CN109854494A - A kind of device and method of constant conductance method flowmeter measurement minipump pumping speed - Google Patents
A kind of device and method of constant conductance method flowmeter measurement minipump pumping speed Download PDFInfo
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- CN109854494A CN109854494A CN201811544420.0A CN201811544420A CN109854494A CN 109854494 A CN109854494 A CN 109854494A CN 201811544420 A CN201811544420 A CN 201811544420A CN 109854494 A CN109854494 A CN 109854494A
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Abstract
The invention discloses a kind of device and methods of constant conductance method flowmeter measurement minipump pumping speed.It can be realized the precise measurement of minipump pumping speed using the present invention.The present invention uses constant conductance method gas flowmeter, can generate tiny flow quantity, be able to maintain offer stabilizing gas flux for a long time again, solve the problems, such as required small stabilizing gas flux in the measurement of minipump pumping speed；Meanwhile the method for avoiding usual ultrahigh vacuum pump pumping speed test test cover structure symmetrical above and below, test cover internal surface area is reduced, test cover surface area deflation influence amount is reduced, improves measurement accuracy, realize the accurate measurement of minipump pumping speed.
Description
Technical field
The present invention relates to vacuum pump field of measuring technique, and in particular to a kind of constant conductance method flowmeter measurement micro vacuum
The device and method of pumping speed.
Background technique
Flowmeter is needed when Measuring Vacuum performance to provide calibrating gas flow.The flow of usual Measuring Vacuum pumping speed
Gas flow provided by counting is larger, and such as: " displacement pump performance measurement method " (JB/T7266-94) is equivalent to international standard
" displacement pump performance measurement method-first part: the measurement of volume flow rate (pumping speed) " (ISO 1607/II-1980) " holds
Product vacuum pump performance measurement method " provide that flowmeter selects burette type flow meter and glass rotameter, burette type flow meter
Range of flow is (1.25 × 10-4~14.3) Pam3/ s, glass rotameter range of flow are (14.7 × 10-4~4530)
Pa·m3/s；The type and flowmeter of the flowmeter of " slide-valve vacuum pump performance test methods " (JB/T1246-97) defined
Range of flow is consistent with " displacement pump performance measurement method " (JB/T 7266-94) defined；Roots vaccum pump performance
Test method (JB/T7674-95) regulation is general to select burette type flow meter, but suspended body flowmeter can be used in when flow is larger, flows
Meter range is generally (10-4~1) Pam3/s；Flow is provided in " turbomolecular pump performance test methods " (GB7774-87)
Using burette type flow apparatus (referring to GB6307.1-86 " vapor stream vacuum pump pumping speed measurement method "), flowmeter range is meter
(10-4~1) Pam3/s。
Minipump pumping speed needs gas small, and range of flow is (5 × 10-6~1 × 10-9)Pa·m3/ s, so
The flowmeter of existing vacuum pumping speed measurement defined is not able to satisfy the requirement of minipump.
Summary of the invention
In view of this, the present invention provides a kind of device of constant conductance method flowmeter measurement minipump pumping speed and sides
Method can be realized the precise measurement of minipump pumping speed.
The device of constant conductance method flowmeter measurement minipump pumping speed of the invention, comprising: gas cylinder, the first pumping system
System, pressure stabilizing chamber, constant conductance aperture, test cover, the second extract system, the first vacuum meter and the second vacuum meter, peripheral equipment are
Minipump to be measured；Wherein, test cover is the test cover of no upper and lower measuring chamber；
Wherein, gas cylinder is connected by the first valve, third valve with pressure stabilizing chamber；First extract system by the second valve,
Third valve is connected with pressure stabilizing chamber；Pressure stabilizing chamber is connect by the 4th valve, constant conductance aperture, the 5th valve with test cover；To
Minipump is surveyed to connect by the 6th valve with test cover；Second extract system is connect by the 7th valve with test cover；
First vacuum meter is for measuring gas pressure in pressure stabilizing chamber；Second vacuum meter is for measuring gas pressure in test cover
Power.
