CN110108393A - A kind of flexibility piezoresistance sensor - Google Patents
A kind of flexibility piezoresistance sensor Download PDFInfo
- Publication number
- CN110108393A CN110108393A CN201910313612.9A CN201910313612A CN110108393A CN 110108393 A CN110108393 A CN 110108393A CN 201910313612 A CN201910313612 A CN 201910313612A CN 110108393 A CN110108393 A CN 110108393A
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- Prior art keywords
- pdms
- piezoresistance sensor
- ridge
- flexibility
- coated
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/18—Measuring force or stress, in general using properties of piezo-resistive materials, i.e. materials of which the ohmic resistance varies according to changes in magnitude or direction of force applied to the material
Abstract
The present invention provides a kind of flexible piezoresistance sensor, the flexibility piezoresistance sensor includes two membrane modules, and the membrane module is constituted by PDMS and coated in positive rGO layers of PDMS, which has ridge structure identical with 240 mesh coated abrasive surfaces；Two membrane module fronts are opposite, and ridge structure contacts with each other, and the ridge structure in flexible piezoresistance sensor generates contact deformation with external force, then generates a series of electric signal, realize the real-time monitoring to external force.
Description
Technical field
The present invention relates to flexible piezoresistance sensors, belong to field of intelligent control.
Background technique
Along with the continuous development of science and technology, flexible piezoresistance sensor plays great work in contemporary industry and civil field
With, such as: the fields such as stress condition measurement, flexible electronic skin and bionic machine tactile between the narrow curved surface of large scale equipment.It is high
The research of molecular composite material surface micro-structure, for improve play the role of on its piezoresistive characteristic it is vital.But it passes
The sensitivity of the surface micro-structure of system can not be competent at the occasion of big sensitivity requirement.Prepare the piezoresistance sensor of a high sensitivity
It is imperative.
Summary of the invention
The purpose of the present invention is in view of the deficiencies of the prior art, and provide a kind of flexible piezoresistance sensor.
To reach above-mentioned function, the present invention is achieved by the following technical solutions: a kind of flexibility piezoresistance sensor, institute
Stating flexible piezoresistance sensor includes two membrane modules, and the membrane module is constituted by PDMS and coated in positive rGO layers of PDMS, should
Membrane module front has ridge structure identical with 240 mesh coated abrasive surfaces；Two membrane module fronts are opposite, and ridge structure is mutual
Contact.
Further, the signal output of flexible piezoresistance sensor is to realize that copper electrode passes through silver by two copper electrodes
Gluing is affixed on rGO layers, and two copper electrodes are about membrane module central symmetry.
Further, two membrane modules are encapsulated in PDMS.
Further, it is made by the steps to obtain:
(1) 240 mesh sand paper are cut into the size dimension of fitting part；
(2) by normal heptane, ethyl acetate, octadecyl siloxanes is configured according to the mass ratio of 1000:50:20
At hydrophobic treatment solution, sand paper described in step (1) is immersed in the solution 2 hours, carries out hydrophobic treatment；
(3) PDMS and crosslinking agent are pressed into 10:1 mass ratio after mixing, vacuum degassing is steeped repeatedly, is spin-coated on step (2)
Coated abrasive surface after middle hydrophobic treatment；The sand paper for being coated with PDMS is placed in blast drier, 60 DEG C are heated 2 hours；After solidification,
Sand paper is removed in water, obtains the PDMS with ridge structure；
(4) oxygen plasma treatment is carried out to the surface PDMS with ridge micro-structure obtained in step (3), increases its table
Face hydrophily；
(5) PDMS with ridge micro-structure after oxygen plasma treatment in step (4) is smeared into rGO solution repeatedly.To
It is assembled after solution is dry, obtains the flexible piezoresistance sensor with ridge structure.
Further, the concentration of the rGO solution is 1mg/ml.
Further, rGO layers of the thickness is about at 500 μm or so.
The method have the advantages that: the present invention is opposite using two fronts and surface has special construction (approximate just
The distributed ridge structure of state) membrane module construct flexible piezoresistance sensor, it is soft compared to traditional surface micro-structure rule
Property piezoresistance sensor have higher sensitivity.
Detailed description of the invention
Fig. 1 is sensor ridge micro-structure figure；
Fig. 2 is pyramid matrix (Fig. 2A), hemisphere volume matrix (Fig. 2 B), cylinder volume matrix (Fig. 2 C) and ridge structure
The flexible piezoresistance sensor that membrane module is constituted carries out the test result (2D) of resistance change rate respectively.
Fig. 3 is the working principle diagram for the flexible piezoresistance sensor that the membrane module of ridge structure of the present invention is constituted.
