CN109827727A - A kind of shock wave seat excitation apparatus and its working method loading hot environment - Google Patents
A kind of shock wave seat excitation apparatus and its working method loading hot environment Download PDFInfo
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Abstract
A kind of shock wave seat excitation apparatus loading hot environment, belongs to micromachine electronic technology field.The device includes cylinder, the bottom plate for being mounted on cylinder body bottom, micro-structure exciting unit and light heating unit.MEMS micro-structure is equipped with by micro-structure mounting plate bonding in cross-spring piece top center in micro-structure exciting unit, plate electrode is equipped with by potsherd bonding in cross-spring piece bottom centre；Ceramic tube is equipped with by holding screw in the second connecting plate bottom central through hole, is connected to pin electrode in ceramic tube inner sleeve load.Anti-dazzling screen and barn door are used in light heating unit, so that being only capable of being radiated in MEMS micro-structure by the directional light that light heating unit issues.Heating while to MEMS micro-structure entirety may be implemented in the device, it is ensured that the uniformity of temperature profile of micro-structure surface reduces the temperature gradient of micro-structure surface, and the accuracy of micro-structure dynamic characteristics parameter testing under hot environment greatly improved.
Description
Technical field
The present invention relates to a kind of shock wave seat excitation apparatus and its working method for loading hot environment, belong to micromachine
Electronic system technology field.
Background technique
Since to have that at low cost, small in size, light-weight, integrated level is high and intelligence degree is high etc. a series of for MEMS micro element
Feature, at present automobile, aerospace, information communication, biochemistry, medical treatment, automatic control, the consumer goods and national defence etc. very
It is multi-field to be widely used.When designing and developing MEMS, since system function mainly passes through the small of micro-structure
Displacement and deformation are realized, need to measure the dynamic property of micromechanical component, therefore to the mechanical movement parameter of MEMS such as displacement, speed
Degree, amplitude, frequency and mode of oscillation etc. carry out the important content that precise measurement has become exploitation MEMS.As MEMS product is answered
With the continuous expansion in field, test and research to its dynamic mechanically characteristic can not be limited under normal environment, but be needed
Its dynamic characteristic under Effect of Hyperthermic Environment is tested, so as to right in conjunction with actual use environment, such as hot environment
The stability and reliability of product are assessed, to device design, the improvement of manufacture craft and device in terms of
Directive function is played, research and development cost can also be reduced, reduces the development time.
In order to test micro-structure dynamic characteristic parameter in a high temperauture environment, on the one hand needing, which generates micro-structure, vibrates,
It namely needs to motivate micro-structure.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high,
Motivational techniques and exciting bank in tradition machinery mould measurement can not be used in the vibrational excitation of MEMS micro-structure.Closely
Over 30 years, researcher both domestic and external has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, develops
Some motivational techniques that can be used for MEMS micro-structure and corresponding exciting bank, wherein motivational techniques energy based on ultrasound
Enough excitations realized well to micro-structure.
On the other hand, it exactly needs to heat up to micro-structure, that is, it is heated.Publication No.
The Chinese utility model patent of CN206074210U discloses a kind of hot environment for the test of MEMS micro-structure dynamic characteristics
Loading device in the apparatus heats micro-structure by the method for heat transfer as heat source using electrically heated rod；It is open
Number the dynamic testing loading unit of a kind of MEMS disk or device is disclosed for the Chinese invention patent of CN1666952A, in the dress
Middle use electric boiling plate is set as heat source, MEMS disk is heated by the method for heat transfer；She Dongsheng etc. is " based on sharp
The MEMS micro-structure pedestal technique study excited by impact of wave " in describe a kind of MEMS micro-structure that can load hot environment and swash
Wave excitation device in the apparatus adds MEMS micro-structure by the method for heat transfer as heat source using electrically heated rod
Heat.When being heated using the heating method of above-mentioned heat transfer to micro-structure, since thermal energy is passed again via micro-structure substrate
It is delivered in micro-structure, therefore the thermo parameters method in micro-structure is very uneven, apart from the temperature of substrate distal end in micro-structure
It will be lower than the temperature at proximate substrate, according to F. Shen etc. in " Thermal effects on coated resonant
Microcantilevers " in result of study tested under high temperature environment when the thermo parameters method in micro-structure is uneven
The accuracy of micro-structure dynamic characteristics parameter will be greatly reduced.Therefore, micro-structure is carried out using heat transfer in the prior art
The mode of heating has the shortcomings that very big.
