CN109975947B - Reference plane mirror bearing device and laser interference detection equipment - Google Patents
Reference plane mirror bearing device and laser interference detection equipment Download PDFInfo
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- CN109975947B CN109975947B CN201910405180.4A CN201910405180A CN109975947B CN 109975947 B CN109975947 B CN 109975947B CN 201910405180 A CN201910405180 A CN 201910405180A CN 109975947 B CN109975947 B CN 109975947B
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- plane mirror
- reference plane
- piezoelectric ceramic
- fixed plate
- plate
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- 238000001514 detection method Methods 0.000 title claims abstract description 17
- 239000000919 ceramic Substances 0.000 claims abstract description 34
- 238000006073 displacement reaction Methods 0.000 claims abstract description 17
- 238000004806 packaging method and process Methods 0.000 claims abstract description 13
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 229910000831 Steel Inorganic materials 0.000 claims description 22
- 239000010959 steel Substances 0.000 claims description 22
- 230000005540 biological transmission Effects 0.000 claims description 8
- 230000000694 effects Effects 0.000 description 4
- 238000003384 imaging method Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000012360 testing method Methods 0.000 description 2
- 235000014676 Phragmites communis Nutrition 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 238000005305 interferometry Methods 0.000 description 1
- 238000004556 laser interferometry Methods 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000010363 phase shift Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02015—Interferometers characterised by the beam path configuration
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
Abstract
The invention provides a reference plane mirror bearing device and laser interference detection equipment. The reference plane mirror bearing device of the invention comprises: a plane mirror bearing part; and the micro-displacement part is used for driving the plane mirror bearing part to move in a tiny position along the optical axis direction, wherein the plane mirror bearing part comprises a bearing disc mounting seat and a bearing disc mounted on the bearing disc mounting seat, the micro-displacement part comprises a fixed plate and a moving plate which are correspondingly arranged, at least two elastic connecting pieces and at least one piezoelectric ceramic packaging driving piece, the bearing disc mounting seat is mounted on the lower end face of the moving plate, the piezoelectric ceramic packaging driving piece is provided with two end covers and a piezoelectric ceramic ring used for enabling the two end covers to move relatively, the two end covers are respectively contacted with the lower end face of the fixed plate and the upper end face of the moving plate, a boss matched with the shape of the piezoelectric ceramic ring is arranged at the inner end of one end cover, and the piezoelectric ceramic ring is positioned between the two end covers and sleeved outside the boss.
Description
Technical Field
The invention belongs to the technical field of laser interference detection equipment, and particularly relates to a reference plane mirror bearing device and laser interference detection equipment comprising the same.
Background
Phase-shifting interferometry is widely used in various laser interferometry devices due to its high measurement accuracy. The piezoelectric ceramic stack has the advantages of good precision positioning and the like, can realize the precision positioning of large displacement and nano-scale small displacement, and is now a main component of a phase shifter in laser interference detection equipment.
However, the conventional piezoelectric ceramic stack phase shifter has a complex structure and a large volume, which makes packaging difficult and has poor practicability.
Disclosure of Invention
The present invention has been made to solve the above-mentioned problems, and an object of the present invention is to provide a reference plane mirror carrier device and a laser interference detection apparatus including the reference plane mirror carrier device.
In order to achieve the above purpose, the present invention adopts the following technical scheme:
< Structure one >
The invention provides a bearing device of a reference plane mirror, which is arranged on laser interference detection equipment with a collimating lens and is arranged with the same optical axis as the collimating lens, and is used for bearing the reference plane mirror and driving the reference plane mirror to move in a tiny position relative to the collimating lens, and is characterized by comprising the following components: a plane mirror bearing part; and the micro-displacement part is used for driving the plane mirror bearing part to move in the micro position along the optical axis direction, wherein the plane mirror bearing part comprises a bearing disc mounting seat and a bearing disc arranged on the bearing disc mounting seat and used for placing a reference plane mirror, the micro-displacement part comprises a fixed plate and a movable plate which are correspondingly arranged, at least two elastic connecting pieces used for connecting a fixed arm and the movable plate, and at least one piezoelectric ceramic packaging driving piece used for driving the movable plate to move in the micro position relative to the fixed plate, the bearing disc mounting seat is arranged on the outer end face of the movable plate, the fixed plate and the movable plate are respectively provided with an opening part matched with the shape of the reference plane mirror and used for detecting the passing of a light beam, the piezoelectric ceramic packaging driving piece is provided with two end covers and a piezoelectric ceramic ring used for enabling the two end covers to move relatively, the two end covers are respectively contacted with the inner end faces of the fixed plate and the movable plate, the inner end of one end cover is provided with a boss matched with the shape of the piezoelectric ceramic ring, and the piezoelectric ceramic ring is positioned between the two end covers and is sleeved outside the boss.
