CN209860344U - Double-path pulse trigger device for excimer laser - Google Patents
Double-path pulse trigger device for excimer laser Download PDFInfo
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- CN209860344U CN209860344U CN201920406002.9U CN201920406002U CN209860344U CN 209860344 U CN209860344 U CN 209860344U CN 201920406002 U CN201920406002 U CN 201920406002U CN 209860344 U CN209860344 U CN 209860344U
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Abstract
The utility model provides a double-path pulse trigger device for an excimer laser, which comprises a main control module, an external contact input module, an enable input module, a two-path signal switching control module, a two-path electric pulse signal processing module and a two-path optical pulse signal processing module; the main control module realizes the switching of various different pulse signal output modes of the double-path pulse trigger device, the switching of the output of the optical pulse signal and the electrical pulse signal and the configuration of pulse parameters of two paths of pulses, thereby realizing the accurate synchronization of the double-path pulses of the excimer laser, and simultaneously enabling the excimer laser to freely switch the pulse output modes and the laser pulse output forms based on different purposes, increasing the application range of the excimer laser and ensuring the double-cavity synchronization accuracy of the excimer laser.
Description
Technical Field
The utility model relates to an excimer laser field, a double-circuit pulse trigger device for excimer laser.
Background
The 193nmARF excimer laser is a pulse type gas laser for deep ultraviolet lithography application, has the characteristics of high repetition frequency, large energy, short wavelength and narrow line width, and is an excellent laser light source for a microelectronic lithography system. The laser light emitted by the excimer laser is emitted in the form of pulses, each of which is obtained by electrically shocking a working gas in a discharge chamber by a high-voltage discharge device of the laser. For the dual-cavity laser, the delay time of the two-cavity triggered discharge needs to be adjusted, so that two-way pulse triggering needs to be coordinated and controlled. At the same time, the different chambers and high voltage modules differ in the duration of the pulse triggering the discharge, which requires that the duration of the pulse is adjustable. Some high-voltage discharge modules have severe requirements for trigger pulses, namely, the requirement for output power of the high-voltage discharge modules requires ns-level rise time. In addition, the excimer laser has different pulse modes required by different purposes, so that a two-channel multi-parameter adjustable multi-mode configurable laser pulse trigger device is required to control the high-voltage discharge module, the time for sending out pulses, the frequency for triggering the pulses, the mode for triggering the pulses and the like.
In view of the above, it is an urgent technical problem in the art to provide a dual pulse triggering apparatus and method for excimer laser.
SUMMERY OF THE UTILITY MODEL
An object of the utility model is to provide a double-circuit pulse trigger device for excimer laser can freely switch over pulse output mode and pulse output form when based on different usage, has increased excimer laser's application scope, has guaranteed excimer laser's the synchronous accurate nature of two-chamber.
The purpose of the utility model can be realized by the following technical measures:
the utility model provides a double-circuit pulse trigger device for excimer laser, double-circuit pulse trigger device includes: the system comprises a main control module connected with an industrial personal computer, an external touch input module, an enabling input module, a first signal switching control module and a second signal switching control module which are connected with the main control module, a first electric pulse signal processing module and a first optical pulse signal processing module which are connected with the first signal switching control module, and a second electric pulse signal processing module and a second optical pulse signal processing module which are connected with the second signal switching control module;
the main control module is used for responding to a control signal of the industrial personal computer and simultaneously generating a first original pulse signal, a second original pulse signal, a first control selection signal and a second control selection signal;
the external touch input module is used for receiving an external touch signal in an external trigger mode to generate a trigger signal, and the enable input module is used for outputting the trigger signal when the external touch signal is judged to be at a high level in the external trigger mode;
the first signal switching control module is used for selectively transmitting the first original pulse signal to a first electric pulse signal processing module or a first optical pulse signal processing module according to the first control selection signal, the first electric pulse signal processing module is used for performing power amplification and waveform setting on the first original pulse signal and outputting an electric pulse signal, and the first optical pulse signal processing module is used for converting the first original pulse signal and outputting a laser pulse signal capable of being transmitted in an optical fiber;
the second signal switching control module is configured to selectively transmit the second original pulse signal to a second electrical pulse signal processing module or a second optical pulse signal processing module according to the second control selection signal, where the second electrical pulse signal processing module is configured to perform power amplification and waveform setting on the second original pulse signal and output an electrical pulse signal, and the second optical pulse signal processing module is configured to convert the second original pulse signal and output a laser pulse signal that can be transmitted in an optical fiber.
