CN109806803A - A kind of microfluid mixing device and its control method with electrowetting threshold gate - Google Patents
A kind of microfluid mixing device and its control method with electrowetting threshold gate Download PDFInfo
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- CN109806803A CN109806803A CN201910148719.2A CN201910148719A CN109806803A CN 109806803 A CN109806803 A CN 109806803A CN 201910148719 A CN201910148719 A CN 201910148719A CN 109806803 A CN109806803 A CN 109806803A
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- electrowetting
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Abstract
The invention discloses a kind of microfluid mixing device and its control method with electrowetting threshold gate realizes that the mixing of microfluid is controlled by the way that electrowetting valve is arranged in hydrophilic microchannel.When liquid flows to hydrophobic electrode, due to the collective effect of dielectric layer and PDMS micro-pillar array, liquid will be flowed in hydrophobic electrode Edge-stopping.If loading very low voltage at this time, hydrophobic electrode due to electrowetting effect and be changed into hydrophily, microfluid can realize mixing.Microchannel in the device is hydrophilic, thus the liquid wherein flowed can be by the effect automatic flowing of capillary force without by external force.The advantage of the invention is that not needing additional infusion pump, micro fluidic device structure is simplified.Microfluid mixing device with electrowetting valve has a wide range of applications in fields such as chemical analysis, biomedicines.
Description
Technical field
The invention belongs to microfluidic arts, and in particular to a kind of microfluid mixing device with electrowetting threshold gate and
Its control method.
Background technique
The target of micro-total analysis system is to realize biochemical analysis system by micro electro mechanical processing (MEMS) technology and biotechnology
Unite from style processing to detection entirety micromation, integrated and portability, be present analysis Instrument Development important directions with
Forward position.Micro-fluidic chip is the emphasis of current micro-total analysis system development using microchannel network as structure feature, and with its height
Effect, quickly, the advantages that reagent dosage is few, low consumption and integrated level are high cause domestic outer analysis and life science circle relevant expert
Extensive concern shows good application prospect, various new miniflows in fields such as environmental monitoring, clinical diagnosis, Pharmaceutical Analysis
The preparation of control chip and detection technique emerge one after another.
When micro-fluidic chip applies to biochemical each field, micro-mixer is its important component part.Micro liquid mixes
Close the important step for making to realize clinical biochemical reaction.Due to the strict demand of Trace Elements and quality, many quantitative analyses
Micro biochemical analysis in liquid need microlitre, the control of nanoliter level, traditional hybrid mode has been extremely difficult to this need
It asks, correspondingly, the hybrid system research based on micro-fluidic chip obtains tremendous development as a uncharted field.At present for
The hybrid system of microfluid includes static type and two kinds of dynamic type.The former relies on the phase counterdiffusion of liquid itself, and the latter passes through outer
The flowing of power acceleration microfluid.
The universal processing technology of these mixers is complicated, cumbersome.Therefore how a kind of, manufacture simple with assembly is provided
Convenient microfluidic mixer, so that controlling mixing of the microfluid in pipeline effectively to realize the function of chip is current sheet
Field technical staff technical problem urgently to be resolved.
Summary of the invention
The purpose of the present invention is to provide a kind of microfluid mixing device and its control method with electrowetting threshold gate, can
To realize the automatic mixing control of microfluid.
Technical solution of the invention are as follows: a kind of microfluid mixing device with electrowetting valve, using hydrophilic micro-
Circulation road is combined with electrowetting valve, by capillary phenomenon and electrowetting principle, realizes the control to Microfluidic Mixing.
The microfluid mixing device with electrowetting threshold gate, including upper substrate, lower substrate, dielectric layer, first electrode,
Power supply, switch, second electrode and two groups of micro-pillar arrays；Upper substrate bottom surface is provided with the groove of a strip, two groups of micro-pillar arrays
It is divided into three strips along the groove that the central axis of the groove of strip is symmetricly set on strip, and by the groove of strip
The channel of shape, the top surface of the fixed lower substrate of upper substrate, the channel of three strips between the two is sealed passage, first electrode
It is paved with the channel for being located in the middle strip, and is fixed on lower substrate, first electrode top surface is coated with dielectric layer, second electrode
It is arranged in any one in the channel of the strip of two sides one end, second electrode and first electrode are connected to power supply two
End, and by switch control power on/off, sets that there are two the through-hole channel ends with the strip for being located at two sides respectively on upper substrate
It communicates,.