The reference plane mirror bearing device provided by the invention can also have the following characteristics: the piezoelectric ceramic packaging driving piece is also provided with two transmission steel balls which are respectively arranged on the two end covers, a steel ball mounting groove matched with the transmission steel balls in shape is arranged in the center of the outer end face of the end cover, and the end cover is contacted with the inner end face of the fixed plate or the movable plate through the transmission steel balls.
The reference plane mirror bearing device provided by the invention can also have the following characteristics: wherein, the central point of boss is equipped with the guide way, and the inner of another end cover is equipped with the guide bar with guide way shape assorted, and this guide bar inserts and establishes in the guide way.
The reference plane mirror bearing device provided by the invention can also have the following characteristics: the elastic connecting piece is a spring piece with any one of W-shaped, S-shaped and U-shaped cross section, and two ends of the spring piece are respectively connected with the fixed plate and the movable plate.
The reference plane mirror bearing device provided by the invention can also have the following characteristics: the two elastic connecting pieces are symmetrically arranged at two side ends of the fixed plate and the movable plate.
The reference plane mirror bearing device provided by the invention can also have the following characteristics: the piezoelectric ceramic package driving part is arranged at the center of the fixed plate and the movable plate.
< Structure two >
The invention also provides a laser interference detection device, which is characterized by comprising: an apparatus main body having a collimator lens; and the reference plane mirror bearing device is arranged on the same optical axis as the collimating lens and is used for bearing the reference plane mirror, wherein the reference plane mirror bearing device is of a structure I.
The actions and effects of the invention
According to the reference plane mirror bearing device and the laser interference detection equipment comprising the same, the reference plane mirror bearing device comprises a plane mirror bearing part and a micro displacement part, wherein the micro displacement part comprises a fixed plate, a moving plate, at least two elastic connecting pieces and at least one piezoelectric ceramic packaging driving piece, the piezoelectric ceramic packaging driving piece is provided with two end covers and a piezoelectric ceramic ring capable of enabling the two end covers to move relatively, a boss matched with the shape of the piezoelectric ceramic ring is arranged at the inner end of one end cover, and the piezoelectric ceramic ring is positioned between the two end covers and sleeved outside the boss.
Drawings
FIG. 1 is a schematic perspective view of a laser interference detection apparatus in an embodiment of the present invention;
FIG. 2 is a schematic bottom perspective view of a reference plane mirror carrier according to an embodiment of the invention;
FIG. 3 is a schematic view of a bottom exploded mounting of a reference plane mirror carrier in accordance with an embodiment of the invention; and
fig. 4 is an exploded mounting schematic of a piezoceramic package drive in an embodiment of the invention.
Detailed Description
The conception, specific structure, and technical effects of the present invention will be further described with reference to the accompanying drawings to fully understand the objects, features, and effects of the present invention.
Fig. 1 is a schematic perspective view of a laser interference detection apparatus in an embodiment of the present invention.
As shown in fig. 1, the laser interference detection apparatus 100 in the present embodiment is used for detecting the end face shape accuracy and the internal material uniformity of a mirror to be detected. The laser interference detection apparatus 100 includes a base 10, an apparatus main body 20, a reference plane mirror carrier 30, and a mirror to be measured carrier 40.
As shown in fig. 1, the stand 10 is a stand body made of a metal material for fixedly mounting the apparatus main body 20, the reference plane mirror carrier 30, and the mirror carrier 40 to be measured. The top of the stand 10 is provided with a stand bracket 11, the bottom is provided with four supporting air cushions 12, and the four supporting air cushions 12 are arranged in the peripheral area of the bottom of the stand 10.
As shown in fig. 1, the apparatus main body 20 includes a laser emitter, a filter, a spectroscope, a collimator lens, an imaging objective lens, an image detector, and a processing section (not shown) provided on the stand bracket 11.
The laser transmitter is used for transmitting laser beams.
The filter is a spatial filter, receives the laser beam emitted by the laser emitter, filters the laser beam, and filters stray light.
The spectroscope is used for transmitting the laser beam filtered by the filter to the collimating lens, and reflecting the reference beam formed by reflecting the working surface of the reference plane mirror and the test beam formed by reflecting the working surface of the mirror to be tested.
The collimating lens receives the filtered laser beam transmitted by the spectroscope and collimates the laser beam, so that a collimated beam is formed and emitted to the reference plane mirror and the mirror to be detected.
