CN116398421A - High vacuum pump pumping speed testing device and using method thereof - Google Patents
High vacuum pump pumping speed testing device and using method thereof Download PDFInfo
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- 238000012360 testing method Methods 0.000 title claims abstract description 202
- 238000005086 pumping Methods 0.000 title claims abstract description 76
- 238000000034 method Methods 0.000 title claims abstract description 49
- 238000005259 measurement Methods 0.000 claims abstract description 30
- 230000000087 stabilizing effect Effects 0.000 claims description 10
- 238000012544 monitoring process Methods 0.000 claims description 3
- 150000001875 compounds Chemical class 0.000 claims description 2
- 230000001276 controlling effect Effects 0.000 claims 1
- 230000001105 regulatory effect Effects 0.000 claims 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract description 24
- 229910052757 nitrogen Inorganic materials 0.000 abstract description 12
- 230000007547 defect Effects 0.000 abstract description 5
- 239000007789 gas Substances 0.000 description 47
- 230000035945 sensitivity Effects 0.000 description 6
- 238000004364 calculation method Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 3
- 108010083687 Ion Pumps Proteins 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 241000081473 Clausia <angiosperm> Species 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000605 extraction Methods 0.000 description 1
- 238000009776 industrial production Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000010998 test method Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B51/00—Testing machines, pumps, or pumping installations
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B37/00—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
- F04B37/10—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use
- F04B37/14—Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for special use to obtain high vacuum
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Abstract
The invention relates to a high vacuum pump pumping speed testing device and a using method thereof, wherein the high vacuum pump pumping speed testing device comprises an air inlet pipeline, a testing pipeline and a comparison pipeline, the testing pipeline comprises a third valve, a first testing cover, a high vacuum pump to be tested and a first backing pump which are sequentially connected, and the first testing cover is also connected with a second vacuum gauge; the comparison pipeline comprises a fourth valve, a second test cover, a standard flow guide element and a flow guide air extractor group which are sequentially connected, and the second test cover is also connected with a third vacuum gauge; the first test cover is connected with the second test cover through a first valve and a second valve, and a first vacuum gauge is connected between the first valve and the second valve; the first test cover and the second test cover are the same vacuum container. The invention overcomes the defect of equivalent nitrogen in the traditional measurement of pumping speed, improves the test precision, reduces the measurement uncertainty, improves the test efficiency, reduces the test cost, and avoids calibrating the vacuum gauge and giving out the result of equivalent nitrogen pumping speed.
Description
Technical Field
The invention relates to the technical field of high vacuum pump pumping speed testing, in particular to a high vacuum pump pumping speed testing device and a using method thereof.
Background
The high vacuum pump is widely applied to industrial production and scientific research as an air extraction tool of a vacuum system. The pumping speed of the high vacuum pump has important significance for obtaining the vacuum degree of the system and designing the vacuum pump product. The pumping speed measuring methods of the medium and high vacuum pumps in the standards of GB/T7774-2007 measurement of the performance parameters of the turbomolecular pump by the vacuum technology, JB/T11081-2011 low temperature pump of the refrigerator by the vacuum technology, GB/T25755-2010 measurement of the performance parameters of the sputtering ion pump by the vacuum technology and the like are all a conductance method, a flow method and the like. The test method of micro sputter ion pump minimum pumping speed in literature "Li Haitao" was studied [ D ]. Northeast university 2020, doi:10.27007// d.cnki.gdbu.2020.000452 ". The high vacuum pumping speed was also measured by flow method in patent No. CN 109854494. The conductance method adopts a test cover with an upper structure and a lower structure, and adopts two vacuum gauges as standard vacuum gauges, so that more deviation is introduced due to larger sensitivity coefficient deviation, and the measurement uncertainty is large. The standard vacuum gauge needs to be calibrated, and other gas test results need to be equivalent to the results of nitrogen, or the standard vacuum gauge is calibrated by adopting relevant gas again, so that the process is complicated and the cost is high. Document "Guo Shuai, zhou Xu, chi Huajing, etc. The pumping speed of the vacuum pump is tested by adopting a flow method in the development [ J ]. Vacuum 2013,50 (04): 53-57.DOI:10.13385/j.cnki.vacuum.2013.04.025 ], the flow method needs to specifically measure the flow of the introducing device, and the standard flow meter and the vacuum meter are calibrated by nitrogen, so that the accuracy of the test result is affected. When other gases are measured, the measurement result is equivalent to a nitrogen result or the standard flowmeter and the standard vacuum gauge are recalibrated, the steps are troublesome, the cost is high, the operation process is complicated, and the consistency of the two calibrated vacuum gauges is poor due to the influence of various factors in the actual measurement process, so that the deviation of the pumping speed measurement result is generally not less than 15%, and the measurement uncertainty is large.
