CN110058394A - A kind of measuring table microscope - Google Patents

Abstract

The invention discloses a kind of measuring table microscopes, including, microscope stand；Changeover panel is rotatably mounted on bracket, and a plurality of lenses of different multiplying are distributed in annular array on the changeover panel；Power device is installed on bracket, including synchrome conveying belt and motor, and the synchrome conveying belt is set between changeover panel and motor, and the power from motor is sent to changeover panel；First support chip is supported in below synchrome conveying belt, and array distribution has multiple sensing chips on first support chip, which forms from the edge downward bending of the first support chip, and each camera lens matches the sensing chip respectively；And it is set on microscope stand, sensor corresponding with sensing chip.The present invention provides more stable transmission service for synchronous transmission device by support chip, while sensing chip and support chip can be integrated, so that the induction of sensor is more accurate.

Description

A kind of measuring table microscope

Technical field

The present invention relates to field of optical measurements, more particularly to a kind of microscope of measuring table.

Background technique

Measuring microscope, using making accurate measurement to Workpiece length and angle thoroughly, by the way of reflection, especially suitable for video The test of magnetic head, large scale integrated circuit line width and other precision components, be widely applicable for measuring room, production operation line and The departments such as scientific research, workbench can also make 360 degree of rotation in addition to the movement for making X, Y coordinates, can also carry out height side It is a kind of ideal fixed-site miniature precision measuring instrument to the measurement for doing Z coordinate；Measuring microscope instrument can further connect CCD television camera is connect, the profile amplification of workpiece is made；Also computer can be connected and carry out the measurement such as data processing.

But current existing measuring microscope, the wheel measuring of different multiplying camera lens is all manually to go to rotate Debugging, it is easy to cause hand to touch workpiece or article to be measured, cause the pollution or abrasion of workpiece or article, and rotation manually Transposable lens are also easy to cause the problems such as alignment lens precision is inaccurate, and scanning survey error is larger.

In view of this, it is necessary to provide it is a kind of can induction precision be more acurrate, the more stable measuring table microscope of transmission.

Summary of the invention

It is able to achieve that induction precision is more acurrate, the more stable measuring table of transmission is with aobvious the purpose of the present invention is to provide a kind of Micro mirror.

To achieve the above object, the invention provides the following technical scheme:

The embodiment of the present application discloses a kind of measuring table microscope, comprising:

Microscope stand；

Changeover panel is rotatably mounted on bracket, and multiple mirrors of different multiplying are distributed in annular array on the changeover panel Head；

Power device is installed on bracket, including synchrome conveying belt and motor, and the synchrome conveying belt is set to changeover panel Changeover panel is sent between motor, and by the power from motor；

First support chip is supported in below synchrome conveying belt, and array distribution has multiple sensing chips on first support chip, The sensing chip is formed from the edge downward bending of the first support chip, and each camera lens matches the sensing chip respectively；With And

On microscope stand, sensor corresponding with sensing chip.

Preferably, in a kind of above-mentioned measuring table microscope, first support chip and sensing chip integrated punching Molding.

Preferably, in a kind of above-mentioned measuring table microscope, each sensing chip is respectively arranged at adjacent Between two camera lenses.

Preferably, in a kind of above-mentioned measuring table microscope, annular array is distributed on first support chip Multiple through-holes,

First support chip is detachably connected by screw and changeover panel.

Preferably, in a kind of above-mentioned measuring table microscope, the through-hole is long waist shaped through-hole.

Preferably, it in a kind of above-mentioned measuring table microscope, is buckled between first support chip and changeover panel Connection.

Preferably, in a kind of above-mentioned measuring table microscope, first blade edges convexedly stretch in described turn Removable disk surrounding.

Preferably, in a kind of above-mentioned measuring table microscope, fixation hole is offered in the middle part of first support chip, Fixation hole inner edge corresponding with sensing chip is arc.

It preferably, further include be barred from above synchrome conveying belt in a kind of above-mentioned measuring table microscope Two support chips.

Preferably, in a kind of above-mentioned measuring table microscope, the sensor is induction type photoelectric sensor.

Compared with the prior art, the advantages of the present invention are as follows: this measuring table microscope is synchronous pass by support chip Dynamic device provides more stable transmission service, while sensing chip and support chip can be integrated, so that the induction of sensor is more Add accurately, size of current can be precisely controlled, cooperates power device and location structure to realize that camera lens is automatically postrotational and precisely determine Position.

Detailed description of the invention

In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this The some embodiments recorded in application, for those of ordinary skill in the art, without creative efforts, It is also possible to obtain other drawings based on these drawings.

