CN109900420B - Miniaturized cold atom vacuum pressure sensing system - Google Patents
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Abstract
The invention discloses a miniaturized cold atom vacuum pressure sensing system. The system comprises a Li atom emitter, a beam shaping detection device, a cold atom vacuum pressure induction cavity and a vacuum isolation cavity. The incident laser is diffracted by utilizing the triangular nanometer grating to generate six different light beams, wherein three mutually vertical inward light beams are vertically reflected by the reflector, and pass through the quarter-wave plate on the reflector twice to generate opposite polarization correlation light beams. The three inward beams and the opposite beams thereof are used as cooling beams to form a three-dimensional magneto-optical trap with an electrified saddle-shaped anti-Helmholtz coil, and incident Li atoms are cooled and captured. And measuring the collision loss rate of the imprisoned cold atoms to obtain the vacuum pressure of the ultrahigh/extremely high vacuum environment to be measured. The invention effectively solves the problems of large scale and difficult carrying of the current laboratory cold atom vacuum standard system, provides a miniaturized cold atom vacuum pressure sensing system, constructs an integrated chip-level system and is easy for engineering application.
Description
Technical Field
The invention relates to the technical field of vacuum measurement and instruments and meters, in particular to a miniaturized cold atom vacuum pressure sensing system.
Background
Cold atoms are ideal metering tools in the ultra-high (UHV) and ultra-high (XHV) vacuum fields, the currently mainly developed laboratory-level Cold Atom Vacuum Standard (CAVS) is relatively large in scale, occupying about 2 square meters of area of an optical platform, because laser cooling and atom capture use many large elements, first, atoms can only be trapped in an extra-high pressure environment, usually requiring a large vacuum chamber with an ion pump or a getter pump; secondly, in the core of laser cooling, a three-dimensional magneto-optical trap (3D-MOT) needs to cool atoms from six directions along three spatial axes and realize final capture; third, the experimental environment requires that good magnetic field stability be maintained, typically by using large coils that can eliminate local magnetic fields and gradients. Although the experimental grade cold atom vacuum standard has a reduced volume compared with the current mainstream hot cathode ionization gauge ultrahigh/ultrahigh vacuum measurement method, and can be used as a primary vacuum standard without calibration, the experimental condition is harsh, and the experimental standard is not small and exquisite enough, still has the problem of difficult carrying, and has a lot of inconvenience in use.
Disclosure of Invention
In view of the above, the present invention aims to innovate the prior art, and provides a miniaturized cold atom vacuum pressure system, which effectively meets the strict requirements on experimental conditions and environment in the current ultra-high/ultra-high vacuum pressure measurement, has an overall length of 20cm and a small occupied area, constructs an integrated chip-level system, is convenient to carry, and is easy for engineering application.
In order to achieve the purpose, the invention adopts the following technical scheme:
a miniaturized cold atom vacuum pressure sensing system is characterized in that the vacuum pressure sensing system is a portable and movable integrated chip system and comprises a Li atom emitter, a light beam shaping detection device, a cold atom vacuum pressure sensing cavity and a vacuum isolation cavity.
Further, the Li atom emitter is used for heating and emitting Li atoms; the beam shaping detection device separates incident laser (18) from fluorescence (22) returned by cold atoms in a magneto-optical trap through a half-reflecting and half-transmitting lens (11), and converts the incident laser into collimated circular polarized light (19) through a quarter-wave plate (9) and a collimating lens (8); the cold atom vacuum pressure sensing cavity is used for diffracting the straight circular polarized light beam through the triangular nanometer grating (4) to generate six different light beams, wherein three mutually vertical inward light beams (20) are vertically reflected through the reflector (6) and pass through the quarter-wave plate (9) on the reflector twice to generate opposite-polarization correlation light beams (21). Three inward beams (20) and respective opposite beams (21) thereof are used as cooling beams to form a three-dimensional magneto-optical trap system with an electrified saddle-shaped anti-Helmholtz coil (5), incident Li atoms are cooled and captured into the magneto-optical trap, and the collision loss rate of the trapped cold atoms is measured to obtain the vacuum pressure of the ultrahigh/extremely high vacuum environment to be measured; the vacuum isolation cavity (17) is used for isolating the ultrahigh/ultrahigh vacuum environment to be tested from the cold atom vacuum pressure sensing cavity.
