CN109870394B - Double-beam aerosol particle concentration detection device - Google Patents
Double-beam aerosol particle concentration detection device Download PDFInfo
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- CN109870394B CN109870394B CN201811649299.8A CN201811649299A CN109870394B CN 109870394 B CN109870394 B CN 109870394B CN 201811649299 A CN201811649299 A CN 201811649299A CN 109870394 B CN109870394 B CN 109870394B
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Abstract
The invention discloses a double-beam aerosol particle concentration detection device which comprises a light source, a flow channel space through which aerosol passes, a collecting unit for collecting light emitted by the light source and then injecting the light into the flow channel space, and a collecting unit for collecting scattered light signals, wherein the collecting unit comprises a collimating lens for converting the light emitted by the light source into parallel light, a semi-transmitting mirror for forming the parallel light into two first beams and two second beams, a reflecting mirror for adjusting the first beams and the second beams to be parallel, and a first lens for collecting the first beams and the second beams to spot focuses, and the spot focuses are positioned in the flow channel space. Because the invention does not need to adopt a light barrier, no extra reflected light is generated, and the scattered light with smaller scattering angle can be collected, the invention can collect as many effective scattered light signals as possible while avoiding the influence of stray light signals, thereby improving the detection accuracy.
Description
Technical Field
The invention relates to a double-beam aerosol particle concentration detection device.
Background
The aerosol photometer is a detection device for measuring the concentration of aerosol particles in air, has important application in the performance detection of the filtering efficiency of an air filter, and is widely applied to the leak detection test of a clean room ventilation filtering system.
The scattering property of light is detected by using minute particles. After the light irradiates the tiny particles in the air, a part of the light continues to propagate along the original path, and the other part of the light is scattered. The size of the scattered light is proportional to the concentration of particles in the air. The higher the concentration of particles in air, the stronger the scattered light signal. The concentration of aerosol particles in air can be measured by the intensity of the scattered light signal.
Scattered light generated after the particles are irradiated with light propagates in all directions in space, wherein the scattered light in the same direction as the propagation direction of the incident light is called forward scattered light, and the forward scattered light signal is strongest. The prior aerosol photometer firstly selects forward scattered light as a detection signal. However, the propagation direction of the forward scattered light is the same as that of the incident illumination light, and the two light beams are overlapped, so that the difficulty of signal detection is increased.
To prevent interference of the forward scattered light by the illumination source, a barrier is placed in front of the signal converging lens. The illumination source and the forward scattered light can be separated by a barrier. The light barrier can block most of the illumination light sources, but also blocks the light sources with smaller forward scattering angles, so that the collection efficiency of scattered light is reduced. In addition, the barrier may still produce some reflected light, with additional stray light signals.
Disclosure of Invention
The invention aims to provide a double-beam aerosol particle concentration detection device with clearer astigmatic signals.
In order to achieve the above purpose, the invention adopts the following technical scheme:
the utility model provides a double-beam aerosol particle concentration detection device, its includes light source, the runner space that aerosol passed through, will the light that the light source sent is gathered the back and is launched into the collection unit of runner space and collection scattered light signal, collect the unit including with the collimating lens that light that the light source sent turns into parallel light, with the semi-transparent mirror of parallel light shaping two first light beams and second light beam, with first light beam with the second light beam is adjusted to the speculum that parallels, and with first light beam and second light beam collect to the first lens of facula focus, the facula focus is located in the runner space.
Preferably, it further comprises a first optical trap to capture the first beam after passing through the spot focus and a second optical trap to capture the second beam after passing through the spot focus.
Preferably, an included angle between the semi-transparent mirror and an optical axis of the collimating lens is 45 °.
Preferably, the semi-transparent mirror and the reflecting mirror are respectively located at two sides of the optical axis of the first lens.
Preferably, the first light beam and the second light beam are parallel to the optical axis of the first lens, and the light intensity of the first light beam and the light intensity of the second light beam are equal.
Preferably, the aerosol dispenser further comprises an air inlet nozzle and an air outlet nozzle which are arranged at two ends of the flow channel space, wherein the aerosol enters the flow channel space from the air inlet nozzle, and leaves the flow channel space from the air outlet nozzle.
Preferably, the collection unit comprises a photodetector and a second lens that directs scattered light into the photodetector.
Further preferably, the optical axes of the first lens and the second lens coincide with each other.
Preferably, the collecting unit further comprises a detection circuit for processing the electrical signal of the photodetector and outputting an aerosol particle concentration value.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
because the invention does not need to adopt a light barrier, no extra reflected light is generated, and the scattered light with smaller scattering angle can be collected, the invention can collect as many effective scattered light signals as possible while avoiding the influence of stray light signals, thereby improving the detection accuracy.
Drawings
FIG. 1 is a schematic diagram of the present invention.
In the above figures: 1. a light source; 2. a flow passage space; 3. a collimating lens; 4. a semi-transparent mirror; 5. a reflecting mirror; 6. a first lens; 7. a first optical trap; 8. a second optical trap; 9. a second lens; 10. a photodetector; 11. an air inlet nozzle; 12. an air outlet nozzle; 13. a first light beam; 14. a second light beam; 15. a spot focus; 16. scattering light.
