CN110023797A - Optical path modulation device and preparation method thereof, optical device and electronic device - Google Patents

Optical path modulation device and preparation method thereof, optical device and electronic device Download PDF

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Publication number
CN110023797A
CN110023797A CN201980000411.1A CN201980000411A CN110023797A CN 110023797 A CN110023797 A CN 110023797A CN 201980000411 A CN201980000411 A CN 201980000411A CN 110023797 A CN110023797 A CN 110023797A
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CN
China
Prior art keywords
optical path
barrier layer
light barrier
path modulation
substrate
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CN201980000411.1A
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Chinese (zh)
Inventor
王文轩
沈健
王红超
姚国峰
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Shenzhen Goodix Technology Co Ltd
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Shenzhen Huiding Technology Co Ltd
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Publication of CN110023797A publication Critical patent/CN110023797A/en
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)

Abstract

The application provides a kind of optical path modulation device and preparation method thereof, optical device and electronic device, optical path modulation device includes: filter layer (20), light barrier layer (30) and optical path modulation element (40), wherein, single or multiple spaced smooth through-holes (31) are opened up on the light barrier layer (30), projection of the optical path modulation element (40) on the light barrier layer (30) covers the smooth through-hole (31), and the filter layer (20) is used to selectively penetrate the light of the specific wavelength at the light barrier layer (30) and the optical path modulation element (40) position, the application realizes the purpose that single light path modulation device carries out selective transmission and optical path modulation to the light wave of specific wavelength, simultaneously light barrier layer and filter layer secondary barrier so that light have it is extremely low Transmitance, eliminate the interference of other stray lights.

Description

Optical path modulation device and preparation method thereof, optical device and electronic device
Technical field
This application involves optical technology more particularly to a kind of optical paths with light wave selectivity transmission and optical path modulation function Modulation device and preparation method thereof, optical device and electronic device.
Background technique
With the continuous development of intelligent terminal, more and more optical setups such as camera, 3D imaging sensor shields and refers to down The optical device applications such as line identification sensor are into terminal, wherein those optical devices are in use, be required to specific wavelength It is collected and identifies after the light progress optical path modulation of range, while rejecting other stray lights of unwanted wave-length coverage Interference.
Currently, single lens are difficult have preferable wavelength selectivity in optical device, in order to reach to specific wavelength model The light enclosed is selected, and is placed among lens optical path in optical device often through by a piece of or several individual optical filters, To reach filter effect, when setting, optical filter and lens in optical device are to be fabricated separately and be installed together by mould group.
However, it is saturating on the one hand to increase manufacture in this way since optical filter and lens need to be fabricated separately in above-mentioned optical device The technique of mirror mould group part, and the setting of optical filter is so that the thickness of entire lens module is thicker, on the other hand since technique limits System so that cannot exclude the interference of other stray lights well after optical filter and lens assembling.
Summary of the invention
The application provides a kind of optical path modulation device and preparation method thereof, optical device and electronic device, realizes to spy The long light wave of standing wave carries out selective collection and carries out the purpose of optical path modulation, the interference of other stray lights is eliminated, to solve Existing lens of having determined can not individually carry out that light wave selection, optical path modulation mode be single, lens module technique increases and cannot be very The problem of excluding other interference of stray light well.
The application provides a kind of optical path modulation device, comprising:
Filter layer, light barrier layer and optical path modulation element, wherein open up single or multiple intervals on the light barrier layer and set The light through-hole set, projection of the optical path modulation element on the light barrier layer cover the smooth through-hole, and the filter layer For the light of the specific wavelength at the light barrier layer and the optical path modulation position of components selectively to be penetrated.
In the specific embodiment of the application, specifically, further include: the substrate of light-permeable, the filter layer and/or described Light barrier layer is set on the substrate, and projection of the filter layer on the light barrier layer at least cover the photoresist every Layer.
In the specific embodiment of the application, specifically, the filter layer is arranged in at least one side of the substrate, and The view field of the filter layer on the substrate at least partly covers the substrate.
In the specific embodiment of the application, specifically, the front and back of the substrate is equipped with the filter layer, institute It states on the filter layer that light barrier layer is covered in the substrate at least one side, the optical path modulation element is arranged in the light On barrier layer and cover the smooth through-hole.
In the specific embodiment of the application, specifically, the filter layer is located in the wherein one side of the substrate, it is described Light barrier layer is located at the substrate on the another side of the filter layer, optical path modulation element setting the photoresist every On layer and cover the smooth through-hole.
In the specific embodiment of the application, specifically, the light barrier layer is located in at least one side of the substrate, institute Filter layer is stated at least to be covered on the light barrier layer, the optical path modulation element be arranged on the filter layer and with the light Through-hole is corresponding.
In the specific embodiment of the application, specifically, the light barrier layer is located in the wherein one side of the substrate, and On the light barrier layer and the substrate is equipped with the filter layer, the optical path on the another side of the light barrier layer Modulation element is arranged on the filter layer on the light barrier layer and corresponding with the smooth through-hole.
In the specific embodiment of the application, specifically, the light barrier layer is located in at least one side of the substrate, institute It states optical path modulation element to be arranged on the light barrier layer and cover the smooth through-hole, the filter layer is at least covered on the light On barrier layer and the optical path modulation element.
In the specific embodiment of the application, specifically, the light barrier layer is located in the wherein one side of the substrate, institute Filter layer is stated to be covered on the light barrier layer, on the optical path modulation element and the substrate is away from the light barrier layer On another side.
In the specific embodiment of the application, specifically, the substrate is any one following substrate:
Glass, crystal, metal, flexible and transparent substrate.
In the specific embodiment of the application, specifically, the filter layer is that organic or inorganic material passes through coating, steaming The single-layer or multi-layer film layer that plating, sputter, physical/chemical vapor deposition, plasma enhanced deposition or spin coating mode are formed.
In the specific embodiment of the application, specifically, the filter layer is to penetrate for the light of the specific wavelength Optical filtering substrate, and light barrier layer is set, the optical path modulation element is located at the light in at least one side of the optical filtering substrate On barrier layer and cover the smooth through-hole.
In the specific embodiment of the application, specifically, the optical filtering substrate is any one following substrate: process for sapphire-based Material, Lan Shuijing, germanium wafer, ruby or the glass baseplate for adulterating different colours element.
In the specific embodiment of the application, specifically, the filter layer be for the specific wavelength be 300nm~ The filter layer that the wave band of 1100nm penetrates.
In the specific embodiment of the application, specifically, the light barrier layer is made of black glue material or inorganic material Film layer.
In the specific embodiment of the application, specifically, the optical path modulation element is convex lens, concavees lens, Fresnel The transparent optical path modulation element of lens, prism or irregular shape.
The application also provides a kind of optical device, includes at least optical path modulation device described in any of the above embodiments.
The application also provides a kind of electronic device, including at least optical device described above.
The application also provides a kind of production method of optical path modulation device, which comprises
One substrate is provided；
Filter layer is formed in at least one side of the substrate；
Light barrier layer is formed on the filter layer, and on the light barrier layer by graphical treatment formed it is single or more A spaced smooth through-hole；
Optical path modulation element is formed on the smooth through-hole.
The application also provides a kind of production method of optical path modulation device, which comprises
One substrate is provided；
Light barrier layer is formed in at least one side of the substrate, and is formed on the light barrier layer by graphical treatment Single or multiple spaced smooth through-holes；
Optical path modulation element is formed on the smooth through-hole；
Filter layer is at least covered on the light barrier layer and the optical path modulation element, and the filter layer is in the light Projection on barrier layer at least covers the light barrier layer.
In the specific embodiment of the application, specifically, described form light barrier layer in at least one side of the substrate, Include:
The light barrier layer is set in the wherein one side of the substrate；
It is described at least to cover filter layer on the light barrier layer and the optical path modulation element, comprising:
The first filter layer is covered on the light barrier layer and the optical path modulation element；
The second filter layer is set on another side of the substrate away from the light barrier layer.
The application also provides a kind of production method of optical path modulation device, which comprises
One optical filtering substrate is provided；
Light barrier layer is formed in at least one side of the optical filtering substrate, and passes through graphical treatment on the light barrier layer Form single or multiple spaced smooth through-holes；
Optical path modulation element is formed on the smooth through-hole.