Further, the Li atom emitter comprises a base (1), a Li atom metal source (2) and a mechanical shutter (3) for controlling the flow of the metal source. The base (1) is used for fixing the cold atom vacuum pressure device; the Li atomic metal source (2) is a low-outgassing alkali metal distributor made of 3D printing titanium; the mechanical shutter (3) is used for controlling the flow of Li atoms so as to prevent unnecessary injection caused by collision of hot atoms and cold atoms in a metal source and more accurately measure the service life of the cold atoms in the magneto-optical trap.
Further, the miniaturized cold atom vacuum pressure sensing system comprises a support frame (10), a miniature laser emitter (12), a quarter-wave plate (9), a collimating lens (8), a half-reflecting and half-transmitting mirror (11), a transmission optical fiber (13), an optical filter (14), a focusing lens (15) and an imaging lens (16). The support frame (10) is used for supporting the semi-reflecting and semi-transparent mirror (11); the micro laser transmitter (12) transmits a laser beam (18) to a system; the quarter-wave plate (9) and the collimating lens (8) convert incident laser light (18) into collimated circularly polarized light (19); the half-reflecting and half-transmitting mirror (11) separates incident laser (18) from fluorescence (22) returned by cold atoms in the magneto-optical trap; the transmission fiber is used for transmitting the reflected fluorescence (22); the filter (14) is used for filtering interference light in the fluorescence signal; the focusing lens (15) is used for focusing fluorescence; the imaging lens (16) is used for detecting the returned fluorescence.
Further, the miniaturized cold atom vacuum pressure sensing system comprises a support frame (10), a permanent magnet (7), a triangular nanometer grating (4), a quarter-wave plate (9), a reflector (6) and a saddle-shaped anti-Helmholtz coil (5). The support frame (10) is used for supporting the reflector (6); the permanent magnet (7) is used for maintaining the stability of the magnetic field.
Furthermore, the triangular nanometer grating (4) is made of superposed equilateral triangles, collimated circular polarized light (19) advancing along the Z direction is diffracted into six light beams propagating in different directions, an included angle of 45 degrees is formed between each light beam and the-Z axis, three edges of the triangular diffraction grating (4) form three grating parts, each part respectively generates two light beams, one light beam points to the center of the magnetic light trap, the other light beam points to the outside, and three inward light beams (20) of the three grating parts are perpendicular to each other.
Furthermore, the quarter-wave plate (9) and the reflector (6) vertically reflect three mutually perpendicular inward light beams (20) generated by the triangular nano grating (4), and each light beam passes through the quarter-wave plate on the reflector twice to generate three opposite light beams (21) with the polarization opposite to that of the original light beam.
Further, the saddle-shaped anti-Helmholtz coil (5) generates a gradient magnetic field when energized.
Further, three inward beams (20) generated by the triangular nano grating (4) and three opposite-polarization beams (21) generated by the quarter-wave plate (9) and the reflector (6) according to claim 7 are used as cooling beams, a three-dimensional magneto-optical trap system is formed under the gradient magnetic field according to claim 8, the emitted Li atoms are cooled and captured into the magneto-optical trap, the number of fluorescence returned by the cold atoms is displayed through an imaging lens (16), so that the collision loss rate of the trapped cold atoms is obtained, and the vacuum pressure of the to-be-detected ultrahigh/extremely-high vacuum environment is obtained through the collision loss rate of the trapped cold atoms.
The miniaturized cold atom vacuum pressure sensing system has the advantages that:
the device provided by the invention diffracts incident laser by adopting the triangular nano grating to generate three inward light beams, and the three inward light beams are matched with the quarter wave plate and the reflector to form a three-dimensional magneto-optical trap system to cool atoms and capture the atoms into the magneto-optical trap. Compared with the traditional magneto-optical trap design, the structure greatly reduces the occupied volume of the magneto-optical trap part in the whole device while keeping higher measurement precision, and is beneficial to constructing a movable integrated chip-level system.
