CN113358533A - Reflection structure, particle measuring device comprising same and detection method thereof - Google Patents

Reflection structure, particle measuring device comprising same and detection method thereof Download PDF

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Publication number
CN113358533A
CN113358533A CN202110652394.9A CN202110652394A CN113358533A CN 113358533 A CN113358533 A CN 113358533A CN 202110652394 A CN202110652394 A CN 202110652394A CN 113358533 A CN113358533 A CN 113358533A
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China
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light
scattered light
lens
direct light
emergent
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CN202110652394.9A
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Chinese (zh)
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宋卓
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Shanghai Weiran Technology Co ltd
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Individual
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Priority to CN202110652394.9A priority Critical patent/CN113358533A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume, or surface-area of porous materials
    • G01N15/02Investigating particle size or size distribution
    • G01N15/0205Investigating particle size or size distribution by optical means, e.g. by light scattering, diffraction, holography or imaging
    • G01N15/0211Investigating a scatter or diffraction pattern

Abstract

The invention relates to a reflecting structure, a particle measuring device comprising the reflecting structure and a detection method of the particle measuring device, wherein the reflecting structure comprises a mirror body and a hole arranged on the mirror body, and the mirror body is provided with a reflecting surface for reflecting scattered light signals; the hole is used for transmitting emergent direct light, and the center of the hole is coaxial with the optical axis of the emergent direct light. The invention adds the reflection structure to separate direct light signals and scattered light signals generated by the illumination light beams of the particles, and the direct light signals are guided to the position far away from the measuring point of the flow chamber, so that the direct light is eliminated and the scattered light can be received and detected at the same time, thereby avoiding the stray light problem caused by adopting a light shielding rod or a mask, and further improving the signal to noise ratio in the measuring process.

Description

Reflection structure, particle measuring device comprising same and detection method thereof
Technical Field
The invention relates to the technical field of optical equipment, in particular to a reflection structure, a particle measuring device comprising the reflection structure and a detection method of the particle measuring device.
Background
The particle measuring device is used for evaluating the properties of a sample such as size, quantity, material and the like, mainly introduces sample particles into a fluid, then illuminates the fluid by using an illuminating light beam, and when the illuminating light beam enters the fluid, the illuminating light beam interacts with the sample to enable light rays to be scattered out of the fluid from all directions to generate scattered light.
At present, in order to avoid interference of direct light on a scattered light signal, one method is to shield the direct light with a certain angle in the middle of a light path through a light shielding device, so that the scattered light with a larger angle enters a detector, and the other method is to shield the direct light with a corresponding angle by adopting different light shielding regions of a mask, so that the light in a light passing region is received by the detector, so as to realize detection of the scattered light, but the two methods have the following problems:
stray light is easily introduced into an optical system in the measuring device under the influence of the reflection of a light blocking region of the light blocking device or the mask and the scattered light, so that the signal to noise ratio of the whole measuring device is influenced, and the method can only realize the detection of forward scattered light but cannot realize the detection of the backward scattered light.
And (II) the light blocking mode of the light blocking device or the mask plate cannot be used for real-time online adjustment of the light path by means of direct light.
And (III) the mask has high structural design difficulty and high processing complexity.
Disclosure of Invention
In view of the above-mentioned shortcomings of the prior art, it is an object of the present invention to provide a reflective structure, a particle measurement device including the reflective structure, and a detection method thereof, so as to solve one or more problems of the prior art.
In order to achieve the purpose, the technical scheme of the invention is as follows:
a reflective structure characterized by: the reflecting structure comprises
A mirror body having a reflective surface for reflecting scattered light signals;
the hole is arranged on the mirror body and used for transmitting emergent direct light, and the center of the hole is coaxial with the optical axis of the emergent direct light.
The reflecting surface of the mirror body satisfies the following relation when having a single size:
D1=f×tanθ/cosψ
wherein D1The diameter of the reflecting surface is shown, f is the focal length of the lens, theta is the half-acceptance angle of the scattered light signal, and psi is the incident angle of the scattered light signal on the mirror body.
