CN103364318B - By the optical system of Rotational Symmetry ellipse chamber mirror detection of particles size and shape - Google Patents

By the optical system of Rotational Symmetry ellipse chamber mirror detection of particles size and shape Download PDF

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Publication number
CN103364318B
CN103364318B CN201310307346.1A CN201310307346A CN103364318B CN 103364318 B CN103364318 B CN 103364318B CN 201310307346 A CN201310307346 A CN 201310307346A CN 103364318 B CN103364318 B CN 103364318B
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China
Prior art keywords
chamber mirror
ellipse chamber
light
rotational symmetry
shape
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CN201310307346.1A
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CN103364318A (en
Inventor
戴兵
戴未然
袁银男
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Nantong University
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Nantong University
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Priority to CN201310307346.1A priority Critical patent/CN103364318B/en
Priority claimed from CN201410717955.9A external-priority patent/CN104458510B/en
Priority claimed from CN201410717953.XA external-priority patent/CN104359804B/en
Publication of CN103364318A publication Critical patent/CN103364318A/en
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Abstract

The invention discloses the optical system of a kind of Rotational Symmetry ellipse chamber mirror detection of particles size and shape, laser beam is after optical fiber Homogenization Treatments, form the parallel beam had good uniformity, and by rational light path layout globally cavity mirror system major axes orientation be injected in the mirror of Rotational Symmetry ellipse chamber, a focus of Rotational Symmetry ellipse chamber mirror is converged at sample air-flow, sample air-flow is along importing perpendicular to system spindle direction, particle forward-scattering signal is accepted by a photomultiplier, in order to the main signal as grain size measurement.Another focus of scattered light except forward direction directive Rotational Symmetry ellipse chamber mirror in large angular region, the object lens after this focus, as planar upper one side shape CCD, are mainly used in the shape information detecting granularity.Layout of the present invention is ingenious, rational in infrastructure, good working effect.

