CN106370536A - Measuring method of Vickers hardness of TFT liquid crystal glass substrate - Google Patents
Measuring method of Vickers hardness of TFT liquid crystal glass substrate Download PDFInfo
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- CN106370536A CN106370536A CN201610931835.8A CN201610931835A CN106370536A CN 106370536 A CN106370536 A CN 106370536A CN 201610931835 A CN201610931835 A CN 201610931835A CN 106370536 A CN106370536 A CN 106370536A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/40—Investigating hardness or rebound hardness
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/13—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on liquid crystals, e.g. single liquid crystal display cells
- G02F1/1306—Details
- G02F1/1309—Repairing; Testing
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0001—Type of application of the stress
- G01N2203/0005—Repeated or cyclic
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2203/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N2203/0058—Kind of property studied
- G01N2203/0076—Hardness, compressibility or resistance to crushing
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- Surface Treatment Of Glass (AREA)
Abstract
The invention discloses a measuring method of the Vickers hardness of a TFT liquid crystal glass substrate. The method includes the following steps of a, cutting the TFT liquid crystal glass substrate into square glass sheets with the side length of 10-25 mm; b, measuring the Vickers hardness of the glass sheets obtained in the step a multiple times through a Vickers hardness tester to obtain glass sheets with n indentations on surfaces, wherein n represents the number of measurement times; c, coating the n indentations on the surface of the glass sheets obtained in the step b with conductive film to obtain glass sheets with the surfaces of the indentations covered with the conductive film; d, observing the length of two diagonal lines of each indentation in the n indentations in the glass sheets obtained in the step c through an electron microscope, and calculating the Vickers hardness of the glass substrate according to the lengths of the diagonal lines. By means of the method, the Vickers hardness of the liquid crystal glass substrate can be accurately measured.
Description
Technical field
A kind of it relates to glass parameter measurement field, in particular it relates to survey of tft liquid crystal glass base Vickers hardness
Determine method.
Background technology
Current flat panel Display Technique has obtained extensive promotion and application, and particularly tft-lcd lcd technology exists
Leading position is occupied in present displays field, as the main composition part of tft-lcd display, the performance of liquid crystal glass base
Directly influence the quality of display pannel, the particularly important is that to have a strong impact on glass substrate good in panel production procedure
Product rate, directly influences the integrated cost of display pannel.Because the minimum display unit size in tft Display Technique is about several
Ten arrive hundreds of micron, so very small the wiping of glass baseplate surface scratches the product abandonment that all will result in coating process, reduce
Production efficiency even has a strong impact on yields.The hardness of glass baseplate surface is higher, then the probability that scuffing is wiped in its generation is less,
So the case hardness of glass substrate can reflect the degree that its anti-scratch scratches.Influence factor's bag of glass baseplate surface hardness
Include several aspect such as its chemical constituent, thermal history, process of surface treatment, which kind of component glass may determine that for chemical constituent
Case hardness higher, thus preferably or optimize more suitably frit side's proportioning, it is provided that preferably for thermal history
Substrate production annealing process, and apparent condition depends on substrate production technique, mainly has the overflow method of forming and float glass process at present, the former
For melten glass liquid natural cooling face, the latter is then burnishing surface.Although the glass surface hardness under above different condition is different,
Its difference is fairly small, if detected with the optical microscope of traditional durometer and its configuration, because of enlargement ratio and
Glass material is to the factors such as the reflection of light, transmission, refraction, (the especially cornerwise linear measure longimetry of impression of its integration test error
Error) it is greater than the difference of hardness itself, so being unable to reach experiment purpose.
Content of the invention
The purpose of the disclosure is to provide a kind of assay method of tft liquid crystal glass base Vickers hardness, and the method can be accurate
Really measure the Vickers hardness of liquid crystal glass base.