Disclosure of Invention
In order to solve the technical problems of the prior art in the requirement of high-precision pumping speed measurement, the invention aims to provide a high-vacuum pump pumping speed testing device and a use method thereof, which overcome the defects of the conventional flow guiding method test adopted by the high-vacuum pump pumping speed test and have the characteristics of high pumping speed measurement result precision, low device cost, simple testing steps, high testing efficiency, no more nitrogen equivalent test result and the like.
In order to achieve the aim, the invention provides a high vacuum pump pumping speed testing device which comprises an air inlet pipeline, a testing pipeline connected with the air inlet pipeline and a comparison pipeline with a symmetrical structure of the testing pipeline, wherein the air inlet pipeline comprises an air source, a pressure stabilizing chamber and a fifth valve which are sequentially connected;
the test pipeline comprises a third valve, a first test cover, a high vacuum pump to be tested and a first backing pump which are connected in sequence, and the first test cover is also connected with a second vacuum gauge;
the comparison pipeline comprises a fourth valve, a second test cover, a standard flow guide element and a flow guide air extractor group which are sequentially connected, and the second test cover is also connected with a third vacuum gauge;
the first test cover is connected with the second test cover through a first valve and a second valve, and a first vacuum gauge is connected between the first valve and the second valve;
the first test cover and the second test cover are two vacuum containers with the same structural size, the same process treatment, the same ultimate vacuum degree and the same background leakage and gas discharge.
According to one aspect of the invention, the vacuum pump further comprises a sixth valve for controlling the air inlet of the air source, and the pressure stabilizing chamber is further connected with a fourth vacuum gauge.
According to one aspect of the invention, the first vacuum gauge is a sub-standard ionization vacuum gauge, and the measuring range is 10 -1 Pa～10 -9 Pa；
The second vacuum gauge and the third vacuum gauge are composite monitoring vacuum gauges, and the measuring range is 10 5 Pa～10 - 8 Pa；
The fourth vacuum gauge is a capacitance film vacuum gauge combination, and the measurement range is 1 multiplied by 10 5 Pa-10 Pa, and the measurement accuracy is better than 0.5%.
According to one aspect of the invention, the ratio of the estimated pumping speed value of the high vacuum pump to be measured to the conductance value of the standard conductance element ranges from 0.5 to 2.
According to one aspect of the invention, the standard flow guide element is a thin-walled circular aperture having a thickness of less than 0.5mm centered on the double-sided flange.
According to one aspect of the present invention, a method for using the high vacuum pump pumping speed testing device according to any one of the above technical solutions is provided, comprising the following steps:
step S1, measuring a background pressure value P of the first test cover and the second test cover 0 ；
Step S2, measuring the gas pressure P of the first test cover 11 And the gas pressure P of the second test cover 21 ；
Step S3, utilizing the background pressure value P of the first test cover and the second test cover 0 Gas pressure P of the first test hood 11 Gas pressure P of the second test hood 21 And calculating the pumping speed value of the high vacuum pump to be tested according to the conductance value C of the standard conductance element.
According to one aspect of the invention, in said step S1, the following sub-steps are included:
s11, closing the fifth valve, and opening the second vacuum gauge, the third vacuum gauge and the fourth vacuum gauge;
step S12, opening the first backing pump and the flow guide air extractor group to extract air from the first test cover and the second test cover, and opening a first valve, a second valve, a third valve and a fourth valve;
s13, after the indicated values of the second vacuum gauge and the third vacuum gauge are smaller than 10Pa, turning on a high vacuum pump of a to-be-detected high vacuum pump and a high vacuum pump of a flow guide air extractor group to vacuumize the first test cover, the second test cover and the pipeline;
step S14, reading is less than 5×10 in the second vacuum gauge or the third vacuum gauge -1 At Pa, the vacuum gauge G1 is opened, and the pressure in the first test cover is less than 1×10 -6 After Pa, closing the third valve and the fourth valve;
s15, after the first test cover and the second test cover reach the ultimate vacuum degree and after the reading of the first vacuum gauge is stable, recording the pressure value displayed by the first vacuum gauge as P 0 。
According to one aspect of the invention, in said step S2, the following sub-steps are included:
step S21, closing the second valve and ensuring that the first valve is in an open state;
step S22, opening the fifth valve and adjusting the fifth valveOpening degree while maintaining the pressure of the gas in the pressure stabilizing chamber measured by the fourth vacuum gauge from small to large at 10Pa to 1×10 5 In Pa;
step S23, slowly opening the third valve, introducing the gas in the pressure stabilizing chamber into a first test cover, and recording the pressure value displayed by the first vacuum gauge as P after the reading of the first vacuum gauge is stable 11 ；
Step S24, closing the third valve, opening the fourth valve, introducing the gas in the pressure stabilizing chamber into a second test cover, closing the first valve and opening the second valve after the reading of the third vacuum gauge is stable, and recording the pressure value displayed by the first vacuum gauge as P after the reading of the first vacuum gauge is stable 21 。
According to an aspect of the present invention, in the step S3, specifically includes:
s31, calculating a conductance value C of the standard conductance element through the small hole thickness d and the diameter l of the standard conductance element;
step S32, calculating the pumping speed value S of the high vacuum pump to be tested 1 The formula is:
according to one aspect of the present invention, further comprising:
step S4, the test process is carried out from the test cover to low pressure to high pressure, the step S2 and the step S3 are repeated, three pressure points are selected for testing according to each pressure order, and the pumping speed of the obtained high-vacuum pump is S respectively 1 ……S n Drawing a curve of pumping speed and pressure to obtain a pumping speed curve graph of the vacuum pump to be detected.
