CN109967146A - A kind of micro-fluidic laminar flow chip and preparation method thereof - Google Patents

A kind of micro-fluidic laminar flow chip and preparation method thereof Download PDF

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Publication number
CN109967146A
CN109967146A CN201910304177.3A CN201910304177A CN109967146A CN 109967146 A CN109967146 A CN 109967146A CN 201910304177 A CN201910304177 A CN 201910304177A CN 109967146 A CN109967146 A CN 109967146A
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chip
micro
laminar flow
layer
microchannel
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熊鹏辉
张凌
石四维
许杰
陈禄敏
王丽萍
程亮
吴昊曦
秦震
魏兴俭
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Institute of Materials of CAEP
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L3/00Containers or dishes for laboratory use, e.g. laboratory glassware; Droppers
    • B01L3/50Containers for the purpose of retaining a material to be analysed, e.g. test tubes
    • B01L3/502Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures
    • B01L3/5027Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip
    • B01L3/502707Containers for the purpose of retaining a material to be analysed, e.g. test tubes with fluid transport, e.g. in multi-compartment structures by integrated microfluidic structures, i.e. dimensions of channels and chambers are such that surface tension forces are important, e.g. lab-on-a-chip characterised by the manufacture of the container or its components
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01LCHEMICAL OR PHYSICAL LABORATORY APPARATUS FOR GENERAL USE
    • B01L2300/00Additional constructional details
    • B01L2300/16Surface properties and coatings
    • B01L2300/161Control and use of surface tension forces, e.g. hydrophobic, hydrophilic
    • B01L2300/165Specific details about hydrophobic, oleophobic surfaces
    • B01L2300/166Suprahydrophobic; Ultraphobic; Lotus-effect

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  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Dispersion Chemistry (AREA)
  • Analytical Chemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Hematology (AREA)
  • Clinical Laboratory Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)

Abstract

The invention discloses a kind of micro-fluidic laminar flow chips and preparation method thereof, solve the problems, such as that organic phase and water phase are easy mixing in existing micro-fluidic laminar flow chip use process, including micro-fluidic laminar flow chip and fixture, micro-fluidic laminar flow chip includes one layer of hydrophily chip and one layer of hydrophobicity chip, layers of chips is provided with microchannel, organic phase solvent flows in the microchannel of hydrophobicity chip, it is flowed in the channel of aqueous phase solvent hydrophily chip, preparation method includes the following steps: respectively to etch a microchannel in one layer of hydrophily and one layer of hydrophobicity chip surface, then there is the one side of microchannel to be directed at bonding layers of chips, obtain micro-fluidic laminar flow chip, then two pieces of panels are chosen as fixture, two groups of entrance and exits are arranged in top panel, micro-fluidic laminar flow chip is placed between two pieces of panels and is assembled.Micro-fluidic laminar flow chip using the above structure can be realized being kept completely separate for organic phase and water phase, while simplify manufacture craft.

Description

A kind of micro-fluidic laminar flow chip and preparation method thereof
Technical field
The invention belongs to micro fluidic chip technical fields, and in particular to a kind of micro-fluidic laminar flow chip preparation method.
Background technique
Micro-fluidic chip (microfluidic chip) is the main flat research platform for realizing various microflow control techniques, packet Sampling is included, reacts, separate, analyze the functions such as detection, may be reused.Micro-fluidic chip has the control of accurate fluid, examination The advantages that sample consumes less, reaction speed is fast, is widely used in the ambits such as biology, chemistry, material.Micro-fluidic liquid-liquid extraction skill Art is exactly to realize solvent extraction using the diffusion effect of mutual exclusive two-phase liquid, in micro-fluidic liquid-liquid extraction, is increased Chip length is conducive to improve extraction efficiency, but is easy to cause the laminar condition unstability of two-phase fluid in chip, hinders two-phase The separation of solution.Therefore, organic phase and efficiently separating for water phase are to influence miniflow draining liquid extraction in micro-fluidic liquid-liquid extraction chip Take the problem of technical application.