Description

By the optical system of Rotational Symmetry ellipse chamber mirror detection of particles size and shape
Technical field
The present invention relates to a kind of optical sensor.
Background technology
Detection of particulates technology plays vital effect in scientific research, industrial site, atmosphere environment supervision.Its detection technique mainly contains optical method, electric method, KINETIC METHOD, wherein optical method extensively, does not contact sample, fast, can robotization be applied the most widely in real time with measurement range, and typical instrument is as kurt instrument, Climet and ROYCO corpuscular counter, domestic laser particle counter etc.But these instruments can only be used for measuring the size of particulate, seldom relate to the detection of shape; Moreover, also there is the poor defect of optical uniformity accepting angular region limitation, photosensitive area in these instruments.For this reason, in patent [CN201110346535.0], devise the optical sensor of a kind of Rotational Symmetry ellipse chamber mirror, for measuring size and the shape of particulate, this sensor effectively overcomes and accepts angular region confinement problems, there has also been certain improvement to the optical uniformity of photosensitive area, but because large-angle scatter optical receiver only adopts three photoelectric tubes being positioned at triangular apex, information acquisition amount is very few, have impact on the accuracy of detection of shape, also creates certain impact to the size detection of particulate; In addition, for improving the light path layout complex structure that beam uniformity adopts in this design, the impacts such as transport are subject to.For this reason, the object of the present invention is to provide a kind of rational in infrastructure, the optical system using Rotational Symmetry ellipse chamber mirror detection of particles size and shape of good working effect.
Summary of the invention
The object of the present invention is to provide a kind of optical system by Rotational Symmetry ellipse chamber mirror detection of particles size and shape of rational in infrastructure, favorable working performance.
Technical solution of the present invention is:
The optical system of a kind of Rotational Symmetry ellipse chamber mirror detection of particles size and shape, it is characterized in that: comprise Rotational Symmetry ellipse chamber mirror, ellipse chamber mirror is made of metal, and inside surface is coated with reflectance coating through polishing, the housing of ellipse chamber mirror is fixedly mounted with laser instrument, and form by optical fiber homogeneity collimation the parallel beam had good uniformity after certain light path layout, along inciding photosensitive area with the long axis direction of mirror Rotational Symmetry ellipse chamber, Rotational Symmetry ellipse chamber mirror, incident beam and sample air-flow are compiled in photosensitive area, an i.e. focus place of Rotational Symmetry ellipse chamber mirror, accepted by photomultiplier after the first diaphragm after forward scattering light transmission lens, former direction incident beam incident light trap, described light trapping is made of metal, and inwall scribbles light absorbent, and be fixed in the outer frame body of ellipse chamber mirror, scattered light in large angular region except forward scattering light converges at another focus of the ellipse chamber mirror being provided with the second diaphragm, then after lens, be detected device face shape CCD accept, the setting of the second diaphragm enters detector face shape CCD in order to prevent parasitic light, and the signal that detector face shape CCD receives amplifies after exporting, process.
The light beam of laser instrument injection converges at an optical fiber interface after the first condenser lens, and this interface is the incident end face of described optical fiber, and laser instrument, the first condenser lens, optical fiber interface are fixed on the housing of ellipse chamber mirror; The output terminal of optical fiber is connected with another interface, the light beam sent forms parallel beam after collimation lens, after diaphragm and catoptron, make light beam along inciding photosensitive area with ellipse chamber mirror long axis direction again, another interface of described optical fiber, collimation lens are also fixed on the housing of ellipse chamber mirror; Laser instrument is the semiconductor laser of power 50 ~ 100mW.
Optical fiber homogeneity device adopts the luminous energy Transmission Fibers of the circular graded index profile detoured 2.5 weeks, and on the rounded housing being looped around Rotational Symmetry ellipse chamber mirror.
It is photomultiplier that forward scattering light accepts detector, and except forward scattering light, large angular region inscattering photo-detector is face shape CCD, and these two kinds of detectors are positioned on the major axis of ellipse chamber mirror, point occupy both sides, Tuo Qiangjing center.
The inlet, outlet passage of sample gas is vertical with the main shaft of system, is set with dilution pure gas passage outward at sample gas inlet channel, and dilution pure gas channel outlet exports closer to photosensitive area than sample gas inlet channel; The diameter of inlet, outlet passage is 2mm.