The application also provides a kind of production method of optical path modulation device, which comprises
One substrate is provided；
Light barrier layer is formed in at least one side of the substrate, and is formed on the light barrier layer by graphical treatment Single or multiple spaced smooth through-holes；
At least filter layer is covered on the light barrier layer；
Optical path modulation element is formed on the filter layer, and the optical path modulation element is corresponding with the smooth through-hole.
In the specific embodiment of the application, specifically, described form light barrier layer in at least one side of the substrate, Include:
The light barrier layer is set in the wherein one side of the substrate；
It is described at least to cover filter layer on the light barrier layer, comprising:
First filter layer is set on the light barrier layer；
The second filter layer is set on another side of the substrate away from the light barrier layer；
It is described that optical path modulation element is formed on the filter layer, comprising:
On first filter layer and position corresponding with the smooth through-hole forms optical path modulation element.
Optical path modulation device provided by the present application, by including filter layer, light barrier layer and optical path modulation element, wherein Single or multiple spaced smooth through-holes are opened up on the light barrier layer, the optical path modulation element is in the light barrier layer On projection be covered on the smooth through-hole, and the filter layer is used for the light barrier layer and the optical path modulation element The light of specific wavelength at position selectively penetrates, and such optical path modulation device, which does not need additional mould group technique, will filter Photosphere and optical path modulation element integrate, and the light to specific wavelength may be implemented in the optical path modulation device for having reached single The purpose selectively penetrated, simultaneously as filter layer can also select the light of the specific wavelength at light barrier layer Selecting property penetrates, and such light barrier layer and filter layer collectively constitute the barrier region that secondary barrier is carried out to light, due to photoresist every The secondary barrier of layer and filter layer is so that light has extremely low transmitance, to have good stray light barriering effect, institute Single light path modulation device is not only realized with optical path modulation device provided in this embodiment to select the light wave of specific wavelength Selecting property penetrates and the purpose of optical path modulation, at the same light barrier layer and filter layer secondary barrier so that light have it is extremely low saturating Rate is crossed, to eliminate the interference of other stray lights, and the thickness of optical path modulation device is reduced, solves existing lens group Part can not individually carry out that light wave selection, optical path modulation mode is single and cannot exclude other interference of stray light and thickness well Spend thicker problem.
Detailed description of the invention
In order to illustrate the technical solutions in the embodiments of the present application or in the prior art more clearly, to embodiment or will show below There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is this Shen Some embodiments please for those of ordinary skill in the art without any creative labor, can be with It obtains other drawings based on these drawings.
Figure 1A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application one provides；
Figure 1B is light wave selection and the optical path modulation schematic diagram for the optical path modulation device that the embodiment of the present application one provides；
Fig. 1 C is the schematic top plan view for the optical path modulation device that the embodiment of the present application one provides；
Fig. 2A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application two provides；
Fig. 2 B is light wave selection and the optical path modulation schematic diagram for the optical path modulation device that the embodiment of the present application two provides；
Fig. 2 C is the another the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application two provides；
Fig. 2 D is the another the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application two provides；
Fig. 3 A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application three provides；
Fig. 3 B is light wave selection and the optical path modulation schematic diagram for the optical path modulation device that the embodiment of the present application three provides；
Fig. 4 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application six provides；
Section in the optical path modulation device manufacture method that Fig. 4 A-4D provides for the embodiment of the present application six after each step preparation Structural schematic diagram；
Fig. 5 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application seven provides；
Fig. 6 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application eight provides；
Section in the optical path modulation device manufacture method that Fig. 6 A-6D provides for the embodiment of the present application eight after each step preparation Structural schematic diagram；
Fig. 7 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application nine provides.
Description of symbols:
10- substrate；10a- optical filtering substrate；20- filter layer；30- light barrier layer；
31- light through-hole；40- optical path modulation element；100- optical path modulation device.
Specific embodiment
To keep the purposes, technical schemes and advantages of the embodiment of the present application clearer, below in conjunction with the embodiment of the present application In attached drawing, the technical scheme in the embodiment of the application is clearly and completely described, it is clear that described embodiment is Some embodiments of the present application, instead of all the embodiments.Based on the embodiment in the application, those of ordinary skill in the art Every other embodiment obtained without creative efforts, shall fall in the protection scope of this application.
As described in background, in the prior art, there are techniques to increase, lens module for the lens module in optical device The problem of thickness is thicker and filtering process cannot exclude other interference of stray light well, through inventor the study found that occurring The reason of this problem, is: since the single lens in existing optical device are difficult have preferable wavelength selectivity, so Need to be arranged in lens optical path one or more pieces individual optical filters and lens and form lens module, but due to optical filter with Lens need to be fabricated separately, the technique for increasing lens module in this way, and due to the increase of optical filter so that entire lens module Thickness increase, meanwhile, optical filter and lens assembling during, due to technique limit, often exist between optical filter and lens Certain gap, so that optical path is longer, and lens module cannot exclude other stray lights well in use Interference, the imaging effect for ultimately causing optical device is bad.
Based on the above reasons, the present invention provides a kind of optical path modulation devices, combine multiple embodiments to the application as follows The optical path modulation device of offer is illustrated.
The optical path modulation device that the following each embodiments of the application provide can be applied to camera, 3D imaging sensor, under screen In any optical device such as fingerprint Identification sensor.
Embodiment one
Figure 1A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application one provides, and Figure 1B is that the application is real Light wave selection and the optical path modulation schematic diagram of the optical path modulation device of the offer of example one are applied, Fig. 1 C is that the embodiment of the present application one provides Optical path modulation device schematic top plan view.
Referring to shown in Figure 1A -1C, optical path modulation device 100 includes: filter layer 20, light barrier layer 30 and optical path modulation element 40, wherein single or multiple spaced smooth through-holes 31 are opened up on light barrier layer 30, wherein in the present embodiment, light barrier layer 30 for obstructing the light of specific wavelength, so that the light of specific wavelength can not pass through light barrier layer 30, in order to enable Light opens up light through-hole 31 on light barrier layer 30, has on such light barrier layer 30 in light barrier layer 30, the present embodiment Light penetrating region and light barrier region, wherein carry out optical path modulation, the present embodiment to pass through the light of light through-hole 31 In, optical path modulation element 40 is covered on light through-hole 31 in the projection on light barrier layer 30, passes through the light of light through-hole 31 in this way Line projects outward after optical path modulation element 40 carries out optical path modulation.
Meanwhile in the present embodiment, in order to realize that the light to specific wavelength carries out selective transmission, in optical path modulation device Filter layer 20 is increased in 100, filter layer 20 is used for the certain wave at 40 position of light barrier layer 30 and optical path modulation element Long light selectively penetrates, i.e., in the present embodiment, filter layer 20 is not only by the light of the specific wavelength at optical path modulation element 40 Line carries out selective transmission, while the light of the specific wavelength at light barrier layer 30 is also carried out selective transmission, so that Optical path modulation device 100, which does not need additional mould group technique, to integrate filter layer 20 and optical path modulation element 40, With achieve the purpose that single light path modulation device 100 can the light wave to specific wavelength selectively penetrated.
Simultaneously as the light of the specific wavelength at light barrier layer 30 can also be carried out selective transmission by filter layer 20, Light barrier layer 30 and filter layer 20 in this way collectively constitutes the barrier region that secondary barrier is carried out to light, due to 30 He of light barrier layer The secondary barrier of filter layer 20 is so that light with extremely low transmitance, to have good stray light barriering effect, and shows Have and filter layer 20 is only set at light through-hole 31 in technology, only has light barrier layer 30 once to obstruct light in this way, light The probability penetrated from light barrier layer 30 is larger, and in the present embodiment, filter layer 20 is simultaneously to specific wavelength at light barrier layer 30 Light carry out selective transmission so that light barrier layer 30 and filter layer 20 form the purpose for carrying out secondary barrier to light, from And substantially reduce the probability that light penetrates from light barrier layer 30.So optical path modulation device 100 provided in this embodiment is not only The purpose that single light path modulation device 100 carries out selective transmission and optical path modulation to the light wave of specific wavelength is realized, together When light barrier layer 30 and filter layer 20 secondary barrier so that light have extremely low transmitance, to eliminate other stray lights Interference, light wave selection can not individually be carried out and cannot exclude other interference of stray light well by solving existing lens subassembly The problem of.