Specific embodiment
The present invention provides a kind of flexible piezoresistance sensor, and flexible piezoresistance sensor includes two membrane modules, as shown in Figure 1,
The membrane module is constituted by PDMS and coated in positive rGO layers of PDMS, which is with 240 mesh sand paper (GB/T9258-
2000) it is prepared for template, front has ridge structure, and each ridge height is different, but whole height distribution approximation is in
Normal distribution；Two membrane module fronts are opposite, and part ridge contact, part ridge does not contact,；
It is relatively moved under external force when between two membrane modules, the ridge contacted afterwards is in the form of being mutated resistance
With the ridge resistor coupled in parallel originally contacted, the change in electric of entire circuit is huge, the form then changed again with contact area
Continue to influence electric signal in circuit, with the continuous contact of ridge, the increase of parallel resistance, change in electric is significant, compares
In the contact structures of traditional single area change form, there is better sensitivity, convenient for monitoring stress condition.
Flexible piezoresistance sensor and surface by the present invention with 240 mesh sand paper (GB/T9258-2000) for template acquisition
It is respectively provided with the flexibility of the membrane module composition of pyramid matrix (Fig. 2A), hemisphere volume matrix (Fig. 2 B), cylinder volume matrix (Fig. 2 C)
Piezoresistance sensor carries out the test of resistance change rate respectively, as a result as shown in Figure 2 D, it can be seen from the figure that the present invention is with 240
Mesh sand paper (GB/T9258-2000) be template obtain flexible piezoresistance sensor relative to other kinds of sensor have it is higher
Resistance change rate.This is because the ridge area originally contacted between two membrane modules changes with the increase of load,
Resistance is gradually increased, meanwhile, new ridge contact is generated, the ridge resistance that new resistor coupled in parallel originally contacted is formed, such as Fig. 3 institute
Show.Pyramid matrix, hemisphere volume matrix, the flexible pressure drag that the membrane module of cylinder volume matrix is constituted is respectively provided with compared to surface to pass
Sensor can only be changed with contact area in the case where loading increased situation, cause resistance variations to monitor deformation, with 240 mesh sand paper
(GB/T9258-2000) the flexible piezoresistance sensor obtained for template, in the case where loading increased situation, resistance variations are not only by original
The ridge that first the contact area variation of contact ridge causes, and contacts afterwards also will form new resistor coupled in parallel and enter circuit, change
Become the resistance sizes between mould group, shown in following formula:
Wherein, RbFor membrane module internal resistance, Rd1、Rd2、Rd3…Rdi、Rd(i+1)…RdnFor the derivative resistance of membrane module
What the signal output of flexible piezoresistance sensor can be realized by two copper electrodes, copper electrode is pasted on by elargol
RGO layers, two copper electrodes are about membrane module central symmetry.Two membrane modules can be encapsulated in PDMS.
The flexible piezoresistance sensor with ridge structure is made by the steps to obtain:
(1) 240 mesh sand paper (GB/T9258-2000) are cut into the size dimension of fitting part；
(2) by normal heptane, ethyl acetate, octadecyl siloxanes is configured according to the mass ratio of 1000:50:20
At hydrophobic treatment solution, sand paper described in step (1) is immersed in the solution 2 hours, carries out hydrophobic treatment；
(3) PDMS and crosslinking agent are pressed into 10:1 mass ratio after mixing, vacuum degassing is steeped repeatedly, is spin-coated on step (2)
Coated abrasive surface after middle hydrophobic treatment；The sand paper for being coated with PDMS is placed in blast drier, 60 DEG C are heated 2 hours；After solidification,
Sand paper is removed in water, obtains the PDMS with ridge structure；
(4) oxygen plasma treatment is carried out to the surface PDMS with ridge micro-structure obtained in step (3), increases its table
Face hydrophily；
(5) PDMS with ridge micro-structure after oxygen plasma treatment in step (4) is smeared into rGO solution repeatedly.To
It is assembled after solution is dry, obtains the flexible piezoresistance sensor with ridge structure.
Preferably, the concentration of the rGO solution is 1mg/ml.RGO layers of the thickness is about on 500 μm of left sides
It is right.
Claims (6)
1. a kind of flexibility piezoresistance sensor, which is characterized in that the flexibility piezoresistance sensor includes two membrane modules, the film group
Part is constituted by PDMS and coated in positive rGO layers of PDMS, which has ridge identical with 240 mesh coated abrasive surfaces
Structure；Two membrane module fronts are opposite, and ridge structure contacts with each other.
2. flexibility piezoresistance sensor according to claim 1, which is characterized in that the signal of flexible piezoresistance sensor, which exports, is
It is realized by two copper electrodes, copper electrode is pasted on rGO layers by elargol, and two copper electrodes are about membrane module central symmetry.
3. flexibility piezoresistance sensor according to claim 1, which is characterized in that two membrane modules are encapsulated in PDMS.