Chemical surface modification technology is guaranteed micro- by the organic solvents selective modification such as octadecyl trichlorosilane alkane channel The stable laminar condition of organic phase and aqueous layer in chip channel.But this method increase the technique steps of microchip preparation Suddenly, technology difficulty is improved, and the microchannel stability of Chemical modification is bad, modification effect is very weak or even fails.In addition, It also can be realized being automatically separated for organic phase and water phase by the method for connecting an oil liquid phase-splitter in the exit of microchip. Although preferably, oil liquid phase-splitter is expensive, and increases the volume of micro-fluidic chip, unfavorable for the stability of this method Miniaturization and integra-tion application in micro-fluidic chip.So in order to guarantee organic phase and water phase in micro-fluidic liquid-liquid extraction Stably stratified flow, realization organic phase and water phase are kept completely separate, and need to design a kind of micro-fluidic laminar flow chip and its preparation side newly Method has solved the problems, such as of the existing technology.
Summary of the invention
The invention discloses a kind of micro-fluidic laminar flow chips and preparation method thereof, solve existing micro-fluidic chip and use Organic phase and water phase are easy that mixing, split-phase is inefficient, influence subsequent analysis test result, limitation micro-fluidic chip is answered in journey The problems such as using.The present invention utilize material itself hydrophobe characteristic, improve microchannel in organic phase and channel surface, water phase with The contact angle on channel surface advantageously forms stable laminar flow, and can draw automatically in the exit of chip, realizes organic Phase is automatically subjected to phase splitting with water phase.
The present invention to achieve the above object, is achieved through the following technical solutions:
A kind of micro-fluidic laminar flow chip, it is characterised in that including upper and lower two pieces of panels, be arranged in it is micro-fluidic between two pieces of panels Laminar flow chip, the micro-fluidic laminar flow chip include one layer of hydrophily chip and one layer of hydrophobicity chip, the hydrophily chip It is provided with interconnected channel on the face of hydrophobicity chip by chip, two groups of entrances are provided on one of panel and is gone out Mouthful, the channel both ends on every layer of chip each communicate with one group of entrance and exit.
In the above-mentioned technical solutions, two groups of entrance and exits are threaded connection hole, and the threaded connection hole is upper Panel setting.
In the above-mentioned technical solutions, the top panel hollow out is provided with the observation window for observing every layer of chip microchannel.
In the above-mentioned technical solutions, there are four through-hole, every layer of cores for setting on the hydrophily chip or hydrophobicity chip Piece microchannel both ends each communicate with two through-holes.
A kind of micro-fluidic laminar flow chip preparation method, it is characterised in that include the following steps:
Step 1: it is identical and for rectangular knot that hydrophilic substrate material and hydrophobicity substrate material are respectively cut into several block sizes The substrate of structure carries out acetone, ethyl alcohol, deionized water to each substrate and is cleaned by ultrasonic 3min, then spare using being dried with nitrogen.It dredges Polytetrafluoroethylene (PTFE) or polymethyl methacrylate can be used in aqueous substrate material, and quartzy glass can be used in hydrophily substrate material Glass.
One piece of hydrophily substrate is chosen as hydrophily chip, chooses one piece of hydrophobicity substrate as hydrophobicity chip.? The surface of layers of chips respectively etches a microchannel, and etches four through-holes on one layer of chip wherein, the position of through-hole and every The endpoint of layer chip microchannel is corresponding.
Step 2: there is the one side of microchannel to be directed at bonding the layers of chips in step 1, micro-fluidic laminar flow core is obtained Piece.Layers of chips is bonded by bonding agent, and bonding agent spin coating one layer of chip surface wherein can be coated in the core positioned at lower layer Piece surface.Dimethyl silicone polymer can be used in bonding agent.
