CN110133940B - Acousto-optic deflector device for improving laser scanning angle - Google Patents
Acousto-optic deflector device for improving laser scanning angle Download PDFInfo
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- CN110133940B CN110133940B CN201910417069.7A CN201910417069A CN110133940B CN 110133940 B CN110133940 B CN 110133940B CN 201910417069 A CN201910417069 A CN 201910417069A CN 110133940 B CN110133940 B CN 110133940B
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/33—Acousto-optical deflection devices
Abstract
The invention relates to the technical field of optical devices, in particular to an acousto-optic deflector for laser scanning, and specifically relates to an acousto-optic deflector device for improving a laser scanning angle. The acousto-optic deflector device comprises an N-level acousto-optic deflector assembly; the N-level acousto-optic deflector assembly comprises a shell, wherein a mounting plate is arranged on the shell, and N acousto-optic deflectors, N-1 acousto-optic modulators and 1 optical fiber collimator which are sequentially connected are mounted on the mounting plate; the invention improves the scanning angle of the laser by times by cascading the acousto-optic deflectors, and can meet the requirements of large angle, high precision and rapid scanning.
Description
Technical Field
The invention relates to the technical field of optical devices, in particular to an acousto-optic deflector for laser scanning, and specifically relates to an acousto-optic deflector device for improving a laser scanning angle.
Background
Laser beam deflection scanning is increasingly used in the fields of semiconductor processing, military exploration, aerospace, biomedicine, nano scientific research and the like. At present, the laser beam deflection scanning modes mainly comprise mechanical scanning, piezoelectric ceramic reflection type scanning, acousto-optic scanning, electro-optic scanning and the like.
The mechanical scanning realizes the deflection of light beams by the mirror surface rotation and the principle of geometric optics, has the advantages of large scanning angle, high energy utilization and the like, but is limited by the defects of large volume, low scanning frequency, low scanning precision and the like, and is difficult to be applied to some small-sized, high-speed and precise scanning occasions.
The piezoelectric ceramic reflection type scanning utilizes the telescopic effect of the piezoelectric ceramic to realize laser deflection, has the advantages of small volume, high scanning frequency and the like, but has small scanning angle (mrad magnitude) and can not meet the requirement of large-angle laser scanning.
The electro-optical scanning realizes the deflection of incident light through the electro-optical effect of the crystal, has high scanning precision, but has high working voltage, small scanning angle (mrad magnitude) and lower scanning frequency, so the application range is very limited.
The acousto-optic scanning realizes the deflection of incident light through the acousto-optic effect of the crystal, has obvious advantages in the aspects of volume, light intensity control, scanning frequency, scanning precision and the like, but has small scanning angle and is difficult to meet the scanning requirement of a large angle.
Disclosure of Invention
In view of the above technical problems, the present invention provides an acousto-optic deflector device for increasing the laser scanning angle, which doubles the deflection scanning angle of the acousto-optic deflector by cascading the acousto-optic deflectors.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
an acousto-optic deflector device for improving a laser scanning angle, the acousto-optic deflector device comprises an N-level acousto-optic deflector assembly; the N-level acousto-optic deflector assembly comprises a shell, wherein a mounting plate is arranged on the shell, and N acousto-optic deflectors, N-1 acousto-optic modulators and 1 optical fiber collimator which are sequentially connected are mounted on the mounting plate; wherein the scanning angle of each acousto-optic deflector is theta 0 (ii) a The deflection angles of the-1 st order diffraction light or the +1 st order diffraction light of the acousto-optic modulator are all theta 0 (ii) a N ═ 2 or 3.
Furthermore, the front of the N-level acousto-optic deflector assembly also comprises an N-branch multi-path optical fiber switch, namely, each path of optical fiber switch is connected with one N-level acousto-optic deflector assembly through an optical fiber. The incident light is divided into N paths of light by the optical fiber switch, each path of light is deflected and scanned by the N-level acousto-optic deflector assembly, and the total scanning angle of the assembly can reach Nntheta 0 。
The structure of the acousto-optic deflector is consistent with that of the acousto-optic modulator, but the input working power of the acousto-optic deflector is inconsistent; the structure comprises an acousto-optic medium, a bonding layer, a transducer, a surface electrode, a matching network, a screw and a fixing plate; a fixing plate is connected below the acousto-optic medium, and the acousto-optic medium is fixed on the mounting plate through a screw on the fixing plate; a bonding layer is connected above the acousto-optic medium; the transducer is arranged above the bonding layer; the acousto-optic medium is connected with the meter electrode through the transducer, and a matching network is connected above the meter electrode; the matching network is connected to a high-frequency socket; wherein the high frequency socket is located outside the housing.
