surface, e.g. embossing, rubbing or light irradiation by light irradiation, e.g. linearly polarised light photo-polymerisation
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1316—Methods for cleaning the liquid crystal cells, or components thereof, during manufacture: Materials therefor
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Crystallography & Structural Chemistry (AREA)
- Optics & Photonics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Mathematical Physics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Laser Beam Processing (AREA)
- Cleaning In General (AREA)
Abstract
The invention discloses a membrane plate cleaning device, which comprises: the rotating device is used for installing the membrane plate and driving the membrane plate to rotate; the laser emitting device is positioned beside the rotating device and is used for emitting laser and irradiating the laser on the membrane plate so as to dry the solution attached to the membrane plate into powder and/or dry dirt attached to the membrane plate into powder; the ultrasonic generating device is used for emitting ultrasonic waves and enabling the ultrasonic waves to act on the powder so as to enable the powder to be separated on the membrane plate in a vibration mode; the adsorption device is positioned beside the rotating device and is used for adsorbing the powder on the diaphragm plate; and the control unit is electrically connected with the rotating device, the laser emitting device, the ultrasonic generating device and the adsorption device. The membrane plate cleaning device provided by the invention utilizes laser non-contact cleaning, takes laser pulse energy as power, takes laser heat energy as a basis, utilizes the heat energy to quickly evaporate residual solution on the membrane plate into powder and/or enables dry dirt attached on the membrane plate to become powder, and sucks away the powder under the action of ultrasonic waves and an adsorption device, thereby achieving the purpose of thoroughly cleaning the residual solution on the membrane plate.
Description
Technical Field
The present disclosure relates to, but not limited to, liquid crystal display technology, and more particularly, to a film cleaning apparatus.
Background
At present, an alignment film printing plate is mainly washed by water, residual alignment liquid in a reticulate pattern of the alignment film printing plate is difficult to clean, and when the residual alignment liquid is reused for alignment, the alignment liquid attached to a base plate has the phenomenon of uneven thickness, so that the performance of the base plate after alignment is poor; and the water washes the alignment film printing plate, and has mechanical acting force on the surface of the alignment film printing plate to damage the surface of the alignment film printing plate.
Disclosure of Invention
In order to solve the technical problem, the disclosure provides a membrane plate cleaning device, which can better remove residual alignment liquid inside a membrane plate reticulate pattern without damaging the surface of the membrane plate.
To achieve the object, the present invention provides a stencil cleaning apparatus comprising: the rotating device is used for installing the membrane plate and driving the membrane plate to rotate; the laser emitting device is positioned beside the rotating device and is used for emitting laser and irradiating the laser on the membrane plate so as to dry the solution attached to the membrane plate into powder and/or dry dirt attached to the membrane plate into powder; the ultrasonic generating device is used for emitting ultrasonic waves and enabling the ultrasonic waves to act on the powder so as to enable the powder to be separated on the membrane plate in a vibration mode; and the adsorption device is positioned beside the rotating device and is used for adsorbing the powder on the diaphragm plate.
Optionally, the membrane plate cleaning device further comprises: and the control unit is electrically connected with the rotating device, the laser emitting device, the ultrasonic generating device and the adsorption device.
Optionally, the membrane plate cleaning device further comprises: the camera shooting device is electrically connected with the control unit and used for shooting the attachment form of the solution/dry dirt on the membrane plate and feeding back the attachment form to the control unit, and the control unit controls the rotating device, the laser emitting device, the ultrasonic generating device and the adsorption device according to the attachment form of the solution/dry dirt on the membrane plate which is fed back.
Optionally, the control unit is configured to find a point with the maximum gray scale difference and a position to be cleaned by comparing the attachment form with a stored standard pattern, and correspondingly adjust the intensity and pulse frequency of the laser emitted by the laser emitting device according to the color depth of the point with the maximum gray scale difference.
Optionally, the control unit includes a PLC controller and a laser pulse frequency controller, the PLC controller is electrically connected to the laser pulse frequency controller, the PLC controller is configured to control the rotation speed of the rotating device, the intensity of the ultrasonic wave emitted by the ultrasonic wave generating device, and the laser pulse frequency controller according to the feedback adhesion form of the solution/dried dirt on the membrane, and the laser pulse frequency controller is configured to control the intensity and pulse frequency of the laser emitted by the laser emitting device according to the PLC controller.
