CN110243488A - The plug-in type film thermocouple and preparation method thereof of real-time measurement hydrogen fuel cell internal temperature - Google Patents
The plug-in type film thermocouple and preparation method thereof of real-time measurement hydrogen fuel cell internal temperature Download PDFInfo
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- CN110243488A CN110243488A CN201910557349.8A CN201910557349A CN110243488A CN 110243488 A CN110243488 A CN 110243488A CN 201910557349 A CN201910557349 A CN 201910557349A CN 110243488 A CN110243488 A CN 110243488A
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- thermode
- fuel cell
- hydrogen fuel
- kapton
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K7/00—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements
- G01K7/02—Measuring temperature based on the use of electric or magnetic elements directly sensitive to heat ; Power supply therefor, e.g. using thermoelectric elements using thermoelectric elements, e.g. thermocouples
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01M—PROCESSES OR MEANS, e.g. BATTERIES, FOR THE DIRECT CONVERSION OF CHEMICAL ENERGY INTO ELECTRICAL ENERGY
- H01M8/00—Fuel cells; Manufacture thereof
- H01M8/04—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids
- H01M8/04007—Auxiliary arrangements, e.g. for control of pressure or for circulation of fluids related to heat exchange
- H01M8/04067—Heat exchange or temperature measuring elements, thermal insulation, e.g. heat pipes, heat pumps, fins
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E60/00—Enabling technologies; Technologies with a potential or indirect contribution to GHG emissions mitigation
- Y02E60/30—Hydrogen technology
- Y02E60/50—Fuel cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Sustainable Development (AREA)
- Sustainable Energy (AREA)
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Electrochemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Fuel Cell (AREA)
Abstract
The invention discloses plug-in type film thermocouples of a kind of real-time measurement hydrogen fuel cell internal temperature and preparation method thereof, including Kapton and several thermocouples being set on Kapton, the thermocouple includes the constantan thermode being successively covered on Kapton, copper thermode and protective layer, wherein, one end of constantan thermode and one end of copper thermode are as film thermocouple measurement end, the other end of constantan thermode and the other end of copper thermode are connected as pin with external circuits, the thermocouple can be measured to hydrogen fuel cell interior temperature distribution, and production is simple, it is at low cost, Production Time is shorter.
Description
Technical field
The present invention relates to a kind of film thermocouples and preparation method thereof, and in particular in a kind of real-time measurement hydrogen fuel cell
Plug-in type film thermocouple of portion's temperature and preparation method thereof.
Background technique
Proton Exchange Membrane Fuel Cells (also known as hydrogen fuel cell claims hydrogen fuel cell below) can be by chemical energy without dirt
One of an important factor for dye is efficiently converted into electric energy, and internal temperature of battery distribution is influence its service life, performance, to internal temperature
Degree distribution, which measures, seems extremely important.Scale is very small in hydrogen fuel cell monomer film thickness direction, and measurement position
In closing narrow space, Ying Jili avoids measurement from interfering cell operation.At present to the temperature of hydrogen fuel cell
Degree test, the method for generalling use conventional resistance and thermocouple.But since the volume of traditional sensors is big, the response time is long,
Be not suitable for being used to measure the transient temperature inside hydrogen fuel cell.Under conditions of not changing battery structure, infrared imagery technique
Internal temperature of battery cannot be observed, fiber-optic grating sensor can not be distinguish temperature and strain.
Micro temperature sensor using MEMS technology production has boundless application prospect, can be used for real-time monitoring
The temperature change of inside battery.But the micro temperature sensor of previous scholars design mostly uses greatly noble metal to make resistor-type temperature
Sensor, have the shortcomings that it is at high cost, big by pressure influence, and use array thermocouple temperature is measured, have
The disadvantage that mobility is poor, applicable object is unique, the practical very thin micro temperature sensor of exploiting economy have very big research
And commercial value.
