CN109921276A - A kind of two-way pulse triggering means and method for excimer laser - Google Patents
A kind of two-way pulse triggering means and method for excimer laser Download PDFInfo
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Abstract
The present invention provides a kind of two-way pulse triggering means and method for excimer laser, the two-way pulse triggering means include main control module, outer touching input module, enabled input module, two paths of signals switching control module, two-way electric impulse signal processing module and two optical pulse signals processing module；Main control module realizes a variety of different output of pulse signal pattern switchings of two-way pulse triggering means, the configuration of the pulse parameter of the switching and two-way pulse of light pulse signal and electric impulse signal output, with the accurate synchronization of this two-way pulse for realizing excimer laser, it can be in the form of free switching pulsed output mode and pulsed laser output when making excimer laser based on different purposes simultaneously, the scope of application for increasing excimer laser ensure that the accuracy of the cavity synchronous of excimer laser.
Description
Technical field
It is a kind of for the two-way pulse triggering means of excimer laser and side the present invention relates to excimer laser field
Method.
Background technique
193nmArF excimer laser is a kind of pulsed gas laser towards deep-UV lithography application, has height
The characteristics of repetition, big energy, short wavelength, narrow linewidth is outstanding microelectronics lithography system laser light source.Excimer laser
The laser of sending is issued with impulse form, each of which laser pulse is all the high-pressure discharging device electric shock electric discharge by laser
What the working gas in chamber obtained.For dual-cavity laser, the delay time of two cavity triggering electric discharges needs to adjust, this
Just need coordinated control two-way pulse-triggered.Meanwhile different cavitys and high-pressure modular is for triggering continuing for the pulse discharged
Time be it is different, this just needs the duration of pulse adjustable.And some electrion modules have trigger pulse
Harsh requirement, that is, require its output power to require ns grades of rise time again.In addition the different purposes of excimer laser
The pulse mode needed is also different, it is therefore desirable to the configurable laser pulse triggering of an adjustable multi-mode of binary channels multi-parameter
The problems such as device goes control electrion module, issues the time of pulse, pulsed frequency, pulsed mode.
In consideration of it, overcoming the above defect in the prior art, a kind of two-way pulse touching for excimer laser is provided
The device and method of hair become this field technical problem urgently to be resolved.
Summary of the invention
One of the objects of the present invention is to provide a kind of two-way pulse triggering means for excimer laser, so that quasi-
When molecular laser is based on different purposes quasi- point can be increased with free switching pulsed output mode and pulse output form
The scope of application of sub- laser ensure that the accuracy of the cavity synchronous of excimer laser.
The second object of the present invention is to provide a kind of two-way pulse triggering method for excimer laser, this method
Two-way pulse triggering means applied to the excimer laser.
The purpose of the present invention can be realized by technical measures below:
The present invention provides a kind of two-way pulse triggering means for excimer laser, the two-way pulse-triggered dress
Setting includes: the main control module being connected with industrial personal computer, the outer touching input module that is connected with the main control module, enabled input module,
First switch method of remote signal module and second signal switching control module, to be connected with the first switch method of remote signal module
One electric impulse signal processing module and the first light pulse signal processing module are connected with the second signal switching control module
Second electric impulse signal processing module and the second light pulse signal processing module；
The main control module is used to respond the control signal of industrial personal computer, while generating the first original burst signal, the second original
Initial pulse signal, the first control selections signal and the second control selections signal；
The outer touching input module generates trigger signal for receiving outer touching signal under triggering mode outside, described enabled
Input module is used to determine the outer touching signal under external trigger mode to export trigger signal when high level；
The first switch method of remote signal module is used for the described first original arteries and veins according to the first control selections signal
It rushes signal behavior and is transmitted to the first electric impulse signal processing module or the first light pulse signal processing module, the described first electric arteries and veins
Signal processing module is rushed for first original burst signal to be carried out power amplification and waveform adjusting and output electric pulse letter
Number, the first light pulse signal processing module by first original burst signal for converting and exporting and can pass in a fiber
Defeated laser pulse signal；
The second signal switching control module is used for the described second original arteries and veins according to the second control selections signal
It rushes signal behavior and is transmitted to the second electric impulse signal processing module or the second light pulse signal processing module, the described second electric arteries and veins
Signal processing module is rushed for second original burst signal to be carried out power amplification and waveform adjusting and output electric pulse letter
Number, the second light pulse signal processing module by second original burst signal for converting and exporting and can pass in a fiber
Defeated laser pulse signal.