Optionally, the control unit further comprises: the PLC controller is electrically connected with the laser pulse frequency controller through the signal converter; the laser pulse frequency controller comprises a power supply circuit, a laser pulse generation and adjustment circuit, a laser control and drive circuit and a camera shooting detection control and feedback circuit, wherein the power supply circuit, the laser pulse generation and adjustment circuit and the camera shooting detection control and feedback circuit are electrically connected, the laser pulse generation and adjustment circuit, the laser control and drive circuit and the laser emitting device are electrically connected, and the camera shooting detection control and feedback circuit and the camera shooting device are electrically connected.
Optionally, the power circuit is electrically connected to the laser pulse generation and adjustment circuit and the camera detection control and feedback circuit, and the laser pulse generation and adjustment circuit and the laser control and drive circuit are electrically connected to the laser emitting device.
Optionally, the rotating device is a rotating roller, the adsorbing device is a vacuum adsorbing roller, the vacuum adsorbing roller is installed above the rotating roller in an inclined manner, the laser emitting device is installed beside the rotating roller, and the ultrasonic generating device is installed on the rotating roller.
Optionally, the laser emitting device includes a plurality of laser emitting devices, the plurality of laser emitting devices are arranged at intervals in the axial direction of the rotating roller, and any one of the laser emitting devices is equipped with two of the image pickup devices.
Optionally, the laser emitting device includes a laser, a diaphragm, a convex lens, a focal length control mechanism and a focusing lens, and the laser, the diaphragm, the convex lens and the focusing lens are sequentially arranged on the focal length control mechanism along the same straight line.
Optionally, reflectors are disposed on two sides of the focusing lens.
Optionally, the mirror is a right angle mirror, and the laser is a pulsed laser.
Optionally, the laser comprises two or more of a He-Ne laser, an ultraviolet laser and an infrared laser, and the laser light emitted by the two or more lasers is converged; wherein, the number of the He-Ne lasers is one or more than one.
Optionally, the film plate is an alignment film printing plate, and the solution is an alignment liquid.
Optionally, the image capturing device is a CCD camera.
Compared with the prior art, the membrane plate cleaning device provided by the invention utilizes laser non-contact cleaning, takes laser pulse energy as power, takes laser heat energy as a basis, utilizes the heat energy to quickly evaporate the solution remained on the membrane plate into powder and/or enables dry dirt attached on the membrane plate to become powder, and sucks away the powder under the action of ultrasonic waves and an adsorption device, so that the aim of thoroughly removing the remained solution/dry dirt on the membrane plate is fulfilled.
The rotating device continuously rotates, laser irradiation is carried out, the rotating speed of the rotating device is matched with the laser pulse irradiation frequency, powder dried by laser irradiation vibrates under the action of ultrasonic waves and is separated from the membrane plate, the connecting force between the membrane plate and the powder is removed, and then the powder is adsorbed away by the adsorption device so as to remove residual solution on the membrane plate.
Additional features and advantages of the disclosure will be set forth in the description which follows, and in part will be obvious from the description, or may be learned by the practice of the disclosure. The objectives and other advantages of the invention will be realized and attained by the structure particularly pointed out in the written description and claims hereof as well as the appended drawings.
Drawings
The accompanying drawings are included to provide a further understanding of the embodiments herein and are incorporated in and constitute a part of this specification, illustrate embodiments herein and are not to be construed as limiting the embodiments herein.
FIG. 1 is a schematic structural diagram of a membrane plate cleaning apparatus according to an embodiment of the present invention;
fig. 2 is a schematic structural diagram of a laser emitting device and a control unit of the membrane plate cleaning device shown in fig. 1.
Wherein, the correspondence between the reference numbers and the component names in fig. 1 and fig. 2 is:
the device comprises a rotating device 1, a laser emitting device 2, a laser 21, a diaphragm 22, a convex lens 23, a focal length control mechanism 24, a focusing lens 25, a reflecting mirror 26, an ultrasonic wave generating device 3, an adsorption device 4, a camera device 5, a PLC (programmable logic controller) 6, a laser pulse frequency controller 7, a signal converter 8 and a subarea 9.