Meanwhile in the present embodiment, filter layer 20 and optical path modulation element 40 are integrated in optical path modulation device 100, in this way In production, the problem of optical filter and lens are fabricated separately is avoided, to prevent from additionally increasing mould group technique, moreover, this reality Apply in example, the thickness of filter layer 20 well below optical filter thickness, so the thickness of the optical path modulation device 100 of the present embodiment It substantially reduces, solves in existing lens module and make the thickness of entire lens module is thicker to ask since optical filter is arranged Topic, to sum up, optical path modulation device 100 provided in this embodiment, which solves existing lens, can not individually carry out light wave selection, lens The problem of mould group technique increases, lens module thickness is thicker and can not exclude other interference of stray light very well.
Wherein, in the present embodiment, optical path modulation element 40 is when the projection on light barrier layer 30 covers light through-hole 31, specifically , view field of the optical path modulation element 40 on light barrier layer 30 covers all light through-hole 31, i.e. optical path modulation element 40 projected area on light barrier layer 30 be greater than or equal to light through-hole 31 opening area, in this way from light by across light It can all enter in optical path modulation element 40 and carry out optical path modulation, meanwhile, in the present embodiment, optical path modulation element 40 can be in light It is arranged on through-hole 31, optical path modulation element 40 is filled in light through-hole 31, wherein in the present embodiment, optical path modulation element 40 has Body can pass through barbola work after injection molding, imprint process, standard wafer grade camera lens (Wafer Level Optics, referred to as: WLO) Manufacture craft, grayscale mask process, any 40 processing technology of optical path modulation element met the requirements such as photoresist reflux technique are made. Optical path modulation element 40 material meets specific refractive index, mist degree according to demand parameter selection, and elasticity modulus etc. requires and specific The translucent material that technique requires, specifically it is not limited here.
Wherein, in the present embodiment, when opening up light through-hole 31 on light barrier layer 30, specifically, can be exposed by photoetching process Light through-hole 31 is formed after development, alternatively, can add etching technics that light through-hole 31 is collectively formed by photoetching in the present embodiment, wherein In the present embodiment, light through-hole 31 can be round through-hole, or may be square through-hole, shape the present embodiment of light through-hole 31 In be not construed as limiting, wherein in the present embodiment, the openings of sizes of light through-hole 31 is configured with specific reference to practical application, for example, working as When light through-hole 31 is round tube hole, the aperture of light through-hole 31 can be 5um~1000um, such as the aperture of light through-hole 31 can be 100um or 500um, is selected with specific reference to actual demand.
To sum up, optical path modulation device 100 provided in this embodiment, by including filter layer 20, light barrier layer 30 and optical path Modulation element 40, wherein single or multiple spaced smooth through-holes 31 are opened up on light barrier layer 30, optical path modulation element 40 exists Projection on the light barrier layer 30 is covered on light through-hole 31, and filter layer 20 is used for light barrier layer 30 and optical path modulation The light of specific wavelength at 40 position of element selectively penetrates, and such optical path modulation device 100 does not need additional mould group work Skill can integrate filter layer 20 and optical path modulation element 40, and the optical path modulation device 100 for having reached single can be real The purpose that now light of specific wavelength is selectively penetrated, simultaneously as filter layer 20 can also will be at light barrier layer 30 The light of specific wavelength carry out selective transmission, such light barrier layer 30 and filter layer 20 collectively constitute light is carried out it is secondary The barrier region of barrier, due to light barrier layer 30 and filter layer 20 secondary barrier so that light have extremely low transmitance, from And there is good stray light barriering effect, so optical path modulation device 100 provided in this embodiment not only realizes single light Road modulation device 100 carries out the purpose of selective transmission and optical path modulation, while light barrier layer 30 to the light wave of specific wavelength Secondary barrier with filter layer 20 is so that light with extremely low transmitance, to eliminate the interference of other stray lights, solves Existing lens subassembly can not individually carry out light wave selection and cannot exclude well other interference of stray light and thickness is thicker The problem of.
On the basis of the above embodiments, in the present embodiment, specifically, as shown in Figure 1A, further includes: the substrate of light-permeable 10, i.e., in the present embodiment, light can penetrate substrate 10, specifically, substrate 10 choose it is a kind of to certain specific wavelengths or specific The substrate that there is band of light selectivity to penetrate effect, in the present embodiment, substrate 10 can be with rigid transparent substrate or flexible and transparent base Material, specifically, substrate 10 can be glass or substrate 10 can also be crystal, alternatively, substrate 10 can also be specific wavelength Or with the metal base selectively penetrated, perhaps substrate 10 can also be resin base material or may be specific band light Organic glass, it should be noted that the substrate includes but is not limited to above-mentioned substrate, can also be other to certain specific wavelengths Or the substrate that there is specific band light selectivity to penetrate effect.
Wherein, substrate 10 selects certain material with specific reference to through optical wavelength range, and in the present embodiment, substrate 10 is specifically selected There is the white glass substrate of high transmittance, i.e. substrate 10 used in visible-range and near infrared band (300nm~1100nm) Select the substrate penetrated for the light wave that specific wavelength is 300nm~1100nm, wherein in the present embodiment, the thickness of substrate 10 It is specifically as follows 100um~500um, it should be noted that the thickness of substrate 10 can be with other sizes, in the present embodiment, no It limits, is set with specific reference to actual demand.
Wherein, when including substrate 10 in the present embodiment, in optical path modulation device 100, at this point, filter layer 20 and/or photoresist Interlayer 30 can be set on the substrate 10, for example, filter layer 20 can be located at the back side of substrate 10, light barrier layer 30 is located at substrate 10 Front on, i.e., filter layer 20 and light barrier layer 30 are located at the tow sides of substrate 10 or filter layer 20 is located at substrate On 10 front, light barrier layer 30 is located on filter layer 20 or light barrier layer 30 is located on the front of substrate 10, filter layer 20 It is covered on light barrier layer 30 and optical path modulation element 40, specifically, as shown in Figure 1A, filter layer 20 is set on the substrate 10, light Barrier layer 30 is covered on filter layer 20, and in the present embodiment, and when filter layer 20 is arranged on the substrate 10, filter layer 20 is by substrate 10 entire surface covering, meanwhile, projection of the filter layer 20 on light barrier layer 30 at least covers the light barrier layer 30, that is, filters Layer 20 can cover light barrier layer 30 or projection of the filter layer 20 on light barrier layer 30 in the projection on light barrier layer 30 Light barrier layer 30 and light through-hole 31 can also be covered, in this way when light barrier layer 30 and about 20 filter layer overlap When, light barrier layer 30 and filter layer 20 form the region to the secondary barrier of light wave, because when light barrier layer 30 is located at filter layer 20 When upper, the transmitance of most of stray light is down to extremely low level by filter layer 20, only through demand specific wavelength (such as Near infrared band light wave), after increasing the light barrier layer 30, the light of the specific wavelength that script filter layer 20 is penetrated photoresist every It is not opened up on layer 30 and obstructs together at the region of light through-hole 31, that is, further enhance the barrier effect of other band wavelength range light Fruit, as shown in Figure 1B, the light through filter layer 20 only enter optical path modulation element 40 at the light through-hole 31 of light barrier layer 30 Middle carry out optical path modulation, the light at other regions of light barrier layer 30 can not project outward, so, in the present embodiment, filter layer 20 and light barrier layer 30 have the function that carry out secondary barrier to light together.
In the present embodiment, when being arranged on light through-hole 31, optical path modulation element 40 can be filled in optical path modulation element 40 It in light through-hole 31 and is covered on filter layer 20, the gap between such filter layer 20 and optical path modulation element 40 is reduced, and is shortened Optical path, can be directly entered in optical path modulation element 40, to avoid it at light through-hole 31 through the light of filter layer 20 The interference of his stray light.
