CN106477518A - A kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure - Google Patents
A kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure Download PDFInfo
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- CN106477518A CN106477518A CN201610866661.1A CN201610866661A CN106477518A CN 106477518 A CN106477518 A CN 106477518A CN 201610866661 A CN201610866661 A CN 201610866661A CN 106477518 A CN106477518 A CN 106477518A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
- B81C99/00—Subject matter not provided for in other groups of this subclass
- B81C99/0035—Testing
- B81C99/005—Test apparatus
Abstract
The invention discloses a kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure, including the manual three-shaft displacement platform and the bearing that are located on substrate, pin electrode unit is provided with manual three-shaft displacement platform, its pin electrode points to microstructure unit；Microstructure unit includes installation set, which is installed in the hole and is provided with elastic base and heating ring body, elastic base is annular flake and is provided with annular boss in the middle that big in the hole is installed with plate electrode on the outside of which, press-fits MEMS metal micro structure by micro-structural pressing plate on the inside of elastic base；Electrically heated rod is inserted with heating ring body；A confined space is formed by cover body and elastic base in installation set, MEMS metal micro structure is located in the confined space；Pin electrode and plate electrode are electrically connected with high-voltage capacitance respectively, and high-voltage capacitance the two poles of the earth are respectively coupled to high voltage power supply both positive and negative polarity.Advantage is that structure is firmly installed, easy to operate and safe, and temperature control precisely, is easy to test the dynamic characteristic parameter of MEMS metal micro structure.
Description
Technical field
The invention belongs to micromachine electronic system technology field, more particularly to one kind can be in high temperature environments to MEMS gold
Category micro-structural enters the shock wave exciting bank of row energization.
Background technology
As MEMS micro element has the advantages that low cost, small volume and lightweight so as in automobile, Aero-Space, letter
Breath communication, biochemistry, medical treatment, automatically control and suffer from being widely applied prospect with numerous areas such as national defence.For a lot
For MEMS, the micro-displacement of its internal microstructure and micro-strain are the bases that device function is realized, therefore to these
The dynamic characteristic parameters such as the amplitude of micro-structural, intrinsic frequency, damping ratio carry out accurate test and have become as exploitation MEMS product
Important content.
In order to test the dynamic characteristic parameter of micro-structural, it is necessary first to make micro-structural produce vibration, that is, need to micro-
Structure enters row energization.As MEMS micro-structural has, size is little, lightweight and the features such as intrinsic frequency is high, and tradition machinery mode is surveyed
Motivational techniques and exciting bank in examination cannot be used in the middle of the vibrational excitation of MEMS micro-structural.Recent two decades come, domestic
Outer researcher has carried out substantial amounts of exploration for the vibrational excitation method of MEMS micro-structural, investigated some and can be used for
The motivational techniques of MEMS micro-structural and corresponding exciting bank.Wherein, She Dongsheng etc. exists《MEMS micro-structural bottom based on shock wave
Seat technique study excited by impact》A kind of seat excitation apparatus based on shock wave are described in one text, and the device has excitation bandwidth
Greatly, the advantages of applied widely, possesses good application potential.But the device remains its own shortcomings：First, in dress
Used in putting, used as the understructure for carrying micro-structural, micro-structural and its mounting structure are bonded to ten for cross-spring piece
The top center of word spring leaf, when row energization is entered to micro-structural, cross-spring sector-meeting produces larger flexural deformation；One
Aspect this can cause the deformation of micro-structural installing plate, cause the damage of micro-structural；On the other hand this can make micro-structural installing plate and
Between cross-spring piece, cured glue bears very big pulling force, and after repeatedly being encouraged, glue easily ftractures, micro-structural
Installing plate can produce loosening, depart from cross-spring piece；Second, in a device, between cross-spring piece, potsherd and plate electrode on
Lower superposition arrangement, and be all fixed using the mode of glue bonding between two adjacent parts, this bonded structure is not
Enough firm, after multiple discharge, it is easily separated between each layer；3rd, in a device, feed mechanism can only be adjusted manually,
Auto-feed can not be realized, guiding discharge complex operation and security is poor；4th, as micro-structural is to be completely exposed in atmosphere
, therefore when being heated to micro-structural using the device, cross-ventilation effect is fairly obvious, causes the actual temperature of micro-structural
There is very big difference between degree and the measured value of temperature sensor.