Detailed Description
To make the objects, technical solutions and advantages of the present invention more apparent, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. It should be noted that the embodiments and features of the embodiments in the present application may be arbitrarily combined with each other without conflict.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present disclosure, however, the present disclosure may be practiced otherwise than as specifically described herein, and thus the scope of the present disclosure is not limited by the specific embodiments disclosed below.
The membrane plate cleaning device of some embodiments of the present disclosure is described below with reference to the drawings.
Example one
The invention provides a membrane plate cleaning device (see figure 1), comprising: the rotating device 1 is used for installing the membrane plate and driving the membrane plate to rotate; the laser emitting device 2 is positioned beside the rotating device 1 and is used for emitting laser and irradiating the laser on the diaphragm plate so as to form the object to be separated attached to the diaphragm plate into powder and/or make the dry dirt attached to the diaphragm plate into powder; an ultrasonic wave generating device 3 for emitting ultrasonic waves and making the ultrasonic waves act on the powder to make the powder vibrate and separate on the membrane plate; and an adsorption device 4 located beside the rotating device 1 and used for adsorbing the powder on the membrane (so as to collect the powder).
The membrane plate cleaning device provided by the invention utilizes laser non-contact cleaning, takes laser pulse energy as power, takes laser heat energy as a basis, utilizes the heat energy to quickly evaporate the residual to-be-separated objects on the membrane plate to generate shock waves to form powder and/or enables dry dirt attached to the membrane plate to form powder, and sucks away the powder under the action of ultrasonic waves and the adsorption device 4, thereby achieving the purpose of thoroughly cleaning the residual to-be-separated objects on the membrane plate.
The rotating device 1 continuously rotates, laser irradiation is carried out, the rotating speed of the rotating device is matched with the laser pulse irradiation frequency, the powder vibrates under the action of ultrasonic waves and is separated from the membrane plate, the connecting force between the membrane plate and the powder is removed, and then the powder is adsorbed away by the adsorption device 4 so as to remove the residual substances to be separated on the membrane plate.
Wherein, the object to be separated is preferably alignment liquid; of course, the object to be separated may also be dry dirt (e.g. dust), and the purpose of the present application can also be achieved, and the purpose of the present application does not depart from the design concept of the present invention, and therefore, the object to be separated is not described herein again and should fall within the protection scope of the present application.
Example two
As shown in fig. 1 and 2, the membrane plate cleaning apparatus according to the present invention includes: the rotating device 1 is used for installing the membrane plate and driving the membrane plate to rotate; a laser emitting device 2 which is positioned beside the rotating device 1 and is used for emitting laser and irradiating the laser on the membrane plate so as to dry the solution attached on the membrane plate into powder and/or dry dirt attached on the membrane plate into powder; an ultrasonic wave generating device 3 for emitting ultrasonic waves and making the ultrasonic waves act on the powder to make the powder vibrate and separate on the membrane plate; an adsorption device 4 located beside the rotating device 1 for adsorbing the powder on the membrane (to collect the powder); and a control unit electrically connected to the rotating device 1, the laser emitting device 2, the ultrasonic wave generating device 3, and the adsorbing device 4.
The membrane plate cleaning device provided by the invention utilizes laser non-contact cleaning, takes laser pulse energy as power, takes laser heat energy as a basis, utilizes the heat energy to quickly evaporate residual solution on the membrane plate into powder and/or enables dry dirt attached on the membrane plate to become powder, and sucks away the powder under the action of ultrasonic waves and an adsorption device 4, thereby achieving the purpose of thoroughly removing the residual solution/dry dirt on the membrane plate.
The rotating device 1 continuously rotates, laser irradiation is carried out, the rotating speed of the rotating device is matched with the laser pulse irradiation frequency, powder dried by laser irradiation vibrates under the action of ultrasonic waves and is separated from the membrane plate, the connecting force between the membrane plate and the powder is removed, and then the powder is adsorbed away by the adsorption device 4 so as to remove residual solution on the membrane plate.