Principle of work of the present invention is: the light beam of semiconductor laser injection is through the input end face of the first lens focus in the luminous energy Transmission Fibers of a graded index profile, this optical fiber along circular rings around capable 2.5 weeks of Rotational Symmetry ellipse chamber mirror, fibre diameter 2mm, around radius 0.12m, output terminal light beam forms parallel beam after collimation lens, and the having good uniformity of its light beam, uniform light spots Top-hat factor can reach 0.82, this light beam is incident to a focus place of Rotational Symmetry ellipse chamber mirror, and incident direction is the long axis direction of this ellipse chamber mirror, meet at this focus place and diluted sample air-flow, namely photosensitive area is formed.Owing to substantially increasing the homogeneity of photosensitive area light beam, thus substantially reduce due to the particulate impact different in position, photosensitive area; Owing to have employed pure gas dilution method, decrease particulate the possibility of photosensitive area overlap and remaining in chamber, improve the accuracy of counting micro particles; Due to the design that the large angular region adopted based on forward direction accepts, both ensure that the main information gathering Particle Scattering light, substantially reduced again the impact of particulate form and spatial orientation.Forward scattering light is accepted by the photomultiplier with superperformance, and other scattered light quilt cover shape CCD in large angular region accepts, and is the size that auxiliary resultant signal size is used for determining particulate based on photomultiplier acknowledge(ment) signal, CCD acknowledge(ment) signal total value; The signal of face shape CCD is then used for determining the shape of particulate.
Compared with prior art, its remarkable advantage is in the present invention: 1, adopt face shape CCD, greatly can improve the detection accuracy of particulate form.2, adopt ingenious and rational optical fiber homogenising light beam layout, substantially increase the beam uniformity of laser beam, form impact that is succinct, convenient and practical, that do not transported simultaneously.3, the combined type particle size detection method that accepts of photomultiplier and face shape CCD, while guarantee accepts forward scattering main information, also because the photoelectric tube that CCD comparatively passes by acquires more information, and improve the precision of particle size measurement to a certain extent.4, adopt Rotational Symmetry ellipse chamber mirror to accept scattered light, farthest add and accept angular region, reduce the impact of particulate form and spatial orientation largely.
Accompanying drawing explanation
Below in conjunction with drawings and Examples, the invention will be further described.
Fig. 1 is the structural representation of one embodiment of the invention.
Fig. 2 is the concrete layout schematic diagram of optical fiber homogenising light beam in Fig. 1.
Embodiment
The optical system of a kind of Rotational Symmetry ellipse chamber mirror detection of particles size and shape, comprise Rotational Symmetry ellipse chamber mirror 20, ellipse chamber mirror is made of metal, and inside surface is coated with reflectance coating through polishing, the housing of ellipse chamber mirror is fixedly mounted with laser instrument, and form by optical fiber homogeneity collimation the parallel beam had good uniformity after certain light path layout, along inciding photosensitive area with the long axis direction of mirror Rotational Symmetry ellipse chamber, Rotational Symmetry ellipse chamber mirror, incident beam and sample air-flow are compiled in photosensitive area, an i.e. focus place of Rotational Symmetry ellipse chamber mirror, accepted by photomultiplier 11 after the first diaphragm 10 after forward scattering light transmission lens 12, former direction incident beam is through catoptron 9 incident light trap 13, described light trapping is made of metal, and inwall scribbles light absorbent, and be fixed in the outer frame body of ellipse chamber mirror, scattered light in large angular region except forward scattering light converges at another focus of the ellipse chamber mirror being provided with the second diaphragm 17, then after lens 18, be detected device face shape CCD19 accept, the setting of the second diaphragm enters detector face shape CCD in order to prevent parasitic light, and the signal that detector face shape CCD receives amplifies after exporting, process.
The light beam that laser instrument 1 penetrates converges at an optical fiber interface 3 after the first condenser lens 2, and this interface is the incident end face of described optical fiber, and laser instrument, the first condenser lens, optical fiber interface are fixed on the housing of ellipse chamber mirror; The output terminal of optical fiber is connected with another interface 4, the light beam sent forms parallel beam after collimation lens 5, after the 3rd diaphragm 6 and catoptron 7,8, make light beam along inciding photosensitive area with ellipse chamber mirror long axis direction again, another interface of described optical fiber, collimation lens are also fixed on the housing of ellipse chamber mirror; Laser instrument is the semiconductor laser of power 50 ~ 100mW.
Optical fiber homogeneity device adopts the luminous energy Transmission Fibers of the circular graded index profile detoured 2.5 weeks, and on the rounded housing being looped around Rotational Symmetry ellipse chamber mirror.
It is photomultiplier that forward scattering light accepts detector, and except forward scattering light, large angular region inscattering photo-detector is face shape CCD, and these two kinds of detectors are positioned on the major axis of ellipse chamber mirror, point occupy both sides, Tuo Qiangjing center.
The inlet, outlet passage 14,16 of sample gas is vertical with the main shaft of system, is set with dilution pure gas passage 15 outward at sample gas inlet channel, and dilution pure gas channel outlet exports closer to photosensitive area than sample gas inlet channel; The diameter of inlet, outlet passage is 2mm.

