CN110265329A - Interior pipe fixing device - Google Patents
Interior pipe fixing device Download PDFInfo
- Publication number
- CN110265329A CN110265329A CN201910525953.2A CN201910525953A CN110265329A CN 110265329 A CN110265329 A CN 110265329A CN 201910525953 A CN201910525953 A CN 201910525953A CN 110265329 A CN110265329 A CN 110265329A
- Authority
- CN
- China
- Prior art keywords
- inner tube
- sliding track
- track slot
- mounting groove
- fixing device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
Abstract
Technical solution of the present invention discloses a kind of interior pipe fixing device, for fixing the inner tube of boiler tube board, comprising: inner tube platform, said inner tube platform are equipped at least one mounting groove, sliding track slot by least one described mounting groove is set, and the sliding track slot is connected to the mounting groove；The support ring being sheathed on outside said inner tube, the edge of the support ring are equipped at least one support ear cooperated with the mounting groove, and the support ear is suitable for being moved to the end of the sliding track slot to fix said inner tube.Can be to avoid inner tube shift phenomenon, without being manually adjusted at high temperature using the interior pipe fixing device of technical solution of the present invention, the manufacture efficiency for improving wafer of high degree improves the uniformity of wafer, ensure that product yield.
Description
Technical field
The present invention relates to semi-conductor device technology field more particularly to a kind of interior pipe fixing devices.
Background technique
Boiler tube board is the important equipment of field of semiconductor manufacture, many to need high temperature ring in semiconductor fabrication
The technique in border is both needed to complete in boiler tube board, such as the processing technology of wafer.
And during processing wafer, inner tube easily shifts, and cause the reaction gas in boiler tube to be unevenly distributed, from
And the uniformity of wafer is influenced, reduce product yield, in some instances it may even be possible to lead to scrap of the product.
Currently, the mode for solving inner tube offset is still used and is manually adjusted.When adjustment, need boiler tube board being cooled to 400
DEG C, artificially adjust inner tube position with high temperature gloves, survey machine again, when deviating more serious, also need to do again plant maintenance with
It maintains (PM, preventive maintenance).The process of manually adjusting need to operate under high temperature environment, and safety coefficient is low, and
It is time-consuming, laborious.
Summary of the invention
Technical solution of the present invention technical problems to be solved are that the inner tube of existing boiler tube board easily shifts, and influence furnace
The uniformity of pipe processing technique.
In order to solve the above technical problems, technical solution of the present invention provides a kind of interior pipe fixing device, for fixing boiler tube machine
The inner tube of platform, comprising: inner tube platform, said inner tube platform are equipped at least one mounting groove；It is arranged at least one mounting groove
Other sliding track slot, the sliding track slot are connected to the mounting groove；The support ring being sheathed on outside said inner tube, the branch
The edge of pushing out ring is equipped at least one support ear cooperated with the mounting groove, and the support ear is suitable for being moved to the sliding rail
The end of road slot is to fix said inner tube.
Optionally, when the support ear is moved to the end of the sliding track slot, said inner tube and said inner tube platform
Geometric center is overlapped.
Optionally, the quantity of the mounting groove, the sliding track slot and the support ear is equal.
Optionally, the sliding track slot is arranged clockwise or counterclockwise, if sliding track slot is two or more
When, each sliding track slot to open up direction identical.
Optionally, the support ear includes from outwardly extending first supporting element of the support ring.
Optionally, the support ear further includes the second supporting element extended downwardly from first supporting element.
Optionally, the sliding track slot is opened up along said inner tube platform inner wall, and the sliding track slot includes the first groove body
It is connected to one end of the second groove body, first groove body with the mounting groove, the other end is connected to second groove body, and described
The depth of second groove body is greater than the depth of first groove body.
Optionally, the sliding track slot extends from the mounting groove to the direction far from said inner tube platform inner wall.
Optionally, the sliding track slot is in ratchet shape.
Compared with prior art, technical solution of the present invention has the advantages that
Technical solution of the present invention is provided with the sliding track slot communicated with mounting groove on inner tube platform, when the branch for being arranged inner tube
When support ear self installation slot on pushing out ring is moved to the end of sliding track slot along sliding track slot, the end meeting of sliding track slot
Apply the power for hindering its movement to support ear, so that fixed support ring and inner tube, prevent inner tube from deviating.
