CN110026828A - A kind of shear thickening-electrophoresis composite polishing method - Google Patents
A kind of shear thickening-electrophoresis composite polishing method Download PDFInfo
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- CN110026828A CN110026828A CN201910231076.8A CN201910231076A CN110026828A CN 110026828 A CN110026828 A CN 110026828A CN 201910231076 A CN201910231076 A CN 201910231076A CN 110026828 A CN110026828 A CN 110026828A
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- polishing
- shear thickening
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- electrophoresis
- mechanical arm
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Classifications
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B1/00—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes
- B24B1/002—Processes of grinding or polishing; Use of auxiliary equipment in connection with such processes using electric current
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B41/00—Component parts such as frames, beds, carriages, headstocks
- B24B41/06—Work supports, e.g. adjustable steadies
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B57/00—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents
- B24B57/02—Devices for feeding, applying, grading or recovering grinding, polishing or lapping agents for feeding of fluid, sprayed, pulverised, or liquefied grinding, polishing or lapping agents
Abstract
A kind of shear thickening-electrophoresis composite polishing method includes the following steps: 1) to select work piece holder, be installed on mechanical arm；2) by clamping workpiece on work piece holder；3) configuration has shear thickening-electrophoresis complex effect polishing fluid, and polishing fluid is placed in perfusion tube；4) polishing fluid is input on polishing disk, starting main shaft drives polishing disk；5) start shear thickening effect control mechanical arm, electrophoretic effect control DC power supply, under the action of mechanical arm, workpiece surface contact has shear thickening-electrophoresis complex effect polishing fluid, and provide load, the micro- rotation of active control workpiece, power electrode both ends generate the electrophoretic effect of abrasive grain simultaneously, form polishing fluid and being identical for workpiece surface removes with material, realize shear thickening-electrophoresis composite polishing.The present invention provides the compound Ultraprecise polished method of shear thickening-electrophoresis of one kind surface damage efficient, low/no or sub-surface damage.
Description
Technical field
The invention belongs to Ultraprecision Machining fields, are specifically related to a kind of shear thickening-electrophoresis composite polishing method.
Background technique
Ultraprecision Machining is widely applied in various fields in the important component of modern science and technology.Such as
In terms of the processing of the hard materials such as crisp difficult-to-machine material and bearing element such as sapphire, monocrystalline silicon and each functionality ceramic；It is various multiple
The high-precision of miscellaneous curved surface, low damage, beauty etc..Using Ultraprecision Machining, can obtain low surface roughness, it is low/
Free of surface defects or sub-surface damage workpiece surface.
Polishing is one kind of Ultra-precision Turning, refers to and enables to workpiece under the action of mechanical, chemistry or electrochemistry, drop
Low workpiece surface roughness improves the Ultra-precision Turning technique of workpiece surface finish.Shear thickening polishing is to propose in recent years
New Polishing Process, shear thickening polishing be using have shear thickening effect non-newtonian fluid as base fluid, wherein plus
Enter abrasive grain and polishing fluid is made, because shear action forms shear thickening flexible abrasive product, under the action of speed and load, realizes
The polishing process of workpiece surface progress material removal.Workpiece under shear thickening polishing has smaller surface roughness, causes
Surface damage or sub-surface damage it is small, have it is from a wealth of sources, it is inexpensive the features such as.
In DC electric field, charged particle always towards electrically opposite electrode movement the phenomenon that referred to as electrophoresis.Glue
There is liquid solution electrophoresis can adsorb electrically charged ion since colloidal particles surface area is big, charge micelle, when in electricity
Under field action, colloidal particles can be to a certain pole displacement.
It discloses Chinese invention patent (CN201810095554.2), patent name: a kind of efficient ultraprecise shear thickening-
Chemical cooperated polishing method.The present invention using liquid stream boundary active constraint and polishing liquid stream Active flow control, shear thickening with
Green Chemistry effect collaboration, improves processing efficiency, precision, and extend machinable material and face shape.The patent advantage is to add
Work material is wide, machined surface type is various, polishing fluid environmental protection, and shear thickening effect is utilized, makes the polishing method flexible polishing, mentions
High material removes certainty, and damaged surface layer is few.It is compared in effect of the abrasive grain for polishing, using electrophoretic effect, spirit can be added
Transient load when increase living polishes, it is significantly more efficient that workpiece is polished.