Further, the main control module includes FPGA and ARM combined chip, and the FPGA is generated for handling data
Original burst signal, the outer touching signal of input and enable signal, the ARM is for control wave output mode, configuration pulse
Delay-time difference between parameter and configuration two-way pulse.
Further, the output of pulse signal mode includes that continuous output mode, Burst output mode, external trigger are defeated
Mode, Gate output mode and restriction output mode out.
Further, the first switch method of remote signal module or second signal switching control module include and main control module
Connected photoelectric coupling circuit module and the relay being connected with the photoelectric coupling circuit module, the photoelectric coupling circuit mould
For block for amplifying the first control selections signal or the second control selections signal, the relay is used for basis
The amplified first control selections signal or the amplified second control selections signal behavior connect path.
Further, the first electric impulse signal processing module or the second electric impulse signal processing module include Smith
Trigger, the smith trigger is used for reversed original burst signal, while increasing the driving energy of the original burst signal
Power has simultaneously adjusted waveform formation electric impulse signal.
Further, the first light pulse signal processing module or the second light pulse signal processing module include with
The drive circuit unit and connection that the first switch method of remote signal module or the second signal switching control module are connected
Electro-optic conversion head after the drive circuit unit, the drive circuit unit are used to be generated according to the original burst signal
The driving signal of the electro-optic conversion head, the electro-optic conversion head will be for that will believe the original pulse according to the driving signal
Number be converted to the light pulse signal transmitted on optical fiber.
Further, the two-way pulse triggering means further include the linear power supply being connected with the pci bus of industrial personal computer
Conversion module, for the direct current obtained from PCI to be converted to the lesser DC power supply of voltage ripple.
The present invention also provides a kind of two-way pulse triggering methods for excimer laser, are used for above-mentioned two-way pulse
Trigger device, the two-way pulse triggering method the following steps are included:
S1: the output of pulse signal mode selected according to the industrial personal computer obtains trigger signal and enable signal, according to institute
It states trigger signal and the enable signal issues the first original burst signal, the second original burst signal, the first control selections letter
Number and the second control selections signal；
S2: first original burst signal selection is delivered to by the first electric pulse according to the first control selections signal
Signal processing module or the first light pulse signal processing module are original by described second according to the second control selections signal
Pulse signal selection is delivered to the second electric impulse signal processing module or the second light pulse signal processing module；
S3: first original burst signal is amplified and has adjusted wave row output the by the first Electric Pulse Treatment module
First original burst signal is converted and exports by one electric pulse trigger signal or the first light pulse processing module
One laser pulse trigger signal,
Second original burst signal is amplified and has adjusted wave row output second by the second Electric Pulse Treatment module
Second original burst signal is converted and exports second by electric pulse trigger signal or the second light pulse processing module
Laser pulse trigger signal.
Further, the step S1 includes that step S10 passes through industrial personal computer configuration first original burst signal
With the pulse parameter of second original burst signal, the pulse parameter includes pulse width, pulse frequency and pulse daley
Time.
Further, the step S1 further includes step S11 when obtaining trigger signal is outer touching signal, is made described in judgement
Whether energy signal is high level, when determining result is to be, issues first original burst signal and the second original arteries and veins
Rush signal.
