CN109894965B - 一种用于数控铣床研磨环状工件的辅助装置及研磨方法 - Google Patents
一种用于数控铣床研磨环状工件的辅助装置及研磨方法 Download PDFInfo
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CN113043075B (zh) * | 2021-03-15 | 2022-05-27 | 宁波江丰电子材料股份有限公司 | 一种不锈钢刚性环的研磨方法 |
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DE4004367A1 (de) * | 1990-02-13 | 1991-08-14 | Ernst Reimers | Antriebsanordnung |
EP0827808A2 (en) * | 1996-08-27 | 1998-03-11 | Speedfam Co., Ltd. | Apparatus for applying an urging force to a wafer |
JP2000202760A (ja) * | 1999-01-13 | 2000-07-25 | Toshiba Mach Co Ltd | Cmp研磨装置のポリシングヘッド |
CN201807919U (zh) * | 2010-10-12 | 2011-04-27 | 哈尔滨电机厂有限责任公司 | 易变形环状工件数控加工夹具装置 |
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CN204673473U (zh) * | 2015-06-16 | 2015-09-30 | 李志明 | 一种机床用智能行程调整系统 |
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CN108687652A (zh) * | 2018-05-29 | 2018-10-23 | 李涵 | 一种半导体芯片制造工艺 |
CN209774328U (zh) * | 2019-04-11 | 2019-12-13 | 哈尔滨汽轮机厂有限责任公司 | 一种用于数控铣床研磨环状工件的辅助装置 |
Family Cites Families (1)
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JP4730944B2 (ja) * | 2004-06-04 | 2011-07-20 | コマツNtc株式会社 | 多頭研削盤及び多頭研削盤を用いた研削方法 |
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- 2019-04-11 CN CN201910290719.6A patent/CN109894965B/zh active Active
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DE4004367A1 (de) * | 1990-02-13 | 1991-08-14 | Ernst Reimers | Antriebsanordnung |
EP0827808A2 (en) * | 1996-08-27 | 1998-03-11 | Speedfam Co., Ltd. | Apparatus for applying an urging force to a wafer |
JP2000202760A (ja) * | 1999-01-13 | 2000-07-25 | Toshiba Mach Co Ltd | Cmp研磨装置のポリシングヘッド |
CN201807919U (zh) * | 2010-10-12 | 2011-04-27 | 哈尔滨电机厂有限责任公司 | 易变形环状工件数控加工夹具装置 |
CN103547412A (zh) * | 2011-05-18 | 2014-01-29 | 维也纳技术大学 | 具有工件收纳部和补偿质量的振动装置 |
CN103317432A (zh) * | 2013-06-25 | 2013-09-25 | 河南华创通信设备有限公司 | 一种研磨方法及专用于该研磨方法的研磨头、研磨装置 |
CN203305048U (zh) * | 2013-06-25 | 2013-11-27 | 河南华创通信设备有限公司 | 光纤活动连接器插芯的研磨装置 |
CN103447862A (zh) * | 2013-08-30 | 2013-12-18 | 哈尔滨汽轮机厂有限责任公司 | 铣车复合加工中心柔性工装 |
CN204673473U (zh) * | 2015-06-16 | 2015-09-30 | 李志明 | 一种机床用智能行程调整系统 |
CN106181746A (zh) * | 2016-07-29 | 2016-12-07 | 中船动力有限公司 | 柴油机气缸盖的启动阀孔研磨工装 |
EP3292950A1 (de) * | 2016-09-12 | 2018-03-14 | DECKEL MAHO Pfronten GmbH | Kühlmittelzufuhreinrichtung und schleifwerkzeug mit einer kühlmittelzufuhreinrichtung für eine werkzeugmaschine |
CN206066197U (zh) * | 2016-09-30 | 2017-04-05 | 海宁运城制版有限公司 | 版辊研磨设备 |
CN108687652A (zh) * | 2018-05-29 | 2018-10-23 | 李涵 | 一种半导体芯片制造工艺 |
CN209774328U (zh) * | 2019-04-11 | 2019-12-13 | 哈尔滨汽轮机厂有限责任公司 | 一种用于数控铣床研磨环状工件的辅助装置 |
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Inventor after: Liu Lei Inventor after: Ma Mingyang Inventor after: Zheng Baiqiang Inventor after: Wang Hongwei Inventor after: Che Limin Inventor after: Chen Guohong Inventor after: Dong Litao Inventor after: Sun Zhaoliang Inventor after: Liu Shang Inventor before: Ma Mingyang Inventor before: Liu Lei Inventor before: Zheng Baiqiang Inventor before: Wang Hongwei Inventor before: Che Limin Inventor before: Chen Guohong Inventor before: Dong Litao Inventor before: Sun Zhaoliang Inventor before: Liu Shang |