CN109975947A - Reference planes mirror bogey and laser interference detection device - Google Patents
Reference planes mirror bogey and laser interference detection device Download PDFInfo
- Publication number
- CN109975947A CN109975947A CN201910405180.4A CN201910405180A CN109975947A CN 109975947 A CN109975947 A CN 109975947A CN 201910405180 A CN201910405180 A CN 201910405180A CN 109975947 A CN109975947 A CN 109975947A
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- reference planes
- piezoelectric ceramics
- mirror
- bogey
- planes mirror
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- 238000001514 detection method Methods 0.000 title claims abstract description 18
- 239000000919 ceramic Substances 0.000 claims abstract description 48
- 238000006073 displacement reaction Methods 0.000 claims abstract description 15
- 238000005538 encapsulation Methods 0.000 claims abstract description 15
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 22
- 239000010959 steel Substances 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 14
- 241000208340 Araliaceae Species 0.000 claims 1
- 235000005035 Panax pseudoginseng ssp. pseudoginseng Nutrition 0.000 claims 1
- 235000003140 Panax quinquefolius Nutrition 0.000 claims 1
- 235000008434 ginseng Nutrition 0.000 claims 1
- 239000007787 solid Substances 0.000 claims 1
- 229920003266 Leaf® Polymers 0.000 description 10
- 238000009434 installation Methods 0.000 description 5
- 238000000354 decomposition reaction Methods 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 239000000463 material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000010363 phase shift Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 241000145637 Lepturus Species 0.000 description 1
- 241001494479 Pecora Species 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 description 1
- 229910052573 porcelain Inorganic materials 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 125000006850 spacer group Chemical group 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of reference planes mirror bogey and laser interference detection devices.Reference planes mirror bogey of the invention includes: plane mirror supporting part；And micro-displacement portion, it is moved for driving plane mirror supporting part to carry out small position along optical axis direction, wherein, the carrier that plane mirror supporting part contains carrier mounting base and is mounted in the carrier mounting base, contain the fixing plate and moving plate of corresponding arrangement in micro-displacement portion, at least two flexible connectors, and at least one piezoelectric ceramics encapsulates actuator, carrier mounting base is mounted on the lower end surface of movable plate, piezoelectric ceramics circle of the piezoelectric ceramics encapsulation actuator tool there are two end cap and for relatively moving two end caps, two end caps are mutually touched with the lower end surface of fixed plate and the upper surface of movable plate respectively, the inner end of one end cap is equipped with the boss to match with the shape of piezoelectric ceramics circle, piezoelectric ceramics circle is located between two end caps and is socketed in the outside of boss.
Description
Technical field
The invention belongs to laser interference detection device technical fields, and in particular to a kind of reference planes mirror bogey and
Laser interference detection device comprising the reference planes mirror bogey.
Background technique
Phase-Shifting Interferometry is widely used in various laser interference detection devices because of its high measurement accuracy.Piezoelectric ceramics
Heap has many advantages, such as good precision positioning, has both been able to achieve the precision positioning of big displacement, is also able to achieve nanoscale thin tail sheep
Precision positioning has become the main component of the phase shifter in laser interference detection device.
However, structure is complicated and volume is larger for existing piezoelectric ceramic stack formula phase shifter, cause encapsulation difficult and practical
Property is not strong.
Summary of the invention
The present invention be to solve the above-mentioned problems and carry out, and it is an object of the present invention to provide a kind of reference planes mirror bogey with
And the laser interference detection device comprising the reference planes mirror bogey.