Summary of the invention
Technical problem to be solved by the invention is to provide it is a kind of load hot environment shock wave seat excitation apparatus and its
Working method, which, which can be realized, loads hot environment to MEMS micro-structure, and to the micro- knot of MEMS under the condition of high temperature
Structure is motivated, while ensuring micro-structure surface uniformity of temperature profile, reduces the temperature gradient of micro-structure surface, improves high temperature ring
The accuracy of MEMS micro-structure dynamic characteristics parameter testing result under border.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of shock wave seat excitation apparatus loading hot environment, including cylinder and the bottom plate for being mounted on cylinder body bottom, feature
It is: is equipped with micro-structure exciting unit on bottom plate, the micro-structure exciting unit includes first manual three-shaft displacement platform and second
Manual three-shaft displacement platform is equipped with the first connecting plate on the Z axis slide carriage of first manual three-shaft displacement platform, on the first connecting plate top
Face center is equipped with ladder-like mounting hole, cross-spring piece is equipped at the ring ladder in mounting hole, on cross-spring piece top
Portion center is equipped with MEMS micro-structure by micro-structure mounting plate bonding, is bonded in cross-spring piece bottom centre by potsherd
Plate electrode is installed；The second connecting plate is installed on the Z axis slide carriage of second-hand's dynamic triaxial displacement platform, in the second connecting plate bottom
Ceramic tube is equipped with by holding screw in central through hole, is connected to pin electrode in ceramic tube inner sleeve load；The pin electrode and plate
Electrode is electrically connected with the two poles of the earth of high-voltage capacitance respectively, and first switch is equipped between pin electrode and high-voltage capacitance and controls on-off；Institute
The two poles of the earth for stating high-voltage capacitance are electrically coupled to the positive and negative anodes of high voltage power supply respectively, and control on-off by second switch；
Electronic two axle positions moving stage is installed at the top of cylinder, is pacified on the sliding block of electronic two axle positions moving stage by light heating unit
Loading board is equipped with light heating unit, and the smooth heating unit includes the front sleeve being successively threadedly coupled, connects sleeve and after sleeve,
Source of parallel light is installed in the centre bore of after sleeve tail portion；
It is equipped with ladder-like mounting hole in connection barrel forward end, is equipped with circular optical glass at the ring ladder in mounting hole,
It is bonded with anti-dazzling screen at the centre of surface of after sleeve on optical glass, annular pressure is installed in the front end face of connection sleeve
Plate, circumference uniform distribution is equipped with holding screw on pressing plate, and holding screw screws in pressing plate and simultaneously hold out against on optical glass；
It is equipped with outer ring body at front sleeve front end center, the second guiding axis is installed on outer ring body, before the second guiding axis passes through
The protruding portion in barrel forward end face is simultaneously connected in the second push plate, and the second adjusting knob is equipped at the second push plate center, and second adjusts
Section knob passes through the centre bore of the second push plate and is threaded on the protruding portion of front sleeve front end face, in the second push plate and protheca
It is equipped with second back-moving spring between the protruding portion of cylinder front end face, second back-moving spring is sleeved on the second adjusting knob, for adjusting
Save the position of outer ring body；
It is equipped with inner ring body at outer ring body front end center, the first guiding axis (407) are installed on inner ring body, the first guiding axis is worn
It crosses the protruding portion of outer ring body front end face and is connected in the first push plate, the first adjusting knob is equipped at the first push plate center, the
One adjusting knob passes through the centre bore of the first push plate and is threaded on the protruding portion of outer ring body front end face, in the first push plate and
First back-moving spring is equipped between the protruding portion of outer ring body front end face, first back-moving spring is sleeved on the first adjusting knob, is used
In the position for adjusting inner ring body；Barn door is installed on inner ring body rear end face, barn door has rectangular opening at center；
The shape of rectangular opening is identical as the shapes of substrates of MEMS micro-structure on the barn door, the shape and MEMS of the anti-dazzling screen
The shape of hollow slots is identical in micro-structure.
