CN109814286A - Laser repair device - Google Patents
Laser repair device Download PDFInfo
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- CN109814286A CN109814286A CN201910064838.XA CN201910064838A CN109814286A CN 109814286 A CN109814286 A CN 109814286A CN 201910064838 A CN201910064838 A CN 201910064838A CN 109814286 A CN109814286 A CN 109814286A
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- laser
- repair device
- thin film
- laser repair
- film transistor
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Abstract
The present invention provides a kind of laser repair device comprising: plummer, for placing thin film transistor base plate；Laser emitter, for emitting the superlaser ray of the defect for repairing the thin film transistor base plate；Laser Direction Pointer makes thin film transistor base plate described in its directive for changing the optical path for the laser beam that laser emitter issues；CCD camera lens, for obtaining the image photo of the thin film transistor base plate；It wherein, include charged coupled device chip in the CCD camera lens, the minimum resolution of the chip is greater than 20,000,000 pixels.The present invention is greater than the combination of CCD camera lens replacement prior art intermediate-resolution lesser the CCD camera lens and enlarging lens of 20,000,000 pixels by using minimum resolution, the quantity of enlarging lens required for the resolution ratio that laser repair device of the invention can not only increase CCD camera lens reduces avoids caused rail damage when switching enlarging lens.
Description
Technical field
The present invention relates to field of electronic display more particularly to a kind of laser repair devices.
Background technique
In liquid crystal display manufacturing field, due to color film layer (Color Filter, CF) and tft layer (Thin
Film Transistor, TFT) damage can be generated due to technique and the factor of environment in the fabrication process, bad products are generated,
It needs to be repaired using laser repair machine.The process of laser repair includes: by high definition pixel CCD (Charge Coupled
Device) camera lens determines the position of the thin film transistor base plate and capture of taking pictures, and is analyzed, is found out according to the photo of acquisition
Injury region and its corresponding coordinate is provided on the thin film transistor base plate, then computer is according to instruction by the radium-shine of reparation
The mobile coordinate points provided of camera lens, are repaired automatically.
The CCD resolution of lens that existing laser repair machine uses is not high, and generally 4,000,000 pixels need difference of arranging in pairs or groups
Enlarging lens the image of the thin film transistor base plate to be repaired is further amplified.In general, operator needs basis
2 times, 5 times or 10 times of accuracy selection of enlarging lens required for laser repair.
However, since the resolution of CCD camera lens determines the clarity of accessed picture, although enlarging lens can be into one
The image that step amplification CCD camera lens obtains, but do not change the pixel value of amplified picture.It is constant in original image pixel
In the case where, declined at double by the picture clarity that enlarging lens amplify.This is difficult to amplified image, causes
The accuracy of laser repair declines.Further, since the enlarging lens of different amplification correspond to different field angles, choose different
Enlarging lens when, enlarging lens needs moved accordingly on guide rail, cutaway easily leads to rail damage.
Therefore, it is necessary to a kind of new method and apparatus to solve the problems, such as this.
Summary of the invention
The present invention provides a kind of laser repair device, is asked with solving the inadequate technology of existing laser repair lens articulation
Topic.
Specifically, the present invention provides a kind of laser repair devices comprising: plummer, for placing thin film transistor (TFT)
Substrate；Laser emitter, for emitting the superlaser ray of the defect for repairing the thin film transistor base plate；Laser turns
Make thin film transistor base plate described in its directive to device for changing the optical path for the laser beam that laser emitter issues；CCD mirror
Head, for obtaining the image photo of the thin film transistor base plate；It wherein, include charge-coupled device core in the CCD camera lens
The minimum resolution of piece, the chip is greater than 20,000,000 pixels.
One aspect according to the present invention, the laser repair device further include corresponding with the CCD camera lens
One light path redirector, in the areas imaging for the image of the thin film transistor base plate to be projected to CCD camera lens, described first
Light path redirector be located at the perpendicular bisector of the plummer where the interface that is overlapped with the sampling range of the CCD camera lens of plane
On.
One aspect according to the present invention, the laser repair device further include the first enlarging lens, are used for into one
The image that step amplification CCD camera lens obtains, the number of the enlarging lens are less than or equal to 1, and amplification factor is less than or equal to 5
Times.