Furthermore, the main control module comprises an FPGA and an ARM combined chip, the FPGA is used for processing data and generating an original pulse signal, inputting an external touch signal and an enabling signal, and the ARM is used for controlling a pulse signal output mode, configuring pulse parameters and configuring delay time difference between two paths of pulses.
Further, the pulse signal output mode comprises a continuous output mode, a Burst output mode, an external trigger output mode, a Gate output mode and a limited output mode.
Further, the first signal switching control module or the second signal switching control module includes a photoelectric coupling circuit module connected to the main control module and a relay connected to the photoelectric coupling circuit module, the photoelectric coupling circuit module is configured to amplify the first control selection signal or the second control selection signal, and the relay is configured to select a connection path according to the amplified first control selection signal or the amplified second control selection signal.
Further, the first electric pulse signal processing module or the second electric pulse signal processing module comprises a smith trigger, and the smith trigger is used for reversing the original pulse signal, increasing the driving capability of the original pulse signal and setting a waveform to form the electric pulse signal.
Further, the first optical pulse signal processing module or the second optical pulse signal processing module includes a driving circuit unit connected to the first signal switching control module or the second signal switching control module, and an electro-optical conversion head connected to the driving circuit unit, where the driving circuit unit is configured to generate a driving signal of the electro-optical conversion head according to the original pulse signal, and the electro-optical conversion head is configured to convert the original pulse signal into an optical pulse signal transmitted on an optical fiber according to the driving signal.
Furthermore, the two-way pulse triggering device further comprises a linear power supply conversion module connected with a PCI bus of the industrial personal computer, and the linear power supply conversion module is used for converting direct current acquired from the PCI into a direct current power supply with smaller voltage ripples.
The utility model has the advantages that the utility model provides a double-path pulse trigger device for an excimer laser, which comprises a main control module, an external contact input module, an enable input module, a two-path signal switching control module, a two-path electric pulse signal processing module and a two-path light pulse signal processing module; the main control module realizes the switching of various different pulse signal output modes of the double-path pulse trigger device, the switching of the output of the optical pulse signals and the electrical pulse signals and the configuration of pulse parameters of the two paths of pulses, thereby realizing the accurate synchronization of the double-path pulses of the excimer laser, and simultaneously enabling the excimer laser to freely switch the pulse output mode, the laser pulse output form and the pulse signal output mode based on different purposes, increasing the application range of the excimer laser and ensuring the double-cavity synchronization accuracy of the excimer laser.
Drawings
FIG. 1 is a diagram of an excimer laser structure according to an embodiment of the present invention;
fig. 2 is a structural diagram of a dual pulse trigger device of an excimer laser according to an embodiment of the present invention;
fig. 3 is a circuit diagram of a signal control switching module according to an embodiment of the present invention;
fig. 4 is a circuit diagram of an electrical pulse signal processing module according to an embodiment of the present invention;
fig. 5 is a circuit diagram of an optical pulse signal processing module according to an embodiment of the present invention;
fig. 6 is a flowchart of a first method for dual pulse triggering of an excimer laser according to an embodiment of the present invention;
fig. 7 is a flowchart of a second method for dual pulse triggering of an excimer laser according to an embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more clearly understood, the present invention will be described in further detail with reference to the accompanying drawings and specific embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the invention and are not intended to limit the invention.
In order to make the description of the present disclosure more complete and complete, the following description is given for illustrative purposes with respect to the embodiments and specific examples of the present invention; it is not intended to be the only form in which the embodiments of the invention may be practiced or utilized. The embodiments are intended to cover the features of the various embodiments as well as the method steps and sequences for constructing and operating the embodiments. However, other embodiments may be utilized to achieve the same or equivalent functions and step sequences.
