CN110044803A - A method of the measurement glass etching performance of resistance to HF - Google Patents

A method of the measurement glass etching performance of resistance to HF Download PDF

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Publication number
CN110044803A
CN110044803A CN201910328279.9A CN201910328279A CN110044803A CN 110044803 A CN110044803 A CN 110044803A CN 201910328279 A CN201910328279 A CN 201910328279A CN 110044803 A CN110044803 A CN 110044803A
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China
Prior art keywords
glass
etching
resistance
film
face
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CN201910328279.9A
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Chinese (zh)
Inventor
侯建伟
刘文瑞
朱永迁
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Bengbu Medium Photoelectric Technology Co Ltd
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Bengbu Medium Photoelectric Technology Co Ltd
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Priority to CN201910328279.9A priority Critical patent/CN110044803A/en
Publication of CN110044803A publication Critical patent/CN110044803A/en
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    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C15/00Surface treatment of glass, not in the form of fibres or filaments, by etching
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N17/00Investigating resistance of materials to the weather, to corrosion, or to light

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  • Chemical & Material Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Environmental Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Ecology (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Biodiversity & Conservation Biology (AREA)
  • Environmental & Geological Engineering (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Testing Resistance To Weather, Investigating Materials By Mechanical Methods (AREA)
  • Surface Treatment Of Glass (AREA)

Abstract

The present invention discloses a kind of method for measuring the glass etching performance of resistance to HF, glass surface is coated in or is sticked to using a kind of etch resistant film, protection is not etched liquid etching by the glass surface that film covers, glass is integrally put into etching solution, the glass surface for being not covered with etch resistant film is etched liquid etching, it is etched by the glass surface that etch resistant film covers since the protection of film is not etched liquid, glass taking-up is cleaned up after the completion of etching, etch resistant film is removed, use step instrument scanning glass surface, measurement has anti-corrosion engraved film to protect and protect without anti-corrosion engraved film the difference in height of glass surface, it can be concluded that the resistance to HF acid etching data in glass tin face.Solve the problems, such as that etching data in the past cannot be distinguished glass tin face and air surface.