To achieve the goals above, present invention employs following technical solutions:
<structure one>
The present invention provides a kind of reference planes mirror bogey, it is mounted on the laser interference detection with collimation lens and sets
It is standby upper and be arranged with collimation lens with optical axis, for carrying reference planes mirror and driving the reference planes mirror saturating relative to collimation
It is mobile that mirror carries out micro-locality characterized by comprising plane mirror supporting part；And micro-displacement portion, for driving plane mirror to hold
Load portion carries out micro-locality along optical axis direction and moves, wherein plane mirror supporting part contains carrier mounting base and is mounted on this
For placing the carrier of reference planes mirror in carrier mounting base, the fixed plate and movement of corresponding arrangement are contained in micro-displacement portion
Plate, at least two flexible connectors for being connected and fixed arm and movable plate and for driving movable plate relative to fixed plate
It carries out at least one mobile piezoelectric ceramics of micro-locality and encapsulates actuator, carrier mounting base is mounted on the outer end of movable plate
Face, and fixing plate and moving plate is equipped with and matches the opening portion passed through for detecting light beam with the shape of reference planes mirror,
Piezoelectric ceramics circle of the piezoelectric ceramics encapsulation actuator tool there are two end cap and for relatively moving two end caps, two ends
Lid is mutually touched with the inner face of fixing plate and moving plate respectively, and the inner end of an end cap is equipped with the shape phase with piezoelectric ceramics circle
The boss matched, piezoelectric ceramics circle are located between two end caps and are socketed in the outside of boss.
Reference planes mirror bogey provided by the invention, can also have the following features: wherein, piezoelectric ceramics encapsulation
Actuator also has there are two the transmission steel ball being separately mounted on two end caps, and the central location of end cap outer end face is equipped with and transmission
The steel ball mounting groove that the shape of steel ball matches, end cap are mutually touched by being driven steel ball with the inner face of fixed plate or movable plate.
Reference planes mirror bogey provided by the invention, can also have the following features: wherein, the central position of boss
Guide groove is installed, the inner end of another end cap is equipped with the guide rod to match with the shape of guide groove, which is plugged in
In guide groove.
Reference planes mirror bogey provided by the invention, can also have the following features: wherein, and flexible connector is
Cross-sectional shape is the spring leaf of any one in W-shaped, S-shaped and U-shaped, the both ends of the spring leaf respectively with fixed plate and movement
Plate is connected.
Reference planes mirror bogey provided by the invention, can also have the following features: wherein, and flexible connector is
Two, two elastic components are symmetricly set on two sides of fixing plate and moving plate.
Reference planes mirror bogey provided by the invention, can also have the following features: wherein, piezoelectric ceramics encapsulation
Actuator is one, and the central location of fixing plate and moving plate is arranged in a piezoelectric ceramics encapsulation actuator.
<structure two>
The present invention also provides a kind of laser interference detection devices characterized by comprising equipment body has collimation
Lens；And reference planes mirror bogey, it is arranged with collimation lens with optical axis, for carrying reference planes mirror, wherein reference
Plane mirror bogey is the reference planes mirror bogey of<structure one>.
Invention action and effect
Related reference planes mirror bogey and swashing comprising the reference planes mirror bogey according to the present invention
Interference of light detection device because have plane mirror supporting part and micro-displacement portion, the micro-displacement portion contain fixed plate, movable plate,
At least two flexible connectors and at least one piezoelectric ceramics encapsulate actuator, and piezoelectric ceramics encapsulates actuator tool, and there are two ends
Lid and the piezoelectric ceramics circle that two end caps can be made to relatively move, the inner end of an end cap are equipped with the shape with piezoelectric ceramics circle
The boss to match, piezoelectric ceramics circle are located between two end caps and are socketed in the outside of boss, so, as shifting in the present invention
The structure in the micro-displacement portion of phase device is simple and small volume, easy to operate, practical.
Detailed description of the invention
Fig. 1 is the schematic perspective view of laser interference detection device in the embodiment of the present invention；
Fig. 2 is that reference planes mirror bogey looks up schematic perspective view in the embodiment of the present invention；
Fig. 3 is that reference planes mirror bogey looks up decomposition scheme of installation in the embodiment of the present invention；And
Fig. 4 is the decomposition scheme of installation of piezoelectric ceramics encapsulation actuator in the embodiment of the present invention.
Specific embodiment
It is described further below with reference to technical effect of the attached drawing to design of the invention, specific structure and generation, with
It is fully understood from the purpose of the present invention, feature and effect.
