CN110133940A - A kind of acousto-optic deflection device device improving laser scanning angle - Google Patents
A kind of acousto-optic deflection device device improving laser scanning angle Download PDFInfo
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- CN110133940A CN110133940A CN201910417069.7A CN201910417069A CN110133940A CN 110133940 A CN110133940 A CN 110133940A CN 201910417069 A CN201910417069 A CN 201910417069A CN 110133940 A CN110133940 A CN 110133940A
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- acousto
- optic
- deflection device
- scanning angle
- optical
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
Abstract
The present invention relates to field of optical device technology, in particular for the acousto-optic deflection device of laser scanning, specially a kind of acousto-optic deflection device device for improving laser scanning angle.The acousto-optic deflection device device includes N grades of audio-optical deflection device assemblies；The N grades of audio-optical deflection device assembly includes shell, is provided with mounting plate on the shell, is equipped with sequentially connected N number of acousto-optic deflection device, N-1 acousto-optic modulator and 1 optical fiber collimator on a mounting board；The present invention has significantly improved the scanning angle of laser, has been able to satisfy wide-angle, high-precision and the requirement quickly scanned by cascading acousto-optic deflection device.
Description
Technical field
The present invention relates to field of optical device technology, specially a kind of in particular for the acousto-optic deflection device of laser scanning
Improve the acousto-optic deflection device device of laser scanning angle.
Background technique
Laser beam deflection scanning is in semiconductor machining, military detection, aerospace, biomedicine, nano science research etc.
Field has obtained more and more applications.The mode of laser beam deflection scanning at present mainly has mechanical scanning, piezoelectric ceramics reflection
Formula scanning, acousto-optic scanning and electropical scanning etc..
Mechanical scanning is rotated by mirror surface, and the deflection of light beam is realized using the principle of geometric optics, big with scanning angle,
The advantages that energy utilization is high, but it is big by its volume, scan frequency is low, scanning accuracy is low etc., and defects are restricted, some miniaturizations,
High speed, precision scanning occasion be difficult to be applied.
Piezoelectric ceramics reflective scanning mode realizes laser deflection using the flex effect of piezoelectric ceramics, has small in size, scanning
The advantages that frequency is very fast, but scanning angle is small (mrad magnitude), is unable to satisfy the laser scanning requirement of wide-angle.
Electropical scanning realizes the deflection of incident light by the electrooptic effect of crystal, and scanning accuracy is high, but its operating voltage height,
Scanning angle small (mrad magnitude), scan frequency are lower, therefore application range is very limited.
The deflection of incident light is realized in acousto-optic scanning by the acoustooptical effect of crystal, volume, intensity control, scan frequency and
Scanning accuracy etc. has remarkable advantage, but scanning angle is small, it is difficult to meet the scanning requirement of wide-angle.
Summary of the invention
In view of the above technical problems, the present invention provides it is a kind of improve laser scanning angle acousto-optic deflection device device, it
It is cascaded by acousto-optic deflection device, has increased exponentially the deflection scanning angle of acousto-optic deflection device.
To achieve the goals above, The technical solution adopted by the invention is as follows:
A kind of acousto-optic deflection device device improving laser scanning angle, the acousto-optic deflection device device includes that N grades of acousto-optics are inclined
Turn device assembly；The N grades of audio-optical deflection device assembly includes shell, is provided with mounting plate on the shell, is equipped on a mounting board
Sequentially connected N number of acousto-optic deflection device, N-1 acousto-optic modulator and 1 optical fiber collimator；Wherein, each acousto-optic deflection device
Scanning angle be θ0；- 1 grade of diffraction light of acousto-optic modulator or the deflection angle of+1 grade of diffraction light are θ0；N=2 or 3.
It further, further include one point of n multi-channel optical fibre switch before the N grades of audio-optical deflection device assembly, the road Ji Mei optical fiber is opened
It closes and a N grades of audio-optical deflection device assemblies is connected by optical fiber.Incident light is divided into the road n light by fiber switch, and every road light is again by N grades of sound
Total scanning angle of light deflector component deflection scanning, this component can reach Nn θ0。
The acousto-optic deflection device is consistent with the structure of acousto-optic modulator, but the operating power of its input is inconsistent；The knot
Structure includes acousto-optic medium, bonded layer, energy converter, table electrode, matching network, screw and fixed plate；Below the acousto-optic medium
It is connected with fixed plate, acousto-optic medium is fixed on the mounting plate by the screw in fixed plate；On the acousto-optic medium
Side is connected with bonded layer；Energy converter is installed above bonded layer；The acousto-optic medium is connect by energy converter with table electrode, table
Matching network is connected with above electrode；The matching network is connected to high-frequency socket；Wherein, the high-frequency socket is located at outside shell
Side.