Compared with the prior art, the invention has the following beneficial effects:
according to one scheme of the invention, the air inlet pipeline is connected with the test pipeline and the comparison pipeline simultaneously, so that the symmetrical structure of the test pipeline and the comparison pipeline is obtained based on the symmetryHigh vacuum pump pumping speed testing device with structure testing cover coupled with standard conductance, and the background pressure value P of the first testing cover and the background pressure value P of the second testing cover are respectively measured by taking a first vacuum gauge as a reference standard 0 Gas pressure P of first test hood 11 And the gas pressure P of the second test cover 21 The standard flow guide element is adopted as a reference standard of standard pumping speed, the molecular flow guide value C is obtained by measuring the thickness d and the diameter l of a central small hole of the standard flow guide element, the pumping speed value of the vacuum pump to be measured is finally calculated and obtained, only one vacuum gauge is adopted as a comparator, the linearity of the vacuum gauge is only utilized in the measuring process, the standard flow guide element is adopted as the reference standard, the vacuum gauge does not need to be calibrated by adopting specific gas, on one hand, the larger deviation caused by the inconsistency of the sensitivity of the two traditional vacuum gauges is avoided, and meanwhile, the molecular flow guide value of the detected gas by the reference standard flow guide element is only required to be obtained, so that the testing process is simplified, and the precision of the testing result is improved.
The standard flow guiding element is used as a reference standard for calibrating the pumping speed, and is used for comparing and measuring to obtain the pumping speed of the detected pump, the molecular flow guiding value of the standard flow guiding element for certain gas is obtained through formula calculation, and the uncertainty of calculation is not more than 1%.
The invention solves the problem that the traditional flow method needs to use the known flowmeter, also solves the problem that the traditional flow method adopts two vacuum meters with larger sensitivity deviation so as to cause lower test precision, solves the problem of the deficiency of equivalent nitrogen in the traditional measurement pumping speed, improves the test precision, reduces the measurement uncertainty, improves the test efficiency, reduces the test cost, and avoids the calibration of the vacuum meters and the giving of the result of equivalent nitrogen pumping speed.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are required to be used in the embodiments will be briefly described below. It is apparent that the drawings in the following description are only some embodiments of the present invention, and that other drawings may be obtained from these drawings without inventive effort for a person of ordinary skill in the art.
FIG. 1 schematically illustrates a connection diagram of a high vacuum pump pumping speed test apparatus in accordance with an embodiment of the present invention;
fig. 2 schematically shows a graph of the pumping of a high vacuum pump to be tested in an embodiment of the invention.
The correspondence between the reference numerals and the component names in fig. 1 is:
g1, a first vacuum gauge; g2, a second vacuum gauge; g3, a third vacuum gauge; g4, a fourth vacuum gauge; v1, a first valve; v2, a second valve; v3, a third valve; v4, a fourth valve; v5, a fifth valve; v6, a sixth valve; TMP, high vacuum pump to be measured; RP, first backing pump; pump, flow guide air extractor group; VC1, a first test cover; VC2, a second test cover; VC3, a voltage stabilizing chamber; f. standard conductance elements.
Detailed Description
The description of the embodiments of this specification should be taken in conjunction with the accompanying drawings, which are a complete description of the embodiments. In the drawings, the shape or thickness of the embodiments may be enlarged and indicated simply or conveniently. Furthermore, portions of the structures in the drawings will be described in terms of separate descriptions, and it should be noted that elements not shown or described in the drawings are in a form known to those of ordinary skill in the art.
Any references to directions and orientations in the description of the embodiments herein are for convenience only and should not be construed as limiting the scope of the invention in any way. The following description of the preferred embodiments will refer to combinations of features, which may be present alone or in combination, and the invention is not particularly limited to the preferred embodiments. The scope of the invention is defined by the claims.