Further, the ultrasonic wave generated by the transducer of the acousto-optic deflector is a transverse wave.
Optionally, the acousto-optic modulator and the acousto-optic deflector are made of tellurium oxide crystals;
optionally, the acousto-optic modulator and the acousto-optic deflector are made of quartz crystal;
optionally, the acousto-optic modulator and the acousto-optic deflector are made of germanium;
optionally, the acousto-optic modulator and the acousto-optic deflector are made of fused quartz;
optionally, the acoustic-optical modulator and the acoustic-optical deflector are made of chalcogenide glass;
optionally, the acousto-optic modulator and the acousto-optic deflector are made of germanium-arsenic-selenium glass;
optionally, the beam waist diameter of the optical fiber collimator is greater than 0.3 mm.
Optionally, the acousto-optic modulator and the acousto-optic deflector are made of any one of tellurium oxide crystal, quartz crystal, germanium, fused quartz, germanium-arsenic-selenium glass and chalcogenide glass.
Further, a buffer layer is arranged between the shell and the mounting plate; the buffer layer is made of heat dissipation materials and comprises indium foil or a heat conduction rubber pad.
The invention has the beneficial effects that:
1. the core scanning device of the acousto-optic deflector assembly is the acousto-optic deflector, so the acousto-optic deflector assembly still keeps the advantages of small volume, low power consumption, low working voltage, strong light intensity control capability, high scanning frequency, high scanning precision and the like of the acousto-optic deflector, improves the scanning angle of laser in multiples by cascading the acousto-optic deflectors, and can meet the requirements of large angle, high precision and quick scanning.
2. The invention also combines the optical fiber switch and the acousto-optic deflector component for use, can improve the scanning angle of the acousto-optic deflector component by times and meet the use requirement of a larger scanning angle.
Drawings
FIG. 1 is a schematic structural diagram of a 2-level acousto-optic deflector assembly of the present invention.
Fig. 2 is a schematic structural diagram of a 3-level acousto-optic deflector assembly of the present invention.
FIG. 3 is a schematic structural diagram of a 2-level fiber acousto-optic deflector assembly of the present invention.
FIG. 4 is a schematic structural diagram of a 3-level fiber acousto-optic deflector assembly of the present invention.
In the figure, 1, a shell, 2, -1 order diffraction light, 3, 14, 23, 28, 30 acousto-optic medium, 4, 15, a bonding layer, 5, 16, a transducer, 6, 17, a surface electrode, 7, 13 matching network, 8, 10, 26, an acousto-optic deflector, 9, 12, a high-frequency socket, 11, 27, an acousto-optic modulator, 12 and a high-frequency socket; 18. mounting plate, 19, buffer layer, 20, optical fiber, 21, optical fiber collimator, 22, incident light, 24, screw, 25, fixing plate, 29, +1 st order diffracted light, 31, 36, optical fiber switch, 32, 33, 2-order acousto-optic deflector assembly, 34, 35, 37, 38, beam splitting, 39, 40, 3-order acousto-optic deflector assembly.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly and completely apparent, the technical solutions in the embodiments of the present invention are described below with reference to the accompanying drawings, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments.
Example 1
As shown in fig. 1, the 2-level acousto-optic deflector assembly of the present invention comprises a housing 1, a mounting plate 18 and a buffer layer 19 are installed in the housing 1, and an acousto-optic deflector 8, an acousto-optic deflector 10, an acousto-optic modulator 11 and a fiber collimator 21 are sequentially installed on the mounting plate 18.
The acousto-optic deflector 8 mainly comprises an acousto-optic medium 3, a bonding layer 4, a transducer 5, a surface electrode 6, a matching network 7, a high-frequency socket 9, a screw 24, a fixing plate 25 and the like; a fixing plate 25 is connected below the acousto-optic medium 3, and the acousto-optic medium 3 is fixed on the mounting plate through a screw 24 on the fixing plate 25; a bonding layer 4 is connected above the acousto-optic medium 3; a transducer 5 is arranged above the bonding layer 4; the acousto-optic medium 3 is connected with a meter electrode 6 through a transducer 5, and a matching network 7 is connected above the meter electrode 6; the matching network connects 7 to a high frequency socket 12; wherein the high frequency socket 12 is located outside the housing 1.
The acousto-optic modulator 11 mainly comprises a high-frequency socket 12, a matching network 13, an acousto-optic medium 14, a bonding layer 15, a transducer 16, a surface electrode 17 and the like; similar to the structure of the acousto-optic deflector 8, the description of this embodiment is omitted.
