CN110161039A - A kind of high power continuous laser damage threshold automatic testing equipment - Google Patents
A kind of high power continuous laser damage threshold automatic testing equipment Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/8806—Specially adapted optical and illumination features
- G01N2021/8809—Adjustment for highlighting flaws
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Abstract
The invention discloses a kind of high power continuous laser damage threshold automatic testing equipments, including three-dimensional automatically controlled target platform system, the damage from laser moment monitors system, damage Optical Maser System and sequence controlled computer, in work, the device will indicate light, laser illuminator, aiming laser and damage laser concurrent, when target damage, the impaired loci of target material surface will cause the variation of laser illuminator scattering properties, computer chronograph, which is issued according to the variation of laser illuminator scattering properties to sequence controlled computer, stops laser irradiation signal, sequence controlled computer is according to laser irradiation time and damage laser power, determine the laser damage threshold of target material.Apparatus of the present invention are not only suitable for high power continuous laser damage threshold and test automatically, are also applied for super continuous or Gao Zhongying laser damage threshold automatic test, are not only suitable for the test of transparent material damage threshold, are also applied for the test of non-transparent material damage threshold.
Description
Technical field
The present invention relates to optical technical field, more particularly to a kind of laser damage threshold test auto-control dress
It sets.
Background technique
With the development of laser technology, the high powers such as optical fiber continuous laser, multi-pulsed laser, Gao Zhongying quasi-continuous lasing are got over
More to become the favorite of processing industry, application field is more and more wider.In laser field, especially high power laser light field, one
A important factor is whether optical element is able to bear intense laser radiation；In field of laser processing, the laser deflection of material
Value determines the selection of processing laser parameter.Therefore, in laser application, how online, quickly and accurately determine pulse laser
Laser damage threshold, continuous laser and super continuous laser the damage moment, be always high-order harmonics spectrum field
One of main research.
ISO-11254-1 (laser and laser equipment optical surface laser have been promulgated in test for damage from laser in the world
Lead to the measurement part 1 of damage threshold: 1-on-1 test) and ISO 11254-2 (the induced with laser damage of the optical surface of measurement
Hurt threshold value part 2: S-ON-1 test), the judgement of damage from laser is standardized.Regulation uses 100-150 times in standard
Microscope to after laser irradiation optical element and optical thin film observe, to judge whether to damage.1996, I
State industry research person combines above-mentioned two international standard, has promulgated that (optical surface swashs standard GB/T/T 16601-1996
Light injury threshold test method part 1: 1 pair of 1 test), it is in laser irradiation the standard specifies the detection to damage from laser
Front and back, each test point apply differential contrast microscope to detect its surface, and enlargement ratio is not less than 150 times.These above-mentioned sides
Method, there are many drawbacks:
(1) it is suitable only for the test of fritter, thin sample damage from laser；
(2) belong to after tests, after laser irradiation, sample is lifted down and is tested.It needs simultaneously to damage from laser area
Domain is marked in advance, cannot achieve automatic test；
(3) it is suitable only for the continuous laser and super continuous laser of pulse laser or constant power and irradiation time, it can not
Realize that continuous laser and super continuous laser damage critical judgement；
(4) manual type is used, many uncertain factors can be brought.Sample is frequently set to be to and from damage measure target first
Platform and microscope carrier, sample surfaces can bring scuffing, while large labor intensity, waste of manpower；Secondly, will be in 100-150
Times microscopically observation, region is small, in advance label and impaired loci find, alignment difficulty it is big；Human subjective judges damage from laser
And its degree, subjectivity is strong, varies with each individual.