The imaging objective lens is a condensing lens and receives the reference beam and the test beam reflected by the spectroscope, so that interference fringes are formed for emission.
The image detector receives the interference fringes emitted from the imaging objective and forms an interference image.
The processing part is in communication connection with the image detector, receives the interference image sent by the image detector, and processes the interference image to obtain the end surface shape information and the internal material uniformity information of the mirror to be detected. In this embodiment, the processing unit is a computer including a data processing program.
FIG. 2 is a schematic bottom perspective view of a reference plane mirror carrier according to an embodiment of the invention; FIG. 3 is a schematic bottom exploded mounting view of a reference plane mirror carrier in an embodiment of the invention.
As shown in fig. 1 to 3, the reference plane mirror carrier 30 is located directly below the collimator lens and is disposed on the same optical axis as the collimator lens for carrying the reference plane mirror. The reference plane mirror supporting device 30 includes a plane mirror supporting portion 31 and a micro displacement portion 32.
As shown in fig. 2 and 3, the flat mirror carrier 31 includes a carrier tray mount 311 and a carrier tray 312.
The carrier plate mount 311 has a first mounting plate 311a, a second mounting plate 311b, and two tilt adjustment knobs 311c. The second mounting plate 311b is movably mounted on the first mounting plate 311 a; two tilt adjustment knobs 311c are symmetrically disposed on the second mounting plate 311b and connected to the first mounting plate 311a for adjusting the horizontal tilt angle of the second mounting plate 311b, and thus the horizontal tilt angle of the reference plane mirror placed on the carrier plate 312. Two symmetrically arranged locking pieces 311d are arranged on the second mounting plate 311 b.
The carrier plate 312 is a circular ring plate for placing the reference plane mirror. One end of the carrying disc 312 is embedded in the second mounting plate 311b, and the other end is provided with a compression ring sleeve 312a, and the compression ring sleeve 312a is used for compressing the reference plane mirror on the carrying disc 312. In this embodiment, the carrying tray 312 is provided with two fixing pins (not shown) respectively matched with the two locking pieces 311d, and the corresponding locking pieces 311d are locked by the fixing pins, so as to lock and position the carrying tray 312.
As shown in fig. 2 and 3, the micro-displacement portion 32 is used as a phase shifter to drive the reference plane mirror carrier portion 31 to perform micro-position movement along the optical axis direction, and further drive the reference plane mirror to move, so as to achieve the purpose of phase shifting the reference beam formed by reflection of the reference plane mirror. The micro-displacement portion 32 includes a fixed plate 321, a movable plate 322, two elastic connection members 323, and a piezoelectric ceramic package driver 324.
The fixed plate 321 is a rectangular plate, one side end of the fixed plate is provided with a fixed plate opening 321a which is matched with the shape of the reference plane mirror and used for detecting the light beam to pass through, and one side part of the fixed plate is provided with a lead groove 321b.
The moving plate 322 is a rectangular plate, is disposed correspondingly below the fixed plate 321, and is capable of performing minute position movement with respect to the fixed plate 321. One side end of the moving plate 322 is provided with a moving plate opening portion 322a corresponding to the fixed plate opening portion 3121a and matching the shape of the reference plane mirror for detecting the passage of the light beam. The first mounting plate 311a of the carrier plate mounting seat 311 is mounted at a position where the lower end surface of the moving plate 322 is located at the moving plate opening 322 a.
The two elastic connection members 323 are symmetrically disposed at both side ends of the fixed plate 321 and the moving plate 322. In this embodiment, the elastic connection member 323 is a spring piece having a W-shaped cross section, and both ends of the spring piece are connected to the fixed plate 321 and the movable plate 322, respectively. Of course, the cross section of the spring piece can be S-shaped or U-shaped according to actual needs.
Fig. 4 is an exploded mounting schematic of a piezoceramic package drive in an embodiment of the invention.
The piezoceramic package driver 324 is disposed between the fixed plate 321 and the movable plate 322, and is used for driving the movable plate 322 to perform minute position movement relative to the fixed plate 321. As shown in fig. 4, the piezoceramic package drive 324 has a first end cap 324a, a second end cap 324b, a piezoceramic ring 324c, and two drive steel balls 324d.
The first end cap 324a has a steel ball mounting groove 324e at the center of the outer end and a guide rod 324f at the center of the inner end, the steel ball mounting groove being matched with the shape of the driving steel ball 324 c.