The device of the invention adopts the low-outgassing alkali metal distributor made of 3D printing titanium, and the Li vapor is generated while the degassing rate is kept low. Li atoms are used as laser cooling atoms, different from common Rb atom laser cooling atoms, the saturated vapor pressure of the Li atoms at room temperature is low enough to avoid the pollution of the Li atoms to a vacuum chamber, and the saturated vapor pressure of the Li atoms at 150 ℃ is enough to support the Li atoms not to be exhausted in the baking of the vacuum chamber, thereby being beneficial to the application of the device in the aspect of engineering.
The device has compact integral mechanical structure, and each structural part of the device can be disassembled to avoid the damage and dislocation of the structure when the vacuum chamber is baked. The intrinsic characteristics of the saddle-type anti-Helmholtz coil are utilized, such as compact structure, low requirement on installation precision, better uniformity of a gradient magnetic field, reduction of electric power consumption required for forming a magneto-optical trap, small overall occupied area and easy carrying, and the miniaturization and the engineering can be effectively realized.
Drawings
FIG. 1 is a schematic cross-sectional view of a miniaturized cold atom vacuum pressure system according to the present invention.
The device comprises a base 1, a Li atom metal source 2, a mechanical shutter 3, a triangular nano-grating 4, a saddle-shaped anti-Helmholtz coil 5, a reflector 6, a permanent magnet 7, a collimating lens 8, a quarter-wave plate 9, a support 10, a semi-reflecting and semi-transmitting lens 11, a miniature laser emitter 12, a transmission optical fiber 13, an optical filter 14, a focusing lens 15, an imaging lens 16, a vacuum isolation cavity 17, incident laser 18, collimated circular polarized light 19, inward light diffracted by the triangular nano-grating 20, opposite light polarized opposite to the inward light 21 and cold atom returned fluorescence 22.
FIG. 2 is a schematic diagram of the diffraction of incident laser by the triangular nano-grating of the present invention.
Fig. 3 is a schematic structural view of a saddle-shaped helmholtz coil of the present invention.
Detailed Description
The invention is described in detail below by way of example with reference to the accompanying drawings.
The principle of the invention for measuring the vacuum pressure of the ultrahigh/ultrahigh vacuum environment is that atoms cooled and captured in the three-dimensional magneto-optical trap collide with background gas molecules to exponentially attenuate, and the collision loss rate and the background gas molecules of cold atomsThe density of the background gas and the relative collision energy in the collision cross-section is related to the relative velocity. The collision loss rate and the pressure are mutually linked through an ideal gas law, so that the vacuum pressure of the vacuum environment can be obtained by measuring the collision loss rate of cold atoms, and the Boltzmann constant k is required to be traced to when the vacuum pressure of the vacuum environment is obtained on the basis of quantum mechanics and the classical molecular collision theoryBVanderWaals Dispersion coefficient CiMass m of background gas atoms or molecules at room temperaturehIn physical quantities such as Planck constant h and the like, the method for measuring cold atom vacuum pressure can be used as a primary vacuum standard without calibration, the method provided by the invention adopts a triangular nano grating to diffract incident laser to generate three inward beams, and the three inward beams are matched with a quarter wave plate and a reflector to form a three-dimensional magneto-optical trap system to cool atoms and capture the atoms into the magneto-optical trap, so that a movable integrated chip-level system is constructed, the overall length is only 20cm, the method is convenient to carry, and the method is an ideal method for measuring the vacuum pressure in an ultrahigh/ultrahigh vacuum environment in the current vacuum metrology.
The embodiment of the invention provides a miniaturized cold atom vacuum pressure sensing system which comprises a base 1, a Li atom metal source 2, a mechanical shutter 3, a triangular nano grating 4, a magneto-optical trap 5, a quarter-wave plate and reflector 6, a permanent magnet 7, a collimating lens 8, a quarter-wave plate 9, a support frame 10, a semi-reflecting and semi-transparent lens 11, a micro laser emitter 12, a transmission optical fiber 13, an optical filter 14, a focusing lens 15, an imaging lens 16, a vacuum isolation cavity 17, incident laser 18, collimated circular polarized light 19, inward light beams 20 diffracted by the triangular nano grating, opposite light beams 21 with opposite polarization to the inward light beams, and fluorescence 22 returned by cold atoms.