Therefore, based on above-mentioned test method there are the problem of, domestic many researchers, according to respective demand, development
Many test methods.1996, Chinese Academy of Sciences's Shanghai ray machine was reported based on Nuo Mansiji polarizing interferometer and CCD camera
Judge Damage of Optical Glasses method；1998, and report based on He-Ne laser, knife, photodiode and oscillograph
Damage from laser determination method.2004, the National University of Defense technology reported based on high speed PIN photoelectric detector and oscillograph, real
When detection transmission light pulse and by delay scattering light pulse, by transmit light pulse distortion, as transparent material damage
The foundation of judgement.2010, Northwestern Polytechnical University analyzed the factor that Forward scattering judges Damage of Optical Film that influences.2014
Year, Northwestern Polytechnical University proposes the research method that acoustic method differentiates thin film damage.2016, Institutes Of Technology Of Nanjing proposed base
Damage of the pulse laser to target is differentiated in fiber spectrometer exploring laser light induced plasma.2018, Changchun science and engineering was big
It learns and reports the thin film damage method of discrimination based on CCD imaging.
These methods are made a general survey of, for the continuous and super continuous laser under pulse laser damage, constant power and time conditions
Damage, it is entirely appropriate, but continuous laser can not be suitable for, Gao Zhongying laser and super continuous laser damage threshold accurately be sentenced
According to.
Therefore, how to provide a kind of high power continuous laser damage threshold automatic testing equipment be those skilled in the art urgently
Problem to be solved.
Summary of the invention
In view of this, the present invention provides a kind of high power continuous laser damage threshold automatic testing equipment, the company of realizing
The accurate test and judgement of continuous laser, Gao Zhongying laser and super continuous laser damage threshold, are not only suitable for transparent material damage threshold
It is worth the test of characteristic, is also applied for the test of non-transparent material damage threshold characteristic.
To achieve the goals above, the present invention adopts the following technical scheme:
A kind of high power continuous laser damage threshold automatic testing equipment, comprising: three-dimensional automatically controlled target platform system, laser
Damage moment monitoring system, damage Optical Maser System and sequence controlled computer；
The automatically controlled target platform system of three-dimensional includes target and three-dimensional automatically controlled target platform, the automatically controlled target of three-dimensional
Platform is for fixing the target；
The damage Optical Maser System includes damage laser focusing system, laser beam expanding system, damage laser, takes aim at
Quasi- laser, Laser Power Devices and its power supply, the aiming laser device and the damage laser coaxial, and the aiming laser
Device issue aiming laser and the damage laser issue damage laser successively pass through the laser beam expanding system and
The damage laser focusing system focuses in the same point of the target, and laser is used in the Laser Power Devices control damage
Damage laser power and irradiation time；
The damage from laser moment monitoring system includes condenser lens one, condenser lens two, laser bundle-enlarging collimation mirror, instruction
Light laser, double color reflection mirror, narrow band filter, condenser lens three, photodetector, it is preceding put and comparison circuit, timing calculate
Machine and illumination laser；The instruction light that the instruction light laser issues is after laser bundle-enlarging collimation mirror collimation, then successively
The damage from laser area of the target is focused on by the double color reflection mirror, the condenser lens two and the condenser lens one
Domain, and be overlapped with the damage laser that the damage is issued with laser；The laser illuminator that the illumination laser issues with it is described
The damage laser that damage laser issues is overlapped；
From the target to being disposed with the condenser lens one, described the optical path axis of the photodetector
Condenser lens two, the double color reflection mirror, the narrow band filter and the condenser lens three；It is the photodetector, described
Before put and comparison circuit and the computer chronograph are sequentially connected electrically；
The sequence controlled computer and Laser Power Devices electrical connection, sequence controlled computer control the automatically controlled target platform of three-dimensional
And the Laser Power Devices are controlled by the Laser Power Devices, the sequence controlled computer is controlled by the computer chronograph.