Fig. 1 is the schematic perspective view of laser interference detection device in the embodiment of the present invention.
As shown in Figure 1, the laser interference detection device 100 in the present embodiment, for the end face surface figure accuracy to mirror to be measured
It is detected with inner materials uniformity.Laser interference detection device 100 includes base 10, equipment body 20, reference planes mirror
Bogey 30 and mirror bogey 40 to be measured.
As shown in Figure 1, base 10 is pedestal made of metal, for equipment body 20 to be fixedly mounted, with reference to flat
Face mirror bogey 30 and mirror bogey 40 to be measured.The top of base 10 be equipped with frame support 11, bottom set there are four branch
Air cushion 12 is supportted, the neighboring area of 10 bottom of base is arranged in this four support air cushions 12.
As shown in Figure 1, equipment body 20 include be arranged on frame support 11 laser emitter, filter, spectroscope,
Collimation lens, image-forming objective lens, image detector and processing unit (not shown).
Laser emitter is for launching laser beam.
Filter is spatial filter, receives the laser beam of laser transmitter projects and is filtered to the laser beam,
Filter stray light.
Spectroscope be used for by by the laser beam transmission after filter filtering to collimation lens, and by the work of reference planes mirror
The test beams that the work surface for the reference beam and mirror to be measured that face reflects to form is formed are reflected.
Collimation lens reception transmitted through the filtered laser beam come and collimates the laser beam through spectroscope, thus
It forms collimated light beam and is emitted to reference planes mirror and mirror to be measured.
Image-forming objective lens are condenser, the reference beam reflected through spectroscope and test beams are received, to form interference item
Line is emitted.
Image detector receives the interference fringe that image-forming objective lens transmitting comes and forms interference image.
Processing unit and image detector communicate to connect, and receive the interference image that image detector is sent, and to the interference
Image is handled to obtain the end face face shape information of mirror to be measured and inner materials homogeneity information.In the present embodiment, processing unit
For the computer for including data processor.
Fig. 2 is that reference planes mirror bogey looks up schematic perspective view in the embodiment of the present invention；Fig. 3 is this hair
Reference planes mirror bogey looks up decomposition scheme of installation in bright embodiment.
As shown in Figure 1 to Figure 3, reference planes mirror bogey 30 is located at underface and and the collimation lens of collimation lens
It is arranged with optical axis, for carrying reference planes mirror.Reference planes mirror bogey 30 includes plane mirror supporting part 31 and microbit
Shifting portion 32.
As shown in Figures 2 and 3, plane mirror supporting part 31 includes carrier mounting base 311 and carrier 312.
Carrier mounting base 311 has the first mounting plate 311a, the second mounting plate 311b, two tilt adjustment knobs
311c.Second mounting plate 311b is movably arranged on the first mounting plate 311a；Two tilt adjustment knob 311c are symmetricly set on
It is connected on second mounting plate 311b and with the first mounting plate 311a, for adjusting the horizontal tilt angle of the second mounting plate 311b
Degree, and then the horizontal tilt angle for the reference planes mirror being placed on carrier 312 is adjusted.On second mounting plate 311b
If there are two the locking member 311d being arranged symmetrically.
Carrier 312 is circle ring disk, for placing reference planes mirror.One end of carrier 312 is embedded in the second mounting plate
In 311b, the other end, which is equipped with, compresses ring set 312a, which is used to reference planes mirror being pressed on carrier 312
On.In the present embodiment, carrier 312 is set (not to be shown there are two the fixed pin that matches respectively with two locking member 311d in figure
Out), it is locked together by fixed pin with corresponding locking member 311d, to carry out locking positioning to carrier 312.
As shown in Figures 2 and 3, micro-displacement portion 32 is as phase shifter for driving reference planes mirror supporting part 31 along optical axis side
It is mobile to micro-locality is carried out, and then drive reference planes mirror mobile, to realize the reference reflected to form to reference planes mirror
The purpose of the phase shift of light beam.Contain fixed plate 321,322, two flexible connectors 323 of movable plate and one in micro-displacement portion 32
Piezoelectric ceramics encapsulates actuator 324.