Wherein, in the present embodiment, when filter layer 20 is arranged on the substrate 10, specifically, filter layer 20 can be located at substrate In 10 at least one side, for example, filter layer 20 can be configured in the single side of substrate 10 or filter layer 20 is in substrate 10 It is two-sided to be configured, it is filtered twice to the light of specific wavelength in this way, so that filter effect is more preferable, wherein this implementation In example, two filter layers of the filter layer 20 in two-sided (i.e. front and back) setting of substrate 10, on substrate 10 is front-back two-sided 20 thickness can be identical, or can also be different, in practical applications, in order to filter to different-waveband, often substrate The thickness of two filter layers 20 on 10 two faces is different, and may be implemented to realize the wave band of specific wavelength so preferable Filter effect, meanwhile, in the present embodiment, the light wavelength band that the filter layer 20 on 10 two faces of substrate is filtered can be different, For example, the filter layer 20 being arranged on 10 back side of substrate can carry out selective transmission, substrate 10 to the wave band of 300nm~1100nm Setting filter layer 20 on front can carry out selectivity again for the wave band of 760~1100nm and penetrate, wherein the present embodiment In, the selected wave band penetrated of the filter layer 20 of the setting in 10 front and back sides of substrate includes but is not limited to above-mentioned wave band, also It can be other wave bands, be selected with specific reference to practical application.
Wherein, in the present embodiment, when filter layer 20 is arranged on the substrate 10, the view field of filter layer 20 on the substrate 10 Substrate 10 is at least partly covered, i.e., in the present embodiment, filter layer 20 is covered in the whole face of substrate 10, alternatively, filter layer 20 cover 10 part of substrate, and the projected area of filter layer 20 on the substrate 10 is less than or equal to substrate 10 towards filter layer 20 Area on one side, in this way when light barrier layer 30 is located on filter layer 20, the region of non-aperture and filter layer on light barrier layer 30 20 are collectively formed the region that secondary barrier is carried out to light, so as to effectively obstruct to other stray lights, exclude from effective The interference of other stray lights.
Wherein, in the present embodiment, the front and back of substrate 10 is equipped with filter layer 20, i.e., filter layer 20 is in substrate 10 It is configured on upper and lower surfaces, and projection of the filter layer 20 on the upper and lower surfaces of substrate 10 is by up and down the two of substrate 10 A face at least partly covers, wherein in the present embodiment, light barrier layer 30 is covered on the filter layer 20 in 10 at least one side of substrate On, i.e., in the present embodiment, light barrier layer 30 can be covered on the filter layer 20 of 10 front setting of substrate, can also be covered on base On the filter layer 20 of 10 back side of bottom setting, covered on the filter layer 20 that can also be arranged on lower two faces on the substrate 10 Lid, wherein it should be noted that being covered when on the filter layer 20 being arranged on light barrier layer 30 on the substrate 10 lower two faces Gai Shi, optical path modulation element 40 can be located on one of light barrier layer 30 and cover light through-hole 31 at this time, alternatively, optical path tune Element 40 processed can be configured on each light barrier layer 30, and there are two optical path modulation members for tool in such optical path modulation device Part 40.
Wherein, in the present embodiment, filter layer 20 can also be located in the wherein one side of substrate 10, for example, filter layer 20 is set On the front of substrate or on the back side that filter layer 20 is located at substrate, light barrier layer 30 is located at substrate 10 away from the optical filtering On the another side of layer 20, for example, then light barrier layer 30 is located at the back side of substrate 10 when filter layer 20 is located on the front of substrate On, optical path modulation element 40 can be set on light barrier layer 30 and covering light through-hole 31, alternatively, optical path modulation element 40 can be with It is located on filter layer 20 and corresponding with the light through-hole 31 on the light barrier layer 30.
Wherein, in the present embodiment, filter layer 20 is organic or inorganic material, such as can be SiO2, TiO2, MgF2, Al2O3, light-cured resin, photoinitiator, pigment, alkali soluble resin etc., and filter layer 20 can for by coating, be deposited, splash The single-layer or multi-layer film layer that plating, physical/chemical vapor deposition, plasma enhanced deposition or spin coating mode are formed, i.e. this implementation In example, filter layer 20 can be organic single-layer or multi-layer film, or inorganic single-layer or multi-layer film layer.
Wherein, in the present embodiment, filter layer 20 is the optical filtering that the wave band for being 700nm~1100nm for specific wavelength penetrates Layer 20, i.e., in the present embodiment, the light that filter layer 20 can choose 700nm~1100nm wave band is penetrated, in this way, light barrier layer 30 It need to select the film layer extremely low to 300nm~1100nm wave band light penetration, in the present embodiment, light barrier layer 30 can specifically be selected The organic film made of black glue material, alternatively, light barrier layer 30 is specifically chosen some inorganic material and is made in the present embodiment, Such as metallic compound containing Ti can be used, the materials such as Ag, Au be made, wherein in the present embodiment, light barrier layer 30 specifically can be with By coating, the film layers technology of preparing such as vapor deposition, sputter, physical/chemical vapor deposition, plasma enhanced deposition, spin coating is made.
Wherein, in the present embodiment, the convex lens that optical path modulation element 40 specifically can be as shown in Figure 1A in this way has light Convergence left and right or optical path modulation device 100 can also be concavees lens, can have disperse function to light in this way, alternatively, optical path Modulation element 40 can also be prism, and prism is specifically as follows triangular prism, alternatively, optical path modulation element 40 can also be phenanthrene Nie Er lens, alternatively, optical path modulation element 40 can also be the transparent optical path modulation element of irregular shape in the present embodiment.
Wherein, in the present embodiment, when optical path modulation element 40 is lens, at this point, the center line and optical path of light through-hole 31 Projection of the optical center of modulation element 40 on light barrier layer 30 is overlapped, and can guarantee that the effective light penetrated is selected to be ok in this way It is received through the optical path modulation element 40 and by subsequent sensor, meanwhile, non-optical path modulation element 40 is arranged on light barrier layer 30 Region being stacked due to filter layer 20 and light barrier layer 30, there is extremely low transmission to the light wave that filter layer 20 penetrates Rate has good stray light barriering effect.
Embodiment two
Fig. 2A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application two provides, and Fig. 2 B is that the application is real Light wave selection and the optical path modulation schematic diagram of the optical path modulation device of the offer of example two are provided.
The difference of the present embodiment and above-described embodiment are as follows: in the present embodiment, specifically, light barrier layer 30 is arranged in substrate 10 At least one side on, for example, light barrier layer 30 can be located on the front or the back side of substrate or light barrier layer 30 is in substrate 10 Tow sides be configured, referring to fig. 2 shown in A-2B, light barrier layer 30 is located on the front of substrate 10, specifically, photoresist Interlayer 30 at least partly covers the one side of substrate 10, and optical path modulation element 40 is located on light barrier layer 30, specifically, optical path tune Element 40 processed is covered at the position for opening up light through-hole 31 on light barrier layer 30, and filter layer 20 is at least covered on 30 He of light barrier layer On optical path modulation element 40, and view field of the filter layer 20 on light barrier layer 30 at least covers light barrier layer 30, makes in this way Used time, as shown in Figure 2 B, light pass through substrate 10, and part of light enters optical path modulation element 40 from light through-hole 31 and carries out light Then road modulation carries out selective transmission through light of the filter layer 20 to specific wavelength, to reach the mesh to light selection , remaining light obstructs under the dual barrier of light barrier layer 30 and filter layer 20, it can not project outward, in the present embodiment, When filter layer 20 is covered on light barrier layer 30, the light that such light barrier layer 30 does not obstruct carries out two by filter layer 20 Secondary barrier, so filter layer 20 and light barrier layer 30 are stacked the effective barrier realized to stray light, to eliminate The interference of stray light.