4. flexibility piezoresistance sensor according to claim 1, which is characterized in that be made by the steps to obtain:
(1) 240 mesh sand paper are cut into the size dimension of fitting part；
(2) by normal heptane, ethyl acetate, octadecyl siloxanes is configured to dredge according to the mass ratio of 1000:50:20
Sand paper described in step (1) is immersed in the solution 2 hours by water treatment solution, carries out hydrophobic treatment；
(3) PDMS and crosslinking agent are pressed into 10:1 mass ratio after mixing, vacuum degassing is steeped repeatedly, is spin-coated in step (2) and is dredged
Coated abrasive surface after water process；The sand paper for being coated with PDMS is placed in blast drier, 60 DEG C are heated 2 hours；After solidification, in water
Middle removing sand paper, obtains the PDMS with ridge structure；
(4) oxygen plasma treatment is carried out to the surface PDMS with ridge micro-structure obtained in step (3), increases its surface parent
It is aqueous；
(5) PDMS with ridge micro-structure after oxygen plasma treatment in step (4) is smeared into rGO solution repeatedly.To solution
It is assembled after drying, obtains the flexible piezoresistance sensor with ridge structure.
5. flexibility piezoresistance sensor according to claim 4, which is characterized in that the concentration of the rGO solution is 1mg/ml.
6. flexibility piezoresistance sensor according to claim 1, which is characterized in that rGO layers of the thickness is about at 500 μm
Left and right.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910313612.9A CN110108393A (en) | 2019-04-18 | 2019-04-18 | A kind of flexibility piezoresistance sensor |
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| CN201910313612.9A CN110108393A (en) | 2019-04-18 | 2019-04-18 | A kind of flexibility piezoresistance sensor |
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| CN110108393A true CN110108393A (en) | 2019-08-09 |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579297A (en) * | 2019-10-18 | 2019-12-17 | 湖北汽车工业学院 | High-sensitivity flexible piezoresistive sensor based on MXene bionic skin structure |
| CN110776667A (en) * | 2019-11-11 | 2020-02-11 | 浙江农林大学 | Piezoresistive sensing device material and preparation method and application thereof |
| CN111811703A (en) * | 2020-07-21 | 2020-10-23 | 京东方科技集团股份有限公司 | Pressure sensor and electronic device |
| CN114166383A (en) * | 2021-10-26 | 2022-03-11 | 湖南大学 | Flexible pressure sensor sensing element and preparation method and application thereof |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105203244A (en) * | 2015-10-20 | 2015-12-30 | 浙江大学 | Electronic skin with irregular surface microspikes and preparation method of electronic skin |
| KR20160139661A (en) * | 2015-05-28 | 2016-12-07 | 고려대학교 산학협력단 | Highly sensitive pressure sensor |
| CN207515931U (en) * | 2017-12-05 | 2018-06-19 | 浙江大学 | A kind of pressure resistance type flexible touch sensation sensor with micro- frustum of a cone substrate |
| CN108917995A (en) * | 2018-05-15 | 2018-11-30 | 浙江工业大学 | A kind of flexibility piezoresistance sensor |
| CN108918399A (en) * | 2018-05-16 | 2018-11-30 | 湖州师范学院 | A kind of fibre optical sensor and preparation method of on-line corrosion monitoring |
-
2019
- 2019-04-18 CN CN201910313612.9A patent/CN110108393A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160139661A (en) * | 2015-05-28 | 2016-12-07 | 고려대학교 산학협력단 | Highly sensitive pressure sensor |
| CN105203244A (en) * | 2015-10-20 | 2015-12-30 | 浙江大学 | Electronic skin with irregular surface microspikes and preparation method of electronic skin |
| CN207515931U (en) * | 2017-12-05 | 2018-06-19 | 浙江大学 | A kind of pressure resistance type flexible touch sensation sensor with micro- frustum of a cone substrate |
| CN108917995A (en) * | 2018-05-15 | 2018-11-30 | 浙江工业大学 | A kind of flexibility piezoresistance sensor |
| CN108918399A (en) * | 2018-05-16 | 2018-11-30 | 湖州师范学院 | A kind of fibre optical sensor and preparation method of on-line corrosion monitoring |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110579297A (en) * | 2019-10-18 | 2019-12-17 | 湖北汽车工业学院 | High-sensitivity flexible piezoresistive sensor based on MXene bionic skin structure |
| CN110776667A (en) * | 2019-11-11 | 2020-02-11 | 浙江农林大学 | Piezoresistive sensing device material and preparation method and application thereof |
| US11897162B2 (en) | 2019-11-11 | 2024-02-13 | Zhejiang A & Funiversity | Piezoresistive sensor material and preparation method and use thereof |
| CN111811703A (en) * | 2020-07-21 | 2020-10-23 | 京东方科技集团股份有限公司 | Pressure sensor and electronic device |
| CN114166383A (en) * | 2021-10-26 | 2022-03-11 | 湖南大学 | Flexible pressure sensor sensing element and preparation method and application thereof |
| CN114166383B (en) * | 2021-10-26 | 2023-09-08 | 湖南大学 | Flexible pressure sensor sensing element and preparation method and application thereof |
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