CN206892457U - A kind of optical shaft orientation high-speed scanning device - Google Patents

A kind of optical shaft orientation high-speed scanning device Download PDF

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CN206892457U
CN206892457U CN201720903250.5U CN201720903250U CN206892457U CN 206892457 U CN206892457 U CN 206892457U CN 201720903250 U CN201720903250 U CN 201720903250U CN 206892457 U CN206892457 U CN 206892457U
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digital micro
mirrors
dmd
speculum
dmd digital
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卢景琦
卢鹏
孙腾飞
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Shandong University
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Shandong University
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Abstract

A kind of optical shaft orientation high-speed scanning device is the utility model is related to, including at least two optical modules, each optical module are arranged in order vertically；In two neighboring optical module, the incident light of the emergent light of previous optical module as the latter optical module；Each optical module includes axial zoom lens control device, multiple optical module permutation and combination, for realizing multifocal high-velocity scanning.Prior art scanning range can be overcome small, the shortcomings that switch speed is slow, the utility model are realized that the high speed of light beam switches using digital micro-mirror, the cemented doublet mode of varying number are passed through using light beam, change the angle of divergence of light beam, so that light beam realizes axial scan after microcobjective.

Description

A kind of optical shaft orientation high-speed scanning device
Technical field
It the utility model is related to a kind of optical shaft orientation high-speed scanning device.
Background technology
Microscope is widely used for centuries as the instrument of observation biological sample, shows wherein focusing on fluorescence altogether Application in micro- imaging significantly improves the contrast of imaging and makes it possible high-resolution imaging to thin sample.Using double The common type of focusing of rotating disk scanning can obtain most fast 2KHz image acquisition speed, and Ca2+ flowings etc. in neuron can be entered Row trace.Two-photon fluorescence imaging technology advances thick tissue (such as brain piece) progress of research again.Two-photon fluorescence imaging has Natural three-dimensional resolution capability, thus be widely applied in fields such as neurologies.Exciting light is entered using acousto-optic deflection device Horizontal deflection scans, so as to reach the horizontal random scanning speed being exceedingly fast.Neutral net is distributed across three dimensions, in order to detect The rapid fluorescence signal of three dimensions is, it is necessary to develop three-dimensional random scanning imaging technology.As the top in neurology field in 2009 Level periodical The annual review of neuroscience point out that three-dimensional random scanning technique disclosure satisfy that neurology is ground Study carefully the crucial requirement in field, but be also great technological challenge simultaneously.The Random Scanning Technique of two dimension is more ripe at present, in order to Realize that three-dimensional random scans, it is important to solve the problems, such as optical axis direction random scanning, that is to say, that to realize scanning element along light Direction of principal axis high speed (KHz magnitudes), the change of great-jump-forward.
Axial scan mode the most frequently used at present is moved axially with the whole microcobjective of Piezoelectric Ceramic, but thing Mirror quality reduces the resonant frequency of piezoelectric ceramics typically in more than 100g, can only typically accomplish 100Hz or so speed Degree, it is unable to reach more than the KHz of neuron activity imaging requirements speed.Liquid zoom lens can be used for axial scan, but Because the change of focal length invariably accompanies the mechanical deformation of liquid, focal length switch speed is difficult more than 1KHz, and there is no till now should Report for the imaging of axial random scanning.Electric light zoom lens based on electrooptic effect are potential to realize axial random scanning, Such as the lens arrangement LiTaO3 crystal designs into cascade, it is possible to achieve light beam focuses on, and focal length switch speed can reach 20KHz.But due to by aperture too it is small (<1mm), resolvable spwort and axial direction of the light beam when axial high speed scans are limited Scanning range, it is impossible to meet the requirement of actual imaging.
The currently the only scheme for realizing axial random scanning is the lens acousto-optic based on 4 acousto-optic deflection devices.Its work Principle is：When the Acoustic Wave Propagation of two acousto-optic deflection devices is in opposite direction, and frequency of sound wave changes with time that rate is consistent, and this two Individual acousto-optic deflection device can be focused on or dissipated to light beam, and they function as a post lens, when having as two pairs When acousto-optic deflection device is orthogonally located, the variable zoom circle lens of optical axis direction can be regarded as, this structure can be with located space Any point, realize three dimensions random scanning.But the program has three limitations：First, axial scan scope<50μm；Second, Axially and transversely scanning mutually restricts；Third, the dispersion that 4 acousto-optic deflection devices introduce is very big, two-photon excitation efficiency reduces.Mesh The preceding program does not possess practicality still.In summary, the high speed axial direction scanning technique more than 1kHz is still global problem.
Utility model content
