CN110120591A - One kind being based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene - Google Patents

One kind being based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene Download PDF

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Publication number
CN110120591A
CN110120591A CN201910188481.6A CN201910188481A CN110120591A CN 110120591 A CN110120591 A CN 110120591A CN 201910188481 A CN201910188481 A CN 201910188481A CN 110120591 A CN110120591 A CN 110120591A
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China
Prior art keywords
absorbing device
wave
graphene
wave absorbing
layer
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CN201910188481.6A
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陈明
张文波
刘厚权
赵德平
王崇云
高文文
陈晨
苑立波
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Guilin University of Electronic Technology
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Guilin University of Electronic Technology
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q15/00Devices for reflection, refraction, diffraction or polarisation of waves radiated from an antenna, e.g. quasi-optical devices
    • H01Q15/0006Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices
    • H01Q15/0013Devices acting selectively as reflecting surface, as diffracting or as refracting device, e.g. frequency filtering or angular spatial filtering devices said selective devices working as frequency-selective reflecting surfaces, e.g. FSS, dichroic plates, surfaces being partly transmissive and reflective
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q17/00Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
    • H01Q17/007Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with means for controlling the absorption
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01QANTENNAS, i.e. RADIO AERIALS
    • H01Q17/00Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems
    • H01Q17/008Devices for absorbing waves radiated from an antenna; Combinations of such devices with active antenna elements or systems with a particular shape
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05KPRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
    • H05K9/00Screening of apparatus or components against electric or magnetic fields
    • H05K9/0073Shielding materials

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Shielding Devices Or Components To Electric Or Magnetic Fields (AREA)
  • Aerials With Secondary Devices (AREA)

Abstract

The invention discloses one kind to be based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene.It is characterized in that: the wave absorbing device unit that the present invention designs successively includes one layer of all-metal 1, silica dioxide medium layer 2, silicon dielectric layer 3 and graphene layer 4 from bottom to up.By the design to structure, emulation obtains the wave band of electromagnetic response, is modulated to realize to incident electromagnetic wave;It is obtained by sweep parameter and optimizes wave absorbing device structure, by transmission line theory, impedance transformation carried out by dielectric layer, determines the wave absorbing device of optimized parameter structure.According to the physical mechanism for inhaling wave rate, impedance matching, attenuation characteristic are illustrated, obtain the absorptivity of this wave absorbing device close to 100%.Illustrate that free space and the structure realize perfect impedance matching in resonant frequency point, magnetic resonance realizes synchronous with electric resonance.The present invention realizes wave-absorbing effect by the super surface texture of graphene, and has strong absorption, the advantages such as tunable.