To achieve these goals, the disclosure provides a kind of assay method of tft liquid crystal glass base Vickers hardness, its
In, this assay method comprises the following steps: a, tft liquid crystal glass base is cut to the length of side be 10mm-25mm square glass
Piece；B, it is m gram and dwell time to be 15-30s according to measurement load, m is 200g, with Vickers, step a is obtained
Sheet glass carries out multiple Vickers hardness measurement, and pendulous frequency is represented with n, and n is 5,6,7,8,9 or 10, obtains surface and carries n four
The sheet glass of side shape impression；C, n impression coating conducting film of the glass sheet surface that step b is obtained, obtain table at impression
Face is coated with the sheet glass of conducting film；Each impression in n impression in d, the sheet glass being obtained with electron microscope observation step c
Two cornerwise length, respectively obtain n group catercorner length, be designated as n (d1) and n (d2) respectively, it is right to calculate according to the following formula
The meansigma methodss of diagonal length, wherein, the unit of d is micron, d=[1 (d1)+1 (d2)+2 (d1)+2 (d2)+...+n (d1)+n
(d2)]/2n；The Vickers hardness of e, according to the following formula calculating tft liquid crystal glass base, the unit of d is micron, Vickers hardness=
(1854×m)/d2.
Preferably, the square glass piece that step a obtains is sequentially passed through washing, ethanol is washed and distilled and walked after washing again
The operation of rapid b.
Preferably, conducting film described in step c is carbon film.
Preferably, n impression carbon coating of the glass sheet surface by carbon ion sputter, step b being obtained in step c
Film.
Preferably, n impression carbon coating of the glass sheet surface by carbon ion sputter, step b being obtained in step c
During film, the carbon film spray time of each impression is 10-15 minute.
Preferably, the square glass piece described in step a is positive square sheet glass.
Preferably, two cornerwise length of impression in the sheet glass being obtained with electron microscope observation step c in step d
When spending, the amplification of ultramicroscope is 1500-2000 times.
Preferably, the thickness of tft liquid crystal glass base is 0.3mm-0.7mm.
By the Vickers hardness assay method of the disclosure, can be hard to the Vickers of the tft liquid-crystalline glasses of different chemical constituents
Degree is tested, and then judges that different component affects it is also possible to different thermal histories and processing technique to its Vickers hardness
Glass substrate carries out Vickers hardness detection, judges countermeasure, and then reduces or eliminate glass substrate during downstream user use
Wiping scratch, improve yields.
Other feature and advantage of the disclosure will be described in detail in subsequent specific embodiment part.
Specific embodiment
Specific embodiment of this disclosure is described in detail below.It should be appreciated that it is described herein concrete
Embodiment is merely to illustrate and explains the disclosure, is not limited to the disclosure.
The disclosure provide a kind of assay method of tft liquid crystal glass base Vickers hardness, wherein, this assay method include with
Lower step: a, tft liquid crystal glass base is cut to the length of side be 10mm-25mm square glass piece；B, according to measurement load be m
Gram and the dwell time be 15-30s, m be 200g, it is hard that sheet glass step a being obtained with Vickers carries out multiple Vickers
Degree measurement, pendulous frequency is represented with n, and n is 5,6,7,8,9 or 10, obtains the sheet glass that surface carries n tetragon impression；c、
N impression coating conducting film of the glass sheet surface that step b is obtained, obtains the glass that surface at impression is coated with conducting film
Piece；Two cornerwise length of each impression in n impression in d, the sheet glass being obtained with electron microscope observation step c,
Respectively obtain n group catercorner length, be designated as n (d1) and n (d2) respectively, calculate the meansigma methodss of catercorner length according to the following formula, its
In, the unit of d is micron, d=[1 (d1)+1 (d2)+2 (d1)+2 (d2)+...+n (d1)+n (d2)]/2n；E, according to the following formula
Calculate the Vickers hardness of tft liquid crystal glass base, the unit of d is micron, Vickers hardness=(1854 × m)/d2.
