CN109954346A - Exhaust gas processing device - Google Patents
Exhaust gas processing device Download PDFInfo
- Publication number
- CN109954346A CN109954346A CN201910239717.4A CN201910239717A CN109954346A CN 109954346 A CN109954346 A CN 109954346A CN 201910239717 A CN201910239717 A CN 201910239717A CN 109954346 A CN109954346 A CN 109954346A
- Authority
- CN
- China
- Prior art keywords
- process chamber
- exhaust gas
- processing device
- lysate
- gas processing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
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Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D47/00—Separating dispersed particles from gases, air or vapours by liquid as separating agent
- B01D47/02—Separating dispersed particles from gases, air or vapours by liquid as separating agent by passing the gas or air or vapour over or through a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
- B01D53/14—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols by absorption
- B01D53/18—Absorbing units; Liquid distributors therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01D—SEPARATION
- B01D2258/00—Sources of waste gases
- B01D2258/02—Other waste gases
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Analytical Chemistry (AREA)
- General Chemical & Material Sciences (AREA)
- Oil, Petroleum & Natural Gas (AREA)
- Treating Waste Gases (AREA)
- Incineration Of Waste (AREA)
Abstract
The invention discloses a kind of exhaust gas processing devices, including process chamber, the lysate for the impurity in tail gas of dissolution is loaded in the process chamber, partition is equipped in the process chamber, process chamber is separated into first part and second part by the partition, through the air passing hole being dipped in lysate is equipped on the partition, the first part of the process chamber is equipped with air inlet, and the second part of the process chamber is equipped with venthole.After tail gas of the present invention enters the first part of process chamber from air inlet, since the pressure in the first part of process chamber constantly increases, tail gas can enter in lysate and pass through the second part that stomata enters process chamber, tail gas can be contacted with lysate so that the impurity in tail gas is dissolved in the process, to remove the impurity in tail gas, the tail gas after removing impurity flows out process chamber from venthole.
Description
Technical field
The present invention relates to crystal silicon solar batteries fields, more particularly to one kind to production crystal silicon solar batteries
The exhaust gas processing device that the tail gas generated in the process is handled.
Background technique
Crystal silicon solar batteries are divided into p-type crystal silicon and N-type crystal silicon, N-type crystal silicon battery because have minority carrier life time it is high, without photic
Decaying, the advantages that dim light effect is good, temperature coefficient is small become crystal silicon battery and march toward the hope of theoretical peak efficiency.Due to passing through
Ion implantation doping producing line cost is too high, and boron diffusing, doping becomes the first choice of volume production N-type crystal silicon battery technique, but boron diffusion is compared
In conventional batteries phosphorus diffusion, the tail gas of generation is containing B2O3 and H3BO3 at powdered, it is easy to block exhaust pipe and vacuum diaphragm
Pump.Therefore, handling B2O3 and H3BO3 powder in tail gas becomes the bottleneck and maintenance difficult point of puzzlement boron diffusion batch production technique.
Existing diffusion facilities generally filter the powder in tail gas, but the powder mistake that boron diffusion generates by the way of filter
It is more, cause filter core and pipeline cleaning period too short, when volume production causes the time accounting of to maintain equipment to cause largely to waste.In addition,
When B2O3 and H3BO3 powder enter vacuum diaphragm pump with tail gas, diaphragm can be blocked and be corroded, causes diaphragm pump damage frequent.
Summary of the invention
The object of the present invention is to provide a kind of exhaust gas processing devices, can remove the impurity in tail gas.
The technical solution of the present invention is as follows: providing a kind of exhaust gas processing device, including process chamber, it is loaded in the process chamber
For the lysate of the impurity in tail gas of dissolution, partition is equipped in the process chamber, process chamber is separated into first by the partition
Part and second part, through being equipped with the air passing hole being dipped in lysate on the partition, in the first part of the process chamber
Equipped with air inlet, the second part of the process chamber is equipped with venthole.
The lysate is water.
The exhaust gas processing device further includes device for drying and filtering, and the device for drying and filtering is connect with venthole.