Further, the ultrasonic wave that the energy converter of acousto-optic deflection device generates is shear wave.
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of tellurium oxide crystal；
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of quartz crystal；
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of germanium；
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of fused silica；
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of chalcogenide glass；
Optionally, the acousto-optic modulator and acousto-optic deflection device are made of GeAsSe glass；
Optionally, the beam waist diameter of the optical fiber collimator is greater than 0.3mm.
Optionally, the acousto-optic modulator and acousto-optic deflection device use tellurium oxide crystal, quartz crystal, germanium, fused silica, germanium
Any one in arsenic selenium glass and chalcogenide glass is made.
Further, buffer layer is additionally provided between shell and mounting plate；The buffer layer uses heat sink material, including
Indium foil or thermally conductive rubber mat.
Beneficial effects of the present invention:
1, the core scanning device of audio-optical deflection device assembly is acousto-optic deflection device in the present invention, therefore it still remains sound
The aspects such as light deflector is small in size, low in energy consumption, operating voltage is low, intensity control ability is strong, scan frequency is fast and scanning accuracy is high
The advantages of, it is cascaded further through acousto-optic deflection device, has significantly improved the scanning angle of laser, be able to satisfy wide-angle, high-precision and fast
The requirement of speed scanning.
2, fiber switch and audio-optical deflection device assembly are also combined use by the present invention, can significantly improve acousto-optic deflection device
The scanning angle of component meets the requirement of more high scan angles.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of 2 grades of audio-optical deflection device assemblies of the invention.
Fig. 2 is the structural schematic diagram of 3 grades of audio-optical deflection device assemblies of the invention.
Fig. 3 is the structural schematic diagram of 2 grades of optical fiber audio-optical deflection device assemblies of the invention.
Fig. 4 is the structural schematic diagram of 3 grades of optical fiber audio-optical deflection device assemblies of the invention.
In figure, 1, shell, 2, -1 grades of diffraction lights, 3,14,23,28,30 acousto-optic mediums, 4,15, bonded layer, 5,16, transducing
Device, 6,17, table electrode, 7,13 matching networks, 8,10,26, acousto-optic deflection device, 9,12, high-frequency socket, 11,27, acousto-optic modulation
Device, 12, high-frequency socket；18, mounting plate, 19, buffer layer, 20, optical fiber, 21, optical fiber collimator, 22, incident light, 24, screw,
25, fixed plate, 29 ,+1 grades of diffraction lights, 31,36, fiber switch, 32,33,2 grades of audio-optical deflection device assemblies, 34,35,37,38, point
Light, 39,40,3 grades of audio-optical deflection device assemblies.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below in conjunction with attached drawing to of the invention real
The technical solution applied in example is clearly and completely described, it is clear that described embodiment is only that present invention a part is implemented
Example, instead of all the embodiments.
Embodiment 1
As shown in Figure 1,2 grades of audio-optical deflection device assemblies of one kind of the invention, including shell 1, installation is installed in the shell 1
Plate 18 and buffer layer 19 are sequentially installed with acousto-optic deflection device 8, acousto-optic deflection device 10,11 and of acousto-optic modulator on mounting plate 18
Optical fiber collimator 21.
Wherein, acousto-optic deflection device 8 is mainly by acousto-optic medium 3, bonded layer 4, energy converter 5, table electrode 6, matching network 7, height
The composition such as frequency socket 9, screw 24 and fixed plate 25；It is connected with fixed plate 25 below the acousto-optic medium 3, passes through fixed plate 25
On screw 24 acousto-optic medium 3 is fixed on the mounting plate；Bonded layer 4 is connected with above the acousto-optic medium 3；In key
It closes and energy converter 5 is installed above layer 4；The acousto-optic medium 3 is connect by energy converter 5 with table electrode 6, is connected above table electrode 6
There is matching network 7；High-frequency socket 12 is arrived in the matching network connection 7；Wherein, the high-frequency socket 12 is located at the outside of shell 1.