The principle of the double-path pulse trigger device for the excimer laser of the utility model is that the main control module is composed of two chips of FPGA and ARM, the FPGA (Field-Programmable Gate Array) and the ARM (advanced RISC machines) are matched to realize a plurality of different pulse signal output modes of the double-path pulse trigger device, the switching of the output of the optical pulse signal and the electrical pulse signal and the configuration of pulse parameters of the two-path pulse, wherein the specific pulse parameters comprise the delay time, the pulse width and the pulse output frequency of the two-path pulse, so as to realize the accurate synchronization of the two-path pulse of the excimer laser, meanwhile, the excimer laser can freely switch the pulse output mode and the pulse output form (light pulse output or electric pulse output) based on different purposes, the application range of the excimer laser is enlarged, and the double-cavity synchronization accuracy of the double-cavity excimer laser is ensured.
Referring to fig. 1, fig. 1 shows a structure diagram of an excimer laser according to an embodiment of the present invention. The dual-cavity excimer laser comprises a master control system industrial personal computer 1 of the laser. The industrial personal computer 1 is connected to the pulse trigger device 3 via a pci (peripheral component interconnect) bus 2. The pulse trigger device 3 sends a first original pulse signal and a second original pulse signal, and after the first original pulse signal and the second original pulse signal trigger the corresponding first high-voltage discharge module 4 and second high-voltage discharge module 5 to charge and discharge through the corresponding first magnetic pulse control module 6 and second magnetic pulse control module 8, the working gas in the corresponding first laser cavity 7 and second laser cavity 9 is electrically shocked to send laser.
Referring to fig. 2, fig. 2 shows a structure diagram of a dual pulse trigger device of an excimer laser according to an embodiment of the present invention. The pulse trigger device comprises a main control module 10, wherein a core chip of the pulse trigger device is XC7Z020 of XLINX company of a chip with an FPGA + ARM framework, and is responsible for setting a mode, responding to the operation of an upper computer, generating a first original pulse signal and a second original pulse signal and the like. The PCI bus golden finger 12 is connected with the PCI bus 2 of the industrial personal computer to communicate with the industrial personal computer 1. In order to ensure the working stability of the whole circuit and the precision of pulse signals, the power supply of each module adopts a linear power supply for power supply. And a linear power conversion module 11, which is used for converting the 5V switching power signal obtained from the PCI into a 1-way linear 3.3V power supply and a 3-way linear 5V power supply. Wherein, the 3.3V linear power supply supplies power for the main control unit module, the two 5V linear power supplies respectively supply power for the two pulse signal processing modules, and the one 5V linear power supply supplies power for other modules. The first signal switching control circuit 13 and the second signal switching control circuit 14 implement switching between optical pulse signal output and electrical signal pulse output of the first original pulse and the second original pulse by the first control selection signal and the second control selection signal sent by the main control module 10. In the figure, 15 is a first electrical pulse signal processing module, which is responsible for performing power amplification and waveform tuning on a first original pulse signal, and outputting the first electrical pulse signal through a bnc (bayonet Nut connector) interface. The first optical pulse signal processing module 16 is responsible for converting the first original pulse signal into a laser signal that can be transmitted in an optical fiber, and outputting the first optical pulse signal through an optical fiber head. In the figure, the second electrical pulse signal processing module 17 is responsible for performing power amplification and waveform setting on the second original pulse signal, and outputting the second electrical pulse signal through the BNC interface. The second optical pulse signal processing module 18 is responsible for converting the second original pulse signal into a laser signal that can be transmitted in the optical fiber, and outputting the second optical pulse signal through the optical fiber head. In the figure, the external touch input module 19 includes an external trigger interface and a conditioning circuit, and is responsible for receiving an external touch signal in an external trigger mode. The input module 20 is enabled in the figure, and the input enable signal is transmitted to the FPGA, and in the external trigger mode, when the signal is at a high level, the external trigger signal is determined as a valid signal.