Description

One kind being based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene
(1) technical field
The present invention relates to one kind to be based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene, belongs to micro-nano photoelectricity Sub- field.
(2) background technique
With the development of computer, electromagnetic radiation is full of around people, and researcher is promoted to deepen novel wave-absorbing material Research.Super structure surface (Metasurface) is a kind of ultra-thin two-dimension planar array being made of cellular construction, and super structure surface belongs to Two-dimensional metamaterial is the important research direction of metamaterial.Compared with metamaterial, super structure surface has much excellent Point, for example, structure it is simple, it is small in size, be easily integrated manufacture etc..The amplitude of electromagnetic wave, phase, polarization state can pass through super table The control of face flexible structure promotes super structure surface as popular research in recent years based on these advantages on super structure surface.Stone Black alkene is the material being made of single layer of carbon atom, has its unique electromagnetic property.In infrared frequency range and Terahertz frequency range, electromagnetism The loss that wave transfer ratio in graphene is transmitted in a metal is smaller.Pass through applying bias voltage, electromagnetic field and chemical doping Etc. modes can change the chemical potential of grapheme material, be equivalent to the conductivity for changing graphene, it is final to realize to device Working frequency dynamic regulation, as integrated opto-electronic device passes through to the well-designed of super surface cell structure.Surpass table based on electromagnetism The wave absorbing device in face is once proposition, since it is compared to traditional wave absorbing device, using the local strong electromagnetic coupled resonance on super surface, mainly Perfect suction wave is realized by dielectric loss and magnetic loss, brings up the significant advantages such as its structure is simple, absorption efficiency is high, quality is frivolous.
By surpassing the well-designed of surface texture to graphene, we can produce the broadband super surface of adjustable graphene Wave absorbing device, not by traditional wave absorbing device in order to enable be incident on body structure surface electromagnetic wave can areflexia, all with transmitted wave Form travel into inside configuration forward, and being capable of energy in any form the characteristics of being absorbed.Broadband is adjustable The super surface wave absorbing device of graphene more actual productions life in provide higher utility value.Such as radio frequency identification skill Art, stealth technology, electromagnetic protection, electromagnetic compatibility and shielding etc..
(3) summary of the invention
It is an object of the invention to propose that a kind of structure is simple, it is based on the adjustable suction wave of the super surface micro-structure high efficiency of graphene Device.
The object of the present invention is achieved like this:
In the electromagnetic wave bandwidth of operation that frequency is 6~9THz and 12.5~18.5THz, the super surface of research graphene and Jie The electromagnetic property of the aperture structure of matter layer different shape size finds out multiple can respond not by the design to structural unit The structure of same frequency wave band is modulated the incident electromagnetic wave of different frequency to realize.
It is obtained by sweep parameter and optimizes wave absorbing device structure, according to transmission line theory, impedance change is carried out by dielectric layer Bring realization impedance matching.
The wave absorbing device for determining optimized parameter structure, according to the wave absorbing device illustrated from suction wave rate, impedance matching, attenuation characteristic Physical mechanism obtains the absorptivity of this wave absorbing device close to 100%.Illustrate that free space and the structure are realized in resonant frequency point Perfect impedance matching, magnetic resonance and electric resonance realize synchronous.
For incident electromagnetic wave, some can directly be reflected to free space and form back wave, remaining part Be incident to inside configuration to transmit waveshape, a part is converted into the energy of thermal energy or other forms with ohmic loss, a part with Transmission waveshape continuation is propagated forward.Therefore, electromagnetic wave absorptivity expression formula are as follows:
A (ω)=1-R (ω)-T (ω)=1- | S11|2-|S21|2 (1)
Wherein, R (ω), T (ω) are respectively reflectivity and transmissivity, S11、S21Respectively the reflection coefficient of wave absorbing device and thoroughly Penetrate coefficient.S21It is also assumed that being loss factor of the material to electromagnetic wave.It is relatively easy to reduce transmissivity, this structure is using certain The metal plate of thickness eliminates the transmission of electromagnetic wave.That is T (ω)=0.That is the simplified formula of absorptivity are as follows:
A (ω)=1-R (ω)=1- | S11|2 (2)
