CN109612660A - A kind of the ultrasonic exciting device and its working method of dynamic characteristic test - Google Patents
A kind of the ultrasonic exciting device and its working method of dynamic characteristic test Download PDFInfo
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- CN109612660A CN109612660A CN201811538816.4A CN201811538816A CN109612660A CN 109612660 A CN109612660 A CN 109612660A CN 201811538816 A CN201811538816 A CN 201811538816A CN 109612660 A CN109612660 A CN 109612660A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01M—TESTING STATIC OR DYNAMIC BALANCE OF MACHINES OR STRUCTURES; TESTING OF STRUCTURES OR APPARATUS, NOT OTHERWISE PROVIDED FOR
- G01M7/00—Vibration-testing of structures; Shock-testing of structures
- G01M7/02—Vibration-testing by means of a shake table
- G01M7/022—Vibration control arrangements, e.g. for generating random vibrations
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Abstract
A kind of the ultrasonic exciting device and its working method of dynamic characteristic test, belong to micro-machining techniques field.The device includes cylinder, the bottom plate for being mounted on cylinder body bottom, micro-structure exciting unit and light heating unit, micro-structure exciting unit includes first manual three-shaft displacement platform and second-hand's dynamic triaxial displacement platform, the second connecting plate is installed on the Z axis slide carriage of second-hand's dynamic triaxial displacement platform, ultrasonic probe is equipped with by holding screw in the second connecting plate bottom central through hole；Four barn doors are used in light heating unit, so that being only capable of being radiated in MEMS micro-structure by the directional light that light heating unit issues；Heating while to MEMS micro-structure entirety may be implemented in the device, it is ensured that the uniformity of temperature profile of micro-structure surface reduces the temperature gradient of micro-structure surface, and the accuracy of micro-structure dynamic characteristics parameter testing under hot environment greatly improved.
Description
Technical field
The present invention relates to the ultrasonic exciting devices and its working method of a kind of dynamic characteristic test, belong to micromachine electricity
Sub- technical field.
Background technique
Since to have that at low cost, small in size, light-weight, integrated level is high and intelligence degree is high etc. a series of for MEMS micro element
Feature, at present automobile, aerospace, information communication, biochemistry, medical treatment, automatic control, the consumer goods and national defence etc. very
It is multi-field to be widely used.When designing and developing MEMS, since system function mainly passes through the small of micro-structure
Displacement and deformation are realized, need to measure the dynamic property of micromechanical component, therefore to the mechanical movement parameter of MEMS such as displacement, speed
Degree, amplitude, frequency and mode of oscillation etc. carry out the important content that precise measurement has become exploitation MEMS.As MEMS product is answered
With the continuous expansion in field, test and research to its dynamic mechanically characteristic can not be limited under normal environment, but be needed
Its dynamic characteristic under Effect of Hyperthermic Environment is tested, so as to right in conjunction with actual use environment, such as hot environment
The stability and reliability of product are assessed, to device design, the improvement of manufacture craft and device in terms of
Directive function is played, research and development cost can also be reduced, reduces the development time.
In order to test micro-structure dynamic characteristic parameter in a high temperauture environment, on the one hand needing, which generates micro-structure, vibrates,
It namely needs to motivate micro-structure.Since MEMS micro-structure has the characteristics that size is small, light-weight and intrinsic frequency is high,
Motivational techniques and exciting bank in tradition machinery mould measurement can not be used in the vibrational excitation of MEMS micro-structure.Closely
Over 30 years, researcher both domestic and external has carried out a large amount of exploration for the vibrational excitation method of MEMS micro-structure, develops
Some motivational techniques that can be used for MEMS micro-structure and corresponding exciting bank, wherein the pedestal based on piezoelectric ceramics motivates
Method can be good at realizing the excitation to micro-structure.
On the other hand, it exactly needs to heat up to micro-structure, that is, it is heated.Publication No.