The reflecting surface of the mirror body satisfies the following relation when having at least two dimensions:
L1=f×tanθ/cosψ
L2=f×tanθ
wherein L is1Denotes the length of the reflecting surface, L2Denotes the width of the reflecting surface, f denotes the focal length of the lens, θ denotes the half-acceptance angle of the scattered light signal, and ψ denotes the incident angle of the scattered light signal on the mirror body.
The pore diameter of the pores satisfies the following relation:
D2=f×tanθ/cosψ
wherein D2The aperture of the hole is shown, f is the focal length of the lens, theta is the half divergence angle of the outgoing direct light, and psi is the incident angle of the outgoing direct light on the mirror body.
The center of the hole is coaxial with the center of the mirror body.
The center of the hole is arranged non-coaxially with the mirror body.
A fine particle measuring apparatus, characterized in that: comprises a light source, the reflecting structure, at least one first lens, a flow chamber, a detector and a shielding element
The light source is used for emitting an illumination light beam;
the first lens is used for focusing the illumination light beam to the center of the flow chamber;
the flow chamber is used for enabling liquid drops containing particles to be sequentially irradiated by the illumination light beam and generating emergent direct light and at least one scattered light signal;
the reflecting structure is used for separating the emergent direct light and at least one scattered light signal;
the detector is used for receiving and detecting the scattered light signals;
the shielding element is used for shielding and/or eliminating the emergent direct light.
When the incident direction of the illumination light beam is the same as the emergent direction of the emergent direct light and the scattered light signal, the reflecting structure is arranged between the flow chamber and the shielding element.
When the incident direction of the illumination light beam is opposite to the emergent direction of the emergent direct light and the scattered light signal, the reflecting structure is arranged between the flow chamber and the light source.
The particle measuring device also comprises at least one second lens, and the second lens is arranged between the flow chamber and the reflecting structure and is used for converging the emergent direct light and the scattered light signal into parallel light beams.
The particle measuring device also comprises at least one attenuation sheet and at least one optical filter, wherein the attenuation sheet is used for weakening the light intensity of the scattered light signals; the filter is used for passing specified scattered light signals.
The particle measuring device also comprises at least one third lens, and the third lens is arranged at the emergent end of the optical filter and is used for converging specified scattered light signals passing through the optical filter.
A detection method of a fine particle measuring apparatus, characterized in that:
the light source emits an illumination beam;
illuminating the particle particles with an illumination beam and generating optical signals, wherein the optical signals comprise emergent direct light and scattered light signals;
separating the outgoing direct light and the scattered light signal by a reflecting structure;
the emitted direct light is eliminated by a shielding element and the scattered light signal is received and detected by a detecting element.
Compared with the prior art, the invention has the following beneficial technical effects:
the invention adds a reflection structure to separate direct light signals and scattered light signals generated by illumination light beams of particles, and the direct light signals are guided to a position far away from a measuring point of a flow chamber, so that the direct light is eliminated and the scattered light can be received and detected at the same time, thereby avoiding the stray light problem caused by using a light shielding rod or a mask, and further improving the signal-to-noise ratio in the measuring process.
And (II) further, the detection of forward scattered light signals or backward scattered light signals can be realized by changing the position of the reflecting structure, and compared with the prior art, the method can measure information in multiple dimensions, thereby further enabling more characteristics of the particles to be characterized.
And thirdly, the accurate position of the second lens can be obtained by observing the collimation effect of the emergent direct light, so that the accurate adjustment of the position of the second lens is realized.
And (IV) further, adjusting the posture of the first mirror body or the second mirror body, adjusting the position of the third lens in a matching manner, and adjusting the position of the detector can realize that the convergence focus of the forward scattered light signal or the backward scattered light signal passing through the third lens is positioned at the central position of the detector.
Drawings
Fig. 1 is a schematic structural diagram illustrating a reflection structure, a particle measurement device including the reflection structure, and a detection method thereof according to an embodiment of the invention.
Fig. 2 is a schematic structural diagram illustrating a second reflection structure, a particle measurement device including the second reflection structure, and a detection method thereof according to an embodiment of the invention.
