CN109806803B - Microfluid mixing device with electrowetting valve and control method thereof - Google Patents
Microfluid mixing device with electrowetting valve and control method thereof Download PDFInfo
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- CN109806803B CN109806803B CN201910148719.2A CN201910148719A CN109806803B CN 109806803 B CN109806803 B CN 109806803B CN 201910148719 A CN201910148719 A CN 201910148719A CN 109806803 B CN109806803 B CN 109806803B
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Abstract
The invention discloses a microfluid mixing device with an electrowetting threshold door and a control method thereof, wherein the mixing control of microfluid is realized by arranging an electrowetting valve in a hydrophilic microfluid channel. When the liquid flows to the hydrophobic electrode, the liquid stops flowing at the edge of the hydrophobic electrode due to the combined action of the medium layer and the PDMS micro-column array. At this time, if a very low voltage is applied, the hydrophobic electrode is changed into a hydrophilic state due to the electrowetting effect, and the microfluid can realize mixing. The microfluidic channels in the device are hydrophilic so that liquid flowing therein can flow automatically by capillary force without the aid of external force. The invention has the advantages that no additional infusion pump is needed, and the structure of the microfluidic device is simplified. The microfluid mixing device with the electrowetting valve has wide application prospect in the fields of chemical analysis, biomedicine and the like.
Description
Technical Field
The invention belongs to the technical field of microfluidics, and particularly relates to a microfluid mixing device with an electrowetting valve and a control method thereof.
Background
The micro total analysis system aims at realizing the whole miniaturization, integration and portability of the biochemical analysis system from pattern processing to detection by means of Micro Electro Mechanical Systems (MEMS) technology and biotechnology, and is an important direction and frontier for the development of the current analytical instrument. The micro-fluidic chip takes a micro-pipeline network as a structural characteristic, is the key point of the development of the current micro-total analysis system, and has the advantages of high efficiency, high speed, small reagent dosage, low consumption, high integration level and the like, so that the micro-fluidic chip has wide attention of relevant experts in domestic and foreign analysis and life science, shows good application prospect in the fields of environmental monitoring, clinical diagnosis, pharmaceutical analysis and the like, and has various new micro-fluidic chip preparation and detection technologies.
When the micro-fluidic chip is applied to various biochemical fields, the micro-mixer is an important component of the micro-fluidic chip. The mixing of minute amounts of liquid enables an important step in the realization of clinical biochemical reactions. Due to strict requirements on trace element components and quality, liquid in micro biochemical analysis of many quantitative analyses needs to be controlled by micro-liter and nano-scale, and the traditional mixing mode is difficult to meet the requirements. Current mixing systems for microfluidics include both static and dynamic types. The former relies on the inter-diffusion of the liquid itself, and the latter accelerates the flow of the microfluid by an external force.
These mixers are generally complex in processing technology and cumbersome to operate. Therefore, it is an urgent technical problem to be solved by those skilled in the art to provide a microfluidic mixer that is easy to assemble and convenient to manufacture, so as to effectively control the mixing of microfluid in a pipeline to realize the function of a chip.
Disclosure of Invention
The invention aims to provide a microfluid mixing device with an electrowetting valve and a control method thereof, which can realize automatic mixing control of microfluid.
The technical solution of the invention is as follows: a microfluid mixing device with an electrowetting valve utilizes the combination of a hydrophilic microflow channel and the electrowetting valve and realizes the control of microfluid mixing by the capillary phenomenon and the electrowetting principle.
The microfluid mixing device with the electrowetting valve comprises an upper substrate, a lower substrate, a dielectric layer, a first electrode, a power supply, a switch, a second electrode and two groups of microcolumn arrays; the bottom surface of the upper substrate is provided with a strip-shaped groove, the two groups of micro-column arrays are symmetrically arranged in the strip-shaped groove along the central axis of the strip-shaped groove and are divided into three strip-shaped channels, the upper substrate fixes the top surface of the lower substrate, the three strip-shaped channels between the upper substrate and the lower substrate are sealed channels, the first electrode is fully paved with the strip-shaped channel in the middle and fixed on the lower substrate, the top surface of the first electrode is coated with a dielectric layer, the second electrode is arranged at one end of any one of the strip-shaped channels on two sides, the second electrode and the first electrode are connected at two ends of a power supply and are controlled to be powered on and powered off by a switch, and the upper substrate is provided with two through holes which are respectively communicated with the end parts of the strip-shaped channels on two sides.
The first electrode is a hydrophobic surface after being coated with the dielectric layer, and the dielectric layer is made of a hydrophobic material with a high dielectric constant.
A control method based on a microfluid mixing device with an electrowetting valve comprises the following steps:
and 2, after the switch between the first electrode and the second electrode is closed, the first electrode is changed into a hydrophilic surface due to the action of electrowetting, so that the first liquid and the second liquid flow into the middle elongated channel from the gap between the two groups of micro-column arrays and are smoothly mixed.