For the deficiencies in the prior art, utility model provides a kind of optical shaft orientation high-speed scanning device, by phase With optical module combine, in order to overcome prior art scanning range small, the shortcomings that switch speed is slow, realize quick real-time Three-dimensional imaging, the utility model uses digital micro-mirror (DMD：Digital Micromirror Device) realize the height of light beam Speed switching, the cemented doublet mode of varying number is passed through using light beam, change the angle of divergence of light beam, so that light beam is by aobvious Axial scan is realized after speck mirror.
The technical solution of the utility model is：
A kind of optical shaft orientation high-speed scanning device, including at least two optical modules, each optical module is vertically successively Arrangement；In two neighboring optical module, the incident light of the emergent light of previous optical module as the latter optical module；Each Optical module includes axial zoom lens control device, multiple optical module permutation and combination, for realizing multifocal high-velocity scanning.
Further, the axial zoom lens control device includes：First speculum, the 3rd speculum, the first DMD digital micro-mirrors and 2nd DMD digital micro-mirrors, the first DMD digital micro-mirrors, the 2nd DMD digital micro-mirrors are connected to the first control unit and the second control Unit processed；
First speculum receives the light beam that sends of laser, after the first speculum with 90 ° of directions of original optical path angle Outgoing, then light beam is incided on the first DMD digital micro-mirrors, and control of the first DMD digital micro-mirrors based on the first control unit will Light beam reflexes to different directions, and the 2nd DMD digital micro-mirrors receive the reflected beams from different directions first, then again anti-again It is mapped in a light path and is emitted；
Between the first DMD digital micro-mirrors and the 2nd DMD digital micro-mirrors, the second speculum and a convex lens are additionally provided with Mirror, the second speculum receive the reflected beams from different directions, convex lens surface are then reflexed to, by convex lens Converging beam, which reenters, is incident upon the 2nd DMD digital micro-mirrors surface.
Further, the convex lens use doublet lens.
Further, light beam is reflexed to not Tongfang by the control of the first DMD digital micro-mirrors based on the first control unit To including：
First DMD digital micro-mirrors are reflected the light onto to the second mirror surface, or reflex to the 2nd DMD digital micro-mirrors Surface.
Further, first control unit or the second control unit use CMOS SRAM circuits.
Further, the first DMD digital micro-mirrors and the 2nd DMD digital micro-mirrors have two stable states respectively, right Should be in binary " 1 " and " 0 " state.
Further, the minute surface of first speculum, the second speculum and the 3rd speculum is in same level straight line On, convex lens are at the second speculum and the 2nd DMD digital micro-mirror lines center.
Further, the first speculum is from the horizontal by 45° angle, and the first DMD digital micro-mirrors are from the horizontal by 45 ° Angle, the first DMD digital micro-mirrors are relative with the first mirror parallel, the minute surface of the 2nd DMD digital micro-mirrors and the first DMD digital micro-mirrors In same straight line, the 2nd DMD digital micro-mirrors from the horizontal by 45° angle, the 3rd speculum from the horizontal by 45° angle and with 2nd DMD digital micro-mirrors are parallel relative.
Operation principle of the present utility model：
The utility model is combined by identical optical module, and each optical module includes axial zoom lens control device, axle It is made up of to zoom lens control device following part：Two DMD digital micro-mirrors, three speculums and a convex lens group into.Incident beam 90 degree are reflected by speculum, light beam is incided on first DMD digital micro-mirror, the micro mirror battle array on first DMD digital micro-mirror Row, the direction of second speculum is reflected the light onto according to DMD status (On-state or Off-state), also may be used So that beam level is reflexed into second DMD digital micro-mirrors direction.Light beam passes through different paths, can be obtained not using lens Same dispersion angle.Finally, the light beam from different light paths is reflexed to a light by light beam again by second DMD digital micro-mirror Lu Shang.Next module is delivered to by the 3rd speculum, repeats the light beam that said process can obtain different dispersion angles.It is different Angle of divergence light beam passes through the focusing of micro objective, the different depths of focus can be obtained, so as to realize the axial direction of biological sample Scanning.Dispersion angle quantity (the axial scan points that can also obtain) is determined by the quantity of module：
θ=2n, θ represents angle of divergence number, and n represents number of modules.
According to the quantity for being actually needed setup module, it is possible to meet to want for axial scan during general micro-imaging Ask.And be exceedingly fast because of digital micro-mirror DMD response time, in μ s magnitudes, so being entirely capable of meeting the necks such as cranial nerve function imaging Domain needs the requirement of high speed axial scan.
The beneficial effects of the utility model：
(1) axial scan device designed by the utility model is realized by changing the angle of divergence of light beam, passes through DMD The response speed of the μ s magnitudes of digital micro-mirror, can obtain the axial scan response time being exceedingly fast, and this is acquisition hitherto Most fast axial scan speed.
(2) what axial scan device designed by the utility model used is all conventional optics, it is not necessary to special element, So cost is relatively low.
(3) axial scan device is modularized design designed by the utility model, can be added as needed on more moulds Block, so as to realize more number of scan points, facilitate customer upgrade and transformation.
(4) axial scan device is independently of the device of microscopic system designed by the utility model, can with it is different Microscopic system integrates, and is not restricted by microscope transversal scanning system, has operation and the flexibility used.