As shown in FIG. 1, the high vacuum pump pumping speed testing device comprises an air inlet pipeline, a testing pipeline connected with the air inlet pipeline and a comparison pipeline with a symmetrical structure of the testing pipeline, wherein the air inlet pipeline comprises an air source Gas, a pressure stabilizing chamber VC3 and a fifth valve V5 which are sequentially connected;
the test pipeline comprises a third valve V3, a first test cover VC1, a high vacuum pump TMP to be tested and a first backing pump RP which are sequentially connected, and the first test cover VC1 is also connected with a second vacuum gauge G2;
the comparison pipeline comprises a fourth valve V4, a second test cover VC2, a standard flow guide element f and a flow guide air exhaust unit pump which are connected in sequence, and the second test cover VC2 is also connected with a third vacuum gauge G3;
the first test cover VC1 is connected with the second test cover VC2 through a first valve V1 and a second valve V2, and a first vacuum gauge G1 is connected between the first valve V1 and the second valve V2;
the first test cover VC1 and the second test cover VC2 are two vacuum containers with the same structural size, the same process treatment, the same ultimate vacuum degree and the same background leakage and gas discharge.
In this embodiment, by connecting the air inlet pipeline with the test pipeline and the comparison pipeline at the same time, the test pipeline and the comparison pipeline are symmetrical in structure, and the high vacuum pump pumping speed testing device based on the symmetrical structure test cover coupling standard conductance is obtained, and the background pressure value P of the first test cover VC1 and the second test cover VC2 is respectively measured by taking the first vacuum gauge G1 as a reference standard 0 Gas pressure P of first test hood VC1 11 And the gas pressure P of the second test hood VC2 21 The method is characterized in that a standard flow guide element f is adopted as a reference standard of standard pumping speed, a molecular flow guide value C of the standard flow guide element f is obtained by measuring the thickness d and the diameter l of a central small hole of the standard flow guide element f, the pumping speed value of the vacuum pump TMP to be measured is finally calculated and obtained, a vacuum gauge is adopted as a comparator, the measuring process is only through the linearity of the vacuum gauge, the standard flow guide element f is adopted as the reference standard, the vacuum gauge does not need to be calibrated by adopting specific gas, on one hand, larger deviation caused by the inconsistency of the sensitivity of the two traditional vacuum gauges is avoided, and meanwhile, the molecular flow guide value of the reference standard flow guide element f on the detected gas is only needed to be obtained, so that the defect of the traditional pumping speed equivalent nitrogen measurement is overcome, and the method has the characteristics of high measuring result precision, low device cost, simple testing steps, high testing efficiency and the like.
The high vacuum pump pumping speed testing device is provided with a first testing cover VC1 and a second testing cover VC2 which are identical and have symmetrical structures, the first testing cover VC1 is used for installing a high vacuum pump TMP to be tested, the second testing cover VC2 is used for installing a reference standard flow guide element f, the standard flow guide element f is used as a reference standard of standard pumping speed, and the magnitude tracing mode is changed.
In addition, the fifth valve V5 is a fine tuning valve, the pumping speed of the pump set for pumping the standard flow guide element f should be greater than twice the flow guide value of the standard flow guide element f, the plenum VC3 is a vacuum container with a volume of 20L, and can provide sufficient gas quantity, and the gas pressure fluctuation in the plenum VC3 does not exceed 5% during the test.
In one embodiment of the present invention, preferably, the vacuum pump further comprises a sixth valve V6 for controlling air intake of the air source, and the plenum VC3 is further connected to a fourth vacuum gauge G4.
In this embodiment, the air source Gas is connected to the first test hood VC1 through the sixth valve V6, the plenum chamber VC3, the fourth vacuum gauge G4, the fifth valve V5, the third valve V3, the air source Gas is connected to the second test hood VC2 through the sixth valve V6, the plenum chamber VC3, the fourth vacuum gauge G4, the fifth valve V5, the fourth valve V4, the first test hood VC1 and the second vacuum gauge G2, the third valve V3, the first valve V1, the high vacuum pump TMP to be tested, the first time, but the first valve V1 and the second valve V2 are found to be connected to the second test hood VC2, the second test hood VC2 and the third vacuum gauge G3, the second valve V2, the fourth valve V4, the standard conductance element f is connected to the first backing pump RP through the high vacuum pump TMP to be tested, and the conductance pump set pump is connected to the second test hood VC2 through the standard conductance element f.
In one embodiment of the present invention, the first gauge G1 is preferably a sub-standard ionization gauge, measuring range is 10 -1 Pa～10 -9 Pa；
The second vacuum gauge G2 and the third vacuum gauge G3 are compound monitoring vacuum gauges, and the measuring range is 10 5 Pa～10 -8 Pa；
The fourth vacuum gauge G4 is a capacitance film vacuum gauge combination, and the measurement range is 1 multiplied by 10 5 Pa-10 Pa, and the measurement accuracy is better than 0.5%.