In order to realize the high measurement accuracy of the cold atom vacuum pressure sensor on the basis of miniaturization, the system needs to bear the temperature heated to 150 ℃ in vacuum to remove the moisture on the surface, and the system can not influence the pressure of the background gas and must reduce the influence on a vacuum chamber coupled with the system.
FIG. 1 is a schematic cross-sectional view of a miniaturized cold atom vacuum pressure system according to the present invention.
The base 1 is used for fixing the cold atom vacuum pressure sensing device.
The Li atom metal source 2 is a low-outgassing alkali metal distributor made of 3D printing titanium, generates Li vapor and simultaneously keeps a low degassing rate for heating and emitting Li atoms, and the saturated vapor pressure of Li at room temperature is 10-17Pa, low enough to avoid contamination of the vacuum chamber. At 150 ℃, the saturated vapor pressure of Li is 10-9Pa, sufficient to support it from being consumed in the baking in the vacuum chamber.
The mechanical shutter 3 is used for controlling the flow of Li atoms so as to prevent unnecessary injection caused by collision between hot atoms and cold atoms in the metal source in the process of measuring the collision loss rate, and the service life of the cold atoms in the magneto-optical trap is measured more accurately.
The triangular nano-grating 4 is made of a superimposed equilateral triangle, which diffracts the collimated circularly polarized light 19 traveling in the Z direction into six beams propagating in different directions, each beam has an angle θ of 45 ° with the-Z axis, three sides of the triangular diffraction grating form three grating portions, each portion generates two beams, one beam is directed to the center of the magnetic optical trap and the other beam is directed outward, and three inward beams 20 of the three grating portions are perpendicular to each other (refer to fig. 2).
A saddle-shaped anti-helmholtz coil 5 (see fig. 3) generates a magnetic field when energized, providing a gradient magnetic field for the three-dimensional magneto-optical trap system.
The reflector 6 vertically reflects three inward beams 20 perpendicular to each other and generated by the triangular nano grating 4, each beam passes through a quarter-wave plate on the reflector twice to generate three opposite beams 21 opposite to the original beam in polarization, the three opposite beams and the saddle-shaped anti-Helmholtz coil 5 form a three-dimensional magneto-optical trap system, and the three-dimensional magneto-optical trap system uses a neodymium rare earth magnet installed in vacuum, can be removed in the baking process, avoids the influence of the change of the residual magnetization intensity on the measurement precision of vacuum pressure, and is used for cooling and trapping cold atoms.
The permanent magnet 7 is used to maintain the stability of the magnetic field.
The collimator lens 8 is used to collimate the incident laser light.
The quarter-wave plate 9 is used for changing the incident laser into circularly polarized light, and can generate light beams with opposite polarization by passing through the quarter-wave plate twice.
The supporting frame 10 is used for supporting the reflector 6 and the half-reflecting and half-transmitting mirror 11.
The half-reflecting and half-transmitting mirror 11 separates the incident laser light 18 from the fluorescence 22 returned by the cold atoms in the magneto-optical trap to prevent the contact of the two from influencing the vacuum pressure measurement result.
The micro laser transmitter 12 is used to transmit a laser beam 18 to the system.
The transmission optical fiber 13 is used for transmitting the fluorescence 22 returned by the cold atoms in the magneto-optical trap reflected by the half-reflecting and half-transmitting mirror 11.
The filter 14 is used to filter interfering light in the fluorescence signal.
The focusing lens 15 is used for focusing the fluorescent signal.
The imaging lens 16 displays the quantity of fluorescence returned by the cold atoms to measure the collision loss rate of the imprisoned cold atoms, and the vacuum pressure of the ultrahigh/extremely high vacuum environment to be measured is obtained according to the collision loss rate of the imprisoned cold atoms.