Authorized Chinese invention patent (CN201210192915.8), patent name: one kind is based on non-Newtonian shear
The ultraprecise curved surface polishing method of thickening effect.This method adds abrasive material system in the non-newtonian fluid with shear thickening effect
At polishing fluid, in polishing process, polishing fluid and workpiece surface have certain relative velocity, and the polishing fluid of polishing area is because of shearing
Effect generates shear thickening effect, forms shear thickening flexible abrasive product, realizes to the Ultraprecise polished of curved surface.But due to the polishing
Method relies solely on single shear thickening effect and generates the removal of micro-cutting forming material to workpiece, and polishing efficiency still has promotion empty
Between.
It has authorized Chinese invention patent (CN201410436510.3), patent name: having been thickened based on non-Newtonian shear
With the ultraprecise processing method of electrolysis complex effect.The patent advantage is to can be effectively solved electrobrightening workpiece surface easy
There is the problem of spot, improves processing efficiency；Disadvantage is that the face shape bad adaptability of processable workpiece not can solve material and be gone
The certain problem removed, it is difficult to realize the deterministic theory and high surface figure accuracy of workpiece material, limiting machinable material (has
Electric conductivity) range, electrolyte belongs to non-environmental protection substance, and effect on environment is big, environmental protection treatment is at high cost.
Chinese invention patent (CN201310207632.0), patent name: the polishing side based on dielectrophoresis effect are authorized
Method and its task equipment.The patent generates inhomogeneous field using frequency modulation and voltage modulation controller control AC power source, and polarize polishing fluid
And abrasive grain, and it is moved into the polishing realized on polishing pad to workpiece.Due to the polarization to polishing fluid and abrasive grain, offset
Part centrifugal force, extends the duration of polishing fluid and abrasive grain on polishing pad, reduces the surface roughness of workpiece,
But it is only limited to surface polishing workpiece, curve surface work pieces can not be polished.
Authorized Chinese invention patent (CN201310556649.7), patent name: a kind of electrophoresis assist ultrasound or
The device and processing method of fine rotary ultrasonic polishing micropore.Electrophoresis auxiliary is compounded in one with fine Ultrasonic machining by the patent
It rises, so that ultra micro abrasive grain is adsorbed on micro tool because of electrophoresis, when micro tool is along axial high-frequency vibration, drives working solution acute
Strong disturbance makes the inner surface of ultra micro abrasive grain swiping micropore workpiece, realizes auxiliary to the high efficiency of micropore, the electrophoresis of low surface roughness
Help the processing of fine ultrasound or fine rotary ultrasonic polishing micropore.The patent be only applicable to polishing micropore, for plane and other
The processing of complex curved surface parts is not applicable.
Summary of the invention
The deficiency that polishing efficiency in order to solve existing polishing method is lower, applicability is poor, the present invention provides a kind of high
Effect, the surface damage or sub-surface damage low/no compound Ultraprecise polished method of shear thickening-electrophoresis.
The technical solution adopted by the present invention to solve the technical problems is:
A kind of shear thickening-electrophoresis composite polishing method, includes the following steps:
1) work piece holder is selected, is installed on mechanical arm；
2) by clamping workpiece on work piece holder；
3) configuration has shear thickening-electrophoresis complex effect polishing fluid, and polishing fluid is placed in perfusion tube；
4) polishing fluid is input on polishing disk, starting main shaft drives polishing disk, so that polishing fluid is opposite on polishing disk
Movement；
5) start shear thickening effect control mechanical arm, electrophoretic effect control DC power supply, in the effect of mechanical arm
Under, workpiece surface contact has shear thickening-electrophoresis complex effect polishing fluid, and provides load, and micro- turn of active control workpiece
It is dynamic, while power electrode both ends generate the electrophoretic effect of abrasive grain, formed polishing fluid and workpiece surface be identical and material
Material removal, realizes shear thickening-electrophoresis composite polishing.