Fig. 3 is a schematic diagram illustrating a relationship between a reflective structure and a second lens in a reflective structure, a particle measurement apparatus including the reflective structure, and a detection method thereof according to an embodiment of the invention.
Fig. 4 is a schematic diagram illustrating a relationship between a reflective structure and a first lens in a second reflective structure, a particle measuring apparatus including the second reflective structure, and a detection method of the particle measuring apparatus according to an embodiment of the invention.
FIG. 5 is a schematic diagram showing an incident angle of an illumination light beam, a divergence angle of forward scattered light and a divergence angle of direct light in a reflection structure, a particle measurement apparatus including the reflection structure and a detection method thereof according to an embodiment of the present invention.
FIG. 6 is a schematic size diagram of a second reflective structure, a particle measurement apparatus including the same, and a detection method thereof according to an embodiment of the invention.
In the drawings, the reference numbers: 100. a light source; 101. a light beam; 102. a first lens; 103. a flow chamber; 104. microparticles; 105. directly irradiating light; 106. a second lens; 1071. a forward scattered light signal; 1072. back-scattered light signals; 108. a shielding element; 109. an attenuation sheet; 110. an optical filter; 111. a third lens; 112. a detector; 20. a reflective structure; 200. a first mirror body; 201. a first hole; 210. a second mirror body; 211. a second aperture.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the reflective structure, the particle measuring device including the reflective structure, and the detecting method thereof according to the present invention will be described in further detail with reference to the accompanying drawings and embodiments. The advantages and features of the present invention will become more apparent from the following description. It is to be noted that the drawings are in a very simplified form and are all used in a non-precise scale for the purpose of facilitating and distinctly aiding in the description of the embodiments of the present invention. To make the objects, features and advantages of the present invention comprehensible, reference is made to the accompanying drawings. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the implementation conditions of the present invention, so that the present invention has no technical significance, and any structural modification, ratio relationship change or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention.
The first embodiment is as follows:
referring to fig. 1, a particle measuring apparatus includes a light source 100, a reflective structure 20, at least one first lens 102, a flow cell 103, a detector 112, and a shielding element 108, wherein the light source 100 is used for emitting an illumination beam; the first lens 102 is used to focus the illumination beam to the center of the flow cell 103; the flow chamber 103 is used for enabling the liquid drops containing the particles to be sequentially irradiated by the illumination light beam and generating direct light and at least one scattered light; the reflecting structure 20 is used for separating the direct light and at least one scattered light; the detector 112 is used for receiving and detecting at least one of the scattered light; the shielding element 108 is used to shield and/or eliminate the direct light.
Specifically, referring to fig. 1, when the incident direction of the illumination light beam is the same as the emergent direction of the direct light and the scattered light, the reflective structure 20 is disposed between the flow chamber 103 and the shielding element 108.
Specifically, in the particle measuring device according to the first embodiment of the present invention, the light source 100 is any one of a hernia lamp, a semiconductor laser, a solid-space laser, or a semiconductor or solid-space laser with a pigtail output, preferably, the particle measuring device according to the first embodiment of the present invention is a selected hernia lamp, and a beam aperture of the light beam 101 output by the hernia lamp is preferably 0.5 to 10 mm.
Further, the light beam 101 is a single monochromatic laser or a plurality of monochromatic lasers with different wavelengths, and in the microparticle measuring device according to the first embodiment of the present invention, the single monochromatic laser is preferably a 488nm laser. Of course, in other embodiments of the present invention, when the light beam 101 is a plurality of monochromatic lasers with different wavelengths, it may be any combination of wavelengths such as 375nm, 405nm, 488nm, 532nm, 561nm, 638nm, etc., or it may be a continuous broad-spectrum collimated light beam, such as visible light in the 400nm to 700nm wavelength band.