Further, gas is known pure gas or mixed gas in the gas cylinder；The gas outlet pressure of gas cylinder
It is adjustable.
Further, first valve, the second valve, third valve, the 4th valve, the 5th valve, the 6th valve and
7th valve is vacuum valve.
Further, the first vacuum is calculated as capacitor thin film vacuum meter；Second vacuum is calculated as magnetic suspension spinning rotor vacuum gauge.
Further, the test cover is made using the 316L stainless steel of vacuum melting.
The present invention also provides a kind of measurement methods of minipump pumping speed, are measured using above-mentioned apparatus, including
Following steps:
Step 1, when initial, all valves and extract system are in closed state；
The second valve, third valve and the 4th valve are opened, the first extract system of starting vacuumizes, and pressure stabilizing chamber is evacuated to this
After bottom pressure, close the 4th valve and the second valve, close the first extract system, open the first valve, the gas in gas cylinder into
Enter pressure stabilizing chamber；
Step 2, after the gas pressure in pressure stabilizing chamber is stablized, the first valve and third valve is closed, the first vacuum is utilized
Gas pressure in meter measurement pressure stabilizing chamber, is denoted as p1；
Step 3, the 7th valve and the 5th valve are opened, the second extract system of starting vacuumizes, and test cover is evacuated to background
After pressure, the 4th valve is opened, the gas in pressure stabilizing chamber enters test cover by constant conductance aperture；The 6th valve is opened, is opened
Minipump to be measured is moved, the 7th valve is closed, closes the second extract system；
Step 4, after the gas pressure in test cover is stablized, the gas pressure in the second vacuum meter measurement test cover is utilized
Power is denoted as p2；
Step 5, minipump pumping speed S to be measured is calculated are as follows:
Wherein, C is the conductance value of constant conductance aperture.
The utility model has the advantages that
The present invention provides a kind of constant conductance method flowmeters to measure minipump pumping speed device and method, and flowmeter makes
The constant conductance method gas flowmeter of stabilizing gas flux is provided for a long time with can generate tiny flow quantity, be able to maintain again, is solved
The problem of required small stabilizing gas flux in the measurement of minipump pumping speed；Avoid usual ultrahigh vacuum pump pumping speed test
With the method for test cover structure symmetrical above and below, test cover internal surface area is reduced, reduces test cover surface area deflation influence amount,
Measurement accuracy is improved, the accurate measurement of minipump pumping speed is realized.
Detailed description of the invention
Fig. 1 is the structural schematic diagram that constant conductance method flowmeter of the present invention measures minipump pumping speed device.
Wherein, 1-gas cylinder, the 2-the first valve, the 3-the first extract system, the 4-the second valve, 5-third valves, 6-
First vacuum meter, 7-pressure stabilizing chambers, the 8-the four valve, 9-constant conductance apertures, the 10-the five valve, the 11-the second vacuum meter,
12-test covers, the 13-the six valve, 14-minipumps to be measured, the 15-the seven valve, the 16-the second extract system.
Specific embodiment
The present invention will now be described in detail with reference to the accompanying drawings and examples.
The present invention provides a kind of device and methods of constant conductance method flowmeter measurement minipump pumping speed.
(5 × 10 can be provided-6~1 × 10-9)Pa·m3The flow of/s range is in respect of Constant Pressure Flowmeter, constant volume
Formula gas micro-flowmeter and constant conductance method flowmeter.Wherein the basic functional principle of Constant Pressure Flowmeter is constant
Under gas pressure condition, piston rod, which at the uniform velocity advances, generates gas flow, and due to piston rod limited length, each operating time has
Limit, generally a few minutes, is not able to satisfy vacuum pump long period (20 minutes or more) vacuum pumping speed measurement demand；Constant volume type stream
The precondition of meter flow measurement is that the indoor pressure of constant volume changes, and since pumping speed time of measuring is long, leads to front and back
Gas flow difference is larger, introduces biggish uncertainty；And constant conductance method flowmeter reaches certain item in conductance and volume
When part, stable gas micro can be provided, so the flowmeter for the measurement of minipump pumping speed should be constant conductance
Method gas micro-flowmeter.
