CN1282598C - Dynamic testing loading unit for MEMS disc or device - Google Patents
Dynamic testing loading unit for MEMS disc or device Download PDFInfo
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- CN1282598C CN1282598C CN 200510018470 CN200510018470A CN1282598C CN 1282598 C CN1282598 C CN 1282598C CN 200510018470 CN200510018470 CN 200510018470 CN 200510018470 A CN200510018470 A CN 200510018470A CN 1282598 C CN1282598 C CN 1282598C
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- bracket
- disk
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Abstract
The present invention discloses a dynamic testing loading device of a wafer or a device in an MEMS. The device has the structure that a light penetrating sheet is arranged on an opening end surface of a cavity body to form a sealed cavity with the cavity body, the cavity body is provided with an electrode having an air charging port, a vacuum pumping opening and a vacuum gauge interface, and a bracket is fixed to the base of the cavity body; regulating screws are arranged in the base of the bracket, piezoelectric ceramic is arranged in the bracket, the lower end of the piezoelectric ceramic is connected with the regulating screws, and the upper end of the piezoelectric ceramic is connected with the bracket; a supporting plate is fixed to the bracket, and a wafer batten is fixed to the supporting plate. The device can obtain accurate oscillation frequency and amplitude through the piezoelectric ceramic, the frequency and the amplitude can be changed within a relatively large range and can be easily controlled, and different vacuum degrees, different temperatures and different vibrational environment can be provided for a wafer or a device in MEMS during testing.
Description
Technical field
The present invention relates to a kind of charger, be specifically related to the charger of a kind of MEMS of being applied to (Micro-electromechanical systems, i.e. MEMS) disk or device dynamic test.
Background technology
The charger of test specimen dynamic test, promptly vibrator is to convert electric energy to mechanical energy, test specimen is provided a kind of device of vibration.The MEMS device occurs in a large number and is applied in recent years, in order to obtain modal parameter, just must carry out loadings such as exciting to it and measure its response.Traditional vibrator has been widely used in the vibration load test of aircraft, guided missile, boats and ships, lathe, bridge etc., on the local parts that the loading that also being applied in to provide forms such as vibration is tested.The shortcoming of traditional charger is: 1. the application of these chargers generally all requires sensor is installed on the test specimen, thereby just need test specimen that enough big size is arranged, to guarantee that also the installation of sensor is not enough to influence the dynamic test precision of test specimen, vibration that these chargers provide and accuracy of measurement system also are unsuitable for the dynamic test of small test specimen, thereby just are not suitable for MEMS disk or the very little test specimen of device equidimension.2. traditional exciting load test is all carried out in atmospheric environment or even bad working environment, is not suitable for the dynamic test to the relatively strict test specimen of environmental requirement such as MEMS disk or device.
Summary of the invention
The objective of the invention is to overcome above-mentioned the deficiencies in the prior art part, the dynamic testing loading unit of a kind of MEMS disk or device is provided.When this device can be for the test of MEMS disk or device dynamic, provide different vacuum, different temperature and different vibrational state environment.
For achieving the above object, the technical solution used in the present invention is: the dynamic testing loading unit of a kind of MEMS disk or device, comprise light transmission piece, cavity, support and support plate, light transmission piece places on the open end of cavity, constitute annular seal space with cavity, electrode is housed on cavity, have inflation inlet, vacuum orifice and vacuum meter interface, support is fixed on the base of cavity, and adjustment screw is contained in the base of support, and piezoelectric ceramics places in the support, its lower end and adjustment screw are joined, the upper end joins with support, and support plate is fixed on the support, and disk press strip and support plate fix.
The present invention has the following advantages compared to existing technology:
(1) can under different pressures, different temperatures, carry out dynamic test respectively, thereby can provide data necessary for the modal parameter that accurately obtains MEMS disk or device.
(2) can obtain accurate vibration frequency and amplitude by piezoelectric ceramics, can realize that frequency and amplitude change in relatively large scope, and be convenient to control.
(3) can obtain needed vacuum by vacuum system.