Likewise, the acousto-optic deflector 10 is constructed the same as the acousto-optic deflector 9.
Light enters the housing 1 via the optical fiber 20 and the fiber collimator 21 to obtain incident light 22.
As a practical matter, both the acousto-optic deflector 8 and the acousto-optic deflector 10 are designed according to the principle of an anomalous acousto-optic deflector, so that the diffracted light thereof can obtain a larger scanning angle. By the precise design processing, the scanning angles of the acousto-optic deflector 8 and the acousto-optic deflector 10 can be made to be theta 0 。
The operation principle of the acousto-optic modulator 11 is as follows: radio frequency signals are input from the high-frequency socket 12 and are sequentially transmitted to the surface electrode 17 through the matching network 13, the transducer 16 absorbs the radio frequency signals and generates ultrasonic waves, and incident light 22 passing through the acousto-optic medium 14 and the ultrasonic waves generate acousto-optic interaction to generate-1 st-order diffraction light 2. According to the acousto-optic interaction theory, the deflection angle of the-1 st order diffraction light 2 generated by the acousto-optic modulator is related to the working frequency, so that the deflection angle of the-1 st order diffraction light 2 can be enabled to be theta by accurately designing the working frequency of the acousto-optic modulator 11 0 。
The working principle of the acousto-optic deflector 8 is as follows: the radio frequency signal is input from the high-frequency socket 9 and is sequentially transmitted to the surface electrode 6 through the matching network 7, the transducer 5 absorbs the radio frequency signal and generates ultrasonic waves, incident light 22 passing through the acousto-optic medium 3 is subjected to acousto-optic interaction with the ultrasonic waves to generate diffraction light, and the scanning angle of the diffraction light is theta 3 ，θ 3 ＝θ 0 。
The acousto-optic deflector 10 operates on a similar principle to the acousto-optic deflector 8, with radio frequency signalsConverted into ultrasonic waves by the transducer, the ultrasonic waves generate acousto-optic interaction with-1 st order diffraction light 2 (generated by the acousto-optic modulator 11) in the acousto-optic medium 3 to generate diffraction light, and the scanning angle of the diffraction light is theta 2 ，θ 2 ＝θ 0 。
When in use, the utility model is used for cleaning the inner wall of the tank,
in the first step, the incident light 22 enters the acousto-optic modulator 11, and the acousto-optic modulator 11 works to obtain-1 st order diffraction light (the deflection angle of the-1 st order diffraction light is theta) 0 ) The-1 st order diffracted light is diffracted and deflected by the acousto-optic deflector 10 to realize theta 2 Scanning angle of theta 2 ＝θ 0 。
In the second step, the incident light 22 directly passes through the acousto-optic modulator 11 and the acousto-optic modulator 27 (the acousto-optic modulator 11 and the acousto-optic modulator 27 do not work), and then is diffracted and deflected by the acousto-optic deflector 8, so that theta is realized 3 Scanning angle, θ 3 ＝θ 0 . Thus, the total scan angle of the incident light is θ 4 ，θ 4 ＝θ 2 +θ 3 ＝2θ 0 It is clear that this 2-stage acousto-optic deflector assembly doubles the deflection scan angle of the acousto-optic deflector.
Alternatively, the 2 theta can also be realized by diffracting and deflecting the +1 st order diffracted light by a first acousto-optic deflector and then deflecting the diffracted light by a second acousto-optic deflector 0 The angle of deflection of.
Example 2
As shown in fig. 2, the present embodiment provides a 3-level acousto-optic deflector assembly, which comprises a housing 1, a mounting plate 18 and a buffer heat-dissipating layer 19 are installed in the housing 1, and an acousto-optic deflector 8, an acousto-optic deflector 10, an acousto-optic deflector 26, an acousto-optic modulator 11, an acousto-optic modulator 27 and a fiber collimator 21 are installed on the mounting plate 18. Compared with the 2-level acousto-optic deflector assembly, the 3-level acousto-optic deflector assembly adds an acousto-optic deflector 26 and an acousto-optic modulator 27.
The acousto-optic deflector 8, acousto-optic deflector 10 and acousto-optic deflector 26 are all designed according to the principle of an anomalous acousto-optic deflector, so that a larger scan angle can be obtained for the diffracted light. The scanning angles of the three acousto-optic deflectors are all theta through precise design processing 0 。
The acousto-optic deflector 8, acousto-optic deflector 10 and acoustic light modulator 11 operate on the same principle as the 2-stage acousto-optic deflector assembly.