(5) axial scan device is practical designed by the utility model, and exploitation can be quantified production after completing, Copolymerization Jiao and rate request of the Two Photon Fluorescence system on axial scan can be met.
Brief description of the drawings
Fig. 1 is the utility model schematic diagram；
Fig. 2 is a micromirror schematic diagram of DMD digital micro-mirrors
Wherein 1. the first DMD digital micro-mirrors, 2. the 2nd DMD digital micro-mirrors, 3. the first speculum, 4. the second speculum, 5. 3rd speculum, 6. cemented doublet, 7. micromirror On-state on DMD, 8. micromirror Off-state on DMD, 9. DMD silicon Substrate.
Embodiment：
The utility model is described in further detail with embodiment below in conjunction with the accompanying drawings：
It is noted that described further below is all exemplary, it is intended to provides further instruction to the application.It is unless another Indicate, all technologies used herein and scientific terminology are with usual with the application person of an ordinary skill in the technical field The identical meanings of understanding.
It should be noted that term used herein above is merely to describe embodiment, and be not intended to restricted root According to the illustrative embodiments of the application.As used herein, unless the context clearly indicates otherwise, otherwise singulative It is also intended to include plural form, additionally, it should be understood that, when in this manual using term "comprising" and/or " bag Include " when, it indicates existing characteristics, step, operation, device, component and/or combinations thereof.
A kind of exemplary embodiments of the present utility model are the axial scanning means of high speed, as shown in Figure 1：Including at least two light Module is learned, each optical module is arranged in order vertically；In two neighboring optical module, the emergent light of previous optical module is made For the incident light of the latter optical module；Each optical module includes axial zoom lens control device, multiple optical module permutation and combination, For realizing multifocal high-velocity scanning.
In optical module 1 in Fig. 1, incident beam by speculum 3. incide digital micro-mirror DMD 1. on, numeral it is micro- Mirror DMD 1. on micro mirror array be 7. in On-state (or Off-state is 8.), 9. micromirror is embedded in silicon chip.It can incite somebody to action Light beam reflexes to the light path of mirror lens 3., can also reflect the light onto the light paths of digital micro-mirror DMD 2..Through mirror surface 3. Light path, 6. change the angle of divergence by cemented doublet；And 1. reflex to the light paths of digital micro-mirror DMD 2. through digital micro-mirror DMD Do not change the angle of divergence.Therefore, two different angles of divergence can be obtained in a module.Then digital micro-mirror DMD2 can be incited somebody to action Light beam from different light paths reflexes in a light path again, 5. enters next optical module 2 through speculum.In optical mode In block 2, can equally there are two kinds of paths to select, one kind be through lens 6., one kind is without 6. directly to 2..Again can be with Obtain two kinds of different angles of divergence.According to combinatorial principle, 2 can be obtained2=4 angles of divergence, i.e. number of focus.It can add as needed Add more modules, so as to realize digitized beam divergence angle adjustment system.If module number reaches the situation of 10 Under, available dispersion angle reaches 210=1024.
DMD DMD is to be a kind of in utility model in 1987 by Texas ,Usa company based on partly leading Body manufacturing technology, the device being made up of high-speed figure formula light reflex switch array, its monnolithic case photo and micro mirror chip architecture are such as Shown in Fig. 1.Micro-reflector is the minimum work unit of dmd chip, and influences the key of its performance.The volume of micro-reflector It is very small, but still possess the complex mechanical structure different from liquid crystal --- every piece of micro-reflector has independent support frame, And the deflection of +/- 12 ° of progress is carried out around be hinged inclined shaft.For this micromachine of micro-reflector, traditional machinery or liquid Voltage-controlled system can not use (allow to use, also due to mechanical wear and damage rapidly), therefore the two of micro-reflector Angle arranges two electrodes, controls control deflection by voltage, obtains high-precision control ability and unlimited polarization life-span. The size of single micromirror only has several 10 μm, therefore reversal rate is exceedingly fast, and the response time can be short to μ s only more than 10, completely may be used To meet the sweep speed of more than the kHZ required for the utility model.Micro-reflector is worked by reflection light, and it is deflected Ability is that it is crucial, is the operating diagram of a micro-reflector as shown in Figure 2, at micro-reflector opening (On State) During with closed mode (Off State) state, incident beam can obtain very big deflection, and dmd chip can reach most at present Large deflection angle degree is 72 degree, enough for application of the present utility model.
In summary, the utility model is entirely capable of meeting the field needs such as cranial nerve function imaging at a high speed using digital micro-mirror The requirement of axial scan.And the apparatus structure is simple, clear principle understands, by optimization design, can design as needed not The longitudinal scan device of same level, meet the requirement in needs KHZ level high speed axial scans field.
The preferred embodiment of the application is the foregoing is only, is not limited to the application, for the skill of this area For art personnel, the application can have various modifications and variations.It is all within spirit herein and principle, made any repair Change, equivalent substitution, improvement etc., should be included within the protection domain of the application.