Further, the facilities and equipments of the method include polishing pad, DC power supply, main shaft, polishing disk, first electrode, machine
Tool arm, work piece holder, liquid trap and polishing liquid pool, the work piece holder be second electrode, the positive and negative anodes of DC power supply respectively with
The first electrode, second electrode connection；The polishing disk drives polishing disk on main shaft, by main shaft, and first electrode is being thrown
On CD, on the first electrode, for polishing pad on the insulating layer, work piece holder is located at the top of polishing pad to insulating layer, mechanical
Arm is equipped with work piece holder；The polishing disk is located in the polishing liquid pool, and the refluxing opening and liquid trap of the polishing liquid pool connect
It connects, the liquid trap is connect with perfusion tube, and the outlet of the perfusion tube is processing stations.
The preferred perfusion tube is colorless and transparent hose, inner hollow, the input channel as polishing fluid；Polishing disk
For insulating ceramics polishing disk；Mechanical arm is six axis crossmachine people.
In the polishing process of the step 5), movement of the workpiece under mechanical arm control: carried out every T time primary complicated
Micro- rotation, the micro- rotation of the complexity are divided into I stage and II stage, and I stage workpiece rotates micro- angle, II stage by axis of the workpiece center of circle
Workpiece is rotated by 360 ° by axis of work piece holder.
In the step 3), each ingredient of polishing fluid and its ratio: polishing abrasive grain 10wt.%-20wt.%, shear thickening base
Liquid 20wt.%-30wt.%, water 40wt.%-50wt.%, electrophoretic effect particle 5wt.%-15wt.%.
Polishing abrasive grain can choose the metal oxides such as Al2O3, cerium oxide as polishing abrasive grain, and polishing fluid (colloid) is middle to be thrown
Tarry matter grain can adsorb negative electrical charge (such as Cl-)；Also CBN, diamond, SiO be can choose2, the non-metallic particles such as SiC are as polishing mill
Grain, the middle polishing abrasive grain of polishing fluid (colloid) can adsorb positive charge (such as Na+)。
In the present invention, the polishing fluid in the step 3) has shear thickening-electrophoresis complex effect.Shear thickening-electrophoresis
Complex effect: (1) polishing fluid meets colloidal solution requirement, and dispersate (abrasive material) can adsorb positive charge (Na+) or negative electrical charge (Cl-)；
(2) shear thickening of polishing fluid is mutually realized in shear thickening, and when polishing can be to form " thickening-centered on the abrasive material for having adsorbed charge
Electrophoresis abrasive grain group ", " thickening-electrophoresis abrasive grain group " are moved in the electric field, shift to workpiece polished surface.
In the step 5), electric field is generated after starting DC power supply, between two electrodes as shown in Fig. 2, by the thick of electric field line
The area Mi Fen A, the area B and the area C, under the action of electric field force towards the area B, the area B can assemble greatly the electrification abrasive grain in the area A and the area C
The electrification abrasive grain of amount, while the mechanical arm started, workpiece (such as cutter) are contacted with certain relative velocity with polishing fluid, largely
Electrification abrasive grain generates shear thickening effect under shear action, and polishing fluid viscosity increases, formed " thickening-electrophoresis abrasive grain group ",
Under the action of electric field, a large amount of " thickening-electrophoresis abrasive grain group " is gathered in workpiece (such as cutter) polishing area, and it is soft to form shear thickening
Property grinding tool, can preferably coincide workpiece (such as cutter) polishing area, realize shear thickening-electrophoresis composite polishing.Shear thickening-
Electrophoresis composite polishing is the flexible polishing to workpiece (such as cutter), can obtain low surface roughness, surface damage low/no or Asia
The workpiece of surface damage, electrophoretic effect therein not only increase the unit intensity of " thickening-electrophoresis abrasive grain group ", also increase
The transient load of polishing fluid and workpiece (such as cutter) polishing area, improves polishing efficiency.
Beneficial effects of the present invention are mainly manifested in: polishing efficiency is higher, surface damage or sub-surface damage low/no.