Fig. 1 show a kind of perspective view for being measured microscopically platform in a specific embodiment of the invention；

Fig. 2 show the micro- lens head automatic switching control equipment structure of a kind of measuring table in a specific embodiment of the invention Figure；

Fig. 3 is the microscopical inner detail diagram of a kind of measuring table in a specific embodiment of the invention；

Fig. 4 show the synchronous transmission device structure chart in a specific embodiment of the invention in camera lens automatic switching control equipment；

Fig. 5 show the microscopical location structure schematic diagram of a kind of measuring table in a specific embodiment of the invention；

Fig. 6 show the microscopical support piece structure of a kind of measuring table in a specific embodiment of the invention；

Fig. 7 show a kind of position assumption diagram of measuring table microscope support chip in a specific embodiment of the invention.

Specific embodiment

Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out detailed retouch It states, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.Based on the present invention In embodiment, those of ordinary skill in the art's every other implementation obtained without making creative work Example, shall fall within the protection scope of the present invention.

Refering to what is shown in Fig. 1, providing one kind in one embodiment is measured microscopically platform, including pony sill 1, it is placed in Measuring table 2 on pony sill 1 and slidably in the microscopic structure on measuring table 2.

The material of pony sill 1 is granite, is cased with platinum outer cover outside pony sill 1, is equipped between pony sill 1 and measuring table 2 Air spring 11 is additionally provided with the castor 12 that can be used for being moved easily on pony sill 1.

In the technical scheme, air spring 11 can isolated environment vibration, it is ensured that microscope during scanning survey, All directions displacement will not occur between camera lens and surface to be measured.

Microscopic structure includes the column 31 for being set to 2 two sides of measuring table along the z-axis direction, is fixed at along the x-axis direction vertical Crossbeam 32 on column 31 is set on crossbeam 32, the x-axis slide unit substrate 33 that can slidably reciprocate along crossbeam 32 and to be fixed on x-axis sliding It on stylobate plate 33, can be moved up and down along z-axis, for the measuring table microscope scanning observation, camera lens can be automatically switched 30。

31 material of column is granite, and column 31 can be simultaneously along the boundary slip of measuring table 2.

With reference to shown in Fig. 2-7, a kind of camera lens automatic switchover for being measured microscopically platform is provided in one embodiment Device and its detail view, including bracket 301, changeover panel, power device 304, sensor 305, fixed frame 306 and support chip.

Bracket 301 is used for fixation of the microscope on measuring table 2 and x-axis slide unit substrate 33, while being also used to microscope The installation of internal optical, bracket 301 include a stand base bottom surface 3011 for being parallel to measuring table 2 and camera lens peace An obtuse angle is presented in dress face 3012, camera lens mounting surface 3012 and stand base bottom surface 3011, convenient for single camera lens to underlying workpiece Measurement.

Changeover panel is a throwing face structure, is rotatably mounted on the camera lens mounting surface 3012 of bracket 301, and changeover panel includes turning Change fixed disk 302 and camera lens support plate 303.

Conversion fixed disk 302 is rotatably mounted on the camera lens mounting surface 3012 of bracket 301, converts the throwing of fixed disk 302 Multiple mounting holes 3023 are offered on face, refering to what is shown in Fig. 5, camera lens of the mounting hole 3023 for detachably installation different multiplying, It converts to be equipped with above fixed disk 302 and be fixed with the conversion integrally formed fixing piece 3021 of fixed disk 302, fixing piece 3021 and conversion Disk 302 is coaxially disposed, and fixing piece 3021 is cylinder, and central hollow passes through for rotating shaft, circular array on fixing piece 3021 Column distribution has multiple grooves 30211, and each groove 30211 respectively corresponds a camera lens.

In other embodiments, fixing piece may also be disposed on microscope stand.

In bracket 301, the side of fixing piece 3021 is additionally provided with a locating piece 3022 that can be relatively rotated with fixing piece, positioning The elastic component 30221 of mating groove 30211 is provided on part 3022 along its axial direction, which acts on fixing piece 3021, and can be slided along 3021 surface of fixing piece.Elastic component 30221 includes spring and the hoodle for being set to spring end, bullet Pearl and groove 30211 cooperate, in unresisted situation, hoodle under the action of the spring, 3022 surface of locating piece of slightly emerging, bullet The size of pearl matches with the groove 30211 on fixing piece 3021, and when converting the rotation of fixed disk 302, spring is compressed, hoodle It is slided on 3021 surface of fixing piece, when going to required multiplying power camera lens, hoodle under the pressure of the spring, is sprung back into groove 30211, Carry out the precise positioning of camera lens.