The utility model discloses a host system 10 is by the chip of FPGA and ARM framework, and FPGA is responsible for the processing of PCI bus data, the production of first original pulse signal, the original pulse signal of second, first control select signal and second control select signal, the input of outer trigger signal and enable signal, the original pulse signal of first original pulse signal and second produces according to the delay time of two way pulses, that is to say: the second path of signal is generated after delaying a period of time compared with the first path of signal; the ARM is responsible for controlling pulse parameters, controlling the output mode of pulse signals and controlling the delay between two paths of pulses.
The ARM controls the pulse parameters by comprising: for the control of the pulse width, the adjustment of the pulse frequency and the delay between two pulse trigger signals are realized. This control is implemented in ARM, with each pulse being implemented by three timer interrupts. And controlling the FPGA in the interruption so as to send out an original pulse signal. Finally, the output pulse width is adjustable from 1us to 100us, and the resolution is adjusted to 1 us; the pulse output frequency is 1-6000Hz adjustable, and the adjustment resolution is 1 Hz; the delay between the two paths of pulse signals is adjustable between-500 ns and 500ns by controlling the FPGA to output two paths of pulses through a timer in the ARM according to the delay time set by a user through an industrial personal computer, and the resolution is adjusted to be 1 ns.
The main control module is controlled through the selection of the industrial personal computer to realize the switching of different pulse signal modes, the main control module realizes the output of different pulse signal modes through the mutual matching of the FPGA and the ARM, five pulse signal output modes are introduced here, and the specific realization is as follows:
the first mode is as follows: continuous output mode
The mode belongs to an internal trigger mode, the output of the pulse is the continuous output of the pulse in the FPGA controlled by a timer in the ARM, and the mode is a basic mode of pulse triggering. When the industrial personal computer is switched to the continuous output mode, the timer of 3 control pulse parameters in the ARM starting program in the main control module is realized.
And a second mode: burst output mode
This mode is a mode often employed in actual work for semiconductor lithography, and belongs to the internal trigger mode. Pulse output in the FPGA is controlled through a timer in the ARM, a Burst output mode of a pulse signal mainly relates to control of Burst parameters (Burst pulse number, Burst interval, Burst number and Burst sequence interval), and when the industrial personal computer is switched to the Burst output mode, the timer in the ARM is started in the main control module to interrupt so as to control pulse output in the FPGA.
And a third mode: external trigger output mode
This mode is also a mode often used in actual work of semiconductor lithography, and an external trigger signal is usually given by a lithography machine. The pulse output is not controlled by the card, but by receiving an external trigger signal. When the enable signal is high level, the device sends out a pulse signal every time it receives an external trigger signal. The function is directly realized by the logic of the FPGA and does not pass through the ARM.
And a fourth mode: gate output mode
The mode belongs to an internal trigger mode, when the industrial personal computer is switched to the mode, the double-path pulse trigger device receives a Gate pulse signal through the enabling input signal channel and sends out a Burst pulse trigger signal. The function receives a Gate pulse signal through the FPGA, the ARM controls the FPGA to output Burst, and finally the FPGA outputs a corresponding pulse trigger signal.
And a fifth mode: defining output modes
The mode is similar to the mode IV in function, when the industrial personal computer sets the device to be switched to the mode, after the FPGA receives the Gate signal, the ARM controls the FPGA to output a fixed pulse number or a pulse in a period of time according to the setting. The function is also realized by ARM programming and FPGA logic together.
In the working process, all parameters of the five pulse output modes can set the double-path pulse trigger device through a PCI bus of the industrial personal computer, and the function of communication with the PCI bus is realized by the FPGA.
Referring to fig. 3, fig. 3 shows a circuit diagram of a signal control switching module according to an embodiment of the present invention. In the figure, 32 is a photoelectric coupling circuit module, which can amplify the driving capability of the control selection signal 30 of the main control module 10 to control the operation of the relay 33. The operation of the relay 33 determines whether the original pulse signal sent by the main control module 10 is transmitted to the first electrical pulse signal processing module 15 or the second electrical pulse signal processing module 17, or is transmitted to the first optical pulse signal processing module 16 or the second optical pulse signal processing module 18.