Content of the invention
The technical problem to be solved is to provide one kind to carry out MEMS metal micro structure in high temperature environments
The shock wave exciting bank of excitation, the apparatus structure is firmly installed, easy to operate and safe, and temperature control precisely, is easy to test MEMS
The dynamic characteristic parameter of metal micro structure.
For solving the above problems, the present invention is adopted the following technical scheme that：
A kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure, including substrate,
Substrate is provided with manual three-shaft displacement platform and bearing, is provided with pin electrode unit on the Z axis slide carriage of manual three-shaft displacement platform；Described
Pin electrode unit includes the right-angle connecting plate for connecting Z axis slide carriage, be provided with right-angle connecting plate two pieces be parallel to each other
Fagging, is provided with the axis of guide and leading screw that are arranged in parallel between two pieces of gripper shoes and is arranged with driver plate on the axis of guide, transmission
Connected by screw between plate and leading screw, the stepper motor coaxially connected with leading screw is provided with the outside of one piece of gripper shoe wherein,
There is pin electrode driver plate upper end by earthenware insulating mounting, and pin electrode points to the microstructure unit for being arranged on bearing upper end；
The microstructure unit includes the installation set installed in bearing upper end, is provided with stepped installing hole in installation set,
Elastic base and heating ring body are fixed with by the stay bolt of circumference uniform distribution at the ring ladder for installing in the hole, elastic base is pressed from both sides
Hold in heating ring body and install between the ring ladder of in the hole, elastic base is annular flake and is provided with annular in the middle
Boss, the centre bore of elastic base is stepped, and on the outside of which, big in the hole is installed with plate electrode by insulation sleeve, on the inside of elastic base
MEMS metal micro structure is press-fited by micro-structural pressing plate and temperature sensor is being inserted with MEMS metal micro structure；Adding
In hot ring body, circumference uniform distribution is inserted with electrically heated rod, and the spacing pressing plate that electrically heated rod passes through to be located on the outside of heating ring body is spacing；?
Big footpath side in installation set positioned at its installing hole is removably connected with cover body, is installed with quartz glass plate at cover body center, institute
State cover body and elastic base formation one confined space of the installing hole in installation set by insert quartz glass plate, the MEMS
Metal micro structure is located in the confined space；
An electrical connector is provided with cover body, and the electrically heated rod is electrically connected with electrical connector respectively；The pin electrode
Electrically connected with the two poles of the earth of high-voltage capacitance with plate electrode respectively, the control of the first air switch is provided between pin electrode and high-voltage capacitance
Break-make；The two poles of the earth of the high-voltage capacitance are electrically coupled to the both positive and negative polarity of high voltage power supply respectively, and logical by the control of the second air switch
Disconnected.
Used as further preferred, the manual three-shaft displacement platform on a base plate, fixed by screw by the base plate
On substrate.
Used as further preferred, the earthenware passes perpendicularly through driver plate solid by being located at the jackscrew of driver plate upper end
Fixed.
Used as further preferred, the bearing is ladder shaft-like, and its lower end is bigger diameter end and is arranged with ring flange, ring flange
It is connected by screw with substrate and bearing is fixed on substrate, bearing upper end is threaded connection with installation set.
As further preferred, on each stay bolt between the ring ladder of elastic base and the installation in the hole
And on the outside of the ring ladder of installation set, it is arranged with heat insulating washer respectively, for completely cutting off the heat of electrically heated rod conduction.
Used as further preferred, the annular boss is inserted into the path side in the hole of the installing hole, in order to it is close to pin
Electrode, is easy to adjust the gap between pin electrode and plate electrode.