Step 3: choosing two pieces of panels up and down, two groups of entrance and exits are opened up on top panel.Two pieces of panels can be used PMMA or stainless steel material, two groups of entrance and exits are threaded connection hole, and threaded connection hole is at every layer of microchannel end On the corresponding position of point.
Step 4: micro-fluidic laminar flow chip obtained in step 2 is placed between two pieces of panels, according to top panel, micro- The sequence of flow control laminar flow chip and lower panel from top to bottom, is assembled into one.When assembling, the threaded connection hole of top panel with every layer The endpoint of microchannel is aligned
In the above-mentioned technical solutions, in step 2, this layer of chip for being etched with through-hole is placed on upper layer, as upper layer chip, Another layer is used as lower layer chip.
In the above-mentioned technical solutions, layers of chips is before bonding, in one layer of bonding agent of surface spin coating of wherein one layer of chip.
In the above-mentioned technical solutions, the layers of chips in step 1 is required to pre-process, pretreated detailed process are as follows: will Hydrophily substrate and hydrophobicity substrate are cut into square structure, and each personal acetone, ethyl alcohol and deionized water are cleaned by ultrasonic 3min, Again with being dried with nitrogen, hydrophily chip and hydrophobicity chip are obtained.
In the above-mentioned technical solutions, threaded securing bores are opened up in the corresponding position of two pieces of panels in step 3.
In the above-mentioned technical solutions, top panel is also provided with the observation window of hollow out in step 3.
In conclusion by adopting the above-described technical solution, the present invention mainly have it is following a little and the utility model has the advantages that
The hydrophilic and hydrophobic feature of substrate material itself is utilized in micro-fluidic laminar flow chip design of the invention, in hydrophily and hydrophobic Property substrate material on etch microchannel, microchannel surface hydrophilic and hydrophobic is in stable condition reliable.Organic phase solvent is in hydrophobicity substrate Microchannel in flow, aqueous phase solvent flows in the microchannel of hydrophily substrate, without being improved by chemical surface modification The contact angles of microchannel surface reduce the use of organic reagent, clear by simple solvent even across many experiments The hydrophilic and hydrophobic that can also restore in microchannel is washed, can be repeated as many times and use.Not only simplify the system of micro-fluidic laminar flow chip Standby technique, while also assuring that experimenter's is healthy and safe.
In micro-fluidic laminar flow chip disclosed by the invention, organic phase and water phase are able to maintain stable laminar flow in microchannel State, and being automatically separated for water phase and organic phase may be implemented in exit, be conducive to subsequent analysis test, without going out Mouth end increases additional oil liquid separator.Experimental data shows that the separative efficiency of organic phase and water phase is greater than 99%.
Micro-fluidic laminar flow chip disclosed by the invention is ingenious in design compared with existing chip, structure more it is small and exquisite just Victory, miniaturization and integra-tion application conducive to micro-fluidic laminar flow chip.
Detailed description of the invention
Fig. 1 is the assembly structure diagram of micro-fluidic laminar flow chip of the invention.
Fig. 2 is micro-fluidic laminar flow chip using process diagram of the invention.
Wherein: 1, top panel, 2, the upper layer chip of micro-fluidic laminar flow chip, 3, the lower layer chip of micro-fluidic laminar flow, 4, under Panel, 5, through-hole, 6, threaded connection hole, 7, threaded securing bores, 8, observation window, 9, microchannel, 10, PEEK connector, 11, PTFE Pipe.
Specific embodiment
A kind of micro-fluidic laminar flow chip as shown in Figure 1, including micro-fluidic laminar flow chip, to micro-fluidic laminar flow chip carry out Two panels being fixedly clamped.
Micro-fluidic laminar flow chip includes one layer of hydrophily chip and one layer of hydrophobicity chip, and layers of chips carries out up and down It is stacked.Hydrophily chip can select quartz glass to be prepared, and hydrophobic chip can use polytetrafluoroethylene (PTFE) or poly- methyl Methyl acrylate is prepared.When hydrophily chip is as upper layer chip, hydrophobicity chip is as lower layer chip;Work as hydrophobicity When chip is as upper layer chip, hydrophily chip is as lower layer chip.