Claims (8)

  1. A kind of 1. optical shaft orientation high-speed scanning device, it is characterised in that including at least two optical modules, each optical module edge Axially it is arranged in order；In two neighboring optical module, emergent light the entering as the latter optical module of previous optical module Penetrate light；Each optical module includes axial zoom lens control device, multiple optical module permutation and combination, for realizing that multifocal is swept at a high speed Retouch.
  2. A kind of 2. optical shaft orientation high-speed scanning device according to claim 1, it is characterised in that the axial zoom lens control device Including：First speculum, the 3rd speculum, the first DMD digital micro-mirrors and the 2nd DMD digital micro-mirrors, the first DMD digital micro-mirrors, 2nd DMD digital micro-mirrors are connected to the first control unit and the second control unit；
    First speculum receives the light beam that laser is sent, to be emitted with 90 ° of directions of original optical path angle after the first speculum, Then light beam is incided on the first DMD digital micro-mirrors, and the first control of the DMD digital micro-mirrors based on the first control unit is anti-by light beam Different directions are incident upon, the 2nd DMD digital micro-mirrors receive the reflected beams from different directions, then reflex to one again again first It is emitted in bar light path；
    Between the first DMD digital micro-mirrors and the 2nd DMD digital micro-mirrors, the second speculum and a convex lens are additionally provided with, Second speculum receives the reflected beams from different directions, convex lens surface is then reflexed to, by the remittance of convex lens Convergent pencil of rays, which reenters, is incident upon the 2nd DMD digital micro-mirrors surface.
  3. 3. a kind of optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that the convex lens are using double Glued convex lens.
  4. A kind of 4. optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that the first DMD numerals Light beam is reflexed to different directions by control of the micro mirror based on the first control unit to be included：
    First DMD digital micro-mirrors are reflected the light onto to the second mirror surface, or reflex to the 2nd DMD digital micro-mirror tables Face.
  5. A kind of 5. optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that first control unit Or second control unit use CMOS SRAM circuits.
  6. A kind of 6. optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that the first DMD numerals Micro mirror and the 2nd DMD digital micro-mirrors have two stable states respectively, corresponding to binary " 1 " and " 0 " state.
  7. A kind of 7. optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that first speculum, The minute surface of second speculum and the 3rd speculum is on same level straight line, and convex lens are in the second speculum and the 2nd DMD At digital micro-mirror line center.
  8. 8. a kind of optical shaft orientation high-speed scanning device according to claim 2, it is characterised in that the first speculum and level Direction angle at 45 °, the first DMD digital micro-mirrors are from the horizontal by 45° angle, the first DMD digital micro-mirrors and the first mirror parallel Relatively, the minute surface of the 2nd DMD digital micro-mirrors and the first DMD digital micro-mirrors is in same straight line, the 2nd DMD digital micro-mirrors and level Direction angle at 45 °, the 3rd speculum are from the horizontal by 45° angle and parallel with the 2nd DMD digital micro-mirrors relative.
CN201720903250.5U 2017-07-24 2017-07-24 A kind of optical shaft orientation high-speed scanning device Active CN206892457U (en)

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