CN110088158A - 聚合物装置及制造方法 - Google Patents

聚合物装置及制造方法 Download PDF

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Publication number
CN110088158A
CN110088158A CN201780061251.2A CN201780061251A CN110088158A CN 110088158 A CN110088158 A CN 110088158A CN 201780061251 A CN201780061251 A CN 201780061251A CN 110088158 A CN110088158 A CN 110088158A
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China
Prior art keywords
polymer
product
layer
substrate
monomer
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CN201780061251.2A
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English (en)
Chinese (zh)
Inventor
T·潘
E·A·科恩
B·巴泽
G·杨
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Mike Roupro Ltd By Share Ltd
MicroOptx Inc
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Mike Roupro Ltd By Share Ltd
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US20210079178A1 (en) 2021-03-18
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