Compared with the prior art, the invention has the remarkable advantages that:
(1) no additional infusion pump is needed, the structure of the microfluidic device is simplified, and the overall volume of the microfluidic device is reduced.
(2) The device has simple structure and only has an upper substrate and a lower substrate.
(3) The liquid mixing can be controlled by using a small voltage, so that the power supply is simple and convenient, and the energy is saved.
Drawings
Fig. 1 is a top view of a microfluidic mixing device with electrowetting valves of the present invention, where (a) shows the phase of movement of two microfluids in a microchannel, (b) shows two liquids flowing to both ends of an electrode, and (c) shows the completion of mixing of the two liquids.
Figure 2 is a cross-sectional view a-a' of a microfluidic mixing device with electrowetting valves.
Detailed Description
The present invention is described in further detail below with reference to the accompanying drawings.
The first liquid 7 and the second liquid 8 to be mixed are put into the two through holes, and the first liquid 7 and the second liquid 8 automatically move to the two sides of the first electrode 5 along the elongated channel and stop due to the action of capillary force. After the switch between the first electrode 5 and the second electrode 6 is closed, the first electrode becomes a hydrophilic surface due to the action of electrowetting, so that the first liquid 7 and the second liquid 8 flow into the middle elongated channel from the gap between the two groups of micro-column arrays 2 to be smoothly mixed, and the spontaneous flow and mixing control of the micro-fluid are realized.
The invention realizes the spontaneous flow and mixing control of the microfluid, does not need an additional infusion pump, and has important significance for the miniaturization and the simplification of the microfluidic device.
With reference to fig. 1 and 2, the microfluidic mixing device with electrowetting valves includes an upper substrate 1, a lower substrate 3, a dielectric layer 4, a first electrode 5, a power supply, a switch, a second electrode 6, and two sets of micro-column arrays 2;
the bottom surface of the upper substrate 1 is provided with a strip-shaped groove, the two groups of micro-column arrays 2 are symmetrically arranged in the strip-shaped groove along the central axis of the strip-shaped groove and divide the strip-shaped groove into three strip-shaped channels, the upper substrate 1 fixes the top surface of the lower substrate 3, the three strip-shaped channels between the two groups of micro-column arrays are sealed channels, the first electrode 5 is fully paved on the strip-shaped channel in the middle and fixed on the lower substrate 3, the top surface of the first electrode 5 is coated with a dielectric layer 4, the dielectric layer 4 is made of hydrophobic materials such as PDMS, which is the key for realizing the function of a mixer, the second electrode 6 is arranged at one end of any one of the strip-shaped channels on the two sides, the second electrode 6 and the first electrode 5 are connected at the two ends of a power supply and are switched on and off through switch control, and the upper substrate 1 is provided with two through holes which are respectively communicated with the end parts of the strip-shaped channels on the two sides, .
The upper substrate 1 and the micro-column array 2 are both made of polymer materials, and the polymer materials can be PDMS. The lower substrate 3 is a glass substrate. The micro-column array 2 is composed of a plurality of columns which are arranged at intervals.
The supply voltage is less than 15V.
A method of controlling a microfluidic mixing device having an electrowetting valve, the method comprising the steps of:
And 2, when a small voltage is connected between the first electrode 5 and the second electrode 6, the first electrode 5 becomes a hydrophilic surface due to the action of electrowetting, so that the first liquid 7 and the second liquid 8 are smoothly mixed into a mixed liquid 9.
The manufacturing process of the microfluid mixing device with the point wetting valve comprises the following steps:
1. the upper substrate 1 and the two groups of micro-column arrays 2 are prepared by a soft lithography method, and PDMS is selected as a material.
2. The first electrode 5 and the second electrode 6 are manufactured on the lower substrate 3 by using a metal coating and wet etching method, and the electrode material can be copper, aluminum or gold.
3. The hydrophobic layer 4 is modified on the first electrode 5, and the material of the hydrophobic layer 4 can be PDMS, perfluorododecanethiol and the like.
4. The upper substrate 1 and the two groups of micro-column arrays 2 are processed by plasma and then are pressed to be combined with the lower substrate 3 to form a micro-channel.
The invention has the advantages that no additional infusion pump is needed, and the structure of the microfluidic device is simplified. The microfluid mixing device with the electrowetting valve has wide application prospect in the fields of chemical analysis, biomedicine and the like.