Measurement load can be 200g, and the dwell time can be chosen as 25s, if the pressure of measurement load easily draws greatly very much
Play score burst, too little then impression is too little, reduce measuring accuracy；Vickers has been carried out several times measurement will obtain several
Individual tetragon impression, to there being two diagonal, therefore each impression measurement obtains two cornerwise length numbers to each impression
Value, calculating the molecule in the formula of d is 2n cornerwise length sum, and denominator is 2n, and therefore, this formula can be calculated diagonally
The average length d of line.
The unit of d can for micron, measurement load m unit can for gram, by calculate Vickers hardness formula calculate
The numerical value of the i.e. Vickers hardness drawing, the unit of the Vickers hardness obtaining can be kgf/mm2.
According to the present invention, the square glass piece that step a is obtained can sequentially pass through washing, ethanol is washed and distills after washing
Carry out the operation of step b again.
In the assay method of the disclosure, need to coat conducting film to impression, in follow-up step in follow-up step c
The catercorner length by electron microscope observation impression is needed in d, if liquid crystal glass base surface is contaminated, unfavorable
In being smoothed out of coating conducting film；The contaminated liquid crystal glass base in surface cannot clearly be observed in ultramicroscope simultaneously
The catercorner length of impression, the catercorner length being likely to result in measurement is inaccurate, in turn results in the Vickers hardness finally giving
Numerical value there is error；Sequentially pass through washing, ethanol wash with distilled water cleaning after the surface of liquid crystal glass base can be made to keep
Cleaning, is conducive to follow-up observation, measurement etc., is washing after cleaning with distilled water and can also dried through washing, ethanol.
According to the present invention, conducting film described in step c can be carbon film.
Glass substrate is nonconducting in itself, needs the impression table in glass substrate before putting into electron microscope observation
Face coats one layer of conducting film, and the catercorner length of glass substrate impression so could be clearly viewed by ultramicroscope.
According to the present invention, n pressure of the glass sheet surface that by carbon ion sputter, step b can be obtained in step c
Trace coats carbon film.
One layer of carbon film can be coated in indentation surface by carbon ion sputter, carbon film has electric conductivity, is coated with
The liquid-crystalline glasses plate of carbon film can clearly be observed in ultramicroscope.
Can be coated by ion sputtering instrument during n impression coating conducting film giving glass sheet surface in step c, apply
Covering ion sputtering source used during carbon film can be carbon materials matter.
According to the present invention, n impression of the glass sheet surface by carbon ion sputter, step b being obtained in step c is applied
When covering carbon film, the carbon film spray time of each impression can be 10-15 minute.
The time coating carbon film to the impression of sheet glass can be 10 minutes, 12 minutes, 13 minutes etc., divides through 10-15
The coating of clock can make indentation surface all be coated with carbon film.
According to the present invention, the square glass piece described in step a can be square type sheet glass.
According to the size of the sample cell placing sample to be measured in ultramicroscope etc. and then can determine liquid-crystalline glasses
Plate is cut to the sheet glass of square glass piece, rectangle glass piece or other shapes it is therefore an objective to sheet glass after making cutting
It is dimensioned for ultramicroscope measurement.
According to the present invention, two diagonal of impression in the sheet glass being obtained with electron microscope observation step c in step d
Length when, the amplification of ultramicroscope can be 1500-2000 times.
In ultramicroscope, by adjusting amplification, the impression of sheet glass is made to observe in ultramicroscope the most clear
Amplification during Chu is suitable amplification, can be 1500-2000 times or other suitable amplifications.
Pass through the catercorner length of determination of electron microscopy impression in the assay method of the disclosure, surveyed by optical microscope with existing
Level pressure trace catercorner length is compared, and can be observed under bigger amplification, can avoid in optical microscope simultaneously
The impact to observation such as reflection, refraction and transmission existing, the impression catercorner length of observation is more accurate, the dimension finally giving
Family name's hardness values are more accurate.
According to the present invention, the thickness of tft liquid crystal glass base can be 0.3mm-0.7mm.