One aspect according to the present invention, the laser repair device further includes the second enlarging lens, for obtaining
And amplifying the real-time track for the laser being radiated on the thin film transistor base plate, the real-time track includes the shape letter of laser
Breath and location information.
The imaging window of one aspect according to the present invention, second enlarging lens is covered with protective film layer, institute
Stating protective film layer is transparent film layer, for protecting second enlarging lens not by laser damage.
The number of one aspect according to the present invention, second enlarging lens is more than or equal to two, and different
The amplification factor of second enlarging lens is different.
One aspect according to the present invention, the laser repair device further includes supplementary lighting sources, is illuminated for shining
The thin film transistor base plate to be repaired on plummer.
One aspect according to the present invention, the laser repair device further include be correspondingly arranged with supplementary lighting sources
Two light path redirectors, the turn light rays for issuing supplementary lighting sources make it irradiate the film to be repaired on plummer
On transistor base, second light path redirector is located at plane and the supplementary lighting sources where the perpendicular bisector of the plummer
Range of exposures be overlapped interface on.
One aspect according to the present invention, the laser repair device further include first laser adjuster, for pair
The laser intensity that laser emitter issues is decayed, and laser intensity required for laser repair technique is reached.
One aspect according to the present invention, the laser repair device further include second laser adjuster, for pair
The cross sectional shape for the laser that laser emitter issues is adjusted, and reaches shape required for laser repair technique.
The invention has the benefit that existing by using the CCD camera lens replacement that minimum resolution is greater than 20,000,000 pixels
The combination of technology intermediate-resolution lesser CCD camera lens and enlarging lens, laser repair device of the invention can not only increase CCD
The quantity of enlarging lens required for the resolution ratio of camera lens reduces avoids caused rail damage when switching enlarging lens.
Detailed description of the invention
Fig. 1 is the enlarged drawing for the thin film transistor base plate that laser repair device in the prior art obtains；
Fig. 2 is the structural schematic diagram of the laser repair device in one embodiment of the present of invention；
Fig. 3 is the amplification for the thin film transistor base plate that the laser repair device in one embodiment of the present of invention obtains
Figure.
Specific embodiment
The explanation of following embodiment is referred to the additional illustration, the particular implementation that can be used to implement to illustrate the present invention
Example.The direction term that the present invention is previously mentioned, such as [on], [under], [preceding], [rear], [left side], [right side], [interior], [outer], [side]
Deng being only the direction with reference to annexed drawings.Therefore, the direction term used be to illustrate and understand the present invention, rather than to
The limitation present invention.The similar unit of structure is with being given the same reference numerals in the figure.
The prior art is briefly described first.The CCD resolution ratio that the laser repair device of the prior art uses is general
For 4,000,000 pixels, the thin film transistor base plate to be repaired is further amplified the different enlarging lens that need to arrange in pairs or groups.However
In the case where original image pixel is constant, declined at double by the picture clarity that enlarging lens amplify.After this makes amplification
Image be difficult to, cause the accuracy of laser repair to decline.The institute that Fig. 1 obtains for laser repair device in the prior art
The enlarged drawing of thin film transistor base plate is stated, as shown in Figure 1, amplified film is brilliant since the resolution ratio of CCD camera lens is lower
The image of body pipe substrate is relatively fuzzyyer, can not clearly illustrate the route on the thin film transistor base plate, make to patch work
At certain difficulty.Further, since the enlarging lens of different amplification correspond to different field angles, different amplifications is chosen
When camera lens, enlarging lens needs move accordingly on guide rail, and cutaway easily leads to rail damage.
Therefore, the present invention provides a kind of laser repair device, inadequate to solve existing laser repair lens articulation
Technical problem.