Sliding track slot is arranged along inner tube platform inner wall, including the first groove body and the second groove body, the second groove body will be deeper than first
Support ear can be smoothly directed in the second groove body by groove body, the first groove body from mounting groove, and the second groove body can be by support ring
It is arranged in the vallecular cavity of the second groove body, efficiently avoids inner tube offset.
Sliding track slot self installation slot extends to the direction far from inner tube platform inner wall, and support ear is moved to along sliding track slot
When sliding track slot end, the root of support ear can resist the root edges of sliding track slot, the root limit of sliding track slot
Support ear movement processed, and then realize the fixation of inner tube.
Detailed description of the invention
Fig. 1 is a kind of structural schematic diagram of boiler tube board；
Fig. 2 is a kind of top view of interior pipe mounting structure；
Fig. 3 A is the overlooking structure diagram of the interior pipe fixing device (inner tube is unlocked) of the embodiment of the present invention；
Fig. 3 B is the overlooking structure diagram of the interior pipe fixing device (inner tube has been fixed) of the embodiment of the present invention；
Fig. 4 is the structural schematic diagram of support ear in the interior pipe fixing device of the embodiment of the present invention；
Fig. 5 A is the interior view knot of mounting groove and sliding track slot (inner tube is unlocked) in interior pipe fixing device shown in Fig. 3 A
Structure schematic diagram；
Fig. 5 B is the interior view knot of mounting groove and sliding track slot (inner tube has been fixed) in interior pipe fixing device shown in Fig. 3 B
Structure schematic diagram；
Fig. 6 A is the overlooking structure diagram of the interior pipe fixing device (inner tube is unlocked) of another embodiment of the present invention；
Fig. 6 B is the overlooking structure diagram of the interior pipe fixing device (inner tube has been fixed) of another embodiment of the present invention.
Specific embodiment
As shown in Figure 1, boiler tube board includes heater 1, is successively arranged outer tube (outer from outside to inside in heater 1
Tube) 2, inner tube (inner tube) 3, cassette (boat) 4, cassette 4 is for carrying the device that wafer etc. need to be heat-treated.
Referring to figs. 1 and 2, the bottom position of outer tube 2 is equipped with flange 5, and the inner ring of flange 5 is equipped with inner tube platform (inner
Tube) 6, inner tube 3 is fixed in support ring (supporting ring) 7, and support ring 7 is placed on inner tube platform 6, on inner tube platform 6
There is no any limiting device and fixed device, therefore, the position of inner tube 3 easily deviates.
The reason of causing inner tube 3 to deviate, has very much, mainly there is following two aspect: on the one hand, carrying out PM to boiler tube board
When, the position of inner tube 3 can be had an impact；On the other hand, the vibration that boiler tube board generates at work also results in inner tube 3
Offset.And the reaction gas that the offset of inner tube 3 will result directly in boiler tube is unevenly distributed, to influence the uniformity of wafer, is dropped
Low product yield, in some instances it may even be possible to lead to scrap of the product.
In order to overcome drawbacks described above, inventor is studied, and proposes that sliding track slot is arranged on inner tube platform, is being propped up
Supporting element is set on pushing out ring, and when supporting element is moved to sliding track slot end, sliding track slot end can limit supporting element
Activity, so as to effectively prevent the movement of inner tube.
To make the above purposes, features and advantages of the invention more obvious and understandable, with reference to the accompanying drawing to the present invention
Specific embodiment be described in detail.
A referring to figure 3., the interior pipe fixing device of the embodiment of the present invention include: inner tube platform 10, support ring 11 and sliding rail
Slot 141.The fixed device of said inner tube is used to fix the inner tube 12 of boiler tube board, prevents inner tube 12 from deviating.
Wherein, inner tube platform 10 is equipped at least one mounting groove 13, and mounting groove 13 is opened up along the axial direction of inner tube platform 10,
It opens up mounting groove 13 and is conducive to the installation and removal of inner tube 12, and the quantity of mounting groove 13 is not required, attached drawing 3 is illustrative
Three mounting grooves 13 are indicated, and are uniformly distributed on inner tube platform 10.