The second end cap 324b has a steel ball mounting groove (not shown) at the center of the outer end thereof, a boss 324g at the inner end thereof, the boss 324g having a shape matching with the shape of the driving steel ball 324c, and a guide groove 324h at the center of the boss 324g, the guide groove being matched with the shape of the guide rod 324f. The first end cap 324a is mounted on the second end cap 324b by inserting the guide bar 324f into the guide groove 324h, and the first end cap 324a and the second end cap 324b are relatively movable. In the present embodiment, an annular washer 324i is provided between the guide rod 324f and the guide groove 324h.
The piezoceramic ring 324c is a circular cylindrical shape and is made of piezoceramic material. A piezoceramic ring 324c is positioned between the first end cap 324a and the second end cap 324b and is sleeved on the exterior of the boss 324g for driving the first end cap 324a and the second end cap 324b to move relative to each other. The piezoceramic ring 324c has two external connection terminals (not shown in the drawing) provided in the lead grooves 321b for corresponding connection with two power output electrons of an external power source; by applying a predetermined voltage to the piezoceramic ring 324c, the piezoceramic ring 324c generates an elongation amount, thereby driving the driving moving plate 322 to perform a minute positional movement.
The two driving steel balls 324d are respectively installed in the steel ball installation groove 324d of the first end cover 324a and the steel ball installation groove of the second end cover 324b, the first end cover 324a is contacted with the inner end surface of the moving plate 322 through the corresponding driving steel ball 324c, and the second end cover 324b is contacted with the inner end surface of the fixed plate 321 through the corresponding driving steel ball 324 c.
As shown in fig. 1, the mirror to be measured carrying device 40 is located below the reference plane mirror carrying device 30 and is used for carrying the mirror to be measured.
Example operation and Effect
According to the reference plane mirror bearing device and the laser interference detection equipment comprising the same, the plane mirror bearing part and the upgrade driving part are provided, the micro-displacement part comprises the fixed plate, the movable plate, at least two elastic connecting pieces and at least one piezoelectric ceramic packaging driving piece, the piezoelectric ceramic packaging driving piece is provided with two end covers and a piezoelectric ceramic ring capable of enabling the two end covers to move relatively, a boss matched with the shape of the piezoelectric ceramic ring is arranged at the inner end of one end cover, and the piezoelectric ceramic ring is positioned between the two end covers and sleeved outside the boss, so that on one hand, the micro-displacement part serving as the phase shifter in the embodiment is simple in structure, small in size, convenient to operate and high in practicability.
In addition, because the piezoelectric ceramic packaging driving piece is also provided with two transmission steel balls which are respectively arranged in the steel ball mounting grooves at the central positions of the two end covers, the end covers can be well contacted with the lower end face of the fixed plate and the upper end face of the movable plate through the transmission steel balls, and the precision of the micro-displacement part is further ensured.
In addition, because the elastic connecting piece is the spring piece that the cross section shape is any one of W shape, S shape and U-shaped, the reed has advantages such as short stroke, load is big and occupation space is little for little displacement portion' S as the phase shifter volume is less, safe and reliable and long service life, is favorable to keeping the miniaturization of reference plane mirror loading attachment.
The above embodiments are preferred examples of the present invention, and are not intended to limit the scope of the present invention.
For example, in the above embodiment, only one piezoelectric ceramic package driver can well meet the phase shift requirement of the reference plane mirror with the diameter of less than 2 inches. As the reference plane mirror carrying device of the present invention, when the diameter of the reference plane mirror is greater than 2 inches, three piezoceramic package drivers are required to be used, and the three piezoceramic package drivers are uniformly disposed at the central portion between the fixed plate and the moving plate.
For example, in the above embodiment, the elastic connection member is two spring pieces, and the two spring pieces are symmetrically disposed at two side ends of the fixed plate and the movable plate. However, in the present invention, the elastic connection member may be three or more spring pieces, and all the spring pieces are uniformly disposed in the peripheral areas of the fixed plate and the movable plate.
Claims (7)
1. A reference plane mirror carrying device mounted on a laser interference detection apparatus having a collimator lens and disposed on the same optical axis as the collimator lens, for carrying a reference plane mirror and driving the reference plane mirror to perform a minute position movement with respect to the collimator lens, characterized by comprising:
a plane mirror bearing part; and
a micro-displacement part for driving the plane mirror bearing part to move along the optical axis direction,
wherein the plane mirror bearing part comprises a bearing plate mounting seat and a bearing plate which is arranged on the bearing plate mounting seat and used for placing a reference plane mirror,
the micro-displacement part comprises a fixed plate and a movable plate which are correspondingly arranged, at least two elastic connecting pieces for connecting the fixed plate and the movable plate, and at least one piezoelectric ceramic packaging driving piece for driving the movable plate to move in a tiny position relative to the fixed plate,
the bearing plate mounting seat is arranged on the outer end surface of the moving plate, the fixed plate and the moving plate are respectively provided with an opening part matched with the shape of the reference plane mirror and used for detecting the light beam to pass through,
the piezoelectric ceramic package driving member is provided with two end covers and a piezoelectric ceramic ring for enabling the two end covers to move relatively,
the two end covers are respectively contacted with the inner end surfaces of the fixed plate and the movable plate, the inner end of one end cover is provided with a boss matched with the shape of the piezoelectric ceramic ring,
the piezoelectric ceramic ring is positioned between the two end covers and sleeved outside the boss.