Used as further preferred, the outside macropore of the centre bore of the elastic base is bellmouth, the insulation sleeve outer rim
Coordinate grafting bonding for taper and with the bellmouth, the circle between insulation sleeve inwall and plate electrode outer rim by cooperating
Conical surface grafting bonding, to strengthen the fastness of plate electrode installation.
As further preferred, the micro-structural pressing plate by the mode connects for screw of circumference uniform distribution on the inside of the elastic base in
At the heart, MEMS metal micro structure is clamped between micro-structural pressing plate and elastic base.
As further preferred, on the inside of elastic base, a sensor mounting hole is provided with corresponding annular boss, described
Temperature sensor is inserted in sensor mounting hole.
The invention has the beneficial effects as follows：
(1) as elastic base is provided with for annular flake and in the middle annular boss, when to the micro- knot of MEMS metal
When structure enters row energization, elastic base central area is not in flexural deformation, will not thus make on the inside of elastic base
The micro-structural pressing plate of center is deformed, and MEMS metal micro structure would not also occurs and micro-structural pressing plate is separated shows
As.
(2) as the centre bore of elastic base is stepped, on the outside of which, big in the hole is installed with plate electrode by insulation sleeve, because
This plate electrode is more firmly mounted, after multiple discharge, between each part also without departing from.
(3) due to being provided with the Z axis slide carriage of manual three-shaft displacement platform by the pin electrode unit of driving stepper motor displacement,
Therefore while having two kinds of functions of hand feed and auto-feed；The preparatory stage of experiment is encouraged in shock wave, it is possible to use manually
The mode of feeding adjusts the relative position of pin electrode and plate electrode, when travelling shock-wave excitation experiment is entered, can control stepper motor
Discharged by way of auto-feed, the relative position that neatly can be adjusted between two electrodes so both ensure that,
The security when discharge test is carried out is in turn ensure that, easy to operate and safe.
(4) cover body and the elastic base formation one due to the installing hole in the installation set by insert quartz glass plate
Confined space, the MEMS metal micro structure are located in the confined space, are therefore greatly reduced cross-ventilated effect, are made temperature
The measured value of degree sensor can be closer to the actual temperature of MEMS metal micro structure, and measured value accurately, ensure that MEMS
The accuracy of the dynamic characteristic parameter test of metal micro structure.
(5) due to MEMS metal micro structure be by micro-structural pressing plate using being fixed on elastic base by way of being mechanically fixed
On, on the one hand this mounting structure provides good coupling stiffness, makes arousal effect more preferably, ensure that the micro- knot of MEMS metal
The accuracy of the dynamic characteristic parameter test of structure；On the other hand, dismounting MEMS metal micro structure is made to become simpler, convenient.
Description of the drawings
Fig. 1 is the perspective view of the present invention.
Fig. 2 is the front view of the present invention.
Fig. 3 is the right view of Fig. 2.
Fig. 4 is the three-dimensional structure diagram of pin electrode unit of the present invention.
Fig. 5 is the three-dimensional structure diagram of microstructure unit of the present invention.
Fig. 6 is the partial enlarged drawing of microstructure unit in Fig. 3.
Fig. 7 is the A-A sectional view of Fig. 6.
Fig. 8 is the B-B sectional view of Fig. 6.
Fig. 9 is the view after removing cover body in Fig. 6.
Figure 10 is the circuit block diagram of the present invention.
In figure：Substrate 1, manual three-shaft displacement platform 2, base plate 3, screw 4, microstructure unit 5, installation set 501, heat insulating washer
502, nut 503, stay bolt 504, insulation sleeve 505, plate electrode 506, elastic base 507, screw 508, electrical connector 509, cover
Body 510, quartz glass plate 511, screw 512, screw 513, heats ring body 514, spacing pressing plate 515, heat insulating washer 516, micro- knot
Structure pressing plate 517, MEMS metal micro structure 518, screw 519, electrically heated rod 520, temperature sensor 521, pin electrode unit 6, directly
Angle connecting plate 601, stepper motor 602, screw 603, screw 604, gripper shoe 605, the axis of guide 606, screw 607, screw 608,
Axle sleeve 609, driver plate 610, jackscrew 611, earthenware 612, pin electrode 613, leading screw 614, ring flange 7, bearing 8, the first air
Switch 9, the second air switch 10, high-voltage capacitance 11, high voltage power supply 12.