The Chinese utility model patent of CN206074210U discloses a kind of hot environment for the test of MEMS micro-structure dynamic characteristics
Loading device in the apparatus heats micro-structure by the method for heat transfer as heat source using electrically heated rod；It is open
Number the dynamic testing loading unit of a kind of MEMS disk or device is disclosed for the Chinese invention patent of CN1666952A, in the dress
Middle use electric boiling plate is set as heat source, MEMS disk is heated by the method for heat transfer；She Dongsheng etc. is " based on sharp
The MEMS micro-structure pedestal technique study excited by impact of wave " in describe a kind of MEMS micro-structure that can load hot environment and swash
Wave excitation device in the apparatus adds MEMS micro-structure by the method for heat transfer as heat source using electrically heated rod
Heat.When being heated using the heating method of above-mentioned heat transfer to micro-structure, since thermal energy is passed again via micro-structure substrate
It is delivered in micro-structure, therefore the thermo parameters method in micro-structure is very uneven, apart from the temperature of substrate distal end in micro-structure
It will be lower than the temperature at proximate substrate, according to F. Shen etc. in " Thermal effects on coated resonant
Microcantilevers " in result of study tested under high temperature environment when the thermo parameters method in micro-structure is uneven
The accuracy of micro-structure dynamic characteristics parameter will be greatly reduced.Therefore, micro-structure is carried out using heat transfer in the prior art
The mode of heating has the shortcomings that very big.
Summary of the invention
Technical problem to be solved by the invention is to provide the ultrasonic exciting devices and its work of a kind of dynamic characteristic test
Make method, which, which can be realized, loads hot environment to MEMS micro-structure, and to the MEMS micro-structure under the condition of high temperature
It is motivated, while ensuring micro-structure surface uniformity of temperature profile, reduce the temperature gradient of micro-structure surface, improve hot environment
The accuracy of lower MEMS micro-structure dynamic characteristics parameter testing result.
To solve the above problems, the present invention adopts the following technical scheme:
A kind of ultrasonic exciting device of dynamic characteristic test, including cylinder and the bottom plate for being mounted on cylinder body bottom, on bottom plate
Equipped with micro-structure exciting unit, the micro-structure exciting unit includes first manual three-shaft displacement platform and the displacement of second-hand's dynamic triaxial
Platform is equipped with the first connecting plate on the Z axis slide carriage of first manual three-shaft displacement platform, is equipped with rank in the first connecting plate end face center
Scalariform mounting hole is equipped with micro-structure mounting plate at the ring ladder in mounting hole, at micro-structure mounting plate top center
It is bonded with MEMS micro-structure, the second connecting plate is installed on the Z axis slide carriage of second-hand's dynamic triaxial displacement platform, in the second connecting plate
Ultrasonic probe is equipped with by holding screw in bottom centre's through-hole；
In the uniformly distributed installation of the top circumference of cylinder there are four light heating unit, it is single that each smooth heating unit passes sequentially through light heating
First mounting plate, pin shaft, fixed plate are connected with cylinder, and light heating unit can be rotated around pin shaft, on light heating unit mounting plate
There is holding screw in the threaded hole in pin shaft suit portion；The smooth heating unit includes the front sleeve and after sleeve of threaded connection,
Source of parallel light is installed in the centre bore of after sleeve tail portion；
Inside front sleeve be equipped with stepped hole, front sleeve front end be equipped with the first barn door, the second barn door, third barn door and
4th barn door, projection of four barn doors on front sleeve front end face is circumferentially uniformly distributed, wherein the first barn door and the 4th hides
Tabula rasa is arranged symmetrically at front sleeve front end, and the second barn door and third barn door are arranged symmetrically in far from front sleeve front end
Place；Guiding axis is mounted on each barn door, guiding axis passes through the protruding portion of front sleeve front end face and is connected in push plate,
Adjusting knob is equipped at push plate center, adjusting knob passes through the centre bore of push plate and is threaded in the protrusion of front sleeve front end face
In portion, reset spring is equipped between push plate and the protruding portion of front sleeve front end face, reset spring is sleeved on adjusting knob, is used
In the position for adjusting barn door.
A kind of working method of the ultrasonic exciting device of dynamic characteristic test: firstly, rotation light heating unit mounting plate,
Front sleeve is screwed, and adjusts push plate, while adjusting manual three-shaft displacement platform, the directional light for launching light heating unit is only capable of shining
Penetrate in MEMS micro-structure, in addition, adjust second-hand's dynamic triaxial displacement platform, make ultrasonic probe be located at MEMS micro-structure just under
Side；Secondly, being heated using light heating unit to MEMS micro-structure, by MEMS micro-structure under the assistance of infrared measurement of temperature instrument
It is heated to target temperature；Then pulse voltage signal is applied to ultrasonic probe using external power supply, emits ultrasonic probe
Ultrasonic wave realizes the excitation to MEMS micro-structure out, while the vibration of MEMS micro-structure is obtained using non-contacting optical vibrometer device
Dynamic response, to obtain dynamic characteristic parameter of the MEMS micro-structure under the target temperature.