Detailed description of the invention
Fig. 1 be shear thickening-electrophoresis composite polishing method, in which: perfusion tube 1, polishing pad 2, DC power supply 3, main shaft 4,
Polishing disk 5, first electrode 6, mechanical arm 7, work piece holder (second electrode) 8, workpiece (such as cutter) 9, polishing fluid 10.
Fig. 2 is the electric field line distribution in the case of being powered, and the electric field line generated from first electrode 6 is directed toward work piece holder (second
Electrode) 8.
Fig. 3 is microgram before polishing, and polishing fluid is colloidal solution before polishing, and abrasive grain (dispersate) can adsorption charge (Cl-Or
Na+)。
Fig. 4 is microgram in polishing: a) before abrasive grain cutting b) after abrasive grain cutting.It a) is that electrification abrasive grain is produced by shear action
Raw shear thickening effect forms " thickening-electrophoresis abrasive grain group "；B) be " thickening-electrophoresis abrasive grain group " under the action of speed to surface
It is polished.
Specific embodiment
The invention will be further described below in conjunction with the accompanying drawings.
Embodiment 1
Referring to Fig.1~Fig. 4, a kind of shear thickening-electrophoresis composite polishing method are used for process tool point of a knife, bearing parts
When curve surface work pieces (such as hard alloy cutter tool arc, bearing parts curved surface), procedure of processing is as follows:
1) work piece holder (second electrode) 8 is selected, is installed on mechanical arm 7；
2) by 9 clamping of cutter on work piece holder (second electrode) 8；
3) configuration has shear thickening-electrophoresis complex effect polishing fluid 10, and polishing fluid 10 is placed in perfusion tube 1；
4) polishing fluid 10 is input on polishing disk 5, starting main shaft 4 drives polishing disk 5, so that polishing fluid 10 is in polishing disk
Relative motion on 5；
5) start shear thickening effect control mechanical arm 7, electrophoretic effect control DC power supply 3, in the work of mechanical arm 7
Under, workpiece 9 (cutter) tool arc curved face contact has shear thickening-electrophoresis complex effect polishing fluid 10, and provides load
Lotus, active control workpiece 9 (cutter) is with the micro- rotation in the tool arc center of circle, while 3 electrode both ends of power supply generate the electricity of abrasive grain
Swimming effect, forms polishing fluid 10 and being identical for workpiece 9 (cutter) shape removes with material, realizes that shear thickening-electrophoresis is multiple
Close polishing.
The facilities and equipments of the method include perfusion tube 1, polishing pad 2, DC power supply 3, main shaft 4, the 5, first electricity of polishing disk
Pole 6, mechanical arm 7, work piece holder (second electrode) 8, the polishing disk 5 drive polishing disk 5 on main shaft 4, by main shaft 4, the
One electrode 6 is on polishing disk 5, and polishing pad 2 is in first electrode 6, and perfusion tube 1 is in the upper left side of master device, and DC power supply 3 is in master
Outside device, mechanical arm 7 is equipped with work piece holder (second electrode) 8, is used for clamping workpiece (such as cutter) 9.
In the step 5), in polishing process, workpiece 9 (cutter) mechanical arm 7 control under movement: every T time into
The primary complicated micro- rotation of row, the micro- rotation of the complexity are divided into I stage and II stage, and I stage workpiece is using (cutter) center of circle of workpiece 9 as axis
Micro- angle is rotated, II stage workpiece is rotated by 360 ° by axis of work piece holder.
In the step 3), each ingredient of polishing fluid and its ratio: polishing abrasive grain 10wt.%-20wt.%, shear thickening base
Liquid 20wt.%-30wt.%, water 40wt.%-50wt.%, electrophoretic effect particle 5wt.%-15wt.%.
In the present embodiment, ingredient and its ratio that polishing fluid can choose are as follows:
Polish abrasive grain 10wt.%, shear thickening base fluid 25wt.%, water 50wt.%, electrophoretic effect particle 15wt.%；
Either: polishing abrasive grain 20wt.%, shear thickening base fluid 30wt.%, water 45wt.%, electrophoretic effect particle
5wt.%；
Again either: polishing abrasive grain 18wt.%, shear thickening base fluid 28wt.%, water 40wt.%, electrophoretic effect particle
14wt.%；
Or be: polishing abrasive grain 19wt.%, shear thickening base fluid 20wt.%, water 48wt.%, electrophoretic effect particle
13wt.%.