Specific embodiment
As shown in Figure 1-Figure 3, one kind according to the present invention can enter row energization to MEMS metal micro structure in high temperature environments
Shock wave exciting bank, including substrate 1, be provided with manual three-shaft displacement platform 2 and a bearing 8, the hand dynamic triaxial on substrate 1
Displacement platform 2 on a base plate 3, fixed on substrate 1 by screw 4 by the base plate 3.Z axis in manual three-shaft displacement platform 2
Pin electrode unit 6 is installed on slide carriage.
As shown in figure 4, the pin electrode unit 6 includes the right-angle connecting plate 601 being fixed by screws on Z axis slide carriage,
Two pieces of gripper shoes 605 being parallel to each other are fixed with by screw on right-angle connecting plate 601, set between two pieces of gripper shoes 605
There are the axis of guide 606 being arranged in parallel up and down and leading screw 614 and driver plate 610 is arranged with the axis of guide 606, in driver plate 610
The axle sleeve 609 being slidably matched with the axis of guide 606 is installed with the upper corresponding axis of guide 606, and 606 two ends of the axis of guide pass through screw 604
It is fixed in two pieces of gripper shoes 605, leading screw 614 is rotatably installed between two pieces of gripper shoes 605, driver plate 610 and leading screw
Screw 607 between 614 by being fixed on driver plate 610 by screw 608 connects, and one piece of 605 outside of gripper shoe is logical wherein
Cross screw 603 and the stepper motor 602 coaxially connected with leading screw 614 is fixed with, exhausted by earthenware 612 in 610 upper end of driver plate
Edge is provided with pin electrode 613, and the earthenware 612 passes perpendicularly through driver plate 610 jackscrew by being located at 610 upper end of driver plate
611 fix.613 rear portion of pin electrode is installed in earthenware 612, and 613 forward tip of pin electrode is pointed to and is arranged on 8 upper end of bearing
Microstructure unit 5.
As shown in Fig. 5-Fig. 9, the microstructure unit 5 includes the installation set 501 installed in 8 upper end of bearing, the bearing 8
For ladder shaft-like, its lower end is bigger diameter end and is arranged with ring flange 7, and ring flange 7 is connected by screw with substrate 1 and by bearing 8
Fix on substrate 1,8 upper end of bearing is threaded connection with the screw being arranged on 501 bottom surface of installation set.In installation set 501
Stepped installing hole is inside provided with, elastic bottom is fixed with by the stay bolt 504 of circumference uniform distribution at the ring ladder for installing in the hole
Seat 507 and heating ring body 514, elastic base 507 are clamped between the ring ladder of heating ring body 514 and installation in the hole, elasticity
Base 507 is annular flake and is provided with annular boss in the middle that the annular boss is inserted into the little of the installing hole
Footpath side in the hole, the centre bore of elastic base 507 is stepped, and on the outside of which, big in the hole is installed with plate electrode by insulation sleeve 505
506,507 inner side of elastic base press-fits MEMS metal micro structure 518 by micro-structural pressing plate 517, and the micro-structural pressing plate 517 leads to
The screw 519 for crossing circumference uniform distribution is connected to the center of 507 inner side of elastic base, and MEMS metal micro structure 518 is clamped in micro- knot
Between structure pressing plate 517 and elastic base 507；At MEMS metal micro structure 518 and corresponding annular in 507 inner side of elastic base
A sensor mounting hole is provided with boss, has been inserted into temperature sensor 521 in sensor mounting hole.