Further, as shown in fig. 2, the membrane plate cleaning apparatus further includes: the camera device 5 is electrically connected with the control unit and used for shooting the attachment form of the solution on the membrane plate and feeding back the attachment form to the control unit, the control unit controls the rotating device 1 according to the attachment form of the solution on the membrane plate fed back, the laser emitting device 2, the ultrasonic generating device 3 and the adsorption device 4, the membrane plate is prevented from being damaged (partially damaged or completely damaged) due to the fact that the laser energy is absorbed too much, the membrane plate is better protected, and meanwhile, the energy consumption of equipment is reduced. Namely: the control unit compares the attachment form fed back by the camera device with a stored standard pattern to find a point with the maximum gray difference and a position needing cleaning, and correspondingly adjusts the intensity and pulse frequency of the laser emitted by the laser emitting device according to the color depth of the point with the maximum gray difference. The control unit controls the rotating device 1, the laser emitting device 2, the ultrasonic generating device 3 and the adsorption device 4 according to the maximum gray difference point and the position to be cleaned, so that the membrane is prevented from being damaged (partially damaged or completely damaged) due to overlarge laser energy absorption, the membrane is better protected, and meanwhile, the energy consumption of equipment is reduced.
Specifically, as shown in fig. 2, the control unit includes a PLC controller 6 and a laser pulse frequency controller 7, the PLC controller 6 is electrically connected to the laser pulse frequency controller 7, the PLC controller 6 is configured to control the rotation speed of the rotating device 1, the intensity of the ultrasonic wave emitted by the ultrasonic wave generating device 3, and the operating parameters of the laser pulse frequency controller 7 according to the adhesion state of the fed-back solution on the pellicle, and the laser pulse frequency controller 7 is configured to control the intensity and pulse frequency of the laser light emitted by the laser emitting device 2 according to the PLC controller 6. Namely: the PLC 6 compares the attachment form with the stored standard pattern to find the maximum gray difference point and the position to be cleaned, and controls the rotating speed of the rotating device 1, the intensity of the ultrasonic wave emitted by the ultrasonic wave generating device 3 and the working parameters of the laser pulse frequency controller 7 through the maximum gray difference point and the position to be cleaned.
Further, as shown in fig. 2, the control unit further includes: and the PLC controller 6 is electrically connected with the laser pulse frequency controller 7 through the signal converter 8 and is used for mutually converting transmitted electric signals.
Wherein the laser pulse frequency controller 7 comprises a power supply circuit, a laser pulse generating and adjusting circuit, a laser control and driving circuit and a camera detection control and feedback circuit, the power circuit, the laser pulse generating and adjusting circuit and the camera shooting detection control and feedback circuit are electrically connected, the laser pulse generating and adjusting circuit, the laser control and driving circuit and the laser emitting device 2 are electrically connected and used for controlling the intensity, the pulse frequency and the like of the laser emitted by the laser emitting device 2, the camera shooting detection control and feedback circuit is electrically connected with the camera shooting device 5, the camera shooting detection control and feedback circuit transmits the attachment form of the solution on the membrane plate to the PLC 6, and the PLC 6 respectively transmits a control instruction to the laser pulse generation and adjustment circuit, a control instruction to the rotating device 1 and a control instruction to the ultrasonic wave generating device 3. Namely: the power circuit is electrically connected with the laser pulse generation and regulation circuit and the camera detection control and feedback circuit, the laser pulse generating and adjusting circuit and the laser control and driving circuit are electrically connected with the laser emitting device 2 and are used for controlling the intensity, the pulse frequency and the like of the laser emitted by the laser emitting device 2, the camera shooting detection control and feedback circuit is electrically connected with the camera shooting device 5, the camera shooting detection control and feedback circuit transmits the attachment form of the solution on the membrane plate to the PLC controller 6, and the PLC controller 6 respectively transmits a control instruction to the laser pulse generation and adjustment circuit (the laser pulse generation and adjustment circuit is matched with the laser control and driving circuit to control the laser emitting device), transmits the control instruction to the rotating device 1 and transmits the control instruction to the ultrasonic wave generating device 3.
Specifically, as shown in fig. 1, the rotating device 1 is a rotating roller, the adsorbing device 4 is a vacuum adsorbing roller, the vacuum adsorbing roller is installed obliquely above the rotating roller, the laser emitting device 2 is installed beside the rotating roller, and the ultrasonic wave generating device 3 is installed on the rotating roller. And the laser emitting device 2 comprises a plurality of laser emitting devices 2, and the plurality of laser emitting devices 2 are arranged at intervals in the axial direction of the rotating roller, and any one laser emitting device 2 is provided with two image pick-up devices 5. Any row of the film plate comprises a plurality of subregions 9 (the subregions 9 are arranged on the film plate in a matrix form), the subregions 9 align a plurality of base plates simultaneously, the laser emitting devices 2 correspond to the subregions 9 one by one, the laser emitting devices 2 irradiate the subregions 9 independently, and the irradiation intensity and frequency of the laser emitting devices are set according to the specific solution adhesion state on the corresponding subregion 9.