Description

A method of the measurement glass etching performance of resistance to HF
Technical field
The present invention relates to glass art, specifically a kind of method for measuring the glass etching performance of resistance to HF.
Background technique
Glass weight W of the acid of the resistance to HF performance test of glass usually using weight-loss method, before weighing etching0, glass is put into It is etched in etching solution, takes out cleaning glass drying, weigh weight W after etching1;Weight W before etching weight W=etching0Weight after etching Measure W1;Etched thickness H=etching weight W/ glass surface area S glass surface area S=long Lx glass of the wide Wx2+ glass of the long Lx glass of glass The wide high Hx2 of Wx glass of the high Hx2+ glass of glass.
This weight-loss method has the disadvantage in that
1, weight-loss method etch thicknesses are shown that precision depends on the precision and linear measure longimetry of weight by weight divided by surface area reckoning Precision;
2, float glass tin surface and the face Fei Xi chemical component have slight difference, and the resistance to HF acid etching of glass is caused also to be had any different, weightless This difference cannot be distinguished in method.
Summary of the invention
In order to overcome existing weight-loss method measurement there are the shortcomings that, the purpose of the present invention is to provide a kind of resistance to HF etchings of glass The measurement method of performance,.
For achieving the above object, the present invention provides a kind of method for measuring the glass etching performance of resistance to HF, including following Step:
(1) glass sample is cut perpendicular to the different parts in float glass process direction on the glass substrate;
(2) using pure water rinsing is used after washes of absolute alcohol glass sample, the spot on glass sample surface is removed, spot shadow is prevented Ring test result;
(3) glass short side direction is parallel to along glass middle line by half in glass tin face paste using anti-corrosion engraved film;
(4) glass short side direction is parallel to using anti-corrosion engraved film all to stick in glass air face along glass middle line;
(5) 85 DEG C of drying glass samples are cooled to 40 DEG C, are kept for 5 minutes;
(6) etching liquid volume ratio is HF:H2O=2:8 is placed on water-bath in polytetrafluoroethylene material or the container of lead matter Interior, water bath temperature is maintained at 38 ± 2 DEG C;
(7) it will be cooled to 40 DEG C of glass sample to be put into HF etching liquid, it is ensured that glass, which all submerges in etching liquid, to be etched 10min;
(8) glass sample is taken out, after rinsing using clear water, throws off anti-corrosion engraved film;
(9) washes of absolute alcohol glass sample is used, and is dried up after being rinsed with clear water;
(10) step instrument scanning glass sample surfaces are used, measurement has anti-corrosion engraved film to protect and protects glass table without anti-corrosion engraved film The difference in height in face obtains the resistance to HF acid etching data in glass tin face;
(11) measure the resistance to HF acid etching data in glass air face, including above-mentioned ten steps, wherein the step (3) be changed to using Anti-corrosion engraved film is parallel to glass short side direction along glass middle line for half in glass air face paste, the step (4) be changed to using Anti-corrosion engraved film is parallel to glass short side direction and all sticks in glass tin face along glass middle line, remaining step is same as described above, i.e., It can obtain the resistance to HF acid etching data in glass air face.
Further, the anti-corrosion engraved film is acid and alkali-resistance etching protective film.
Further, the anti-corrosion engraved film is the exfoliated adhesive tape of UV.
The present invention is coated in or is sticked to glass surface using a kind of film of anti-corrosion etching solution, protects the glass covered by film Surface is not etched liquid etching, glass is integrally put into etching solution, the glass surface for being not covered with etch resistant film is etched Liquid etching is etched by the glass surface that etch resistant film covers since the protection of film is not etched liquid, by glass after the completion of etching Glass taking-up cleans up, and etch resistant film is removed, and using step instrument scanning glass surface, is not etched the glass of liquid etching Apparent height is H0,The glass surface height of the liquid that is etched etching is H1
Etch amount H=do not have etching surface height H0Etching surface height H1
Etching speed S=etch amount H/ etch period t
Compared with prior art, the present invention having the advantage that
(1) using the present invention measurement glass etching performance of resistance to HF, the etching of float glass tin surface and air surface can be detected respectively Data solve the problems, such as that etching data in the past cannot be distinguished glass tin face and air surface;
(2) accurate tin face can be provided to client and air surface etches data, can provide accurately for TFT panel reduction process Etching numerical value, detection data has directive significance to the reduction process of TFT panel;
(3) glass tin face and air surface after being etched by probe scanning, the glass surface curve after observation etching can analyze The inhomogeneities of glass composition;
(4) tin is seeped to glass acid-proof alkaline by the further research for etching difference between data to glass tin face and air surface Influence;
(5) variation of glass raw material composition can be monitored by the variation to glass etching data.
Specific embodiment
The present invention provides a kind of method for measuring the glass etching performance of resistance to HF, comprising the following steps:
(1) glass sample of 50mmx100mm specification is cut perpendicular to the different parts in float glass process direction on the glass substrate;
(2) using pure water rinsing glass is used after washes of absolute alcohol glass sample, the spot of glass surface is removed, spot shadow is prevented Ring test result;
(3) glass short side direction half in tin face paste of the glass middle line by glass is parallel to using anti-corrosion engraved film;
(4) glass short side direction is parallel to using anti-corrosion engraved film all to stick in glass air face along glass middle line;
(5) 85 DEG C of drying glass are cooled to 40 DEG C, are kept for 5 minutes;
(6) etching liquid volume ratio: HF:H2O=2:8 is placed on water-bath in polytetrafluoroethylene material (or lead matter) container Interior, water bath temperature is maintained at 38 ± 2 DEG C;
(7) it will be cooled to 40 DEG C of mother glass to be put into HF etching liquid, it is ensured that glass, which all submerges in etching liquid, to be etched 10min;
(8) glass takes out, and after rinsing using clear water, throws off anti-corrosion engraved film;
(9) washes of absolute alcohol glass is used, is rinsed using a large amount of clear water, is dried up;
(10) step instrument scanning glass surface is used, measurement has anti-corrosion engraved film to protect and without anti-corrosion engraved film protection glass surface Difference in height, it can be deduced that the resistance to HF acid etching data in glass tin face;
(11) the above 1-10 step is repeated, is changed to sticking air surface into half in (3) step, be changed in (4) step by tin It all sticks in face, it can the detection resistance to HF acid etching data in glass air face.
Wherein the etch resistant film is acid and alkali-resistance etching protective film, especially with the protective film of resistance to hydrogen-oxygen acid etching, originally What is selected in experiment is the exfoliated adhesive tape of UV.

Claims (3)