The beneficial effects of the present invention are:
1, due to using the heating method of light radiation, adding while may be implemented to MEMS micro-structure entirety in a device
Heat, it is ensured that the uniformity of temperature profile of micro-structure surface reduces the temperature gradient of micro-structure surface, and high temperature ring greatly improved
The accuracy of micro-structure dynamic characteristics parameter testing under border.
2, due to having used four barn doors in light heating unit, four barn doors surround one in optical path vertical direction
A rectangular gap, so that being only capable of being radiated at MEMS micro-structure by rectangular gap by the directional light that each smooth heating unit issues
On, by adjusting the incident angle of light, directional light can be made to be only capable of being irradiated in MEMS micro-structure, avoided in exciting bank
The unnecessary temperature rise of non-refractory part, improves exciting bank reliability, has expanded the scope of application of device.
3, due to generating ultrasonic wave using ultrasonic probe in a device, the reliability and stabilization of exciting bank are improved
Property.
Detailed description of the invention
Fig. 1 is a kind of schematic perspective view of the ultrasonic exciting device of dynamic characteristic test.
Fig. 2 is a kind of top view of the ultrasonic exciting device of dynamic characteristic test.
Fig. 3 is the schematic perspective view of light heating unit.
Fig. 4 is the front view of light heating unit.
Fig. 5 is the A-A cross-sectional view of Fig. 4.
Fig. 6 is the schematic perspective view of micro-structure exciting unit.
Fig. 7 is the front view of micro-structure exciting unit.
Fig. 8 is the B-B cross-sectional view of Fig. 7.
In figure: 1. cylinders, 2. fixed plates, 3. smooth heating unit mounting plates, 4. smooth heating units, 401. after sleeves, 402.
Front sleeve, 403. axle sleeves, 404. adjusting knobs, 405. push plates, 406. guiding axis, 407. reset springs, 408. first barn doors,
409. second barn doors, 410. third barn doors, 411. the 4th barn doors, 412. sources of parallel light, 5. micro-structure exciting units,
501. first manual three-shaft displacement platforms, 502. second-hand's dynamic triaxial displacement platforms, 503. first connecting plates, 504. second connecting plates,
505. micro-structure mounting plates, 506.MEMS micro-structure, 507. holding screws, 508. ultrasonic probes, 6. bottom plates, 7. pin shafts, 8.
Holding screw.
Specific embodiment
As shown in figures 1-8, the ultrasonic exciting device of this dynamic characteristic test includes cylinder 1 and is mounted on 1 bottom of cylinder
The bottom plate 6 in portion, it is characterized in that: being equipped with micro-structure exciting unit 5 on bottom plate 6, the micro-structure exciting unit 5 includes first-hand
Dynamic triaxial displacement platform 501 and second-hand's dynamic triaxial displacement platform 502, are installed on the Z axis slide carriage of first manual three-shaft displacement platform 501
There is the first connecting plate 503, is equipped with ladder-like mounting hole in 503 end face center of the first connecting plate, the ring ladder in mounting hole
Place is equipped with micro-structure mounting plate 505, MEMS micro-structure 506 is bonded at 505 top center of micro-structure mounting plate, second
Second connecting plate 504 is installed, in 504 bottom centre's through-hole of the second connecting plate on the Z axis slide carriage of manual three-shaft displacement platform 502
Ultrasonic probe 508 is installed by holding screw 507.
In the uniformly distributed installation of the top circumference of cylinder 1 there are four light heating unit 4, each smooth heating unit 4 is passed sequentially through
Light heating unit mounting plate 3, pin shaft 7, fixed plate 2 are connected with cylinder 1, and light heating unit 4 can be rotated around pin shaft 7, in light plus
There is holding screw 8 in the threaded hole in 7 suit portion of pin shaft on hot cell mounting plate 3；The smooth heating unit 4 includes being threadedly coupled
Front sleeve 402 and after sleeve 401, source of parallel light 412 is installed in 401 tail portion centre bore of after sleeve.