Claims (8)
1. A microfluidic mixing device having an electrowetting valve, characterized in that: the hydrophilic microfluidic channel is combined with the electrowetting valve, and the microfluidic mixing is controlled by the capillary phenomenon and the electrowetting principle;
the microfluidic mixing device with electrowetting valves is characterized in that: the micro-column array comprises an upper substrate (1), a lower substrate (3), a dielectric layer (4), a first electrode (5), a power supply, a switch, a second electrode (6) and two groups of micro-column arrays (2); the bottom surface of the upper substrate (1) is provided with a strip-shaped groove, the two groups of micro-column arrays (2) are symmetrically arranged in the strip-shaped groove along the central axis of the strip-shaped groove, the strip-shaped groove is divided into three strip-shaped channels, the upper substrate (1) is fixed on the top surface of the lower substrate (3), the three strip-shaped channels between the upper substrate and the lower substrate are sealing channels, the first electrode (5) is fully paved on the strip-shaped channel in the middle, and fixed on the lower substrate (3), the top surface of the first electrode (5) is coated with a dielectric layer (4), the second electrode (6) is arranged at one end of any one of the strip-shaped channels at two sides, the second electrode (6) and the first electrode (5) are connected at two ends of a power supply, and the power on and off are controlled by a switch, and two through holes are arranged on the upper substrate (1) and are respectively communicated with the end parts of the strip-shaped channels positioned at the two sides.
2. The microfluidic mixing device with an electrowetting valve according to claim 1, wherein: the upper substrate (1) and the micro-column array (2) are both made of polymer materials, and the lower substrate (3) is a glass substrate.
3. The microfluidic mixing device with an electrowetting valve according to claim 2, wherein: PDMS is adopted as the polymer material.
4. The microfluidic mixing device with an electrowetting valve according to claim 1, wherein: the first electrode (5) is a hydrophobic surface after being coated with the dielectric layer (4), and the dielectric layer (4) is made of a hydrophobic material with a high dielectric constant.
5. The microfluidic mixing device with an electrowetting valve according to claim 4, wherein: PDMS is adopted as the dielectric layer (4).
6. The microfluidic mixing device with an electrowetting valve according to claim 1, wherein: the micro-column array (2) is composed of a plurality of columns which are arranged at intervals.
7. The microfluidic mixing device with an electrowetting valve according to claim 1, wherein: the supply voltage is less than 15V.
8. A method of controlling a microfluidic mixing device with an electrowetting valve according to any of claims 1 to 7, wherein: the method comprises the following steps:
step 1, placing a first liquid (7) and a second liquid (8) to be mixed into two through holes, wherein the first liquid (7) and the second liquid (8) automatically move to two sides of a first electrode (5) along a strip-shaped channel to stop due to the action of capillary force;
and 2, after a switch between the first electrode (5) and the second electrode (6) is closed, the first electrode (5) is changed into a hydrophilic surface due to the action of electrowetting, so that the first liquid (7) and the second liquid (8) flow into the middle strip-shaped channel from the gap between the two groups of micro-column arrays (2) and are smoothly mixed.
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| CN110645408B (en) * | 2019-11-08 | 2021-04-02 | 广州大学 | Electrowetting-driven liquid drop micro-valve liquid circulation control device |
| CN113634293B (en) * | 2021-08-09 | 2023-02-28 | 复旦大学 | Light-operated all-inorganic EWOD device |
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| CN101663089A (en) * | 2007-04-04 | 2010-03-03 | 微点生物技术有限公司 | micromachined electrowetting microfluidic valve |
| CN102980930A (en) * | 2012-12-17 | 2013-03-20 | 江苏科技大学 | Preparation method of electric wettability electrode |
| CN103075573A (en) * | 2012-12-31 | 2013-05-01 | 苏州汶颢芯片科技有限公司 | Micro-fluidic chip-based electric field response micro valve and preparation method thereof |
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| CN103657748A (en) * | 2012-09-25 | 2014-03-26 | 中国科学院理化技术研究所 | Printing type paper microfluid chip and manufacture method thereof |
| CN104144748A (en) * | 2013-01-09 | 2014-11-12 | 泰肯贸易股份公司 | Disposable cartridge for microfluidics systems |
| EP2945741A1 (en) * | 2013-01-17 | 2015-11-25 | Technion Research & Development Foundation Ltd. | Microfluidic device and method thereof |
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Patent Citations (8)
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| CN101663089A (en) * | 2007-04-04 | 2010-03-03 | 微点生物技术有限公司 | micromachined electrowetting microfluidic valve |
| CN103657748A (en) * | 2012-09-25 | 2014-03-26 | 中国科学院理化技术研究所 | Printing type paper microfluid chip and manufacture method thereof |
| CN102980930A (en) * | 2012-12-17 | 2013-03-20 | 江苏科技大学 | Preparation method of electric wettability electrode |
| CN103075573A (en) * | 2012-12-31 | 2013-05-01 | 苏州汶颢芯片科技有限公司 | Micro-fluidic chip-based electric field response micro valve and preparation method thereof |
| CN104144748A (en) * | 2013-01-09 | 2014-11-12 | 泰肯贸易股份公司 | Disposable cartridge for microfluidics systems |
| EP2945741A1 (en) * | 2013-01-17 | 2015-11-25 | Technion Research & Development Foundation Ltd. | Microfluidic device and method thereof |
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