TWM629084U - Automatic focusing and imaging system、microscope - Google Patents

Abstract

An automatic focusing and imaging system for a microscope comprises a focal length adjustment module and an imaging module. The focal length adjustment module has an optical module for converting the light emitted by the first light source into a linear beam. The linear beam is transmitted from a first optical element to the focal plane of the specimen, and the specimen is set along the XY direction. A second optical element reflects the linear beam which is transmitted from the focal plane to a first sensor to obtain a focused image. According to the position value of the focused image, the arithmetic unit controls an actuator to adjust the Z-direction position of a first optical element. The imaging module has a third optical element to project the light emitted by the second light source to the imaging plane, and a fourth optical element to image the light reflected from the imaging plane to the second sensor to obtain the target image.

Description

Autofocus and imaging systems, microscopes

This work is about the automatic focusing and imaging system of microscopes, especially a system for fast focusing and imaging of electronic products.

The microscope has the characteristics of high image magnification, which can magnify small objects for observation. Because of the high magnification, the depth of field range is relatively small, and the user needs to spend time adjusting the distance between the objective lens and the object to be observed. In order to be able to see the observed object clearly, the autofocus system on the market can quickly adjust the distance between the objective lens and the observed object because the focal plane is the image acquisition plane. image.

However, for the special functional design of current electronic products, such as under-screen cameras, LED glass substrate packaging, and liquid crystal panel packaging (Chip on glass, Film on glass), most of the related electronic components are placed on a dielectric material, which needs to be checked. The electronic component needs to penetrate the medium material to be observed. If the automatic focusing system on the market is used, it is not easy to achieve the purpose of fast focusing, or multiple procedures are required to complete the focusing, resulting in a decrease in production efficiency.

Based on the above deficiencies, the purpose of the present invention is to provide an automatic focusing system, especially a fast focusing and image capturing focusing system for electronic products.

According to the purpose of the present invention, an automatic focusing and imaging system is provided, which includes a focal length adjustment module and an optical module for converting the light emitted by a first light source into a straight beam, and the straight beam passes through a first optical element It is transmitted to a focal plane of an object to be tested, the object to be tested is arranged along an XY direction, and a second optical element transmits the straight beam reflected from the focal plane to a first sensor to obtain a focus image, an arithmetic unit controls a setter to adjust a Z-direction position of the first optical element according to the position value of the focused image, and an imaging module having a third optical element to emit a second light source The light is projected onto an imaging plane of the object to be tested, and a fourth optical element images the light reflected by the imaging plane to a second sensor to obtain a target image.

There is also a first beam splitting element and a second beam splitting element located on the light path between the focal plane and the first sensor, and the first beam splitting element is used to transmit part of the straight beam to the second A beam splitting element, the second beam splitting element reflects the portion of the straight beam to the first optical element and transmits the portion of the straight beam to the focal plane by the first optical element, the second beam splitting element allows from the focal plane The portion of the straight beam reflected back to the first optical element is reflected to the first beam splitting element, which allows the portion of the straight beam to be reflected to the second optical element and transmitted to the second optical element by the first beam splitting element first sensor.

Wherein the second light splitting element and a third light splitting element are located on the light path between the second sensor and the image pickup plane and between the third optical element and the image pickup plane, and the third light splitting element is used for So that part of the light of the second light source is reflected to the second beam splitting element, the second beam splitting element transmits part of the light to the first optical element and the first optical element transmits the part of the light to the extraction The image plane, the second beam splitting element allows the portion of the light reflected from the image plane back to the first optical element to pass to the third beam splitting element, the third beam splitting element allows the portion of the light to pass through the fourth optical element imaged to the second sensor.

Preferably, the image capturing module further has a light absorbing plate and a first reflecting element, the first reflecting element reflects part of the light from the second light source after passing through a third beam splitting element to the light absorbing plate.

Preferably, there is also a third light source and a second reflection element, the second reflection element reflects a light of the third light source to a fourth beam splitting element, the fourth beam splitting element The third light source A part of the light is reflected to the first optical element, the first optical element transmits the light to the imaging plane, and the third light source is a high-power laser light.

Preferably, the distance between the focusing plane and the image capturing plane is between 0mm and 10mm.