The disclosure will be further illustrated by embodiment below, but the disclosure will not be therefore and any way limited.
Tft liquid crystal glass base used in embodiment is derived from Dong Xu group, model NEC jsm- of ultramicroscope
6700f, Vickers hardness is calculated as mhvd-1000is model.
Embodiment of the disclosure includes following detecting step:
A, by thickness, the tft liquid crystal glass base for 0.3mm-0.7mm is cut to square glass piece, then by sheet glass
Sequentially pass through washing, ethanol is washed and distilled washing, the square length of side is 10mm-25mm；
B, carried out by the sheet glass that Vickers obtains to step a 5-10 time Vickers hardness measurement, measure load
For 200g, the dwell time is 15s-30s, and concrete pendulous frequency is represented with n；
C, coat carbon film by the impression of the glass sheet surface to step b for the carbon ion sputter, the carbon film spray of each impression
The painting time is 10-15 minute；
D, under amplification is for 1500-2000, each impression in the sheet glass being obtained with electron microscope observation step c
Two cornerwise length, obtain n group catercorner length, be designated as n (d1) and n (d2) respectively, according to the following formula calculate diagonal
The meansigma methodss of length, wherein, the unit of d is micron,
D=[1 (d1)+1 (d2)+2 (d1)+2 (d2)+...+n (d1)+n (d2)]/2n；
The Vickers hardness of e, according to the following formula calculating tft liquid crystal glass base, the unit of d is micron,
Vickers hardness=(1854 × m)/d2.
Embodiment 1
The thickness of tft liquid crystal glass base is 0.3mm, is cut to the square glass piece that the length of side is 10mm；Hard in Vickers
In degree meter, the number of times of measurement is 5 times, and measurement load is 200g, and the dwell time is 15s；Each impression in carbon ion sputter
Carbon film spray time is 10 minutes；Under 1500 amplification, with two diagonal of each impression of electron microscope observation
Length, obtains 5 groups of cornerwise length value and the meansigma methodss of calculated catercorner length and Vickers hardness number refers to
Table 1.
Embodiment 2
The thickness of tft liquid crystal glass base is 0.7mm, is cut to the square glass piece that the length of side is 25mm；Hard in Vickers
In degree meter, the number of times of measurement is 10 times, and measurement load is 200g, and the dwell time is 30s；Each impression in carbon ion sputter
Carbon film spray time be 15 minutes；Under 2000 amplification, two with each impression of electron microscope observation diagonal
Line length, obtains 10 groups of cornerwise length value and the meansigma methodss of calculated catercorner length and Vickers hardness number is detailed
It is shown in Table 2.
Embodiment 3
The thickness of tft liquid crystal glass base is 0.5mm, is cut to the square glass piece that the length of side is 18mm；Hard in Vickers
In degree meter, the number of times of measurement is 7 times, and measurement load is 200g, and the dwell time is 22s；Each impression in carbon ion sputter
Carbon film spray time is 12 minutes；Under 1700 amplification, with two diagonal of each impression of electron microscope observation
Length, obtains 7 groups of cornerwise length value and the meansigma methodss of calculated catercorner length and Vickers hardness number refers to
Table 3.
Table 1
Table 2
Table 3
The preferred implementation of the disclosure described in detail above, but, the disclosure is not limited in above-mentioned embodiment
Detail, in the range of the technology design of the disclosure, multiple simple variant can be carried out with technical scheme of this disclosure, this
A little simple variant belong to the protection domain of the disclosure.
It is further to note that each particular technique feature described in above-mentioned specific embodiment, in not lance
In the case of shield, can be combined by any suitable means, in order to avoid unnecessary repetition, the disclosure to various can
The compound mode of energy no longer separately illustrates.
Additionally, combination in any can also be carried out between the various different embodiment of the disclosure, as long as it is without prejudice to this
Disclosed thought, it equally should be considered as content disclosed in this invention.