Fixed plate 321 is rectangular slab, and a side, which is equipped with, to match with the shape of reference planes mirror for detecting light beam
The fixed plate opening portion 321a that passes through, a side are equipped with wire lead slot 321b.
Movable plate 322 is rectangular slab, is correspondingly arranged at the lower section of fixed plate 321 and can be relative to fixed plate 321
It is mobile to carry out micro-locality.One side of movable plate 322 is equipped with fixed plate opening portion 3121a corresponding and and reference planes
The movable plate opening portion 322a of the shape of mirror to match, passes through for detecting light beam.First installation of carrier mounting base 311
The lower end surface that plate 311a is mounted on movable plate 322 is located on the position at the 322a of movable plate opening portion.
Two flexible connectors 323 are symmetricly set on the two side ends of fixed plate 321 and movable plate 322.In the present embodiment,
Flexible connector 323 be cross-sectional shape be W-shaped spring leaf, the both ends of the spring leaf respectively with fixed plate 321 and movable plate
322 are connected.Certainly, according to actual needs, the cross-sectional shape of spring leaf may be S-shaped or U-shaped.
Fig. 4 is the decomposition scheme of installation of piezoelectric ceramics encapsulation actuator in the embodiment of the present invention.
Piezoelectric ceramics encapsulates actuator 324 and is arranged between fixed plate 321 and movable plate 322, for driving movable plate 322
It is mobile that micro-locality is carried out relative to fixed plate 321.As shown in figure 4, piezoelectric ceramics encapsulation actuator 324 has first end cover
324a, second end cover 324b, piezoelectric ceramics circle 324c and two transmission steel ball 324d.
The central location of the outer end first end cover 324a is equipped with the steel ball mounting groove to match with the shape of transmission steel ball 324c
The central location of 324e, inner end are equipped with guide rod 324f.
The central location of the outer end second end cover 324b is equipped with the steel ball mounting groove to match with the shape of transmission steel ball 324c
(not shown), the boss 324g that inner end matches equipped with the shape of piezoelectric ceramics circle 324b, the central position of boss 324g
Install the guide groove 324h to match with the shape of guide rod 324f.First end cover 324a is plugged in by guide rod 324f and is led
It is mounted on second end cover 324b into slot 324h, and first end cover 324a and second end cover 324b can be relatively moved.
In the present embodiment, ring spacer 324i is provided between guide rod 324f and guide groove 324h.
Piezoelectric ceramics circle 324c is annulus cylindricality, is made of piezoceramic material.Piezoelectric ceramics circle 324c is located at first end
The outside for covering between 324a and second end cover 324b and being socketed in boss 324g, for driving first end cover 324a and second end
Cover 324b relative movement.There are two external wiring terminal (not shown), two external cablings for piezoelectric ceramics circle 324c tool
Terminal is arranged in wire lead slot 321b, is correspondingly connected with for two power supplys output electronics with external power supply；By making pottery to piezoelectricity
Porcelain circle 324c applies scheduled voltage, and piezoelectric ceramics circle 324c generates elongation, so that it is small to drive driving movable plate 322 to occur
Position is mobile.
Two transmission steel ball 324d are separately mounted to the steel ball mounting groove 324d and second end cover 324b of first end cover 324a
Steel ball mounting groove in, first end cover 324a is mutually touched by corresponding transmission steel ball 324c and the inner face of movable plate 322, the
Two end cap 324b are mutually touched by corresponding transmission steel ball 324c and the inner face of fixed plate 321.
As shown in Figure 1, mirror bogey 40 to be measured is located at the lower section of reference planes mirror bogey 30, it is to be measured for carrying
Mirror.