Sliding track slot 141 is arranged by least one mounting groove 13, and sliding track slot 141 is connected to mounting groove 13.
In the present embodiment, sliding track slot 141 is opened up along 10 inner wall of inner tube platform.The quantity of sliding track slot 141 is not required, specifically
Sliding track slot 141 can be arranged by a mounting groove 13, can also be respectively provided with sliding rail by multiple mounting grooves 13 for ground
Sliding track slot 141 can be arranged in slot 141 by multiple adjacent mounting grooves 13, can also be in multiple mounting grooves 13 at interval
Side setting sliding track slot 141.As shown in Figure 3A, the embodiment of the present invention is illustratively provided with cunning by three mounting grooves 13
Dynamic track groove 141.
In conjunction with shown in Fig. 3 A and Fig. 4, it is arranged with support ring 11 outside inner tube 12, it is relatively solid between inner tube 12 and support ring 11
It is fixed, the edge of support ring 11 is provided at least one support ear 15, support ear 15 and support ring 11 can be integrated molding,
It can be connected with each other, inner tube 12, support ring 11 and 15 three of support ear belong to an entirety, and one of component moves, remaining
Component moves therewith.
The shape and structure of support ear 15 will match with mounting groove 13, sliding track slot 141.The support ear 15 of the present embodiment
It may include being extended downwardly from outwardly extending first supporting element 151 of the support ring 11 and from first supporting element 151
Second supporting element 152.The upper surface of first supporting element 151 and the upper surface of support ring 11 in the same plane, the second supporting element
152 are located at the lower section of the first supporting element 151 and can be vertical with the first supporting element 151.First supporting element 151 and the second supporting element
152 can be integrated molding, such as a board-like material downward bending, are also possible to two components and are connected with each other, and first
Support member 151 and the shape of the second supporting element 152 will match with mounting groove 13, sliding track slot 141.
The quantity of support ear 15 determines according to actual conditions, if a support ear 15 is only arranged, need to only guarantee support ear
15 position at the edge of support ring 11, if but the quantity of support ear 15 need to consider support ear 15 when being more than two
Position whether can match with the position of mounting groove 13, to ensure that inner tube 12 can be loaded and unloaded smoothly.
For the present invention, the quantity of support ear 15 is more, and the fixed effect of inner tube 12 is better, but support ear 15
Quantity should not be excessive, is easy to cause modular construction complicated, and bad assembly, the quantity of support ear 15 also should not be more than mounting groove 13
Quantity.In embodiments of the present invention, the quantity of support ear 15, mounting groove 13 and sliding track slot 141 is equal, and 15 He of support ear
The distributing position of mounting groove 13 is corresponding.
When assembling inner tube 12, by the position alignment of support ear 15 and mounting groove 13, ear 15 to be supported reaches predetermined position
When, along 141 direction rotating inner tube 12 of sliding track slot, so that the support ear 15 in support ring 11 is moved to sliding track slot 141,
When ear 15 to be supported reaches the end of sliding track slot 141, the fixation of inner tube 12 is realized, the assembly of inner tube 12 is completed, such as Fig. 3 B institute
Show.After inner tube 12 assembles, inner tube 12 is overlapped with the geometric center of inner tube platform 10, receives the wafer in the cassette in inner tube 12
Reaction gas be distributed the most uniform, the uniformity for improving wafer of high degree.
Incorporated by reference to reference Fig. 3 A and Fig. 5 A, in the interior pipe fixing device of the present embodiment, sliding track slot 141 is along inner tube platform 10
Inner wall setting, and be arranged direction can be it is clockwise or counterclockwise, it should be noted that if sliding track slot
When 141 number is greater than or equal to two, each sliding track slot 141 must open up at same direction, respectively slide shown in Fig. 3 A
Track 141 opens up in the direction of the clock.
Sliding track slot 141 include the first groove body 141a and the second groove body 141b, wherein the front end of the first groove body 141a with
Mounting groove 13 is connected to, and the rear end of the first groove body 141a is communicated with the second groove body 141b, and the depth of the second groove body 141b is greater than
The depth of first groove body 141a.
