CN110120441B - Flexible gallium arsenide thin film battery back electrode laser windowing process and equipment - Google Patents
Flexible gallium arsenide thin film battery back electrode laser windowing process and equipment Download PDFInfo
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- CN110120441B CN110120441B CN201910265100.XA CN201910265100A CN110120441B CN 110120441 B CN110120441 B CN 110120441B CN 201910265100 A CN201910265100 A CN 201910265100A CN 110120441 B CN110120441 B CN 110120441B
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- battery
- laser
- battery piece
- back electrode
- windowing
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- 229910001218 Gallium arsenide Inorganic materials 0.000 title claims abstract description 18
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 title claims abstract description 17
- 238000000034 method Methods 0.000 title claims abstract description 17
- 239000010409 thin film Substances 0.000 title claims abstract description 15
- 238000005520 cutting process Methods 0.000 claims abstract description 14
- 238000012545 processing Methods 0.000 claims description 28
- 238000007599 discharging Methods 0.000 claims description 9
- 238000003384 imaging method Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 6
- 238000001514 detection method Methods 0.000 claims description 4
- 241001270131 Agaricus moelleri Species 0.000 claims description 3
- 230000005540 biological transmission Effects 0.000 claims description 3
- 239000000284 extract Substances 0.000 claims description 3
- 238000005286 illumination Methods 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 claims description 3
- 238000003698 laser cutting Methods 0.000 claims description 2
- 230000000694 effects Effects 0.000 description 5
- 238000004519 manufacturing process Methods 0.000 description 5
- 238000007639 printing Methods 0.000 description 4
- 238000005553 drilling Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 238000010248 power generation Methods 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/362—Laser etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67092—Apparatus for mechanical treatment
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/18—Processes or apparatus specially adapted for the manufacture or treatment of these devices or of parts thereof
- H01L31/1876—Particular processes or apparatus for batch treatment of the devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The invention discloses a flexible gallium arsenide thin film battery back electrode laser windowing process and equipment. The coding and cutting unit can complete coding and cutting functions simultaneously, and can work simultaneously by means of two paths of lasers, each light path can be controlled independently, and the focusing height, the light spot size and the power of each light path can be adjusted independently through a beam expander and a power meter of each light path.
Description
Technical Field
The invention relates to a process for cutting a gallium arsenide flexible thin film battery piece and laser equipment thereof, belonging to the field of thin film battery production equipment in the photovoltaic industry.
Background
One of the main performance indexes of the solar cell is the energy conversion efficiency, and the flexible gallium arsenide cell is a photovoltaic product which has extremely high power generation efficiency (29%) and the lowest average weight per watt at present. In recent years, the application of flexible gallium arsenide batteries in high-end fields such as mobile power stations, unmanned aerial vehicles and the like stimulates the high-speed development of manufacturing industry and the industrialization of flexible gallium arsenide batteries.
The current battery piece processing field has complex process, particularly, coding and cutting are carried out by being divided into two procedures, and a single battery piece is processed in each procedure, so that the processing efficiency is low and the processing effect is poor.
Disclosure of Invention
The invention aims to provide a flexible gallium arsenide thin film battery back electrode laser windowing process and equipment with high processing efficiency and good processing effect.
In order to achieve the purpose, the invention adopts a technical scheme that: a flexible gallium arsenide thin film battery back electrode laser windowing process comprises the following steps:
a. the feeding machine sequentially extracts the battery pieces from the flower basket, the battery pieces are placed on a first station of the turntable through the transmission of a runner belt and the suction of a sucker, and the battery pieces are fixed by vacuum adsorption with the front surfaces facing downwards;
b. the turntable rotates the battery piece to a second station; the bottom illumination and imaging positions the battery piece according to the characteristic pattern of the front side of the battery piece, the first scanning head emits light after the positioning, and the battery piece sequence number and the two-dimensional code are printed in the designated area of the back side of the battery piece; meanwhile, the second scanning head also emits light, and a window is opened for the back electrode of the battery piece at a specified position;
d. the turntable rotates the battery piece to a third station; detecting the battery plate after laser processing, shooting whole and local images of a processing area by using a high-power and low-power camera through an imaging and illuminating system, and measuring various indexes of the laser processing area by using image processing;
e. the turntable rotates the battery piece back to the first station; the battery piece is sucked to the discharging flow channel by the sucking disc, and the battery piece flows to the next processing procedure or the automatic discharging machine.