Summary of the invention
It is an object of the invention to overcome the above-mentioned prior art, provide in a kind of real-time measurement hydrogen fuel cell
Plug-in type film thermocouple of portion's temperature and preparation method thereof, the thermocouple can to hydrogen fuel cell interior temperature distribution into
Row measurement, and make simply, at low cost, Production Time is shorter.
In order to achieve the above objectives, the plug-in type thin film thermoelectric of real-time measurement hydrogen fuel cell internal temperature of the present invention
The even several thermocouples for including Kapton and being set on Kapton, the thermocouple include successively being covered in
Constantan thermode, copper thermode and protective layer on Kapton, wherein one end of constantan thermode and copper thermode
The node that one end is constituted is used as and draws as film thermocouple measurement end, the other end of constantan thermode and the other end of copper thermode
Foot is connected with external circuits.
Kapton with a thickness of 25 microns;Constantan thermode with a thickness of 0.2 micron;Copper thermode with a thickness of
0.3 micron.
The size of film thermocouple measurement end is 100 microns × 100 microns.
In measurement, the plug-in type film thermocouple of the real-time measurement hydrogen fuel cell internal temperature is clipped on hydrogen combustion
Be provided between membrane electrode assembly and flow-field plate, and on Kapton in material battery thermode facing towards membrane electrode assembly
The membrane electrode assembly of part, film thermocouple measurement end and hydrogen fuel cell insulate.
The production method packet of the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature of the present invention
Include following steps:
1) Kapton is cleaned;
2) gluing is carried out on Kapton, then exposure development, so that occurring constantan heat on Kapton
The pattern of electrode, then Kapton surface is bombarded by air plasma;
3) constantan film is sputtered on Kapton using magnetic control sputtering system, then carries out processing of removing photoresist, obtain constantan
Thermode obtains test piece;
4) gluing is carried out in the test piece that step 3) obtains, then exposure development, so that occurring copper on Kapton
The pattern of thermode, then the surface by air plasma bombardment Kapton;
5) Copper thin film is being deposited through step 4) treated strip using electron beam evaporation plating system, then is carrying out place of removing photoresist
Reason, obtains copper thermode;
6) gluing is carried out on through step 5) treated test piece, obtains protective layer, then by photoetching development, so that with outer
It connects the pin that circuit is connected to expose, then protective layer is solidified, obtain real-time measurement hydrogen fuel cell internal temperature
Plug-in type film thermocouple.
The material of protective layer is photoresist AZ4620.
Cured detailed process is carried out to protective layer in step 6) are as follows: test piece is placed into the environment of 110 DEG C and is toasted
30min。
The bombardment time of air plasma is 2min in step 2);
The bombardment time of air plasma is 2min in step 4).
The concrete operations of step 1) are as follows:
Kapton is cleaned by deionized water, is placed into acetone soln, and sonic oscillation 3min, with
Remove the grease on Kapton surface.
The invention has the following advantages:
The plug-in type film thermocouple and preparation method thereof of real-time measurement hydrogen fuel cell internal temperature of the present invention
When specific operation, on Kapton several thermocouples are being provided with, in measurement, which is being inserted into
In the inside of hydrogen fuel cell, to realize the measurement to hydrogen fuel cell interior temperature distribution, in addition, it is necessary to explanation, this
The invention plug-in type film thermocouple uses the higher Kapton of suppleness as substrate, to increase thin film thermoelectric
It is not limited by hydrogen fuel cell structure when being occasionally embedded into the durability for carrying out temperature measurement inside hydrogen fuel cell, while measuring.
In addition, using more mature technology in the preparation, pipelining and batch production can be realized, production is simple, and it is at low cost,
And Production Time is shorter.
Detailed description of the invention
Fig. 1 is the structural diagram of the present invention;
Schematic diagram when Fig. 2 is present invention measurement.
Wherein, 1 it is film thermocouple measurement end, 2 be Kapton, 3 be constantan thermode, 4 is copper thermode, 5
It is membrane electrode assembly for protective layer, 6,7 is flow-field plate.