First electrode is hydrophobic surface, the hydrophobic material of the material selection high dielectric constant of dielectric layer after coated media layer
Material.
A kind of control method based on the microfluid mixing device with electrowetting valve, method and step are as follows:
First liquid to be mixed and second liquid are placed in two through-holes by step 1, due to the effect of capillary force, the first liquid
Body and second liquid stop along the two sides that the channel of strip is moved to first electrode automatically；
Step 2, when after closing the switch, due to the effect of electrowetting, first electrode becomes between first electrode and second electrode
Water-wetted surface makes the first liquid and second liquid from the interfluent strip channel in the gap between two groups of micro-pillar arrays,
Smoothly mixing.
Compared with prior art, the present invention its remarkable advantage is:
(1) additional infusion pump is not needed, micro fluidic device structure is simplified, and reduces the whole body of micro fluidic device
Product.
(2) present apparatus structure is simple, only upper and lower two substrates.
(3) it can be achieved with the control mixed to liquid using the voltage of very little, not only power supply is easy, but also energy saving.
Detailed description of the invention
Fig. 1 is a kind of top view of the microfluid mixing device with electrowetting threshold gate of the present invention, wherein figure (a) is two kinds
Microfluid motion stage in microchannel, figure (b) are that two kinds of liquid flow to electrode both ends, and figure (c) is that two kinds of liquid complete mixing.
Fig. 2 is a kind of A-A ' cross-sectional view of microfluid mixing device with electrowetting threshold gate.
Specific embodiment
The present invention is described in further detail with reference to the accompanying drawing.
First liquid 7 to be mixed and second liquid 8 are placed in two through-holes, due to the effect of capillary force, the first liquid
Body 7 and second liquid 8 stop along the two sides that the channel of strip is moved to first electrode 5 automatically.When first electrode 5 and second
After closing the switch between electrode 6, due to the effect of electrowetting, first electrode becomes water-wetted surface, makes the first liquid 7 and second
Liquid 8 smoothly mixes, from the interfluent strip channel in the gap between two groups of micro-pillar arrays 2 to realize miniflow
The neous flow of body and mixing control.
The present invention realize the neous flow of microfluid with mix control, additional infusion pump is not needed, to microfluidic devices
The miniaturization of part, easy aspect are of great significance.
Combined with Figure 1 and Figure 2, with the microfluid mixing device of electrowetting threshold gate, including upper substrate 1, lower substrate 3, medium
Layer 4, first electrode 5, power supply, switch, second electrode 6 and two groups of micro-pillar arrays 2；
1 bottom surface of upper substrate is provided with the groove of a strip, and two groups of micro-pillar arrays 2 are symmetrical along the central axis of the groove of strip
It is arranged in the groove of strip, and the groove of strip is divided into the channel of three strips, the fixed lower substrate 3 of upper substrate 1
Top surface, the channels of three strips between the two is sealed passage, and first electrode 5, which is paved with, is located in the middle the logical of strip
Road, and be fixed on lower substrate 3,5 top surface of first electrode is coated with dielectric layer 4, and the dielectric layer 4 should select hydrophobic material, such as
PDMS, this is implemented as the key of mixer functionalities, and second electrode 6 is arranged in any one in the channel of the strip of two sides
One end of item, second electrode 6 and first electrode 5 are connected to both ends of power, and pass through switch control power on/off, set on upper substrate 1
There are two through-holes to communicate respectively with the channel end for the strip for being located at two sides,.
Upper substrate 1 and micro-pillar array 2 are polymer material, and PDMS can be used in polymer material.Lower substrate 3 is glass base
Bottom.Micro-pillar array 2 is made of several spaced cylinders.
Supply voltage is less than 15V.