Incorporated by reference to reference Fig. 3 B and Fig. 5 B, when assembly, support ear 15 is directed at mounting groove 13 and simultaneously moves along mounting groove 13, mobile
To the notch of the first groove body 141a of sliding track slot 141, continuation is moved along the first groove body 141a, is moved to the second groove body
At 141b, since the second groove body 141b is deeper than the first groove body 141a, the second supporting element 152 can enter the second groove body by gravity
Thus the bottom 141b sticks into the second groove body 141b, by the blocking of the second groove body 141b side wall, the second supporting element 152 can not
It continues to move to, when the second supporting element 152 is located in the second bottom groove body 141b, the first support for being supported by the second supporting element 152
Part 151 is located in desired height position (being determined by the height of the second supporting element 152 and the depth of the second groove body 141b), so that by
The inner tube 12 that support ring 11 is entangled is capable of fixing in desired height position, that is, realizes the fixation of inner tube 12.Second supporting element 152 card
When into the second groove body 141b, inner tube is overlapped with the geometric center of said inner tube platform, is located at the O1 of the center of circle.
It should be understood that in other embodiments, support ear 15 can not also include the second supporting element 152, only include
First supporting element 151, the first supporting element 151 can have certain thickness.During installation, when the first supporting element 151 is moved to
When two groove body 141b, move inner tube 12 along the groove depth direction of the second groove body 141b, until the first supporting element 151 sticks into the second slot
Body 141b, the first supporting element 151 are located in desired height position (by the thickness and the second groove body of the first supporting element 151
The depth of 141b determines).
Please refer to Fig. 6 A, in the interior pipe fixing device of another embodiment of the present invention, sliding track slot 142 can be from the peace
Tankage 13 extends to the direction far from 10 inner wall of inner tube platform, and the notch of sliding track slot 142 is connected to mounting groove 13.Sliding rail
Slot 142 can be in ratchet shape.Sliding track slot 142 can be integrally formed with inner tube platform 10, be also possible to be connected with each other.
The direction that sliding track slot 142 is arranged can be clockwise or counterclockwise, it should be noted that if sliding
When the number of dynamic track groove 142 is greater than or equal to two, each sliding track slot 142 must open up at same direction, shown in Fig. 6 A
Each sliding rail 142 open up in the direction of the clock.
In assembly, support ear 15 is directed at mounting groove 13 and moves along mounting groove 13, is moved to the slot of sliding track slot 142
Mouthful place, continues to move along sliding track slot 142, is moved to the end of sliding track slot 142, since sliding track slot 142 is from institute
It states mounting groove 13 to extend to the inner wall direction far from inner tube platform 10, the radius of curvature of 142 root of sliding track slot is less than notch
Radius of curvature so that the root of support ear 15 resists the root edges of sliding track slot 142, the root of sliding track slot 142
Edge hinders or limitation support ear 15 is mobile, realizes the fixation of inner tube 12, as shown in Figure 6B.When the root of support ear 15 resists cunning
When the edge of dynamic track groove 142, inner tube is overlapped with the geometric center of said inner tube platform, is located at the O2 of the center of circle.
In conclusion sliding track slot is arranged on inner tube platform in the interior pipe fixing device using technical solution of the present invention, make
Inner tube is just fixed in assembly, avoid the phenomenon that various aspects factor causes inner tube to deviate, at the same avoid it is previous because
Inner tube offset needs the problem of being manually adjusted at high temperature, and the manufacture efficiency for improving wafer of high degree improves
The uniformity of wafer, ensure that product yield.
Although the present invention discloses as above in a preferred embodiment thereof, it is not for limiting the present invention, any ability
Field technique personnel without departing from the spirit and scope of the present invention, may be by the methods and technical content of the disclosure above to this
Inventive technique scheme makes possible variation and modification, therefore, anything that does not depart from the technical scheme of the invention, according to this hair
Bright technical spirit belongs to the technology of the present invention to any simple modifications, equivalents, and modifications made by embodiment of above
The protection scope of scheme.