The beneficial effects of the present invention are providing a kind of two-way pulse triggering means and method for excimer laser,
The two-way pulse triggering means include main control module, outer touching input module, enabled input module, two paths of signals switching control mould
Block, two-way electric impulse signal processing module and two optical pulse signals processing module；Main control module realizes two-way pulse-triggered dress
The a variety of different output of pulse signal pattern switchings set, the switching and two-way pulse of light pulse signal and electric impulse signal output
The configuration of pulse parameter with the precise synchronization of this two-way pulse for realizing excimer laser, while making excimer laser
When based on different purposes mould can be exported with free switching pulsed output mode and pulse output form and laser pulse signal
Formula increases the scope of application of excimer laser, ensure that the accuracy of the cavity synchronous of excimer laser.
Detailed description of the invention
Fig. 1 is the excimer laser structure chart of the embodiment of the present invention；
Fig. 2 is the excimer laser two-way pulse triggering means structure chart of the embodiment of the present invention；
Fig. 3 is the circuit diagram of the signal control switching module of the embodiment of the present invention；
Fig. 4 is the circuit diagram of the electric impulse signal processing module of the embodiment of the present invention；
Fig. 5 is the circuit diagram of the light pulse signal processing module of the embodiment of the present invention；
Fig. 6 is the first excimer laser two-way pulse triggering method flow chart of the embodiment of the present invention；
Fig. 7 is second of excimer laser two-way pulse triggering method flow chart of the embodiment of the present invention.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, with reference to the accompanying drawing and specific implementation
Invention is further described in detail for example.It should be appreciated that the specific embodiments described herein are merely illustrative of the present invention,
It is not intended to limit the present invention.
In order to keep the narration of this disclosure more detailed with it is complete, below for embodiments of the present invention and specific real
It applies example and proposes illustrative description；But this not implements or uses the unique forms of the specific embodiment of the invention.Embodiment
In cover multiple specific embodiments feature and to construction with operate these specific embodiments method and step it is suitable with it
Sequence.However, can also reach identical or impartial function and sequence of steps using other specific embodiments.
Principle of the present invention for the two-way pulse triggering means of excimer laser is main control module by FPGA
The chip of two kinds of (Field-Programmable Gate Array) and ARM (Advanced RISC Machines) combinations leads to
A variety of different output of pulse signal modes of two-way pulse triggering means are realized in the cooperation for crossing FPGA and ARM, light pulse signal and
The configuration of the pulse parameter of the switching and two-way pulse of electric impulse signal output, specific pulse parameter includes two-way pulse
Delay time, pulse width and pulse output frequencies, with the accurate synchronization of this two-way pulse for realizing excimer laser, simultaneously
So that can be with free switching pulsed output mode and pulse output form (light arteries and veins when excimer laser is based on different purposes
Punching output or electric pulse output), the scope of application of excimer laser is increased, ensure that the double of double-cavity excimer laser
The synchronous accuracy of chamber.
Referring to Fig. 1, Fig. 1 illustrates the excimer laser structure chart of the embodiment of the present invention.Double-cavity excimer laser
It include the master control system industrial personal computer 1 of laser.Industrial personal computer 1 passes through PCI (Peripheral Component
Interconnect) bus 2 is connected with pulse triggering means 3.Pulse triggering means 3 issue the first original burst signal and the
Two is original, the first original burst signal and the second corresponding first electrion module 4 of original triggering and the second electrion mould
After the charging of 5 electrion module of block, and put by corresponding first magnetic field impulse control module 6 and the second magnetic field impulse control module 8
Electricity, the working gas in shock by electricity corresponding first laser device chamber 7 and second laser chamber 9 issue laser.
Referring to Fig. 2, Fig. 2 illustrates the excimer laser two-way pulse triggering means structure chart of the embodiment of the present invention.