Preferably, the first light source is a laser light or a light-emitting diode, and the second light source is a light-emitting diode.

The present creation also has a microscope with the aforementioned autofocus and imaging system.

In order to clearly illustrate the specific implementation, structure and achieved effects of this creation, the following examples are provided and described in conjunction with the drawings:

Please refer to FIG. 1 , which shows an automatic focusing and imaging system, including a focal length adjustment module and an imaging module. The focal length adjustment module has an optical module 11 for converting the light emitted by a first light source 10 Converted into a straight beam 101, the straight beam 101 is transmitted through a first optical element 41 to a focal plane 51 of an object to be measured, the object to be measured is arranged along an XY direction, and a second optical element 42 will be transmitted from the The straight beam 101 reflected by the focusing plane 51 is transmitted to a first sensor 13 to obtain a focused image, and an arithmetic unit 15 controls a setter 17 to adjust a position of the first optical element 41 according to the position value of the focused image. In the Z-direction position, the arithmetic unit 15 performs image processing and analysis, and the arithmetic unit 15 may be but not limited to programmable signal processing elements such as CPU, DSP, FPGA, or mixed-signal processor.

Further description, the focal length adjustment module also has a first beam splitting element 31 and a second beam splitting element 32 located on the light path between the focusing plane 51 and the first sensor 13 , the first beam splitting element 31 uses In order to transmit the part of the straight beam 101 to the second beam splitting element 32, the second beam splitting element 32 reflects the part of the straight beam 101 to the first optical element 41 and the first optical element 41 sends the straight beam The part of 101 transmitted to the focal plane 51 forms a first optical path; and the second beam splitting element 32 allows the part of the straight beam 101 reflected from the focal plane 51 back to the first optical element 41 to be reflected to the first beam splitting element 31 , the first beam splitting element 31 allows part of the straight beam 101 to be reflected to the second optical element 42, and the second optical element 42 transmits part of the straight beam 101 to a first sensor 13 to form a second optical path And make the first sensor 13 obtain a focused image. The first light source 10 may be a laser light or a light emitting diode (LED), and the first sensor 13 may be a line scan camera or an area camera. The first optical element 41 and the second optical element 42 are optical lenses.

The imaging module has a third optical element 43 to project a light from a second light source 20 to an imaging plane 52 of the object to be tested, and a fourth optical element 44 to pass through the imaging plane 52 The reflected light is transmitted to a second sensor 22 to obtain a target image, the second light source 20 is a light emitting diode (LED) of visible light or infrared light, and the second sensor 22 is a line scan camera or a surface camera. The third optical element 43 and the fourth optical element 44 are optical lenses.

Further description, the second light splitting element 32 and a third light splitting element 33 are located in the light paths between the second sensor 22 and the image capturing plane 52 and between the third optical element 43 and the image capturing plane 52 On the other hand, the third beam splitting element 33 is used to reflect part of the light of the second light source to the second beam splitting element 32, and the second beam splitting element 32 transmits the part of the light to the first optical element 41 and is transmitted by the second beam splitting element 32. The first optical element 41 transmits the portion of the light to the image pickup plane 52 to form a third optical path, and the second beam splitting element 32 allows the portion of the light reflected from the image pickup plane 52 back to the first optical element 41 to be transmitted to the image pickup plane 52 . The third beam splitting element 33 that allows the portion of the light to be transmitted to a fourth optical element 44 that images the portion of the light to the second sensor 22 to form a first Four optical paths make the second sensor 22 obtain the target image.

After the aforementioned straight beam reaches the first sensor 13 through the first optical path and the second optical path for focusing, the light from the second light source reaches the second sensor 22 through the third optical path and the fourth optical path to take a complete image. Autofocus and image acquisition process.