Wherein, in the present embodiment, light barrier layer 30 can be specifically located in the wherein one side of substrate 10, as shown in Figure 2 A, Light barrier layer 30 is located on the front of substrate 10, at this point, filter layer is in addition to being covered on light barrier layer 30 and optical path modulation element 40 Upper outer, filter layer 20 is also covered on substrate 10 and is also provided on the another side of light barrier layer 30, such as at the back side of substrate 10 Filter layer 20 (with reference to shown in Fig. 2 D), i.e., filter layer 20 is configured in the two sides up and down of substrate 10, it should be noted that filter Photosphere 20 is depending on concrete application demand, if it is the filter layer 20 of two-sided setting, then the filter layer that the back side of substrate 10 is arranged 20, at least partly covering 10 back side of substrate, correspondingly, light barrier layer 30 can be arranged in the front of substrate 10 in the present embodiment, Can also be arranged at the back side of substrate 10, or be configured in the tow sides of substrate 10, in this way can to enter substrate Light before 10 is obstructed for the first time, then to after substrate 10 light can also obstruct again, in this way and photoresist every Layer 30 and 20 groups of pairs of light of filter layer carry out the film layer of multiple barrier, to effectively avoid the interference of stray light.
Therefore, optical path modulation device 100 provided in this embodiment not only realizes 100 couples of spies of single light path modulation device The long light wave of standing wave carries out the purpose of selective transmission and optical path modulation, while the secondary resistance of light barrier layer 30 and filter layer 20 Every making light have extremely low transmitance, to eliminate the interference of other stray lights, solving existing lens subassembly can not It individually carries out light wave selection and other interference of stray light and the thicker problem of thickness cannot be excluded well.Simultaneously because filtering Layer 20 is covered on 40 surface of optical path modulation element, can not destroyed well by external force Backup lightpath modulation element 40.
Wherein,, can also as shown in Figure 2 C other than the set-up mode of above-mentioned Fig. 2A in the present embodiment, Fig. 2 C is this Shen Please the another the schematic diagram of the section structure of optical path modulation device that provides of embodiment two, substrate 10 is arranged at least in light barrier layer 30 On on one side, for example, light barrier layer 30 can be located on the front or the back side of substrate or light barrier layer 30 is in the positive and negative of substrate 10 Two sides is configured, and filter layer 20 is at least covered on light barrier layer 30, and as shown in Figure 2 C, light barrier layer 30 is located at substrate 10 Front on, filter layer 20 is located on light barrier layer 30, on filter layer 20 be arranged optical path modulation element 40, specifically, filter Layer 20 is covered on light barrier layer 30, and view field of the filter layer 20 on light barrier layer 30 at least covers light barrier layer 30, The setting of optical path modulation element 40 is on filter layer 20 and opposite with light through-hole 31, and such light first passes around substrate 10, then portion Light splitter is passed through from light through-hole 31 enters optical path modulation element 40 after filter layer 20 of going forward side by side filters, light is by optical path modulation member Part 40 projects outward after modulating, remaining light into substrate 10 can not under the dual barrier of light barrier layer 30 and filter layer 20 It projects outward, effective barrier to stray light is realized, to eliminate the interference of stray light.
Fig. 2 D is the another the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application two provides, the present embodiment In, specifically, light barrier layer 30 is located in the wherein one side of substrate 10, for example, light barrier layer 30 is located at the front of substrate 10 (such as Shown in Fig. 2 D) or the back side on, on light barrier layer 30 and substrate 10 away from light barrier layer 30 another side on be equipped with filter layer 20, i.e. filter layer 20 is configured on the another side of light barrier layer 30 and the not set light barrier layer 30 of substrate 10, for example, Light barrier layer 30 is located at the front of substrate 10, and filter layer 20 is located at the back side of substrate 10, while setting again on light barrier layer 30 again Set one layer of filter layer 20, optical path modulation element 40 is arranged on the filter layer 20 on light barrier layer 30 and opposite with light through-hole 31 It answers.
Embodiment three
Fig. 3 A is the schematic diagram of the section structure for the optical path modulation device that the embodiment of the present application three provides, and Fig. 3 B is that the application is real Light wave selection and the optical path modulation schematic diagram of the optical path modulation device of the offer of example three are provided.
The difference of the present embodiment and above-described embodiment are as follows: in the present embodiment, referring to shown in Fig. 3 A-3B, filter layer 20 is can For the optical filtering substrate 10a (referring to shown in following Fig. 6 A) that the light of specific wavelength penetrates, i.e., in the present embodiment, filter layer 20 is not For film layer, and be 10 material of substrate that can be filtered, optical filtering substrate 10a in this way may act as filter layer 20 using and meanwhile may be used also To use as the substrate 10 in above-described embodiment one and embodiment two, this avoid filter coating is additionally arranged on the substrate 10 Layer, wherein in the present embodiment, optical filtering substrate 10a is distinguished as compared with the substrate 10 in above-described embodiment one and embodiment two, In the present embodiment, optical filtering substrate 10a has the characteristic that can be penetrated to the selection of particular range of wavelengths light wave, such light barrier layer 30 can be directly arranged on optical filtering substrate 10a, at this point, light barrier layer 30 and optical filtering substrate 10a be stacked the pairs of light of group into The barrier region of the secondary barrier of row.
Wherein, in the present embodiment, optical filtering substrate 10a can be sapphire substrate, Lan Shuijing, germanium wafer, ruby or doping The glass baseplate of different colours element, it should be noted that optical filtering substrate 10a includes but is not limited to above-mentioned substrate, can also be The substrate of cycloolefin copolymer film and other different light-filtering characteristics, wherein the material selection of optical filtering substrate 10a with specific reference to The wave band of required transmission is selected.
Wherein, in the present embodiment, it should be noted that when filter layer 20 is optical filtering substrate 10a, optical filtering substrate 10a Gathering the effect of optical filtering and substrate 10, and in the setting of existing lens module, for the ease of optical filter setting, will often filter Piece is arranged on the substrate 10, and in lens module existing in this way, the thickness of optical filter and substrate 10 is greater than the optical filtering in the application Substrate 10a, so, compared with prior art, in the present embodiment, since optical filtering substrate 10a is only arranged, so the present embodiment provides Optical path modulation device 100 thickness reduce.
Example IV
The present embodiment provides a kind of optical device, the optical path modulation devices of at least the above any embodiment of the optical setup 100, wherein fingerprint Identification sensor etc. is all under optical device is specifically as follows camera, 3D imaging sensor, shields needs to carry out Specific wavelength is selectively through the optical device with optical path modulation.
Optical device provided in this embodiment is single in such optical device by including above-mentioned optical path modulation device 100 Optical path modulation device 100 carries out selective transmission and optical path modulation, while light barrier layer 30 and filter to the light wave of specific wavelength The secondary barrier of photosphere 20 is so that light has extremely low transmitance, to eliminate the interference of other stray lights, and reduction The thickness of optical path modulation device 100, reduces manufacture craft, light wave choosing can not individually be carried out by solving existing lens subassembly It selects, other interference of stray light cannot be excluded well and the problem of thickness is thicker and the increase of lens module technique.
Embodiment five
The present embodiment provides a kind of electronic device, the optical devices of at least the above example IV of the electronic device, wherein electricity Sub-device is specifically as follows that smart phone, laptop, wearable device, household appliance and access control system etc. are any to be had The electronic device of above-mentioned optical path device.
Electronic device provided in this embodiment, by including above-mentioned optical path device, and optical path device includes optical path modulation device Part 100, single light path modulation device 100 carries out selective transmission and optical path to the light wave of specific wavelength in such optical device Modulation, while the secondary barrier of light barrier layer 30 and filter layer 20 is so that light has extremely low transmitance, to eliminate it The interference of his stray light, and the thickness of optical path modulation device 100 is reduced, reduce manufacture craft, solves existing lens Component can not individually carry out light wave selection, cannot exclude other interference of stray light well and thickness is thicker and lens module work The problem of skill increases.
Embodiment six
Fig. 4 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application six provides, and Fig. 4 A-4D is this The schematic diagram of the section structure in the optical path modulation device manufacture method of the offer of embodiment six after each step preparation is provided.