Referring to fig. 4, fig. 4 shows a circuit diagram of an electrical pulse signal processing module according to an embodiment of the present invention. Fig. 4 is a block diagram of the circuit configuration of the first electrical pulse signal processing module 15 and the second electrical pulse signal processing module 17 in fig. 2. The original pulse signal 21 generated by the main control module 10 and selected by the circuit of the module first signal control switching module 13 or the second signal control switching module 14 in fig. 3 is inverted by the smith trigger 22, and simultaneously, the driving capability is increased and the waveform is set, so that the original pulse signal meets a certain driving capability and the requirement that the rising edge is less than 20 ns. The electrical pulse signal is sent to the BNC interface 24 for output through the current limiting resistor 23 and the ESD module 25.
Referring to fig. 5, fig. 5 shows a circuit diagram of an optical pulse signal processing module according to an embodiment of the present invention. Fig. 5 is a block diagram of the circuit configuration of the first optical pulse signal processing module 16 and the second optical pulse signal processing module 18 in fig. 2. The original pulse signal generated by the main control module 10 passes through the original pulse signal 26 selected by the circuit of the module first signal control switching module 13 or the second signal control switching module 14 in fig. 3, and the driving circuit 27 of the electro-optical conversion module generates the driving signal 28 of the electro-optical conversion module, so as to drive the electro-optical conversion head 29 to operate, thereby generating the laser pulse signal transmitted on the optical fiber.
Referring to fig. 6, fig. 6 shows a flowchart of a dual pulse triggering method for an excimer laser according to a first embodiment of the present invention. The method comprises the following steps:
in step S1, acquiring a trigger signal and an enable signal according to the pulse signal output mode selected by the industrial personal computer, and sending a first original pulse signal, a second original pulse signal, a first control selection signal and a second control selection signal according to the trigger signal and the enable signal;
in step S2, selectively transmitting the first original pulse signal to the first electrical pulse signal processing module or the first optical pulse signal processing module according to the first control selection signal, and selectively transmitting the second original pulse signal to the second electrical pulse signal processing module or the second optical pulse signal processing module according to the second control selection signal;
in step S3, the first electrical pulse processing module amplifies the first original pulse signal and sets the waveform line to output the first electrical pulse trigger signal, or the first optical pulse processing module converts the first original pulse signal and outputs the first laser pulse trigger signal,
the second electric pulse processing module amplifies the second original pulse signal and sets a wave line to output a second electric pulse trigger signal, or the second optical pulse processing module converts the second original pulse signal and outputs a second laser pulse trigger signal.
Referring to fig. 7, fig. 7 is a flowchart illustrating a two-way pulse triggering method for an excimer laser according to a second embodiment of the present invention.
Furthermore, pulse parameters including pulse width, pulse frequency and pulse delay time can be configured through the industrial personal computer according to different purposes. The output pulse width is 1-100us adjustable, and the resolution is adjusted to 1 us; the pulse output frequency is 1-6000Hz adjustable, and the adjustment resolution is 1 Hz; the delay between the two paths of pulse signals is adjustable between-500 ns and 500ns, and the adjustment resolution is 1 ns. See step S10 of fig. 7 in particular.
Furthermore, different pulse selection output modes with different purposes are different, when the external trigger output mode is switched, the trigger signal is acquired as the external trigger signal, the enable signal is judged to be high level, and the original pulse signal is sent out. See step S11 of fig. 7 in particular.