Further, the automatically controlled target platform of the three-dimensional includes the mobile control module of X-direction, Y-direction mobile control module, Z
Control module, target platform control cabinet and target decometer tool are moved in direction, and the target platform control cabinet controls the mobile control mould of the X-direction
The moving step length and step number of the mobile control module of block, the Y-direction and the mobile control module of the Z-direction, wherein the side X
To mobile control module and the mobile control module of the Y-direction, the target decometer tool is controlled along damage laser lateral position
Mobile, to adjust damage laser to the damage field of target, the mobile control module control of the Z-direction is along damage laser longitudinal direction
Position, to adjust damage laser to the focus condition of target damage field；The target decometer tool is described for fixing the target
Sequence controlled computer controls the target platform control cabinet.
Further, the instruction light laser is the continuous visible laser that the angle of divergence is mrad magnitude, is issued
Indicate that light is class directional light after the laser bundle-enlarging collimation mirror.
Further, the illumination laser is visible laser, and wavelength and the wavelength for indicating light laser are not
Together.
Further, the double color reflection mirror and the optical path axis angle at 45 °, the membrane system of the double color reflection mirror is to described
Indicate the instruction light total reflection or most of reflection that light laser issues, and to the laser illuminator full impregnated of the illumination laser
It penetrates.
Further, the wave band of the narrow band filter and the wavelength of the illumination laser match.
Further, the laser illuminator of the illumination laser focuses on the damage from laser region of target, causes to scatter light
The variation of scattered light signal is converted to the variation of electrical signal levels, put before described and more electric by variation, the photodetector
Road provides high level signal or low level signal according to the level signal.
Further, the computer chronograph can be according to the high level signal or low electricity put before described and comparison circuit provides
Ordinary mail number, triggers the sequence controlled computer, and the sequence controlled computer controls the Laser Power Devices, described in the Laser Power Devices control
Damage laser changes laser power and irradiation time or the Laser Power Devices control the damage laser and terminate and swash
Light irradiation.
It can be seen via above technical scheme that compared with prior art, the present disclosure provides a kind of high power is continuous
Laser damage threshold automatic testing equipment, in work, which will indicate that light, laser illuminator, aiming laser are total to laser is damaged
Point gives sequence controlled computer trigger signal while damaging laser irradiation target later, when target damage, the damage of target material surface
Point will cause the variation of laser illuminator scattering properties, and photodetector is believed the laser scattering properties of variation by light-to-current inversion
Breath is sent into computer chronograph, and computer chronograph is issued to sequence controlled computer stops laser irradiation signal, stops laser irradiation, journey
Control computer provides the irradiation time and damage laser power of target target, determines mesh according to irradiation time and damage laser power
Mark the laser damage threshold of material.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
The embodiment of invention for those of ordinary skill in the art without creative efforts, can also basis
The attached drawing of offer obtains other attached drawings.
Fig. 1 attached drawing is high power continuous laser damage threshold automatic testing equipment overall structure provided by the invention signal
Figure.
Fig. 2 attached drawing is the automatically controlled target platform concrete structure diagram of three-dimensional provided by the invention.
Fig. 3 attached drawing is to monitor system concrete structure diagram at the damage from laser moment provided by the invention.
Fig. 4 attached drawing is damage Optical Maser System concrete structure diagram provided by the invention.