Further, in the particle measuring apparatus according to the first embodiment of the present invention, the first lens 102 is preferably a converging lens, a diameter of the converging lens is determined according to a diameter of the incident collimated light beam, a diameter of the converging lens is preferably 4mm to 50mm, a focal length of the converging lens is determined according to a requirement of a converging light spot size required in practice, and in the particle measuring apparatus according to the first embodiment of the present invention, a focal length of the converging lens is preferably 5mm to 50 mm.
Further, referring to fig. 1 and 4, a convergence angle α of the illumination light beam incident from the flow cell 103 is the same as or different from a divergence angle β of the direct light 105 emitted after passing through the flow cell 103 and irradiating the microparticles 104, and an angle range value of the convergence angle α and the divergence angle β is preferably 0 ° to 5 °.
Further, referring to fig. 1 and 4, the acceptance angle γ of forward scattered light 107 exiting flow cell 103 is greater than the divergence angle β of exiting direct light 105.
Further, referring to fig. 1, the particle measuring apparatus further includes at least one second lens 106, preferably, in the particle measuring apparatus according to an embodiment of the present invention, the second lens 106 is preferably a collimator lens, the collimator lens is configured to converge the direct light and the scattered light after passing through the particles into parallel light beams, a focal length of the collimator lens is preferably 20mm (in other embodiments of the present invention, the focal length may be any focal length except for this embodiment), which is determined according to a working distance of collimating the forward scattered light 107 light beam, and a caliber of the collimator lens is preferably 20mm, and the caliber is determined according to a divergence angle of the outgoing forward scattered light 107 and the working distance of the collimator lens.
The specific structure of the reflective structure 20 is described below as follows:
referring to fig. 1, the reflection structure includes a first mirror 200 and a first hole 201 formed on the first mirror 200, the first mirror 200 has a reflection surface for reflecting scattered light, the hole 200 is used for transmitting direct light, an axis of the first hole 201 is coaxial with a central optical axis of the direct light, and in the particle measurement apparatus according to an embodiment of the present invention, an axis of the first hole 201 is coaxial with a center of the first mirror 200. Of course, in other embodiments of the present invention, the axial center of the first hole 201 and the center of the first mirror 200 may be arranged non-coaxially.
Further, with continued reference to FIG. 3, the angle of incidence ψ at which forward scattered light signal 1071 contacts the reflective surface of first mirror 200 is an acute angle in the range of 0-90 °.
Further, the first mirror 200 may be any one of a circle, an ellipse, and a rectangle, in the particle measuring apparatus according to the first embodiment of the present invention, the first mirror 200 is preferably a circle, and the diameter of the first mirror 200 needs to satisfy the following relation:
D 1≥f×tanθ/cosψ1
wherein D1Denotes the diameter of first mirror 200, f denotes the focal length of second lens 106, θ denotes the half light acceptance angle of forward scattered light signal 1071 (i.e., acceptance angle γ of 1/2 forward scattered light signal 1071), ψ1Representing the angle of incidence of forward scattered light signal 1071 on first mirror 200.
The radius r of the second lens 106 can be calculated by multiplying the focal length f of the second lens 106 by the light collection angle θ of the forward scattered light signal 1071, but in other embodiments of the present invention, any remaining unknown quantity can be calculated by knowing the focal length f of the second lens or the light collection angle θ of the forward scattered light signal 1071 and the radius r of the second lens 106.
Specifically, in the reflection structure according to the first embodiment of the present invention, the light receiving angle θ of the forward scattered light signal 1071 is 36 ° (the light receiving angle θ may be any other angle in other embodiments of the present invention), the focal length f of the second lens 106 is 27mm, and the radius r of the second lens 106 is calculated1About 20mm and then according to the angle of incidence ψ of the forward scattered light1Is 45 deg., and the diameter D of the first lens body 200 is finally calculated120mm/cos45 ° ≈ 28.3mm, i.e. the diameter of the first mirror 200 is not less than 28.3 mm.