Between elastic base 507 and the ring ladder for installing in the hole and install on each stay bolt 504
Heat insulating washer 502 and heat insulating washer 516 are arranged with and nut 503 between respectively on the outside of the ring ladder of set 501, for completely cutting off electricity
The heat that heating rod 520 conducts.The outside macropore of the centre bore of the elastic base 507 is bellmouth, and the insulation sleeve 505 is excellent
Elect ceramic jacket as, 505 outer rim of insulation sleeve is taper and coordinates grafting bonding, 505 inwall of insulation sleeve and plate with the bellmouth
The taper seat that cooperates is provided between 506 outer rim of electrode and is mutually inserted and bonding, to strengthen the firm of the installation of plate electrode 506
Property.
Heating rod jack is evenly distributed in heating ring body 514 and electrically heated rod 520 is inserted with, electrically heated rod 520 leads to
It is spacing that the annular stop pressing plate 515 being fixed on the outside of heating ring body 514 is crossed using screw 513, corresponding every on spacing pressing plate 515
Lead perforation is respectively equipped with individual electrically heated rod 520, for the power line through electrically heated rod 520；It is located in installation set 501
The big footpath side of its installing hole is removably connected with cover body 510 by the screw 512 of circumference uniform distribution, and 510 inner side of cover body is provided with ring
Shape convex edge and convex annular is suitable with the big footpath of the installing hole along internal diameter.
Quartz glass plate 511, the installing hole in the installation set 501 are installed with the stepped center in the hole of cover body 510
One confined space is formed by the cover body 510 of insert quartz glass plate 511 and elastic base 507, the micro- knot of the MEMS metal
Structure 518 is located in the confined space；An electrical connector 509, the electrical heating are fixed with by screw 508 on cover body 510
The power line of rod 520 is electrically connected with electrical connector 509 respectively.
As shown in Figure 10, the shock wave exciting bank is additionally provided with high-voltage capacitance 11 and high voltage power supply 12,613 He of the pin electrode
Plate electrode 506 is electrically connected with the two poles of the earth of high-voltage capacitance 11 respectively, is provided with the first air between pin electrode 613 and high-voltage capacitance 11
Switch 9 controls break-make；The two poles of the earth of the high-voltage capacitance 11 are electrically coupled to the both positive and negative polarity of high voltage power supply 12 respectively, and empty by second
Air cock 10 controls break-make.
During use, first the first air switch 9 and the second air switch 10 are all turned off state, adjust manual three
Axle position moving stage 2 makes the center of the tip alignment plate electrode 506 of pin electrode 613, and ensures the distance between them more than height
Maximum air breakdown gap after voltage capacitance 11 is fully charged；Secondly, control electrically heated rod 520 is to MEMS metal micro structure 518
Heated, and the temperature of MEMS metal micro structure 518 is detected by temperature sensor 521, by MEMS metal micro structure 518
Temperature is increased to experiment setting value；Again, the second air switch 10 is closed, is charged for high-voltage capacitance 11 using high voltage power supply 12,
Second air switch 10 is disconnected after charging complete again；Finally, the first air switch 9 is closed, controls stepper motor 602, make pin
Electrode 613 is slowly close to plate electrode 506, when the distance between the needle point of pin electrode 613 and plate electrode 506 meet the current electricity that charges
During the air breakdown condition of pressure, the air gap is breakdown, completes the shock wave that discharges and produce, and realizes to MEMS metal micro structure
518 in high temperature environments excited by impact.
Although embodiment of the present invention is disclosed as above, but its be not restricted in specification and embodiment listed
With, it can be applied to various suitable the field of the invention completely, for those skilled in the art, can be easily
Other modification is realized, therefore under the universal limited without departing substantially from claim and equivalency range, the present invention is not limited
In specific details and shown here as the legend with description.