Pulse triggering means include main control module 10, and core chips is the chip XLINX company by FPGA+ARM framework
XC7Z020 is responsible for the setting of mode, responds the operation of host computer, the first original burst signal and the second original burst signal
Generate etc..Pci bus golden finger 12 is responsible for being connected with the PCI bus 2 of industrial personal computer, carries out the communication with industrial personal computer 1.In order to
Guarantee the precision of integrated circuit the operation is stable and pulse signal, the power supply of each module is all made of linear power supply power supply.Linear power supply
Conversion module 11, function are that the 5V Switching Power Supply signal that will be obtained from PCI is converted to 1 linear 3.3V power supply and 3 routes
The 5V power supply of property.Wherein the linear power supply of 3.3V is the power supply of master control unit module, and two-way 5V linear power supply is respectively two-way pulse
Signal processing module is powered respectively, and 5V linear power supply is other module for power supply all the way.First switch method of remote signal circuit 13 and
Binary signal control switching circuit 14, the first control selections signal issued by main control module 10 and the second control selections signal are real
Referring now to the switching between the output of the light pulse signal of the first original pulse and the second original pulse and electric signal pulse output.Figure
In 15 be the first electric impulse signal processing module, be responsible for the first original burst signal carrying out power amplification and waveform to adjust, and
The first electric impulse signal is exported by BNC (Bayonet Nut Connector) interface.The first light pulse signal handles mould in figure
Block 16 is responsible for the first original burst signal being converted to the laser signal that can be transmitted in a fiber, and exports the by optical fiber head
One light pulse signal.In figure the second electric impulse signal processing module 17 be responsible for by the second original burst signal carry out power amplification and
Waveform adjusting, and the second electric impulse signal is exported by bnc interface.Second light pulse signal processing module 18 in figure, being responsible for will
Second original burst signal is converted to the laser signal that can be transmitted in a fiber, and exports the second light pulse letter by optical fiber head
Number.19 be outer touching input module in figure, and outer touching input module includes external trigger interface and conditioning circuit, is responsible for triggering mode outside
Signal is touched outside lower reception.Input module 20 is enabled in figure, input enable signal reaches FPGA, outside under triggering mode, the signal
When for high level, outer touching signal just regards as useful signal.
Main control module 10 of the invention is by the chip of FPGA and ARM framework, and FPGA is responsible for the processing of pci bus data,
The generation of first original burst signal, the second original burst signal, the first control selections signal and the second control selections signal, outside
The input of trigger signal and enable signal, the first original burst signal and the second original burst signal are according to the delay of two-way pulse
Time and generate, that is to say, that: second road signal than first via signal postpone a period of time generate；ARM is responsible for joining pulse
Several control, the control postponed between the control and two-way pulse of output of pulse signal mode.
ARM is for the control that the control of pulse parameter includes: for pulse width, adjusting and two-way for pulse frequency
Delay between pulse triggering signal.This control is realized in ARM, is realized per pulse all the way by three timer interruptions.?
It is realized in interruption and FPGA is controlled, to issue original burst signal.Finally realizing output pulse width 1-100us can
It adjusts, adjustment resolution ratio is 1us；Pulse output frequencies 1-6000Hz is adjustable, and adjusting resolution ratio is 1Hz；Between two pulse signals
Delay time for being arranged according to user by industrial personal computer of delay, the Timer Controlling FPGA passed through in ARM exports two-way pulse
Adjustable between -500ns~500ns, adjustment resolution ratio is 1ns.
Main control module is controlled by the selection of industrial personal computer and realizes different pulsed signal mode switchings, and main control module passes through
The mutual cooperation of FPGA and ARM is to realize the output of different pulsed signal modes, five kinds of output of pulse signal described herein
Mode is implemented as follows:
Mode one: continuous output mode
The mode belongs to internal trigger mode, and the output of pulse is that pulse is continuous in the Timer Controlling FPGA inside ARM
Output, is pulsed basic model.ARM startup program when industrial personal computer is switched to continuous output mode, in main control module
In 3 control pulse parameters timers realize.