The operation principle of the acousto-optic modulator 27 is: a radio frequency signal is input from the high frequency socket, ultrasonic waves are generated through the transducer, and incident light 22 passing through the acousto-optic medium 28 and the ultrasonic waves are subjected to acousto-optic interaction to generate +1 st order diffracted light 29. According to the acousto-optic interaction theory, the deflection angle of the +1 st order diffracted light 29 generated by the acousto-optic modulator 27 is related to the working frequency, so that the deflection angle of the +1 st order diffracted light 29 can be made to be theta by precisely designing the working frequency of the acousto-optic modulator 27 0 。
The principle of operation of the acousto-optic deflector 26 is: radio frequency signals are input from the high-frequency socket, ultrasonic waves are generated through the transducer, and +1 st-order diffraction light 29 (generated by the acousto-optic modulator 27) passing through the acousto-optic medium 30 and the ultrasonic waves have acousto-optic interaction to generate diffraction light. Since the acousto-optic deflector 26 is designed according to the theory of the anomalous acousto-optic deflector, the diffracted light can obtain a larger scan angle theta 6 ，θ 6 ＝θ 0 。
When in work, in the first step, the incident light 22 enters the acousto-optic modulator 27 and the acousto-optic modulator 11 in sequence, the acousto-optic modulator 11 works (the acousto-optic modulator 27 does not work) to obtain-1 st order diffraction light 2(-1 st order diffraction light with the deflection angle theta 0 ) And the 1 st order diffracted light 2 is diffractively deflected by the acousto-optic deflector 10 (the acousto-optic deflector 8 and the acousto-optic deflector 26 do not operate), so that theta is realized 2 Scanning angle of theta 2 ＝θ 0 。
In the second step, the incident light 22 sequentially enters the acousto-optic modulator 27 and the acousto-optic modulator 11 (neither the acousto-optic modulator 11 nor the acousto-optic modulator 27 is operated), and is diffracted and deflected by the acousto-optic deflector 8 (both the acousto-optic deflector 10 and the acousto-optic deflector 26 are operated), so that theta is realized 3 Scanning angle, θ 3 ＝θ 0 。
Thirdly, the incident light 22 enters the acousto-optic modulator 27 and the acousto-optic modulator 11 in sequence (the acousto-optic modulator 11 does not work) and the acousto-optic modulator 27 works to obtain +1 st diffraction light 29 (the deflection angle of the +1 st diffraction light is theta) 5 ) The +1 st order diffracted light 29 is acousto-opticThe deflector 26 deflects (acousto-optic deflector 8 and acousto-optic deflector 10 do not operate) to achieve theta 6 Scanning angle of theta 6 ＝θ 0 . The total scan angle of the incident light is thus theta 7 ，θ 7 ＝θ 2 +θ 3 +θ 6 ＝3θ 0 It is clear that such a 3-level acousto-optic deflector assembly increases the deflection scan angle of the acousto-optic deflector by a factor of 2.
Example 3
As shown in fig. 3, the present embodiment provides a two-branch 2-stage fiber acousto-optic deflector assembly, which includes a one-to-two fiber switch 31, a 2-stage acousto-optic deflector assembly 32 and a 2-stage acousto-optic deflector assembly 33. The fiber switch 31 splits the light into two paths of light: a beam split 34 and a beam split 35. The beam splitter 34 is deflected and scanned by the 2-stage acousto-optic deflector assembly 32 at an angle θ 8 ，θ 8 ＝2θ 0 . The beam splitter 35 is deflected and scanned by the 2-stage acousto-optic deflector assembly 33 at a scanning angle theta 9 ，θ 9 ＝2θ 0 . The total scanning angle of the 2-stage optical fiber acousto-optic deflector assembly is theta 9 +θ 8 ＝2θ 0 +2θ 0 ＝4θ 0 Compared with the common single acousto-optic deflector, the scanning angle is improved by 3 times.
As an implementation manner, if the optical fiber switch 31 is divided into n paths, n 2-level acousto-optic deflector assemblies need to be connected in a matching manner, and the total scanning angle is 2n θ 0 。
Example 4
As shown in fig. 4, the present embodiment provides a two-tap 3-level fiber acousto-optic deflector assembly comprising a one-to-two fiber switch 36, a 3-level acousto-optic deflector assembly 39 and a 3-level acousto-optic deflector assembly 40. The fiber switch 36 splits the light into two paths of light: beam splitter 37 and beam splitter 38. The beam splitter 37 is deflected and scanned by a 3-level acousto-optic deflector assembly 39 at a scanning angle theta 10 ，θ 10 ＝3θ 0 . The beam splitter 38 is deflected and scanned by a 3-stage acousto-optic deflector assembly 40 at a scan angle theta 11 ，θ 11 ＝3θ 0 . The total scanning angle of the 3-level optical fiber acousto-optic deflector assembly is theta 10 +θ 11 ＝3θ 0 +3θ 0 ＝6θ 0 Compared with the common single acousto-optic deflector, the scanning angle is improved by 5 times.