(4) when the temperature of needs control MEMS disk or device, can obtain accurate test specimen temperature by heating plate, so that MEMS disk or device obtain different temperature.
Description of drawings
Fig. 1 is the elevation cross-sectional view of an embodiment of the present invention.
Fig. 2 is the left pseudosection of Fig. 1 embodiment.
The specific embodiment
By illustrated in figures 1 and 2, the dynamic testing loading unit of a kind of MEMS disk or device comprises light transmission piece 9, cavity 1, support 5 and support plate 13, be equipped with sealing ring 7 between the open end of light transmission piece 9 and cavity 1, and link to each other with flange 16 by sealing ring 8, flange 16 fixes by the open end of bolt 17 and nut 18 and vacuum cavity 1, light transmission piece 9 constitutes annular seal space with cavity 1, for the MEMS disk or the device of dynamic test provides an airtight environment.
Electrode 21 is housed on cavity 1, have inflation inlet 6, vacuum orifice 20 and vacuum meter interface 22, support 5 can be fixed on the base of cavity 1 by bolt 2, adjustment screw 3 is contained in the base of support 5, piezoelectric ceramics (PZT) 4 places in the support 5, the lower end of piezoelectric ceramics 4 and adjustment screw 3 are joined, by regulating adjustment screw 3 upper end of piezoelectric ceramics 4 and support 5 are joined, support plate 13 is fixed on the support 5 by screw 12, disk press strip 14 is used for pushing down MEMS disk or device 10, when the temperature of needs control MEMS disk or device 10, between disk press strip 14 and support plate 13, can be equipped with heating plate 11, disk press strip 14 is fixed on the heating plate 11 by bolt 15, and heating plate 11 is fixed on the support plate 13 by bolt 19.Heating plate 11 can adopt modes such as resistance wire heating, and the electric wire of heating plate 11 links to each other with external power cord by electrode 21.
The electric wire of piezoelectric ceramics 4 links to each other with external power cord by electrode 21, and vacuum meter is inserted vacuum meter interface 22, can measure the vacuum in the vacuum cavity 1.
When carrying out the dynamic test of MEMS disk or device 10, its clamping on heating plate 11, is pushed down with disk press strip 14.The loading procedure of MEMS disk or device 10 comprises pressurization, heats and adds vibration.
Charger is linked to each other with vavuum pump or high pressure nitrogen, can realize vacuum or inflated with nitrogen environment.Vacuum orifice 20 links to each other with vavuum pump, and vavuum pump is pumped into desired vacuum to the environment in the cavity 1 by vacuum orifice 20.Inflation inlet 6 links to each other with high pressure nitrogen, and nitrogen environment can be regulated high pressure nitrogen through charge valve if desired, injects in the vacuum cavity 1 through inflation inlet 6 by predetermined nitrogen pressure, can realize the dynamic test of the device under the different pressures environment.
MEMS disk or device 10 join with heating plate 11, by heating plate 11 heating, realize the dynamic test under the different temperatures.The size that is added in the voltage on the heating plate 11 by computer-controllable system realizes heating, and it is controlled that its temperature is adjustable, and accurately to satisfy the temperature requirement of MEMS disk or device 10, the temperature that is loaded can be between 120～150 ℃.
Load requirement according to dynamic test, can give the alternating voltage of piezoelectric ceramics 4 logical certain frequencies and amplitude, provide vibration and make it produce periodic change in displacement, neutralize the voltage swing of driving power of electroceramics 4 and the variation of frequency by computer-controllable, thereby realize the vibration of MEMS disk or device 10 is loaded, the highest frequency of its vibration can reach more than the 10KHz, and the peak swing on the plane is vertical can reach 10um.At this moment, its vibration has certain time-delay with respect to driving voltage, when dynamic test, stroboscopic laser is radiated on MEMS disk or the device 10 by light transmission piece 9 with the precise delay with respect to the vibratory drive power supply, and accurately synchronous with the vibration of MEMS disk or device 10.