Wherein, each section indicates:
100, three-dimensional automatically controlled target platform system, 101, the mobile control module of X-direction, 102, the mobile control module of Y-direction,
103, the mobile control module of Z-direction, 104, target platform control cabinet, 105, target decometer tool, 200, damage from laser moment monitoring system,
201, condenser lens one, 202, condenser lens two, 203, laser bundle-enlarging collimation mirror, 204, instruction light laser, 205, double-color reverse
Penetrate mirror, 206, narrow band filter, 207, condenser lens three, 208, photodetector, 209, it is preceding put and comparison circuit, 210, timing
Computer, 211, illumination laser, 300, damage Optical Maser System, 301, damage laser focusing system, 302, laser beam expanding
System, 303, damage laser, 304, aiming laser device, 305, Laser Power Devices.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
The embodiment of the invention discloses a kind of high power continuous laser damage threshold automatic testing equipment, in conjunction with attached drawing 1-4,
It include: three-dimensional automatically controlled target platform system 100, damage from laser moment monitoring system 200, damage Optical Maser System 300 and journey
Control computer 400；
Three-dimensional automatically controlled target platform system 100 includes target and three-dimensional automatically controlled target platform, and three-dimensional automatically controlled target platform is used
In fixed target；Three-dimensional automatically controlled target platform includes the mobile control module 101 of X-direction, Y-direction mobile control module 102, the side Z
To mobile control module 103, target platform control cabinet 104 and target decometer tool 105, the mobile control module 101 of X-direction and Y-direction are mobile
Control module 102 controls target decometer and has 105 moving along damage laser lateral position, to adjust damage laser to the damage of target
Hurt region, determine the position of target impaired loci, mobile 103 control of control of Z-direction realizes damage along the lengthwise position of damage laser
Hurt the adjusting of laser facula area；Target platform control cabinet 104 controls the mobile control module 101 of X-direction, the mobile control module of Y-direction
102 and the mobile control module 103 of Z-direction moving step length and step number, sequence controlled computer 400 controls target platform control cabinet 104.
Damage includes damage laser focusing system 301, laser beam expanding system 302, damage laser with Optical Maser System 300
Device 303, aiming laser device 304 and Laser Power Devices 305, aiming laser device 304 and damage laser 303 are coaxial, and aiming laser
The damage laser that the aiming laser and damage laser 303 that device 304 issues issue successively passes through 302 He of laser beam expanding system
Damage laser focusing system 301 focuses in the same point of target；It should be noted that damage is near infrared band with laser,
Invisible, intensity is higher；And aiming laser is visible light, intensity is smaller, and the two is coaxial, realizes refer to which which beats, Laser Power Devices 305
Control the damage laser power and irradiation time of damage laser 303.
It includes condenser lens 1, condenser lens 2 202, laser bundle-enlarging collimation mirror that the damage from laser moment, which monitors system 200,
203, indicate light laser 204, double color reflection mirror 205, narrow band filter 206, condenser lens 3 207, photodetector 208,
Before put and comparison circuit 209, computer chronograph 210 and illumination laser 211；Indicate the instruction light warp that light laser 204 issues
(width at this time depends on double color reflection mirror 205 and condenser lens one after laser bundle-enlarging collimation mirror 203 is adjusted to suitable width
201 with the geometric dimension of condenser lens 2 202), then successively pass through double color reflection mirror 205, condenser lens 2 202 and condenser lens
One 201 focus on the damage from laser region of target, and are overlapped with damage with the damage laser that laser 303 issues；Adjustment illumination
The angle of laser 211, the damage laser that the laser illuminator and damage laser 303 for issuing illumination laser 211 issue
It is overlapped, realizes that system aims at；
Wherein, photodetector 208, preceding put and comparison circuit 209, computer chronograph 210 are sequentially connected electrically；From target to
Condenser lens 1, condenser lens 2 202, double color reflection mirror are disposed between the optical path axis of photodetector 208
205, narrow band filter 206 and condenser lens 3 207；
Sequence controlled computer 400 controls three-dimensional automatically controlled target platform by control target platform control cabinet 104 and passes through Laser Power Devices
305 control damage lasers 303, and sequence controlled computer 400 is controlled by computer chronograph 210.
To advanced optimize above-mentioned technical proposal, instruction light laser 204 is continuous visible laser, emergent light
The angle of departure is smaller, generally mrad magnitude, is the class directional light with the smaller angle of departure after laser bundle-enlarging collimation mirror 203.Hair
Angle is dissipated in several mrad magnitudes, and different laser divergence angles is different.
To advanced optimize above-mentioned technical proposal, illumination laser 211 is visible laser, and wavelength and instruction light swash
The wavelength of light device is different.
To advanced optimize above-mentioned technical proposal, double color reflection mirror 205 and optical path axis are angled, double color reflection mirror
Membrane system instruction light total reflection that instruction light laser 204 is issued or it is most of reflect, and the illumination to illumination laser 211
Laser total transmissivity.