The control method of microfluid mixing device with electrowetting valve, method and step are as follows:
The first liquid 7 and second liquid 8 to be mixed are placed in two circular grooves by step 1, due to the work of capillary force
With the first liquid 7 and second liquid 8 stop along the two sides that microchannel is moved to first electrode 5 automatically.
Step 2, when accessing the voltage of very little between first electrode 5 and second electrode 6, due to the effect of electrowetting, the
One electrode 5 becomes water-wetted surface, and the first liquid 7 and second liquid 8 is made smoothly to be mixed into mixing liquid 9.
The manufacture craft of the microfluid mixing device with point wetting valve of the present invention is as follows:
1, upper substrate 1 and two groups of micro-pillar arrays 2, material selection PDMS are prepared using the method for soft lithographic.
2, first electrode 5 and second electrode 6 are made on lower substrate 3 using the method for metal coating and wet etching, electricity
Copper, aluminium or gold etc. can be selected in pole material.
3, hydrophobic layer 4 is modified in first electrode 5, PDMS, perfluor dodecyl mercaptans etc. can be selected in the material of hydrophobic layer 4.
4, upper substrate 1 and two groups of micro-pillar arrays 2 are combined formation with lower substrate 3 by pressing after corona treatment
Microchannel.
The advantage of the invention is that not needing additional infusion pump, micro fluidic device structure is simplified.With electrowetting valve
The microfluid mixing device of door has a wide range of applications in fields such as chemical analysis, biomedicines.
Claims (9)
1. a kind of microfluid mixing device with electrowetting valve, it is characterised in that: utilize hydrophilic microchannel and electrowetting
Valve combines, and by capillary phenomenon and electrowetting principle, realizes the control to Microfluidic Mixing.
2. the microfluid mixing device according to claim 1 with electrowetting threshold gate, it is characterised in that: including upper substrate
(1), lower substrate (3), dielectric layer (4), first electrode (5), power supply, switch, second electrode (6) and two groups of micro-pillar arrays (2)；On
Substrate (1) bottom surface is provided with the groove of a strip, and two groups of micro-pillar arrays (2) symmetrically set along the central axis of the groove of strip
It sets in the groove of strip, and the groove of strip is divided into the channel of three strips, the fixed lower substrate of upper substrate (1)
(3) channel of top surface, three strips between the two is sealed passage, and first electrode (5), which is paved with, is located in the middle strip
The channel of shape, and be fixed on lower substrate (3), first electrode (5) top surface is coated with dielectric layer (4), and second electrode (6) setting exists
Any one one end in the channel of the strip of two sides, second electrode (6) and first electrode (5) are connected to power supply two
End, and by switch control power on/off, sets that there are two through-hole tunnel ends with the strip for being located at two sides respectively on upper substrate (1)
Portion communicates.
3. the microfluid mixing device according to claim 2 with electrowetting threshold gate, it is characterised in that: upper substrate (1)
It is polymer material with micro-pillar array (2), lower substrate (3) is substrate of glass.
4. the microfluid mixing device according to claim 3 with electrowetting threshold gate, it is characterised in that: polymer material
Using PDMS.
5. the microfluid mixing device according to claim 2 with electrowetting threshold gate, it is characterised in that: first electrode
It (5) is afterwards hydrophobic surface, the hydrophobic material of the material selection high dielectric constant of dielectric layer (4) in coated media layer (4).
6. the microfluid mixing device according to claim 5 with electrowetting threshold gate, it is characterised in that: dielectric layer (4)
Using PDMS.
7. the microfluid mixing device according to claim 2 with electrowetting threshold gate, it is characterised in that: micro-pillar array
(2) it is made of several spaced cylinders.
8. the microfluid mixing device according to claim 2 with electrowetting threshold gate, it is characterised in that: supply voltage is small
In 15V.
9. a kind of control based on the microfluid mixing device described in any one of claim 1-8 with electrowetting valve
Method, it is characterised in that: method and step is as follows:
First liquid (7) to be mixed and second liquid (8) are placed in two through-holes by step 1, due to the effect of capillary force,
First liquid (7) and second liquid (8) stop along the two sides that the channel of strip is moved to first electrode (5) automatically；
Step 2, between first electrode (5) and second electrode (6) after closing the switch, due to the effect of electrowetting, the first electricity
Pole (5) becomes water-wetted surface, makes the first liquid (7) and second liquid (8) from the gap inflow between two groups of micro-pillar arrays (2)
Between strip channel on, smoothly mix.