The vacuum isolation cavity 17 is used for isolating the ultrahigh/ultra-high vacuum environment to be measured from the cold atom vacuum pressure sensing cavity.
The specific implementation steps are as follows:
step one, a micro laser 12 emits a laser beam 18 to a system, the laser beam passes through a half-reflecting half-transmitting mirror 11 and is converted into collimated circular polarized light 19 when passing through a quarter-wave plate 9 and a collimating lens 8, and the collimated circular polarized light 19 is transmitted to a triangular nano grating 4;
step two, the triangular nanometer grating 4 diffracts the collimated circular polarized light 19 to generate six different light beams, wherein three inward light beams 20 are vertical to each other, three opposite light beams 21 with opposite polarization to the inward light beams 20 are generated through the reflector 6 and the quarter-wave plate 9 on the reflector, three opposite light beams and a gradient magnetic field generated by the saddle-shaped anti-Helmholtz coil 5 form a three-dimensional magneto-optical trap system, and the permanent magnet 7 maintains the stability of the magnetic field;
step three, heating Li atoms by a Li atom metal source 2, then emitting the Li atoms, entering a three-dimensional magneto-optical trap system through a mechanical shutter 3, cooling the emitted Li atoms to the magnitude of-mu K, and trapping the Li atoms in the magneto-optical trap;
step four, cooling and enabling the captured Li atoms and background gas molecules to collide with each other to emit atomic fluorescence 22, wherein the mechanical shutter 3 needs to be closed to prevent unnecessary injection caused by collision between hot atoms and cold atoms in a metal source in the process of measuring the collision loss rate, the atomic fluorescence 22 passes through the half-reflecting half-transparent mirror 11, interference light is filtered by the transmission optical fiber 13 through the filter 14, then the atomic fluorescence is focused through the focusing lens 15 and finally transmitted to the imaging lens 16, and the imaging lens displays the quantity of fluorescence to obtain the loss rate of the trapped cold atoms;
step five, according to the collision loss rate of the imprisoned cold atoms obtained by measurement, using H2As background gas molecules, and when the temperature T is room temperature, the vacuum pressure p of the ultrahigh/ultra-high vacuum system to be measured can be obtained by the formula (1):
(1) in the formula (I), the compound is shown in the specification,
when in use
Then, get ≈ γi。
(1) In the formula (I), the compound is shown in the specification,
the invention relates to a method for preparing a compound H2As background gas molecules, Li is used as an atomic source.
Wherein:
i-represents a different kind of gas,
pipartial pressures of different gas molecules in Pa;
t-ambient temperature in K;
Ci-vanderWaals dispersion factor;
m0,mirespectively representing the mass of trapped Li cold atoms, the background gas molecule H2Mass in kg;
d is the confining depth of the cold atoms, and the unit is m;
-collision loss rate of caged Li cold atoms;
α0αi-represents respectively Li cold atom and H2Electrical polarizability of the molecule;
ρ0and ρ i-represents Li cold atom and H, respectively2The number of valence electrons of the molecule;
kB，
0-represents Boltzmann constant, Planck constant and dielectric constant, respectively.
The loss rate of the trapped cold atoms is obtained according to the quantity of fluorescence displayed by the imaging lens, and the vacuum pressure p of the ultrahigh/extremely high vacuum environment can be obtained through the formula (1).
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the invention, and any modifications, equivalents and improvements made within the spirit and principles of the present invention are intended to be included within the scope of the present invention.