2. The reference plane mirror carrier of claim 1, wherein:
wherein the piezoelectric ceramic packaging driving piece is also provided with two transmission steel balls which are respectively arranged on the two end covers,
a steel ball mounting groove matched with the shape of the transmission steel ball is arranged at the central position of the outer end surface of the end cover,
the end cover is contacted with the inner end surface of the fixed plate or the movable plate through the transmission steel ball.
3. The reference plane mirror carrier of claim 1, wherein:
wherein, a guide groove is arranged at the center of the boss,
the inner end of the other end cover is provided with a guide rod matched with the guide groove in shape, and the guide rod is inserted into the guide groove.
4. The reference plane mirror carrier of claim 1, wherein:
the elastic connecting piece is a spring piece with any one of W-shaped, S-shaped and U-shaped cross section, and two ends of the spring piece are respectively connected with the fixed plate and the movable plate.
5. The reference plane mirror carrier of claim 1, wherein:
the two elastic connecting pieces are symmetrically arranged at two side ends of the fixed plate and the movable plate.
6. The reference plane mirror carrier of claim 1, wherein:
the piezoelectric ceramic package driving parts are arranged at the central positions of the fixed plate and the movable plate.
7. A laser interference detection apparatus, comprising:
an apparatus main body having a collimator lens; and
the reference plane mirror bearing device is arranged on the same optical axis as the collimating lens and is used for bearing the reference plane mirror,
wherein the reference plane mirror carrying device is the reference plane mirror carrying device according to any one of claims 1 to 6.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405180.4A CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910405180.4A CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
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| Publication Number | Publication Date |
|---|---|
| CN109975947A CN109975947A (en) | 2019-07-05 |
| CN109975947B true CN109975947B (en) | 2024-03-12 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201910405180.4A Active CN109975947B (en) | 2019-05-16 | 2019-05-16 | Reference plane mirror bearing device and laser interference detection equipment |
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| CN (1) | CN109975947B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113124819B (en) * | 2021-06-17 | 2021-09-10 | 中国空气动力研究与发展中心低速空气动力研究所 | Monocular distance measuring method based on plane mirror |
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| EP0426011A1 (en) * | 1989-10-28 | 1991-05-08 | Horiba, Ltd. | Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN106767521A (en) * | 2017-03-17 | 2017-05-31 | 洛阳理工学院 | A kind of vertical scanning measures white light interference gauge head |
| CN107121092A (en) * | 2017-05-24 | 2017-09-01 | 西安交通大学 | A kind of system and method for laser interference detection bearing ball face type error |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN209979914U (en) * | 2019-05-16 | 2020-01-21 | 苏州慧利仪器有限责任公司 | Reference plane mirror bearing device and laser interference detection equipment |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106352815B (en) * | 2016-09-18 | 2018-10-19 | 国防科学技术大学 | Laser beam measures and is directed toward control experimental system |
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2019
- 2019-05-16 CN CN201910405180.4A patent/CN109975947B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0426011A1 (en) * | 1989-10-28 | 1991-05-08 | Horiba, Ltd. | Two-beam interferometer for use in fourier transform spectrometer and driving device for movable flat mirror of same |
| CN103481321A (en) * | 2013-08-29 | 2014-01-01 | 中国科学院长春光学精密机械与物理研究所 | Nanometer positioning device and system |
| CN107367224A (en) * | 2016-05-12 | 2017-11-21 | 哈尔滨工业大学 | The inductance sensor calibration method and device of three optical axis laser interferometer measurements |
| CN206550653U (en) * | 2017-03-02 | 2017-10-13 | 洛阳理工学院 | A kind of two-dimentional precision movement platform |
| CN106767521A (en) * | 2017-03-17 | 2017-05-31 | 洛阳理工学院 | A kind of vertical scanning measures white light interference gauge head |
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| CN109975947A (en) | 2019-07-05 |
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