Acousto-optic modulator 11 is mainly by high-frequency socket 12, matching network 13, acousto-optic medium 14, bonded layer 15, energy converter 16
It is formed with table electrode 17 Deng；Similar with the structure of above-mentioned acousto-optic deflection device 8, this embodiment is not repeated.
Similarly, acousto-optic deflection device 10 is as the construction of acousto-optic deflection device 9.
Light enters in shell 1 through optical fiber 20 and optical fiber collimator 21, obtains incident light 22.
As a kind of achievable mode, acousto-optic deflection device 8 and acousto-optic deflection device 10 are managed according to unusual acousto-optic deflection device
By design, therefore its diffraction light can obtain biggish scan angle.It is processed by careful design, acousto-optic deflection device 8 can be made
Scan angle with acousto-optic deflection device 10 is all θ0。
The working principle of acousto-optic modulator 11 is: radiofrequency signal is inputted from high-frequency socket 12, and matched network 13 successively passes
Defeated the radiofrequency signal that absorbs sound of energy converter 16 simultaneously generates ultrasonic wave on table electrode 17, across the incident light 22 of acousto-optic medium 14 and super
Acoustic optic interaction occurs for sound wave, generates -1 grade of diffraction light 2.According to acoustic optic interaction theory, -1 grade of acousto-optic modulator generation spreads out
The deflection angle for penetrating light 2 is related with working frequency, therefore passes through the working frequency of careful design acousto-optic modulator 11, can make -1 grade
The deflection angle of diffraction light 2 is θ0。
The working principle of acousto-optic deflection device 8 is: radiofrequency signal is inputted from high-frequency socket 9, and matched network 7 is successively transferred to
On table electrode 6, the sound absorption radiofrequency signal of energy converter 5 simultaneously generates ultrasonic wave, and the incident light 22 and ultrasonic wave across acousto-optic medium 3 occur
Acoustic optic interaction, generates diffraction light, and the scan angle of diffraction light is θ3, θ3=θ0。
The working principle of acousto-optic deflection device 10 is similar with acousto-optic deflection device 8, and radiofrequency signal is converted to ultrasonic wave by energy converter,
Ultrasonic wave, with -1 grade of diffraction light 2 (acousto-optic modulator 11 generates) generation acoustic optic interaction, generates diffraction in acousto-optic medium 3
Light, the scan angle of diffraction light are θ2, θ2=θ0。
When work,
The first step, incident light 22 enter acousto-optic modulator 11, and the work of acousto-optic modulator 11 obtains -1 grade of diffraction light, and (- 1 grade is spread out
The deflection angle for penetrating light is θ0), -1 grade of diffraction light is deflected by 10 diffraction of acousto-optic deflection device, realizes θ2Scanning angle, θ2=θ0。
Second step, incident light 22 is directly through acousto-optic modulator 11 and acousto-optic modulator 27 (acousto-optic modulator 11 and acousto-optic
Modulator 27 does not work) after, it is deflected by 8 diffraction of acousto-optic deflection device, realizes θ3Scanning angle, θ3=θ0.Thus, incident light is total
Scanning angle is θ4, θ4=θ2+θ3=2 θ0, it is clear that deflection scanning angle of this 2 grades of audio-optical deflection device assemblies acousto-optic deflection device
Degree is doubled.
As another optional way, diffraction deflection can also be carried out by the first acousto-optic deflection device by inciting somebody to action+1 grade of diffraction light,
It is deflected again by second acousto-optic deflection device, to realize 2 θ0Deflection angle.
Embodiment 2
As shown in Fig. 2, the present embodiment provides a kind of 3 grades of audio-optical deflection device assemblies, including shell 1, it is equipped in the shell 1
Mounting plate 18 is gentle to break up thermosphere 19, and acousto-optic deflection device 8, acousto-optic deflection device 10, acousto-optic deflection device are equipped on mounting plate 18
26, acousto-optic modulator 11, acousto-optic modulator 27 and optical fiber collimator 21.Compared with 2 grades of audio-optical deflection device assemblies, 3 grades of acousto-optics are inclined
Turn device assembly and increases an acousto-optic deflection device 26 and an acousto-optic modulator 27.
Acousto-optic deflection device 8, acousto-optic deflection device 10 and acousto-optic deflection device 26 are all according to unusual acousto-optic deflection device Theoretical Design
, therefore its diffraction light can obtain biggish scan angle.It is processed by careful design, these three acousto-optic deflection devices can be made
Scan angle is all θ0。
The working principle of acousto-optic deflection device 8, acousto-optic deflection device 10 and acousto-optic modulator 11 and 2 grades of audio-optical deflection device assemblies
Principle is the same.