In one embodiment of the present invention, preferably, the ratio of the estimated pumping speed value of the high vacuum pump TMP to be tested to the conductance value of the standard conductance element f ranges from 0.5 to 2, which is beneficial to ensuring that the first vacuum gauge G1 utilized in the test is in a good linear range, and the linearity of the first vacuum gauge G1 is better than 5%.
In one embodiment of the invention, the standard flow guide element f is preferably a thin-walled circular aperture having a thickness of less than 0.5mm, the aperture being centered on the double-sided flange.
In this example, the thickness d and the diameter l of the central orifice of the standard flow-guiding element f are obtained by metering, the resultant standard uncertainty of the metering result not exceeding 1%. The calculation formula of the orifice conductance value C is as follows:
wherein: a is that 0 Is the area of the small hole; t is the thermodynamic temperature of the gas; m is the molecular weight of the test gas; r is molar gas constant; k (K) 1 The thickness d is corrected for the coefficient of a cylinder Kong Kelao Xin Xiuzheng; k (K) 2 Correcting the coefficient for the beam effect; k (K) 3 Is a free Cheng Xiuzheng coefficient; k (K) 4 And correcting the coefficient for the conical round hole.
The gases reaching substantially thermodynamic equilibrium, i.e. K, in the test enclosure 2 =1; the gas being in molecular flow state in the test enclosure, i.e. free Cheng Xiuzheng coefficient K 3 =1; since the small hole is a thin-walled small hole which is precisely machined, K is 4 =1; clausia Xin Xiuzheng coefficient K 1 Calculated using the Bemann formula:
r is the radius of the orifice conductance element, i.e., the calculation formula of the orifice conductance value C can be simplified as:
as shown in fig. 1 and 2, according to an aspect of the present invention, a method for using the high vacuum pump pumping speed testing device according to any one of the above embodiments is provided, including the following steps:
step S1, measuring the background pressure value P of the first test cover VC1 and the second test cover VC2 0 ；
Step S2, measuring the gas pressure P of the first test cover VC1 11 And the gas pressure P of the second test hood VC2 21 ；
Step S3, utilizing the background pressure value P of the first test cover VC1 and the second test cover VC2 0 Gas pressure P of first test hood VC1 11 Gas pressure P of second test hood VC2 21 And the conductance value C of the standard conductance element f, and calculating the pumping speed value of the high vacuum pump TMP to be tested.
In this embodiment, the background pressure value P of the first test hood VC1 and the second test hood VC2 is measured 0 Gas pressure P of first test hood VC1 11 And the gas pressure P of the second test hood VC2 21 In the process of calculating the conductance value C of the standard conductance element f, calculating the pumping speed value of the high vacuum pump TMP to be measured, and respectively measuring the pressure P by adopting a first vacuum gauge G1 0 、P 11 、P 21 The calculation result is obtained by utilizing the ratio of the vacuum gauge and is independent of the type of the test gas, so that the problems of calibration work of the first vacuum gauge G1 and original equivalent nitrogen pumping speed are avoided, the pumping speed value of the high vacuum pump TMP to be measured is obtained by the product of the calculated conductance value C and the pressure ratio, the problem that a known flowmeter needs to be used in the traditional flow method is solved, the problem that the sensitivity deviation of the two vacuum gauges is large so that the test precision is lower in the traditional flow method is solved, the problem of the defect of the traditional measurement pumping speed equivalent nitrogen is solved, the measurement precision is improved, the measurement efficiency is improved, the measurement cost is reduced, and the magnitude tracing in the measurement process is the standard flow conductance value.