The exhaust gas processing device further includes diaphragm pump, and the diaphragm pump is connect with device for drying and filtering, from described dried
The tail gas that filter comes out enters the diaphragm pump.
The process chamber be equipped with lysate inlet port and lysate outlet, the exhaust gas processing device further include with it is molten
Solve the draining pump of liquid outlet connection.
The exhaust gas processing device further includes lysate input pipe and flowmeter, and the flowmeter is connected to lysate input
Between pipe and lysate inlet port.
The exhaust gas processing device further includes valve, and the valve is connected between flowmeter and lysate inlet port.
Pressure detecting mouth is additionally provided on the process chamber, the exhaust gas processing device further includes connecting with pressure detecting mouth
Pressure detector.
After tail gas of the present invention enters the first part of process chamber from air inlet, due to the pressure in the first part of process chamber
Constantly increase, tail gas, which can enter in lysate and pass through stomata, enters the second part of process chamber, and tail gas can be in the process
Lysate contacts so that impurity in tail gas is dissolved, to remove the impurity in tail gas, the tail gas after removing impurity is from outlet
Flow out process chamber in hole.
Detailed description of the invention
Fig. 1 is the structure chart of process chamber in the embodiment of the present invention.
Fig. 2 is the structure chart of exhaust gas processing device in the embodiment of the present invention.
Specific embodiment
As shown in Figure 1, the exhaust gas processing device proposed in the embodiment of the present invention, including process chamber 2, process chamber 2 is interior to be contained
There is the lysate 26 for the impurity in tail gas of dissolution, is equipped with partition 21 in process chamber 2, process chamber 2 is separated into first by partition
Part 27 and second part 28, through being equipped with the air passing hole 211 being dipped in lysate 26 on partition 21, first of process chamber 2
27 are divided to be equipped with air inlet 22, the second part 28 of process chamber 2 is equipped with venthole 23.Tail gas enters process chamber from air inlet
After first part, since the pressure in the first part of process chamber constantly increases, tail gas can enter in lysate and pass through stomata
Into the second part of process chamber, tail gas can be contacted with lysate so that the impurity in tail gas is dissolved in the process, thus
The impurity in tail gas is removed, the tail gas after removing impurity flows out process chamber from venthole.
In the present embodiment, lysate is water, and the impurity in tail gas is B2O3 and H3BO3 powder, B2O3 and H3BO3 powder is equal
Water can be reacted and is melted into water.
Process chamber 2 is equipped with lysate inlet port 24 and lysate outlet 25.
As shown in Fig. 2, tail gas enters process chamber 2 from diffusion furnace 1.The exhaust gas processing device further includes 3 He of device for drying and filtering
Diaphragm pump 4, device for drying and filtering 4 are connect with venthole, and diaphragm pump 4 is connect with device for drying and filtering 3, are come out from device for drying and filtering 3
Tail gas enters diaphragm pump 4.
The exhaust gas processing device further includes the draining pump 5 connecting with lysate outlet, and draining pump 5 is for being discharged process chamber
Waste water in 2.
Exhaust gas processing device further includes lysate input pipe 6 and flowmeter 7, and flowmeter 7 is connected to 6 He of lysate input pipe
Between lysate inlet port, the water capacity for flowing into process chamber is accurately calculated by flowmeter.The exhaust gas processing device further includes valve
Door 8, valve 8 is connected between flowmeter 7 and lysate inlet port.
Pressure detecting mouth 29 is additionally provided on process chamber 2, exhaust gas processing device further includes the pressure connecting with pressure detecting mouth 29
Force detector 9, by pressure detector come the pressure in detection processing room.
Above specific embodiment is only to the design illustrated the present invention, and those skilled in the art are in this hair
Various deformation and variation can be made under bright design, these deformations and variation are included within protection scope of the present invention.