Furthermore, the second station windowing laser is a 9400nm CO2 laser, and the processing time of laser drilling is 3 s; after laser beams are shaped by a light spot shaper DOE in an outer optical cavity, flat-top light spots with uniform energy density are formed; the diameter of the processed round hole is required to be 430um +/-50 um, the roundness is larger than 85%, the edge distance from the center of the round hole to the unit is 1.00mm, the slope level height difference of the edge of the round hole is 15-20 um, and the axial position precision of the round hole is +/-50 microns.
Further, the following steps: the laser windowing is performed by a plurality of battery pieces at the same time, the reciprocating laser windowing is performed for 3 times or more than 3 times, and the total windowing time is 3-5 seconds.
After the technical scheme is realized, the invention can simultaneously carry out coding and cutting by simultaneously working two paths of lasers, can realize high-efficiency work, and can carry out the whole plate cell together, thereby realizing more high-efficiency production.
The other technical scheme of the invention is as follows: a flexible gallium arsenide thin film battery back electrode laser windowing device comprises a base and a rotating platform, and the flexible gallium arsenide thin film battery back electrode laser windowing device comprises: the battery stacking and blanking device is characterized by further comprising a loading and unloading unit, a positioning unit, a coding and cutting unit and a detection unit, wherein the rotary platform can convey the battery to each working unit in a rotating mode.
The laser of the coding cutting unit is divided into an upper light path and a lower light path, and the upper light path is subjected to laser cutting through the speed increaser, the light spot shaper DOE, the attenuator and the power meter respectively.
The feeding and discharging unit is a rotary platform and comprises a rotary table and two material arms arranged on the rotary table.
After the technical scheme is realized, the processing equipment disclosed by the invention is high in production efficiency and good in production effect.
Drawings
The present invention will be described in further detail with reference to the following examples, which are given in conjunction with the accompanying drawings.
FIG. 1 is a schematic structural diagram of the present invention.
Detailed Description
The present invention is further illustrated by the following examples.
In one exemplary embodiment of the present invention,
a flexible gallium arsenide thin film battery back electrode laser windowing process, which comprises the following steps:
a. the feeding machine sequentially extracts the battery pieces from the flower basket, the battery pieces are placed on a first station of the turntable through the transmission of a runner belt and the suction of a sucker, and the battery pieces are fixed by vacuum adsorption with the front surfaces facing downwards;
b. the turntable rotates the battery piece to a second station; the bottom illumination and imaging positions the battery piece according to the characteristic pattern of the front side of the battery piece, the first scanning head emits light after the positioning, and the battery piece sequence number and the two-dimensional code are printed in the designated area of the back side of the battery piece; meanwhile, the second scanning head also emits light, and a window is opened for the back electrode of the battery piece at a specified position;
d. the turntable rotates the battery piece to a third station; detecting the battery plate after laser processing, shooting whole and local images of a processing area by using a high-power and low-power camera through an imaging and illuminating system, and measuring various indexes of the laser processing area by using image processing;
e. the turntable rotates the battery piece back to the first station; the battery piece is sucked to the discharging flow channel by the sucking disc, and the battery piece flows to the next processing procedure or the automatic discharging machine.
The invention adopts double light paths and completes the code printing processing and the back electrode windowing processing on the back surface of the gallium arsenide flexible battery at the same time; the front side of the wafer is downward and is contacted with the Chuck, and the bottom imaging is adopted for positioning the wafer; the invention uses an imaging system and an image processing technology to carry out online measurement and quality monitoring on the laser processing effect at the fourth station; each light path can be independently controlled, and the focusing height, the spot size and the power of each light path can be independently adjusted through the beam expander and the power meter of each light path.
Processing the two-dimension code: the two-dimensional code resolution is 0.125 mm. The height of the digital code is 1-1.5 mm. The axial accuracy of the two-dimensional code and the number is +/-250 microns.
The second station windowing laser is a 9400nm CO2 laser, and the processing time of laser drilling is 3 s; after laser beams are shaped by a light spot shaper DOE in an outer optical cavity, flat-top light spots with uniform energy density are formed; the diameter of the processed round hole is required to be 430um +/-50 um, the roundness is larger than 85%, the edge distance from the center of the round hole to the unit is 1.00mm, the slope level height difference of the edge of the round hole is 15-20 um, and the axial position precision of the round hole is +/-50 microns.
The following steps: the laser windowing is performed by a plurality of battery pieces at the same time, the reciprocating laser windowing is performed for 3 times or more than 3 times, and the total windowing time is 3-5 seconds.