For further description, please refer to FIG. 2 for the in-focus image frame obtained by the first sensor 13. The in-focus image obtained by the first sensor 13 is a linear light spot. The distance z between the first optical element 41 and the focal plane 51 changes), the linear light spot will move along the X direction in the first sensor 13, so the computing unit 15 will control the first optical element according to the position of the focused image The Z-direction position of the element 41 enables the second sensor 22 to obtain a clear image. In other embodiments, the straight beam 101 may also be in a shape other than a strip, such as a triangle, an arc or a circle, as long as a light spot for measurement can be formed on the first sensor 13 .

mkx+a 其中

，C是第一光學元件41的數值孔徑，a、k為校正常數，z是第一光學元件41與對焦平面51之間的距離，x是第一感測器13上的對焦影像位置，當該對焦影像在x1位置時，對應第一光學元件41在Z方向位置z1，當對焦影像在x2位置時，對應第一光學元件41在Z方向位置z2，當對焦影像在x3位置時，對應第一光學元件41在Z方向位置z3，以此類推，該對焦影像的x位置與第一光學元件41在Z方向位置呈線性關係。 Referring to FIG. 3 , the position value of the actuator 17 to adjust the position of the first optical element 41 is based on the following formula: z(x)

mkx+a where

, C is the numerical aperture of the first optical element 41, a and k are the correction constants, z is the distance between the first optical element 41 and the focus plane 51, x is the focused image position on the first sensor 13, when When the focused image is at the position x1, it corresponds to the position z1 of the first optical element 41 in the Z direction; when the focused image is at the position x2, it corresponds to the position z2 of the first optical element 41 in the Z direction; when the focused image is at the position x3, it corresponds to the first optical element 41 at the position x3. The position z3 of an optical element 41 in the Z direction, and so on, the x position of the focused image has a linear relationship with the position of the first optical element 41 in the Z direction.

Please refer to FIG. 4 of the second embodiment of the present invention. In the second embodiment, when the image capturing plane of the object to be measured is on a plane of unequal heights, the focused image on the first sensor 13 is digitally processed can be decomposed into one or more line segments for local positioning (line segments A, B, and C in the figure), whereby the user can set any x, y position on the imaging plane 52 to correspond to the imaging distance h (ie, focus the distance between the plane and the imaging plane), in the embodiment of the present invention, the distance between the focal plane and the imaging plane is between 0 mm and 10 mm, and the distance between the aforementioned first optical element 41 and the focal plane 51 z is greater than the aforementioned imaging distance h.

Please refer to FIG. 5 of the third embodiment of the present invention. In the third embodiment, the image capturing module also has a light absorbing plate 62 and a first reflecting element 61 , and the light emitted by the second light source 20 passes through the third optical After the element 43 is transmitted to the third beam splitting element 33, part of the light will be reflected to the second beam splitting element 32, and another part of the light will penetrate to the first reflection element 61, and be reflected to the light absorbing plate 62 through the first reflection element 61 and absorbed By forming the fifth optical path, the formation of the fifth optical path can prevent light from being reflected to the second sensor 22 and affect the image capturing image, and can improve the contrast of the target image.

Please refer to FIG. 6 , which is the fourth embodiment of the present invention. In the fourth embodiment, there is also a third light source 73 and a second reflecting element 72 , and the light emitted by the third light source 73 is a high-power laser light of more than 10W. , the laser light is reflected to a fourth light splitting element 71 through the second reflecting element 72 , and the fourth light splitting element 71 reflects part of the laser light to the imaging plane 52 , so that the laser light can be directly measured by the laser light The object is processed (that is, the imaging plane 52 is the processing plane), which improves the convenience of use.

The third beam splitting element 33 , the second beam splitting element 32 and the first optical element 41 are all located on the light path of the imaging plane 52 and the fourth beam splitting element 71 , and the laser light is reflected by the second reflecting element 72 to the fourth beam The beam splitting element 71, the fourth beam splitting element 71 reflects the part of the laser light to the fourth optical element 44, the fourth optical element 44 transmits the laser light to the third beam splitting element 33, and the third beam splitting element 33 transmits the part of the laser light The second light splitting element 32 transmits part of the laser light to the first optical element 41, and finally the first optical element 41 transmits the laser light to the image capturing plane 52 to form a sixth optical path, thereby The object to be tested can be directly processed by laser, which reduces the processing cost after the user moves the object to be tested, and improves the convenience.