In the above-mentioned technical solutions, groove can also be set to fixing piece upper surface, and corresponding, locating piece is also set to solid Determine above part, the elastic component-spring and hoodle in locating piece convexedly stretch in downwards locating piece lower surface, engage with groove realization.

Camera lens support plate 303 is fixed on 302 lower section of conversion fixed disk, is all a throwing face structure, radian is slightly larger than conversion The radian of fixed disk 302 offers through-hole 3031 corresponding with changeover panel mounting hole 3023 in camera lens support plate 303, is used for The camera lens of different multiplying is buckled, camera lens support plate 303 throws face edge and is uniformly provided with screw hole 3032, and camera lens support plate 303 can lead to It crosses screw to be fixedly connected with conversion fixed disk 302,303 outer of camera lens support plate is equipped with the gear 3033 being equally spaced.

In the above-mentioned technical solutions, the hole size in camera lens support plate is different, in order to engage different model size Camera lens.

Power device 304 is installed on bracket 301, provides power, power device 304 for the rotation of camera lens support plate 303 Including synchronous pulley 3041, synchrome conveying belt 3042 and motor 3043, synchronous pulley 3041 is fixedly installed on power device 304 Motor 3043 on；Power from motor 3043 is sent to camera lens support plate 303, synchrome conveying belt by synchrome conveying belt 3042 3042 can be synchronous toothed belt, and which is provided with transverse teeth corresponding with the gear 3033 of 303 outer of camera lens support plate, (figure is not Show), 3042 one end of synchrome conveying belt engages with the 3033 phase grinding tooth of gear in camera lens support plate, the other end and synchronous pulley 3041 It fastens.

In one embodiment, the material of camera lens support plate 302 is metal material, and the material of synchrome conveying belt 3042 is Neoprene, surface are covered with nylon canvas.

In other embodiments, synchrome conveying belt can be common transmission belt, with camera lens support plate and power device Between by powerful frictional force realize Synchronous Transmission.

Motor 3043 is Hybrid stepping motor, the connecting rod including motor body and with motor body transmission connection.

Support chip is set in camera lens support plate 303, and support chip is divided into the first support for being fixed on 303 lower section of camera lens support plate Piece 3071 and the second support chip 3072 between camera lens support plate 303 and conversion fixed disk 302, the first support chip 3071 Be equipped with its integrally formed sensing chip 30711, sensing chip 30711 have it is multiple, respectively annular array in the first support chip 3071 edge, each sensing chip 30711 are respectively arranged between two adjacent camera lenses, and each sensing chip 30711 is right respectively Answer a camera lens.

First support chip 3071 is set to 3042 lower section of lower section-synchronous belt of camera lens support plate 303, thereon annular array Multiple through-holes 30712 are distributed with, can be detachably connected on together in conversion fixed disk 302, be led to camera lens support plate 303 with screw Hole 30712 is long waist typed through hole, and the diameter of the first support chip 3071 is also slightly larger than camera lens support plate, in the first support chip 3071 Portion offers fixation hole, and inside inner edge corresponding with sensing chip is set as arcuate structure, the convenient curved surfaces phase with camera lens Cooperation, after the completion of fixed, 3071 edge of the first support chip convexedly stretches in 303 edge of camera lens support plate, be supplied to synchrome conveying belt from The restraining force that lower section is come up, prevents it from deviating from downwards in transmission process, meanwhile, it is curved that the first blade edges are equipped with fold-down Sensing chip 30711, sensing chip 30711 and 3071 integrated punching of the first support chip form, multiple 30711 array distributions of sensing chip With 3071 edge of the first support chip, each sensing chip 30711 respectively corresponds a camera lens, with reference to shown in Fig. 6.

In other technologies scheme, the first support chip can also be connected together with camera lens support plate.

Second support chip 3072 is set between camera lens support plate 303 and conversion fixed disk 302, and the second support chip is annular, Its diameter supports disk diameter slightly larger than camera lens, and the second support chip 3072 can both play camera lens support plate 303 and conversion fixed disk Buffer function between 302, and the restraining force of synchrome conveying belt can be given to from top, prevent it from taking off upwards in transmission process Out.

In the above-mentioned technical solutions, the function of long waist typed through hole 30712 is that rotation is facilitated to adjust sensing chip 30711 and camera lens Degree of correspondence, reduce big batch manufacture the first support chip 3071 when precision requirement, reduce manufacturing cost.

In use, sensing chip need to only be broken with the first support chip junction it is curved, make sensing chip with first support plate plane be in 90 degree of right angles, the camera lens being then aligned on changeover panel, are fixed below objective changer.