Further, the first hole 201 of the first mirror body 200, the shape of the first hole 201 may be any one of a circle, an ellipse, and a rectangle, in the particle measuring apparatus according to the first embodiment of the present invention, the shape of the first hole 201 is preferably a circle, and the diameter of the first hole 201 needs to satisfy the following formula:
D2≥f×tanδ/cosη
wherein D2The diameter of the first aperture 201 is shown, δ is the half divergence angle of the outgoing direct light 105 (i.e., the divergence angle β of the outgoing direct light 105 of 1/2), f is the focal length of the second lens 106, and η is the angle of incidence of the collimated outgoing direct light 105 on the first mirror 200.
The product of the focal length f of the second lens 106 and the divergence angle δ of the outgoing direct light 105 can calculate the radius of the collimated outgoing direct light, but of course, in other embodiments of the invention, any two of the focal length f of the second lens, the divergence angle δ of the outgoing direct light 105, and the radius of the collimated outgoing direct light 105 can be calculated as long as the remaining unknowns are known.
In the first embodiment of the present invention, the divergence angle δ of the outgoing direct light 105 in the reflection structure is 10.5 °, the focal length f of the second lens 106 is 27mm, the beam radius of the collimated direct light is calculated to be about 5mm,
specifically, in the first embodiment of the present invention, when the incident angle η of the outgoing direct light 105 in the reflection structure is 45 °, and the beam diameter of the collimated outgoing direct light 105 is 5mm, the diameter of the first hole 201 of the first mirror 200 is not less than 5mm/cos45 ° ≈ 7.1 mm.
In the first embodiment of the present invention, the case that the first mirror 200 is circular is described, and when the first mirror 200 is circular, the diameter of the first mirror 200 is not smaller than the major axis of the elliptical light spot on the reflecting surface. Similarly, when the first mirror 200 is a rectangle, the length of the first mirror 200 is not less than the major axis of the elliptical spot on the reflecting surface, and the width of the rectangle is not less than the minor axis of the elliptical spot on the reflecting surface.
Of course, in other embodiments of the present invention, the shape of the first mirror 200 and the shape of the first hole 201 may be any shape other than the above-described shapes as long as the above-described relational expression is satisfied.
Further, with continued reference to fig. 1, the shielding element 108 is preferably made of black material for shielding and eliminating direct light.
Further, with continued reference to fig. 1, the detector 112 is configured to receive and detect the forward scattered light, preferably, in the particle detecting device according to the embodiment of the present invention, the detector 112 is a PD or APD or PMT photoelectric sensor, the target surface of the detector 112 is larger than the diameter of the light spot collected by the forward scattered light 107, if the detector 112 is circular, the target surface represents the diameter of the circular target surface, and similarly, if the detector 112 is non-circular, the target surface only needs to cover the light spot.
Further, with reference to fig. 1, the particle measuring apparatus further includes at least one attenuation sheet 109 and at least one optical filter 111, wherein the attenuation sheet 109 is used for attenuating the intensity of the forward scattered light, and the optical filter 111 is used for passing through the designated scattered light signal.
Specifically, referring to fig. 1, the attenuation sheet 109 is disposed on the reflection surface of the mirror body 200, and the optical filter 111 is disposed at the exit end of the attenuation sheet 109. Wherein the clear aperture of the attenuation sheet 109 is not smaller than the beam diameter of the forward scattered light 107, and preferably, the beam diameter of the forward scattered light 107 in the particle measuring apparatus according to the embodiment of the present invention is 20mm, so that the clear aperture of the attenuation sheet 109 is not smaller than 20 mm. The attenuation ratio of the attenuation sheet 109 is determined according to the intensity distribution range of the forward scattered light 107 and the dynamic corresponding range of the detector 112, such as OD1, OD2, OD3, and the like.