It is equipped with stepped hole inside front sleeve 402, is equipped with the first barn door 408, the second barn door in 402 front end of front sleeve
409, third barn door 410 and the 4th barn door 411, projection of four barn doors on 402 front end face of front sleeve are circumferentially equal
Cloth, wherein the first barn door 408 and the 4th barn door 411 are arranged symmetrically at 402 front end of front sleeve, the second barn door
409 and third barn door 410 be arranged symmetrically in far from 402 front end of front sleeve；Guiding axis is mounted on each barn door
406, guiding axis 406 passes through the protruding portion of 402 front end face of front sleeve and is connected in push plate 405, is equipped at 405 center of push plate
Adjusting knob 404, adjusting knob wear 404 and cross the centre bore of push plate 405 and be threaded in the protruding portion of 402 front end face of front sleeve
On, reset spring 407 is equipped between the protruding portion of 402 front end face of push plate 405 and front sleeve, reset spring 407 is sleeved on tune
It saves on knob 404, for adjusting the position of barn door.
The working method of the ultrasonic exciting device of this dynamic characteristic test: firstly, rotation light heating unit mounting plate
3, front sleeve 402 is screwed, and adjust push plate 405, while adjusting manual three-shaft displacement platform 501, launches light heating unit 4
Directional light is only capable of being radiated in MEMS micro-structure 503, in addition, adjusting second-hand's dynamic triaxial displacement platform 502, makes ultrasonic probe
508 are located at the underface of MEMS micro-structure 506；Secondly, being heated using light heating unit 4 to MEMS micro-structure 503, red
MEMS micro-structure 503 is heated to target temperature under the assistance of outer temperature measuring device；Then using external power supply to ultrasonic probe
508 apply pulse voltage signal, so that ultrasonic probe 508 is launched excitation of the ultrasonic wave realization to MEMS micro-structure 506, simultaneously
The vibratory response that MEMS micro-structure 506 is obtained using non-contacting optical vibrometer device, to obtain MEMS micro-structure 506 at this
Dynamic characteristic parameter under target temperature.
Although the embodiments of the present invention have been disclosed as above, but its is not only in the description and the implementation listed
With it can be fully applied to various fields suitable for the present invention, for those skilled in the art, can be easily
Realize other modification, therefore without departing from the general concept defined in the claims and the equivalent scope, the present invention is simultaneously unlimited
In specific details and legend shown and described herein.
Claims (2)
1. a kind of ultrasonic exciting device of dynamic characteristic test, including cylinder (1) and it is mounted on the bottom plate of cylinder (1) bottom
(6), micro-structure exciting unit (5) are equipped on bottom plate (6), it is characterized in that: the micro-structure exciting unit (5) includes first-hand
Dynamic triaxial displacement platform (501) and second-hand's dynamic triaxial displacement platform (502), in the Z axis slide carriage of first manual three-shaft displacement platform (501)
On the first connecting plate (503) are installed, the first connecting plate (503) end face center be equipped with ladder-like mounting hole, in mounting hole
Ring ladder at micro-structure mounting plate (505) are installed, it is micro- to be bonded with MEMS at micro-structure mounting plate (505) top center
Structure (506) is equipped with the second connecting plate (504) on the Z axis slide carriage of second-hand's dynamic triaxial displacement platform (502), connects second
Ultrasonic probe (508) are installed by holding screw (507) in fishplate bar (504) bottom centre through-hole；
In the uniformly distributed installation of the top circumference of cylinder (1) there are four light heating unit (4), each smooth heating unit (4) is successively led to
It crosses light heating unit mounting plate (3), pin shaft (7), fixed plate (2) to be connected with cylinder (1), light heating unit (4) can be around pin shaft
(7) it rotates, has holding screw (8) in the threaded hole in pin shaft (7) suit portion on light heating unit mounting plate (3)；The light
Heating unit (4) includes the front sleeve (402) being threadedly coupled and after sleeve (401), the peace in centre bore in after sleeve (401) tail portion
Equipped with source of parallel light (412)；
It is equipped with stepped hole inside front sleeve (402), is equipped with the first barn door (408), the second shading in front sleeve (402) front end
Plate (409), third barn door (410) and the 4th barn door (411), throwing of four barn doors on front sleeve (402) front end face
Shadow is circumferentially uniformly distributed, wherein the first barn door (408) and the 4th barn door (411) are arranged symmetrically in front of front sleeve (402)
At end, the second barn door (409) and third barn door (410) are arranged symmetrically in far from front sleeve (402) front end；Each shading
It is mounted on plate guiding axis (406), guiding axis (406) passes through the protruding portion of front sleeve (402) front end face and is connected to push plate
(405) on, adjusting knob (404) are equipped at push plate (405) center, adjusting knob (404) passes through the centre bore of push plate (405)
And be threaded on the protruding portion of front sleeve (402) front end face, in the protrusion of push plate (405) and front sleeve (402) front end face
Reset spring (407) are equipped between portion, reset spring (407) is sleeved on adjusting knob (404), for adjusting the position of barn door
It sets.