The present invention provides a kind of laser repair devices, specifically, referring to fig. 2, Fig. 2 is in one embodiment of the present of invention
Laser repair device structural schematic diagram.Wherein, the laser repair device includes: plummer, for placing the film
Transistor base；Laser emitter, for emitting the superlaser ray of the defect for repairing the thin film transistor base plate；
Laser Direction Pointer makes thin film transistor base plate described in its directive for changing the optical path for the laser beam that laser emitter issues；
CCD camera lens, for obtaining the image photo of the thin film transistor base plate；It wherein, include charge-coupled device in the CCD camera lens
The minimum resolution of part chip, the chip is greater than 20,000,000 pixels.Specifically, referring to fig. 2, Fig. 2 is an implementation of the invention
The structural schematic diagram of laser repair device in example, wherein the laser repair device includes: plummer, first laser transmitting
Device 100, first laser diverter 10, second laser transmitter 200, second laser diverter 12, CCD camera lens 500, the first optical path
Diverter 14, supplementary lighting sources 700, the second light path redirector 18, focusing unit 600, third light path redirector 16, first laser tune
Save device 300, second laser adjuster 400, the 4th light path redirector 19, the first physical magnifying glass 24 and the second physical magnifying glass.
Specifically, the plummer is located at below physical shots, in figure not for placing the thin film transistor base plate
It shows.
The laser emitter is used to emit the superlaser ray of the defect for repairing the thin film transistor base plate,
Including first laser transmitter 100 and second laser transmitter 200, the first laser transmitter 100 and second laser transmitting
Device 200 can emit the laser with different function.For example, the first laser transmitter 100 is used to emit the list of fusing
One high energy laser can pass through fuel factor fuse metal or nonmetallic, such as ZAP Laser.The second laser transmitter
200 for emitting plated film laser, which deposits after material being resolved into graininess, forms corresponding film, such as CVD
Laser。
The optical path for the laser beam that the Laser Direction Pointer issues for changing laser emitter.In existing laser repair
In device, in order to save space as far as possible to reduce the volume of laser repair device, the direction of the launch of the laser emitter
Not plummer described in face, it is therefore desirable to which direction adjustment is carried out to the light that laser emitter issues by Laser Direction Pointer.
Specifically, the Laser Direction Pointer includes the Laser Direction Pointer 10 of corresponding first laser transmitter 100 and corresponds in the present embodiment
The second laser diverter 12 of second laser transmitter 200.
The CCD camera lens 500, for obtaining the image photo of the thin film transistor base plate；Wherein, the CCD camera lens
In include charged coupled device chip, the minimum resolution of the chip is greater than 20,000,000 pixels.Likewise, due to the CCD mirror
Plummer described in face, the laser repair device do not further include and the CCD camera lens corresponding first imaging range of head
Light path redirector 14, it is described in the areas imaging for the image of the thin film transistor base plate to be projected to CCD camera lens 500
First light path redirector 14 is located at the sampling range weight of plane and the CCD camera lens 500 where the perpendicular bisector of the plummer
On the interface of conjunction.
The physical shots include the first enlarging lens 24, and first enlarging lens 24 are obtained for amplifying CCD camera lens 500
The number of the image of the thin film transistor base plate taken, the enlarging lens is less than or equal to 1, and amplification factor is less than or waits
In 5 times.
In the prior art, since the resolution ratio of the CCD camera lens of use is typically not greater than 4,000,000 pixels, according to be measured
It measures the thin film transistor base plate to require the different of repairing precision, there are three the first enlarging lens, respectively 2 times amplifications for assembly
Camera lens, 5 times of enlarging lens and 10 times of enlarging lens.The minimum resolution of CCD camera lens in the present invention is greater than 20,000,000 pixels,
It only needs to arrange in pairs or groups with 2 times of mirror, 10 times of obtainable amplification effects of enlarging lens, and its precision in the prior art can be realized
It is multiplied.Referring to Fig. 3, Fig. 3 is the thin film transistor (TFT) that the laser repair device in one embodiment of the present of invention obtains
The enlarged drawing of substrate, it can be seen that CCD camera lens compared with the prior art, technical solution of the present invention can obtain more clear
Clear enlarged drawing.