In other specific embodiments, sensing chip can be also integrally formed with the second support chip, can be folded upward at and be set to Two blade edges, each sensing chip still correspond to and a camera lens.

Sensor 305, sensor 305 is photoelectric sensor, set on the side of camera lens support plate 303, with the first support chip Sensing chip 30711 on 3071 is corresponding, and turning for camera lens is determined by the sensing chip 30711 on the first support chip 3071 of induction Change place, while control software control being cooperated to flow through the size of power device electric current, to control the revolving speed of power device.

Fixed frame 306 is set to 301 side of bracket, for Hybrid stepping motor to be fixed on bracket 301.

A kind of camera lens automatic switching control equipment being measured microscopically platform provided by the invention, its working principle is that: it is carrying out When camera lens is converted, increase electric current, motor driven synchronous pulley, so that synchrome conveying belt drives the rotation of camera lens support plate, changeover panel On spring hoodle forced contraction, while sensor carries out continual induction, and next institute is represented on support chip when sensing When needing the sensing chip of camera lens, gradually become smaller by controlling software control electric current, changeover panel rotation is slack-off, and spring hoodle encounters and institute After the groove for needing shots match, rebound blocks groove, sensing chip is exactly in sensor centre at this time, at this time the electricity of size Stream is insufficient to allow spring hoodle to skid off from groove, and changeover panel stops operating, and completes the automatic switchover of camera lens, when needs carry out down When one wheel Shot change, increase electric current.

In order to which spring hoodle can engage completely with groove, realization is more accurately positioned, and it is complete in sensing chip that motor can be set When full proximity sensor present a high dither state so that spring hoodle under high dither can it is seamless snap-fit into it is recessed Slot, more accurate positioning.

A kind of camera lens automatic switching control equipment being measured microscopically platform provided by the invention supports software control lens ratio Switching, realizes the convenient measurement of large format product, mechanical device intelligent precise, locks parfocalization after Shot change, microscopical Rigidity and measurement accuracy are unaffected.

It should be noted that, in this document, relational terms such as first and second and the like are used merely to a reality Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation In any actual relationship or order or sequence.Moreover, the terms "include", "comprise" or its any other variant are intended to Non-exclusive inclusion, so that the process, method, article or equipment including a series of elements is not only wanted including those Element, but also including other elements that are not explicitly listed, or further include for this process, method, article or equipment Intrinsic element.In the absence of more restrictions, the element limited by sentence "including a ...", it is not excluded that There is also other identical elements in process, method, article or equipment including the element.

The above is only the specific embodiment of the application, it is noted that for the ordinary skill people of the art For member, under the premise of not departing from the application principle, several improvements and modifications can also be made, these improvements and modifications are also answered It is considered as the protection scope of the application.

Claims (10)

1. a kind of measuring table microscope characterized by comprising

Microscope stand；

Changeover panel is rotatably mounted on bracket, and a plurality of lenses of different multiplying are distributed in annular array on the changeover panel；

Power device is installed on bracket, including synchrome conveying belt and motor, and the synchrome conveying belt is set to changeover panel and electricity Between machine, and the power from motor is sent to changeover panel；

First support chip is supported in below synchrome conveying belt, and array distribution has multiple sensing chips on first support chip, the sense Piece is answered to be formed from the edge downward bending of the first support chip, each camera lens matches the sensing chip respectively；And

On microscope stand, sensor corresponding with sensing chip.

2. a kind of measuring table microscope according to claim 1, which is characterized in that first support chip and induction The molding of piece integrated punching.

3. a kind of measuring table microscope according to claim 1, which is characterized in that each sensing chip is set respectively It is placed between two adjacent camera lenses.

4. a kind of measuring table microscope according to claim 1, which is characterized in that annular on first support chip Array distribution has multiple through-holes,

First support chip is detachably connected by screw and changeover panel.

5. a kind of measuring table microscope according to claim 4, which is characterized in that the through-hole is logical for long waist shaped Hole.

6. a kind of measuring table microscope according to claim 1, which is characterized in that first support chip and conversion It is snapped connection between disk.

7. a kind of measuring table microscope according to claim 1, which is characterized in that first blade edges are convex Stretch in the changeover panel surrounding.

8. a kind of measuring table microscope according to claim 1, which is characterized in that opened in the middle part of first support chip Equipped with fixation hole, fixation hole inner edge corresponding with sensing chip is arc.

9. a kind of measuring table microscope according to claim 1, which is characterized in that further include being barred from synchronous driving The second support chip with top.

10. a kind of measuring table microscope according to claim 1, which is characterized in that the sensor is induction type Photoelectric sensor.