The laser light is vertically irradiated on the side surface of a rotating roller, the rotating roller can enable the membrane plate to be completely stretched, the residual solution in the reticulate pattern can be completely exposed to the laser, and each position of the membrane plate is irradiated by continuous rotation. The laser emitting device 2 is not moved, but is rotated only by the rotating roller, which is more stable.
Specifically, as shown in fig. 2, the laser emitting device 2 includes a laser 21, a diaphragm 22, a convex lens 23, a focal length control mechanism 24 and a focusing lens 25, the laser 21, the diaphragm 22, the convex lens 23 and the focusing lens 25 are sequentially arranged on the focal length control mechanism 24 along the same straight line, and reflectors 26 are arranged on two sides of the focusing lens 25, so that laser light irradiated onto the side surface of the rotating roller is parallel light in the same plane.
The camera device 5 measures the range of the corresponding sub-area on the film plate, and adjusts the position of the corresponding convex lens 23 to control the focal length, namely, the light spot width of the laser. The laser 21 irradiates and heats the membrane plate by a method of weakening the membrane plate and then gradually strengthening the membrane plate, and the irradiation is stopped when the camera device 5 detects that the cleaning of the outer surface of the membrane plate is finished.
The reflecting mirror 26 is a right-angle reflecting mirror, the laser 21 is a pulse laser 21, the film plate is an alignment film printing plate, and the solution is alignment liquid.
For the membrane plate with the reticulate pattern, the cleaning mode can also be as follows: the control unit receives cleaning rotating roller information transmitted by the screen mesh pattern recognition system, compares the mesh pattern (the attachment form of the solution on the mesh pattern) of the screen shot by the camera device with the stored standard pattern (for example, compares the attachment form of the solution on the mesh pattern), finds the point with the maximum gray difference, recognizes the position needing to be cleaned, and correspondingly adjusts the intensity and the pulse frequency of the laser emitted by the laser emitting device according to the color depth of the point with the maximum gray difference, so that the laser emitting device irradiates the position needing to be cleaned by the laser with the intensity and the pulse frequency, and the solution is removed by matching with the ultrasonic generating device and the adsorption device.
However, after cleaning, solution may remain in some dots (where the cross-hatched areas are dots) on the membrane (i.e., the solution in some dots is not removed completely), and when removing the solution, the image pickup device 5 may be stopped above the membrane, the image pickup device 5 takes a picture, and by performing difference processing on the image, the dot with the maximum gray scale difference (i.e., the dot with the solution) on the membrane is identified as the irradiation center (e.g., the intensity and pulse frequency of the laser emitted by the laser emitting device are correspondingly adjusted according to the color depth of the dot with the maximum gray scale difference), and then the irradiation center is sequentially irradiated by the laser 21, and the solution at the center is specifically removed by matching with ultrasonic waves. The mesh points with the residual solution are the points with the maximum gray difference, the position needing to be cleaned in the cleaning process is superposed with the points with the maximum gray difference, and the points with the maximum gray difference are the positions needing to be cleaned.
The laser comprises two or more than two of a He-Ne laser, an ultraviolet laser and an infrared laser, the lasers emitted by the two or more than two lasers can be converged together, and the converged lasers can be realized by adopting a triangular prism or a convex lens and the like; among them, one or more He — Ne lasers may be used.
Such as: the number of the lasers is three, the three lasers consist of two He-Ne lasers and an infrared laser, and light is converged through a triple prism or a convex lens.
The wavelengths of the He-Ne laser, the ultraviolet laser and the infrared laser are different, and the capabilities of the same substance for absorbing different laser are different, so that when the solution comprises multiple substances, the multiple substances can absorb the energy of the laser with the corresponding wavelengths more, and the removal speed of the multiple substances is higher.
Of course, the three lasers may also be composed of a He — Ne laser, an ultraviolet laser and an infrared laser, and the purpose of the present application can also be achieved, and the purpose of the present application does not depart from the design concept of the present invention, and the three lasers are not described herein again and all fall within the protection scope of the present application.