The present embodiment provides a kind of production methods of optical path modulation device 100, wherein method is as shown in figure 4, include as follows Step:
S601: a substrate is provided；
As shown in Figure 4 A, a substrate 10 is provided, which is specially that the light wave of a kind of pair of particular range of wavelengths has height The material of transmitance, such as substrate 10 can be glass, crystal or flexible and transparent substrate, wherein substrate 10 is with specific reference to transmission Optical wavelength range selects certain material, and in the present embodiment, substrate 10 is specifically selected in visible-range and near infrared band (300nm~1100nm) have high transmittance white glass substrate, i.e., substrate 10 select for specific wavelength be 300nm~ The substrate that the light wave of 1100nm penetrates, wherein in the present embodiment, the thickness of substrate 10 is specifically as follows 100um~500um, needs It is noted that the thickness of substrate 10 can with other sizes, in the present embodiment, without limitation, with specific reference to actual demand into Row setting.
S602: filter layer is formed in at least one side of substrate；
Wherein, in the present embodiment, filter layer 20 can be located in the one side of substrate 10 or filter layer 20 can be located at base On the tow sides at bottom 10, as shown in Figure 4 B, filter layer 20 is formed on the front of substrate 10, wherein filter layer 20 specifically can be with It is formed by coating, vapor deposition, sputter, physical/chemical vapor deposition, plasma enhanced deposition or spin coating mode, filter layer 20 It is specifically as follows single-layer or multi-layer film layer, wherein filter layer 20 can be inorganic film, or organic film, or filter Photosphere 20 can also be organic film and inorganic film stacking composition.
S603: forming light barrier layer on filter layer, and on light barrier layer by graphical treatment formed it is single or multiple Spaced smooth through-hole；
As shown in Figure 4 C, light barrier layer 30 is formed on filter layer 20, light barrier layer 30 is in the entire surface of filter layer 20 It is covered, wherein in the present embodiment, light barrier layer 30 specifically selects the material with extremely low light transmittance penetrated to filter layer 20 Material, the light that can be penetrated in this way to filter layer 20 are effectively obstructed, and exclude the interference of stray light, while as shown in Figure 4 D, Single or multiple spaced smooth through-holes 31 are formed by graphical treatment on light barrier layer 30, wherein in the present embodiment, light Barrier layer 30 is specifically as follows the black glue material of photoresist property, at this point, directly being formed after can be by photoetching process exposure development Light through-hole 31, alternatively, light barrier layer 30 can also be the inorganic material of the techniques such as vapor deposition or sputter preparation in the present embodiment, this When, etching technics can be added to be collectively formed light through-hole 31 by photoetching, in the present embodiment, throwing of the filter layer 20 on light barrier layer 30 Shadow at least covers light barrier layer 30, i.e. projection of the filter layer 20 on light barrier layer 30 can cover light barrier layer 30, or filter Projection covering light barrier layer 30 and light through-hole 31 of the photosphere 20 on light barrier layer 30.
Wherein, in the present embodiment, it should be noted that when the two sides of substrate 10 is respectively provided with filter layer 20, photoresist at this time Interlayer 30 can be located on the filter layer 20 of at least one side setting of substrate 10, for example, light barrier layer 30 can cover wherein On filter layer 20 on one side or light barrier layer 30 can be covered on the filter layer 20 on 10 two faces of substrate respectively Lid.
S604: optical path modulation element is formed on light through-hole.
Wherein, in the present embodiment, optical path modulation element 40 is formed on light through-hole 31, ultimately forms light as shown in Figure 1A Road modulation device 100.In the present embodiment, optical path modulation element 40 can specifically pass through barbola work after injection molding, imprint process, mark Quasi-crystalline substance member grade camera lens (WLO) manufacture craft, grayscale mask process, any optical path modulation member met the requirements such as photoresist reflux technique 40 processing technology of part is made.40 material of optical path modulation element meets specific refractive index, mist degree, springform according to demand parameter selection The translucent material that the requirements such as amount and special process require, specifically it is not limited here.
The production method of optical path modulation device 100 provided in this embodiment, by being formed in at least one side of substrate 10 Filter layer 20, on filter layer 20 formed light barrier layer 30, and on light barrier layer 30 by graphical treatment formed it is single or more A spaced smooth through-hole 31 forms optical path modulation element 40 on light through-hole 31, optical path modulation device 100 obtained in this way Filter layer 20 and optical path modulation element 40 can be integrated by not needing additional mould group technique, to reach single light path tune The purpose that device 100 processed can selectively penetrate the light wave of specific wavelength, meanwhile, light barrier layer 30 and filter layer 20 When being stacked, so that light barrier layer 30 and filter layer 20 collectively constitute the barrier region that secondary barrier is carried out to light, so that Light has extremely low transmitance in the barrier region, to have good stray light barriering effect, to substantially reduce light The probability that line penetrates from light barrier layer 30, so, made from the production method of optical path modulation device 100 provided in this embodiment Optical path modulation device 100 not only realize single light path modulation device 100 to the light wave of specific wavelength carry out selectivity through with And the purpose of optical path modulation, while light barrier layer 30 and filter layer 20 secondary barrier so that light have extremely low transmitance, To eliminate the interference of other stray lights, light wave selection can not individually be carried out and cannot be fine by solving existing lens subassembly Ground excludes the problem of other interference of stray light.
Embodiment seven
Fig. 5 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application seven provides；
The present embodiment provides a kind of production methods of optical path modulation device, wherein as shown in figure 5, method includes following step It is rapid:
S701: a substrate is provided；
Wherein, in the present embodiment, which can specifically refer to above-mentioned steps 601.
S702: forming light barrier layer in at least one side of substrate, and forms list by graphical treatment on light barrier layer A or multiple spaced smooth through-holes；
Wherein, in the present embodiment, light barrier layer 30 is formed on the one or both sides of substrate 10, wherein light barrier layer is set Above-mentioned steps 603 can specifically be referred to by setting method.
S703: optical path modulation element is formed on light through-hole；
Wherein, in the present embodiment, which can specifically refer to above-mentioned steps 604.
S704: filter layer is at least covered on light barrier layer and optical path modulation element, and the filter layer is in the light Projection on barrier layer at least covers the light barrier layer.
In the present embodiment, filter layer 20 can be covered on light barrier layer 30 and optical path modulation element 40, be ultimately formed Optical path modulation device 100 as shown in Figure 2 A.
Or in the present embodiment, when light barrier layer 30 is arranged in the one side of substrate 10, at this point, filter layer 20 can also be Also be configured on the another side of substrate 10, specifically, include the following steps: in the wherein one side of substrate 10 be arranged photoresist every Layer 30, and single or multiple spaced smooth through-holes are formed by graphical treatment on the light barrier layer, in light through-hole 31 Upper formation optical path modulation element 40, covers the first filter layer on light barrier layer 30 and optical path modulation element 40, carries on the back in substrate 10 Second filter layer is set on the another side from light barrier layer 30, i.e., in the present embodiment, filter layer 30 is in light barrier layer 30 and substrate It is configured in the one side of 10 not set light barrier layers 30.
The production method of optical path modulation device 100 provided in this embodiment, by forming light barrier layer 30 on the substrate 10, And single or multiple spaced smooth through-holes 31 are formed by graphical treatment on light barrier layer 30, it is formed on light through-hole 31 Optical path modulation element 40 at least covers filter layer 20 on light barrier layer 30 and optical path modulation element 40, light obtained in this way Road modulation device 100, which does not need additional mould group technique, to integrate filter layer 20 and optical path modulation element 40, with Achieve the purpose that single light path modulation device 100 can the light wave to specific wavelength selectively penetrated, meanwhile, light barrier layer 30 and when being stacked of filter layer 20, so that light barrier layer 30 and filter layer 20 collectively constitute and carry out secondary barrier to light Barrier region, so that light has extremely low transmitance in the barrier region, so that there is good stray light barriering effect, from And the probability that light penetrates from light barrier layer 30 is substantially reduced, so, the system of optical path modulation device 100 provided in this embodiment Make the light wave progress that optical path modulation device 100 made from method not only realizes single light path modulation device 100 to specific wavelength Selectivity penetrates and the purpose of optical path modulation, while the secondary barrier of light barrier layer 30 and filter layer 20 is so that light has pole Low transmitance, to eliminate the interference of other stray lights, light wave selection can not individually be carried out by solving existing lens subassembly And the problem of other interference of stray light cannot be excluded well.
Embodiment eight
Fig. 6 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application eight provides, and Fig. 6 A-6D is this The schematic diagram of the section structure in the optical path modulation device manufacture method of the offer of embodiment eight after each step preparation is provided.