Polishing abrasive grain can choose the metal oxides such as Al2O3, cerium oxide as polishing abrasive grain, and polishing fluid (colloid) is middle to be thrown
Tarry matter grain can adsorb negative electrical charge (such as Cl-)；Also CBN, diamond, SiO be can choose2, the non-metallic particles such as SiC are as polishing mill
Grain, the middle polishing abrasive grain of polishing fluid (colloid) can adsorb positive charge (such as Na+)。
Embodiment 2
The present invention is used for processing dimension are as follows: length × width × height (such as 25mm × 25mm × 5mm) flat work pieces (such as silicon materials,
SiC, optical crystal, etc. and all kinds of difficult-to-machine materials)
The following steps are included:
1) work piece holder (second electrode) 8 is selected, is installed on mechanical arm 7；
2) by 9 clamping of workpiece on work piece holder (second electrode) 8；
3) configuration has shear thickening-electrophoresis complex effect polishing fluid 10, and polishing fluid 10 is placed in perfusion tube 1；
4) polishing fluid 10 is input on polishing disk 5, starting main shaft 4 drives polishing disk 5, so that polishing fluid 10 is in polishing disk
Relative motion on 5；
5) start shear thickening effect control mechanical arm 7, electrophoretic effect control DC power supply 3, in the work of mechanical arm 7
Under, the contact of 9 polished surface of workpiece has shear thickening-electrophoresis complex effect polishing fluid 10, and provides load, active control
Workpiece 9 makees vertical axis rotation with work piece holder, while 3 electrode both ends of power supply generate the electrophoretic effect of abrasive grain, forms polishing
Liquid 10 and being identical for 9 shape of workpiece remove with material, realize shear thickening-electrophoresis composite polishing.
In step 5), in polishing process, micro- turn movement of the workpiece 9 under the control of mechanical arm 7: is carried out with certain angular speed
Dynamic, workpiece makees vertical axis rotation with work piece holder.
Embodiment 3
The present invention is used for processing dimension parameter are as follows: when the optical glass material flat work pieces of diameter 30mm, focal length 100mm,
Its operating procedure is as follows:
1) work piece holder (second electrode) 8 is selected, is installed on mechanical arm 7；
2) by 9 clamping of workpiece on work piece holder (second electrode) 8；
3) configuration has shear thickening-electrophoresis complex effect polishing fluid 10, and polishing fluid 10 is placed in perfusion tube 1；
4) polishing fluid 10 is input on polishing disk 5, starting main shaft 4 drives polishing disk 5, so that polishing fluid 10 is in polishing disk
Relative motion on 5；
5) start shear thickening effect control mechanical arm 7, electrophoretic effect control DC power supply 3, in the work of mechanical arm 7
Under, the contact of 9 polished surface of workpiece has shear thickening-electrophoresis complex effect polishing fluid 10, and provides load, active control
Workpiece 9 makees vertical axis rotation with work piece holder, while 3 electrode both ends of power supply generate the electrophoretic effect of abrasive grain, forms polishing
Liquid 10 and being identical for 9 shape of workpiece remove with material, realize shear thickening-electrophoresis composite polishing.
In step 5), in polishing process, micro- turn movement of the workpiece 9 under the control of mechanical arm 7: is carried out with certain angular speed
Dynamic, workpiece makees vertical axis rotation with work piece holder.
Claims (6)
1. a kind of shear thickening-electrophoresis composite polishing method, which is characterized in that described method includes following steps:
1) work piece holder is selected, is installed on mechanical arm；
2) by clamping workpiece on work piece holder；
3) configuration has shear thickening-electrophoresis complex effect polishing fluid, and polishing fluid is placed in perfusion tube；
4) polishing fluid is input on polishing disk, starting main shaft drives polishing disk, so that polishing fluid relative motion on polishing disk；
5) start shear thickening effect control mechanical arm, electrophoretic effect control DC power supply, under the action of mechanical arm, work
The contact of part surface has shear thickening-electrophoresis complex effect polishing fluid, and provides load, the micro- rotation of active control workpiece, together
When power electrode both ends generate the electrophoretic effect of abrasive grain, form polishing fluid and being identical for workpiece surface and gone with material
It removes, realizes shear thickening-electrophoresis composite polishing.