It is turbomolecular pump and sputter ion pump, " turbomolecular pump performance test usually using most ultrahigh vacuum pumps
Method " in (GB7774-87) regulation when test internal mask pressure it is lower constantly, the symmetrical two parts up and down of the test cover point of pump, two
Current limiting aperture between part；Minipump is generally used for the holding of vacuum degree, its lower use of the pressure in vacuum cavity
Service life is longer, can be used in " turbomolecular pump performance test methods " (GB7774-87) above and below test cover according to usually requiring that
Symmetrical structure carries out the test of minipump, but since minipump pumping speed is small by (1 × 10-3m3/ s~1 × 10-5m3/ s),
Test cover structure symmetrical above and below can be such that test cover internal surface area increases, and test cover discharge quantity increases, and survey to minipump pumping speed
The partial uncertainty that amount introduces increases.In order to reduce the partial uncertainty of discharge quantity introducing, for minipump pumping speed
Measurement can could be used without the test cover of upper and lower measuring chamber, under the premise of providing standard micrometeor with constant conductance method flowmeter,
The pumping speed of minipump can accurately be measured.
It is that minipump pumping speed measures a key factor that constant known tiny flow quantity, which provides technology,.Use firm discharge
After inducing defecation by enema and suppository flowmeter, the structure of test device test cover can simplify, reducing the deflation of test procedure test cover influences, and improves micro-
The accuracy of type vacuum pumping speed measurement.
As shown in Figure 1, constant conductance method flowmeter measurement minipump pumping speed device of the invention includes: gas cylinder 1, the
One valve 2, the second valve 4, third valve 5, the first vacuum meter 6, pressure stabilizing chamber 7, the 4th valve 8, is fixed first extract system 3
Conductance aperture 9, the 5th valve 10, the second vacuum meter 11, test cover 12, the 6th valve 13, minipump to be measured 14, the 7th valve
Door 15 and the second extract system 16.
Wherein, gas cylinder 1 is connected with pressure stabilizing chamber 7 by pipeline by the first valve 2 and third valve 5, and gas cylinder 1 provides measurement
Use gas；First extract system 3 is connected with pressure stabilizing chamber 7 by another pipeline by the second valve 4 and third valve 5, and first
Extract system 3 is used to extract out pressure stabilizing chamber 7 and the first valve 2, the second valve 4, the gas between third valve 5 in connecting pipe；
For first vacuum meter 6 with pressure stabilizing chamber 7 by piping connection, the first vacuum meter 6 measures gas pressure in pressure stabilizing chamber 7；Pressure stabilizing chamber 7 passes through
For 4th valve 8 with constant conductance aperture 9 by piping connection, pressure stabilizing chamber 7 keeps stabilizing gas pressure；Constant conductance aperture 9 is logical
The 5th valve and test cover 12 are crossed by piping connection, 9 conductance of constant conductance aperture remains unchanged, makes through aperture gas flow
It keeps constant；Second vacuum meter 11 is connect with test cover 12 by pipeline, and the second vacuum meter 11 measures gas pressure in test cover 12
Power；Minipump 14 to be measured is connect with measurement test cover 12 by pipeline by the 6th valve 13；Second extract system 16 is logical
It crosses the 7th valve 15 and is connect with measurement test cover 12 by pipeline, the second extract system 16 is used to take out the gas in test cover 12.
Wherein, gas cylinder 1 can provide the pure gas or mixed gas of different high pressures, and gaseous species are it is known that such as nitrogen, helium
The gases such as gas, argon gas.
7 pumping speed of minipump to be measured is 1 × 10-3m3/ s~1 × 10-5m3/ s range.Minipump 7 to be measured is selected micro-
Type sputter ion pump.