Claims (9)
1. a kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure, including substrate, which is special
Levying is：Manual three-shaft displacement platform and bearing is provided with substrate, is provided with pin electrode list on the Z axis slide carriage of manual three-shaft displacement platform
Unit；The pin electrode unit includes the right-angle connecting plate for connecting Z axis slide carriage, is provided with two pieces and mutually puts down on right-angle connecting plate
Capable gripper shoe, is provided with the axis of guide and leading screw that are arranged in parallel between two pieces of gripper shoes and is arranged with transmission on the axis of guide
Plate, is connected by screw between driver plate and leading screw, is provided with the stepping coaxially connected with leading screw wherein on the outside of one piece of gripper shoe
Motor, has pin electrode in driver plate upper end by earthenware insulating mounting, and pin electrode points to the micro-structural for being arranged on bearing upper end
Unit；
The microstructure unit includes the installation set installed in bearing upper end, is provided with stepped installing hole in installation set, in peace
Elastic base and heating ring body are fixed with by the stay bolt of circumference uniform distribution at the ring ladder of dress in the hole, elastic base is clamped in
Between the ring ladder of heating ring body and installation in the hole, elastic base is annular flake and is provided with convex annular in the middle
Platform, the centre bore of elastic base is stepped, and on the outside of which, big in the hole is installed with plate electrode by insulation sleeve, leads on the inside of elastic base
Cross micro-structural pressing plate to press-fit MEMS metal micro structure and be inserted with temperature sensor at MEMS metal micro structure；In heating
In ring body, circumference uniform distribution is inserted with electrically heated rod, and the spacing pressing plate that electrically heated rod passes through to be located on the outside of heating ring body is spacing；In peace
Big footpath side on encapsulation positioned at its installing hole is removably connected with cover body, is installed with quartz glass plate at cover body center, described
Cover body and elastic base formation one confined space of the installing hole in installation set by insert quartz glass plate, the MEMS gold
Category micro-structural is located in the confined space；
An electrical connector is provided with cover body, and the electrically heated rod is electrically connected with electrical connector respectively；The pin electrode and plate
Electrode is electrically connected with the two poles of the earth of high-voltage capacitance respectively, is provided with the control of the first air switch logical between pin electrode and high-voltage capacitance
Disconnected；The two poles of the earth of the high-voltage capacitance are electrically coupled to the both positive and negative polarity of high voltage power supply respectively, and control break-make by the second air switch.
2. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：On a base plate, the base plate is bolted on substrate the manual three-shaft displacement platform.
3. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：The earthenware passes perpendicularly through driver plate and is fixed by being located at the jackscrew of driver plate upper end.
4. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：The bearing is ladder shaft-like, and its lower end is bigger diameter end and is arranged with ring flange that ring flange is led to substrate
Cross mode connects for screw and bearing is fixed on substrate, bearing upper end is threaded connection with installation set.
5. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：On each stay bolt between the ring ladder of elastic base and the installation in the hole and install
Heat insulating washer is arranged with the outside of the ring ladder of set respectively, for completely cutting off the heat of electrically heated rod conduction.
6. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：The annular boss is inserted into the path side in the hole of the installing hole.
7. a kind of shock wave that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1 or 6
Exciting bank, is characterized in that：The outside macropore of the centre bore of the elastic base is bellmouth, and the insulation sleeve outer rim is taper
And with bellmouth cooperation grafting and bonding, the taper seat between insulation sleeve inwall and plate electrode outer rim by cooperating is inserted
Connect and bonding, to strengthen the fastness of plate electrode installation.
8. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 1
Device, is characterized in that：Center of the micro-structural pressing plate by the mode connects for screw of circumference uniform distribution on the inside of elastic base, MEMS
Metal micro structure is clamped between micro-structural pressing plate and elastic base.
9. a kind of shock wave excitation that can enter row energization in high temperature environments to MEMS metal micro structure according to claim 8
Device, is characterized in that：A sensor mounting hole, the temperature sensor are provided with corresponding annular boss on the inside of elastic base
It is inserted in sensor mounting hole.