Claims (8)
1. a kind of exhaust gas processing device, which is characterized in that including process chamber (2), be loaded in the process chamber (2) for dissolving
The lysate (26) of impurity in tail gas is equipped with partition (21) in the process chamber (2), and the partition (21) is by process chamber (2)
It is separated into first part (27) and second part (28), runs through to be equipped with to be dipped in lysate (26) on the partition (21) and crosses gas
The first part (27) in hole (211), the process chamber (2) is equipped with air inlet (22), the second part of the process chamber (2)
(28) venthole (23) are equipped with.
2. exhaust gas processing device according to claim 1, which is characterized in that the lysate (26) is water.
3. exhaust gas processing device according to claim 1, which is characterized in that the exhaust gas processing device further includes dried
Filter (3), the device for drying and filtering (3) connect with venthole (23).
4. exhaust gas processing device according to claim 2, which is characterized in that the exhaust gas processing device further includes diaphragm pump
(4), the diaphragm pump (4) connect with device for drying and filtering (3), the tail gas come out from the device for drying and filtering (3) enter it is described every
Membrane pump (4).
5. exhaust gas processing device according to claim 1, which is characterized in that the process chamber (2) be equipped with lysate into
Entrance (24) and lysate outlet (25), the exhaust gas processing device further include the draining connecting with lysate outlet (25)
It pumps (5).
6. exhaust gas processing device according to claim 5, which is characterized in that the exhaust gas processing device further includes lysate
Input pipe (6) and flowmeter (7), the flowmeter (7) be connected to lysate input pipe (6) and lysate inlet port (24) it
Between.
7. exhaust gas processing device according to claim 6, which is characterized in that the exhaust gas processing device further includes valve
(8), the valve (8) is connected between flowmeter (7) and lysate inlet port (24).
8. exhaust gas processing device according to claim 1, which is characterized in that be additionally provided with pressure detecting mouth on the process chamber
(29), the exhaust gas processing device further includes the pressure detector (9) connecting with pressure detecting mouth (29).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910239717.4A CN109954346A (en) | 2019-03-27 | 2019-03-27 | Exhaust gas processing device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910239717.4A CN109954346A (en) | 2019-03-27 | 2019-03-27 | Exhaust gas processing device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109954346A true CN109954346A (en) | 2019-07-02 |
Family
ID=67025167
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910239717.4A Pending CN109954346A (en) | 2019-03-27 | 2019-03-27 | Exhaust gas processing device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109954346A (en) |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003117329A (en) * | 2001-10-16 | 2003-04-22 | Sumitomo Electric Ind Ltd | Dust collecting method of fine powder and dust collector for fine powder |
| CN2714182Y (en) * | 2004-05-26 | 2005-08-03 | 高益才 | Filtering system for jewelry processing |
| CN201676617U (en) * | 2010-04-01 | 2010-12-22 | 蚌埠华洋粉体技术有限公司 | Graded collecting device of industrial dust |
| CN104117252A (en) * | 2014-07-07 | 2014-10-29 | 张自明 | High efficient vacuum water-bath deduster |
| KR20160126703A (en) * | 2015-04-24 | 2016-11-02 | 주식회사 리드컴퍼니 | The device for deodorizing polluted air |
| CN209917517U (en) * | 2019-03-27 | 2020-01-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Tail gas treatment device |
-
2019
- 2019-03-27 CN CN201910239717.4A patent/CN109954346A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2003117329A (en) * | 2001-10-16 | 2003-04-22 | Sumitomo Electric Ind Ltd | Dust collecting method of fine powder and dust collector for fine powder |
| CN2714182Y (en) * | 2004-05-26 | 2005-08-03 | 高益才 | Filtering system for jewelry processing |
| CN201676617U (en) * | 2010-04-01 | 2010-12-22 | 蚌埠华洋粉体技术有限公司 | Graded collecting device of industrial dust |
| CN104117252A (en) * | 2014-07-07 | 2014-10-29 | 张自明 | High efficient vacuum water-bath deduster |
| KR20160126703A (en) * | 2015-04-24 | 2016-11-02 | 주식회사 리드컴퍼니 | The device for deodorizing polluted air |
| CN209917517U (en) * | 2019-03-27 | 2020-01-10 | 深圳市捷佳伟创新能源装备股份有限公司 | Tail gas treatment device |
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