The adjacent surface of layers of chips is respectively etched with an interconnected microchannel, and one end of microchannel is entrance, another End is outlet.Photoetching-wet etching technique or laser etching techniques preparation can be used in microchannel, close and distant due to layers of chips Aqueous difference, organic phase solvent flow in the microchannel of hydrophobicity chip, and aqueous phase solvent is flowed in the microchannel of hydrophily chip It is dynamic.Layers of chips can be bonded using bonding agent, and dimethyl silicone polymer can be selected in bonding agent, be spin-coated on lower layer chip quarter Erosion has the one side of microchannel.
It is faced as shown in Fig. 2, thering is the one side of microchannel and lower layer chip to be etched with the one of microchannel upper layer chips in etching Quasi- bonding.Microchannel can use U-shaped structure, and opening direction of the U-shaped structure in layers of chips is on the contrary, it closes end Split-phase is intercommunicated.Since upper layer chip has carried out stacked covering to lower layer chip, in order to which solvent is introduced micro-fluidic laminar flow In chip microchannel, perforative four through-holes are etched on the chip of upper layer.Two of them through-hole is directly micro- with upper layer chip The connection of channel both ends, outlet and entrance as upper layer chip solvent.The both ends of other two through-hole and lower layer chip microchannel Alignment connection, outlet and entrance as lower layer chip solvent.Laminar flow chip micro-fluidic in this way exports and two there are two just having Entrance, an entrance enter as organic phase outlet, another entrance as aqueous phase solvent as organic phase entrance, one outlet Mouthful, another exports the outlet as aqueous phase solvent.
Chip after bonding also needs fixture to be clamped fixation, and fixture includes the two pieces of panels placed up and down.Top panel The threaded securing bores of at least four with bolt cooperation are respectively offered with lower panel corresponding position, micro-fluidic laminar flow chip is placed on Between panel and lower panel, and fixation is clamped by bolt.Top panel, which is opened, is additionally provided with two groups of entrance and exits, every layer of core The channel both ends of on piece each communicate with one group of entrance and exit.Specifically, wherein one group of entrance and exit and micro-fluidic laminar flow core The connection of piece organic phase entrance and exit, i.e., hydrophobicity chip microchannel both ends are connected to this group of entrance and exit;Another group of entrance and Outlet is connected to micro-fluidic laminar flow chip water phase entrance and exit, i.e., hydrophily chip microchannel both ends are connected to this group of entrance and go out Mouthful.Entrance and exit is threaded connection hole.
The case where in order to facilitate microchannel in micro-fluidic laminar flow chip is observed, top panel is also provided with the observation window of hollow out. The position of observation window is corresponding with the position of two microchannels in chip.
Top panel, micro-fluidic laminar flow chip and lower panel are assembled into one from top to bottom in sequence.After assembling, screw thread connects It connects hole successively to connect with PEEK connector, PTFE tube, laminar flow chip micro-fluidic in this way is connected to external equipment, is convenient for subsequent extraction And organic phase rate test separated from the water.
A kind of micro-fluidic laminar flow chip preparation method includes the following steps:
Step 1: by each identical square structure of several sizes of the side of being cut into of hydrophilic substrates and hydrophilic substrates, it is then right Each substrate is cleaned by ultrasonic 3min using acetone, ethyl alcohol and deionized water, spare with being dried with nitrogen, and is passing through lithographic technique (light Quarter-wet etching or laser ablation) on two pieces of substrates etch the microchannel being pre-designed.