Two: Burst output mode of mode
The mode be semiconductor lithography real work in through frequently with mode, belong to internal trigger mode.Pass through ARM
Pulse output, the output mode of the Burst of pulse signal are mainly concerned with Burst parameter in internal Timer Controlling FPGA
The control of (Burst umber of pulse, the interval Burst, Burst number, Burst train interval), when industrial personal computer is switched to Burst output
Mode starts the timer interruption in ARM in main control module and realizes pulse output in control FPGA.
Mode three: external trigger output mode
The mode be also in semiconductor lithography real work through frequently with mode, external trigger signal is usually by litho machine
It provides.Pulse exports not by the control of this card, but by the control for receiving outer triggering signal.When enable signal is high level
When, when the present apparatus often receives an external trigger signal, issue a pulse signal.The function is directly realized by by the logic of FPGA,
Without ARM.
Four: Gate output mode of mode
The mode belongs to internal trigger mode, and when industrial personal computer is switched to the mode, two-way pulse triggering means are defeated by enabling
Enter signal path and receive a Gate pulse signal, issues the pulse triggering signal of a Burst.The function is received by FPGA
Gate pulse signal, ARM carry out the control of Burst output to FPGA, and last FPGA exports corresponding pulse triggering signal.
Mode five: output mode is limited
The mode is similar with the function of mode four, is switched under the mode when the device is arranged in industrial personal computer, FPGA is received
After Gate signal, ARM fixed according to setting control FPGA output umber of pulse or the pulse of a period of time.The function is also to pass through
ARM programming and fpga logic are realized jointly.
The parameters of this five kinds of pulsed output modes can be by the pci bus of industrial personal computer to double during the work time
Road pulse triggering means are set, and are realized with the function of pci bus communication by FPGA.
Referring to Fig. 3, Fig. 3 illustrates the circuit diagram of the signal control switching module of the embodiment of the present invention.32 be light in figure
Electric coupling circuit module can amplify the driving capability of the control selections signal 30 of main control module 10 to control relay 33
Movement.It is transported at the first electric impulse signal by the original burst signal that the movement of relay 33 determines that main control module 10 issues
Module 15 or the second electric impulse signal processing module 17 are managed, the first light pulse signal processing module 16 or the second light are still transported to
Pulse signal processing module 18.
Referring to Fig. 4, Fig. 4 illustrates the circuit diagram of the electric impulse signal processing module of the embodiment of the present invention.In Fig. 2
One electric impulse signal processing module 15 and second electric impulse signal processing module 17 circuit structure block diagram it is as shown in Figure 4.By
The original burst signal that main control module 10 generates controls switching module 13 or second signal control by the first signal of module in Fig. 3
Original burst signal 21 after the circuit selection of switching module 14, increases driving while reversed by smith trigger 22
Ability has simultaneously adjusted waveform, it is made to meet certain driving capability, and is less than the demand of 20ns to rising edge.By current-limiting resistance
23, and by ESD module 25, electric impulse signal is sent to bnc interface 24 and is exported.
Referring to Fig. 5, Fig. 5 illustrates the circuit diagram of the light pulse signal processing module of the embodiment of the present invention.In Fig. 2
The circuit structure block diagram of one light pulse signal processing module 16 and the second light pulse signal processing module 18 is as shown in Figure 5.By leading
The original burst signal that control module 10 generates controls switching module 13 by the first signal of module in Fig. 3 or second signal control is cut
Original burst signal 26 after changing the mold the circuit selection of block 14 generates electro-optic conversion by the driving circuit 27 of electrooptic conversion module
The driving signal 28 of module generates the laser pulse signal transmitted on optical fiber so that electro-optic conversion head 29 be driven to work.