In a second exemplary embodiment of the present invention,
the utility model provides a flexible gallium arsenide thin film battery back electrode laser equipment of windowing, includes base 1 and rotary platform 2, its characterized in that: the battery stacking and blanking device is characterized by further comprising a loading and unloading unit 3, a positioning unit 4, a coding and cutting unit 5 and a detection unit 6, wherein the rotary platform 2 can convey batteries to each working unit in a rotating mode.
The laser of the coding cutting unit 5 is divided into an upper optical path 5-1 and a lower optical path 5-2, and the upper optical path is laser-cut through a speed expander 10, a spot shaper DOE7, an attenuator 8 and a power meter 9.
The feeding and discharging unit 3 is a rotary platform and comprises a rotary table 3-1 and two material arms 3-2 arranged on the rotary table.
When the automatic feeding device is used, the prepared materials are fed by the feeding machine and are sent to the feeding and discharging unit 3, then the rotary platform 2 rotates to drive the materials to respectively enter the positioning unit 4, the code printing and cutting unit 5 and the detection unit 6, after all the units are finished, the materials enter the next unit, and finally the materials return to the feeding and discharging unit to be discharged, so that the whole process is finished. The code printing and cutting unit 5 can complete the code printing and cutting functions at the same time, and works simultaneously by means of two paths of lasers, each light path can be controlled independently, and the focusing height, the light spot size and the power of each light path can be adjusted independently through a beam expander and a power meter of each light path.
The initial sample of the invention has ideal sealing performance and easy operation in the specific implementation process, and obtains good use effect.
Claims (4)
1. A flexible gallium arsenide thin film battery back electrode laser windowing process is characterized in that:
a. the feeding machine sequentially extracts the battery pieces from the flower basket, the battery pieces are placed on a first station of the turntable through the transmission of a runner belt and the suction of a sucker, and the battery pieces are fixed by vacuum adsorption with the front surfaces facing downwards;
b. the turntable rotates the battery piece to a second station; the bottom illumination and imaging positions the battery piece according to the characteristic pattern of the front side of the battery piece, the first scanning head emits light after the positioning, and the battery piece sequence number and the two-dimensional code are printed in the designated area of the back side of the battery piece; meanwhile, the second scanning head also emits light, and a window is opened for the back electrode of the battery piece at a specified position; the second station windowing laser is a 9400nm CO2 laser; after laser beams are shaped by a light spot shaper DOE in an outer optical cavity, flat-top light spots with uniform energy density are formed; the diameter of the processed round hole is 430 micrometers, the roundness is greater than 85%, and the slope height difference of the edge of the round hole is 15-20 micrometers; the laser windowing is carried out simultaneously for a plurality of battery pieces, the reciprocating laser windowing is carried out for more than 3 times, and the total windowing time is 3 seconds;
d. the turntable rotates the battery piece to a third station; detecting the battery plate after laser processing, shooting whole and local images of a processing area by using a high-power and low-power camera through an imaging and illuminating system, and measuring various indexes of the laser processing area by using image processing;
e. the turntable rotates the battery piece back to the first station; the battery piece is sucked to the blanking flow channel by the sucking disc, and the battery piece flows to the next processing procedure.
2. A flexible gallium arsenide thin film battery back electrode laser windowing device according to the process of claim 1 comprising a base (1) and a rotating platform (2), characterized in that: the battery stacking and blanking device is characterized by further comprising a loading and unloading unit (3), a positioning unit (4), a coding and cutting unit (5) and a detection unit (6), wherein the rotary platform (2) can convey the battery to each working unit in a rotating mode.
3. The flexible gallium arsenide thin film battery back electrode laser windowing device according to claim 2, wherein: the laser of the coding cutting unit (5) is divided into an upper light path (5-1) and a lower light path (5-2), and the upper light path is subjected to laser cutting through a speed expander (10), a light spot shaper DOE (7), an attenuator (8) and a power meter (9).
4. The flexible gallium arsenide thin film battery back electrode laser windowing device according to claim 2, wherein: the feeding and discharging unit (3) is a rotary platform and comprises a rotary table (3-1) and two material arms (3-2) arranged on the rotary table.
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| CN201910265100.XA CN110120441B (en) | 2019-04-03 | 2019-04-03 | Flexible gallium arsenide thin film battery back electrode laser windowing process and equipment |
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| CN201910265100.XA CN110120441B (en) | 2019-04-03 | 2019-04-03 | Flexible gallium arsenide thin film battery back electrode laser windowing process and equipment |
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| CN110120441A CN110120441A (en) | 2019-08-13 |
| CN110120441B true CN110120441B (en) | 2021-04-23 |
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| CN101222001A (en) * | 2007-01-08 | 2008-07-16 | 李毅 | Solar battery laser marking device |
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