One piece of substrate is chosen as upper layer chip, another piece of substrate as lower layer chip, and on the chip of upper layer with it is every Layer microchannel endpoint corresponding position etching through hole, through-hole are carved by lithographic technique (photoetching-wet etching or laser ablation) Erosion.It is etched with one layer of thin bonding agent of one side spin coating of microchannel on upper layer chip or lower layer chip, layers of chips is had There is the one side alignment bonding of microchannel, while a through-hole of upper layer chip is aligned company with the entrance of lower layer chip microchannel Logical, another through-hole is aligned with the outlet of lower layer chip microchannel and is connected to, and forms complete micro-fluidic laminar flow chip;
Step 3: choosing two pieces of panels up and down is used as fixture, at least four screw threads are respectively opened up on the corresponding position of two pieces of panels and are consolidated Determine hole.Threaded connection hole is opened up with every layer of chip microchannel endpoint corresponding position on top panel, the quantity of threaded connection hole is Four, two of them threaded connection hole is aligned with upper layer chip microchannel both ends, and another two threaded connection hole and lower layer chip are micro- The alignment of channel both ends.Top panel is also provided with the hollow form (i.e. observation window) of hollow out, in the size and step 2 of hollow form Two microchannel sizes of micro-fluidic laminar flow chip match, in order to observe the solution mobility status in chip,
It is connected to Step 4: the threaded connection hole on top panel is aligned one by one with the through-hole on the chip of upper layer, according to top panel, micro- The sequence of flow control laminar flow chip and lower panel from top to bottom is assembled, and is clamped fixation by bolt after assembling.
Embodiment one
A kind of micro-fluidic laminar flow chip of quartz glass-PTFE.Upper layer chip uses silica glass material, and microchannel is for circulating Aqueous phase solvent, microchannel one end are aqueous phase solvent entrance, and the other end is aqueous phase solvent outlet;Lower layer chip uses PTFE material, For the organic phase solvent that circulates, microchannel one end goes out as organic phase solvent entrance, the other end as organic phase solvent for microchannel Mouthful.
Preparation method includes the following steps:
It will be cut into the square substrate of size 63 mm × 63 mm with a thickness of the quartz glass of 1 mm, uses acetone, ethyl alcohol With 3 min of each cleaning of deionized water ultrasound, subsequent use is dried with nitrogen spare;It will be cut into greatly with a thickness of the PTFE substrate of 1 mm Small is the square substrate of the mm of 63 mm × 63, using acetone, ethyl alcohol and deionized water ultrasound 3 min of each cleaning, is then used It is dried with nitrogen spare.
Microchannel is etched on PTFE substrate by laser etching techniques, the width of microchannel is 200 μm, and depth is 100 μm, length 5cm, prepare the lower layer chip of micro-fluidic laminar flow chip.
It prepares the upper layer chip of micro-fluidic laminar flow: forming the photoetching of microchannel on quartz glass by ultraviolet photolithographic technology Then glue pattern etches microchannel figure by wet etching technique on quartz glass, microchannel width is 200 μm, deep Degree is 100 μm, length 5cm, then four through-holes that diameter is 1mm are etched on quartz glass by laser etching techniques, Through-hole is corresponding with the endpoint location of quartz glass microchannel, the microchannel PTFE.Specifically, two of them through-hole is located at quartzy glass Glass microchannel both ends, another two through-hole are aligned with PTFE substrate microchannel both ends, prepare the upper layer core of micro-fluidic laminar flow chip Piece.
The PDMS that spin coating a layer thickness is 1 μm in the one side that the lower layer chip of micro-fluidic laminar flow has microchannel figure Then thin layer has the one side alignment of microchannel figure to be bonded, at 70 DEG C with the upper layer chip of micro-fluidic chip under the microscope It is kept for 2 hours, forms complete micro-fluidic laminar flow chip.
It will be cut with a thickness of the PMMA plate of 3 mm, two pieces of panels of the mm size of 80 mm × 80 obtained, at two pieces The through-hole that the surrounding processing diameter of PMMA plate is 3 mm, as the upper surface of chip fixture plate and lower panel.