Detailed Description
The invention is further described below with reference to an embodiment shown in the drawings in which:
referring to fig. 1, a dual beam aerosol particle concentration detection apparatus includes a light source 1, a flow channel space 2, a collimator lens 3, a semi-transparent mirror 4, a reflecting mirror 5, a first lens 6, a first optical trap 7, a second optical trap 8, a second lens 9, a photodetector 10, and a detection circuit (not shown).
The aerosol enters the flow channel space 2 from the air inlet nozzle 11 and leaves the flow channel space 2 from the air outlet nozzle 12, and the air inlet nozzle 11 and the air outlet nozzle 12 are arranged at two ends of the flow channel space 2.
The light emitted by the light source 1 is converted into a beam of parallel light after passing through the collimating lens 3, the parallel light is injected into the half-reflecting mirror 4, the half of the parallel light passes through the half-reflecting mirror 4 to form a first light beam 13, the other half of the parallel light is reflected by the half-reflecting mirror 4 to form a second light beam 14, the second light beam 14 is mutually parallel to the first light beam 13 after being reflected by the reflecting mirror 5, and the parallel light beams are symmetrically distributed on two sides of the optical axis of the first lens 6, and the first light beam 13 and the second light beam 14 are converged at a facula focus 15 of the flow channel space 2 by the first lens 6.
When aerosol flows through the spot focus 15, the converged first light beam 13 and second light beam 14 are irradiated, part of the first light beam 13 and second light beam 14 continuously go through the aerosol and are respectively captured by the first light trap 7 and the second light trap 8, the other part of the first light beam and the second light beam are scattered by particles in the aerosol, most of scattered light 16 in the part is deflected forward continuously at a deflection angle, and the scattered light 16 which is continuously forwarded is converged on the surface of the photoelectric detector 10 by the second lens 9 and is converted into an electric signal by the photoelectric detector 10.
The detection circuit is used for processing the electric signal, and the aerosol particle concentration can be measured according to the strength of the electric signal.
According to the embodiment, the first light beam 13, the second light beam 14 and the forward scattered light are automatically separated, a light barrier is not needed, the forward scattered light with a smaller scattering angle is conveniently collected for detection, the utilization efficiency of the forward scattered light is improved, and therefore the detection accuracy is improved. And the whole structure of the device is symmetrical, so that the assembly is convenient.
The above embodiments are provided to illustrate the technical concept and features of the present invention and are intended to enable those skilled in the art to understand the content of the present invention and implement the same, and are not intended to limit the scope of the present invention. All equivalent changes or modifications made in accordance with the spirit of the present invention should be construed to be included in the scope of the present invention.
Claims (7)
1. The utility model provides a double-beam aerosol particle concentration detection device, its includes light source, the runner space that aerosol passed through, will the light that the light source sent gathers the back and penetrates into the collection unit in runner space and collection scattered light signal's collection unit, its characterized in that: the collecting unit comprises a collimating lens for converting light emitted by the light source into parallel light, a semi-transparent mirror for shaping the parallel light into two first light beams and second light beams, a reflecting mirror for adjusting the first light beams and the second light beams to be parallel, and a first lens for collecting the first light beams and the second light beams to a facula focus, wherein the facula focus is positioned in the flow channel space;
the collecting unit comprises a photodetector and a second lens for guiding scattered light to the photodetector;
the dual beam aerosol particle concentration detection device further comprises a first optical trap for capturing the first beam after passing through the spot focus and a second optical trap for capturing the second beam after passing through the spot focus.
2. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the included angle between the semi-transparent mirror and the optical axis of the collimating lens is 45 degrees.
3. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the semi-transparent mirror and the reflecting mirror are respectively positioned at two sides of the optical axis of the first lens.
4. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the first light beam and the second light beam are parallel to the optical axis of the first lens, and the light intensity of the first light beam and the light intensity of the second light beam are equal.
5. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the aerosol dispenser also comprises an air inlet nozzle and an air outlet nozzle which are arranged at two ends of the flow channel space, wherein the aerosol enters the flow channel space from the air inlet nozzle, and leaves the flow channel space from the air outlet nozzle.
6. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the optical axes of the first lens and the second lens coincide with each other.
7. The dual beam aerosol particle concentration detection apparatus of claim 1, wherein: the collecting unit also comprises a detection circuit for processing the electric signals of the photoelectric detector and outputting aerosol particle concentration values.
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| CN201811649299.8A CN109870394B (en) | 2018-12-30 | 2018-12-30 | Double-beam aerosol particle concentration detection device |
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| CN109870394B true CN109870394B (en) | 2023-10-10 |
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| CN111239012B (en) * | 2020-03-31 | 2021-05-28 | 山东大学 | Aerosol particle detection system and method |
| CN111855544B (en) * | 2020-07-31 | 2021-11-26 | 上海微电子装备（集团）股份有限公司 | Fluorescence imaging device and imaging method thereof |
| CN113358533A (en) * | 2021-06-11 | 2021-09-07 | 宋卓 | Reflection structure, particle measuring device comprising same and detection method thereof |
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