Claims (9)
1. a kind of interior pipe fixing device, for fixing the inner tube of boiler tube board characterized by comprising
Inner tube platform, said inner tube platform are equipped at least one mounting groove；
Sliding track slot by least one described mounting groove is set, and the sliding track slot is connected to the mounting groove；
The support ring being sheathed on outside said inner tube, the edge of the support ring are equipped at least one branch cooperated with the mounting groove
Ear is supportted, the support ear is suitable for being moved to the end of the sliding track slot to fix said inner tube.
2. pipe fixing device in as described in claim 1, which is characterized in that the support ear is moved to the sliding track slot
End when, said inner tube is overlapped with the geometric center of said inner tube platform.
3. pipe fixing device in as described in claim 1, which is characterized in that the mounting groove, the sliding track slot and institute
The quantity for stating support ear is equal.
4. pipe fixing device in as described in claim 1, which is characterized in that the sliding track slot is set clockwise or counterclockwise
Set, if sliding track slot is two or more, each sliding track slot to open up direction identical.
5. pipe fixing device in as described in claim 1, which is characterized in that the support ear includes outside from the support ring
The first supporting element extended.
6. pipe fixing device in as claimed in claim 5, which is characterized in that the support ear further includes from first support
The second supporting element that part extends downwardly.
7. pipe fixing device in as described in claim 1, which is characterized in that the sliding track slot is along said inner tube platform inner wall
It opening up, the sliding track slot includes the first groove body and the second groove body, and one end of first groove body is connected to the mounting groove,
The other end is connected to second groove body, and the depth of second groove body is greater than the depth of first groove body.
8. pipe fixing device in as described in claim 1, which is characterized in that the sliding track slot is from the mounting groove to remote
Direction from said inner tube platform inner wall extends.
9. pipe fixing device in as claimed in claim 8, which is characterized in that the sliding track slot is in ratchet shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910525953.2A CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910525953.2A CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110265329A true CN110265329A (en) | 2019-09-20 |
| CN110265329B CN110265329B (en) | 2020-12-18 |
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ID=67918978
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910525953.2A Active CN110265329B (en) | 2019-06-18 | 2019-06-18 | Inner pipe fixing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110265329B (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| CN101499410A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Thermal processing furnace |
| US20090197409A1 (en) * | 2008-02-01 | 2009-08-06 | Hitachi-Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
| KR20100073571A (en) * | 2008-12-23 | 2010-07-01 | 주식회사 동부하이텍 | Vertical diffusion furnace for manufacturing semiconductor |
| CN208674076U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Cassette pedestal and furnace tube apparatus |
-
2019
- 2019-06-18 CN CN201910525953.2A patent/CN110265329B/en active Active
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6168427B1 (en) * | 1999-10-05 | 2001-01-02 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for guiding the removal of a processing tube from a semiconductor furnace |
| US6538237B1 (en) * | 2002-01-08 | 2003-03-25 | Taiwan Semiconductor Manufacturing Co., Ltd | Apparatus for holding a quartz furnace |
| CN101499410A (en) * | 2008-01-31 | 2009-08-05 | 东京毅力科创株式会社 | Thermal processing furnace |
| US20090197409A1 (en) * | 2008-02-01 | 2009-08-06 | Hitachi-Kokusai Electric Inc. | Substrate processing apparatus and method of manufacturing semiconductor device |
| KR20100073571A (en) * | 2008-12-23 | 2010-07-01 | 주식회사 동부하이텍 | Vertical diffusion furnace for manufacturing semiconductor |
| CN208674076U (en) * | 2018-08-07 | 2019-03-29 | 德淮半导体有限公司 | Cassette pedestal and furnace tube apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110265329B (en) | 2020-12-18 |
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Effective date of registration: 20230721 Address after: 223001 Room 318, Building 6, east of Zhenda Steel Pipe Company, south of Qianjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee after: Huaian Xide Industrial Design Co.,Ltd. Address before: 223300 no.599, East Changjiang Road, Huaiyin District, Huai'an City, Jiangsu Province Patentee before: HUAIAN IMAGING DEVICE MANUFACTURER Corp. |