CN109791374A - 显影液回收系统 - Google Patents
显影液回收系统 Download PDFInfo
- Publication number
- CN109791374A CN109791374A CN201780060322.7A CN201780060322A CN109791374A CN 109791374 A CN109791374 A CN 109791374A CN 201780060322 A CN201780060322 A CN 201780060322A CN 109791374 A CN109791374 A CN 109791374A
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- CN
- China
- Prior art keywords
- developer solution
- development
- storage tank
- liquid storage
- outlet
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Abstract
提供了显影液回收系统,该系统包括:显影液储罐,所述显影液储罐具有显影液入口和显影液出口;显影机,所述显影机具有显影液喷头、印版入口和显影后液出口,所述显影液喷头与所述显影液出口相连,所述显影后液出口与所述显影液储罐相连;显影液回收罐,所述显影液回收罐具有显影回收液入口和显影回收液出口,所述显影液入口与所述显影液储罐相连;光刻胶过滤装置,所述光刻胶过滤装置具有回收液入口、过滤后液出口和光刻胶出口,所述回收液入口与所述显影回收液出口相连,所述过滤后液出口与所述显影液入口相连,所述显影液回收罐上的出液口和所述光刻胶出口中的至少之一与所述显影液储罐相连。
Description
PCT国内申请,说明书已公开。
Claims (8)
- PCT国内申请,权利要求书已公开。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/CN2017/098669 WO2019036936A1 (zh) | 2017-08-23 | 2017-08-23 | 显影液回收系统 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN109791374A true CN109791374A (zh) | 2019-05-21 |
CN109791374B CN109791374B (zh) | 2022-05-17 |
Family
ID=65438581
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201780060322.7A Active CN109791374B (zh) | 2017-08-23 | 2017-08-23 | 显影液回收系统 |
Country Status (2)
Country | Link |
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CN (1) | CN109791374B (zh) |
WO (1) | WO2019036936A1 (zh) |
Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040067453A1 (en) * | 2002-09-27 | 2004-04-08 | Chiao-Chung Huang | System and method for recycling developer solution containing tetra-methyl-ammonia hydroxide (TMAH) |
KR20040042875A (ko) * | 2002-11-15 | 2004-05-20 | 동경 엘렉트론 주식회사 | 현상방법 및 현상장치 |
CN203433266U (zh) * | 2013-08-06 | 2014-02-12 | 杭州格林达化学有限公司 | 一种显影液中光刻胶树脂回收再利用装置 |
CN203433267U (zh) * | 2013-08-06 | 2014-02-12 | 杭州格林达化学有限公司 | 显影液中光刻胶树脂回收再利用装置 |
CN105353591A (zh) * | 2015-11-05 | 2016-02-24 | 刘幸 | 一种用于回收涂布机管道内光刻胶的装置 |
CN106371295A (zh) * | 2015-07-22 | 2017-02-01 | 株式会社平间理化研究所 | 显影液的管理方法及装置 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5753135A (en) * | 1995-10-23 | 1998-05-19 | Jablonsky; Julius James | Apparatus and method for recovering photoresist developers and strippers |
CN100555084C (zh) * | 2005-11-21 | 2009-10-28 | 友达光电股份有限公司 | 显影液成分调整方法及其显影系统 |
US9360758B2 (en) * | 2013-12-06 | 2016-06-07 | Taiwan Semiconductor Manufacturing Company, Ltd. | Semiconductor device process filter and method |
CN104846377A (zh) * | 2015-06-02 | 2015-08-19 | 成都虹华环保科技股份有限公司 | 一种全自动蚀刻液回收装置 |
-
2017
- 2017-08-23 CN CN201780060322.7A patent/CN109791374B/zh active Active
- 2017-08-23 WO PCT/CN2017/098669 patent/WO2019036936A1/zh active Application Filing
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20040067453A1 (en) * | 2002-09-27 | 2004-04-08 | Chiao-Chung Huang | System and method for recycling developer solution containing tetra-methyl-ammonia hydroxide (TMAH) |
KR20040042875A (ko) * | 2002-11-15 | 2004-05-20 | 동경 엘렉트론 주식회사 | 현상방법 및 현상장치 |
CN203433266U (zh) * | 2013-08-06 | 2014-02-12 | 杭州格林达化学有限公司 | 一种显影液中光刻胶树脂回收再利用装置 |
CN203433267U (zh) * | 2013-08-06 | 2014-02-12 | 杭州格林达化学有限公司 | 显影液中光刻胶树脂回收再利用装置 |
CN106371295A (zh) * | 2015-07-22 | 2017-02-01 | 株式会社平间理化研究所 | 显影液的管理方法及装置 |
CN105353591A (zh) * | 2015-11-05 | 2016-02-24 | 刘幸 | 一种用于回收涂布机管道内光刻胶的装置 |
Also Published As
Publication number | Publication date |
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CN109791374B (zh) | 2022-05-17 |
WO2019036936A1 (zh) | 2019-02-28 |
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