The camera device is a CCD camera.
In the above embodiments, the solution may be replaced by dry dirt to remove the dry dirt, and the purpose of the method does not depart from the design concept of the present invention, and therefore, the method is not described herein again and should fall within the protection scope of the present application.
In summary, the membrane plate cleaning device provided by the invention utilizes laser non-contact cleaning, takes laser pulse energy as power, takes laser heat energy as a basis, utilizes the heat energy to quickly evaporate the solution remaining on the membrane plate to form powder and/or to make dry dirt attached on the membrane plate to form powder, and sucks away the powder under the action of ultrasonic waves and an adsorption device, thereby achieving the purpose of thoroughly removing the remaining solution/dry dirt on the membrane plate.
The rotating device continuously rotates, laser irradiation is carried out, the rotating speed of the rotating device is matched with the laser pulse irradiation frequency, powder dried by laser irradiation vibrates under the action of ultrasonic waves and is separated from the membrane plate, the connecting force between the membrane plate and the powder is removed, and then the powder is adsorbed away by the adsorption device so as to remove residual solution on the membrane plate.
In the description herein, the terms "mounted," "connected," "fixed," and the like are to be construed broadly, e.g., "connected" may be a fixed connection, a removable connection, or an integral connection; may be directly connected or indirectly connected through an intermediate. The specific meaning of the above terms herein can be understood by those of ordinary skill in the art as appropriate.
In the description of the specification, reference to the term "one embodiment," "some embodiments," "a specific embodiment," or the like, means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example herein. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
Although the embodiments disclosed herein are described above, the descriptions are only for the convenience of understanding the embodiments and are not intended to limit the disclosure. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the disclosure, and that the scope of the disclosure herein may be limited only by the appended claims.
Claims (11)
1. A membrane plate cleaning device, comprising:
the rotating device is used for installing the membrane plate and driving the membrane plate to rotate;
the laser emitting devices are positioned beside the rotating device and are arranged at intervals along the axial direction of the rotating device and are used for emitting laser and irradiating the laser on the membrane plate so as to dry the solution attached to the membrane plate into powder and/or dry dirt attached to the membrane plate into powder;
the ultrasonic generating device is used for emitting ultrasonic waves and enabling the ultrasonic waves to act on the powder so as to enable the powder to be separated on the membrane plate in a vibration mode; and
the adsorption device is positioned beside the rotating device and is used for adsorbing the powder on the diaphragm plate;
the camera device is used for shooting the attachment form of the solution/dry dirt on the membrane plate;
and the control unit is electrically connected with the rotating device and the laser emitting device and used for finding out a maximum gray difference point and a position needing to be cleaned by comparing the attachment form fed back by the camera device with the stored standard pattern, correspondingly adjusting the intensity and pulse frequency of the laser emitted by the laser emitting device and the rotating speed of the rotating device according to the color depth of the maximum gray difference point and irradiating the position needing to be cleaned.
2. The stencil cleaning apparatus of claim 1, further comprising:
and the control unit is electrically connected with the ultrasonic wave generating device and the adsorption device.
3. The stencil cleaning apparatus of claim 2, further comprising:
the control unit controls the ultrasonic wave generating device and the adsorption device according to the feedback attachment form of the solution/dry dirt on the membrane plate.
4. The membrane plate cleaning device according to claim 1, wherein the control unit comprises a PLC controller and a laser pulse frequency controller, the PLC controller is electrically connected to the laser pulse frequency controller, the PLC controller is configured to control the rotation speed of the rotating device, the intensity of the ultrasonic wave emitted from the ultrasonic wave generating device, and the laser pulse frequency controller according to the adhesion form of the solution/dry dirt on the feedback membrane plate, and the laser pulse frequency controller is configured to control the intensity and pulse frequency of the laser emitted from the laser emitting device according to the PLC controller.
5. The stencil washer apparatus of claim 4, wherein the control unit further comprises:
the PLC controller is electrically connected with the laser pulse frequency controller through the signal converter;
the laser pulse frequency controller comprises a power supply circuit, a laser pulse generation and adjustment circuit, a laser control and drive circuit and a camera shooting detection control and feedback circuit, wherein the power supply circuit, the laser pulse generation and adjustment circuit and the camera shooting detection control and feedback circuit are electrically connected, the laser pulse generation and adjustment circuit, the laser control and drive circuit and the laser emitting device are electrically connected, and the camera shooting detection control and feedback circuit and the camera shooting device are electrically connected.