A kind of working method for the shock wave seat excitation apparatus loading hot environment, comprising the following steps:
(1) front sleeve is screwed, and adjusts the first push plate, the first adjusting knob in the second push plate, the second adjusting knob, is adjusted simultaneously
First manual three-shaft displacement platform is saved, the directional light for launching light heating unit is only capable of being radiated in MEMS micro-structure；
(2) first switch and the second switch is all turned off state, adjusts second-hand's dynamic triaxial displacement platform, makes pin electrode
The center of tip alignment plate electrode, and guarantee that the distance between they are empty greater than maximum of the high-voltage capacitance 8 after fully charged
Gas punctures gap；
(3) MEMS micro-structure is heated using light heating unit, by MEMS micro-structure under the assistance of infrared measurement of temperature instrument
It is heated to target temperature, after target temperature to be achieved, controls electronic two axle positions moving stage for light heating unit and be moved adjacent to cylinder
Optical system for testing is conceded in edge；
(4) it is closed second switch, the use of high voltage power supply is high-voltage capacitor charging, disconnects second switch again after charging complete；
(5) it is closed first switch, the second manual displacement platform is adjusted, makes pin electrode close to plate electrode, when the needle point and plate of pin electrode
When the distance between electrode meets the air breakdown condition under current charging voltage, the air gap is breakdown, completes to discharge and produce
Raw shock wave is realized to the excited by impact of MEMS micro-structure, while obtaining MEMS micro-structure using non-contacting optical vibrometer device
Vibratory response, to obtain dynamic characteristic parameter of the MEMS micro-structure under the target temperature.
The beneficial effects of the present invention are:
1, due to using the heating method of light radiation, adding while may be implemented to MEMS micro-structure entirety in a device
Heat, it is ensured that the uniformity of temperature profile of micro-structure surface reduces the temperature gradient of micro-structure surface, and high temperature ring greatly improved
The accuracy of micro-structure dynamic characteristics parameter testing under border.
2, due to having used anti-dazzling screen and barn door, and hollow out in the shape of anti-dazzling screen and MEMS micro-structure in a device
The shape of slot is identical, and the shape of rectangular opening is identical as the shapes of substrates of MEMS micro-structure on barn door, so that by light heating unit
The directional light of sending is only capable of being radiated in MEMS micro-structure, avoids the unnecessary temperature of non-refractory part in exciting bank
It rises, improves exciting bank reliability, expanded the scope of application of device.
3, due to generating shock wave using needle, plate electrode electric discharge in a device, the reliability of exciting bank and steady is improved
It is qualitative.
Detailed description of the invention
Fig. 1 is the schematic perspective view of device.
Fig. 2 is the schematic perspective view of light heating unit.
Fig. 3 is the front view of light heating unit.
Fig. 4 is the A-A cross-sectional view of Fig. 3.
Fig. 5 is that light heating unit removes the rearview after after sleeve and source of parallel light.
Fig. 6 is the schematic perspective view of micro-structure exciting unit.
Fig. 7 is the front view of micro-structure exciting unit.
Fig. 8 is the B-B cross-sectional view of Fig. 7.
Fig. 9 is the circuit diagram of high-voltage capacitance charge and discharge.
Figure 10 is the top view of MEMS micro-structure.
In figure: 1, cylinder, 2, electronic two axle positions moving stage, 3, light heating unit mounting plate, 4, light heating unit, 401, rear enclosure
Cylinder, 402, connection sleeve, 403, front sleeve, 404, outer ring body, 405, inner ring body, 406, barn door, the 407, first guiding axis,
4071, the second guiding axis, 408, first back-moving spring, 4081, second back-moving spring, the 409, first push plate, 410, first is adjusted
Knob, the 4101, second adjusting knob, 411, axle sleeve, the 412, second push plate, 413, pressing plate, 414, holding screw, 415, directional light
Source, 416, anti-dazzling screen, 417, optical glass, 5, micro-structure exciting unit, 501, first manual three-shaft displacement platform, 502, second-hand
Dynamic triaxial displacement platform, the 503, first connecting plate, the 504, second connecting plate, 505, pin electrode, 506, holding screw, 507, ceramics
Pipe, 508, MEMS micro-structure, 5081, hollow slots, 5082, substrate, 509, micro-structure mounting plate, 510, cross-spring piece, 511,
Potsherd, 512, plate electrode, 6, bottom plate, 7, first switch, 8, high-voltage capacitance, 9, second switch, 10, high voltage power supply.