First valve 2, the second valve 4, third valve 5, the 4th valve 8, the 5th valve 10, the 6th valve 13 and the 7th valve
Door 15 is vacuum valve, and the vacuum valve of Switzerland VAT company production can be selected.
First vacuum meter 6 is capacitor thin film vacuum meter, and the capacitor thin film vacuum meter of U.S. MKS company production can be selected.
Second vacuum meter 9 is the magnetic suspension spinning rotor vacuum gauge for itself not having getter action (i.e. no pumping speed), and beauty can be selected
The SRG-3 magnetic suspension spinning rotor vacuum gauge of MKS company, state production.
First extract system 3 is for being evacuated the device for reaching vacuum described in state of the art, can be molecular pump
With the combination of mechanical pump etc., final vacuum can reach 10-4Pa magnitude.
Second extract system 16 is for being evacuated the device for reaching vacuum described in state of the art, can be molecular pump
With the combination of mechanical pump etc., final vacuum can reach 10-7Pa magnitude.Mechanical pump is the SC5D of LEYBOLD company, Germany production
Type mechanical pump, molecular pump are the WT250 type molecular pump of LEYBOLD company, Germany production.
Constant conductance aperture 9 is laser aperture described in state of the art, and orifice conductance is solid under the conditions of molecular flow
It is fixed constant.The conductance aperture that the development of Lanzhou space technology physics Institute can be used, using the stainless steel of the 316L of vacuum melting
Make, is 2.2 × 10 through national defence vacuumatic measuring first order station metering conductance value-9m3/s。
Test cover 12 is the test cover of no upper and lower measuring chamber, is made of the 316L stainless steel of vacuum melting.
When being measured using above-mentioned measuring device, the first valve 2, the second valve 4, third valve 5, the 4th valve 8,
Five valves 10, the 6th valve 13 and the 7th valve 15, the first extract system 3 and the second extract system 16 are opened in the measurement method
Closed state was in front of beginning, steps are as follows for the measurement method:
(1) the second valve 4, third valve 5 and the 4th valve 8 are opened, the first extract system 3 of starting vacuumizes, and opens the
One vacuum meter 6；
(2) the background pressure measured value of the pressure stabilizing chamber 7 measured when the first vacuum meter 6 is less than 1Pa, closes the 4th valve 8, the
One extract system is evacuated after ten minutes again, closes the second valve 4, closes the first extract system 3, opens the first valve 2, gas cylinder 1
In gas enter in pressure stabilizing chamber 7, with the first vacuum meter 6 measurement pressure stabilizing chamber 7 in gas pressure, when gas pressure in pressure stabilizing chamber 7
When reaching stationary value, the pressure value of record pressure stabilizing chamber 7 is p1, close the first valve 2, third valve 5；
(3) the 7th valve 15 and the 5th valve 10 are opened, the second extract system 16 of starting vacuumizes, and opens the second vacuum meter
11；
(4) background pressure in test cover is measured with the second vacuum meter 11, when background pressure measured value is less than 1 × 10-3Pa,
And when pressure value is held essentially constant within 10 minutes, the 4th valve 8 is opened, the 6th valve 13 is opened, starts minipump to be measured
14, the 7th valve 15 is closed, the second extract system 16 is closed；
(5) when gas flow reaches dynamic equilibrium, i.e. the second vacuum meter 11 was held essentially constant in 10 minutes pressure values
When, with the pressure in the second vacuum meter 11 measurement test cover, it is denoted as p2。
(6) under the conditions of dynamic equilibrium, according to flow conservation law, pass through the gas flow Q of constant conductance aperture 91With
The gas flow Q that minipump 14 to be measured is taken away2It is equal, it is indicated with formula (1):
Q1=Q2 (1)
In formula (1):
Q1- pass through the gas flow of constant conductance aperture 9, unit are as follows: Pam3/s；
Q2The gas flow that-minipump 14 to be measured is taken away, unit are as follows: Pam3/s。
Pass through the gas flow Q of constant conductance aperture 91It is indicated with formula (2):
Q1=Cp1 (2)
In formula (2):
p1Pressure in-pressure stabilizing chamber 7, unit are as follows: Pa；
C-constant conductance aperture 9 conductance value, is steady state value under the conditions of molecular flow, is provided by measurement unit, unit
Are as follows: m3/s。
The gas flow Q that minipump 14 to be measured is taken away2, it is indicated with formula (3):
Q2=Sp2 (3)
In formula (3):
The pumping speed of S-minipump to be measured (14), unit are as follows: m3/s。
Formula (1), formula (2) and formula (3) simultaneous solution are obtained into the calculation formula of 14 pumping speed of minipump to be measured
It is indicated with formula (4):
In conclusion the above is merely preferred embodiments of the present invention, being not intended to limit the scope of the present invention.