6. The mask cleaning device according to claim 1, wherein the rotating device is a rotating roller, the adsorbing device is a vacuum adsorbing roller, the vacuum adsorbing roller is installed obliquely above the rotating roller, the laser emitting device is installed beside the rotating roller, and the ultrasonic wave generating device is installed on the rotating roller.
7. The membrane plate cleaning device according to any one of claims 1 to 6, wherein the laser emitting device comprises a laser, a diaphragm, a convex lens, a focal length control mechanism and a focusing lens, and the laser, the diaphragm, the convex lens and the focusing lens are sequentially arranged on the focal length control mechanism along the same straight line.
8. The membrane plate cleaning device according to claim 7, wherein a reflecting mirror is arranged on each side of the focusing lens.
9. The stencil cleaning apparatus of claim 8, wherein the mirror is a cube corner mirror and the laser is a pulsed laser.
10. The stencil cleaning apparatus of claim 7, wherein,
the laser comprises two or more than two of a He-Ne laser, an ultraviolet laser and an infrared laser, and the lasers emitted by the two or more than two lasers are converged together;
wherein, the number of the He-Ne lasers is one or more than one.
11. The device for cleaning a membrane plate according to any one of claims 1 to 6, wherein the membrane plate is an alignment film printing plate and the solution is an alignment liquid.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2017104647974 | 2017-06-19 | ||
| CN201710464797.4A CN107065434A (en) | 2017-06-19 | 2017-06-19 | Film version cleaning device |
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| CN108051954A CN108051954A (en) | 2018-05-18 |
| CN108051954B true CN108051954B (en) | 2021-01-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710464797.4A Pending CN107065434A (en) | 2017-06-19 | 2017-06-19 | Film version cleaning device |
| CN201810002297.3A Expired - Fee Related CN108051954B (en) | 2017-06-19 | 2018-01-02 | Membrane plate cleaning device |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710464797.4A Pending CN107065434A (en) | 2017-06-19 | 2017-06-19 | Film version cleaning device |
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| CN108749323A (en) * | 2018-05-08 | 2018-11-06 | 矫矫 | A kind of anilox roll cleaning method |
| CN110806649A (en) * | 2019-10-25 | 2020-02-18 | 江西力昌电子科技有限公司 | Cleaning process for IC position of liquid crystal module |
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|---|---|---|---|---|
| DE4427152A1 (en) * | 1994-08-01 | 1996-02-15 | Jet Laser Systeme Ges Fuer Obe | Process for cleaning ink from printing press |
| CN101900895A (en) * | 2009-05-27 | 2010-12-01 | 英业达股份有限公司 | Liquid crystal display screen with dust-removing function |
| CN106269719A (en) * | 2016-09-30 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of cleaning equipment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101274326A (en) * | 2007-03-29 | 2008-10-01 | 鸿富锦精密工业（深圳）有限公司 | Optical lens surface dust cleaning apparatus and dust collection method |
| CN204353161U (en) * | 2014-12-28 | 2015-05-27 | 浙江嘉泰激光科技有限公司 | A kind of laser-ultrasound composite cleaning device of chemical reaction tank body |
| CN105204233B (en) * | 2015-10-26 | 2019-03-15 | 京东方科技集团股份有限公司 | Display base plate friction orientation method and device, display base plate preparation method and system |
-
2017
- 2017-06-19 CN CN201710464797.4A patent/CN107065434A/en active Pending
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2018
- 2018-01-02 CN CN201810002297.3A patent/CN108051954B/en not_active Expired - Fee Related
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE4427152A1 (en) * | 1994-08-01 | 1996-02-15 | Jet Laser Systeme Ges Fuer Obe | Process for cleaning ink from printing press |
| CN101900895A (en) * | 2009-05-27 | 2010-12-01 | 英业达股份有限公司 | Liquid crystal display screen with dust-removing function |
| CN106269719A (en) * | 2016-09-30 | 2017-01-04 | 京东方科技集团股份有限公司 | A kind of cleaning equipment |
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| CN108051954A (en) | 2018-05-18 |
| CN107065434A (en) | 2017-08-18 |
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