Specific embodiment
As Figure 1-10 shows, the shock wave seat excitation apparatus of this load hot environment includes cylinder 1 and is mounted on cylinder 1
The bottom plate 6 of bottom, is equipped with micro-structure exciting unit 5 on bottom plate 1, and the micro-structure exciting unit 5 includes first-hand dynamic triaxial
Displacement platform 501 and second-hand's dynamic triaxial displacement platform 502, are equipped with first on the Z axis slide carriage of first manual three-shaft displacement platform 501
Connecting plate 503 is equipped with ladder-like mounting hole in 503 end face center of the first connecting plate, installs at the ring ladder in mounting hole
There is cross-spring piece 510, the micro- knot of MEMS is equipped with by the bonding of micro-structure mounting plate 509 in 510 top center of cross-spring piece
Structure 508 is equipped with plate electrode 512 by the bonding of potsherd 511 in 510 bottom centre of cross-spring piece；In second-hand's dynamic triaxial
Second connecting plate 504 is installed on the Z axis slide carriage of displacement platform 502, passes through tightening in 504 bottom centre's through-hole of the second connecting plate
Screw 506 is equipped with ceramic tube 507, is connected to pin electrode 505 in 507 inner sleeve load of ceramic tube；The pin electrode 505 and plate electrode
512 the two poles of the earth respectively with high-voltage capacitance 8 electrically connect, and it is logical that the control of first switch 7 is equipped between pin electrode 505 and high-voltage capacitance 8
It is disconnected；The two poles of the earth of the high-voltage capacitance 8 are electrically coupled to the positive and negative anodes of high voltage power supply 10 respectively, and control on-off by second switch 9；
Electronic two axle positions moving stage 2 is installed at the top of cylinder 1, list is heated by light on the sliding block of electronic two axle positions moving stage 2
First mounting plate 3 is equipped with light heating unit 4, and the smooth heating unit 4 includes front sleeve 403, the connector sleeve being successively threadedly coupled
Cylinder 402 and after sleeve 401, are equipped with source of parallel light 415 in 401 tail portion centre bore of after sleeve；
It is equipped with ladder-like mounting hole in connection 402 front end of sleeve, is equipped with circular optical glass at the ring ladder in mounting hole
417, it is bonded with anti-dazzling screen 416 at the centre of surface of after sleeve 401 on optical glass 417, before connecting sleeve 402
End face is equipped with annular pressing plate 413, and circumference uniform distribution is equipped with holding screw 414, the screw-in of holding screw 414 on pressing plate 413
Pressing plate 413 is simultaneously held out against on optical glass 417；
It is equipped with outer ring body 404 at 403 front end center of front sleeve, the second guiding axis 4071 is installed on outer ring body 404, second
Guiding axis 4071 passes through the protruding portion of 403 front end face of front sleeve and is connected in the second push plate 412, at 412 center of the second push plate
Place is equipped with the second adjusting knob 4101, before the second adjusting knob 4101 passes through the centre bore of the second push plate 412 and is threaded in
On the protruding portion of 403 front end face of sleeve, it is multiple that second is equipped between the protruding portion of 403 front end face of the second push plate 412 and front sleeve
Position spring 4081, second back-moving spring 4081 is sleeved on adjusting knob 410, for adjusting the position of outer ring body 404；
It is equipped with inner ring body 405 at 404 front end center of outer ring body, the first guiding axis 407 is installed on inner ring body 405, first
Guiding axis 407 passes through the protruding portion of 404 front end face of outer ring body and is connected in the first push plate 409, at 409 center of the first push plate
Equipped with the first adjusting knob 410, the first adjusting knob 410 passes through the centre bore of the first push plate 409 and is threaded in outer ring body
On the protruding portion of 404 front end faces, first is equipped between the protruding portion of 404 front end face of the first push plate 409 and outer ring body and resets bullet
Spring 408, first back-moving spring 408 is sleeved on the first adjusting knob 410, for adjusting the position of inner ring body 405；In inner ring body
Barn door 406 is installed, barn door has rectangular opening at 406 center on 405 rear end faces；
The shape of rectangular opening and 5082 shape of substrate of MEMS micro-structure 508 are identical on the barn door 406, the anti-dazzling screen
416 shape is identical as the shape of hollow slots 5081 in MEMS micro-structure 508.