All within the spirits and principles of the present invention, any modification, equivalent replacement, improvement and so on should be included in of the invention
Within protection scope.
Claims (6)
1. a kind of device of constant conductance method flowmeter measurement minipump pumping speed characterized by comprising gas cylinder (1), the
One extract system (3), pressure stabilizing chamber (7), constant conductance aperture (9), test cover (12), the second extract system (16), the first vacuum
(6) and the second vacuum meter (11) are counted, peripheral equipment is minipump to be measured (14)；Wherein, test cover (12) is without up and down
The test cover of measuring chamber；
Wherein, gas cylinder (1) is connected by the first valve (2), third valve (5) with pressure stabilizing chamber (7)；First extract system (3) is logical
Cross the second valve (4), third valve (5) is connected with pressure stabilizing chamber (7)；Pressure stabilizing chamber (7) is small by the 4th valve (8), constant conductance
Hole (9), the 5th valve (10) are connect with test cover (12)；Minipump (14) to be measured passes through the 6th valve (13) and test cover
(12) it connects；Second extract system (16) is connect by the 7th valve (15) with test cover (12)；
First vacuum meter (6) is for measuring gas pressure in pressure stabilizing chamber (7)；Second vacuum meter (11) is for measuring test cover (12)
Middle gas pressure.
2. the device of constant conductance method flowmeter measurement minipump pumping speed as described in claim 1, which is characterized in that institute
Stating gas in gas cylinder (1) is known pure gas or mixed gas；The gas outlet pressure of gas cylinder (1) is adjustable.
3. the device of constant conductance method flowmeter measurement minipump pumping speed as described in claim 1, which is characterized in that institute
State the first valve (2), the second valve (4), third valve (5), the 4th valve (8), the 5th valve (10), the 6th valve (13) and
7th valve (15) is vacuum valve.
4. the device of constant conductance method flowmeter measurement minipump pumping speed as described in claim 1, which is characterized in that the
One vacuum meter (6) is capacitor thin film vacuum meter；Second vacuum meter (11) is magnetic suspension spinning rotor vacuum gauge.
5. the device of constant conductance method flowmeter measurement minipump pumping speed as described in claim 1, which is characterized in that institute
Test cover (12) are stated to be made using the 316L stainless steel of vacuum melting.
6. a kind of measurement method of minipump pumping speed, it is characterised in that: using as described in Claims 1 to 5 any one
Constant conductance method flowmeter measurement minipump pumping speed device measure, include the following steps:
Step 1, when initial, all valves and extract system are in closed state；
The second valve (4), third valve (5) and the 4th valve (8) are opened, starting the first extract system (3) vacuumizes, by pressure stabilizing
After room (7) is evacuated to background pressure, the 4th valve (8) and the second valve (4) are closed, is closed the first extract system (3), opens first
Valve (2), the gas in gas cylinder (1) enter pressure stabilizing chamber (7)；
Step 2, after the gas pressure in pressure stabilizing chamber (7) is stablized, the first valve (2) and third valve (5) is closed, utilizes first
Vacuum meter (6) measures gas pressure in pressure stabilizing chamber (7), is denoted as p1；
Step 3, the 7th valve (15) and the 5th valve (10) are opened, starting the second extract system (16) vacuumizes, by test cover
(12) after being evacuated to background pressure, the 4th valve (8) is opened, the 6th valve (13) is opened, starts minipump to be measured (14), is closed
The 7th valve (15) is closed, is closed the second extract system (16)；
Step 4, after the gas pressure in test cover (12) is stablized, using in the second vacuum meter (11) measurement test cover (12)
Gas pressure is denoted as p2；
Step 5, minipump to be measured (14) pumping speed S is calculated are as follows:
Wherein, C is the conductance value of constant conductance aperture (9).
