CN109836055A - A kind of method of vacuum glass sealing device - Google Patents
A kind of method of vacuum glass sealing device Download PDFInfo
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- CN109836055A CN109836055A CN201711224446.2A CN201711224446A CN109836055A CN 109836055 A CN109836055 A CN 109836055A CN 201711224446 A CN201711224446 A CN 201711224446A CN 109836055 A CN109836055 A CN 109836055A
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Abstract
The invention belongs to glass sealing technical fields, and in particular to a kind of method of vacuum glass sealing device, comprising the following steps: sealing device is fitted into furnace, cryogenic vacuum processing, high temperature protection sealing-in and cooling annealing.In entering the cryogenic vacuum processing step after furnace, glass insulation internal body portion bubble, the pressure in defect can be eliminated, makes existing crackle expansion, forms channel with the external world.And then lead to a certain amount of protection gas and carry out high temperature protection sealing-in, it is heated to sealing temperature, temperature increases, and glass insulator in the molten state, can voluntarily make crackle up.The micro-positive pressure that protective gas generates when closed furnace body high temperature, and reduce the content of bubble in vitreum.In the annealing process that cools down, and eliminate the internal stress of glass.Using the device of the method sealing-in, phenomena such as effectively reducing intravitreous air bubble content and position micro-crack, therefore the technical indicators such as the air-tightness of glass sealing device, electrical property compression strength can be improved.
Description
Technical field
The invention belongs to glass sealing technical fields, and in particular to a kind of method of vacuum glass sealing device.
Background technique
Glass sealing device is with its preferable mechanical strength, good leakproofness, heat-resisting quantity and good electrical property
The features such as parameter, becomes the highly reliable device used under high pressure, high stress and high-temperature occasion.
If the glass sealing device glass body porosity big (deep hole sealing-in), glass surface and inside there are micro-crack,
Directly affect the technical indicators such as the air-tightness, electrical property, compression strength of glass sealing device.
Summary of the invention
In order to solve the above technical problem, the present invention provides a kind of methods of vacuum glass sealing device, eliminate glass
The sealing device vitreum porosity big (such as deep hole sealing-in), phenomena such as glass surface and inside are obvious there are micro-crack.
The invention is realized in this way providing a kind of method of vacuum glass sealing device, include the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
It is increased to 300-400 DEG C, 10-15min is kept the temperature, fills high pure nitrogen to 80KPa-100KPa;
3) vacuum drying oven is continuously heating to 900-1000 DEG C, keeps the temperature 25-40min, at this time pressure in furnace by high temperature protection sealing-in
About 110~120KPa;
4) cooling annealing, control rate of temperature fall is less than 30 DEG C/min, when vacuum furnace temperature is down to 500-700 DEG C,
10~30min is kept the temperature, pressure is about 90-110Kpa in furnace at this time, continues furnace cooling, until room temperature.
Further, this method comprises the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
350 DEG C are increased to, 10min is kept the temperature, fills high pure nitrogen to 90KPa;
3) vacuum drying oven is continuously heating to 935 DEG C, keeps the temperature 30min, pressure is about in furnace at this time by high temperature protection sealing-in
112KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 680 DEG C, keeps the temperature
15min, pressure is about 103Kpa in furnace at this time, continues furnace cooling, until room temperature.
Compared with the prior art, the advantages of the present invention are as follows effectively reduce vitreum using the device of the method sealing-in
Phenomena such as interior air bubble content and position micro-crack, therefore the air-tightness of glass sealing device, electrical property resistance to compression can be improved
The technical indicators such as intensity.
Specific embodiment
In order to make the objectives, technical solutions, and advantages of the present invention clearer, below with reference to embodiment, to the present invention
It is further elaborated.It should be appreciated that specific embodiment described herein is used only for explaining the present invention, it is not used to
Limit the present invention.
Embodiment 1,
A kind of method of vacuum glass sealing device, includes the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
300 DEG C are increased to, 10min is kept the temperature, fills high pure nitrogen to 80KPa;
3) vacuum drying oven is continuously heating to 900 DEG C, keeps the temperature 25min, pressure is about 110 in furnace at this time by high temperature protection sealing-in
~120KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 500 DEG C, keeps the temperature
10min, pressure is about 90-110Kpa in furnace at this time, continues furnace cooling, until room temperature.
Embodiment 2,
A kind of method of vacuum glass sealing device, includes the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
350 DEG C are increased to, 13min is kept the temperature, fills high pure nitrogen to 90KPa;
3) vacuum drying oven is continuously heating to 950 DEG C, keeps the temperature 30min, pressure is about 110 in furnace at this time by high temperature protection sealing-in
~120KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 600 DEG C, keeps the temperature
20min, pressure is about 90-110Kpa in furnace at this time, continues furnace cooling, until room temperature.
Embodiment 3,
A kind of method of vacuum glass sealing device, includes the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
400 DEG C are increased to, 15min is kept the temperature, fills high pure nitrogen to 100KPa;
3) vacuum drying oven is continuously heating to 1000 DEG C, keeps the temperature 40min, pressure is about 110 in furnace at this time by high temperature protection sealing-in
~120KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 700 DEG C, keeps the temperature
30min, pressure is about 90-110Kpa in furnace at this time, continues furnace cooling, until room temperature.