As an implementation, if the fiber switch 36 is n-way, then n 3-level acousto-optic deflector assemblies need to be mated, where the total scan angle is 3n θ 0 。
Those skilled in the art will appreciate that all or part of the steps in the methods of the above embodiments may be implemented by associated hardware instructed by a program, which may be stored in a computer-readable storage medium, and the storage medium may include: ROM, RAM, magnetic or optical disks, and the like.
The above-mentioned embodiments, which further illustrate the objects, technical solutions and advantages of the present invention, should be understood that the above-mentioned embodiments are only preferred embodiments of the present invention, and should not be construed as limiting the present invention, and any modifications, equivalents, improvements, etc. made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (7)
1. An acousto-optic deflector device for improving a laser scanning angle is characterized by comprising an N-level acousto-optic deflector assembly; the N-level acousto-optic deflector assembly comprises a shell, wherein a mounting plate is arranged on the shell, N acousto-optic deflectors, N-1 acousto-optic modulators and 1 optical fiber collimator which are sequentially connected are mounted on the mounting plate, and only one acousto-optic deflector works and at most one acousto-optic modulator works at the same time; wherein the scanning angle of each acousto-optic deflector is
(ii) a The deflection angles of-1 st order diffraction light or +1 st order diffraction light of the acousto-optic modulator
(ii) a N =2 or 3.
2. The acousto-optic deflector device according to claim 1, wherein the N-level acousto-optic deflector assembly further comprises a N-branch multi-path optical fiber switch, that is, each optical fiber switch is connected with one N-level acousto-optic deflector assembly through an optical fiber.
3. The acousto-optic deflector device for increasing the laser scanning angle according to claim 1, characterized in that the acousto-optic deflector is consistent with the acousto-optic modulator in structure and the input working frequency is not consistent; the structure comprises an acousto-optic medium, a bonding layer, a transducer, a surface electrode, a matching network, a screw and a fixing plate; a fixing plate is connected below the acousto-optic medium, and the acousto-optic medium is fixed on the mounting plate through a screw on the fixing plate; a bonding layer is connected above the acousto-optic medium; the transducer is arranged above the bonding layer; the acousto-optic medium is connected with the meter electrode through the transducer, and a matching network is connected above the meter electrode; the matching network is connected to a high-frequency socket; wherein the high frequency socket is located outside the housing.
4. The acousto-optic deflector device for increasing the laser scanning angle according to claim 3, characterized in that the ultrasonic wave generated by the transducer of the acousto-optic deflector is a transverse wave.
5. The acousto-optic deflector device for increasing the scanning angle of laser light according to claim 1, characterized in that the beam waist diameter of the fiber collimator is larger than 0.3 mm.
6. The acousto-optic deflector device for increasing the laser scanning angle according to claim 1, characterized in that the acousto-optic modulator and the acousto-optic deflector are made of any one of tellurium oxide crystal, quartz crystal, germanium, fused quartz, germanium arsenic selenium glass and chalcogenide glass.
7. The acousto-optic deflector device for increasing the laser scanning angle according to claim 1, characterized in that a buffer layer is further disposed between the housing and the mounting plate; the buffer layer is made of heat dissipation materials and comprises indium foil or a heat conduction rubber pad.
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| CN110928104A (en) * | 2019-12-19 | 2020-03-27 | 合肥工业大学 | Acousto-optic ultrafast zoom lens device |
| CN111999958B (en) * | 2020-08-25 | 2022-09-16 | 华中科技大学 | Laser beam splitting device and method based on cascade acousto-optic deflection |
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| CN1967316A (en) * | 2006-08-04 | 2007-05-23 | 华中科技大学 | Acoustooptic modulator used for femtosecond laser |
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| US10230210B2 (en) * | 2014-03-03 | 2019-03-12 | Pranalytica, Inc. | Acousto-optic tuning of lasers |
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| CN1967316A (en) * | 2006-08-04 | 2007-05-23 | 华中科技大学 | Acoustooptic modulator used for femtosecond laser |
| CN105446051A (en) * | 2015-12-30 | 2016-03-30 | 武汉嘉铭激光有限公司 | Laser acousto-optical scanning method and device thereof |
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