Meanwhile second physical shots further include the second enlarging lens, are radiated at the film for obtaining and amplifying
The real-time track of laser on transistor base, the real-time track include the shape information and location information of laser.Described
The imaging window of two enlarging lens is covered with protective film layer, and the protective film layer is transparent film layer, for protecting described second to put
Macro lens is not by laser damage.The number of second enlarging lens is more than or equal to two, and different the second enlarging lens
Amplification factor is different.In the prior art, the different of repairing precision are required according to the thin film transistor base plate to be measured,
It assembles there are three the second enlarging lens, the laser of corresponding different wave length, in the present embodiment, second enlarging lens are respectively 20
Times enlarging lens 26, enabling to wavelength is that 1064 nanometers and 532 nanometers of laser passes through；40 times of enlarging lens 28, can make
The laser that wavelength is 1064 nanometers is obtained to pass through；50 times of enlarging lens 29, enabling to wavelength is that 266 nanometers of laser passes through.
The focusing unit 600 have automatic focusing function, the focusing unit 600 can adjust the enlarging lens and
The relative position of the thin film transistor base plate to be repaired, makes CCD camera lens 500 get clearly image.Likewise, radium-shine
Repair apparatus further includes third light path redirector 18 corresponding with the focusing unit.
The supplementary lighting sources 700 illuminate the thin film transistor base plate to be repaired on plummer for shining.By
In same reason, in order to reduce the volume of the laser repair device, supplementary lighting sources 700 can not shine directly into plummer
On, therefore, the laser repair device further includes the second light path redirector 19 being correspondingly arranged with supplementary lighting sources 700, and being used for will
The turn light rays that supplementary lighting sources 700 issue irradiate it fall on the thin film transistor base plate to be repaired on plummer, described
Plane where second light path redirector 19 is located at the perpendicular bisector of the plummer is overlapped with the range of exposures of the supplementary lighting sources
Interface on.
The laser intensity that the first laser adjuster 300 is used to issue laser emitter is decayed, and is reached
The laser that second laser adjuster 400 described in laser intensity required for laser repair technique is used to issue laser emitter
Cross sectional shape is adjusted, and reaches shape required for laser repair technique.Specifically, 100 He of first laser transmitter
The laser that second laser transmitter 200 issues successively passes through first laser tune after the refraction of corresponding turn light rays device
Section device 300 and second laser adjuster 400 are adjusted original laser, and the laser parameter after making final adjustment, which meets, repairs institute
State the requirement of the laser of thin film transistor base plate needs.Correspondingly, the laser repair device further includes adjusting with second laser
Corresponding 4th light path redirector 19 of device 400 is used for laser irradiation adjusted to the thin film transistor base plate.
The invention has the benefit that existing by using the CCD camera lens replacement that minimum resolution is greater than 20,000,000 pixels
The combination of technology intermediate-resolution lesser CCD camera lens and enlarging lens, laser repair device of the invention can not only increase CCD
The quantity of enlarging lens required for the resolution ratio of camera lens reduces avoids caused rail damage when switching enlarging lens.
In conclusion although the present invention has been disclosed above in the preferred embodiment, but above preferred embodiment is not to limit
The system present invention, those skilled in the art can make various changes and profit without departing from the spirit and scope of the present invention
Decorations, therefore protection scope of the present invention subjects to the scope of the claims.
Claims (10)
1. a kind of laser repair device characterized by comprising
Plummer, for placing thin film transistor base plate；
Laser emitter, for emitting the superlaser ray of the defect for repairing the thin film transistor base plate；
Laser Direction Pointer makes thin film transistor (TFT) described in its directive for changing the optical path for the laser beam that laser emitter issues
Substrate；
CCD camera lens, for obtaining the image photo of the thin film transistor base plate；It wherein, include charge coupling in the CCD camera lens
Device chip is closed, the minimum resolution of the chip is greater than 20,000,000 pixels.
2. laser repair device according to claim 1, which is characterized in that the laser repair device further include with it is described
Corresponding first light path redirector of CCD camera lens, for the image of the thin film transistor base plate to be projected to the imaging of CCD camera lens
In range, first light path redirector is located at plane and the sampling of the CCD camera lens where the perpendicular bisector of the plummer
On the interface that range is overlapped.
3. laser repair device according to claim 1, which is characterized in that the laser repair device further includes first putting
Macro lens, for the image of CCD camera lens acquisition to be further amplified, the number of the enlarging lens is less than or equal to 1, times magnification
Number is less than or equal to 5 times.