1. a kind of method for measuring the glass etching performance of resistance to HF, comprising the following steps:
(1) glass sample is cut perpendicular to the different parts in float glass process direction on the glass substrate;
(2) using pure water rinsing is used after washes of absolute alcohol glass sample, the spot on glass sample surface is removed, spot shadow is prevented Ring test result;
(3) glass short side direction is parallel to along glass middle line by half in glass tin face paste using anti-corrosion engraved film;
(4) glass short side direction is parallel to using anti-corrosion engraved film all to stick in glass air face along glass middle line;
(5) 85 DEG C of drying glass samples are cooled to 40 DEG C, are kept for 5 minutes;
(6) etching liquid volume ratio is HF:H2O=2:8 is placed on water-bath in polytetrafluoroethylene material or the container of lead matter Interior, water bath temperature is maintained at 38 ± 2 DEG C;
(7) it will be cooled to 40 DEG C of glass sample to be put into HF etching liquid, it is ensured that glass, which all submerges in etching liquid, to be etched 10min;
(8) glass sample is taken out, after rinsing using clear water, throws off anti-corrosion engraved film;
(9) washes of absolute alcohol glass sample is used, and is dried up after being rinsed with clear water;
(10) step instrument scanning glass sample surfaces are used, measurement has anti-corrosion engraved film to protect and protects glass table without anti-corrosion engraved film The difference in height in face obtains the resistance to HF acid etching data in glass tin face;
(11) measure the resistance to HF acid etching data in glass air face, including above-mentioned ten steps, wherein the step (3) be changed to using Anti-corrosion engraved film is parallel to glass short side direction along glass middle line for half in glass air face paste, the step (4) be changed to using Anti-corrosion engraved film is parallel to glass short side direction and all sticks in glass tin face along glass middle line, remaining step is same as described above, i.e., It can obtain the resistance to HF acid etching data in glass air face.
2. a kind of method for measuring the glass etching performance of resistance to HF according to claim 1, it is characterised in that;The etch resistant Film is acid and alkali-resistance etching protective film.
3. a kind of method for measuring the glass etching performance of resistance to HF according to claim 1, it is characterised in that;The etch resistant Film is the exfoliated adhesive tape of UV.
CN201910328279.9A 2019-04-23 2019-04-23 A method of the measurement glass etching performance of resistance to HF Pending CN110044803A (en)

Priority Applications (1)

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Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614371A (en) * 2004-10-11 2005-05-11 南京师范大学 Pressure sensor of optical fiber micro-electromechanic system
CN1888859A (en) * 2005-06-30 2007-01-03 中国科学院高能物理研究所 Alph recoil track dating method
CN101548367A (en) * 2006-12-05 2009-09-30 佳能株式会社 Etching method for amorphous semiconductor oxide using alkaline etching solution
CN102015577A (en) * 2008-04-28 2011-04-13 飞罗得陶瓷股份有限公司 Yttria sinter and member for plasma processor
CN102592983A (en) * 2012-02-07 2012-07-18 中国科学院上海技术物理研究所 Wet etching method of Mn-Co-Ni-O thermosensitive thin film
CN202434478U (en) * 2011-12-28 2012-09-12 华南理工大学 Tray for improving uniformity of film prepared by dry etching
CN107907086A (en) * 2017-11-15 2018-04-13 西安交通大学 Chemical etching measuring method, auxiliary experiment device and the test method of optical element sub-surface damage
CN108802283A (en) * 2018-06-07 2018-11-13 四川旭虹光电科技有限公司 A kind of test method of glass baseplate surface defect direction and height

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1614371A (en) * 2004-10-11 2005-05-11 南京师范大学 Pressure sensor of optical fiber micro-electromechanic system
CN1888859A (en) * 2005-06-30 2007-01-03 中国科学院高能物理研究所 Alph recoil track dating method
CN101548367A (en) * 2006-12-05 2009-09-30 佳能株式会社 Etching method for amorphous semiconductor oxide using alkaline etching solution
CN102015577A (en) * 2008-04-28 2011-04-13 飞罗得陶瓷股份有限公司 Yttria sinter and member for plasma processor
CN202434478U (en) * 2011-12-28 2012-09-12 华南理工大学 Tray for improving uniformity of film prepared by dry etching
CN102592983A (en) * 2012-02-07 2012-07-18 中国科学院上海技术物理研究所 Wet etching method of Mn-Co-Ni-O thermosensitive thin film
CN107907086A (en) * 2017-11-15 2018-04-13 西安交通大学 Chemical etching measuring method, auxiliary experiment device and the test method of optical element sub-surface damage
CN108802283A (en) * 2018-06-07 2018-11-13 四川旭虹光电科技有限公司 A kind of test method of glass baseplate surface defect direction and height

Non-Patent Citations (5)

* Cited by examiner, † Cited by third party
Title
刘志明: "《材料化学专业实验教程》", 30 June 2007, 东北林业大学出版社 *
李文虎、艾桃桃: "《材料科学与工程专业实验教程》", 30 November 2015, 北京邮电大学出版社 *
李景镇: "《光学手册(下卷)》", 31 July 2010, 陕西出版集团 陕西科学技术出版社 *
王卓: ""光学材料加工亚表面损伤检测及控制关键技术研究"", 《中国优秀博硕士学位论文全文数据库(博士) 工程科技Ⅰ辑》 *
肖子凡: ""高强钠钙铝硅系浮法玻璃组成、结构及性能的研究"", 《中国博士学位论文全文数据库 工程科技Ⅰ辑》 *

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