Embodiment action and effect
The reference planes mirror bogey according to involved in the present embodiment and include the reference planes mirror bogey
Laser interference detection device, because having plane mirror supporting part and upgrading driving portion, which contains fixed plate, movement
Plate, at least two flexible connectors and at least one piezoelectric ceramics encapsulate actuator, and piezoelectric ceramics, which encapsulates actuator, has two
The inner end of a end cap and the piezoelectric ceramics circle that two end caps can be made to relatively move, an end cap is equipped with and piezoelectric ceramics circle
The boss that shape matches, piezoelectric ceramics circle are located between two end caps and are socketed in the outside of boss, so, on the one hand, this
Structure in embodiment as the micro-displacement portion of phase shifter is simple and small volume, easy to operate, practical.
In addition, two transmission steel balls are installed respectively because piezoelectric ceramics encapsulation actuator also has there are two steel ball is driven
In the steel ball mounting groove of the central location of two end caps, so, end cap by transmission steel ball can well with fixed plate
Lower end surface and the upper surface of movable plate mutually touch, and further ensure the precision in micro-displacement portion.
In addition, because flexible connector is the spring leaf that cross-sectional shape is any one in W-shaped, S-shaped and U-shaped, spring
Piece has many advantages, such as that stroke is short, load is big and it is small to take up space, so that the small volume in the micro-displacement portion as phase shifter, peace
Complete reliable and long service life is conducive to the miniaturization for keeping reference planes mirror bogey.
Above embodiment is preferred case of the invention, the protection scope being not intended to limit the invention.
For example, in the above-described embodiment, piezoelectric ceramics encapsulate actuator only one, diameter 2 can be met well
The phase shift demand of inch reference planes mirror below.As reference planes mirror bogey of the invention, in reference planes mirror
When diameter is greater than 2 inches, need to encapsulate actuator using three piezoelectric ceramics, and three piezoelectric ceramics encapsulation actuators are uniform
Central part between fixing plate and moving plate is set.
For another example, in the above-described embodiment, flexible connector is two spring leafs, and two spring leafs are symmetricly set on fixation
Two sides of plate and movable plate.But in the present invention, flexible connector may be three or three or more spring leafs,
All spring leafs are uniformly arranged on the neighboring area of fixing plate and moving plate.
Claims (7)
1. a kind of reference planes mirror bogey, be mounted on the laser interference detection device with collimation lens and with it is described
Collimation lens is arranged with optical axis, for carrying reference planes mirror and the reference planes mirror being driven to carry out relative to the collimation lens
Micro-locality is mobile characterized by comprising
Plane mirror supporting part；And
Micro-displacement portion is moved for driving the plane mirror supporting part to carry out micro-locality along optical axis direction,
Wherein, the plane mirror supporting part contains carrier mounting base and is mounted in the carrier mounting base for placing ginseng
The carrier of plane mirror is examined,
Fixing plate and moving plate that corresponding arrangement is contained in the micro-displacement portion, for connecting the fixed arm and the movable plate
At least two flexible connectors and mobile extremely for driving the movable plate relative to the fixed plate to carry out micro-locality
A few piezoelectric ceramics encapsulates actuator,
The carrier mounting base is mounted on the outer end face of the movable plate, and the fixed plate and the movable plate are equipped with
Match the opening portion passed through for detecting light beam with the shape of the reference planes mirror,
Piezoelectric ceramics of the piezoelectric ceramics encapsulation actuator tool there are two end cap and for relatively moving two end caps
Circle,
Described two end caps are mutually touched with the inner face of the fixed plate and the movable plate respectively, the inner end of an end cap
Equipped with the boss that the shape with the piezoelectric ceramics circle matches,
The piezoelectric ceramics circle is between described two end caps and is socketed in the outside of the boss.
2. reference planes mirror bogey according to claim 1, it is characterised in that:
Wherein, the piezoelectric ceramics encapsulation actuator also has there are two the transmission steel ball being separately mounted on described two end caps,
The central location of the end cap outer end face is equipped with the steel ball mounting groove to match with the shape of the transmission steel ball,
The end cap is mutually touched by the transmission steel ball with the inner face of the fixed plate or the movable plate.