Specifically, referring to fig. 1 again, the aperture of the filter 111 is not smaller than the beam diameter of the forward scattered light 107, and preferably, the beam diameter of the forward scattered light 107 in the particle measuring apparatus according to an embodiment of the present invention is 20mm, so that the aperture of the filter 111 is not smaller than 20 mm. The transmission center wavelength of the filter 111 is the same as the wavelength of the light beam 101 corresponding to the forward scattered light 107 to be detected, and the bandwidth of the filter is not less than the half-height and half-width of the light beam 101. Wherein the half-height and half-width of the filter refers to the filter bandwidth of the filter, and the half-height and half-width refers to the difference between wavelengths λ 1 and λ 2 corresponding to half of the maximum transmittance of the filter, wherein the incident illumination light refers to the wavelength broadening of the light beam emitted by the light source rather than the spot size. Preferably, in the particle measuring apparatus according to the first embodiment of the present invention, when the beam diameter of the light beam 101 is 488nm and the full width at half maximum of the scattered light of the illumination beam is 10nm, the filter 111 having a transmission center wavelength of 88nm and a transmission spectrum with a full width at half maximum of 10nm may be used.
Further, with reference to fig. 1, the particle measuring apparatus further includes a third lens 110, in the particle measuring apparatus according to the first embodiment of the present invention, the third lens 110 is a converging lens having the same structure as the first lens 102, a light-passing aperture of the converging lens is not smaller than a beam diameter of the forward scattered light 107 emitted from the optical filter 111, a beam diameter of the forward scattered light 107 according to the first embodiment of the present invention is 20mm, and a light-passing aperture of the third lens 110, that is, the converging lens, is not smaller than 20 mm.
The following describes a detection method of the particle detection apparatus according to the first embodiment of the present invention as follows:
s1: the light source 100 emits a collimated light beam 101 and is focused to the center of the flow channel of the flow cell 103 after being converged by the first lens 102.
S2: the sample liquid containing the particles 104 passes through and is irradiated by the collimated light beam 101 in a laminar flow under the coating of the flowing liquid, and when the light beam 101 irradiates the particles 104, a forward scattered light signal 1071 and an outgoing direct light 105 are emitted, and the propagation direction of the outgoing direct light 105 is the same as the propagation direction of the forward scattered light signal 1071.
S3: the emitted forward scattering optical signal 1071 and the emitted direct light 105 are respectively received by the second lens 106 and collimated into parallel beams, which are respectively transmitted to the reflective structure 20.
S4: the emitted direct light 105 passes through the hole 201 of the reflective structure 20 and is finally blocked by the blocking element 108 to be eliminated by the emitted direct light 105. The emitted scattered light 1071 is reflected by the reflection surface of the mirror body 200, attenuated by the attenuation sheet 109 in sequence, transmitted to the optical filter 111, filtered by the optical filter 111, and converged on the target surface of the detector 112 through the third lens 110 for receiving and detecting, the detector 112 receives the forward scattered light 1071, converts the received forward scattered light into an electrical signal, and then detects the electrical signal, so as to detect a plurality of characteristics characterizing particles.
Further, the collimating effect of the outgoing direct light 105 can be observed without loading a sample to obtain the precise position of the second lens 106, so as to realize the precise adjustment of the position of the second lens 106. The specific adjustment method is as follows:
a1: setting screens at the near field and far field positions of the second lens 106;
a2: observing the spot size of the outgoing direct light 105 emitted from the second lens 106 reflected on the near-field screen and the far-field screen;
a3: if the light spot reflected by the direct light 105 emitted from the near-field screen is consistent with the light spot reflected by the direct light 105 emitted from the far-field screen, the light path is aligned, i.e., the second lens 106 is adjusted to a proper position. Otherwise, if the light path does not reach the collimation state, the position of the second lens 106 is readjusted and the second lens returns to a2 to observe the size of the light spot on the near-field screen and the far-field screen.
Since the outgoing direct light 105 and the forward scattered light signal 1071 are emitted from the measurement point where the fine particle 104 is irradiated with the light beam 101, they are confocal with respect to the second lens 106, and therefore, if the outgoing direct light 105 is collimated, the outgoing forward scattered light signal 1071 is also collimated. The above adjustment method is still applicable to the second embodiment and the subsequent system operation and maintenance process, and further details of the present invention are not described herein.
The receiving ratio of the emitted forward scattered light signal 1071 can be determined by the size of the reflection surface of the first lens 200, that is, the diameter D of the first lens 2001Control is made such that the diameter D of the first lens 2001The calculation of (a) has been described in detail above and is not further described in the present method.