The above description is only exemplary of the present invention and should not be taken as limiting the scope of the present invention, as any modifications, equivalents, improvements and the like made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (7)
1. A dual pulse triggering mechanism for an excimer laser, the dual pulse triggering mechanism comprising: the system comprises a main control module connected with an industrial personal computer, an external touch input module, an enabling input module, a first signal switching control module and a second signal switching control module which are connected with the main control module, a first electric pulse signal processing module and a first optical pulse signal processing module which are connected with the first signal switching control module, and a second electric pulse signal processing module and a second optical pulse signal processing module which are connected with the second signal switching control module;
the main control module is used for responding to a control signal of the industrial personal computer and simultaneously generating a first original pulse signal, a second original pulse signal, a first control selection signal and a second control selection signal;
the external touch input module is used for receiving an external touch signal in an external trigger mode to generate a trigger signal, and the enable input module is used for outputting the trigger signal when the external touch signal is judged to be at a high level in the external trigger mode;
the first signal switching control module is used for selectively transmitting the first original pulse signal to a first electric pulse signal processing module or a first optical pulse signal processing module according to the first control selection signal, the first electric pulse signal processing module is used for performing power amplification and waveform setting on the first original pulse signal and outputting an electric pulse signal, and the first optical pulse signal processing module is used for converting the first original pulse signal and outputting a laser pulse signal capable of being transmitted in an optical fiber;
the second signal switching control module is configured to selectively transmit the second original pulse signal to a second electrical pulse signal processing module or a second optical pulse signal processing module according to the second control selection signal, where the second electrical pulse signal processing module is configured to perform power amplification and waveform setting on the second original pulse signal and output an electrical pulse signal, and the second optical pulse signal processing module is configured to convert the second original pulse signal and output a laser pulse signal that can be transmitted in an optical fiber.
2. The dual pulse trigger device of claim 1, wherein the main control module comprises an FPGA and an ARM combined chip, the FPGA is configured to process data and generate an original pulse signal, an input external contact signal and an enable signal, and the ARM is configured to control a pulse signal output mode, configure pulse parameters and configure a delay time difference between the dual pulses.
3. The dual pulse triggering apparatus for an excimer laser as set forth in claim 2, wherein the pulse signal output mode includes a continuous output mode, a Burst output mode, an external trigger output mode, a Gate output mode, and a defined output mode.
4. The dual pulse trigger device according to claim 3, wherein the first signal switching control module or the second signal switching control module comprises a photocoupling circuit module connected to the main control module and a relay connected to the photocoupling circuit module, the photocoupling circuit module is configured to amplify the first control selection signal or the second control selection signal, and the relay is configured to select a turn-on path according to the amplified first control selection signal or the amplified second control selection signal.
5. The dual pulse trigger device according to claim 4, wherein the first or second electrical pulse signal processing module comprises a Smith trigger for reversing the original pulse signal while increasing the driving capability of the original pulse signal and shaping the waveform to form the electrical pulse signal.
6. The dual pulse trigger device according to claim 5, wherein the first optical pulse signal processing module or the second optical pulse signal processing module comprises a driving circuit unit connected to the first signal switching control module or the second signal switching control module, and an electro-optical conversion head connected behind the driving circuit unit, the driving circuit unit is configured to generate a driving signal for the electro-optical conversion head according to the original pulse signal, and the electro-optical conversion head is configured to convert the original pulse signal into an optical pulse signal transmitted on an optical fiber according to the driving signal.
7. The dual-path pulse trigger device of claim 6, further comprising a linear power conversion module connected to a PCI bus of the industrial computer for converting the DC power obtained from the PCI to a DC power with small voltage ripple.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109921276A (en) * | 2019-03-27 | 2019-06-21 | 北京科益虹源光电技术有限公司 | A kind of two-way pulse triggering means and method for excimer laser |
| CN111541487A (en) * | 2020-04-22 | 2020-08-14 | 四川思创优光科技有限公司 | Networking method of multimode fiber laser and multimode fiber laser |
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2019
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109921276A (en) * | 2019-03-27 | 2019-06-21 | 北京科益虹源光电技术有限公司 | A kind of two-way pulse triggering means and method for excimer laser |
| CN109921276B (en) * | 2019-03-27 | 2024-03-19 | 北京科益虹源光电技术有限公司 | Dual-path pulse triggering device and method for excimer laser |
| CN111541487A (en) * | 2020-04-22 | 2020-08-14 | 四川思创优光科技有限公司 | Networking method of multimode fiber laser and multimode fiber laser |
| CN111541487B (en) * | 2020-04-22 | 2021-12-24 | 四川思创优光科技有限公司 | Networking method of multimode fiber laser and multimode fiber laser |
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