4. laser repair device according to claim 3, which is characterized in that the laser repair device further includes second putting
Macro lens, for obtaining and amplifying the real-time track for the laser being radiated on the thin film transistor base plate, the real-time track
Shape information and location information including laser.
5. laser repair device according to claim 4, which is characterized in that the imaging window of second enlarging lens covers
It is stamped protective film layer, the protective film layer is transparent film layer, for protecting second enlarging lens not by laser damage.
6. laser repair device according to claim 5, which is characterized in that the number of second enlarging lens be greater than etc.
In two, and the amplification factor of the second different enlarging lens is different.
7. laser repair device according to claim 1, which is characterized in that the laser repair device further includes light filling light
The thin film transistor base plate to be repaired on plummer is illuminated for shining in source.
8. laser repair device according to claim 7, which is characterized in that the laser repair device further includes and light filling
The second light path redirector that light source is correspondingly arranged, the turn light rays for issuing supplementary lighting sources make its irradiation fall on plummer
On the thin film transistor base plate to be repaired, second light path redirector is located at flat where the perpendicular bisector of the plummer
On the interface that face is overlapped with the range of exposures of the supplementary lighting sources.
9. laser repair device according to claim 1, which is characterized in that the laser repair device further includes first sharp
Light regulator reaches required for laser repair technique for decaying to the laser intensity that laser emitter issues
Laser intensity.
10. laser repair device according to claim 1, which is characterized in that the laser repair device further includes second
The cross sectional shape of laser modulation device, the laser for issuing to laser emitter is adjusted, and reaches laser repair technique
Required shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910064838.XA CN109814286A (en) | 2019-01-23 | 2019-01-23 | Laser repair device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910064838.XA CN109814286A (en) | 2019-01-23 | 2019-01-23 | Laser repair device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109814286A true CN109814286A (en) | 2019-05-28 |
Family
ID=66604935
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910064838.XA Pending CN109814286A (en) | 2019-01-23 | 2019-01-23 | Laser repair device |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112099251A (en) * | 2020-09-16 | 2020-12-18 | 中山大学 | Liquid crystal panel repairing system adopting deep ultraviolet laser |
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| CN1904676A (en) * | 2005-07-26 | 2007-01-31 | 奥林巴斯株式会社 | Laser repairing device |
| KR20070092430A (en) * | 2006-03-10 | 2007-09-13 | 삼성전자주식회사 | Apparatus for reparing pixel of display device |
| CN205826999U (en) * | 2016-06-12 | 2016-12-21 | 昆山精讯电子技术有限公司 | Display floater prosthetic device |
| CN107193141A (en) * | 2017-07-18 | 2017-09-22 | 京东方科技集团股份有限公司 | The detection means and method of a kind of TFT substrate |
| CN107515227A (en) * | 2017-07-27 | 2017-12-26 | 武汉精测电子技术股份有限公司 | Based on the lossless method for compressing image of defect and defects of display panel detecting system |
| CN108490656A (en) * | 2018-04-13 | 2018-09-04 | 凌云光技术集团有限责任公司 | Liquid crystal display image detection method and device |
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2019
- 2019-01-23 CN CN201910064838.XA patent/CN109814286A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1904676A (en) * | 2005-07-26 | 2007-01-31 | 奥林巴斯株式会社 | Laser repairing device |
| KR20070092430A (en) * | 2006-03-10 | 2007-09-13 | 삼성전자주식회사 | Apparatus for reparing pixel of display device |
| CN205826999U (en) * | 2016-06-12 | 2016-12-21 | 昆山精讯电子技术有限公司 | Display floater prosthetic device |
| CN107193141A (en) * | 2017-07-18 | 2017-09-22 | 京东方科技集团股份有限公司 | The detection means and method of a kind of TFT substrate |
| CN107515227A (en) * | 2017-07-27 | 2017-12-26 | 武汉精测电子技术股份有限公司 | Based on the lossless method for compressing image of defect and defects of display panel detecting system |
| CN108490656A (en) * | 2018-04-13 | 2018-09-04 | 凌云光技术集团有限责任公司 | Liquid crystal display image detection method and device |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112099251A (en) * | 2020-09-16 | 2020-12-18 | 中山大学 | Liquid crystal panel repairing system adopting deep ultraviolet laser |
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