Further, referring to fig. 1, the target surface of the detector 112 is placed at the focal point of the forward scattered light signal 1071, so that the focal point of the convergent light spot is located at the center of the target surface of the detector 112, and in order to ensure that the focal point of the convergent light spot is located at the center of the target surface of the detector 112, the posture of the first lens body 200 and the position of the third lens 111 are adjusted.
Specifically, referring to fig. 1, the posture of the first mirror 200 can be adjusted by adjusting the tilt angle of the first mirror in the x direction and the y direction, so as to adjust the position of the forward scattered light signal 1071 in the x direction and the y direction. The position adjustment of the third lens 111 may be to adjust the front-back position of the third lens 111 to control the position of the final forward scattered light signal 1071.
Similarly, with continued reference to fig. 1, without adjusting the posture of the first mirror 200 and the position of the third lens 111, the position of the detector 112 in the three directions of the x direction (horizontal position), the y direction (vertical position), and the z direction (light propagation direction) may be changed, so that the focus of the forward scattered light signal finally emitted from the third lens 111 is located at the center of the target surface of the detector 112.
Similarly, any two of the posture adjustment of the first mirror 200, the position adjustment of the third lens 111, and the position adjustment of the detector 112 may be used alternately, for example, the relative positions of the converging focal point of the forward scattered light signal 1071 and the center of the target surface of the detector 112 in the x direction and the y direction may be adjusted by adjusting the posture of the first mirror 200, and the relative positions of the converging point of the forward scattered light signal 1071 and the center of the target surface of the detector 112 in the z direction may be adjusted by adjusting the front-rear position of the target surface of the detector 112. This adjustment is also applicable to the second embodiment, except that the first mirror 200 is replaced with the second mirror 210, and the remaining attitude adjustments and the adjustment of the detector 112 are consistent with the above.
Example two:
the structure and detection method of the second embodiment are mostly the same as those of the first embodiment, except that the backscattered light signal 1072 is used to characterize the number and size information of the particles, and the propagation direction of the backscattered light signal 1072 in the second embodiment is opposite to the propagation direction of the incident light beam 101 and the second emergent direct light 1052, so that the interference between the incident light beam 101 and the backscattered light signal 1072 needs to be avoided. Because of the different propagation directions, the reflective structure 20 is disposed between the flow cell 103 and the light source 100, and the reflective surface of the reflective structure 20 can face the propagation direction of the backscattered light signal 1072.
Further, with continuing reference to fig. 2 and 4, in the particle detecting device according to the second embodiment, the first lens 102 is located between the flow chamber 103 and the reflective structure 20, the first lens 102 is a converging lens, the aperture of the converging lens is preferably 20mm to 50mm, and the length of the converging lens is preferably 20mm to 50 mm.
Further, referring to fig. 2 and fig. 6, in the particle detecting device of the second embodiment, the second mirror 210 in the reflective structure 20 is preferably rectangular, the second hole 211 on the second mirror 210 is circular, and the incident angle ψ of the collimated backscattered light signal 1072 passing through the first lens 102 is larger than the incident angle ψ of the collimated backscattered light signal 10722Is 45 deg., and the radius r of the second lens 1022At 25mm, the length L of the second mirror 210 can be calculated by the formula of the first embodiment1Not less than 35.4mm, and the width L of the second mirror body 2102The second hole is about 20mm by using the formula f multiplied by tan theta211 aperture D3The calculation can be performed by using the same formula as the embodiment, and the invention is not further limited.
Further, in the particle measuring apparatus according to the second embodiment of the present invention, the aperture of the third lens 111 is determined according to the beam diameter of the collimated backscattered light signal 1072, for example, when the diameter of the backscattered light signal 1072 is 20mm, the aperture of the third lens 111 is not less than 20mm, and likewise, the position of the third lens 111 is determined according to the target surface position of the detector 112, and the specific position determining manner is described in detail in the first embodiment, which is not further described in detail in the second embodiment. In the particle measuring apparatus according to the second embodiment of the present invention, the target surface of the detector 112 needs to be placed 30mm behind the third lens 111, so that the focal length of the third lens 111 is 30 mm.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (13)

1. A reflective structure characterized by: the reflecting structure comprises
A mirror body having a reflective surface for reflecting scattered light signals;
the hole is arranged on the mirror body and used for transmitting emergent direct light, and the center of the hole is coaxial with the optical axis of the emergent direct light.