Specific embodiment
The invention will be described in further detail with reference to the accompanying drawing:
With reference to Fig. 1, the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature of the present invention includes
Kapton 2 and several thermocouples being set on Kapton 2, the thermocouple include successively being covered in polyamides
Constantan thermode 3, copper thermode 4 and protective layer 5 on imines film 2, wherein one end of constantan thermode 3 and copper thermode 4
One end as film thermocouple measurement end 1, the other end of the other end of constantan thermode 3 and copper thermode 4 as pin with
External circuits are connected.
Kapton 2 with a thickness of 25 microns;Constantan thermode 3 with a thickness of 0.2 micron;The thickness of copper thermode 4
Degree is 0.3 micron;The size of film thermocouple measurement end 1 is 100 microns × 100 microns.
With reference to Fig. 2, in measurement, the plug-in type film thermocouple of the real-time measurement hydrogen fuel cell internal temperature is pressed from both sides
Loaded in hydrogen fuel cell between membrane electrode assembly 6 and flow-field plate 7, and facing for thermode 3 is provided on Kapton 2
To membrane electrode assembly 6, the membrane electrode assembly 6 of film thermocouple measurement end 1 and hydrogen fuel cell insulate, in addition, to make to be inserted into hydrogen
The film thermocouple of fuel battery inside not will cause leakage of reaction gas, and the sealing ring in insertion film thermocouple side carries out
Dispensing.
The production method packet of the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature of the present invention
Include following steps:
1) Kapton 2 is cleaned;
2) gluing is carried out on Kapton 2, then exposure development, so that there is constantan on Kapton 2
The pattern of thermode 3, then 2 surface of Kapton is bombarded by air plasma;
3) constantan film is sputtered on Kapton 2 using magnetic control sputtering system, then carries out processing of removing photoresist, obtain constantan
Thermode 3, obtains test piece;
4) gluing is carried out in the test piece that step 3) obtains, then exposure development, so that there is copper on Kapton 2
The pattern of thermode 4, then the surface by air plasma bombardment Kapton 2;
5) Copper thin film is being deposited through step 4) treated strip using electron beam evaporation plating system, then is carrying out place of removing photoresist
Reason, obtains copper thermode 4;
6) gluing is carried out on through step 5) treated test piece, obtains protective layer 5, then by photoetching development, so that with
The pin that external circuits are connected exposes, then solidifies to protective layer 5, obtains real-time measurement hydrogen fuel cell internal temperature
Plug-in type film thermocouple.
The material of protective layer 5 is photoresist AZ4620.
Cured detailed process is carried out to protective layer 5 in step 6) are as follows: test piece is placed into the environment of 110 DEG C and is toasted
30min。
The bombardment time of air plasma is 2min in step 2);
The bombardment time of air plasma is 2min in step 4).
The concrete operations of step 1) are as follows: Kapton 2 is cleaned by deionized water, places into acetone soln
In, and sonic oscillation 3min, to remove the grease on 2 surface of Kapton.
Using the present invention may be implemented multiple film thermocouples be neatly inserted into inside hydrogen fuel cell to Temperature Distribution into
Row measurement, may be implemented pipelining and batch production, both can guarantee that the insertion of film thermocouple not will cause letting out for gas
Leakage, and can make substrate that there is good suppleness, progress temperature inside hydrogen fuel cell is inserted into increase film thermocouple
The durability of measurement.Use occasion is not limited by hydrogen fuel cell structure, facilitates realization to the fast of hydrogen fuel cell internal temperature
Speed measurement.
The above-mentioned only present invention preferably feasible embodiment, the non-therefore limitation scope of the present invention, according to above-mentioned reality
It applies the made various modifications of example or applies within this technical solution protection scope.
Claims (9)
1. a kind of plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature, which is characterized in that including polyamides Asia
Amine film (2) and several thermocouples being set on Kapton (2), the thermocouple include successively being covered in polyamides Asia
Constantan thermode (3), copper thermode (4) and protective layer (5) on amine film (2), wherein one end of constantan thermode (3) and
The node that one end of copper thermode (4) is constituted is as film thermocouple measurement end (1), the other end and copper of constantan thermode (3)
The other end of thermode (4) is connected as pin with external circuits.