Claims (8)
1. a kind of assay method of tft liquid crystal glass base Vickers hardness, wherein, this assay method comprises the following steps:
A, tft liquid crystal glass base is cut to the length of side be 10mm-25mm square glass piece；
B, it is m gram and dwell time to be 15s-30s according to measurement load, m is 200g, with Vickers, step a is obtained
Sheet glass carry out multiple Vickers hardness measurement, pendulous frequency is represented with n, and n is 5,6,7,8,9 or 10, obtains surface and carries n
The sheet glass of tetragon impression；
C, n impression coating conducting film of the glass sheet surface that step b is obtained, obtain surface at impression and are coated with conducting film
Sheet glass；
Two cornerwise length of each impression in n impression in d, the sheet glass being obtained with electron microscope observation step c,
Respectively obtain n group catercorner length, be designated as n (d1) and n (d2) respectively, calculate the meansigma methodss of catercorner length according to the following formula, its
In, the unit of d is micron,
D=[1 (d1)+1 (d2)+2 (d1)+2 (d2)+...+n (d1)+n (d2)]/2n；
The Vickers hardness of e, according to the following formula calculating tft liquid crystal glass base, the unit of d is micron,
Vickers hardness=(1854 × m)/d2.
2. the assay method of tft liquid crystal glass base Vickers hardness according to claim 1, wherein, step a is obtained
The operation that square glass piece sequentially passes through washing, ethanol is washed and carries out step b after distilling washing again.
3. the assay method of tft liquid crystal glass base Vickers hardness according to claim 1, wherein, leads described in step c
Electrolemma is carbon film.
4. the assay method of tft liquid crystal glass base Vickers hardness according to claim 3, wherein, passes through carbon in step c
N impression coating carbon film of the glass sheet surface that ion sputtering instrument obtains to step b.
5. the assay method of tft liquid crystal glass base Vickers hardness according to claim 4, wherein, passes through carbon in step c
During n impression coating carbon film of the glass sheet surface that ion sputtering instrument obtains to step b, the carbon film spray time of each impression is
10-15 minute.
6. the assay method of tft liquid crystal glass base Vickers hardness according to claim 1, wherein, described in step a
Square glass piece is positive square sheet glass.
7. the assay method of tft liquid crystal glass base Vickers hardness according to claim 1, wherein, uses electronics in step d
In the sheet glass that microscopic step c obtains during two cornerwise length of impression, the amplification of ultramicroscope is
1500-2000 times.
8. the assay method of tft liquid crystal glass base Vickers hardness according to claim 1, wherein, tft liquid-crystalline glasses base
The thickness of plate is 0.3mm-0.7mm.
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| CN201610931835.8A CN106370536A (en) | 2016-10-31 | 2016-10-31 | Measuring method of Vickers hardness of TFT liquid crystal glass substrate |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107091786A (en) * | 2017-06-13 | 2017-08-25 | 东旭科技集团有限公司 | A kind of method for the micro-vickers hardness for measuring glass substrate |
| CN114563292A (en) * | 2022-03-28 | 2022-05-31 | 洛阳Lyc轴承有限公司 | Test method for accurately measuring hardness of micron-sized coating layer |
-
2016
- 2016-10-31 CN CN201610931835.8A patent/CN106370536A/en active Pending
Non-Patent Citations (3)
| Title |
|---|
| 张磊: ""TFT-LCD基板玻璃配方及工艺性能研究"", 《中国优秀硕士学位论文全文数据库 工程科技I辑》 * |
| 扶雄等: "《食用淀粉》", 31 March 2016, 中国轻工业出版社 * |
| 田民波等: "《薄膜科学技术手册》", 31 March 1991, 机械工业出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107091786A (en) * | 2017-06-13 | 2017-08-25 | 东旭科技集团有限公司 | A kind of method for the micro-vickers hardness for measuring glass substrate |
| CN114563292A (en) * | 2022-03-28 | 2022-05-31 | 洛阳Lyc轴承有限公司 | Test method for accurately measuring hardness of micron-sized coating layer |
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