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| CN201910148719.2A CN109806803B (en) | 2019-02-28 | 2019-02-28 | Microfluid mixing device with electrowetting valve and control method thereof |
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| CN201910148719.2A CN109806803B (en) | 2019-02-28 | 2019-02-28 | Microfluid mixing device with electrowetting valve and control method thereof |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645408A (en) * | 2019-11-08 | 2020-01-03 | 广州大学 | Electrowetting-driven liquid drop micro-valve liquid circulation control device |
| CN113634293A (en) * | 2021-08-09 | 2021-11-12 | 复旦大学 | Light-operated all-inorganic EWOD device |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101663089A (en) * | 2007-04-04 | 2010-03-03 | 微点生物技术有限公司 | micromachined electrowetting microfluidic valve |
| CN102980930A (en) * | 2012-12-17 | 2013-03-20 | 江苏科技大学 | Preparation method of electric wettability electrode |
| CN103075573A (en) * | 2012-12-31 | 2013-05-01 | 苏州汶颢芯片科技有限公司 | Micro-fluidic chip-based electric field response micro valve and preparation method thereof |
| CN103470852A (en) * | 2013-09-12 | 2013-12-25 | 东南大学 | Microfluid valve gear based on electrowetting technology |
| CN103464070A (en) * | 2013-09-27 | 2013-12-25 | 东南大学 | Electrowetting micro-fluid device based on super-hydrophobic surface |
| CN103657748A (en) * | 2012-09-25 | 2014-03-26 | 中国科学院理化技术研究所 | Printing type paper microfluid chip and manufacture method thereof |
| CN104144748A (en) * | 2013-01-09 | 2014-11-12 | 泰肯贸易股份公司 | Disposable cartridge for microfluidics systems |
| EP2945741A1 (en) * | 2013-01-17 | 2015-11-25 | Technion Research & Development Foundation Ltd. | Microfluidic device and method thereof |
-
2019
- 2019-02-28 CN CN201910148719.2A patent/CN109806803B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101663089A (en) * | 2007-04-04 | 2010-03-03 | 微点生物技术有限公司 | micromachined electrowetting microfluidic valve |
| CN103657748A (en) * | 2012-09-25 | 2014-03-26 | 中国科学院理化技术研究所 | Printing type paper microfluid chip and manufacture method thereof |
| CN102980930A (en) * | 2012-12-17 | 2013-03-20 | 江苏科技大学 | Preparation method of electric wettability electrode |
| CN103075573A (en) * | 2012-12-31 | 2013-05-01 | 苏州汶颢芯片科技有限公司 | Micro-fluidic chip-based electric field response micro valve and preparation method thereof |
| CN104144748A (en) * | 2013-01-09 | 2014-11-12 | 泰肯贸易股份公司 | Disposable cartridge for microfluidics systems |
| EP2945741A1 (en) * | 2013-01-17 | 2015-11-25 | Technion Research & Development Foundation Ltd. | Microfluidic device and method thereof |
| CN103470852A (en) * | 2013-09-12 | 2013-12-25 | 东南大学 | Microfluid valve gear based on electrowetting technology |
| CN103464070A (en) * | 2013-09-27 | 2013-12-25 | 东南大学 | Electrowetting micro-fluid device based on super-hydrophobic surface |
Non-Patent Citations (2)
| Title |
|---|
| 冯喜增: "《微全分析系统构建与应用》", 31 December 2005, 天津科学技术出版社 * |
| 陈文元等: "《集成微流控聚合物PCR芯片》", 31 January 2009, 上海交通大学出版社 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110645408A (en) * | 2019-11-08 | 2020-01-03 | 广州大学 | Electrowetting-driven liquid drop micro-valve liquid circulation control device |
| CN113634293A (en) * | 2021-08-09 | 2021-11-12 | 复旦大学 | Light-operated all-inorganic EWOD device |
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| CN109806803B (en) | 2022-02-18 |
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