Good impedance matching to the electromagnetic wave for being incident to the super surface of electromagnetism use up its maximum possible do not generate reflection play to Close important role.By transmission line theory it is found that dielectric layer can carry out impedance transformation to realize impedance matching, equivalency tables at this time Face impedance Z1With free space impedance Z0It is equal.Its reflection coefficient indicates are as follows:
Whereinμ, ε are the magnetic conductivity and dielectric constant of absorbing material respectively, and μ0With ε0It is the dielectric constant and magnetic conductivity of free space, absorbent properties are better, its reflection coefficient will be lower, when Equivalent Surface hinders When anti-equal with free space impedance, i.e. Z1=Z0≈377Ω.Magnetic conductivity and dielectric constant indicate are as follows: μ/ε=μ00At this point, Reflection R=0 illustrates that incident electromagnetic wave can enter inside configuration with areflexia.
According to EFFECTIVE MEDIUM THEORY it is found that super surface equivalent relative dielectric constant and magnetic conductivity are respectively as follows:
εr(ω)=ε12、μr(ω)=μ12 (4)
ByWithEquivalent refractive index can be obtained are as follows: n (ω)=n1+in2, normalize multiple resistance It is anti-are as follows:
Z (ω)=Re (ω)+iX (ω), the size of transmission coefficient i.e.:
S21=[sin (nkd)-icos (nkd)]-1e-ikd (5)
Euler's transformation is carried out to (5), obtains an exponential form:
ThusInhaling wave rate becomes:
A (ω)=1-R (ω)-T (ω)=1 (7)
In the case where reflection coefficient is zero, to make absorptivity maximum, by increasing refractive index, dielectric constant and magnetic Conductance imaginary part is realized to reduce transmissivity.
(4) Detailed description of the invention
Fig. 1 is the structure graph of the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene.
Fig. 2 is the top view and structural parameters of the wave absorbing device.
Fig. 3 is the side view and structural parameters of the wave absorbing device.
Fig. 4 be by simulate come wave absorbing device to the absorptivity figure line of electromagnetic wave.
(5) specific embodiment
A specific embodiment of the invention is described further below in conjunction with attached drawing.
One kind being based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene, specifically includes the following steps:
This wave absorbing device includes four-layer structure, emulates in frequency range in the electromagnetic wave that frequency is 6~20THz, studies the super table of medium The electromagnetic property of the aperture structure of face different shape size, by the design to structural unit, finding out multiple can respond difference The structure of frequency band is modulated the incident electromagnetic wave of different frequency to realize.As shown in Fig. 1, this structure has altogether Comprising four layers, be respectively from top to bottom: the super surface texture of graphene, with a thickness of the silicon dielectric layer of 480nm, thickness 380nm two Silicon oxide dielectric layer and with a thickness of 100nm, conductivity is the metal base plate of 4.56 × 107s/m.
Structure design parameter are as follows: it is by metal gold substrate 1, silica dioxide medium layer 2, silicon dielectric layer 3 and 4 groups of graphene layer At.The wave absorbing device, substrate 1 are period P=560nm, and the metal of thickness h 1=100nm is used to substrate, and intermediate silica is situated between Matter layer 2 is thickness h 2=380nm, and silicon dielectric layer 3 is thickness h 3=480nm, and a long L=is wherein hollowed out in silicon dielectric layer 500nm, wide W=100nm, depth H=300nm cross trap, top layer cover one layer of graphene, these types of material successively heap It puts, forms complete wave absorbing device.Electromagnetic wave at this time we only need to consider its reflectivity and absorptivity.
And reflectivity are as follows:
R (ω)=| S11|2 (1)
Absorptivity are as follows:
A (ω)=1-R (ω)=1- | S11|2 (2)
Setting simulating area first is 6~20THz, and the fermi level of graphene is set as 0.5ev, relaxation time 1ps.Electricity This incident wave absorbing device of magnetic wave vertical surface.According to transmission line theory and EFFECTIVE MEDIUM shelf theory:
Reflection coefficient are as follows:
Transmission coefficient are as follows:
Occurs resonant frequency point at 7.0THz, 14.2THz.And corresponding is that the curve of reflectivity is then in phase With the apparent paddy peak of appearance at resonant frequency point.It is worth mentioning that this at two resonant frequency point absorption all reach substantially 100%.
By above-mentioned impedance and reflectance formula, we are worth noting when real part of the super surface texture relative to free impedance It is 1, imaginary part 0 then illustrates that free space and the structure realize perfect impedance matching in resonant frequency point, and magnetic resonance and electricity are humorous Vibration realizes synchronization.Illustrate that free space and the structure realize perfect impedance matching in resonant frequency point, that is to say, that irradiation Enter wave energy completely into inside configuration without transmiting and reflecting away to structure, therefore produces strong resonance.This When electromagnetic wave almost all enter inside configuration, reflecting component has reached minimum, realizes perfect absorption.