The working method of the shock wave seat excitation apparatus of this load hot environment: it firstly, screwing front sleeve 403, and adjusts
The first push plate 409, the first adjusting knob 410 in the second push plate 412, the second adjusting knob 4101 are saved, while being adjusted first-hand
Dynamic triaxial displacement platform 501, the directional light for launching light heating unit 4 are only capable of being radiated in MEMS micro-structure 508；Then, will
First switch 7 and second switch 9 are all turned off state, adjust second-hand's dynamic triaxial displacement platform 502, make pin electrode 505
The center of tip alignment plate electrode 512, and guarantee maximum of the distance between they greater than high-voltage capacitance 8 after fully charged
Air breakdown gap；Secondly, being heated using light heating unit 4 to MEMS micro-structure 508, in the assistance of infrared measurement of temperature instrument
It is lower that MEMS micro-structure 508 is heated to target temperature, after target temperature to be achieved, controls electronic two axle positions moving stage 2 and heat light
Unit 4 is moved adjacent to 1 edge of cylinder, concedes optical system for testing；Again, it is closed second switch 9, the use of high voltage power supply 10 is height
Voltage capacitance 8 charges, and disconnects second switch 9 again after charging complete；Finally, closure first switch 7, adjusts the second manual displacement
Platform 502 makes pin electrode 505 close to plate electrode 512, when the distance between the needle point of pin electrode 505 and plate electrode 512 meet currently
When air breakdown condition under charging voltage, the air gap is breakdown, and completing to discharge simultaneously generates shock wave, realizes to MEMS micro-structure
508 it is excited by impact, while using non-contacting optical vibrometer device obtain MEMS micro-structure 508 vibratory response, to obtain
Take dynamic characteristic parameter of the MEMS micro-structure 508 under the target temperature.
This kind load hot environment shock wave seat excitation apparatus working method the following steps are included:
(1) front sleeve 403 is screwed, and the first adjusting knob 410, second in the first push plate 409 of adjusting, the second push plate 412 is adjusted
Knob 4101 is saved, while adjusting first manual three-shaft displacement platform 501, the directional light for launching light heating unit 4 is only capable of irradiating
In MEMS micro-structure 508；
(2) first switch 7 and second switch 9 are all turned off state, adjust second-hand's dynamic triaxial displacement platform 502, makes needle
The center of the tip alignment plate electrode 512 of electrode 505, and guarantee that the distance between they are greater than high-voltage capacitance 8 and sufficiently fill
Maximum air breakdown gap after electricity；
(3) MEMS micro-structure 508 is heated using light heating unit 4, it is under the assistance of infrared measurement of temperature instrument that MEMS is micro-
Structure 508 is heated to target temperature, after target temperature to be achieved, controls electronic two axle positions moving stage 2 and is moved to light heating unit 4
Close to 1 edge of cylinder, optical system for testing is conceded；
(4) it is closed second switch 9, the use of high voltage power supply 10 is the charging of high-voltage capacitance 8, disconnects second again after charging complete and open
Close 9；
(5) it is closed first switch 7, the second manual displacement platform 502 is adjusted, makes pin electrode 505 close to plate electrode 512, work as pin electrode
When the distance between 505 needle point and plate electrode 512 meet the air breakdown condition under current charging voltage, the air gap is hit
It wears, completes to discharge and generate shock wave, realize to the excited by impact of MEMS micro-structure 508, while using non-contacting optics vibration measuring
Instrument obtains the vibratory response of MEMS micro-structure 508, to obtain dynamic characteristic of the MEMS micro-structure 508 under the target temperature
Parameter.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (2)
1. a kind of shock wave seat excitation apparatus for loading hot environment, including cylinder (1) and it is mounted on the bottom plate of cylinder (1) bottom
(6), electronic two axle positions moving stage (2) is installed at the top of cylinder (1), passes through light on the sliding block of electronic two axle positions moving stage (2)
Heating unit mounting plate (3) is equipped with light heating unit (4), it is characterised in that: the smooth heating unit (4) includes successively screw thread
Front sleeve (403), connection sleeve (402) and the after sleeve (401) of connection, are equipped in the centre bore of after sleeve (401) tail portion
Source of parallel light (415)；
It is equipped with ladder-like mounting hole in connection sleeve (402) front end, is equipped with circular optical glass at the ring ladder in mounting hole
Glass (417) is bonded with anti-dazzling screen (416) at the centre of surface of after sleeve (401) on optical glass (417), is connecting
The front end face of sleeve (402) is equipped with annular pressing plate (413), and circumference uniform distribution is equipped with holding screw on pressing plate (413)
(414), holding screw (414) screws in pressing plate (413) and holds out against on optical glass (417)；
Outer ring body (404) are equipped at front sleeve (403) front end center, the second guiding axis is installed on outer ring body (404)
(4071), the second guiding axis (4071) passes through the protruding portion of front sleeve (403) front end face and is connected on the second push plate (412),