Embodiment 4,
A kind of method of vacuum glass sealing device, includes the following steps:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass
After insulator assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature
350 DEG C are increased to, 10min is kept the temperature, fills high pure nitrogen to 90KPa;
3) vacuum drying oven is continuously heating to 935 DEG C, keeps the temperature 30min, pressure is about in furnace at this time by high temperature protection sealing-in
112KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 680 DEG C, keeps the temperature
15min, pressure is about 103Kpa in furnace at this time, continues furnace cooling, until room temperature.
Certain battery cover product (CH-03), airtight air-tightness require 3 × 10-9Pa·m3/ s, insulation resistance require to be not less than
200MΩ.But because product entirety sealing-in thickness is only 1mm, contact pin and shell spacing are only 0.5mm, are protected and are sealed using normal atmosphere
Performance indicator is connect to be difficult to reach requirement, after patented method sealing-in, insulation with air-tightness be improved significantly.Specific experiment
Data are as follows:
Method for sealing | Product type | Quantity | Airtight qualification quantity | Resistance qualification quantity |
Common gases protect sealing-in | CH-03 | 30 | 17 | 25 |
Patented method sealing-in | CH-03 | 30 | 29 | 30 |
Claims (2)
1. a kind of method of vacuum glass sealing device, which comprises the steps of:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass insulation
After body assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature increase
To 300-400 DEG C, 10-15min is kept the temperature, fills high pure nitrogen to 80KPa-100KPa;
3) vacuum drying oven is continuously heating to 900-1000 DEG C, keeps the temperature 25-40min, pressure is about in furnace at this time by high temperature protection sealing-in
110~120KPa;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 500-700 DEG C, keeps the temperature
10~30min, pressure is about 90-110Kpa in furnace at this time, continues furnace cooling, until room temperature.
2. the method for vacuum glass sealing device according to claim 1, which comprises the steps of:
1) sealing device is fitted into furnace, i.e., by graphite jig needed for glassing sealing device, shell, contact pin, glass insulation
After body assembles, it is put into vacuum drying oven together;
2) cryogenic vacuum is handled, i.e., vacuum degree in vacuum drying oven is evacuated to less than 1Pa, then Raise vacuum furnace temperature, temperature increase
To 350 DEG C, 10min is kept the temperature, fills high pure nitrogen to 90KPa;
3) vacuum drying oven is continuously heating to 935 DEG C, keeps the temperature 30min, pressure is about 112KPa in furnace at this time by high temperature protection sealing-in;
4) cooling annealing controls rate of temperature fall less than 30 DEG C/min, when vacuum furnace temperature is down to 680 DEG C, keeps the temperature
15min, pressure is about 103Kpa in furnace at this time, continues furnace cooling, until room temperature.
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CN201711224446.2A CN109836055A (en) | 2017-11-29 | 2017-11-29 | A kind of method of vacuum glass sealing device |
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CN201711224446.2A CN109836055A (en) | 2017-11-29 | 2017-11-29 | A kind of method of vacuum glass sealing device |
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CN109836055A true CN109836055A (en) | 2019-06-04 |
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ID=66881943
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CN201711224446.2A Pending CN109836055A (en) | 2017-11-29 | 2017-11-29 | A kind of method of vacuum glass sealing device |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115368000A (en) * | 2022-08-31 | 2022-11-22 | 歌尔股份有限公司 | Preparation method of glass shell, glass shell and electronic device |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3374076A (en) * | 1964-09-28 | 1968-03-19 | Corning Glass Works | Method for producing hermetic glass to metal seals |
JPH02107541A (en) * | 1988-10-14 | 1990-04-19 | Matsushita Electric Ind Co Ltd | Method for sealing airtight vessel with glass |
CN101538127A (en) * | 2009-04-22 | 2009-09-23 | 西安华泰有色金属实业有限责任公司 | Sealing-in method of metallic titanium and glass terminal post |
CN101746964A (en) * | 2008-12-19 | 2010-06-23 | 沈阳兴华航空电器有限责任公司 | Titanium alloy and glass sealing process method |
CN105390900A (en) * | 2015-12-24 | 2016-03-09 | 永新电子常熟有限公司 | High-temperature resistant electronic connector |
CN105461241A (en) * | 2015-12-24 | 2016-04-06 | 永新电子常熟有限公司 | Preparation method of high temperature-resisting electronic linkage |
-
2017
- 2017-11-29 CN CN201711224446.2A patent/CN109836055A/en active Pending
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3374076A (en) * | 1964-09-28 | 1968-03-19 | Corning Glass Works | Method for producing hermetic glass to metal seals |
JPH02107541A (en) * | 1988-10-14 | 1990-04-19 | Matsushita Electric Ind Co Ltd | Method for sealing airtight vessel with glass |
CN101746964A (en) * | 2008-12-19 | 2010-06-23 | 沈阳兴华航空电器有限责任公司 | Titanium alloy and glass sealing process method |
CN101538127A (en) * | 2009-04-22 | 2009-09-23 | 西安华泰有色金属实业有限责任公司 | Sealing-in method of metallic titanium and glass terminal post |
CN105390900A (en) * | 2015-12-24 | 2016-03-09 | 永新电子常熟有限公司 | High-temperature resistant electronic connector |
CN105461241A (en) * | 2015-12-24 | 2016-04-06 | 永新电子常熟有限公司 | Preparation method of high temperature-resisting electronic linkage |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN115368000A (en) * | 2022-08-31 | 2022-11-22 | 歌尔股份有限公司 | Preparation method of glass shell, glass shell and electronic device |
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