The threaded connection hole that four diameters are 1/4 inch is processed on chip fixture top panel, with micro-fluidic laminar flow chip The endpoint location of microchannel corresponds.Rectangular hollow form is processed on chip fixture top panel, is directed at micro-fluidic laminar flow core The microchannel of piece.
By chip fixture and micro-fluidic laminar flow chip according to " chip fixture top panel-micro-fluidic laminar flow chip-chip fixture The sequence of lower panel " is assembled, and is fixed to clamp by the surrounding through-hole and bolt of clamp face plate, then by PEEK without flange spiral shell Micro-fluidic laminar flow chip is attached by female and 1/16 PTFE tube with external equipment.
It is tested for the property using above-mentioned micro-fluidic laminar flow chip:
By dodecane and deionized water respectively from organic phase entrance and water phase entrance with 5 mL min-1Flow velocity be passed through it is micro-fluidic Laminar flow chip, in the separative efficiency of exit analysis organic phase and water phase.It is obtained by calculation, dodecane and deionized water miniflow The separative efficiency for controlling laminar flow chip exit is greater than 99%.
Embodiment 2:
A kind of micro-fluidic laminar flow chip of quartz glass-PMMA.Upper layer chip uses silica glass material, and microchannel is for circulating Aqueous phase solvent, microchannel one end are aqueous phase solvent entrance, and the other end is aqueous phase solvent outlet.Lower layer chip uses PMMA material, For the organic phase solvent that circulates, microchannel one end goes out as organic phase solvent entrance, the other end as organic phase solvent for microchannel Mouthful.
Preparation method includes the following steps:
It will be cut into the square substrate that size is the mm of 63 mm × 63 with a thickness of the quartz glass of 1 mm, uses acetone, ethyl alcohol With 3 min of each cleaning of deionized water ultrasound, subsequent use is dried with nitrogen spare;It will be cut into greatly with a thickness of the PMMA substrate of 1 mm Small is the square substrate of the mm of 63 mm × 63, using acetone, ethyl alcohol and deionized water ultrasound 3 min of each cleaning, is then used It is dried with nitrogen spare.
Etching width on PMMA substrate by laser etching techniques is 300 μm, and depth is 200 μm, and length is The microchannel figure of 10cm prepares the lower layer chip of micro-fluidic laminar flow chip.
Microchannel is etched on quartz glass by laser etching techniques, in the microchannel and PMMA substrate microchannel Endpoint corresponding position etching through hole, wherein microchannel graphic width is 300 μm, and depth is 200 μm, length 10cm, through-hole Diameter be 1.5mm, two of them through-hole is located at quartz glass microchannel both ends, another two through-hole and PMMA substrate microchannel two End alignment, prepares the upper layer chip of micro-fluidic laminar flow chip.
Spin coating a layer thickness is 2 μm in the one side where the figure of lower layer chip microchannel in micro-fluidic laminar flow chip Then there is with the upper layer chip of micro-fluidic chip PDMS thin layer the one side alignment of microchannel figure to be bonded under the microscope, It is kept for 2 hours at 70 DEG C, forms complete micro-fluidic laminar flow chip.
It will be cut with a thickness of the stainless steel plate of 3 mm, obtain the panel that two block sizes are the mm of 80 mm × 80, so Process the threaded securing bores that four diameters are 3 mm in the surrounding of two pieces of stainless steel faceplates afterwards, as the upper surface of chip fixture plate and Lower panel.The threaded connection hole that four diameters are 1/4 inch is processed on chip fixture top panel, with micro-fluidic laminar flow chip It is micro- to lead to endpoint location one-to-one correspondence.Rectangular hollow form is processed on chip fixture top panel, is directed at micro-fluidic laminar flow chip Microchannel.