Specific explanations explanation is carried out to the two-way pulse triggering method for excimer laser below, referring to Fig. 6, figure
6 illustrate the first excimer laser two-way pulse triggering method flow chart of the embodiment of the present invention.Specific method include with
Lower step:
In step sl, the output of pulse signal mode selected according to industrial personal computer obtains trigger signal and enable signal, root
According to trigger signal and enable signal issue the first original burst signal, the second original burst signal, the first control selections signal and
Second control selections signal；
In step s 2, the selection of the first original burst signal is delivered to by the first electric pulse according to the first control selections signal
Signal processing module or the first light pulse signal processing module, according to the second control selections signal by the second original burst signal
Selection is delivered to the second electric impulse signal processing module or the second light pulse signal processing module；
In step s3, the first original burst signal is amplified and has adjusted wave row output the by the first Electric Pulse Treatment module
First original burst signal is converted and exports first laser arteries and veins by one electric pulse trigger signal or the first light pulse processing module
Trigger signal is rushed, the second original burst signal is amplified and adjusted wave row by the second Electric Pulse Treatment module exports the second electric pulse
Second original burst signal is converted and exports second laser pulse-triggered letter by trigger signal or the second light pulse processing module
Number.
Referring to Fig. 7, Fig. 7 illustrates second of excimer laser two-way pulse triggering method stream of the embodiment of the present invention
Cheng Tu.
Further, pulse parameter can be configured by industrial personal computer, pulse parameter includes according to different purposes
Pulse width, pulse frequency and pulse delay time.Output pulse width 1-100us is adjustable, and adjustment resolution ratio is 1us；Pulse
Output frequency 1-6000Hz is adjustable, and adjusting resolution ratio is 1Hz；M- 500ns~500ns of delay between two pulse signals
Between it is adjustable, adjustment resolution ratio be 1ns.Referring specifically to Fig. 7 step S10.
Further, different purposes pulse choice output modes are different, when switching external trigger output mode, obtain triggering
Signal is outer touching signal, determines that enable signal is high level, issues original burst signal.Referring specifically to Fig. 7 step S11.
The foregoing is merely illustrative of the preferred embodiments of the present invention, is not intended to limit the invention, all in essence of the invention
Made any modifications, equivalent replacements, and improvements etc., should all be included in the protection scope of the present invention within mind and principle.
Claims (10)
1. a kind of two-way pulse triggering means for excimer laser, which is characterized in that the two-way pulse triggering means
It include: the main control module being connected with industrial personal computer, the outer touching input module that is connected with the main control module, enabled input module, the
One switch method of remote signal module and second signal switching control module, first to be connected with the first switch method of remote signal module
Electric impulse signal processing module and the first light pulse signal processing module, to be connected with the second signal switching control module
Two electric impulse signal processing modules and the second light pulse signal processing module；
The main control module is used to respond the control signal of industrial personal computer, while generating the first original burst signal, the second original arteries and veins
Rush signal, the first control selections signal and the second control selections signal；
The outer touching input module is for receiving outer touching signal to generate trigger signal, the enabled input under triggering mode outside
Module is used to determine the outer touching signal under external trigger mode to export trigger signal when high level；
The first switch method of remote signal module is for believing first original pulse according to the first control selections signal
Number selection is transmitted to the first electric impulse signal processing module or the first light pulse signal processing module, the first electric pulse letter
Number processing module is used to first original burst signal carrying out power amplification and waveform adjusting, simultaneously output electric pulse signal,
The first light pulse signal processing module by first original burst signal for converting and exporting and can transmit in a fiber
Laser pulse signal；
The second signal switching control module is for believing second original pulse according to the second control selections signal
Number selection is transmitted to the second electric impulse signal processing module or the second light pulse signal processing module, the second electric pulse letter
Number processing module is used to second original burst signal carrying out power amplification and waveform adjusting, simultaneously output electric pulse signal,
The second light pulse signal processing module by second original burst signal for converting and exporting and can transmit in a fiber
Laser pulse signal.
2. being used for the two-way pulse triggering means of excimer laser as described in claim 1, which is characterized in that the master control
Module includes FPGA and ARM combined chip, and the FPGA generates original burst signal, the outer touching signal of input for handling data
And enable signal, the ARM is for prolonging between control wave output mode, configuration pulse parameter and configuration two-way pulse
The slow time difference.