The present embodiment provides a kind of production methods of optical path modulation device 100, wherein method is as shown in fig. 6, include as follows Step:
S801: an optical filtering substrate is provided；
Wherein, in the present embodiment, as shown in Figure 6A, an optical filtering substrate 10a is provided, i.e. optical filtering substrate 10a can be used as The purpose that filter layer 20 selectively penetrates the light wave of specific wavelength, i.e., the optical filtering substrate 10a provided in the present embodiment is i.e. As filter layer 20, the substrate 10 of above-described embodiment can also be used as, by providing optical filtering substrate 10a, this avoid It is once again set up filter membranous layer on the substrate 10, which simplify the manufacture crafts of optical path modulation device 100.
In the present embodiment, optical filtering substrate 10a can be sapphire substrate, Lan Shuijing or germanium wafer, wherein optical filtering substrate 10a Material selection selected with specific reference to the wave band of required transmission.
S802: forming light barrier layer in optical filtering substrate, and on light barrier layer by graphical treatment formed it is single or more A spaced smooth through-hole；
Wherein, in the present embodiment, as shown in Figure 6B, light barrier layer 30 is formed on optical filtering substrate 10a, as shown in Figure 6 C, Single or multiple spaced smooth through-holes 31, light barrier layer 30 and light through-hole are formed by graphical treatment on light barrier layer 30 31 specifically can specifically refer to above-mentioned steps 603.
S803: optical path modulation element is formed on light through-hole.
Wherein, in the present embodiment, as shown in Figure 6 D, optical path modulation element 40 is covered on light through-hole 31, it is final to be made such as Optical path modulation device 100 shown in Fig. 3 A, wherein in the present embodiment, the setting of optical path modulation element 40 can specifically refer to upper Step 604 is stated, is repeated no more in the present embodiment.
The production method of optical path modulation device 100 provided in this embodiment, by optical filtering substrate 10a formed photoresist every Layer 30, and single or multiple spaced smooth through-holes 31 are formed by graphical treatment on light barrier layer 30；In light through-hole 31 Upper formation optical path modulation element 40, optical path modulation device 100 obtained in this way, which does not need additional mould group technique, will filter Film layer and optical path modulation element 40 integrate, can be to the light wave of specific wavelength to reach single light path modulation device 100 The purpose selectively penetrated, meanwhile, light barrier layer 30 and when being stacked of optical filtering substrate 10a, so that light barrier layer 30 The barrier region that secondary barrier is carried out to light is collectively constituted with optical filtering substrate 10a, so that light has pole in the barrier region Low transmitance, to have good stray light barriering effect, to substantially reduce what light penetrated from light barrier layer 30 Probability, so, optical path modulation device 100 made from the production method of optical path modulation device 100 provided in this embodiment is not only real The purpose that single light path modulation device 100 carries out selective transmission and optical path modulation to the light wave of specific wavelength is showed, simultaneously The secondary barrier of light barrier layer 30 and optical filtering substrate 10a are so that light has extremely low transmitance, and passes through directly offer one Optical filtering substrate 10a simplifies the production of optical path modulation device 100 this avoid filter membranous layer is additionally arranged on the substrate 10 Technique, meanwhile, the interference of other stray lights is eliminated, light wave selection and not can not individually be carried out by solving existing lens subassembly The problem of capable of excluding other interference of stray light well.
Embodiment nine
Fig. 7 is the flow diagram for the optical path modulation device manufacture method that the embodiment of the present application nine provides.
The present embodiment provides a kind of production methods of optical path modulation device 100, wherein method is as shown in fig. 7, comprises as follows Step:
S901: a substrate is provided；
Wherein, in the present embodiment, which can specifically refer to above-mentioned steps 601.
S902: forming light barrier layer in at least one side of substrate, and forms list by graphical treatment on light barrier layer A or multiple spaced smooth through-holes；
Wherein, in the present embodiment, the step specifically can refer to above-mentioned steps 702, meanwhile, in the present embodiment, photoresist every When layer 30 is arranged on the substrate 10, light barrier layer 30 can be arranged on a wherein end face for substrate 10 or light barrier layer 30 It can also be configured on two end faces up and down of substrate 10.
S903: filter layer is at least covered on light barrier layer；
Wherein, in the present embodiment, when the tow sides of substrate 10 are respectively provided with light barrier layer 30, at this point, in light barrier layer On 30 be arranged filter layer 20, when in the wherein one side of substrate 10 be arranged light barrier layer 30 when, at this point, on light barrier layer 30 and Filter layer is covered on the another side of the not set light barrier layer 30 of substrate 10, when filter layer 20 is arranged, specifically, filter layer 20 exists Projection on light barrier layer 30 at least covers light barrier layer 30.
S904: optical path modulation element is formed on filter layer, and optical path modulation element is corresponding with light through-hole.
In the present embodiment, optical path modulation element 40 is arranged on filter layer 20, and optical path modulation element 40 and photoresist every Light through-hole 31 on layer 30 is corresponding, ultimately forms optical path modulation device 100 as shown in fig. 2 c.
Wherein, in the present embodiment, when light barrier layer 30 substrate 10 wherein one side be arranged when, at this time the method includes Following steps: light barrier layer 30 is set in the wherein one side of substrate 10, the first filter layer is set on light barrier layer 30, in base The second filter layer is arranged on the another side of light barrier layer 30 in bottom 10, on the first filter layer and position corresponding with light through-hole 31 It sets to form optical path modulation element 40, i.e., in the present embodiment, covers filter layer on light barrier layer 30 and the another side of substrate 10 20, wherein in the present embodiment, the first filter layer and the second filter layer are not used to pair for distinguishing to two filter layers Filter layer is defined.
The production method of optical path modulation device 100 provided in this embodiment, by forming light barrier layer 30 on the substrate 10, And form single or multiple spaced smooth through-holes 31 by graphical treatment on light barrier layer 30, at least the photoresist every Layer 30 on cover filter layer 20, on filter layer 20 formed optical path modulation element 40, and the optical path modulation element 40 with it is described Light through-hole 31 is corresponding, and optical path modulation device 100 obtained in this way does not need additional mould group technique can be by filter layer 20 and light Road modulation element 40 integrates, and can be selected the light wave of specific wavelength with reaching single light path modulation device 100 Property the purpose that penetrates, meanwhile, light barrier layer 30 and when being stacked of filter layer 20, so that light barrier layer 30 and filter layer 20 are total The barrier region of secondary barrier is carried out with the pairs of light of group, so that light has extremely low transmitance in the barrier region, thus With good stray light barriering effect, so that the probability that light penetrates from light barrier layer 30 is substantially reduced, so, this implementation Optical path modulation device 100 made from the production method for the optical path modulation device 100 that example provides not only realizes single light path modulation Device 100 carries out the purpose of selective transmission and optical path modulation, while light barrier layer 30 and optical filtering to the light wave of specific wavelength The secondary barrier of layer 20 is so that there is light extremely low transmitance to solve existing to eliminate the interference of other stray lights The problem of lens subassembly can not individually carry out light wave selection and cannot exclude other interference of stray light well.
In the description of the present invention, it should be noted that unless otherwise clearly defined and limited, term " installation ", " phase Even ", " connection " should broadly understood, for example, it may be being fixedly connected, be also possible to indirectly connected through an intermediary, can be with It is the interaction relationship of the connection or two elements inside two elements.For the ordinary skill in the art, The specific meanings of the above terms in the present invention can be understood according to specific conditions.
In the description of the present invention, it is to be understood that, term " on ", "lower", "front", "rear", "vertical", "horizontal", The orientation or positional relationship of the instructions such as "top", "bottom", "inner", "outside" are to be based on the orientation or positional relationship shown in the drawings, only It is for the convenience of describing the present invention and simplifying the description, rather than to indicate or imply that signified device or element must have spy Fixed orientation is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.In description of the invention In, the meaning of " plurality " is two or more, accurately specifically provide unless otherwise.