Claims (1)

1. the optical system by Rotational Symmetry ellipse chamber mirror detection of particles size and shape, it is characterized in that: comprise Rotational Symmetry ellipse chamber mirror, ellipse chamber mirror is made of metal and inside surface is coated with reflectance coating through polishing, the housing of ellipse chamber mirror is fixedly mounted with laser instrument, the light beam of laser instrument injection converges at an optical fiber interface after the first condenser lens, this interface is the incident end face of described optical fiber, and laser instrument, the first condenser lens, optical fiber interface are fixed on the housing of ellipse chamber mirror; The output terminal of optical fiber is connected with another interface, the light beam sent forms parallel beam after collimation lens, after diaphragm and catoptron, make light beam along inciding photosensitive area with ellipse chamber mirror long axis direction again, another interface of described optical fiber, collimation lens are also fixed on the housing of ellipse chamber mirror; Incident beam and sample air-flow are compiled in photosensitive area, an i.e. focus place of Rotational Symmetry ellipse chamber mirror, accepted by photomultiplier after the first diaphragm after forward scattering light transmission lens, former direction incident beam incident light trap, described light trapping is made of metal, and inwall scribbles light absorbent, and be fixed in the outer frame body of ellipse chamber mirror; Scattered light in large angular region except forward scattering light converges at another focus of the ellipse chamber mirror being provided with the second diaphragm, then after lens, be detected device face shape CCD accept, the setting of the second diaphragm enters detector face shape CCD in order to prevent parasitic light, and the signal that detector face shape CCD receives amplifies after exporting, process; Laser instrument is the semiconductor laser of power 50 ~ 100mW.
CN201310307346.1A 2013-07-22 2013-07-22 By the optical system of Rotational Symmetry ellipse chamber mirror detection of particles size and shape Expired - Fee Related CN103364318B (en)

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CN201310307346.1A CN103364318B (en) 2013-07-22 2013-07-22 By the optical system of Rotational Symmetry ellipse chamber mirror detection of particles size and shape
CN201410717955.9A CN104458510B (en) 2013-07-22 2013-07-22 Improve detection of particles size and the optical system of shape of detection accuracy
CN201410717953.XA CN104359804B (en) 2013-07-22 2013-07-22 Succinctly, the easily optical system of detection of particles size and shape

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CN201410717955.9A Division CN104458510B (en) 2013-07-22 2013-07-22 Improve detection of particles size and the optical system of shape of detection accuracy

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CN104297115B (en) * 2014-09-26 2017-02-08 深圳职业技术学院 Detection method for number density of atmospheric particulate matters PM2.5
JP6438319B2 (en) * 2015-02-18 2018-12-12 アズビル株式会社 Particle detector
CN106018193A (en) * 2016-05-18 2016-10-12 中兴仪器(深圳)有限公司 Light scattering measurement system and method for particulate matters
CN106526873B (en) * 2017-01-11 2018-11-20 哈尔滨工业大学 Variable orifice diameter annular beam generation device based on ellipsoidal mirror

Citations (4)

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Publication number Priority date Publication date Assignee Title
US4286876A (en) * 1979-01-02 1981-09-01 Coulter Electronics, Inc. Apparatus and method for measuring scattering of light in particle detection systems
WO1989004472A1 (en) * 1987-11-10 1989-05-18 The Secretary Of State For Defence In Her Britanni Portable particle analysers
CN101162194A (en) * 2007-11-16 2008-04-16 苏州华达仪器设备有限公司 Optical senser of measurement dust particle
CN102519850A (en) * 2011-11-07 2012-06-27 南通大学 Optical sensor capable of detecting granularity and shape feature of particles in real time

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4286876A (en) * 1979-01-02 1981-09-01 Coulter Electronics, Inc. Apparatus and method for measuring scattering of light in particle detection systems
WO1989004472A1 (en) * 1987-11-10 1989-05-18 The Secretary Of State For Defence In Her Britanni Portable particle analysers
CN101162194A (en) * 2007-11-16 2008-04-16 苏州华达仪器设备有限公司 Optical senser of measurement dust particle
CN102519850A (en) * 2011-11-07 2012-06-27 南通大学 Optical sensor capable of detecting granularity and shape feature of particles in real time

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