Claims (5)

1. one kind is based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene, it is characterized in that: it is by metal gold substrate 1, two Silicon oxide dielectric layer 2, silicon dielectric layer 3 and graphene layer 4 form.The wave absorbing device, substrate 1 are period P=560nm, thickness h 1 The metal of=100nm is used to substrate, and intermediate silica dioxide medium layer 2 is thickness h 2=380nm, and silicon dielectric layer 3 is thickness h 3= 480nm, wherein hollows out a long L=500nm in silicon dielectric layer, wide W=100nm, and depth H=300nm cross trap is most upper Layer one layer of graphene of covering, these types of material are successively stacked, and complete wave absorbing device is formed.
2. the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene according to claim 1, emulation frequency range 6~ 20Thz, the structure are the wave-absorbing effects that can produce double frequency-band.The adjustable extent of double frequency-band be respectively 6~9Thz and 12.5~ 18.5Thz wave band, absorption efficiency is close to 100%.
It is one hollowed out among silicon dielectric layer 3. the high efficiency wave absorbing device of graphene micro-structure according to claim 1 Long L=500nm, wide W=100nm, depth H=300nm cross trap, top layer cover one layer of graphene.Frequency be 6~ In the electromagnetic wave bandwidth of operation of 9THz and 12.5~18.5THz, there is the adjustable effect of dynamic.To realize to different frequency Incident electromagnetic wave is modulated.
4. the high efficiency wave absorbing device of graphene micro-structure according to claim 1, top layer is complete single-layer graphene Structure forms the wave absorbing device of optimized parameter structure.According to the wave absorbing device object illustrated from suction wave rate, impedance matching, attenuation characteristic Reason mechanism show that the absorptivity of this wave absorbing device is absorbed close to perfect.
5. the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene according to claim 1, the wave absorbing device have Four-layer structure composition, each dielectric layer have complementation in terms of inhaling wave.Due to its very big dynamic adjustable extent, and to entering The angle of radio magnetic wave is insensitive, thus for the adjustable increase dependable with function of dynamic for realizing polarization converter.
CN201910188481.6A 2019-03-13 2019-03-13 One kind being based on the super adjustable wave absorbing device of surface micro-structure high efficiency of graphene Pending CN110120591A (en)

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Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110927843A (en) * 2019-12-23 2020-03-27 中国人民解放军国防科技大学 Adjustable perfect wave absorber based on graphene photonic crystal structure
CN111446551A (en) * 2020-03-25 2020-07-24 桂林电子科技大学 Multi-band adjustable terahertz wave absorber based on graphene super-surface
CN111585040A (en) * 2020-04-21 2020-08-25 桂林电子科技大学 All-dielectric wave absorber based on graphene and Dirac semimetal
CN111864405A (en) * 2020-09-03 2020-10-30 浙江科技学院 Absorber of two ring structure graphite alkene that split
CN112462168A (en) * 2020-11-05 2021-03-09 西安交通大学 Rapid air interface testing method based on electrically tunable wave-absorbing super surface
CN114709624A (en) * 2022-04-12 2022-07-05 西安电子科技大学 Super surface with circularly polarized wave asymmetric transmission and one-way wave absorption double functions
EP4209788A1 (en) * 2022-01-10 2023-07-12 Rohde & Schwarz GmbH & Co. KG An anechoic chamber for testing a device under test over-the-air, a system, and a method

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN110927843A (en) * 2019-12-23 2020-03-27 中国人民解放军国防科技大学 Adjustable perfect wave absorber based on graphene photonic crystal structure
CN111446551A (en) * 2020-03-25 2020-07-24 桂林电子科技大学 Multi-band adjustable terahertz wave absorber based on graphene super-surface
CN111446551B (en) * 2020-03-25 2021-10-26 桂林电子科技大学 Multi-band adjustable terahertz wave absorber based on graphene super-surface
CN111585040A (en) * 2020-04-21 2020-08-25 桂林电子科技大学 All-dielectric wave absorber based on graphene and Dirac semimetal
CN111585040B (en) * 2020-04-21 2022-03-15 桂林电子科技大学 All-dielectric wave absorber based on graphene and Dirac semimetal
CN111864405A (en) * 2020-09-03 2020-10-30 浙江科技学院 Absorber of two ring structure graphite alkene that split
CN112462168A (en) * 2020-11-05 2021-03-09 西安交通大学 Rapid air interface testing method based on electrically tunable wave-absorbing super surface
CN112462168B (en) * 2020-11-05 2022-03-22 西安交通大学 Rapid air interface testing method based on electrically tunable wave-absorbing super surface
EP4209788A1 (en) * 2022-01-10 2023-07-12 Rohde & Schwarz GmbH & Co. KG An anechoic chamber for testing a device under test over-the-air, a system, and a method
CN114709624A (en) * 2022-04-12 2022-07-05 西安电子科技大学 Super surface with circularly polarized wave asymmetric transmission and one-way wave absorption double functions
CN114709624B (en) * 2022-04-12 2023-04-21 西安电子科技大学 Super-surface with circular polarized wave asymmetric transmission and unidirectional wave absorbing functions

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