Before the high vacuum pump pumping speed test is carried out, the method further comprises the following steps: the high vacuum pump TMP to be tested is arranged on the first test cover VC1, the air tightness of the connecting interface is detected, and the leak rate of the connecting interface is smaller than 1 multiplied by 10 -11 Pa·m 3 /s(5.5×10 -12 Pa·m 3 /s)。
In one embodiment of the present invention, preferably, in step S1, the following sub-steps are included:
step S11, recording the temperature (23.0 ℃) and the humidity (57%) under the test environment condition, closing a fifth valve V5, and opening a second vacuum gauge G2, a third vacuum gauge G3 and a fourth vacuum gauge G4;
step S12, a first backing pump RP and a flow-guide air extractor group pump are opened to extract air from the first test cover VC1 and the second test cover VC2, and a first valve V1, a second valve V2, a third valve V3 and a fourth valve V4 are opened;
step S13, after the indication values of the second vacuum gauge G2 (8.5 Pa) and the third vacuum gauge G3 (9.2 Pa) are smaller than 10Pa, turning on the high vacuum pump TMP to be tested and the high vacuum pump of the pump set pump to vacuumize the first test cover VC1, the second test cover VC2 and the pipeline;
step S14, reading in the second vacuum gauge G2 or the third vacuum gauge G3 is smaller than 5×10 -1 Pa (e.g. 4.3X10) -3 Pa), the vacuum gauge G1 is opened, and the pressure in the first test hood VC1 is less than 1×10 -6 Pa (e.g. 9.5X10) -7 Pa), the third valve V3 and the fourth valve V4 are closed;
step S15, after the first test cover VC1 and the second test cover VC2 reach the ultimate vacuum degree and after the reading of the first vacuum gauge G1 is stable, recording the pressure value displayed by the first vacuum gauge G1 as P 0 (e.g. 2.3X10) -7 Pa)。
In one embodiment of the present invention, preferably, in step S2, the following sub-steps are included:
step S21, closing the second valve V2 and ensuring that the first valve V1 is in an open state;
step S22, opening the fifth valve V5 and adjusting the opening degree thereof, and simultaneously keeping the pressure of the gas in the surge tank VC3 measured by the fourth vacuum gauge G4 from small to large within 10 Pa-1×10 5 In the Pa range (for example, 82 Pa), the pressure fluctuation of the gas in the surge tank VC3 is not more than 5% in the whole test process;
step S23, slowly opening the third valve V3 to introduce the gas in the surge chamber VC3 into the first valveIn a test cover VC1, after the reading of the first vacuum gauge G1 is stable, the pressure value displayed by the first vacuum gauge G1 is recorded as P 11 (e.g. 3.0X10) -4 Pa), the gas pressure in the plenum VC3 is required to remain stable throughout the test, the fourth gauge G4 does not fluctuate by more than 2% (e.g., 1.6%) of the reading;
step S24, closing the third valve V3, opening the fourth valve V4, introducing the gas in the plenum VC3 into the second test cover VC2, closing the first valve V1 and opening the second valve V2 after the reading of the third vacuum gauge G3 is stable, and recording the pressure value displayed by the first vacuum gauge G1 as P after the reading of the first vacuum gauge G1 is stable 21 (e.g. 2.6X10) -4 Pa)。
In one embodiment of the present invention, preferably, in step S3, the method specifically includes:
s31, calculating a conductance value C of the standard conductance element f through the small hole thickness d and the diameter l of the standard conductance element f;
step S32, calculating the pumping speed value S of the high vacuum pump TMP to be tested 1 The formula is:
during the test at each pressure point, the fourth gauge G4 measures no more than 2% (e.g., 1.8%) of the pressure fluctuation in the plenum VC 3.
In one embodiment of the present invention, preferably, the method further includes:
step S4, the test process is carried out from the test cover to low pressure to high pressure, the step S2 and the step S3 are repeated, three pressure points are selected for each pressure order for testing, and the pumping speed of the obtained high-vacuum pump is S respectively 1 ……S n Drawing a curve of pumping speed and pressure to obtain a pumping speed curve graph of the vacuum pump to be detected, wherein test data are shown in table 1:
TABLE 1
At a certain pressure point (3.0X10) -4 Pa) is repeatedly measured for 6 times, and the pumping speed of the obtained high vacuum pump under a certain pressure point is respectively S x1 、S x2 、.......S x6 The test data are shown in table 2:
TABLE 2
The experimental standard deviation was calculated according to the following formula.
Wherein S is the standard deviation, n is the number of tests, equal to 6,
is the average value of the pumping speed.
The repeated measurement uncertainty is:
uncertainty u of pumping speed measurement of high vacuum pump S The method comprises the following steps:
wherein u is 2 Uncertainty (3%) for the device itself;
high vacuum pump pumping speed measurement relative expansion uncertainty U rel The method comprises the following steps:
U rel ＝2u s ＝6％。
in one embodiment of the present invention, preferably, the method further includes:
and S5, after the pumping speed test of the high vacuum pump TMP to be tested is finished, closing the first vacuum gauge G1 and the first valve V1 to the sixth valve V6, sequentially closing the high vacuum pump TMP to be tested, the first backing pump RP, the flow-guiding air extractor group pump, the second vacuum gauge G2, the third vacuum gauge G3 and the fourth vacuum gauge G4, and finishing the test completely.