2. the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature according to claim 1, feature
Be, Kapton (2) with a thickness of 25 microns;Constantan thermode (3) with a thickness of 0.2 micron;Copper thermode (4)
With a thickness of 0.3 micron.
3. the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature according to claim 1, feature
It is, the size of film thermocouple measurement end (1) is 100 microns × 100 microns.
4. the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature according to claim 1, feature
It is, in measurement, the plug-in type film thermocouple of the real-time measurement hydrogen fuel cell internal temperature is clipped on hydrogen fuel
The face of constantan thermode (3) is provided in battery between membrane electrode assembly (6) and flow-field plate (7), and on Kapton (2)
Towards membrane electrode assembly (6), the membrane electrode assembly (6) of film thermocouple measurement end (1) and hydrogen fuel cell insulate.
5. a kind of production side of the plug-in type film thermocouple of real-time measurement hydrogen fuel cell internal temperature described in claim 1
Method, which comprises the following steps:
1) Kapton (2) is cleaned;
2) gluing is carried out on Kapton (2), then exposure development, so that there is constantan on Kapton (2)
The pattern of thermode (3), then Kapton (2) surface is bombarded by air plasma;
3) constantan film is sputtered on Kapton (2) using magnetic control sputtering system, then carries out processing of removing photoresist, obtain constantan heat
Electrode (3), obtains test piece;
4) gluing is carried out in the test piece that step 3) obtains, then exposure development, so that occurring copper heat on Kapton (2)
The pattern of electrode (4), then the surface by air plasma bombardment Kapton (2);
5) Copper thin film is being deposited through step 4) treated strip using electron beam evaporation plating system, then is carrying out processing of removing photoresist,
It obtains copper thermode (4);
6) gluing is carried out on through step 5) treated test piece, obtains protective layer (5), then by photoetching development, so that with outer
It connects the pin that circuit is connected to expose, then protective layer (5) is solidified, obtain real-time measurement hydrogen fuel cell internal temperature
Plug-in type film thermocouple.
6. the plug-in type film thermocouple production side of real-time measurement hydrogen fuel cell internal temperature according to claim 5
Method, which is characterized in that the material of protective layer (5) is photoresist AZ4620.
7. the plug-in type film thermocouple production side of real-time measurement hydrogen fuel cell internal temperature according to claim 5
Method, which is characterized in that cured detailed process is carried out to protective layer (5) in step 6) are as follows: test piece is placed into 110 DEG C of environment
Lower baking 30min.
8. the plug-in type film thermocouple production side of real-time measurement hydrogen fuel cell internal temperature according to claim 5
Method, which is characterized in that the bombardment time of air plasma is 2min in step 2);The bombardment of air plasma in step 4)
Time is 2min.
9. the plug-in type film thermocouple production side of real-time measurement hydrogen fuel cell internal temperature according to claim 5
Method, which is characterized in that the concrete operations of step 1) are as follows:
Kapton (2) is cleaned by deionized water, is placed into acetone soln, and sonic oscillation 3min, with
Remove the grease on Kapton (2) surface.
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Cited By (2)
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CN114976137A (en) * | 2022-05-25 | 2022-08-30 | 上海氢晨新能源科技有限公司 | Flexible partition characteristic test piece for fuel cell |
CN116613355A (en) * | 2023-05-22 | 2023-08-18 | 北京亿华通科技股份有限公司 | Temperature testing device for acquiring temperature distribution of single battery and preparation method thereof |
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Cited By (4)
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CN114976137A (en) * | 2022-05-25 | 2022-08-30 | 上海氢晨新能源科技有限公司 | Flexible partition characteristic test piece for fuel cell |
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CN116613355A (en) * | 2023-05-22 | 2023-08-18 | 北京亿华通科技股份有限公司 | Temperature testing device for acquiring temperature distribution of single battery and preparation method thereof |
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