2. The reflective structure of claim 1, wherein: the reflecting surface of the mirror body satisfies the following relation when having a single size:
D1=f×tanθ/cosψ
wherein D1The diameter of the reflecting surface is shown, f is the focal length of the lens, theta is the half-acceptance angle of the scattered light signal, and psi is the incident angle of the scattered light signal on the mirror body.
3. The reflective structure of claim 1, wherein: the reflecting surface of the mirror body satisfies the following relation when having at least two dimensions:
L1=f×tanθ/cosψ
L2=f×tanθ
wherein L is1Denotes the length of the reflecting surface, L2Denotes the width of the reflecting surface, f denotes the focal length of the lens, θ denotes the half-acceptance angle of the scattered light signal, and ψ denotes the incident angle of the scattered light signal on the mirror body.
4. The reflective structure of claim 1, wherein: the pore diameter of the pores satisfies the following relation:
D2=f×tanθ/cosψ
wherein D2The aperture of the hole is shown, f is the focal length of the lens, theta is the half divergence angle of the outgoing direct light, and psi is the incident angle of the outgoing direct light on the mirror body.
5. The reflective structure of claim 4, wherein: the center of the hole is coaxial with the center of the mirror body.
6. The reflective structure of claim 4, wherein: the center of the hole is arranged non-coaxially with the mirror body.
7. A fine particle measuring apparatus, characterized in that: comprising a light source, a reflective structure according to any of claims 1 to 6, at least a first lens, a flow cell, a detector and a shielding element, wherein
The light source is used for emitting an illumination light beam;
the first lens is used for focusing the illumination light beam to the center of the flow chamber;
the flow chamber is used for enabling liquid drops containing particles to be sequentially irradiated by the illumination light beam and generating emergent direct light and at least one scattered light signal;
the reflecting structure is used for separating the emergent direct light and at least one scattered light signal;
the detector is used for receiving and detecting the scattered light signals;
the shielding element is used for shielding and/or eliminating the emergent direct light.
8. A particulate measuring apparatus according to claim 7, wherein: when the incident direction of the illumination light beam is the same as the emergent direction of the emergent direct light and the scattered light signal, the reflecting structure is arranged between the flow chamber and the shielding element.
9. A particulate measuring apparatus according to claim 7, wherein: when the incident direction of the illumination light beam is opposite to the emergent direction of the emergent direct light and the scattered light signal, the reflecting structure is arranged between the flow chamber and the light source.
10. A particulate measuring apparatus according to claim 8, wherein: the particle measuring device also comprises at least one second lens, and the second lens is arranged between the flow chamber and the reflecting structure and is used for converging the emergent direct light and the scattered light signal into parallel light beams.
11. A particulate measuring apparatus according to claim 7, wherein: the particle measuring device also comprises at least one attenuation sheet and at least one optical filter, wherein
The attenuation sheet is used for attenuating the light intensity of the scattered light signal;
the filter is used for passing specified scattered light signals.
12. A particulate measuring apparatus according to claim 11, wherein: the particle measuring device also comprises at least one third lens, and the third lens is arranged at the emergent end of the optical filter and is used for converging specified scattered light signals passing through the optical filter.
13. A detection method of a fine particle measuring apparatus, characterized in that:
the light source emits an illumination beam;
illuminating the particle particles with an illumination beam and generating optical signals, wherein the optical signals comprise emergent direct light and scattered light signals;
separating the outgoing direct light and the scattered light signal by a reflecting structure;
the emitted direct light is eliminated by a shielding element and the scattered light signal is received and detected by a detecting element.
CN202110652394.9A 2021-06-11 2021-06-11 Reflection structure, particle measuring device comprising same and detection method thereof Pending CN113358533A (en)

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