The second adjusting knob (4101) are equipped at the second push plate (412) center, the second adjusting knob (4101) passes through the second push plate
(412) centre bore is simultaneously threaded on the protruding portion of front sleeve (403) front end face, in the second push plate (412) and front sleeve
(403) second back-moving spring (4081) are equipped between the protruding portion of front end face, second back-moving spring (4081) is sleeved on the second tune
It saves on knob (4101), for adjusting the position of outer ring body (404)；
Inner ring body (405) are equipped at outer ring body (404) front end center, the first guiding axis is installed on inner ring body (405)
(407), the first guiding axis (407) passes through the protruding portion of outer ring body (404) front end face and is connected on the first push plate (409),
The first adjusting knob (410) are equipped at first push plate (409) center, the first adjusting knob (410) passes through the first push plate (409)
Centre bore is simultaneously threaded on the protruding portion of outer ring body (404) front end face, before the first push plate (409) and outer ring body (404)
First back-moving spring (408) are equipped between the protruding portion of end face, first back-moving spring (408) is sleeved on the first adjusting knob
(410) on, for adjusting the position of inner ring body (405)；Barn door (406), shading are installed on inner ring body (405) rear end face
There is rectangular opening at plate (406) center；
Micro-structure exciting unit (5) are equipped on bottom plate 1, the micro-structure exciting unit (5) includes first manual three-shaft displacement
Platform (501) and second-hand's dynamic triaxial displacement platform (502) are equipped on the Z axis slide carriage of first manual three-shaft displacement platform (501)
One connecting plate (503) is equipped with ladder-like mounting hole in the first connecting plate (503) end face center, the ring ladder in mounting hole
Place is equipped with cross-spring piece (510), passes through micro-structure mounting plate (509) bonding peace in cross-spring piece (510) top center
Equipped with MEMS micro-structure (508), plate electrode is equipped with by potsherd (511) bonding in cross-spring piece (510) bottom centre
(512)；Second connecting plate (504) are installed on the Z axis slide carriage of second-hand's dynamic triaxial displacement platform (502), in the second connecting plate
(504) ceramic tube (507) are installed by holding screw (506) in bottom centre's through-hole, inner sleeve load connects in ceramic tube (507)
There are pin electrode (505)；The two poles of the earth of the pin electrode (505) and plate electrode (512) respectively with high-voltage capacitance (8) electrically connect, in needle
It is equipped with first switch (7) between electrode (505) and high-voltage capacitance (8) and controls on-off；The two poles of the earth of the high-voltage capacitance (8) are electric respectively
The positive and negative anodes of high voltage power supply (10) are attached to, and control on-off by second switch (9)；
The shape of rectangular opening is identical as substrate (5082) shape of MEMS micro-structure (508) on the barn door (406), the screening
The shape of mating plate (416) is identical as the shape of hollow slots (5081) on MEMS micro-structure (508).
2. a kind of working method of shock wave seat excitation apparatus for loading hot environment according to claim 1, feature
It is, comprising the following steps:
(1) it screws front sleeve (403), and the first adjusting knob in adjusting the first push plate (409), the second push plate (412)
(410), the second adjusting knob (4101), while first manual three-shaft displacement platform (501) is adjusted, emit light heating unit (4)
Directional light out is only capable of being radiated on MEMS micro-structure (508)；
(2) first switch (7) and second switch (9) are all turned off state, adjust second-hand's dynamic triaxial displacement platform
(502), make the center of the tip alignment plate electrode (512) of pin electrode (505), and guarantee that the distance between they are greater than height
Maximum air breakdown gap after voltage capacitance 8 is fully charged；
(3) MEMS micro-structure (508) is heated using light heating unit (4), it will under the assistance of infrared measurement of temperature instrument
MEMS micro-structure (508) is heated to target temperature, after target temperature to be achieved, controls electronic two axle positions moving stage (2) and heats light
Unit (4) is moved adjacent to cylinder (1) edge, concedes optical system for testing；
(4) second switch (9) are closed, the use of high voltage power supply (10) are high-voltage capacitance (8) charging, are disconnected again after charging complete
Second switch (9)；
(5) first switch (7) are closed, adjust the second manual displacement platform (502), make pin electrode (505) close to plate electrode (512),
When the distance between the needle point of pin electrode (505) and plate electrode (512) meet the air breakdown condition under current charging voltage,
The air gap is breakdown, completes to discharge and generate shock wave, realizes to the excited by impact of MEMS micro-structure (508), while using non-
The optical vibrometer device of contact obtains the vibratory response of MEMS micro-structure (508), to obtain MEMS micro-structure (508) in the mesh
Dynamic characteristic parameter at a temperature of mark.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111024349A (en) * | 2019-12-23 | 2020-04-17 | 北京工业大学 | High-temperature multi-axis vibration fatigue test method |
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