Claims (2)
1. the dynamic testing loading unit of MEMS disk or device, comprise light transmission piece, cavity, support and support plate, it is characterized in that: light transmission piece (9) places on the open end of cavity (1), constitute annular seal space with cavity (1), electrode (21) is housed on cavity (1), have inflation inlet (6), vacuum orifice (20) and vacuum meter interface (22), support (5) is fixed on the base of cavity (1), adjustment screw (3) is contained in the base of support (5), piezoelectric ceramics (4) places in the support (5), its lower end and adjustment screw (3) are joined, the upper end joins with support (5), support plate (13) is fixed on the support (5), and disk press strip (14) fixes with support plate (13).
2. according to the dynamic testing loading unit of claims 1 described MEMS disk or device, it is characterized in that: between disk press strip (14) and support plate (13), be equipped with heating plate (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510018470 CN1282598C (en) | 2005-03-29 | 2005-03-29 | Dynamic testing loading unit for MEMS disc or device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200510018470 CN1282598C (en) | 2005-03-29 | 2005-03-29 | Dynamic testing loading unit for MEMS disc or device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1666952A CN1666952A (en) | 2005-09-14 |
| CN1282598C true CN1282598C (en) | 2006-11-01 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200510018470 Expired - Fee Related CN1282598C (en) | 2005-03-29 | 2005-03-29 | Dynamic testing loading unit for MEMS disc or device |
Country Status (1)
| Country | Link |
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| CN (1) | CN1282598C (en) |
Families Citing this family (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101813590B (en) * | 2009-02-25 | 2011-11-30 | 中国科学院半导体研究所 | Testing device and method for reliability evaluation of mechanical component of micro-electromechanical system |
| CN101881652B (en) * | 2010-06-07 | 2012-12-19 | 中国海洋石油总公司 | Method for testing vibration mode of piezoelectric chip |
| CN105704635B (en) * | 2016-03-31 | 2019-11-15 | 歌尔股份有限公司 | Microphone diaphragms test fixture |
| CN105973624B (en) * | 2016-05-03 | 2019-05-21 | 清华大学 | A kind of high frequency loading device that loading force can be adjusted in real time and be measured |
| CN106586951B (en) * | 2016-09-30 | 2018-06-08 | 渤海大学 | It is a kind of can be under vacuum conditions to MEMS micro-structures into the shock wave exciting bank of row energization |
| CN106315507B (en) * | 2016-09-30 | 2017-07-28 | 渤海大学 | A kind of focusing shock wave exciting bank that contactless excitation is carried out to MEMS micro-structurals |
| CN106629584B (en) * | 2016-09-30 | 2018-06-26 | 渤海大学 | A kind of contactless shock wave exciting bank for MEMS metal micro structure dynamic characteristic tests |
| CN108918913B (en) * | 2018-05-16 | 2019-08-13 | 华中科技大学 | A kind of adjustable vertical conduction magnetic force spring oscillator of intrinsic frequency |
| CN109682558B (en) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | Shock wave focusing excitation device for dynamic characteristic test and working method thereof |
| CN109612660B (en) * | 2018-12-17 | 2020-02-18 | 大连理工大学 | Ultrasonic excitation device for dynamic characteristic test and working method thereof |
| CN109650328B (en) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | Shock wave base excitation device for dynamic characteristic test and working method thereof |
| CN109437097B (en) * | 2018-12-17 | 2020-07-24 | 大连理工大学 | Ultrasonic excitation device loaded in high-temperature environment and working method thereof |
| CN109668702B (en) * | 2018-12-17 | 2020-02-21 | 大连理工大学 | Piezoelectric type excitation device loaded in high-temperature environment and working method thereof |
| CN109668703B (en) * | 2018-12-17 | 2020-02-18 | 大连理工大学 | Piezoelectric type excitation device for dynamic characteristic test and working method thereof |
| CN109626320B (en) * | 2018-12-17 | 2020-05-19 | 大连理工大学 | Shock wave focusing excitation device loaded in high-temperature environment and working method thereof |
-
2005
- 2005-03-29 CN CN 200510018470 patent/CN1282598C/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN1666952A (en) | 2005-09-14 |
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