3. reference planes mirror bogey according to claim 1, it is characterised in that:
Wherein, the central location of the boss is equipped with guide groove,
The inner end of another end cap is equipped with the guide rod to match with the shape of the guide groove, which is plugged in institute
It states in guide groove.
4. reference planes mirror bogey according to claim 1, it is characterised in that:
Wherein, the flexible connector is the spring leaf that cross-sectional shape is any one in W-shaped, S-shaped and U-shaped, the spring
The both ends of piece are connected with the fixed plate and the movable plate respectively.
5. reference planes mirror bogey according to claim 1, it is characterised in that:
Wherein, the flexible connector is two, and two elastic components are symmetricly set on the fixed plate and the movement
Two sides of plate.
6. reference planes mirror bogey according to claim 1, it is characterised in that:
Wherein, the piezoelectric ceramics encapsulation actuator is one, and a piezoelectric ceramics encapsulation actuator is arranged described solid
The central location of fixed board and the movable plate.
7. a kind of laser interference detection device characterized by comprising
Equipment body has collimation lens；And
Reference planes mirror bogey is arranged with the collimation lens with optical axis, for carrying reference planes mirror,
Wherein, the reference planes mirror bogey is that reference planes mirror described in any one of claim 1-6 carries dress
It sets.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405180.4A CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405180.4A CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN109975947A true CN109975947A (en) | 2019-07-05 |
| CN109975947B CN109975947B (en) | 2024-03-12 |
Family
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910405180.4A Active CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
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| Country | Link |
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| CN (1) | CN109975947B (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111600654A (en) * | 2020-05-29 | 2020-08-28 | 西安理工大学 | Efficient space light-optical fiber coupling device and method based on power feedback |
| CN113124819A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Monocular distance measuring method based on plane mirror |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0426011A1 (en) * | 1989-10-28 | 1991-05-08 | Horiba, Ltd. | Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN106767521A (en) * | 2017-03-17 | 2017-05-31 | 洛阳理工学院 | A kind of vertical scanning measures white light interference gauge head |
| CN107121092A (en) * | 2017-05-24 | 2017-09-01 | 西安交通大学 | A kind of system and method for laser interference detection bearing ball face type error |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| US20180081146A1 (en) * | 2016-09-18 | 2018-03-22 | National University Of Defense Technology | Experimental System for Laser Beam Measurement and Steering Control |
| CN209979914U (en) * | 2019-05-16 | 2020-01-21 | 苏州慧利仪器有限责任公司 | Reference plane mirror bearing device and laser interference detection equipment |
-
2019
- 2019-05-16 CN CN201910405180.4A patent/CN109975947B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0426011A1 (en) * | 1989-10-28 | 1991-05-08 | Horiba, Ltd. | Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| US20180081146A1 (en) * | 2016-09-18 | 2018-03-22 | National University Of Defense Technology | Experimental System for Laser Beam Measurement and Steering Control |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
| CN106767521A (en) * | 2017-03-17 | 2017-05-31 | 洛阳理工学院 | A kind of vertical scanning measures white light interference gauge head |
| CN107121092A (en) * | 2017-05-24 | 2017-09-01 | 西安交通大学 | A kind of system and method for laser interference detection bearing ball face type error |
| CN209979914U (en) * | 2019-05-16 | 2020-01-21 | 苏州慧利仪器有限责任公司 | Reference plane mirror bearing device and laser interference detection equipment |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111600654A (en) * | 2020-05-29 | 2020-08-28 | 西安理工大学 | Efficient space light-optical fiber coupling device and method based on power feedback |
| CN113124819A (en) * | 2021-06-17 | 2021-07-16 | 中国空气动力研究与发展中心低速空气动力研究所 | Monocular distance measuring method based on plane mirror |
| CN113124819B (en) * | 2021-06-17 | 2021-09-10 | 中国空气动力研究与发展中心低速空气动力研究所 | Monocular distance measuring method based on plane mirror |
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| Publication number | Publication date |
|---|---|
| CN109975947B (en) | 2024-03-12 |
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