The working principle of acousto-optic modulator 27 is: radiofrequency signal is inputted from high-frequency socket, is generated ultrasonic wave through energy converter, is worn
Acoustic optic interaction occurs for the incident light 22 and ultrasonic wave for crossing acousto-optic medium 28, generates+1 grade of diffraction light 29.According to acoustic optic interaction
The deflection angle of theory ,+1 grade of diffraction light 29 that acousto-optic modulator 27 generates is related with working frequency, therefore passes through careful design sound
The working frequency of optical modulator 27 can make the deflection angle θ of+1 grade of diffraction light 290。
The working principle of acousto-optic deflection device 26 is: radiofrequency signal is inputted from high-frequency socket, is generated ultrasonic wave through energy converter, is worn
With ultrasonic wave acoustic optic interaction occurs for+1 grade of diffraction light 29 (acousto-optic modulator 27 generates) for crossing acousto-optic medium 30, generates diffraction
Light.Since acousto-optic deflection device 26 is according to unusual acousto-optic deflection device Theoretical Design, diffraction light can obtain biggish
Scan angle theta6, θ6=θ0。
When work, the first step, incident light 22 sequentially enters acousto-optic modulator 27 and acousto-optic modulator 11, acousto-optic modulator 11
Work (acousto-optic modulator 27 does not work) obtains -1 grade of diffraction light 2, and (deflection angle of -1 grade of diffraction light is θ0), -1 grade of diffraction light 2
(acousto-optic deflection device 8 and acousto-optic deflection device 26 do not work) is deflected by 10 diffraction of acousto-optic deflection device, realizes θ2Scanning angle, θ2=
θ0。
Second step, incident light 22 sequentially enter acousto-optic modulator 27 and acousto-optic modulator 11 (acousto-optic modulator 11 and acousto-optic
Modulator 27 does not work) after, (acousto-optic deflection device 10 and acousto-optic deflection device 26 do not work) is deflected by 8 diffraction of acousto-optic deflection device,
Realize θ3Scanning angle, θ3=θ0。
Third step, incident light 22 sequentially enter acousto-optic modulator 27 and acousto-optic modulator 11 (acousto-optic modulator 11 does not work)
The work of acousto-optic modulator 27 obtains+1 grade of diffraction light 29, and (deflection angle of+1 grade of diffraction light is θ5) ,+1 grade of diffraction light 29 is by acousto-optic
Deflector 26 deflects (acousto-optic deflection device 8 and acousto-optic deflection device 10 do not work), realizes θ6Scanning angle, θ6=θ0.It is thus incident
The total scanning angle of light is θ7, θ7=θ2+θ3+θ6=3 θ0, it is clear that this 3 grades of audio-optical deflection device assemblies are the inclined of acousto-optic deflection device
Turn scanning angle and improves 2 times.
Embodiment 3
As shown in figure 3, the present embodiment provides a kind of 2 grades of optical fiber audio-optical deflection device assemblies of two branch, including an one-to-two
31,2 grades of audio-optical deflection device assembly 32 and 2 grade audio-optical deflection device assemblies 33 of fiber switch.Light is divided into two-way by fiber switch 31
Light: light splitting 34 and light splitting 35.Light splitting 34 is by 2 grades of 32 deflection scannings of audio-optical deflection device assembly, scanning angle θ8, θ8=2 θ0.Point
Light 35 is by 2 grades of 33 deflection scannings of audio-optical deflection device assembly, scanning angle θ9, θ9=2 θ0.This 2 grades of optical fiber acousto-optic deflection device group
The total scanning angle of part is θ9+θ8=2 θ0+2θ0=4 θ0, compared with single common acousto-optic deflection device, scanning angle improves 3
Times.