The description and claims of this application and term " first ", " second ", " third ", " in above-mentioned attached drawing The (if present)s such as four " are to be used to distinguish similar objects, without being used to describe a particular order or precedence order.It should manage The data that solution uses in this way are interchangeable under appropriate circumstances, so that embodiments herein described herein for example can be to remove Sequence other than those of illustrating or describe herein is implemented.In addition, term " includes " and " having " and theirs is any Deformation, it is intended that cover it is non-exclusive include, for example, containing the process, method of a series of steps or units, system, production Product or equipment those of are not necessarily limited to be clearly listed step or unit, but may include be not clearly listed or for this A little process, methods, the other step or units of product or equipment inherently.
Finally, it should be noted that the above embodiments are only used to illustrate the technical solution of the present invention., rather than its limitations；To the greatest extent Pipe present invention has been described in detail with reference to the aforementioned embodiments, those skilled in the art should understand that: its according to So be possible to modify the technical solutions described in the foregoing embodiments, or to some or all of the technical features into Row equivalent replacement；And these are modified or replaceed, various embodiments of the present invention technology that it does not separate the essence of the corresponding technical solution The range of scheme.

Claims (24)

1. a kind of optical path modulation device characterized by comprising
Filter layer (20), light barrier layer (30) and optical path modulation element (40), wherein opened up on the light barrier layer (30) single Or multiple spaced smooth through-holes (31), projection covering of the optical path modulation element (40) on the light barrier layer (30) The smooth through-hole (31), and the filter layer (20) is used for the light barrier layer (30) and the optical path modulation element (40) The light of specific wavelength at position selectively penetrates.
2. optical path modulation device according to claim 1, which is characterized in that further include: the substrate (10) of light-permeable, it is described Filter layer (20) and/or the light barrier layer (30) are located on the substrate (10), and the filter layer (20) is in the photoresist Projection on interlayer (30) at least covers the light barrier layer (30).
3. optical path modulation device according to claim 2, which is characterized in that the filter layer (20) is arranged in the substrate (10) at least one side, and view field of the filter layer (20) on the substrate (10) at least partly covers the base Bottom (10).
4. optical path modulation device according to claim 3, which is characterized in that the front and back of the substrate (10) is all provided with Have the filter layer (20), the light barrier layer (30) is covered on the filter layer (20) in the substrate (10) at least one side On, the optical path modulation element (40) is arranged on the light barrier layer (30) and the covering smooth through-hole (31).
5. optical path modulation device according to claim 3, which is characterized in that the filter layer (20) is located at the substrate (10) in wherein one side, the light barrier layer (30) is located at the another side that the substrate (10) deviate from the filter layer (20) On, the optical path modulation element (40) is arranged on the light barrier layer (30) and the covering smooth through-hole (31).
6. optical path modulation device according to claim 2, which is characterized in that the light barrier layer (30) is located at the substrate (10) at least one side, the filter layer (20) is at least covered on the light barrier layer (30), the optical path modulation element (40) it is arranged on the filter layer (20) and corresponding with smooth through-hole (31).
7. optical path modulation device according to claim 6, which is characterized in that the light barrier layer (30) is located at the substrate (10) in wherein one side, and on the light barrier layer (30) and the substrate (10) is another away from the light barrier layer (30) It is equipped on one side the filter layer (20), the institute that the optical path modulation element (40) is arranged on the light barrier layer (30) It states on filter layer (20) and corresponding with smooth through-hole (31).
8. optical path modulation device according to claim 2, which is characterized in that the light barrier layer (30) is located at the substrate (10) at least one side, the optical path modulation element (40) is arranged on the light barrier layer (30) and the covering smooth through-hole (31), the filter layer (20) is at least covered on the light barrier layer (30) and the optical path modulation element (40).
9. optical path modulation device according to claim 8, which is characterized in that the light barrier layer (30) is located at the substrate (10) in wherein one side, the filter layer (20) is covered on the light barrier layer (30), the optical path modulation element (40) The upper and described substrate (10) is on the another side of the light barrier layer (30).
10. according to any optical path modulation device of claim 2-9, which is characterized in that the substrate (10) is following It anticipates a kind of substrate:
Glass, crystal, metal, flexible and transparent substrate.
11. -10 any optical path modulation device according to claim 1, which is characterized in that the filter layer (20) is organic Or inorganic material is formed by coating, vapor deposition, sputter, physical/chemical vapor deposition, plasma enhanced deposition or spin coating mode Single-layer or multi-layer film layer.
12. optical path modulation device according to claim 1, which is characterized in that the filter layer (20) is for the spy The optical filtering substrate (10a) that the long light of standing wave penetrates, and light barrier layer is set in at least one side of the optical filtering substrate (10a) (30), the optical path modulation element (40) is located on the light barrier layer (30) and covers the smooth through-hole (31).
13. optical path modulation device according to claim 12, which is characterized in that the optical filtering substrate (10a) is following It anticipates a kind of substrate:
Sapphire substrate, Lan Shuijing, germanium wafer, ruby or the glass baseplate for adulterating different colours element.
14. -13 any optical path modulation device according to claim 1, which is characterized in that the filter layer (20) be for The filter layer that the wave band that the specific wavelength is 300nm~1100nm penetrates.
15. -14 any optical path modulation device according to claim 1, which is characterized in that the light barrier layer (30) is black Film layer made of glue material or inorganic material.
16. -15 any optical path modulation device according to claim 1, which is characterized in that the optical path modulation element (40) For the transparent optical path modulation element of convex lens, concavees lens, Fresnel Lenses, prism or irregular shape.
17. a kind of optical device, which is characterized in that include at least the described in any item optical path modulation devices of the claims 1-16 Part (100).
18. a kind of electronic device, which is characterized in that including at least optical device described in the claims 17.
19. a kind of production method of optical path modulation device, which is characterized in that the described method includes:
One substrate is provided；
Filter layer is formed in at least one side of the substrate；
Light barrier layer is formed on the filter layer, and forms single or multiple by graphical treatment on the light barrier layer Every the light through-hole of setting；
Optical path modulation element is formed on the smooth through-hole.
20. a kind of production method of optical path modulation device, which is characterized in that the described method includes:
One substrate is provided；
Light barrier layer is formed in at least one side of the substrate, and is formed individually on the light barrier layer by graphical treatment Or multiple spaced smooth through-holes；
Optical path modulation element is formed on the smooth through-hole；
At least cover filter layer on the light barrier layer and the optical path modulation element, and the filter layer the photoresist every Projection on layer at least covers the light barrier layer.
21. production method according to claim 20, which is characterized in that described to be formed in at least one side of the substrate Light barrier layer, comprising:
The light barrier layer is set in the wherein one side of the substrate；
It is described at least to cover filter layer on the light barrier layer and the optical path modulation element, comprising:
The first filter layer is covered on the light barrier layer and the optical path modulation element；
The second filter layer is set on another side of the substrate away from the light barrier layer.
22. a kind of production method of optical path modulation device, which is characterized in that the described method includes:
One optical filtering substrate is provided；
Light barrier layer is formed in at least one side of the optical filtering substrate, and is formed on the light barrier layer by graphical treatment Single or multiple spaced smooth through-holes；
Optical path modulation element is formed on the smooth through-hole.
23. a kind of production method of optical path modulation device, which is characterized in that the described method includes:
One substrate is provided；
Light barrier layer is formed in at least one side of the substrate, and is formed individually on the light barrier layer by graphical treatment Or multiple spaced smooth through-holes；
At least filter layer is covered on the light barrier layer；
Optical path modulation element is formed on the filter layer, and the optical path modulation element is corresponding with the smooth through-hole.
24. production method according to claim 23, which is characterized in that described to be formed in at least one side of the substrate Light barrier layer, comprising:
The light barrier layer is set in the wherein one side of the substrate；
It is described at least to cover filter layer on the light barrier layer, comprising:
First filter layer is set on the light barrier layer；
The second filter layer is set on another side of the substrate away from the light barrier layer；
It is described that optical path modulation element is formed on the filter layer, comprising:
On first filter layer and position corresponding with the smooth through-hole forms the optical path modulation element.
CN201980000411.1A 2019-02-28 2019-02-28 Optical path modulation device and preparation method thereof, optical device and electronic device Pending CN110023797A (en)

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Application publication date: 20190716