According to the high vacuum pump pumping speed testing device and the application method thereof, the air inlet pipeline is connected with the testing pipeline and the comparison pipeline simultaneously, the testing pipeline and the comparison pipeline are of symmetrical structures, and the high vacuum pump pumping speed testing device based on the symmetrical structure testing cover coupling standard conductance is obtained, and the background pressure value P of the first testing cover and the background pressure value P of the second testing cover are respectively measured by taking the first vacuum gauge as a reference standard 0 Gas pressure P of first test hood 11 And the gas pressure P of the second test cover 21 The method is characterized in that a standard flow guide element is adopted as a reference standard of standard pumping speed, a molecular flow guide value C of the standard flow guide element is obtained by measuring the thickness d and the diameter l of a central small hole of the standard flow guide element, the pumping speed value of a vacuum pump to be measured is finally calculated and obtained, a vacuum gauge is adopted as a comparator, the measuring process is only through the linearity of the vacuum gauge, the standard flow guide element is adopted as the reference standard, the vacuum gauge does not need to be calibrated by adopting specific gas, on one hand, the larger deviation caused by the inconsistency of sensitivity of the two traditional vacuum gauges is avoided, and meanwhile, only the molecular flow guide value of the reference standard flow guide element to detected gas is needed to be obtained, so that the defect of equivalent nitrogen in the traditional pumping speed measurement is overcome, and the method has the characteristics of high measuring result precision, low device cost, simple testing step, high testing efficiency and the like.
The foregoing has shown and described the basic principles, principal features and advantages of the invention. It will be understood by those skilled in the art that the present invention is not limited to the above-described embodiments, and that the above-described embodiments and descriptions are only preferred embodiments of the present invention, and are not intended to limit the invention, and that various changes and modifications may be made therein without departing from the spirit and scope of the invention as claimed. The scope of the invention is defined by the appended claims and equivalents thereof.
Claims (10)
1. The high vacuum pump pumping speed testing device comprises an air inlet pipeline and a testing pipeline connected with the air inlet pipeline, and is characterized by further comprising a comparison pipeline with a symmetrical structure of the testing pipeline, wherein the air inlet pipeline comprises an air source (Gas), a pressure stabilizing chamber (VC 3) and a fifth valve (V5) which are sequentially connected;
the test pipeline comprises a third valve (V3), a first test cover (VC 1), a high vacuum pump (TMP) to be tested and a first backing pump (RP) which are sequentially connected, and the first test cover (VC 1) is also connected with a second vacuum gauge (G2);
the comparison pipeline comprises a fourth valve (V4), a second test cover (VC 2), a standard flow guide element (f) and a flow guide air exhaust unit (pump) which are sequentially connected, and the second test cover (VC 2) is also connected with a third vacuum gauge (G3);
the first test cover (VC 1) is connected with the second test cover (VC 2) through a first valve (V1) and a second valve (V2), and a first vacuum gauge (G1) is connected between the first valve (V1) and the second valve (V2);
the first test cover (VC 1) and the second test cover (VC 2) are two vacuum containers with the same structural size, the same process treatment, the same ultimate vacuum degree and the same background leakage and gas discharge.
2. The high vacuum pumping speed test device according to claim 1, further comprising a sixth valve (V6) for controlling the air supply intake, wherein the plenum (VC 3) is further connected with a fourth vacuum gauge (G4).
3. The high vacuum pump pumping speed test device according to claim 2, wherein the first vacuum gauge (G1) is a sub-standard ionization vacuum gauge, and the measurement range is 10 -1 Pa～10 -9 Pa；
The second vacuum gauge (G2) and the third vacuum gauge (G3) are compound monitoring vacuum gauges, and the measuring range is 10 5 Pa～10 -8 Pa；
The fourth vacuum gauge (G4) is a capacitance film vacuum gauge combination, and the measurement range is 1 multiplied by 10 5 Pa-10 Pa, and the measurement accuracy is better than 0.5%.
4. The high vacuum pump speed test device according to claim 1, wherein the ratio of the estimated pumping speed value of the high vacuum pump (TMP) to be tested to the conductance value of the standard conductance element ranges from 0.5 to 2.
5. The high vacuum pumping speed test device as defined in claim 1, wherein the standard flow guide member (f) is a thin-walled circular orifice having a thickness of less than 0.5mm and centered on the double-sided flange.
6. A method of using the high vacuum pump speed test device of any one of claims 1-5, comprising the steps of:
step S1, measuring the background pressure value P of the first test cover (VC 1) and the second test cover (VC 2) 0 ；
Step S2, measuring the gas pressure P of the first test hood (VC 1) 11 And the gas pressure P of the second test hood (VC 2) 21 ；
Step S3, utilizing the background pressure value P of the first test hood (VC 1) and the second test hood (VC 2) 0 The gas pressure P of the first test hood (VC 1) 11 The gas pressure P of the second test hood (VC 2) 21 And calculating the pumping speed value of the high vacuum pump (TMP) to be tested according to the conductance value C of the standard conductance element.