Claims (2)
1. A miniaturized cold atom vacuum pressure sensing system is characterized in that the vacuum pressure sensing system is a portable and movable integrated chip system, and comprises a Li atom emitter, a beam shaping detection device, a vacuum isolation cavity and a vacuum pressure sensing cavity;
the Li atom emitter comprises a base (1), a Li atom metal source (2) and a mechanical shutter (3), wherein the base (1) is used for fixing the cold atom vacuum pressure device; the Li atomic metal source (2) is a low-outgassing alkali metal distributor made of 3D printing titanium; the mechanical shutter (3) is used for controlling the flow of Li atoms so as to prevent unnecessary injection caused by collision between hot atoms and cold atoms in a metal source and more accurately measure the service life of the cold atoms in the magneto-optical trap;
the beam shaping detection device comprises a first support frame, a miniature laser emitter (12), a first quarter-wave plate, a collimating lens (8), a semi-reflecting and semi-transmitting lens (11), a transmission optical fiber (13), an optical filter (14), a focusing lens (15) and an imaging lens (16), wherein the first support frame is used for supporting the semi-reflecting and semi-transmitting lens (11); the micro laser transmitter (12) transmits a laser beam (18) to a system; the first quarter-wave plate and the collimating lens (8) convert incident laser light (18) into collimated circularly polarized light (19); the half-reflecting and half-transmitting mirror (11) separates incident laser (18) from fluorescence (22) returned by cold atoms in the magneto-optical trap; the transmission fiber is used for transmitting the reflected fluorescence (22); the filter (14) is used for filtering interference light in the fluorescence signal; the focusing lens (15) is used for focusing fluorescence; the imaging lens (16) is used for detecting the returned fluorescence;
the vacuum isolation cavity (17) is used for isolating the ultrahigh/ultrahigh vacuum environment to be tested from the cold atom vacuum pressure sensing cavity;
the vacuum pressure induction cavity comprises a second support frame, a permanent magnet (7), a triangular nano grating (4), a second quarter wave plate, a reflector (6) and a saddle-shaped anti-Helmholtz coil (5), and the saddle-shaped anti-Helmholtz coil (5) generates a gradient magnetic field after being electrified; the second support frame is used for supporting the reflector (6); the permanent magnet (7) is used for maintaining the stability of the magnetic field.
2. The miniaturized cold atom vacuum pressure sensing system according to claim 1, wherein the triangular nano-grating (4) is made of a superimposed equilateral triangle which diffracts the collimated circularly polarized light (19) traveling in the Z direction into six beams propagating in different directions, each beam having an angle of 45 degrees with the-Z axis, three edges of the triangular diffraction grating (4) form three grating sections, each section generating two beams, one directed to the center of the magnetic trap and the other directed outward, the three inward beams (20) of the three grating sections being perpendicular to each other;
the second quarter-wave plate and the reflector (6) vertically reflect three mutually vertical inward light beams (20) generated by the triangular nano grating (4), and each light beam passes through the second quarter-wave plate on the reflector twice to generate three opposite light beams (21) with the polarization opposite to that of the original light beam;
three inward beams (20) generated by the triangular nano grating (4) and three opposite-polarization beams (21) generated by the second quarter-wave plate and the reflector (6) are used as cooling beams to form a three-dimensional magneto-optical trap system under the gradient magnetic field, emergent Li atoms are cooled and captured into the magneto-optical trap, the number of fluorescence returned by cold atoms is displayed through an imaging lens (16), the collision loss rate of imprisoned cold atoms is obtained, and the vacuum pressure of the ultrahigh/extremely high vacuum environment to be measured is calculated according to the imprisoned cold atom collision loss rate.
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| CN114354057B (en) * | 2022-01-05 | 2023-03-24 | 华东师范大学 | Sensing device and method for precisely measuring pressure intensity of cold atom vacuum system |
| CN115479695B (en) * | 2022-09-21 | 2024-04-12 | 中国科学院上海光学精密机械研究所 | Cold atomic speed marking and filtering method |
| CN117091628B (en) * | 2023-10-18 | 2024-02-20 | 华中光电技术研究所(中国船舶集团有限公司第七一七研究所) | Double-magneto-optical trap divergent laser alignment adjustment system |
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| US7944317B2 (en) * | 2008-08-11 | 2011-05-17 | Honeywell International Inc. | Cold atom micro primary standard |
| CN102538775B (en) * | 2010-12-24 | 2014-08-06 | 清华大学 | Cold atom beam interference gyro device |
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| CN103700417B (en) * | 2013-12-20 | 2015-12-09 | 北京航天时代光电科技有限公司 | A kind of two-dimensional magnetic optical trap system |
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