To advanced optimize above-mentioned technical proposal, the wave band of narrow band filter 206 and the wavelength of illumination laser match,
And broadband is as small as possible.
To advanced optimize above-mentioned technical proposal, photodetector 208 is scattered according to the laser illuminator of illumination laser 211
Optical signal is converted to electrical signal levels, preceding to put and comparison circuit 209 provides high level signal according to level signal or low level is believed
Number.
Computer chronograph 210 can trigger sequence controlled computer 400, program-controlled meter according to high level signal or low level signal
Calculation machine 400 controls Laser Power Devices 305, and Laser Power Devices 305 control damage and terminate laser irradiation with laser 303.
The present invention is that sequence controlled computer 400 is used according to the three-dimensional automatically controlled target platform of the procedure auto-control preset and damage
The output power and irradiation time of laser 303, while receiving the trigger signal of the laser illuminator of monitoring damage from laser.
Optical path debug when, it is necessary first to by damage laser 303, aiming laser device 304, instruction light laser 204 with
And four class light concurrents on target that illumination laser 211 issues.
When work, aiming laser device 304 is closed, the laser 303 of damage at this time irradiates target, while Laser Power Devices 305
Trigger signal is issued to sequence controlled computer 400, starts timing, when target material surface damages, illumination laser 211 is caused to be sent out
The scattered wave of laser illuminator out changes, line focus lens 1, condenser lens 2 202, double color reflection mirror 205, narrow-band-filter
After piece 206 and condenser lens 3 207, the electrical signal levels for converting photodetector 208 change, and put before making and more electric
Road 209 provides high or low level, triggering timing computer 210, and computer chronograph 210 issues triggering letter to sequence controlled computer 400
Number, at this point, sequence controlled computer 400 controls the mobile control module of X-direction or the mobile control module of Y-direction is mobile, and then change
The position of target, and sequence controlled computer 400 changes the laser power of damage laser 303 according to half point approximatioss or presses
Reduce the laser irradiation time according to scheduled program, continues to irradiate；If not damaging, computer chronograph 210 does not generate trigger signal,
After irradiation time is completed, sequence controlled computer 400 controls the mobile control module of X-direction or the mobile control module of Y-direction is mobile,
And then change the position of target, and sequence controlled computer 400 changes the laser function of damage laser 303 according to multiple amplifying method
The increase laser irradiation time is arranged according to preset program in rate, continues to irradiate target, until target material surface just damages；
Computer chronograph 210 is issued to sequence controlled computer 400 stops laser irradiation signal, stops laser irradiation, program-controlled meter
Calculation machine 400 provides laser irradiation time and the damage laser power of target target.
Wherein, sequence controlled computer 400 changes the damage laser 303 according to half point approximatioss or multiple amplifying method
Power and according to the preset routine change laser irradiation time specifically includes the following steps: setting initial damage laser power P0, just
Beginning irradiation time is T0；
Target is irradiated, if target damages, setting damage laser power P1For P0It is worth half, changes the position of target, if
Target damage, the setting damage of sequence controlled computer 400 laser power P2, P2For P1Half, if target does not damage, will damage
Hurt laser power in P1On the basis of, increase P2The half of value, and so on, until target damages；Continue to be reduced to P1One
Half, if target target does not damage, increase to P1Half irradiated in this course until target material surface just damages
Time is constant；
Or irradiation target, if target damages, irradiation time T is arranged in sequence controlled computer 4001, T1For T0Δ T, Δ T
For the step-length that the time changes, change the position of the target, if the target still damages, the sequence controlled computer
400 continue that irradiation time T is arranged2, T1For T0- 2 Δ T, and so on, until the target just damages；
It should be noted that the laser irradiation time can be changed, directly using Δ T/2, Δ T/4 ... Δ T/n as time step
It reaches and just damages；In this course, irradiation power is constant.