2. a kind of shear thickening-electrophoresis composite polishing method as described in claim 1, which is characterized in that the reality of the method
Arranging standby includes polishing pad, DC power supply, main shaft, polishing disk, first electrode, mechanical arm, work piece holder, liquid trap and polishing fluid
Pond, the work piece holder are second electrode, and the positive and negative anodes of DC power supply are connect with the first electrode, second electrode respectively；Institute
The polishing disk stated drives polishing disk on main shaft, by main shaft, and first electrode on polishing disk, on the first electrode, throw by insulating layer
For light pad on the insulating layer, work piece holder is located at the top of polishing pad, and mechanical arm is equipped with work piece holder；The polishing disk position
In in the polishing liquid pool, the refluxing opening of the polishing liquid pool is connect with liquid trap, and the liquid trap is connect with perfusion tube, described
The outlet of perfusion tube is processing stations.
3. a kind of shear thickening-electrophoresis composite polishing method as claimed in claim 2, which is characterized in that the perfusion tube
For colorless and transparent hose, inner hollow, the input channel as polishing fluid；Polishing disk is insulating ceramics polishing disk；Mechanical arm is
Six axis crossmachine people.
4. a kind of shear thickening-electrophoresis composite polishing method as described in one of claims 1 to 3, which is characterized in that the step
In rapid polishing process 5), primary complicated micro- rotation, the complexity movement of the workpiece under mechanical arm control: are carried out every T time
Micro- rotation is divided into I stage and II stage, and I stage workpiece rotates micro- angle by axis of the workpiece center of circle, and II stage workpiece is with workpiece clamp
Tool is rotated by 360 ° for axis.
5. a kind of shear thickening-electrophoresis composite polishing method as described in one of claims 1 to 3, which is characterized in that the step
It is rapid 3) in, each ingredient of polishing fluid and its ratio: polishing abrasive grain 10wt.%-20wt.%, shear thickening base fluid 20wt.%-
30wt.%, water 40wt.%-50wt.%, electrophoretic effect particle 5wt.%-15wt.%.
6. a kind of shear thickening-electrophoresis composite polishing method as claimed in claim 5, which is characterized in that the polishing abrasive grain
For Al2O3, cerium oxide, CBN, diamond, SiO2, SiC particulate.
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111644949A (en) * | 2020-06-03 | 2020-09-11 | 大连理工大学 | Polishing device for crankshaft of diesel engine |
| CN112454157A (en) * | 2020-09-29 | 2021-03-09 | 湖南科技大学 | Controllable discontinuous shear thickening and polishing method and device |
| CN113103151A (en) * | 2021-05-08 | 2021-07-13 | 清华大学 | Polishing solution conveying device with polarization function and chemical mechanical polishing equipment |
| CN114800238A (en) * | 2022-05-11 | 2022-07-29 | 北京博海康源医疗器械有限公司 | Method and device for removing burrs of micro scalpel through shear thickening |
| CN115446718A (en) * | 2022-07-19 | 2022-12-09 | 北京博海康源医疗器械有限公司 | System and method for polishing and deburring surface of scalpel |
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| CN111644949A (en) * | 2020-06-03 | 2020-09-11 | 大连理工大学 | Polishing device for crankshaft of diesel engine |
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| CN112454157A (en) * | 2020-09-29 | 2021-03-09 | 湖南科技大学 | Controllable discontinuous shear thickening and polishing method and device |
| CN113103151A (en) * | 2021-05-08 | 2021-07-13 | 清华大学 | Polishing solution conveying device with polarization function and chemical mechanical polishing equipment |
| CN114800238A (en) * | 2022-05-11 | 2022-07-29 | 北京博海康源医疗器械有限公司 | Method and device for removing burrs of micro scalpel through shear thickening |
| CN115446718A (en) * | 2022-07-19 | 2022-12-09 | 北京博海康源医疗器械有限公司 | System and method for polishing and deburring surface of scalpel |
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