2. a kind of working method of the ultrasonic exciting device of dynamic characteristic test according to claim 1, it is characterized in that:
Firstly, rotation light heating unit mounting plate (3), screws front sleeve (402), and adjust push plate (405), while adjusting hand dynamic triaxial
Displacement platform (501), the directional light for launching light heating unit (4) are only capable of being radiated on MEMS micro-structure (503), in addition, adjusting
It saves second-hand's dynamic triaxial displacement platform (502), ultrasonic probe (508) is made to be located at the underface of MEMS micro-structure (506)；Secondly,
MEMS micro-structure (503) is heated using light heating unit (4), by MEMS micro-structure under the assistance of infrared measurement of temperature instrument
(503) it is heated to target temperature；Then pulse voltage signal is applied to ultrasonic probe (508) using external power supply, makes ultrasound
Wave probe (508) launches excitation of the ultrasonic wave realization to MEMS micro-structure (506), while using non-contacting optical vibrometer
Device obtains the vibratory response of MEMS micro-structure (506), so that it is special to obtain dynamic of the MEMS micro-structure (506) under the target temperature
Property parameter.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811538816.4A CN109612660B (en) | 2018-12-17 | 2018-12-17 | Ultrasonic excitation device for dynamic characteristic test and working method thereof |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811538816.4A CN109612660B (en) | 2018-12-17 | 2018-12-17 | Ultrasonic excitation device for dynamic characteristic test and working method thereof |
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| Publication Number | Publication Date |
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| CN109612660A true CN109612660A (en) | 2019-04-12 |
| CN109612660B CN109612660B (en) | 2020-02-18 |
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| CN201811538816.4A Expired - Fee Related CN109612660B (en) | 2018-12-17 | 2018-12-17 | Ultrasonic excitation device for dynamic characteristic test and working method thereof |
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1666952A (en) * | 2005-03-29 | 2005-09-14 | 华中科技大学 | Dynamic testing loading unit for MEMS disc or device |
| WO2006093232A1 (en) * | 2005-03-03 | 2006-09-08 | Tokyo Electron Limited | Minute structure inspection device, minute structure inspection method, and minute structure inspection program |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| JP2009154263A (en) * | 2007-12-27 | 2009-07-16 | Stanley Electric Co Ltd | Mems module |
| CN203323423U (en) * | 2013-06-03 | 2013-12-04 | 江苏双志新能源有限公司 | Light energy refrigerant heating body |
| CN106477518A (en) * | 2016-09-30 | 2017-03-08 | 渤海大学 | A kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
-
2018
- 2018-12-17 CN CN201811538816.4A patent/CN109612660B/en not_active Expired - Fee Related
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006093232A1 (en) * | 2005-03-03 | 2006-09-08 | Tokyo Electron Limited | Minute structure inspection device, minute structure inspection method, and minute structure inspection program |
| CN1666952A (en) * | 2005-03-29 | 2005-09-14 | 华中科技大学 | Dynamic testing loading unit for MEMS disc or device |
| JP2009154263A (en) * | 2007-12-27 | 2009-07-16 | Stanley Electric Co Ltd | Mems module |
| CN101476970A (en) * | 2009-01-14 | 2009-07-08 | 大连理工大学 | Seat excitation apparatus used for MEMS dynamic characteristics test |
| CN203323423U (en) * | 2013-06-03 | 2013-12-04 | 江苏双志新能源有限公司 | Light energy refrigerant heating body |
| CN106477518A (en) * | 2016-09-30 | 2017-03-08 | 渤海大学 | A kind of shock wave exciting bank that can enter row energization in high temperature environments to MEMS metal micro structure |
| CN206074210U (en) * | 2016-10-15 | 2017-04-05 | 渤海大学 | A kind of hot environment charger for the test of MEMS micro-structure dynamic characteristics |
Non-Patent Citations (1)
| Title |
|---|
| 王晓东 等: "MEMS微构件动态特性测试的激励技术和方法", 《测试技术学报》 * |
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