Wherein, as a kind of achievable mode, if fiber switch 31 is one point of road n, mating connection n are needed
2 grades of audio-optical deflection device assemblies, at this moment total scanning angle are 2n θ0。
Embodiment 4
As shown in figure 4, the present embodiment provides a kind of 3 grades of optical fiber audio-optical deflection device assemblies of two branch, including an one-to-two
36,3 grades of audio-optical deflection device assembly 39 and 3 grade audio-optical deflection device assemblies 40 of fiber switch.Light is divided into two-way by fiber switch 36
Light: light splitting 37 and light splitting 38.Light splitting 37 is by 3 grades of 39 deflection scannings of audio-optical deflection device assembly, scanning angle θ10, θ10=3 θ0.Point
Light 38 is by 3 grades of 40 deflection scannings of audio-optical deflection device assembly, scanning angle θ11, θ11=3 θ0.This 3 grades of optical fiber acousto-optic deflection devices
The total scanning angle of component is θ10+θ11=3 θ0+3θ0=6 θ0, compared with single common acousto-optic deflection device, scanning angle is improved
5 times.
As a kind of achievable mode, if fiber switch 36 is one point of road n, mating connection n 3 grades of sound are needed
Light deflector component, at this moment total scanning angle are 3n θ0。
Those of ordinary skill in the art will appreciate that all or part of the steps in the various methods of above-described embodiment is can
It is completed with instructing relevant hardware by program, which can be stored in a computer readable storage medium, storage
Medium may include: ROM, RAM, disk or CD etc..
Embodiment provided above has carried out further detailed description, institute to the object, technical solutions and advantages of the present invention
It should be understood that embodiment provided above is only the preferred embodiment of the present invention, be not intended to limit the invention, it is all
Any modification, equivalent substitution, improvement and etc. made for the present invention, should be included in the present invention within the spirit and principles in the present invention
Protection scope within.
Claims (7)
1. a kind of acousto-optic deflection device device for improving laser scanning angle, which is characterized in that the acousto-optic deflection device device includes N
Grade audio-optical deflection device assembly；The N grades of audio-optical deflection device assembly includes shell, mounting plate is provided on the shell, in mounting plate
On sequentially connected N number of acousto-optic deflection device, N-1 acousto-optic modulator and 1 optical fiber collimator are installed；Wherein, Mei Gesheng
The scanning angle of light deflector is θ0；- 1 grade of diffraction light of acousto-optic modulator or the deflection angle of+1 grade of diffraction light are θ0；N=2
Or 3.
2. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 1, which is characterized in that described
It further include one point of n multi-channel optical fibre switch before N grades of audio-optical deflection device assemblies, the road Ji Mei fiber switch connects one N grades by optical fiber
Audio-optical deflection device assembly.
3. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 1, which is characterized in that described
Acousto-optic deflection device is consistent with the structure of acousto-optic modulator, and the working frequency of input is inconsistent；The structure include acousto-optic medium,
Bonded layer, energy converter, table electrode, matching network, screw and fixed plate；It is connected with fixed plate below the acousto-optic medium, is led to
It crosses the screw in fixed plate acousto-optic medium is fixed on the mounting plate；Bonded layer is connected with above the acousto-optic medium；
Energy converter is installed above bonded layer；The acousto-optic medium is connect by energy converter with table electrode, is connected with above table electrode
Matching network；The matching network is connected to high-frequency socket；Wherein, the high-frequency socket is located at outer side of shell.
4. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 3, which is characterized in that acousto-optic
The ultrasonic wave that the energy converter of deflector generates is shear wave.
5. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 1, which is characterized in that described
The beam waist diameter of optical fiber collimator is greater than 0.3mm.
6. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 1, which is characterized in that described
Acousto-optic modulator and acousto-optic deflection device use tellurium oxide crystal, quartz crystal, germanium, fused silica, GeAsSe glass and sulphur system glass
Any one in glass is made.
7. a kind of acousto-optic deflection device device for improving laser scanning angle according to claim 1, which is characterized in that outside
Buffer layer is additionally provided between shell and mounting plate；The buffer layer uses heat sink material, including indium foil or thermally conductive rubber mat.
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| CN201910417069.7A CN110133940B (en) | 2019-05-20 | 2019-05-20 | Acousto-optic deflector device for improving laser scanning angle |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110928104A (en) * | 2019-12-19 | 2020-03-27 | 合肥工业大学 | Acousto-optic ultrafast zoom lens device |
| CN111999958A (en) * | 2020-08-25 | 2020-11-27 | 华中科技大学 | Laser beam splitting device and method based on cascade acousto-optic deflection |
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| CN111999958B (en) * | 2020-08-25 | 2022-09-16 | 华中科技大学 | Laser beam splitting device and method based on cascade acousto-optic deflection |
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| CN110133940B (en) | 2022-08-05 |
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