By chip fixture and micro-fluidic laminar flow chip according to " chip fixture top panel-micro-fluidic laminar flow chip-chip fixture The sequence of lower panel " is assembled, and then leads to fixation hole by surrounding and bolt fixes to clamp, finally by PEEK without flange spiral shell Micro-fluidic laminar flow chip is attached by female and 1/16 PTFE tube with external equipment.
Micro-fluidic laminar flow chip using the above structure is tested for the property:
It is 2 × 10 by concentration-2Concentration is 2 × 10 as organic phase by the Aliquat@336- dodecane of mol L-1-5 mol L-1Hydrochloric acid uranyl solution as water phase, with 1 mL min-1Flow velocity be passed through micro-fluidic laminar flow chip, examined by mass-spectrometric technique The extraction efficiency and organic phase and water phase and separative efficiency of survey uranyl.The results showed that the extraction efficiency of uranyl is 80%, have The separative efficiency of machine phase and water phase is greater than 99%.

Claims (10)

1. a kind of micro-fluidic laminar flow chip, it is characterised in that including upper and lower two pieces of panels, the miniflow being arranged between two pieces of panels Laminar flow chip is controlled, the micro-fluidic laminar flow chip includes one layer of hydrophily chip and one layer of hydrophobicity chip, the hydrophily core It is provided with interconnected microchannel on the face of piece and hydrophobicity chip by chip, two groups of entrances are provided on one of panel And outlet, the channel both ends on every layer of chip each communicate with one group of entrance and exit.
2. a kind of micro-fluidic laminar flow chip according to claim 1, it is characterised in that two groups of entrance and exits are Threaded connection hole, the threaded connection hole are arranged in top panel.
3. a kind of micro-fluidic laminar flow chip according to claim 1, it is characterised in that the top panel hollow out setting is useful In the observation window for observing every layer of chip microchannel.
4. a kind of micro-fluidic laminar flow chip according to claim 1, it is characterised in that the hydrophily chip or hydrophobic Property chip on setting there are four through-hole, the channel both ends of every layer of chip each communicate with two through-holes.
5. a kind of micro-fluidic laminar flow chip preparation method, it is characterised in that include the following steps:
Step 1: etch microchannel on the surface of one layer of hydrophily chip and one layer of hydrophobicity chip, one layer of chip wherein Upper position etching through hole corresponding with every layer of chip microchannel endpoint;
Step 2: there is the one side of microchannel to be directed at bonding layers of chips, micro-fluidic laminar flow chip is obtained;
Step 3: choosing two pieces of panels up and down, position corresponding with every layer of chip microchannel endpoint opens up spiral shell on top panel Pit;
Step 4: top panel, micro-fluidic laminar flow chip and lower panel are assembled into one according to sequence from top to bottom.
6. a kind of micro-fluidic laminar flow chip preparation method according to claim 5, it is characterised in that in step 2, will etch There is this layer of chip of through-hole to be placed on upper layer.
7. a kind of micro-fluidic laminar flow chip preparation method according to claim 5, it is characterised in that in step 2, two layers of core Piece is before bonding, in one layer of bonding agent of surface spin coating of wherein one layer of chip.
8. a kind of micro-fluidic laminar flow chip preparation method according to claim 5, it is characterised in that two layers in step 1 Chip is required to pre-process, pretreated detailed process are as follows: hydrophily substrate and hydrophobicity substrate are cut into square structure, Each personal acetone, ethyl alcohol and deionized water are cleaned by ultrasonic 3min, then with being dried with nitrogen.
9. a kind of micro-fluidic laminar flow chip preparation method according to claim 5, it is characterised in that in step 3, at two pieces The corresponding position of panel opens up threaded securing bores.
10. a kind of micro-fluidic laminar flow chip preparation method according to claim 5, it is characterised in that in step 3, above Plate is also provided with the observation window of hollow out.
CN201910304177.3A 2019-04-16 2019-04-16 A kind of micro-fluidic laminar flow chip and preparation method thereof Pending CN109967146A (en)

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