3. being used for the two-way pulse triggering means of excimer laser as claimed in claim 2, which is characterized in that the pulse
Signal output mode includes continuous output mode, Burst output mode, external trigger output mode, Gate output mode and restriction
Output mode.
4. being used for the two-way pulse triggering means of excimer laser as claimed in claim 3, which is characterized in that described first
Switch method of remote signal module or second signal switching control module include the photoelectric coupling circuit module being connected with main control module and
The relay being connected with the photoelectric coupling circuit module, the photoelectric coupling circuit module are used for first control selections
Signal or the second control selections signal amplify, and the relay is used for according to amplified first control selections
Signal or the amplified second control selections signal behavior connect path.
5. being used for the two-way pulse triggering means of excimer laser as claimed in claim 4, which is characterized in that described first
Electric impulse signal processing module or the second electric impulse signal processing module include smith trigger, and the smith trigger is used
In reversed original burst signal, while increasing the driving capability of the original burst signal and having adjusted waveform formation electric pulse letter
Number.
6. being used for the two-way pulse triggering means of excimer laser as claimed in claim 5, which is characterized in that described first
Light pulse signal processing module or the second light pulse signal processing module include and the first switch method of remote signal module
Or the second signal switching control module connected drive circuit unit and the electricity that is connected to after the drive circuit unit
Light conversion head, the driving that the drive circuit unit is used to generate the electro-optic conversion head according to the original burst signal are believed
Number, the electro-optic conversion head is used to according to the driving signal to be converted to the original burst signal and transmit on optical fiber
Light pulse signal.
7. being used for the two-way pulse triggering means of excimer laser as claimed in claim 6, which is characterized in that the two-way
Pulse triggering means further include the linear power supply conversion module being connected with the pci bus of industrial personal computer, for that will obtain from PCI
Direct current be converted to the lesser DC power supply of voltage ripple.
8. a kind of two-way pulse triggering method for excimer laser, for any one of the claim 1-7 two-way arteries and veins
Rush trigger device, which is characterized in that the two-way pulse triggering method the following steps are included:
S1: the output of pulse signal mode selected according to the industrial personal computer obtains trigger signal and enable signal, according to the touching
Signal and the enable signal issue the first original burst signal, the second original burst signal, the first control selections signal and
Second control selections signal；
S2: first original burst signal selection is delivered to by the first electric impulse signal according to the first control selections signal
Processing module or the first light pulse signal processing module, according to the second control selections signal by second original pulse
Signal behavior is delivered to the second electric impulse signal processing module or the second light pulse signal processing module；
S3: first original burst signal is amplified and has adjusted the first electricity of wave row output by the first Electric Pulse Treatment module
First original burst signal is converted and exports first by pulse triggering signal or the first light pulse processing module to swash
Light pulse trigger signal,
Second original burst signal is amplified and has adjusted the electric arteries and veins of wave row output second by the second Electric Pulse Treatment module
It rushes trigger signal or second original burst signal is converted and exports second laser by the second light pulse processing module
Pulse triggering signal.
9. being used for the two-way pulse triggering method of excimer laser as claimed in claim 8, which is characterized in that the step
S1 comprising steps of
S10 is joined by the pulse that the industrial personal computer configures first original burst signal and second original burst signal
Number, the pulse parameter includes pulse width, pulse frequency and pulse delay time.
10. being used for the two-way pulse triggering method of excimer laser as claimed in claim 9, which is characterized in that the step
Rapid S1 is further comprised the steps of:
S11 determines whether the enable signal is high level when obtaining trigger signal is outer touching signal, when judgement result is
When being, first original burst signal and second original burst signal are issued.
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| CN201910238862.0A CN109921276B (en) | 2019-03-27 | 2019-03-27 | Dual-path pulse triggering device and method for excimer laser |
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