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| Application Number | Priority Date | Filing Date | Title |
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| CN201811544420.0A CN109854494A (en) | 2018-12-17 | 2018-12-17 | A kind of device and method of constant conductance method flowmeter measurement minipump pumping speed |
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| CN201811544420.0A CN109854494A (en) | 2018-12-17 | 2018-12-17 | A kind of device and method of constant conductance method flowmeter measurement minipump pumping speed |
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Cited By (7)
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|---|---|---|---|---|
| CN111059043A (en) * | 2019-12-23 | 2020-04-24 | 王佳元 | Novel roots vacuum pump test system |
| CN111965389A (en) * | 2020-06-24 | 2020-11-20 | 合肥工业大学 | Vane-rotating pump pumping speed calibration device based on stm32 single-chip microcomputer and application method thereof |
| CN112781804A (en) * | 2020-12-16 | 2021-05-11 | 兰州空间技术物理研究所 | SF6 leakage rate calibration stepless regulation device and method |
| CN113153723A (en) * | 2021-04-02 | 2021-07-23 | 胡尊波 | Method for measuring pumping speed of vacuum pump |
| CN114893389A (en) * | 2022-06-10 | 2022-08-12 | 中国科学院上海高等研究院 | System and method for testing chamber temperature performance of helium pressure reduction and temperature reduction pump set |
| CN116398421A (en) * | 2023-05-26 | 2023-07-07 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117212121A (en) * | 2023-09-04 | 2023-12-12 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
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| CN111059043A (en) * | 2019-12-23 | 2020-04-24 | 王佳元 | Novel roots vacuum pump test system |
| CN111965389A (en) * | 2020-06-24 | 2020-11-20 | 合肥工业大学 | Vane-rotating pump pumping speed calibration device based on stm32 single-chip microcomputer and application method thereof |
| CN111965389B (en) * | 2020-06-24 | 2022-02-15 | 合肥工业大学 | Vane-rotating pump pumping speed calibration device based on stm32 single-chip microcomputer and application method thereof |
| CN112781804A (en) * | 2020-12-16 | 2021-05-11 | 兰州空间技术物理研究所 | SF6 leakage rate calibration stepless regulation device and method |
| CN112781804B (en) * | 2020-12-16 | 2023-12-26 | 兰州空间技术物理研究所 | SF6 leak rate calibration stepless adjusting device and method |
| CN113153723A (en) * | 2021-04-02 | 2021-07-23 | 胡尊波 | Method for measuring pumping speed of vacuum pump |
| CN114893389A (en) * | 2022-06-10 | 2022-08-12 | 中国科学院上海高等研究院 | System and method for testing chamber temperature performance of helium pressure reduction and temperature reduction pump set |
| CN114893389B (en) * | 2022-06-10 | 2023-06-30 | 中国科学院上海高等研究院 | System and method for testing room temperature performance of helium pressure-reducing cooling pump set |
| CN116398421A (en) * | 2023-05-26 | 2023-07-07 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN116398421B (en) * | 2023-05-26 | 2023-12-19 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117212121A (en) * | 2023-09-04 | 2023-12-12 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117212121B (en) * | 2023-09-04 | 2024-03-01 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
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Application publication date: 20190607 |