A, B, C: local line segments of the focused image h: acquisition distance z: distance between the first optical element and the focal plane 10: The first light source 101: Straight Beam 11: Optical module 13: The first sensor 15: Operation unit 17: Setter 20: Second light source 22: Second sensor 31: The first light splitting element 32: Second beam splitting element 33: The third beam splitting element 41: First Optical Element 42: Second Optical Element 43: Third Optics 44: Fourth Optical Element 51: Focus plane 52: Acquisition plane 61: First reflective element 62: Absorbent plate 71: Fourth beam splitting element 72: Second reflective element 73: The third light source

FIG. 1 is a light path diagram of the first embodiment of the present invention.

FIG. 2 is a schematic diagram of a focused image obtained by the first sensor of the present invention.

FIG. 3 is a linear relationship between the x position of the focused image and the position of the first optical element in the Z direction.

FIG. 4 is a schematic diagram of a focused image frame obtained by the first sensor of the second embodiment of the present invention.

FIG. 5 is a light path diagram of the third embodiment of the present invention.

FIG. 6 is a light path diagram of the fourth embodiment of the present invention.

h: acquisition distance

z: distance between the first optical element and the focal plane

10: The first light source

101: Straight Beam

11: Optical module

13: The first sensor

15: Operation unit

17: Setter

20: Second light source

22: Second sensor

31: The first light splitting element

32: Second beam splitting element

33: The third beam splitting element

41: First Optical Element

42: Second Optical Element

43: Third Optics

44: Fourth Optical Element

51: Focus plane

52: Acquisition plane

Claims (9)

An automatic focusing and imaging system, comprising: A focal length adjustment module with an optical module for converting the light emitted by a first light source into a straight beam, the straight beam is transmitted to a focal plane of a test object and a second optical beam through a first optical element The element transmits the straight beam reflected from the focal plane to a first sensor to obtain a focused image, and an arithmetic unit controls a setter to adjust a Z direction of the first optical element according to the position value of the focused image location; and an imaging module, which has a third optical element to project a light emitted by a second light source to an imaging plane of the object to be tested, and a fourth optical element to image the light reflected by the imaging plane to a second sensor to obtain a target image. The automatic focusing and imaging system according to claim 1, further comprising a first beam splitting element and a second beam splitting element located on the light path between the focusing plane and the first sensor, the first beam splitting element The element is used to transmit the part of the straight beam to the second beam splitting element, and the second beam splitting element reflects the part of the straight beam to the first optical element and transmits the part of the straight beam to the first optical element. the focal plane, the second beam splitting element allows a portion of the straight beam reflected from the focusing plane back to the first optical element to be reflected to the first beam splitting element, the first beam splitting element allows a portion of the straight beam to be reflected to the first beam splitter Two optical elements are transmitted to the first sensor by the second optical element. The automatic focusing and imaging system of claim 2, wherein the second beam splitting element and a third beam splitting element are located between the second sensor and the imaging plane, and the third optical element and the imaging plane On the light path between the planes, the third light splitting element is used to reflect the part of the light from the second light source to the second light splitting element, and the second light splitting element transmits the part of the light to the first optical element and the first optical element transmits the part of the light to the image acquisition plane, the second beam splitting element allows the part of the light reflected from the image plane back to the first optical element to be transmitted to the third beam splitter element, The third beam splitter element allows the portion of the light to be imaged to the second sensor via the fourth optical element. The automatic focusing and imaging system according to claim 1, wherein the imaging module further has a light absorbing plate and a first reflection element, and the first reflection element passes the light of the second light source through a third beam splitter Part of the light behind the element is reflected to the light absorbing plate. The automatic focusing and imaging system according to claim 1, further comprising a third light source and a second reflection element, the second reflection element reflects a light of the third light source to a fourth beam splitting element, the The fourth light splitting element reflects the part of the light from the third light source to the first optical element, and the first optical element transmits the light to the imaging plane. The automatic focusing and imaging system according to claim 5, wherein the third light source is a high-power laser light. The automatic focusing and imaging system of claim 1, wherein the distance between the focusing plane and the imaging plane is between 0 mm and 10 mm. The automatic focusing and imaging system according to claim 1, wherein the first light source is a laser light or a light-emitting diode, and the second light source is a light-emitting diode. A microscope having the automatic focusing and imaging system as described in any one of claim 1 to claim 8.

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