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| CN201610866661.1A CN106477518B (en) | 2016-09-30 | 2016-09-30 | A kind of shock wave exciting bank that can enter row energization to MEMS metal micro structures in high temperature environments |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109612660A (en) * | 2018-12-17 | 2019-04-12 | 大连理工大学 | A kind of the ultrasonic exciting device and its working method of dynamic characteristic test |
| CN109650328A (en) * | 2018-12-17 | 2019-04-19 | 大连理工大学 | A kind of the shock wave seat excitation apparatus and its working method of dynamic characteristic test |
| CN109668702A (en) * | 2018-12-17 | 2019-04-23 | 大连理工大学 | A kind of piezoelectric type exciting bank and its working method loading hot environment |
| CN109668703A (en) * | 2018-12-17 | 2019-04-23 | 大连理工大学 | A kind of the piezoelectric type exciting bank and its working method of dynamic characteristic test |
| CN109682558A (en) * | 2018-12-17 | 2019-04-26 | 大连理工大学 | A kind of the shock wave focus exciting bank and its working method of dynamic characteristic test |
| CN109827727A (en) * | 2018-12-17 | 2019-05-31 | 大连理工大学 | A kind of shock wave seat excitation apparatus and its working method loading hot environment |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2639875Y (en) * | 2003-09-02 | 2004-09-08 | 华中科技大学 | Hexaaxile mechanical property measuring device for micro sample |
| CN101244486A (en) * | 2007-02-13 | 2008-08-20 | 富士通株式会社 | Device manufacturing method, laser processing method, and laser processing apparatus |
| JP2015197423A (en) * | 2014-04-03 | 2015-11-09 | 株式会社豊田中央研究所 | MEMS device |
| CN105170438A (en) * | 2015-10-15 | 2015-12-23 | 哈尔滨工程大学 | Broadband vibrating device for underwater cylindrical shell |
| CN105269102A (en) * | 2015-11-27 | 2016-01-27 | 扬州大学 | Five-axis linkage ultrasonic composite electric spark micro-finish machining numerical control machine tool |
| CN105899927A (en) * | 2014-02-07 | 2016-08-24 | 申克公司 | Vibrating machine |
-
2016
- 2016-09-30 CN CN201610866661.1A patent/CN106477518B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2639875Y (en) * | 2003-09-02 | 2004-09-08 | 华中科技大学 | Hexaaxile mechanical property measuring device for micro sample |
| CN101244486A (en) * | 2007-02-13 | 2008-08-20 | 富士通株式会社 | Device manufacturing method, laser processing method, and laser processing apparatus |
| CN105899927A (en) * | 2014-02-07 | 2016-08-24 | 申克公司 | Vibrating machine |
| JP2015197423A (en) * | 2014-04-03 | 2015-11-09 | 株式会社豊田中央研究所 | MEMS device |
| CN105170438A (en) * | 2015-10-15 | 2015-12-23 | 哈尔滨工程大学 | Broadband vibrating device for underwater cylindrical shell |
| CN105269102A (en) * | 2015-11-27 | 2016-01-27 | 扬州大学 | Five-axis linkage ultrasonic composite electric spark micro-finish machining numerical control machine tool |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109612660A (en) * | 2018-12-17 | 2019-04-12 | 大连理工大学 | A kind of the ultrasonic exciting device and its working method of dynamic characteristic test |
| CN109650328A (en) * | 2018-12-17 | 2019-04-19 | 大连理工大学 | A kind of the shock wave seat excitation apparatus and its working method of dynamic characteristic test |
| CN109668702A (en) * | 2018-12-17 | 2019-04-23 | 大连理工大学 | A kind of piezoelectric type exciting bank and its working method loading hot environment |
| CN109668703A (en) * | 2018-12-17 | 2019-04-23 | 大连理工大学 | A kind of the piezoelectric type exciting bank and its working method of dynamic characteristic test |
| CN109682558A (en) * | 2018-12-17 | 2019-04-26 | 大连理工大学 | A kind of the shock wave focus exciting bank and its working method of dynamic characteristic test |
| CN109827727A (en) * | 2018-12-17 | 2019-05-31 | 大连理工大学 | A kind of shock wave seat excitation apparatus and its working method loading hot environment |
| CN109682558B (en) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | Shock wave focusing excitation device for dynamic characteristic test and working method thereof |
| CN109827727B (en) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | Shock wave base excitation device loaded in high-temperature environment and working method thereof |
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