7. The use according to claim 6, characterized in that in said step S1, it comprises the following sub-steps:
step S11, closing the fifth valve (V5), opening the second vacuum gauge (G2), the third vacuum gauge (G3) and the fourth vacuum gauge (G4);
step S12, opening the first backing pump (RP) and the flow guide air extractor group (pump) to extract air from the first test cover (VC 1) and the second test cover (VC 2), and opening a first valve (V1), a second valve (V2), a third valve (V3) and a fourth valve (V4);
step S13, after the indicated values of the second vacuum gauge (G2) and the third vacuum gauge (G3) are smaller than 10Pa, turning on a high vacuum pump (TMP) to be tested and a high vacuum pump of a flow guide air extractor unit (pump) to vacuumize the first test cover (VC 1), the second test cover (VC 2) and the pipeline;
step S14, reading at the second vacuum gauge (G2) or the third vacuum gauge (G3) is less than 5×10 -1 At Pa, the vacuum gauge G1 is opened, and the pressure in the first test hood (VC 1) is less than 1×10 -6 After Pa, closing the third valve (V3) and the fourth valve (V4);
step S15, after the first test cover (VC 1) and the second test cover (VC 2) reach the ultimate vacuum degree and after the reading of the first vacuum gauge (G1) is stable, recording the pressure value displayed by the first vacuum gauge (G1) as P 0 。
8. The use according to claim 6, characterized in that in said step S2, it comprises the following sub-steps:
step S21, closing the second valve (V2) and ensuring that the first valve (V1) is in an open state;
step S22, opening the fifth valve (V5) and adjusting the opening degree thereof, while keeping the pressure of the gas in the regulated pressure chamber (VC 3) measured by the fourth vacuum gauge (G4) from small to large within 10 Pa-1×10 5 In Pa;
step S23, slowly opening the third valve (V3), introducing the gas in the pressure stabilizing chamber (VC 3) into a first test cover (VC 1), and recording the pressure value displayed by the first vacuum gauge (G1) as P after the reading of the first vacuum gauge (G1) is stable 11 ；
Step S24, closing the third valve (V3), opening the fourth valve (V4), introducing the gas in the pressure stabilizing chamber (VC 3) into the second test cover (VC 2), and closing after the reading of the third vacuum gauge (G3) is stableClosing the first valve (V1) and opening the second valve (V2), and recording the pressure value displayed by the first vacuum gauge (G1) as P after the reading of the first vacuum gauge (G1) is stable 21 。
9. The method according to claim 6, wherein in the step S3, specifically comprising:
s31, calculating a conductance value C of the standard conductance element through the small hole thickness d and the diameter l of the standard conductance element;
step S32, calculating the pumping speed value S of the high vacuum pump (TMP) to be tested 1 The formula is:
10. the method of use of claim 6, further comprising:
step S4, the test process is carried out from the test cover to low pressure to high pressure, the step S2 and the step S3 are repeated, three pressure points are selected for testing according to each pressure order, and the pumping speed of the obtained high-vacuum pump is S respectively 1 ……S n Drawing a curve of pumping speed and pressure to obtain a pumping speed curve graph of the vacuum pump to be detected.
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| CN117212121A (en) * | 2023-09-04 | 2023-12-12 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117419996A (en) * | 2023-10-18 | 2024-01-19 | 北京东方计量测试研究所 | Device and method for preparing standard mixed gas by adopting flowmeter under vacuum condition |
| CN117490783A (en) * | 2023-10-18 | 2024-02-02 | 北京东方计量测试研究所 | The lower limit is 5×10 -18 Pa·m 3 Flow meter of/s and method of use thereof |
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| CN109854494A (en) * | 2018-12-17 | 2019-06-07 | 兰州空间技术物理研究所 | A kind of device and method of constant conductance method flowmeter measurement minipump pumping speed |
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| CN1865888A (en) * | 2006-06-15 | 2006-11-22 | 中国航天科技集团公司第五研究院第五一○研究所 | Device and method for measuring small orifice admittance by employing linear vacuum gauge |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN117212121A (en) * | 2023-09-04 | 2023-12-12 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117212121B (en) * | 2023-09-04 | 2024-03-01 | 北京东方计量测试研究所 | High vacuum pump pumping speed testing device and using method thereof |
| CN117419996A (en) * | 2023-10-18 | 2024-01-19 | 北京东方计量测试研究所 | Device and method for preparing standard mixed gas by adopting flowmeter under vacuum condition |
| CN117490783A (en) * | 2023-10-18 | 2024-02-02 | 北京东方计量测试研究所 | The lower limit is 5×10 -18 Pa·m 3 Flow meter of/s and method of use thereof |
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| CN116398421B (en) | 2023-12-19 |
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