During the present invention works, by sequence controlled computer 400 be arranged three-dimensional automatically controlled target platform two-dimensional movement step-length and
Step number, and output power and the laser irradiation time of damage laser 303, on the one hand, fixed laser power increases laser
Irradiation time, until target damage；On the other hand, fixed laser irradiation time increases laser power, until damage from laser.
Sequence controlled computer 400 finally provides laser power and irradiation time, and combines the laser spot size (side Z at target
Facula area is determined to mobile control 103), determine the laser damage threshold of target material.The present apparatus is not only suitable for high power company
Continuous laser damage threshold is tested automatically, is also applied for super continuous or Gao Zhongying laser damage threshold automatic test, is not only suitable for
The test of transparent material damage threshold is also applied for the test of non-transparent material damage threshold.
Each embodiment in this specification is described in a progressive manner, the highlights of each of the examples are with other
The difference of embodiment, the same or similar parts in each embodiment may refer to each other.For device disclosed in embodiment
For, since it is corresponded to the methods disclosed in the examples, so being described relatively simple, related place is said referring to method part
It is bright.
The foregoing description of the disclosed embodiments enables those skilled in the art to implement or use the present invention.
Various modifications to these embodiments will be readily apparent to those skilled in the art, as defined herein
General Principle can be realized in other embodiments without departing from the spirit or scope of the present invention.Therefore, of the invention
It is not intended to be limited to the embodiments shown herein, and is to fit to and the principles and novel features disclosed herein phase one
The widest scope of cause.
Claims (8)
1. a kind of high power continuous laser damage threshold automatic testing equipment characterized by comprising three-dimensional automatically controlled target platform
System (100), damage from laser moment monitoring system (200), damage Optical Maser System (300) and sequence controlled computer (400)；
The automatically controlled target platform system (100) of three-dimensional includes that target and three-dimensional automatically controlled target platform, the target are fixed on institute
It states on three-dimensional automatically controlled target platform；
The damage includes damage laser focusing system (301), laser beam expanding system (302), damage with Optical Maser System (300)
With laser (303), Laser Power Devices (305), aiming laser device (304) and its power supply, the aiming laser device (304) and described
Damage uses laser (303) coaxially, and laser is used in the aiming laser of the aiming laser device (304) sending and the damage
(303) the damage laser issued successively passes through the laser beam expanding system (302) and the damage laser focusing system (301) is poly-
On coke to the same point of the target, Laser Power Devices (305) are electrically connected with the damage with laser (303), and the laser
Power supply (305) the control damage damage laser power and irradiation time of laser (303)；
Damage from laser moment monitoring system (200) includes condenser lens one (201), condenser lens two (202), laser beam expanding
Collimating mirror (203), instruction light laser (204), double color reflection mirror (205), narrow band filter (206), condenser lens three
(207), photodetector (208), preceding put and comparison circuit (209), computer chronograph (210) and illumination laser (211)；Institute
The instruction light of instruction light laser (204) sending is stated after the laser bundle-enlarging collimation mirror (203) collimation, then successively by described
Double color reflection mirror (205), the condenser lens two (202) and the condenser lens one (201) focus on the laser of the target
Damage field, and be overlapped with the damage with the damage laser that laser (303) issues；The illumination laser (211) issues
Laser illuminator be overlapped with the damage with the damage laser that laser (303) issue；
The condenser lens one is disposed with from the target to the optical path axis of the photodetector (208)
(201), the condenser lens two (202), the double color reflection mirror (205), the narrow band filter (206) and the focusing are saturating
Mirror three (207)；The photodetector (208), it is described before put and comparison circuit (209) and the computer chronograph (210) according to
Secondary electrical connection；
The sequence controlled computer (400) and the Laser Power Devices (305) electrical connection, sequence controlled computer (400) control the three-dimensional
Automatically controlled target platform and by the Laser Power Devices (305) control it is described damage use laser (303), the sequence controlled computer
(400) it is controlled by the computer chronograph (210).
2. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 1, which is characterized in that institute
Stating three-dimensional automatically controlled target platform includes X-direction mobile control module (101), Y-direction mobile control module (102), Z-direction movement
Control module (103), target platform control cabinet (104) and target decometer tool (105), the target platform control cabinet (104) control the X-direction
The shifting of mobile control module (101), the Y-direction mobile control module (102) and the Z-direction mobile control module (103)
Dynamic step-length and step number, wherein the X-direction mobile control module (101) and the Y-direction mobile control module (102) control
The target decometer has (105) moving along damage laser lateral position, to adjust damage field of the damage laser to target, institute
It states Z-direction mobile control module (103) and controls the target decometer tool (105) along damage laser lengthwise position, to adjust damage
Focus condition of the laser to target damage field；The target decometer tool (105) is for fixing the target, the sequence controlled computer
(400) the target platform control cabinet (104) is controlled.
3. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 2, which is characterized in that institute
Stating instruction light laser (204) is the continuous visible laser that the angle of divergence is mrad magnitude, described in the instruction light warp issued
Laser bundle-enlarging collimation mirror (203) is class directional light afterwards.
4. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 3, which is characterized in that institute
Stating illumination laser (211) is visible laser, and wavelength is different from the instruction wavelength of light laser (204).
5. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 4, which is characterized in that institute
Double color reflection mirror (205) and the optical path axis angle at 45 ° are stated, the membrane system of the double color reflection mirror (205) is to the instruction light
The instruction light total reflection or most of reflection that laser (204) issues, and it is complete to the laser illuminator of the illumination laser (211)
Transmission.
6. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 4, which is characterized in that institute
The wavelength for stating the wave band and the illumination laser (211) of narrow band filter (206) matches.
7. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 4, which is characterized in that institute
The laser illuminator for stating illumination laser (211) focuses on the damage from laser region of target, causes the variation for scattering light, the light
The variation of scattered light signal is converted to the variation of electrical signal levels by electric explorer (208), is put before described and comparison circuit (209)
High level signal or low level signal are provided according to the level signal.
8. a kind of high power continuous laser damage threshold automatic testing equipment according to claim 7, which is characterized in that institute
Stating computer chronograph (210) can be according to putting before described and the high level signal that comparison circuit (209) provides or described low
Level signal triggers the sequence controlled computer (400), and the sequence controlled computer (400) controls the Laser Power Devices (305), institute
It states Laser Power Devices (305) control damage and changes laser power and irradiation time or laser electricity with laser (303)
The control damage in source (305) terminates laser irradiation with laser (303).
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110927170A (en) * | 2019-12-04 | 2020-03-27 | 中国工程物理研究院激光聚变研究中心 | Defect determination method, device and system |
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|---|---|---|---|---|
| CN107727584A (en) * | 2017-09-25 | 2018-02-23 | 国网重庆市电力公司电力科学研究院 | Gas on-line monitoring method in a kind of high-voltage switch gear |
| CN107870162A (en) * | 2017-11-01 | 2018-04-03 | 电子科技大学 | The method for improving optical element damage threshold under nanosecond frequency tripled laser irradiation |
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2019
- 2019-05-05 CN CN201910368718.9A patent/CN110161039A/en active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107727584A (en) * | 2017-09-25 | 2018-02-23 | 国网重庆市电力公司电力科学研究院 | Gas on-line monitoring method in a kind of high-voltage switch gear |
| CN107870162A (en) * | 2017-11-01 | 2018-04-03 | 电子科技大学 | The method for improving optical element damage threshold under nanosecond frequency tripled laser irradiation |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110927170A (en) * | 2019-12-04 | 2020-03-27 | 中国工程物理研究院激光聚变研究中心 | Defect determination method, device and system |
| CN110927170B (en) * | 2019-12-04 | 2022-03-08 | 中国工程物理研究院激光聚变研究中心 | Defect determination method, device and system |
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